JP2007163155A - Radiation detecting device and radiation imaging system using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a radiation detecting device and a radiation imaging system using the same without incuring a reduction of the light amount from a light source, without generating noise to vibration and temperature variation, and capable of securing sufficient mechanical strength. <P>SOLUTION: The radiation detecting device comprises: a fixing means such as a device chassis 301 for fixing the radio wave generation means to the radiation detecting panel 600 including the LED 201 etc., and a light guidance means 231. The radio wave generation means is held between the fixing means 301 etc., and the radiation detecting panel 600, and moreover the radiation detecting panel 600 and the fixing means 301 are evacuated in between. The fixing means has the evacuation introducing part 302 for evacuation. By this constitution the radio wave generation means is pressed by the atmospheric pressure, thereby fixing the radio wave generation means to the radiation detecting panel. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a radiation detection apparatus used for a medical radiation diagnostic apparatus, a nondestructive inspection apparatus, and the like, and a radiation imaging system using the same.

  In recent years, digitization of X-ray imaging has been accelerated, and various radiation detection apparatuses have been proposed. The method is a direct method, that is, a type in which X-rays are directly converted into electric signals and read, and an indirect method, ie, a type in which X-rays are once converted into visible light and visible light is converted into electric signals and read. It is roughly divided into two.

  FIG. 26 is a cross-sectional view showing the direct radiation detection apparatus disclosed in Patent Document 1. In the figure, reference numeral 5 denotes an X-ray flat panel detector, in which X-ray conversion layers 25 that convert incident X-rays into electric charges, and pixels that detect electric charges generated in the X-ray conversion layers 25 are arranged in a matrix form vertically and horizontally. It has a laminated structure of the detection array layer 27 and the surface electrode 31 disposed on the surface of the X-ray conversion layer.

  Under the X-ray flat panel detector 5, a known light generator 7 is disposed as a backlight in a transmissive display such as a liquid crystal display device. The light generator 7 includes a light guide plate 41, a light source main body 43 that emits visible light from the side to the light guide plate 41, a light reflection film 45 that covers a lower surface and a side surface of the light guide plate 41, and an X-ray flat panel detection And a light diffusion film 47 disposed on the side of the container 5.

  Examples of the light source body 43 include a cold cathode tube or a plurality of LEDs that emit light in a pseudo surface. On the other hand, the light generator 7 has a structure in which the light source body 43 and the light diffusion film 47 are separated from each other, but there is also a structure in which the light generator 7 is integrated with an EL (electroluminescence) panel.

  The light generator 7 having such a configuration is configured to irradiate substantially uniform light over the entire light-receiving surface of the X-ray flat panel detector 5, and emits light at an appropriate timing before and after photographing the subject. The X-ray conversion layer 25 made of a semiconductor layer is used for repairing a decrease in sensitivity.

  Patent Document 2 discloses an indirect radiation detection apparatus as shown in FIG. The one shown in FIG. 27 is arranged on the back side of a phosphor that converts X-rays into visible light, a photoelectric conversion panel that is arranged on an insulating substrate, and that includes a plurality of photoelectric conversion elements that detect the visible light. The light generating means comprises a light source (LED) and a light guide.

Light from the light generating means is applied to a photoelectric conversion element made of a semiconductor such as amorphous silicon, and is used to prevent an increase in dark current due to characteristic fluctuations caused by long-term use and trap levels generated in the semiconductor film. Yes. As the light source, for example, an LED, an EL, a semiconductor laser, a cold cathode tube, or the like is used.
JP 2004-033659 A JP 2002-040144 A

  As a method for arranging the light generator 7 of FIG. 26 and the light generation means of FIG. 27 of the radiation detection apparatus as described above on the panel, the following two methods are generally used.

  (1) The outer peripheral portion is fixed (common in liquid crystal display devices) by a method using adhesion or other fixing means.

  (2) In order to ensure sufficient strength of the entire surface, the entire surface is fixed by a method such as adhesion.

  However, these methods have the following problems.

First, regarding method (1),
(B) A chassis that is placed only under the light guide means due to the influence of vibration or temperature change because it is fixed only at the outer periphery (not shown, but usually metallic to prevent scattering or protect the mounting board from radiation) The material fluctuates in volume and causes noise.

  (B) When the light guide means is a surface light emitting element such as EL (electroluminescence), the capacitance fluctuates between the common electrode and noise is generated.

  A general liquid crystal display device has a structure in which two pieces of glass are bonded together, so that only that is strong enough, or the panel has only a circuit for driving liquid crystal, and a minute voltage or current like a radiation detection device. This problem is not recognized because it does not deal with.

