JP2007189083A - 窒化酸化シリコン膜の組成評価方法及び物性評価方法 - Google Patents
窒化酸化シリコン膜の組成評価方法及び物性評価方法 Download PDFInfo
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- JP2007189083A JP2007189083A JP2006006325A JP2006006325A JP2007189083A JP 2007189083 A JP2007189083 A JP 2007189083A JP 2006006325 A JP2006006325 A JP 2006006325A JP 2006006325 A JP2006006325 A JP 2006006325A JP 2007189083 A JP2007189083 A JP 2007189083A
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Abstract
【解決手段】本発明は、基板1上に形成された窒化酸化シリコン膜2の組成を評価する方法であって、光源としてレーザを用い、フォトルミネッセンススペクトルを計測し解析することによって、窒化酸化シリコン膜2の組成又は組成分布を評価する。
【選択図】 図1
Description
原料ガス:ジクロロシラン、亜酸化窒素、アンモニア。
総流量 :250sccm(なお、1sccm=10−6m3/分である)。
流量比 :亜酸化窒素/アンモニア=0.3〜0.95。
(ジクロロシラン:50sccm固定)
反応圧力:30Pa。
Claims (9)
- 基板上に形成された窒化酸化シリコン膜の組成を評価する方法であって、
光源としてレーザを用い、フォトルミネッセンススペクトルを計測し解析することによって、前記窒化酸化シリコン膜の組成又は組成分布を評価するようにした組成評価方法。 - 前記フォトルミネッセンススペクトルの計測において、フォトルミネッセンススペクトル強度の指標として1.7eV以上1.9eV以下、又は3.2eV以上3.4eV以下のエネルギー領域を用いる請求項1に記載の組成評価方法。
- 前記窒化酸化シリコン膜は、化学的気相成長法により作製された膜である請求項1に記載の組成評価方法。
- 前記基板を、単結晶シリコン基板又はガラス基板とした請求項1に記載の組成評価方法。
- 基板上に形成された窒化酸化シリコン膜の物性を評価する方法であって、
光源としてレーザを用い、フォトルミネッセンススペクトルを計測し解析することによって、前記窒化酸化シリコン膜の物性又は物性分布を評価するようにした物性評価方法。 - 前記物性は、応力又はガス透過率である請求項5に記載の物性評価方法。
- 前記フォトルミネッセンススペクトルの計測において、フォトルミネッセンススペクトル強度の指標として1.7eV以上1.9eV以下、又は3.2eV以上3.4eV以下のエネルギー領域を用いる請求項5に記載の物性評価方法。
- 前記窒化酸化シリコン膜は、化学的気相成長法により作製された膜である請求項5に記載の物性評価方法。
- 前記基板を、単結晶シリコン基板又はガラス基板とした請求項5に記載の物性評価方法。
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JP2006006325A JP4899120B2 (ja) | 2006-01-13 | 2006-01-13 | 窒化酸化シリコン膜の組成評価方法及び物性評価方法 |
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JP2007189083A true JP2007189083A (ja) | 2007-07-26 |
JP4899120B2 JP4899120B2 (ja) | 2012-03-21 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI601953B (zh) * | 2013-09-13 | 2017-10-11 | 神戶製鋼所股份有限公司 | Oxide semiconductor thin film evaluation device |
CN113376196A (zh) * | 2020-03-10 | 2021-09-10 | 长鑫存储技术有限公司 | 检测x射线光电子能谱仪稳定性的方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01268060A (ja) * | 1988-04-20 | 1989-10-25 | Fujitsu Ltd | 薄膜トランジスタ |
JP2004327843A (ja) * | 2003-04-25 | 2004-11-18 | Toppan Printing Co Ltd | 非晶質シリコンおよびその化合物薄膜の応力評価方法 |
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- 2006-01-13 JP JP2006006325A patent/JP4899120B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01268060A (ja) * | 1988-04-20 | 1989-10-25 | Fujitsu Ltd | 薄膜トランジスタ |
JP2004327843A (ja) * | 2003-04-25 | 2004-11-18 | Toppan Printing Co Ltd | 非晶質シリコンおよびその化合物薄膜の応力評価方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI601953B (zh) * | 2013-09-13 | 2017-10-11 | 神戶製鋼所股份有限公司 | Oxide semiconductor thin film evaluation device |
CN113376196A (zh) * | 2020-03-10 | 2021-09-10 | 长鑫存储技术有限公司 | 检测x射线光电子能谱仪稳定性的方法 |
WO2021180099A1 (zh) * | 2020-03-10 | 2021-09-16 | 长鑫存储技术有限公司 | 检测x射线光电子能谱仪稳定性的方法 |
CN113376196B (zh) * | 2020-03-10 | 2022-03-22 | 长鑫存储技术有限公司 | 检测x射线光电子能谱仪稳定性的方法 |
US11327033B1 (en) | 2020-03-10 | 2022-05-10 | Changxin Memory Technologies, Inc. | Methods for detecting stability of X-ray photoelectron spectrometer |
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