JP2007198744A - Piezoelectric acceleration sensor - Google Patents

Piezoelectric acceleration sensor Download PDF

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JP2007198744A
JP2007198744A JP2006014120A JP2006014120A JP2007198744A JP 2007198744 A JP2007198744 A JP 2007198744A JP 2006014120 A JP2006014120 A JP 2006014120A JP 2006014120 A JP2006014120 A JP 2006014120A JP 2007198744 A JP2007198744 A JP 2007198744A
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piezoelectric
acceleration sensor
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calibration
piezoelectric acceleration
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JP5110796B2 (en
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Takashi Sakai
孝 坂井
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Akebono Brake Industry Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric acceleration sensor used for measuring minute vibration, resisting impact, and moreover self-diagnosing. <P>SOLUTION: A piezoelectric plate 41 is provided on a part of an inner wall of a case 104 for therein housing a piezoelectric element 102 and a weight 103 provided on the piezoelectric element 102, with the piezoelectric plate 41 having piezoelectric ceramics mounted on a metallic plate for converting an electric signal into mechanical vibration. This makes it possible to perform failure diagnosis and calibration on sensor itself while making it possible to materialize the piezoelectric acceleration sensor capable of measuring minute vibration, resisting impact, and moreover capable of self-diagnosis. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、橋脚や建物の常時微振動を計測するヘルスモニタリングシステムに用いて好適な圧電型加速度センサに関する。   The present invention relates to a piezoelectric acceleration sensor suitable for use in a health monitoring system that measures micro vibrations of a bridge pier or a building at all times.

近年、橋脚や建物の常時微振動を計測してヘルスモニタリングを行う手法が実用化されてきている。
図３は、従来の地盤の強度劣化を測定するためのヘルスモニタリングシステムの概略構成を示すブロック図である。橋脚１の先端部分には、せん断型の圧電型加速度センサ１０が設置されている。圧電型加速度センサ１０の出力信号がアンプ１１で増幅された後、ＦＦＴ(Fast Fourier Transform)アナライザ１２で出力信号中の周波数成分が抽出され、その結果が固有値解析部１３で解析される。
図４は、圧電型加速度センサ１０の概略構成図である。中央部分に支持部１０１ａを有するベース部１０１と、ベース部１０１の支持部１０１ａ上に固定された圧電素子１０２と、圧電素子１０２の上面に取り付けられた錘１０３と、ベース部１０１上に配置されて圧電素子１０２及び錘１０３を覆うケース１０４とから構成されている。
図５は、圧電型加速度センサ１０により固有振動数を測定した結果の一例を示す波形図である。この場合、横軸は周波数（Ｈｚ）、縦軸は加速度(ｍ／ｓ２)である。 In recent years, methods for monitoring health by measuring microvibrations at bridge piers and buildings have been put into practical use.
FIG. 3 is a block diagram showing a schematic configuration of a health monitoring system for measuring the strength deterioration of the conventional ground. A shear type piezoelectric acceleration sensor 10 is installed at the tip of the pier 1. After the output signal of the piezoelectric acceleration sensor 10 is amplified by the amplifier 11, a frequency component in the output signal is extracted by an FFT (Fast Fourier Transform) analyzer 12, and the result is analyzed by the eigenvalue analysis unit 13.
FIG. 4 is a schematic configuration diagram of the piezoelectric acceleration sensor 10. A base portion 101 having a support portion 101a at the center portion, a piezoelectric element 102 fixed on the support portion 101a of the base portion 101, a weight 103 attached to the upper surface of the piezoelectric element 102, and a base portion 101 are disposed. And a case 104 that covers the piezoelectric element 102 and the weight 103.
FIG. 5 is a waveform diagram showing an example of the result of measuring the natural frequency by the piezoelectric acceleration sensor 10. In this case, the horizontal axis represents frequency (Hz) and the vertical axis represents acceleration (m / s 2 ).