Regarding method (2),
(C) The light generator shown in FIG. 26 and the light generation means shown in FIG. Functions (total reflection, scattering, light collection, etc.).

  Therefore, by adhering the light guide plate, the light reflection film, and the light diffusion plate, and further by adhering between the light guide plate and the transparent insulating substrate used for the detection array layer or the photoelectric conversion panel, the relationship of the refractive index difference. Collapses, leading to a reduction in light guiding and diffusing functions. In a general liquid crystal display device, the light guide means and the liquid crystal panel are not bonded.

  In particular, the refractive index of acrylic resin commonly used as a light guide plate and a light diffusing plate, the refractive index of acrylic and silicone adhesives commonly used as an adhesive, and the refractive index of a transparent insulating substrate are all about 1.5. Since they are equivalent, almost no light can reach the light receiving surface or the photoelectric conversion element, resulting in a problem that optical reset cannot be performed.

  An object of the present invention is to provide a radiation detection apparatus capable of ensuring a sufficient mechanical strength without causing a decrease in the amount of light from a light source, without generating noise even with respect to vibration, temperature change, and the like. The object is to provide a radiation imaging system using the.

  In order to achieve the above object, the present invention provides a radiation detection panel having a plurality of conversion elements and a second surface side facing the first surface side on which the radiation of the radiation detection panel is incident, and the radiation detection panel An electromagnetic wave generating means for irradiating the plurality of conversion elements with an electromagnetic wave, including a fixing means for fixing the electromagnetic wave generating means to the radiation detection panel, wherein the radiation detecting panel and the fixing means The electromagnetic wave generating means is fixed to the radiation detection panel by evacuating the space.

  In the present invention, there is provided a fixing means for fixing an electromagnetic wave generating means including a light source and a light guiding means to the radiation detection panel, the electromagnetic wave generating means is sandwiched between the fixing means and the radiation detection panel, and further, radiation detection is performed. A vacuum is applied between the panel and the fixing means. With this structure, the electromagnetic wave generation means is fixed to the radiation detection panel by pressing the electromagnetic wave generation means in the atmosphere.

  According to the present invention, the electromagnetic wave generating means is sandwiched between the radiation detection panel and the fixing means, and the electromagnetic wave generating means is fixed by evacuating the inside without incurring loss of light from the light source, It is possible to sufficiently ensure the mechanical strength of the apparatus. In addition, it is possible to minimize noise due to vibration and temperature change.

  Next, the best mode for carrying out the invention will be described in detail with reference to the drawings. In the specification of the present application, it is assumed that the category of radiation includes α rays, β rays, γ rays and the like in addition to X rays. In all the following embodiments, an indirect type radiation detection apparatus will be described as an example.

(First embodiment)
FIG. 1 is a sectional view showing a first embodiment of a radiation detection apparatus according to the present invention. In the figure, reference numeral 600 denotes an indirect radiation detection panel. The indirect radiation detection panel 600 includes a wavelength converter 150 including a phosphor 151 made of CsTl: Tl and the like and a protective layer 152.

  The photoelectric conversion panel 100 includes a plurality of photoelectric conversion elements 102, a plurality of switch elements 103, an insulating protective layer 104, and a transparent insulating substrate 101. The indirect radiation detection panel 600 includes the wavelength conversion unit 150 and the photoelectric conversion panel 100. Since this indirect type radiation detection panel is publicly known, detailed description thereof is omitted.

  Under the indirect radiation detection panel 600, a light guide means including a light guide plate 231, a reflection plate 221, and a diffusion plate 241 is provided. An LED 201 is disposed on the side of the light guide. The light guide means guides the light from the LED 201 to the entire surface and uniformly guides it to the upper photoelectric conversion element portion 102, the switch element 103, or the phosphor 151. Since the light guide means is known as a backlight for a transmissive liquid crystal display device, detailed description thereof is omitted.

  A plurality of LEDs 201 are arranged in the lateral direction (the depth direction in FIG. 1, see FIG. 3), and are electrically mounted on the electrical mounting substrate 202 attached to the backlight chassis 211. These constitute the backlight unit (electromagnetic wave generating means) 200. FIG. 3 is a plan view of the lower part from AA in FIG.

  In the present embodiment, the LED is taken as an example, but other than this, the use of an EL, a semiconductor laser, a cold cathode tube, or the like does not depart from the spirit of the present invention. The following embodiments are also the same. Reference numeral 111 denotes a TAB, and 112 denotes a PCB board.

  A metal device chassis (fixing means) 301 is disposed under the backlight unit 200 and sandwiches the backlight unit 200 with the radiation detection panel 600. A sealing resin (end surface sealing means) 401 is disposed around the radiation detection panel 600 and the apparatus chassis 301, thereby forming a sealed space.

