JP2007178137A - Device and method for measuring displacement amount of surface shape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve problems wherein displacement before an event is easily compared with that after the event when putting the whole surface of a sample in an exposed state generates uniform displacement but the displacement comparison becomes difficult when it generates nonuniform displacement in the case where the dimension or the like of the sample is accurately obtained before the event, and the reference becomes unclear when a sample having clear measuring reference is manufactured and no protection is performed in the exposed state. <P>SOLUTION: In the event physically or chemically accompanied by the displacement on the surface of a solid body, protection is performed during the event so that the measuring reference level does not displace, two or more grooves are formed in the solid sample of a three-dimensional shape as a measured object to be parallel with or rectangularly crossing two side surfaces of it, the solid sample is mounted on a sample table, displacement gauge tips are set on the upper surface and the side surface of the solid sample, the sample table is moved or turned to perform scan, and the groove surfaces and the upper surface whose coordinates are managed are simultaneously measured, thereby acquiring three-dimensional data before and after the event on the same coordinates of the groove surfaces and the upper surface of the sample. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention uses a cube-shaped solid sample (object to be measured) against an event that may cause displacement regardless of whether the surface is uniform or non-uniform, and completely protects a part of the state before the event. This makes it easy to compare the displacement before and after the event from the protective part, and also measures the surface shape displacement using a simple dedicated three-dimensional measuring instrument, and calculates the displacement at the same location from the result. In addition, the present invention relates to a surface shape displacement amount measuring method and a measuring apparatus for obtaining the displacement amount.

  In the present invention, when the object to be measured is measured in a grounded state where the horizontal adjustment by the contact displacement meter and the sample measurement part is incomplete, the measurement range of the contact displacement meter deviates when the measurement distance in the scanning direction becomes long. In response to the problem that a part outside the measurement range is generated in the measurement target part, by continuously scanning and measuring the groove line with excellent straightness that is the standard of the surface of the object to be measured, which is arbitrarily manufactured, before the start of measurement Calculate a coefficient that adjusts the distance between the measuring device and the object to be measured to be constant, and this coefficient increases the distance between the contact displacement meter and the reference groove line produced on the surface of the object to be measured at the same distance. The present invention relates to a measuring method of a surface shape displacement amount and a measuring apparatus for the purpose of adjusting a vertical direction and preventing deviation of a measuring range due to poor horizontal adjustment.

  An object of the present invention is to incorporate a contact displacement meter and a sample table on the same housing, reduce the relative displacement, and reduce vibrations that are harmful factors when performing high-precision displacement measurement. The present invention relates to a surface shape displacement measuring method and a measuring apparatus.

  As a method for measuring the amount of displacement, a comparison of displacement before and after the event is common, and as a method, the amount of displacement before and after the event is calculated using a sample whose dimensions are accurately processed or using a part that does not change.

As a conventional surface shape measuring method, there is a method of measuring a surface shape using a three-dimensional measuring instrument employing a contact type or a non-contact type as a displacement meter. (For example, see Patent Document 1.)
By using these three-dimensional measuring instruments, it is possible to accurately measure the surface shape of the object to be measured.

  The displacement meter has a measurement range according to the measurement model, and it is necessary to select according to the displacement of the object to be measured. Further, when continuous scanning measurement is performed in the measuring apparatus, the distance between the measuring instrument (sensor) and the object to be measured needs to maintain a highly accurate interval and parallelism during movement.

A highly functional three-dimensional measuring device includes a method in which an object to be measured is loaded on a surface plate, and a sensor head performs measurement while driving measurement of a coordinate-controlled point. In some cases, a vibration isolator having an automatic leveling function is incorporated at the bottom of the surface plate.
JP-A-6-347227

  If the dimensions of the sample are accurately grasped before the event and the entire surface of the sample is exposed, it will be easy to compare the displacement before and after the event. When this occurs, displacement comparison becomes difficult.

  In addition, when a sample with a clear measurement standard is manufactured, there is a problem that the standard tends to be unclear unless some kind of protection is performed in an exposed state.

  In the measurement using the contact displacement meter, it is desirable that the distance between the object to be measured and the contact displacement meter (main body) is always constant with respect to the scanning direction, considering the measurement range of the contact of the movable part. (Excluding the contact part of the contact displacement meter) However, in reality, it is difficult to adjust the interval to be constant, and as the scanning distance becomes longer, the contact displacement gauge probe exceeds the measurement range and cannot be measured. May occur.