ところで、微振動の計測に用いられる加速度センサには、圧電型（特許文献１）やサーボ型（特許文献２）がある。また、感度が低く微振動の計測には向かないが、半導体加速度センサもある（特許文献３、特許文献４参照）。また、加速度センサは衝撃等で過大な加速度が加わると壊れることがあるので、自己診断を可能としたものもある。
特許文献２〜４で開示された半導体加速度センサは、全て自己診断を可能とする手段を有している。すなわち、特許文献２で開示されたサーボ型加速度センサは、サーボ制御系の一部をスイッチによりオフ状態にして、センサのゲージ部の電圧を強制的に変えることでセンサの出力状態を変え、この電圧よりセンサの診断を可能にしている。
特許文献３で開示された半導体加速度センサは、図６の斜視図に示すように、加速度センサ２０をベースプレート２１上に配置するとともに圧電振動子２２を加速度センサ２０に近接配置し、圧電振動子２２に不図示の発振回路の出力信号（交流電圧）を印加して振動させたときの加速度センサ２０から出力信号と発振回路の出力信号とを比較して正常か否かを判定する。
特許文献４で開示された圧電型の加速度センサは、図７の斜視図に示すように、起歪部３０の少なくとも一面に薄膜圧電材料３１を装着し、この薄膜圧電材料３１に電圧を印加することで、重り部３２を圧電駆動可能とし、擬似的に重り部３２に加速度が加わった状態を作り出すことで、センサが正常に動作しているか否かを判定する。 By the way, there are a piezoelectric type (Patent Document 1) and a servo type (Patent Document 2) as an acceleration sensor used for measuring fine vibrations. In addition, there are semiconductor acceleration sensors (see Patent Document 3 and Patent Document 4), although the sensitivity is low and it is not suitable for measurement of micro vibrations. In addition, some acceleration sensors can be self-diagnosed because they may break if excessive acceleration is applied due to impact or the like.
The semiconductor acceleration sensors disclosed in Patent Documents 2 to 4 all have means for enabling self-diagnosis. That is, the servo-type acceleration sensor disclosed in Patent Document 2 changes the output state of the sensor by forcing a part of the servo control system to be turned off by a switch and forcibly changing the voltage of the gauge part of the sensor. The sensor can be diagnosed from the voltage.
In the semiconductor acceleration sensor disclosed in Patent Document 3, as shown in the perspective view of FIG. 6, the acceleration sensor 20 is disposed on the base plate 21 and the piezoelectric vibrator 22 is disposed close to the acceleration sensor 20. An output signal (AC voltage) from an oscillation circuit (not shown) is applied to the acceleration sensor 20, and the output signal from the acceleration sensor 20 is compared with the output signal from the oscillation circuit to determine whether it is normal.
As shown in the perspective view of FIG. 7, the piezoelectric acceleration sensor disclosed in Patent Document 4 has a thin film piezoelectric material 31 mounted on at least one surface of the strain generating portion 30 and applies a voltage to the thin film piezoelectric material 31. Thus, it is possible to determine whether or not the sensor is operating normally by making the weight portion 32 piezo-electrically driven and creating a state in which acceleration is applied to the weight portion 32 in a pseudo manner.

特開平２−０９３３７０号公報JP-A-2-093370 特開平５−１７２８４４号公報JP-A-5-172844 特開平６−１４８２３４号公報JP-A-6-148234 特開平５−３２２９２７号公報JP-A-5-322927

しかしながら、微振動の計測に用いられる加速度センサとしては、加速度レベルが９．８×１０−５ｍ／ｓ２以下の振動を扱うことが多いため、超高感度のサーボ型の加速度センサが使用される場合が多いが、サーボ型の加速度センサは、カンチレバー等の精密機械構造があるために衝撃には弱く、衝撃等により破損した場合に、特に設置場所が橋脚の先端部分など高所部での交換を頻繁に行うことは困難である。
一方、圧電型の加速度センサは、サーボ型の加速度センサほどではないものの微振動の計測には十分対応でき、しかも衝撃に対しては強いという利点はある。しかし、現状では自己診断を可能とする手段を有しているものはない。
半導体加速度センサは感度が低く微振動の計測には対応できない。また、半導体加速度センサは、特許文献３や４で開示されているように、自己診断を可能とする手段は有しているものの、特許文献３で開示された半導体加速度センサは、センサそのものと圧電振動子２２を配置するための新たなベースプレート２１を有しているので、その分、全体として形状が大きくなり、またコストも嵩むことになる。また、特許文献４で開示された半導体加速度センサは、セル自体に薄膜圧電材料３１を設けるので、設計段階からの変更が必要となる。 However, as an acceleration sensor used for measuring fine vibrations, a vibration sensor with an acceleration level of 9.8 × 10 −5 m / s 2 or less is often handled, and therefore an ultra-sensitive servo type acceleration sensor is used. However, servo-type accelerometers are sensitive to impacts due to the precision mechanical structure such as cantilevers, and when they are damaged by impacts, etc., the installation location is particularly high at the top of the pier. It is difficult to exchange frequently.
On the other hand, the piezoelectric acceleration sensor has an advantage that it can sufficiently cope with the measurement of microvibration and is resistant to impact, although not as much as the servo acceleration sensor. However, there is currently no means that enables self-diagnosis.
The semiconductor acceleration sensor has low sensitivity and cannot cope with the measurement of slight vibration. Further, as disclosed in Patent Documents 3 and 4, the semiconductor acceleration sensor has a means for enabling self-diagnosis, but the semiconductor acceleration sensor disclosed in Patent Document 3 includes the sensor itself and the piezoelectric sensor. Since the new base plate 21 for arranging the vibrator 22 is provided, the overall shape becomes large and the cost increases accordingly. Moreover, since the semiconductor acceleration sensor disclosed in Patent Document 4 is provided with the thin film piezoelectric material 31 in the cell itself, a change from the design stage is required.