  Here, the sealing resin 401 is preferably selected from a soft elastic body in order to make the inside airtight. For this purpose, the sealing resin 401 is preferably bonded to the apparatus chassis 301 or the radiation detection panel 600. However, even if it does not adhere, other merits, such as improvement in maintainability, may be used.

  However, since the end portion of the radiation detection panel 600 may be destroyed by the pressure due to the atmospheric pressure at the end face portion if not yet soft, variations described below may be applied.

  In FIG. 4, thin and flat rubber-like resins 411 and 421 are provided above and below an end face sealing base 402 made of a hard resin. These constitute end face sealing means, and the hard resin 402 enters between them, so that the strength in the vertical direction is higher than that of the sealing resin 401 of FIG.

  In FIG. 5, the resin 421 at the bottom of the end face sealing base 402 is replaced with an O-ring 412. That is, the machine chassis 301 is grooved, and an O-ring 412 is buried in the groove. A rubber-like resin 411 is provided on the top of the end surface sealing table 402 as in FIG.

  FIG. 6 is a modification of FIG. 5, in which an O-ring 412 is embedded in the groove of the end surface sealing table 402. 5 and 6 are higher in the vertical direction than FIG.

  FIG. 7 shows a further modified type in which the upper and lower resins 411 and 421 of the end face sealing base 402 are replaced with O-rings 412. This configuration has the highest strength in the vertical direction.

  As shown in FIGS. 1 and 3, the apparatus chassis 301 is provided with a plurality of through holes (exhaust introduction means) 302, each of which is formed by a lid (exhaust sealing means) 501 or a valve (exhaust sealing means) 502. Sealed.

  FIG. 2 shows a state where the radiation detection apparatus of the present embodiment is exhausting. An exhaust pipe 504 extending from the pump 503 is connected to a valve 502 and exhausts with the valve 502 opened. When exhausting to the set value, the valve 502 is closed and the state is maintained. In FIG. 2, the valve 502 is provided only at one place, but the exhaust speed may be increased by providing it at a plurality of places.

  In this state, the pressure from the atmosphere by the vacuum is applied to the light guide means and the sealing resin 401 on the end face. For example, assuming that the total installation area of the light guide means and the sealing resin 401 is 1600 cm 2 and the internal pressure is 0.5 kg / cm 2, the total pressing force reaches 800 kg. If such a force is applied from above and below, there is no fear that the radiation detection panel 600 and the backlight unit 200 will be peeled off, and there is no fear that the apparatus will be displaced even when it is placed vertically.

  Further, even if vibration occurs in the entire apparatus, there is no fear of generating a gap with the metal fixing means 301, so that noise due to capacitance change can be suppressed. Furthermore, even when the temperature rises, the inside is a vacuum, so there is no risk of expansion and the center portion expanding. In such a structure, since resin such as adhesive is not poured into the light guide means, the function as a backlight is not deteriorated, the light quantity from the light source is not reduced, and the mechanical strength is reduced. It is possible to increase.

(Second Embodiment)
FIG. 8 is a cross-sectional view showing a second embodiment of the present invention, and FIG. 9 is a plan view of the lower part taken from AA of FIG. 8 and 9, the same parts as those in FIGS. 1 and 3 are denoted by the same reference numerals.

  Although the structure is basically the same as that of the first embodiment, a groove (buffer space) 305 is provided in the vacuum holding portion of the apparatus chassis 304 to increase the capacity of the vacuum space. In this way, when the vacuum is maintained, even if a leak occurs, the time for increasing the pressure can be increased.

  Furthermore, as shown in FIG. 9, the groove 305 penetrates from the lower end of the backlight chassis, so that the vacuum exhaust speed can be increased at least in the lower portion of the backlight unit 200. In FIG. 8, two valves 502 are provided, and the effect is promoted by exhausting air from a plurality of locations.

  In the present embodiment, the groove processing in only one direction is shown, but the shape of the groove is not limited to this, and various forms do not depart from the gist of the present invention.

  By adopting such a structure, in addition to the effects described above, it is possible to increase the evacuation speed and increase the vacuum holding time even when there is a leak. As a result, the reliability of the radiation detection apparatus can be improved.

(Third embodiment)
FIG. 10 is a cross-sectional view showing a third embodiment of the present invention, and FIG. 11 is a plan view of the lower part taken along line AA of FIG. 10 and 11, the same parts as those in FIGS. 1, 3, 8, and 9 are denoted by the same reference numerals.

  In this embodiment, the groove 305 of FIGS. 8 and 9 is formed in the backlight chassis 212 for the backlight unit. A groove (buffer space) 213 is provided in the lower part of the backlight chassis 212. Even if the groove 213 is formed on the upper portion of the backlight chassis 212, the gist of the present invention is not deviated.