  In the individual elements fixing the displacement meter and the sample stage, when the installation location is fixed to an individual object having no reference, it is necessary to grasp the relative position every time. In addition, a slight displacement occurs during measurement due to measurement failure factors due to external vibration or the like, which affects the measured value.

  Cubic solid sample (approximate size is about 200mm × D about 200mm × H 20 mm), the side surfaces 3 and 4 intersecting at right angles of the individual sample are processed with high precision as shown in FIG. 1, and the corners are set as the origin 5 of the plane coordinates as shown in FIGS. As shown in FIG. 4, guides 26 and 27 having right-angle portions that can be in close contact with two side surfaces 3 and 4 intersecting the right angle 5 of the solid sample are attached to the sample stage 12 of the measuring instrument on which the solid sample is loaded. The plane coordinate 29 shown in FIGS. 6 and 7 is managed on the measuring device side. As shown in FIG. 1, two or more grooves 2 (widths) that intersect parallel or perpendicular to the two side surfaces 3 and 4 serving as the reference of the plane coordinate 29 are formed on the upper surface 1 of the solid sample to be measured for displacement. About 3 to 5 mm, depth of about 2 to 3 mm, and the groove surface is processed with high degree of straightness (manufacturing accuracy within 5 μm) to any position with high accuracy.

  As shown in FIG. 4, using this sample, the guides 26 and 27 and the reference side of the sample are brought into close contact with the sample table 12 of the dedicated three-dimensional measuring instrument, and a dedicated jig (push plate with handle) is set. ) To fix the sample. As shown in FIGS. 4 and 5, the width 25 of the two displacement gauge tips 21 and 22 is adjusted to about 10 to 30 mm and fixed in the horizontal direction. Of the two contact-type displacement gauges 11, 19, and 20 that are arranged in parallel with the height direction offset to the groove manufacturing depth 23 (accuracy within 10 μm), the lower displacement gauge tip is positioned on the groove 2 surface. The plane coordinates 29 are adjusted by the depth adjustment stage 15 so as to be centered. At this time, the height direction of the displacement meter is adjusted by the auxiliary height adjustment stage 17 to an intermediate position in the measurement range. As shown in FIGS. 6 and 7, in this state, the surface 30 of the groove 2 and the upper surface 1 of the sample are simultaneously measured at two or more points 30 or the continuous (straight) measurement 32 by the measurement scanning stage 14 shown in FIG. Three-dimensional data before the event of the groove surface 2 and the upper surface 1 of the sample are acquired. Further, in the measurement of the groove at the vertical position where the scanning direction is different and the periphery thereof, as shown in FIGS. 6 and 7, the set position of the individual sample is changed by rotating the rotary stage 13 attached to the sample stage 1/4 turn 31. Removal work is not required.

  Next, as shown in FIG. 2, a groove cover, a coating tape, a filler, etc., which can be removed later, with respect to the surface of the intersecting groove 2 attached to the solid sample and the surfaces 3, 4 serving as the reference of the plane coordinate 29, are shown. The protective members 6 and 7 prevent the mounting surface from being exposed. Here, the material and shape of the protective material are selected according to the characteristics of the event.

  After the event is completed, the protective materials 6 and 7 are removed, and the measurement at the same location is performed again with the measurement method and the measurement apparatus performed before the event. Calculate the amount of displacement by calculating the data at the same points 8 and 9 before and after the event (Fig. 8).

  When measuring a cube-shaped solid sample with a reference groove having a straightness on the surface of the object to be measured, as shown in FIG. 12, first, continuous scanning measurement is temporarily performed from the measurement start position to the measurement completion position. Do as. Based on the measurement data obtained here, the inclination coefficient and the operation characteristics at the time of scanning are calculated.

  By incorporating the coefficient of distance and displacement into the operation program of the height correction automatic stage 28 shown in FIG. 11 for adjusting the height direction installed in the lower part of the sample stage, the constant contact displacement meter and the solid Keep the groove surface of the sample at the same interval and keep it within the measurement range.