この発明は係る事情に鑑みてなされたものであり、微振動の計測が可能でかつ衝撃に強く、しかも自己診断が可能な圧電型加速度センサを提供することを目的とする。   The present invention has been made in view of such circumstances, and an object of the present invention is to provide a piezoelectric acceleration sensor that can measure micro vibrations, is strong against impact, and can perform self-diagnosis.

上記目的は下記構成により達成される。
（１） 本発明の圧電型加速度センサは、圧電素子と、前記圧電素子に設けられる錘と、前記圧電素子及び前記錘を収容するケースと、前記ケース内の任意の箇所に設けられ、圧電セラミックスを含む電気信号を機械振動に変換するデバイスとを備える。 The above object is achieved by the following configuration.
(1) A piezoelectric acceleration sensor according to the present invention includes a piezoelectric element, a weight provided on the piezoelectric element, a case housing the piezoelectric element and the weight, and a piezoelectric ceramic provided at an arbitrary position in the case. And a device for converting an electrical signal including mechanical vibration into mechanical vibration.

（２） 本発明の微振動計測装置は、上記（１）に記載の圧電型加速度センサと、前記圧電型加速度センサの前記圧電素子からの電荷信号を電圧信号に変換するチャージアンプと、通常計測時には、前記チャージアンプからの電圧信号に対して信号処理を行って計測データを取得し、前記圧電型加速度センサの故障診断や校正時には、キャリブレーション信号を発生して前記圧電型加速度センサの前記デバイスに印加すると共に、前記チャージアンプからの電圧信号に対して信号処理を行って得られた計測データと前記キャリブレーション信号とを比較して前記圧電型加速度センサの故障診断や校正を行う計測部とを備える。 (2) A micro-vibration measuring device according to the present invention includes the piezoelectric acceleration sensor according to (1), a charge amplifier that converts a charge signal from the piezoelectric element of the piezoelectric acceleration sensor into a voltage signal, and normal measurement. Sometimes, the voltage signal from the charge amplifier is subjected to signal processing to obtain measurement data, and at the time of failure diagnosis or calibration of the piezoelectric acceleration sensor, a calibration signal is generated to generate the device of the piezoelectric acceleration sensor A measurement unit for performing fault diagnosis and calibration of the piezoelectric acceleration sensor by comparing measurement data obtained by performing signal processing on the voltage signal from the charge amplifier and the calibration signal. Is provided.

（３） 本発明のヘルスモニタリングシステムは、橋脚や建物における常時微振動を計測するヘルスモニタリングシステムにおいて、上記（２）に記載の微振動計測装置を備える。 (3) The health monitoring system of the present invention is a health monitoring system that constantly measures micro-vibration on a pier or a building, and includes the micro-vibration measuring device described in (2) above.

上記（１）に記載の圧電型加速度センサでは、圧電型加速度センサ自身を加振するデバイスを備えているので、センサ自体の故障診断や校正が可能となる。すなわち、微振動の計測が可能でかつ衝撃に強く、しかも自己診断が可能な圧電型加速度センサを実現できる。   The piezoelectric acceleration sensor described in (1) above includes a device that vibrates the piezoelectric acceleration sensor itself, so that failure diagnosis and calibration of the sensor itself can be performed. That is, it is possible to realize a piezoelectric acceleration sensor that can measure microvibration, is resistant to impact, and can perform self-diagnosis.

