JP2007201440A5 - - Google Patents
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- Publication number
- JP2007201440A5 JP2007201440A5 JP2006345202A JP2006345202A JP2007201440A5 JP 2007201440 A5 JP2007201440 A5 JP 2007201440A5 JP 2006345202 A JP2006345202 A JP 2006345202A JP 2006345202 A JP2006345202 A JP 2006345202A JP 2007201440 A5 JP2007201440 A5 JP 2007201440A5
- Authority
- JP
- Japan
- Prior art keywords
- silicide layer
- metal silicide
- image data
- layer
- hue
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims 40
- 239000002184 metal Substances 0.000 claims 40
- 229910021332 silicide Inorganic materials 0.000 claims 36
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 36
- 239000004065 semiconductor Substances 0.000 claims 24
- 238000007689 inspection Methods 0.000 claims 11
- 230000015572 biosynthetic process Effects 0.000 claims 8
- 238000003384 imaging method Methods 0.000 claims 6
- 239000010408 film Substances 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910021334 nickel silicide Inorganic materials 0.000 claims 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical group [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910021341 titanium silicide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006345202A JP4912138B2 (ja) | 2005-12-28 | 2006-12-22 | 半導体装置の製造方法、半導体検査装置、及びプログラム |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005378220 | 2005-12-28 | ||
| JP2005378220 | 2005-12-28 | ||
| JP2006345202A JP4912138B2 (ja) | 2005-12-28 | 2006-12-22 | 半導体装置の製造方法、半導体検査装置、及びプログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007201440A JP2007201440A (ja) | 2007-08-09 |
| JP2007201440A5 true JP2007201440A5 (enExample) | 2010-01-28 |
| JP4912138B2 JP4912138B2 (ja) | 2012-04-11 |
Family
ID=38455654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006345202A Expired - Fee Related JP4912138B2 (ja) | 2005-12-28 | 2006-12-22 | 半導体装置の製造方法、半導体検査装置、及びプログラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4912138B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5424163B2 (ja) * | 2009-05-26 | 2014-02-26 | 独立行政法人海上技術安全研究所 | 膜厚計測方法、膜厚計測装置およびプログラム |
| JP7040869B2 (ja) * | 2017-07-28 | 2022-03-23 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置、及び基板処理装置の部品検査方法 |
| JP2021536594A (ja) * | 2018-08-27 | 2021-12-27 | ケーエルエー コーポレイション | 光学システム内の保護剤としての蒸気及び寿命延長装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3037922B2 (ja) * | 1997-11-07 | 2000-05-08 | 松下電子工業株式会社 | シリコン含有層の評価方法及びシリサイド層の形成工程の管理方法 |
| KR100366613B1 (ko) * | 1999-10-06 | 2003-01-06 | 삼성전자 주식회사 | 박막두께 측정방법 및 이를 적용한 장치 |
| JP4463600B2 (ja) * | 2003-03-26 | 2010-05-19 | 株式会社半導体エネルギー研究所 | 評価方法 |
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2006
- 2006-12-22 JP JP2006345202A patent/JP4912138B2/ja not_active Expired - Fee Related