  As shown in FIG. 4, a contact displacement meter having a high resolution and a sample table are incorporated in the same rigid housing and are installed in the same frame 18 so that their relative positions are always secured. Further, as shown in FIG. 13, the vibration that causes measurement failure is reduced by using the vibration isolator 36 in this structure and in the lower part of the frame against the vibration 37 from the outside. Furthermore, when performing automatic measurement in the scanning direction, in order to reduce the influence of vibration due to the operation of the measurement scanning stage 14, it is operated in units of operating distance (in 1 mm increments), and after 3 seconds until the vibration has subsided, the measurement data is captured. A control program is used.

  The present invention has the following remarkable effects peculiar to the present invention.

  By using a surface measurement object that has a measurement reference site that is not affected by exposure and a displacement meter that measures two surface shapes at the same time, the surface shape before and after the event can be measured easily and accurately. In addition, the displacement can be easily measured by comparing the same locations.

  If the sample table cannot be completely leveled and the contact displacement meter body and sample table cannot be adjusted in parallel with the scanning direction, the coefficient of displacement with respect to the scanning distance is incorporated into the operation program of the automatic stage. Deviation of the measurement range of the contact displacement meter can be prevented.

  By using a high-resolution contact displacement meter, harmful elements such as vibration can be reduced, and highly accurate measurement can be performed.

  The present invention is a method for three-dimensionally measuring the amount of displacement of a surface shape of a cubic solid sample, which is an object to be measured, in an event involving displacement, regardless of whether the surface of the solid is physically or chemically uniform. 1) a solid sample in which two or more intersecting grooves formed in a direction parallel to or perpendicular to a side surface of the solid sample that intersects at right angles when viewed from the top surface, and 2) a groove of an individual sample suspended from the apparatus frame. A groove surface displacement meter and a top surface displacement meter that can be adjusted to the distance and height for measuring the displacement of the surface and the upper surface, 3) a sample table on which the solid sample is fixed, 4) a measurement stage and depth adjustment for the sample table The sample stage is moved along the measurement scanning stage and the depth adjustment stage using an apparatus composed of an adjustment mechanism that can be moved along the stage and adjusted and rotated in the height direction of the sample stage. Move or sample stage , And measure the groove surface and upper surface of the solid sample before or after the event with a plurality of groove surface displacement meters and upper surface displacement meters, and the surface shape of the solid sample is measured three-dimensionally based on the displacement amount. It is a method of measuring.

  The apparatus used in this method will be specifically described below with reference to the drawings.

  FIG. 1 is a diagram showing a state in which a groove is formed on the upper surface 1 of an individual sample that is a cube before an event. FIG. 2 is a diagram showing a state in which the groove surface protective material 6 and the side surface protective material 7 are applied to the groove surface 2 and the side surfaces 3 and 4 before the event. FIG. 3 is a diagram showing a state in which the upper surface 9 and the reference groove surface 8 and the protective members 6 and 7 on the side surfaces 3 and 4 are removed after the solid sample is subjected to the surface displacement after the event.

  FIG. 4 is a diagram showing a three-dimensional measuring instrument in which two contact displacement meters 11 that simultaneously measure the groove surface and the upper surface of a solid sample are fixed to the apparatus frame. The displacement meter is an auxiliary height adjustment stage 17. Thus, it is possible to adjust the vertical movement, and the specimen stage 12 can be adjusted by the automatic stage 28 for height correction and can be rotated by the rotary stage 13. Therefore, the sample stage is structured to be movable along the measurement scanning stage 14 and the depth adjustment stage 15.

  FIG. 5 is a diagram showing a measurement state of the groove surface and the upper surface of the solid sample, in which the groove surface displacement meter 19 and the upper surface displacement meter 20 are arranged at a horizontal interval of 25, and the displacement meter is offset in the vertical direction. The contactors 21 and 22 are set so as to be in contact with the groove surface 2 (or 8) and the upper surface 1 (or 10).

  FIG. 6 is a diagram showing a case where points are measured by designating a plane coordinate reference. By arranging the solid sample along the sample side guides 26 and 27 provided on the sample stage 12 and aligning the plane coordinate reference 5 of the solid sample with the intersection of both guides, the plane coordinate 29 for the individual sample is shown. It is. The sample stage is moved left and right along the sample scanning stage, and two point measurements 30 on the sample groove surface and the surface are performed using the groove surface displacement gauge contact. Further, the point measurement 30 or the line scanning measurement 32 is performed on the upper surface of the sample at an unmeasured portion around the groove surface by rotating 180 °. Further, the sample stage is rotated 90 degrees on the rotary stage, the sample stage is moved along the depth adjustment stage, and the sample groove surface and the upper surface are moved using the groove surface displacement meter contact and the upper surface displacement meter contact. Point measurement is performed, and line scanning measurement is also performed on this part.