  By adopting such a structure, in addition to achieving the original purpose as in the second embodiment, it becomes possible to increase the evacuation speed and increase the vacuum holding time even when there is a leak. The reliability of the detection device is improved.

(Fourth embodiment)
FIG. 12 is a cross-sectional view showing a fourth embodiment of the present invention, and FIG. 13 is a plan view of the lower part taken from AA of FIG. 12 and 13, the same reference numerals are given to the same parts as those in FIGS. 1, 3, 8, 9, and FIGS.

  In this embodiment, the grooves shown in FIGS. 8 and 9 are formed in the light guide plate 231 for the backlight unit. The groove (buffer layer) 233 is provided in the lower part of the light guide plate 231. Even if the groove 233 is formed on the upper portion of the light guide plate 231, the gist of the present invention is not deviated.

  Further, as shown in FIG. 13, the groove 233 is provided in parallel to the light emitting direction of the LED 201. In that case, the light guide function of the light guide plate 231 can be kept to a minimum since the influence of the reflection at the groove 233 is less than that in the case where the light guide plate 231 is provided in the vertical direction.

  By adopting such a structure, in addition to achieving the original purpose as in the second and third embodiments, it is possible to increase the evacuation speed and increase the vacuum holding time even when there is a leak. Thus, the reliability of the radiation detection apparatus is improved.

(Fifth embodiment)
FIG. 14 is a cross-sectional view showing a fourth embodiment of the present invention, and FIG. 15 is a plan view of the lower part taken along line AA of FIG. 14 and 15, the same reference numerals are given to the same portions as those in FIGS. 1, 3 or 8 and 9, and FIGS. 10, 11, 12, and 13.

  In this embodiment, through holes (introduction spaces) 215, 223, 235, and 243 for introducing exhaust are respectively formed in the backlight chassis 211, the reflecting plate 221, the light guide plate 231, and the diffusion plate 241, and the exhaust introducing portion 302 of the apparatus chassis 306. It is provided at the same position.

  Since exhaust can be performed through this introduction space, the entire front and back of the component parts can be exhausted quickly and uniformly. In the present embodiment, all the holes (introduction spaces) opened in each member are at the same position, but may be provided at shifted positions in order to ensure optical uniformity. Furthermore, there is no necessity to apply to all members, and even if it is applied to only necessary ones, the gist of the present invention is not deviated.

  By adopting such a structure, in addition to achieving the original purpose, the exhaust speed is improved and each member can be pressed uniformly.

(Sixth embodiment)
FIG. 16 is a sectional view showing a sixth embodiment of the present invention. In FIG. 16, the same parts as those in FIGS. 1, 8, 10, 12, and 14 are denoted by the same reference numerals.

  In this embodiment, the buffer space is not formed in the apparatus chassis 301, the light guide plate 231 and the like as described above, but a buffer chamber 507 is provided separately. Reference numeral 508 denotes a valve. By providing the buffer chamber 507, the capacity of the buffer layer can be arbitrarily designed, and the pressure increase at the time of leakage can be further delayed.

  By adopting such a structure, in addition to achieving the original purpose, it is possible to further increase the vacuum holding time even when there is a leak as compared with the second and third embodiments.

(Seventh embodiment)
FIG. 17 is a sectional view showing a seventh embodiment of the present invention. In FIG. 17, the same parts as those in FIGS. 1, 8, 10, 12, 14, 16, etc. are denoted by the same reference numerals.

  In the present embodiment, the end surface sealing means is configured to protect the end surface of the radiation detection panel 600. That is, the end face protection base 431 made of hard resin or the like is configured to cover the end face portion of the transparent insulating substrate 101. In order to enclose in a vacuum, the upper and lower portions of the end face protection base 431 are covered with general sealing resins 441 and 451.

  With such a configuration, the end face protection base 431 can prevent the end face of the transparent insulating substrate 101 from cracking against an impact from the lateral direction. Furthermore, the following configuration is also possible for the purpose of protecting the end face.

  In the example of FIG. 18, notches 432 a and 432 b are formed on the inner wall surface of the end surface protection base 432, and these notches 432 a and 432 b are engaged with the end of the transparent insulating substrate 101 and the end of the device chassis 301, respectively. It has a structure to do. This is a structure that receives pressure in the vertical direction. Encapsulation uses sealing resins 441 and 413. With this structure, protection from the lateral direction and reception of pressure in the vertical direction can be performed simultaneously.