上記（２）に記載の微振動計測装置では、上記（１）に記載の圧電型加速度センサを有しているので、該圧電型加速度センサの故障診断や校正の際に、取り外すことなくそのままの状態でデバイスにキャリブレーション信号を印加するだけで済む。すなわち、圧電型加速度センサの故障診断や校正を容易に行うことができる。   The micro-vibration measuring device described in (2) above has the piezoelectric acceleration sensor described in (1) above, so that it can be left as it is without being removed during failure diagnosis or calibration of the piezoelectric acceleration sensor. All you need to do is apply a calibration signal to the device. That is, failure diagnosis and calibration of the piezoelectric acceleration sensor can be easily performed.

上記（３）に記載のヘルスモニタリングシステムでは、上記（２）に記載の微振動計測装置を有しているので、上記（２）と同様の効果が得られる。   Since the health monitoring system described in (3) includes the micro vibration measuring device described in (2), the same effect as in (2) can be obtained.

以下、本発明を実施するための好適な実施形態について、図面を参照して詳細に説明する。
図１は、本発明の一実施形態に係る圧電型加速度センサの構造を示す断面図である。なお、図１において、前述した図４と共通する部分には同一の符号を付ける。
本実施の態の圧電型加速度センサ４０は、せん断型の圧電型加速度センサであり、中央部分に支持部１０１ａを有するベース部１０１と、支持部１０１ａ上に固定された圧電素子１０２と、圧電素子１０２の上面に取り付けられた錘１０３と、ベース部１０１上に配置されて圧電素子１０２及び錘１０３を覆うケース１０４と、ケース１０４の内側の上面に取り付けられた圧電プレート４１とを備えて構成される。
圧電プレート４１は、圧電セラミックスを図示略の金属板上に取り付けてなるものである。この圧電プレート４１には、外部より電気信号が供給される。本発明では、圧電プレート４１にてセンサ本体を加振して故障診断や校正を行うので、圧電プレート４１に供給する電気信号をキャリブレーション信号と呼ぶ。このキャリブレーション信号を圧電プレート４１に供給するための配線がセンサ本体から引き出されている。 DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments for carrying out the invention will be described in detail with reference to the drawings.
FIG. 1 is a sectional view showing the structure of a piezoelectric acceleration sensor according to an embodiment of the present invention. In FIG. 1, parts that are the same as those in FIG.
The piezoelectric acceleration sensor 40 according to the present embodiment is a shear-type piezoelectric acceleration sensor, and includes a base portion 101 having a support portion 101a at a central portion, a piezoelectric element 102 fixed on the support portion 101a, and a piezoelectric element. 102, a weight 103 attached to the upper surface of 102, a case 104 disposed on the base portion 101 and covering the piezoelectric element 102 and the weight 103, and a piezoelectric plate 41 attached to the upper surface inside the case 104. The
The piezoelectric plate 41 is formed by attaching piezoelectric ceramics on a metal plate (not shown). An electrical signal is supplied to the piezoelectric plate 41 from the outside. In the present invention, since the sensor main body is vibrated by the piezoelectric plate 41 to perform fault diagnosis and calibration, an electric signal supplied to the piezoelectric plate 41 is referred to as a calibration signal. Wiring for supplying the calibration signal to the piezoelectric plate 41 is drawn from the sensor body.

本実施形態の圧電型加速度センサ４０は、圧電素子１０２に一定の質量ｍの錘１０３を取り付けた構造を採る。圧電素子１０２は、錘１０３により慣性力Ｆを受けると電荷を生ずるものである。発生する電荷量Ｑは組成によって一定であり、式（１）のように表すことができる。
Ｑ＝Ｆ・ｄ （ｄ：圧電定数） …（１） The piezoelectric acceleration sensor 40 of the present embodiment employs a structure in which a weight 103 having a constant mass m is attached to the piezoelectric element 102. The piezoelectric element 102 generates an electric charge when it receives an inertial force F from the weight 103. The amount of charge Q generated is constant depending on the composition, and can be expressed as in equation (1).
Q = F · d (d: piezoelectric constant) (1)