  FIG. 7 is a diagram illustrating a case where continuous measurement is performed using an automatic stage. This measurement is more suitable for simple measurement than the method shown in FIG. 6, but the measurement error also becomes larger. Therefore, the continuous measurement is a pre-measurement for preventing a deviation from the normal measurement range, and it is assumed that the measurement is not directly related to the measurement. After the solid sample is fixed on the plane coordinate 29 of the sample table based on the plane coordinate reference 5, the sample table is continuously moved along the sample scanning stage, and the displacement gauge contacts for the groove surface and the upper surface are moved. The line scanning measurement 32 of the groove surface and the upper surface of the solid sample is performed. Also, the sample stage is rotated 90 degrees on the rotary stage, the sample stage is continuously moved along the depth adjustment stage, and the sample groove surface and upper surface are moved using the groove surface displacement meter contact and the upper surface displacement meter contact. The line scan measurement is performed.

  FIG. 8 is a flowchart for calculating the amount of displacement before and after the event, and the following confirmation, measurement, and calculation are performed along the flow.

  1) As a pre-measurement check, the sensor width consists of measuring the displacement gauge horizontal distance between the groove surface displacement meter and the upper surface displacement meter, and the displacement meter offset distance between the groove surface displacement meter and the upper surface displacement meter. Measure the distance in the direction and sensor height.

  2) As the pre-event measurement, using the groove surface displacement meter and the upper surface displacement meter in which the interval measurement was performed in 1), the groove surface coordinate point of the solid sample groove surface based on the plane coordinate 29 (X1, Y1) etc. and the roughness data Z1 at that point are measured. In addition, the upper surface (surface) of the solid sample is also measured at a specific coordinate point on the upper surface based on the plane coordinates 29 using the upper surface displacement meter.

  3) As a post-event measurement, measure the same position (X1, Y1) using the two displacement meters at the measurement point in 2) above.

  4) As confirmation of the deviation of the initial state of the sensor after measurement, the horizontal distance between the displacement gauges between the groove surface displacement meter and the upper surface displacement meter, and the displacement meter offset distance between the groove surface displacement meter and the upper surface displacement meter. The distance measurement in the sensor width direction and the sensor height direction is performed.

  5) Calculate the displacement for each measurement point by calculating the displacement based on the measured values before and after the event.

  FIG. 9 is a diagram showing an ideal setting state of the displacement meter contact 21 or 22 and the measurement object. The distance 34 between the two parallel portions is constant, and the tip of the displacement meter contact 21 is the event. It shows that the measurement is within the measurement range 33 on the front and rear groove surfaces 2 and 8.

  FIG. 10 shows a realistic setting state of the displacement meter contact and the object to be measured, and an interval 35 due to a shift occurs with respect to the parallel time interval 34, but the contact is placed on the auxiliary height adjustment stage 17. It is shown that the contact tip can be adjusted to the measurement within the measurement range by the vertical movement of.

  FIG. 11 is a diagram showing a case where the height direction of the contactor and the groove surface before and after the event is automatically adjusted. In order to maintain the parallel spacing 34, not only the contactor is moved up and down, but also the height is adjusted. This also shows that the correction automatic stage 28 can be adjusted to the measurement within the measurement range by moving the correction automatic stage 28 up and down and automatically adjusting the height direction.

  FIG. 12 is a flowchart for calculating the height direction correction coefficient due to the deviation in the scanning direction. Using the stage control and measurement software, continuous scanning measurement is performed from the measurement start position to the measurement completion position on the groove surface serving as a measurement reference (the upper surface is in progress), and the characteristic data of the measuring instrument is acquired. The measurement results are output to spreadsheet software. The software analyzes / calculates a simple correction coefficient due to tilt and distortion due to mechanical characteristics during scanning. Based on the analysis / calculation result, the stage control program for measurement scanning of the stage control software is corrected. Actual measurement is started using the modified stage control and measurement software.