  In the example of FIG. 19, the lower portion is sealed with an O-ring 412 when sealing with the end face protection base 433 with respect to the structure of FIG. 18. Sealing resin 441 is used for upper sealing. The O-ring 412 is embedded in the groove of the end face protection base 433. The structure in which notches are formed on the inner wall surface of the end surface protection base 433 and these notches engage with the end of the transparent insulating substrate 101 and the end of the apparatus chassis 301 is the same as that shown in FIG. .

  In the example of FIG. 20, an O-ring 412 is embedded in the groove of the device chassis 307 when sealing with the end face protection base 434 in the structure of FIG. 19. The embedded surface of the O-ring 412 is slanted because of the mounting relationship. If the surface is vertical, mounting is impossible.

  In the example of FIG. 21, the device chassis 308 directly protects the end face and receives the vertical pressure at the same time. If it is this structure, the enclosure means is sufficient in one place.

  By adopting such a structure, in addition to achieving the original purpose, it is possible to simultaneously protect the impact from the side of the substrate end face.

(Eighth embodiment)
FIG. 22 is a sectional view showing an eighth embodiment of the present invention. In FIG. 22, the same parts as those in FIGS. 1, 8, 10, 12, 12, 16, 17, etc. are denoted by the same reference numerals.

  In this embodiment, an exhaust introduction part is provided in the end face sealing means. That is, a through hole (exhaust introduction part) 436 is provided in the end face protection base 435 and is connected to the valve 511. An exhaust pipe 504 extending from the exhaust pump 503 is connected to a valve 511.

  In addition, the structure shown in FIG. 19 is used as the sealing structure in the exhaust introduction part. The upper part of the end face protection base 435 is sealed with a sealing resin 441 and the lower part is sealed with an O-ring 412. The configuration on the opposite side of the exhaust introduction part is the same as that in FIG.

  With such a structure, in addition to achieving the original purpose, the lower surface of the apparatus can be simplified.

(Ninth embodiment)
FIG. 23 is a cross-sectional view showing a ninth embodiment of the present invention, and FIG. 24 is a plan view of the lower part taken from AA of FIG. 23 and 24, the same reference numerals are given to the same portions as those in FIGS. 1, 3, 8, 9, 10, 12, 14, 16, 17, and 22.

  In the present embodiment, the end surface sealing means is provided with electromagnetic wave generating means. That is, the LED 201 is attached to the sealing resin (end surface sealing means) 437 via the mounting substrate 202. By adopting such a structure, in addition to achieving the original purpose, it becomes possible to remove the light source and improve maintainability.

(Tenth embodiment)
FIG. 25 is a block diagram showing an embodiment of a radiation imaging system using the radiation detection apparatus of the present invention. X-rays 6060 generated in the X-ray tube 6050 pass through the raised portion 6062 of the patient or subject 6061 and enter the radiation detection apparatus (image sensor) 6040 according to the present invention as described above. The incident X-ray includes information inside the body of the patient or subject 6061.

  The above-described phosphor emits light in response to the incidence of X-rays, and the photoelectric conversion element of the sensor panel performs photoelectric conversion to obtain electrical information. This information is converted into digital information, subjected to image processing by an image processor 6070 as signal processing means, and can be observed by a display 6080 as display means installed in a control shop.

  Further, this information can be transferred to a remote place by transmission processing means such as a telephone line 6090 and can be displayed on a display 6081 installed in a doctor room or the like in another place. Further, it can be stored in a recording means such as an optical disk and can be diagnosed by a remote doctor. Furthermore, it can also record on the film 6110 by the film processor 6100 used as a recording means.

  Here, in the present invention, an electromagnetic wave generating means (a backlight unit including an LED, a light guide plate, a reflecting plate, a diffusion plate, etc.) is sandwiched between the fixing means and the radiation detection panel, and a vacuum is formed between the radiation detection panel and the fixing means. The basic structure is that the electromagnetic wave generating means is pressed in the atmosphere from both sides.

  The fixing means refers to all means for fixing the radiation detection panel, such as a chassis body for a mechanical unit for a radiation detection apparatus, a metal plate for preventing backscattering, and a chassis body for a light source unit. In the above-described embodiment, the device chassis 301, 304, 306, 309, etc. correspond. When creating a vacuum, it is necessary to design each part so that there is no fatal shape change.

Here, in the present invention, vacuum refers to all states lower than the surrounding atmospheric pressure. It is necessary to determine an appropriate value for the vacuum pressure from the withstand voltage of the electromagnetic wave generating means to be sandwiched, the withstand voltage of the fixing means, the withstand voltage of the radiation detection panel, the withstand voltage at the structural discontinuity, and the like. For example, the electromagnetic wave generating means 0.5 Kg / cm ² (absolute pressure, gauge not pressure) of 40 cm square when pressing in vacuum pressure, the pressure per unit area is 0.5 Kg / cm ² (about 0.5 The pressure that pushes the entire surface is 0.5 × 40 × 40 = 800 Kg. It is mechanically strong.