また、センサ本体に与えられた加速度αと圧電素子１０２に加わる慣性力Ｆの関係は、ニュートンの第２法則よりＦ＝ｍ・αとなる。したがって、式（１）は式(２)のように表すことができる。
Ｑ＝Ｆ・ｄ＝ｍ・α・ｄ …（２）
このとき、ｄ，ｍは一定であるので、加速度αに対して発生する電荷量Ｑは一次比例する。この発生電荷量Ｑは高インピーダンスの電荷信号であるので、これを電気信号として利用する場合にはチャージアンプを使用して低インピーダンスの電圧信号に変換する。前記電荷信号を外部から取り込めるようにするための配線がセンサ本体から引き出されている。 The relationship between the acceleration α applied to the sensor body and the inertial force F applied to the piezoelectric element 102 is F = m · α according to Newton's second law. Therefore, Expression (1) can be expressed as Expression (2).
Q = F · d = m · α · d (2)
At this time, since d and m are constant, the charge amount Q generated with respect to the acceleration α is linearly proportional. Since this generated charge amount Q is a high impedance charge signal, when it is used as an electrical signal, it is converted into a low impedance voltage signal using a charge amplifier. Wiring for taking in the charge signal from the outside is drawn out from the sensor body.

通常、圧電型加速度センサ４０を常時微振動の計測で必要な９．８×１０−５ｍ／ｓ２以下の加速度レベルで使用する場合、圧電素子１０２の感度は静電容量が３０００ｐＦ程度、錘１０３の質量は２００〜３００ｇ程度に設定し、感度は４００〜５００ｐＣ／(ｍ／ｓ２)程度に設定する。 Normally, when the piezoelectric acceleration sensor 40 is used at an acceleration level of 9.8 × 10 −5 m / s 2 or less, which is always necessary for measurement of slight vibration, the sensitivity of the piezoelectric element 102 is about 3000 pF in capacitance, The mass of 103 is set to about 200 to 300 g, and the sensitivity is set to about 400 to 500 pC / (m / s 2 ).

図２は、圧電型加速度センサ４０を使用して微振動計測を行う微振動計測装置の概略構成を示すブロック図である。同図において、通常の微振動計測は、圧電型加速度センサ４０の圧電素子１０２からの電荷信号がチャージアンプ５０にて電圧信号に変換された後、フィルタ５１にて外乱ノイズが排除されて計測部５２に入力される。計測部５２は、マイクロコンピュータを備えており、このマイクロコンピュータで信号処理を行って計測データを取得する。   FIG. 2 is a block diagram illustrating a schematic configuration of a microvibration measuring apparatus that performs microvibration measurement using the piezoelectric acceleration sensor 40. In the figure, in the normal microvibration measurement, after the charge signal from the piezoelectric element 102 of the piezoelectric acceleration sensor 40 is converted into a voltage signal by the charge amplifier 50, disturbance noise is eliminated by the filter 51, and the measurement unit 52 is input. The measurement unit 52 includes a microcomputer, and performs signal processing with the microcomputer to acquire measurement data.

一方、圧電型加速度センサ４０の故障診断や校正時には、計測部５２から定期的にキャリブレーション信号が出力される。計測部５２から出力されたキャリブレーション信号はアンプ５３にて増幅された後、圧電型加速度センサ４０の圧電プレート４１に印加される。圧電プレート４１は、キャリブレーション信号が印加されることで、キャリブレーション信号に同期して振動し、センサ本体を加振する。その振動に応じた電荷信号が圧電素子１０２から出力されてチャージアンプ５０で電圧信号に変換された後、フィルタ５１を通過して計測部５２に入力される。そして、計測部５２のマイクロコンピュータにて信号処理が行われ、その計測データがキャリブレーション信号と比較されて、圧電型加速度センサ４０の故障診断や校正が行われる。   On the other hand, at the time of failure diagnosis or calibration of the piezoelectric acceleration sensor 40, a calibration signal is periodically output from the measurement unit 52. The calibration signal output from the measurement unit 52 is amplified by the amplifier 53 and then applied to the piezoelectric plate 41 of the piezoelectric acceleration sensor 40. When the calibration signal is applied, the piezoelectric plate 41 vibrates in synchronization with the calibration signal and vibrates the sensor body. A charge signal corresponding to the vibration is output from the piezoelectric element 102, converted into a voltage signal by the charge amplifier 50, passes through the filter 51, and is input to the measurement unit 52. Then, signal processing is performed by the microcomputer of the measuring unit 52, the measurement data is compared with the calibration signal, and failure diagnosis and calibration of the piezoelectric acceleration sensor 40 are performed.