  As shown in FIG. 13, a contact displacement meter 11 having a groove surface contact 21 and an upper surface contact 22 is fixed to an apparatus frame 18 via an auxiliary height adjustment stage 17 that can move up and down. Yes. The sample stage 12 is provided on an automatic stage 28 for height correction, and can be adjusted up and down, and the stage can be moved in the left-right direction and the depth direction by the measurement scanning stage 14 and the depth adjustment stage 15. It has become. Further, since the stage 28 can be horizontally rotated by the rotary stage 31, the contact of the contact displacement meter can be used for measuring the groove and the upper surface of the sample in the vertical direction.

  FIG. 14 is a diagram illustrating a control program for reducing vibration. Move the scanning stage 1mm from the start of measurement to the initial measurement location, and then stop for about 3 seconds to attenuate and dampen the vibration. Thereafter, measurement is started at that position, and an arbitrary number of data is acquired within the measurement time. Then move 1mm to the next coordinate and do the same.

  FIG. 15 below shows the results of measurement performed according to the present invention. This figure shows the measurement of the groove surface and the surface at the same time, and shows the displacement before and after the event.

  The horizontal axis indicates the scanning distance, and the vertical axis indicates the amount of displacement, the displacement gauge offset interval value in the height direction between the groove surface and the upper surface is excluded in advance, and the inclination and device characteristics at the time of measurement have been taken into account. The displacement of the surface relative to the surface is visualized.

  According to this data, the pre-event top surface shape of the solid sample appears to descend to 50 mm in the measurement direction, and the ranges of 50 to 65 and 75 to 85 mm are grooves (two places) perpendicular to this line. The top shape of the solid sample is shown in the range of 75 and 85-110 mm.

  It is shown that the upper surface shape after the event is generally worn out by about 5 to 7 μm compared to the upper surface shape before the event.

  The post-event groove surface shape shows almost the same line, indicating that there is almost no displacement before and after the event. Since the slight displacement is estimated to be due to the resolution of the contact displacement meter, it is within the error range, and it is expected that the displacement will be the same by adopting a high resolution displacement meter.

  This time, the reason why there are many irregularities in the line after the event in the data before the event and the data after the event is due to the difference in the pitch of the measurement interval, measured at 5 mm before the event and 1 mm after the event This is because it is. (Originally, it should have been 1 mm before the event, but since this 1 mm data was not available, data measured at 5 mm intervals were corrected and shown as 1 mm data.)

  The present invention can be used for measuring the surface displacement of a test piece due to chemical changes such as chemicals, and for measuring the surface displacement of a test piece due to physical changes such as blasting.

FIG. 3 is a three-dimensional view in which grooves are formed on two side surfaces and an upper surface of a solid sample that is a cube. It is a conceptual diagram of the state which gave the protective material to the groove surface and the side surface. It is a conceptual diagram after a solid sample receives the surface displacement after an event. FIG. 3 is a conceptual diagram of a three-dimensional measuring instrument including two contact displacement meters that simultaneously measure a groove surface and an upper surface of a sample. It is a side view which shows the measurement state of the groove surface and upper surface of a sample. It is a conceptual diagram at the time of measuring a point by coordinate designation. It is a conceptual diagram at the time of performing the continuous measurement by an automatic stage. It is a flowchart for calculating the amount of displacement before and after an event. It is an ideal setting state figure of a contact type displacement meter and a measurement object. It is a realistic setting state figure of a contact type displacement meter and a measurement object. It is a conceptual diagram at the time of automatically adjusting the height direction. FIG. 6 is a flowchart for calculating a height direction correction coefficient due to a deviation in a scanning direction. It is a system layout diagram for vibration reduction. It is a conceptual diagram of the program for control for reducing a vibration. It is a figure which shows the upper surface shape and groove surface shape before and behind an event.

Explanation of symbols

1 Pre-event sample top 29 Plane coordinates
2 Pre-event sample groove surface 30 point measurement (example)
3 Pre-event sample side A 31 Rotating stage (for 90 ° and 180 ° rotation)
4 Pre-event sample side B 32 line scan measurement
5 Planar coordinate reference 33 Measurement range (± A)
6 Groove surface protective material 34 Parallel time interval (X)
7 Side face protection 35 Spacing gap
8 Post-event groove surface 36 Vibration isolator
9 Upper surface after event 37 External vibration
10 Top surface before event
11 Contact displacement meter: 2 units
12 Sample stage
13 Rotating stage
14 Measurement scanning stage
15 Depth adjustment stage
16 Scan direction
17 Auxiliary height adjustment stage
18 Equipment frame
19 Groove displacement meter
20 Displacement meter for upper surface
21 Displacement contact for groove surface
22 Displacement contact for upper surface
23 Groove height
24 Displacement meter offset interval
25 Displacement gauge horizontal interval
26 Guide for specimen side A
27 Guide for specimen side B
28 Automatic stage for height correction

