JP2007160170A5 - - Google Patents

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Publication number
JP2007160170A5
JP2007160170A5 JP2005357671A JP2005357671A JP2007160170A5 JP 2007160170 A5 JP2007160170 A5 JP 2007160170A5 JP 2005357671 A JP2005357671 A JP 2005357671A JP 2005357671 A JP2005357671 A JP 2005357671A JP 2007160170 A5 JP2007160170 A5 JP 2007160170A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005357671A
Other languages
Japanese (ja)
Other versions
JP2007160170A (ja
JP4664198B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005357671A priority Critical patent/JP4664198B2/ja
Priority claimed from JP2005357671A external-priority patent/JP4664198B2/ja
Priority to TW095142407A priority patent/TWI417982B/zh
Priority to KR1020060125587A priority patent/KR101280340B1/ko
Publication of JP2007160170A publication Critical patent/JP2007160170A/ja
Publication of JP2007160170A5 publication Critical patent/JP2007160170A5/ja
Application granted granted Critical
Publication of JP4664198B2 publication Critical patent/JP4664198B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005357671A 2005-12-12 2005-12-12 基板の処理装置 Expired - Fee Related JP4664198B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005357671A JP4664198B2 (ja) 2005-12-12 2005-12-12 基板の処理装置
TW095142407A TWI417982B (zh) 2005-12-12 2006-11-16 Substrate processing device
KR1020060125587A KR101280340B1 (ko) 2005-12-12 2006-12-11 기판의 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005357671A JP4664198B2 (ja) 2005-12-12 2005-12-12 基板の処理装置

Publications (3)

Publication Number Publication Date
JP2007160170A JP2007160170A (ja) 2007-06-28
JP2007160170A5 true JP2007160170A5 (ko) 2009-01-29
JP4664198B2 JP4664198B2 (ja) 2011-04-06

Family

ID=38243677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005357671A Expired - Fee Related JP4664198B2 (ja) 2005-12-12 2005-12-12 基板の処理装置

Country Status (3)

Country Link
JP (1) JP4664198B2 (ko)
KR (1) KR101280340B1 (ko)
TW (1) TWI417982B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100892285B1 (ko) * 2007-10-22 2009-04-07 주식회사 디엠에스 기판 세정 장치
CN102513321A (zh) * 2011-11-01 2012-06-27 南京烨拓自动化设备有限公司 小尺寸玻璃双面清洗机
CN102716882A (zh) * 2012-01-13 2012-10-10 东莞宏威数码机械有限公司 清洗抛光机构及清洗抛光系统
CN103846263B (zh) * 2014-03-07 2016-11-23 上海北玻镀膜技术工业有限公司 一种新型清洗机盘刷机构
CN108080383A (zh) * 2017-12-08 2018-05-29 合肥市春华起重机械有限公司 一种汽车玻璃清洗装置
CN109612253B (zh) * 2018-11-21 2020-09-01 深圳市华星光电技术有限公司 双滚轮装置
CN112427355A (zh) * 2020-12-03 2021-03-02 济南奥图自动化股份有限公司 一种全自动板料干式清洗装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082482U (ja) * 1983-11-11 1985-06-07 株式会社ツダヨネ ヘルド洗浄装置
JPH0891105A (ja) * 1994-09-21 1996-04-09 Mk Seiko Co Ltd マット洗浄機
JP3533884B2 (ja) * 1997-06-03 2004-05-31 日立電子エンジニアリング株式会社 基板洗浄装置
JP2001213517A (ja) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置

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