橋脚や建物のヘルスモニタリングシステムでは、長期間常時微振動を計測するため、加速度センサの故障診断や校正を定期的に行う必要がある。サーボ型の加速度センサは直流成分の出力が可能なため、取り付けてある現場で上下ひっくり返すことで重力加速度の９．８ｍ／ｓ２の校正が可能であるが、前述したようにサーボ型は衝撃に弱く壊れやすいので、メンテナンスが面倒である。これに対して、圧電型加速度センサは、衝撃に強く壊れ難い反面、直流成分の出力が得られないため、取り外して加振器に取り付けて交流成分の信号で加振して校正しなければならない。しかし、本実施の形態の圧電型加速度センサ４０は、圧電プレート４１でセンサ本体を加振するので、取り外すことなく故障診断や校正を行うことができる。したがって、本実施形態の圧電型加速度センサ４０を使用した図２に示す微振動計測装置は、そのまま橋脚や建物のヘルスモニタリングシステムとして使用することが可能である。また、本実施形態の圧電型加速度センサ４０は、既存の圧電型加速度センサ１０のケース１０４の空間内に圧電プレート４１を取り付けるだけで済むことから、新たなベースプレート２１（特許文献３、図６参照）を必要としない。また、既存のものに後付けできるので、設計段階からの変更が必要とならない（特許文献４、図７参照）。 In the pier and building health monitoring system, it is necessary to periodically diagnose and calibrate the acceleration sensor in order to measure micro vibrations for a long period of time. Since the servo type acceleration sensor can output a DC component, it is possible to calibrate the gravitational acceleration of 9.8 m / s 2 by turning it upside down at the installation site. Maintenance is troublesome because it is weak and fragile. On the other hand, the piezoelectric acceleration sensor is strong against impact and hard to break, but it cannot obtain a DC component output, so it must be removed and attached to a shaker to oscillate and calibrate with an AC component signal. . However, since the piezoelectric acceleration sensor 40 of the present embodiment vibrates the sensor main body with the piezoelectric plate 41, failure diagnosis and calibration can be performed without removing the sensor body. Therefore, the micro vibration measuring apparatus shown in FIG. 2 using the piezoelectric acceleration sensor 40 of the present embodiment can be used as it is as a health monitoring system for bridge piers or buildings. In addition, the piezoelectric acceleration sensor 40 according to the present embodiment has only to attach the piezoelectric plate 41 in the space of the case 104 of the existing piezoelectric acceleration sensor 10, so that a new base plate 21 (see Patent Document 3 and FIG. 6). ) Is not required. Moreover, since it can be retrofitted to the existing one, no change from the design stage is required (see Patent Document 4 and FIG. 7).

このように本実施形態の圧電型加速度センサ４０によれば、圧電型加速度センサ４０自身を加振するデバイスである圧電プレート４１を備えているので、センサ自体の故障診断や校正が可能となる。すなわち、微振動の計測が可能でかつ衝撃に強く、しかも自己診断が可能な圧電型加速度センサを実現できる。   Thus, according to the piezoelectric acceleration sensor 40 of the present embodiment, since the piezoelectric plate 41 which is a device for exciting the piezoelectric acceleration sensor 40 itself is provided, failure diagnosis and calibration of the sensor itself can be performed. That is, it is possible to realize a piezoelectric acceleration sensor that can measure microvibration, is resistant to impact, and can perform self-diagnosis.

また、本実施形態の圧電型加速度センサ４０を使用した微振動計測装置は、圧電型加速度センサの故障診断や校正の際に、取り外すことなくそのままの状態でデバイスにキャリブレーション信号を印加するだけで済むので、圧電型加速度センサの故障診断や校正を容易に行うことができる。   In addition, the micro vibration measuring apparatus using the piezoelectric acceleration sensor 40 of the present embodiment simply applies a calibration signal to the device as it is without removing it when diagnosing or calibrating the piezoelectric acceleration sensor. Therefore, failure diagnosis and calibration of the piezoelectric acceleration sensor can be easily performed.