Claims (4)

  When the object of displacement measurement is the top surface of a solid sample for a cube-shaped solid sample that is subject to measurement in an event involving displacement, whether physically or chemically, uniform or non-uniform on the solid surface Two or more intersecting grooves that are parallel or perpendicular to the side surface that intersects at right angles when viewed from the top surface of the sample are accurately machined on the top surface, and before and after the event in the plane coordinates on the surface of the individual sample with reference to the groove surface Measure the shape (displacement) of the top surface of the sample, and the material that can be removed after the event on the surface of the two or more intersecting grooves processed into a solid sample and the side surface serving as the reference for the surface coordinates, and Attach protective materials such as groove cover, coating tape, and filler according to the shape to prevent displacement of the groove surface due to the event and the side surface that is the basis of the surface coordinates, and two or more intersecting groove surfaces attached to the solid sample Top and Two contact types that can measure displacement simultaneously and are arranged in parallel with an interval adjustment mechanism so that the parallel distance from the groove can be measured at any position on the upper surface of the solid sample, and the height is offset in the groove depth direction. Measurement is performed using a displacement meter, and the sample is inverted by the 1/2 and 1/4 rotation functions by the rotating stage attached to the sample table, and the set position of the individual sample is changed by the position of the intersecting grooves processed into the sample. A method of measuring the amount of surface shape displacement of an individual sample by three-dimensional measurement, characterized by being simplified.   When the height of the reference groove surface attached to the surface of the contact displacement meter main body and the object to be measured is X with respect to the scanning direction, and the measurement range of the contact displacement meter is ± A, As the measurement scanning distance of the object to be measured becomes longer, the contact displacement meter body and the contact displacement meter main body should not be deviated from the measurement range of the contact displacement meter in the measurement in which the height of X may be less than X-A or exceed X + A. 2. The method according to claim 1, further comprising a mechanism for deriving a coefficient by calculating the distance of the groove surface, and correcting the distance between the contact-type displacement meter main body and the groove surface to the same interval (parallel) by this coefficient. .   A hexagonal measuring device frame is constructed using high-rigidity steel material in the part corresponding to the side of the cube, a support material is attached to the appropriate position of the frame, and the joint of each frame is welded. Installed in the lower part of the frame, keeping the relative distance at the time of measurement constant by the installed three-dimensional driving device, the sample stage mounted on the upper part of the device, and the contact displacement meter body fixed on the upper part of the frame The apparatus capable of driving in a three-dimensional direction, wherein the operation vibration of the measurement scanning stage generated by the continuous movement measurement by the scanning operation is reduced by the control program and the vibration isolator incorporated in the lower part of the housing. The method of claim 2.   An auxiliary height adjustment stage is suspended from the frame at the top of the device, and a solid sample groove surface displacement meter and an upper surface displacement meter are provided under this stage, and the solid sample sample stage is an automatic stage for height correction. This automatic stage is provided so as to be movable along the measurement scanning stage and the depth adjustment stage provided at the bottom of the apparatus, and further provided with a rotating stage that can rotate the sample stage. In an event involving displacement regardless of whether the surface of the solid is uniform or non-uniform, the object to be measured is the top surface of the solid sample and is perpendicular to the top surface of the solid sample. Two or more intersecting grooves that are parallel or perpendicular to the intersecting side surface are processed with high accuracy on the upper surface, and the plane coordinates on the specimen surface before and after the event are processed with reference to the groove surface. The shape (displacement) of the top surface of the sample can be measured, the displacement of two or more intersecting grooves processed into a solid sample can be measured simultaneously, and the parallel distance from the groove on the top surface of the solid sample can be measured at any position. Measurements are made using two contact displacement meters that are arranged in parallel with a distance adjustment mechanism and offset in the groove depth direction so that they can be measured with a rotating stage attached to the sample stage. The surface shape displacement amount of the individual sample can be obtained by three-dimensional measurement, which is characterized by simplifying the inversion of the sample and changing the set position of the individual sample by the intersecting groove position processed into the sample by the / 2 and 1/4 rotation function Device to measure.

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