  Since the radiation detection panel and the fixing means are pressed against each other with the electromagnetic wave generating means sandwiched therebetween, the central portion does not protrude due to vibration or temperature change. If only the end face of the radiation detection panel is fixed, the center of the panel will overhang.

  In addition, since the fixing means, the radiation detection panel, and the electromagnetic wave generating means are only fixed in a vacuum, if the vacuum is returned to the atmosphere, each member can basically be separated, so that the maintainability is improved. . For example, when a defect is detected in a part of the TAB after the radiation detection apparatus is assembled, the radiation detection panel alone can be set in the TAB processing apparatus, so that peeling and ACF recompression are easy. If fixing means etc. are together, there is a high risk of causing problems in crimping.

  The exhaust introduction part refers to a passage for evacuating between the fixing means and the radiation detection panel. For example, the through hole 302 in FIG. 1 or the like and the through hole 436 in FIG. These exhaust introduction parts are provided in fixing means (device chassis 301) that comes into contact with the atmosphere as shown in FIG. 1 or the like, or end face sealing means (end face protection table 435) as shown in FIG. Is optional. In order to improve the exhaust distribution, a plurality may be provided so as to be uniform. Moreover, you may design the magnitude | size of the opening part arbitrarily.

  The exhaust sealing means is provided in the exhaust introduction part, and is for maintaining the inside in a vacuum state. As the exhaust sealing means, a resin or metal lid may be used as indicated by 501 in FIG. 1 or the like, or a valve may be used as indicated by 502. When a valve is used, a state where the valve is closed is a state where vacuum is maintained, and a state where the valve is opened is a state where vacuum is exhausted through the state.

  The buffer space is provided in a portion that becomes a vacuum, such as a fixing unit or an electromagnetic wave generation unit, and increases the capacity of the vacuum space, thereby increasing the life of vacuum holding even if a certain leak occurs. The buffer space is, for example, a groove 305 shown in FIGS. 8 and 9, a groove 213 shown in FIGS. 10 and 11, a groove 233 shown in FIGS.

  As described with reference to FIGS. 8 to 13, these grooves are formed by providing uneven portions on members such as the device chassis 304, the backlight unit backlight chassis 212, and the backlight unit light guide plate 231. However, in order not to cause inappropriate deformation of these members, it is preferable to form a plurality of stripes.

  In addition, when the buffer space is provided in the electromagnetic wave generating means as shown in FIGS. 12 and 13, it is preferable to design so that the deterioration of the light guiding function can be suppressed. For example, in the case of a side edge type backlight or the like in which a plurality of LEDs 201 are arranged on the side of the light guide plate 231, a groove 233 is provided in the light guide plate 231 in parallel with the incident direction of the LED light as shown in FIG. It is preferable to design so that there is no reflection from the buffer space.

  As shown in FIG. 16, the buffer space may be provided separately as the buffer chamber 507 in addition to the above. In this method, an installation space for the buffer chamber is required, but the processing is easier than processing the member. The buffer space may have a function of promoting evacuation as a result.

  As described with reference to FIG. 14 and the like, the introduction space is provided so as to penetrate the front and back of the electromagnetic wave generating means, and is for promoting exhaust of the front and back of the electromagnetic wave generating means. In the case where the introduction space includes a plurality of members of the electromagnetic wave generating means, if it is provided in at least a part of the members, the mechanical strength can be increased as compared with the case where there is no member.

  Further, if the introduction space is preferably provided at a position corresponding to the buffer space or the exhaust introduction portion, it is possible to increase the conductance with the pump, and it is possible to further promote the vacuum exhaust.

  The end surface sealing means is the sealing resin 401 shown in FIGS. 1, 8, 10, 12, 14, 16, etc., the end surface protection base 431 and the sealing resins 441 and 451 shown in FIG. 17, or FIG. The sealing resin 437 shown in FIG. These end face sealing means are provided around the fixing means and the radiation detection panel, and are made to be able to hold the vacuum more easily by making both closed spaces.

  The end face sealing means only needs to have at least a sealing function. Further, the end surface sealing means is not necessarily bonded between the radiation detection panel and the fixing means, but may be bonded to either or both.

  Further, the end surface sealing means preferably has a high mechanical strength with respect to the fixing means and the end faces of the radiation detection panel, particularly in the vertical direction in which a large force due to atmospheric pressure acts. For that purpose, it may be composed of a plurality of members so as to be filled with a hard material as much as possible and to be sealed with a soft material.

  Examples of the soft sealing material include generally used acrylic or silicone-based sealing resins, O-rings that are usually used in vacuum exhaust devices, and the like. Examples of the hard material include hard resin, metals such as aluminum and SUS, and inorganic materials such as glass.