本発明は、微振動の計測が可能でかつ衝撃に強く、しかも自己診断が可能であるといった効果を有し、橋脚や建物のヘルスモニタリングシステムへの適用が可能である。   The present invention has the effects of being able to measure micro vibrations, being resistant to impacts, and capable of self-diagnosis, and can be applied to a pier or building health monitoring system.

本発明の一実施形態に係る圧電型加速度センサの構造を示す断面図である。It is sectional drawing which shows the structure of the piezoelectric acceleration sensor which concerns on one Embodiment of this invention. 本発明の一実施形態に係る圧電型加速度センサを用いた微振動計測装置の概略構成を示すブロック図である。1 is a block diagram showing a schematic configuration of a microvibration measurement device using a piezoelectric acceleration sensor according to an embodiment of the present invention. 従来のヘルスモニタリングシステムの概略構成を示すブロック図である。It is a block diagram which shows schematic structure of the conventional health monitoring system. 従来の圧電型加速度センサの構造を示す断面図である。It is sectional drawing which shows the structure of the conventional piezoelectric acceleration sensor. 従来の圧電型加速度センサにおける固有振動数を測定した結果の一例を示す波形図である。It is a wave form diagram which shows an example of the result of having measured the natural frequency in the conventional piezoelectric acceleration sensor. 従来の自己診断機能を備えた半導体加速度センサの外観を示す斜視図である。It is a perspective view which shows the external appearance of the semiconductor acceleration sensor provided with the conventional self-diagnosis function. 従来の自己診断機能を備えた他の半導体加速度センサの外観を示す斜視図である。It is a perspective view which shows the external appearance of the other semiconductor acceleration sensor provided with the conventional self-diagnosis function.

符号の説明Explanation of symbols

４０ 圧電型加速度センサ
４１ 圧電プレート
５０ チャージアンプ
５１ フィルタ
５２ 計測部
５３ アンプ
１０１ ベース部
１０１ａ 支持部
１０２ 圧電素子
１０３ 錘 DESCRIPTION OF SYMBOLS 40 Piezoelectric acceleration sensor 41 Piezoelectric plate 50 Charge amplifier 51 Filter 52 Measurement part 53 Amplifier 101 Base part 101a Support part 102 Piezoelectric element 103 Weight

Claims (3)

圧電素子と、
前記圧電素子の上端部に設けられる錘と、
前記圧電素子及び前記錘を収容するケースと、
前記ケース内の任意の箇所に設けられ、圧電セラミックスを含む電気信号を機械振動に変換するデバイスと、
を備えた圧電型加速度センサ。 A piezoelectric element;
A weight provided at the upper end of the piezoelectric element;
A case for housing the piezoelectric element and the weight;
A device for converting an electrical signal including piezoelectric ceramics into mechanical vibration, which is provided at an arbitrary position in the case;
Piezoelectric acceleration sensor with 請求項１に記載の圧電型加速度センサと、
前記圧電型加速度センサの前記圧電素子からの電荷信号を電圧信号に変換するチャージアンプと、
通常計測時には、前記チャージアンプからの電圧信号に対して信号処理を行って計測データを取得し、前記圧電型加速度センサの故障診断や校正時には、キャリブレーション信号を発生して前記圧電型加速度センサの前記デバイスに印加すると共に、前記チャージアンプからの電圧信号に対して信号処理を行って得られた計測データと前記キャリブレーション信号とを比較して前記圧電型加速度センサの故障診断や校正を行う計測部と、
を備えた微振動計測装置。 A piezoelectric acceleration sensor according to claim 1;
A charge amplifier that converts a charge signal from the piezoelectric element of the piezoelectric acceleration sensor into a voltage signal;
During normal measurement, signal processing is performed on the voltage signal from the charge amplifier to obtain measurement data. During failure diagnosis or calibration of the piezoelectric acceleration sensor, a calibration signal is generated to Measurement that is applied to the device and compares the measurement signal obtained by performing signal processing on the voltage signal from the charge amplifier and the calibration signal to perform fault diagnosis and calibration of the piezoelectric acceleration sensor And
Microvibration measuring device with 橋脚や建物における常時微振動を計測するヘルスモニタリングシステムにおいて、
請求項２に記載の微振動計測装置を備えたヘルスモニタリングシステム。 In a health monitoring system that measures micro-vibrations at bridge piers and buildings
A health monitoring system comprising the microvibration measuring device according to claim 2.
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