  The end surface sealing means may more preferably have a structure that covers the panel end surface portion so that the radiation detection panel has a function of protecting the radiation detection panel from the impact of the end surface. The end surface sealing means may also serve as an electromagnetic wave generating part. Thereby, the maintainability of an electromagnetic wave generation source improves.

  The electromagnetic wave generating means refers to all known backlights used in liquid crystal display devices and the like and all media that generate electromagnetic waves obtained by expanding the backlight and irradiate the radiation detection panel. As the electromagnetic wave generation source, an LED, a semiconductor laser, an EL, a cold cathode tube, or the like is used as described above. And if it is a thing of the wavelength which implement | achieves the target effect by inject | emitting the electromagnetic waves to radiate | emit into the specific part of a radiation detection apparatus, it will not be limited only to these means.

  When light is irradiated from the electromagnetic wave generating means to the photoelectric conversion element or the switch element, the semiconductor material is irradiated to cause some action. For example, discharge of carriers trapped in the trap level.

  When the wavelength converter is irradiated from the electromagnetic wave generating means, the light emitting material is irradiated to cause some action. For example, color reduction of a wavelength converter colored by radiation irradiation. When irradiating a semiconductor element that directly converts radiation into electric charges from the electromagnetic wave generating means, the semiconductor material is irradiated to cause some action. For example, repair of the polarization effect.

The wavelength converter corresponds to all phosphors that generate an electromagnetic wave having a wavelength different from the wavelength of the radiation upon incidence of the radiation. For example, an oxide-based oxide doped with a metal such as Gd ₂ O ₂ S: Tb, La ₂ O ₂ S: Tb, Y ₂ O ₂ S: Tb, or a metal such as CsI: Tl or CsI: Na Examples include alkali halides.

Semiconductors that directly convert radiation into electric charge include all semiconductors that generate electric charge directly upon incidence of radiation. For example, there are amorphous bodies such as Se and Se compounds, amorphous bodies such as Se and Se compounds doped with alkali metals or halogens, and amorphous bodies such as Se and Se compounds corresponding to them. Further, there are polycrystals made of compound semiconductors such as CdTe, CdZnTe, PbI ₂ , HgI ₂ , TIBr, and GaAs.

  Although the first to ninth embodiments have been described as described above, the gist of the present invention does not depart from the scope of the invention even if the technical ideas of the first to ninth embodiments are uniquely combined. Moreover, although all embodiment showed the indirect type radiation detection apparatus, even if these forms are applied to a direct type thing, it does not deviate from the main point of this invention.

  Further, all the embodiments show the edge incident type light guide type backlight as the electromagnetic wave radiating means, but the present invention can be applied to a direct type backlight having a light installed directly below or a surface light emitting type backlight directly emitting light. Is also applicable.

  The present invention can be applied to a medical radiation diagnostic apparatus. In addition, it can be used for non-destructive inspection devices.

It is sectional drawing which shows 1st Embodiment of the radiation detection apparatus which concerns on this invention. It is sectional drawing which shows the state which is exhausting the apparatus of FIG. It is the top view which looked at the lower part from AA of FIG. It is sectional drawing which shows the other form of the sealing part in the apparatus of FIG. It is sectional drawing which shows the other form of the sealing part in the apparatus of FIG. It is sectional drawing which shows the other form of the sealing part in the apparatus of FIG. It is sectional drawing which shows the other form of the sealing part in the apparatus of FIG. It is sectional drawing which shows the 2nd Embodiment of this invention. It is the top view which looked at the lower part from AA of FIG. It is sectional drawing which shows the 3rd Embodiment of this invention. It is the top view which looked at the lower part from AA of FIG. It is sectional drawing which shows the 4th Embodiment of this invention. It is the top view which looked at the lower part from AA of FIG. It is sectional drawing which shows the 5th Embodiment of this invention. It is the top view which looked at the lower part from AA of FIG. It is sectional drawing which shows the 6th Embodiment of this invention. It is sectional drawing which shows the 7th Embodiment of this invention. It is sectional drawing which shows the other form which protects the end surface of the radiation detection panel of the apparatus of FIG. It is sectional drawing which shows the other form which protects the end surface of the radiation detection panel of the apparatus of FIG. It is sectional drawing which shows the other form which protects the end surface of the radiation detection panel of the apparatus of FIG. It is sectional drawing which shows the other form which protects the end surface of the radiation detection panel of the apparatus of FIG. It is sectional drawing which shows the 8th Embodiment of this invention. It is sectional drawing which shows the 9th Embodiment of this invention. It is the top view which looked at the lower part from AA of FIG. It is a block diagram which shows one Embodiment of the radiation imaging system using the radiation detection apparatus of this invention. It is sectional drawing which shows the direct type radiation detection apparatus of a prior art example. It is sectional drawing which shows the indirect type radiation detection apparatus of a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Photoelectric conversion panel 101 Transparent insulating substrate 102 Photoelectric conversion element 103 Switch element 104 Insulation protective layer 111 TAB
112 PCB board 150 Wavelength converter 151 Phosphor layer 152 Protective layer 200 Backlight unit 201 LED
202 LED mounting substrate 211 Backlight chassis 212 Backlight chassis 213 Groove 215 Through hole 221 Reflector plate 223 Through hole 231 Light guide plate 233 Groove 235 Through hole 241 Diffusion plate 243 Through hole 301 Chassis for device 302 Exhaust introduction part 304 Chassis for device 305 Groove 306 Chassis for device 308 Chassis for device 309 Chassis for device 401 Sealing resin 402 End face sealing base 411 Rubber-like resin 412 O-ring 421 Rubber-like resin 431-435 End face protection base 441 Sealing resin 451 Sealing resin 501 Sealing lid 502 Valve 503 Pump 504 Exhaust piping 505 Exhaust piping 507 Buffer chamber 508 Valve 600 Indirect radiation detection panel

Claims (19)

A radiation detection panel having a plurality of conversion elements, and an electromagnetic wave disposed on the second surface side opposite to the first surface side on which the radiation of the radiation detection panel is incident and irradiating the plurality of conversion elements of the radiation detection panel with electromagnetic waves In the radiation detection apparatus having the generation means, the electromagnetic wave generation means includes a fixing means for fixing the electromagnetic wave generation means to the radiation detection panel, and evacuates the radiation detection panel and the fixing means. Is fixed to the radiation detection panel. The radiation detection apparatus according to claim 1, further comprising an end surface sealing unit for forming a sealed space between the radiation detection panel and the fixing unit. The radiation detection apparatus according to claim 2, wherein the end surface sealing unit protects an end surface of the radiation detection panel. 4. The radiation detection apparatus according to claim 2, wherein the end surface sealing unit includes an exhaust introduction part for creating a vacuum between the radiation panel and the fixing unit. 5. The radiation detection apparatus according to claim 4, wherein the exhaust introduction unit includes exhaust sealing means for maintaining a vacuum between the radiation detection panel and the fixing means. The radiation detection apparatus according to claim 5, wherein the exhaust sealing unit is a valve. The radiation detection apparatus according to claim 1, wherein the fixing unit includes an exhaust introduction unit for introducing a vacuum between the radiation panel and the radiation panel. The radiation detection apparatus according to claim 1, wherein the fixing unit has a buffer space for promoting vacuum introduction or vacuum holding with the radiation detection panel. The radiation detection apparatus according to claim 1, wherein the electromagnetic wave generation unit has a buffer space for promoting vacuum holding between the radiation detection panel and the fixing unit. . The radiation detection apparatus according to claim 1, wherein the electromagnetic wave generation unit has an introduction space for promoting vacuum introduction between the radiation detection panel and the fixing unit. . The radiation detection apparatus according to claim 1, further comprising a buffer chamber for promoting vacuum holding between the radiation detection panel and the fixing unit. The radiation detection apparatus according to claim 2, wherein the end surface sealing unit includes an electromagnetic wave generation source of the electromagnetic wave generation unit. The radiation detection apparatus according to claim 1, further comprising a wavelength converter on a second surface side of the radiation detection panel. The radiation detection apparatus according to claim 1, wherein the radiation detection panel includes at least a wavelength converter, a photoelectric conversion element, and a switch element. The radiation detection apparatus according to claim 12, wherein the wavelength converter is a phosphor. The radiation detection apparatus according to claim 1, wherein the radiation detection panel includes at least a direct conversion type semiconductor that directly converts radiation into an electric charge, a capacitor element, and a switch element. The radiation detection apparatus according to claim 1, wherein the electromagnetic wave generation unit irradiates the generated electromagnetic wave to any one of a wavelength converter, a photoelectric conversion element, and a switch element. The radiation detection apparatus according to claim 1, wherein the electromagnetic wave generation unit irradiates the generated electromagnetic wave to any one of a direct conversion semiconductor element, a capacitor element, and a switch element. The radiation detection apparatus according to any one of claims 1 to 18,
Signal processing means for processing signals from the radiation detection device;
Recording means for recording a signal from the signal processing means;
Display means for displaying a signal from the signal processing means;
Transmission processing means for transmitting a signal from the signal processing means;
A radiation imaging system comprising: a radiation source for generating the radiation.

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