JP2007152613A - Manufacturing method of metal mask plate for screen printing, and metal mask plate for screen printing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a metal mask plate for screen printing which can prevent a distortion in the contour of a printed pattern even in the case of obtaining the printed pattern of a thin layer and besides can make the thickness of the printed pattern uniform. <P>SOLUTION: A plurality of recesses 10a are formed by etching in one surface (surface on the side to come into contact with a printing object surface) of a metal plate MP and thereafter a plurality of paste passing holes 10c are formed in each of bottom walls 10b of the recesses 10a by boring by irradiation with a laser so that they recede the peripheral wall of the recess 10a. Thereby the metal mask plate 10 is manufactured. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for producing a metal mask plate for screen printing and a metal mask plate for screen printing used in a printing process or the like for manufacturing electronic components.

FIG. 1 is a partial perspective view of a conventional metal mask plate for screen printing, in which 1 is a metal mask plate and 1a is a plurality of paste passage holes formed in the metal mask plate 1. FIG. This metal mask plate 1 is manufactured by forming a plurality of paste passage holes in a metal plate as a base material. There are an electroforming method, an etching method, a laser processing method, and the like as methods for forming the paste passage hole, but the laser processing method with the shortest manufacturing lead time has become the mainstream in recent years.
JP-A-5-338370

  Printing using the metal mask plate 1 is performed by filling the paste passage hole 1a with paste using a squeegee, and the paste filled in the paste passage hole 1a is transferred to the printing surface. In order to finely finish the outline of the print pattern, it is desirable that the cross-sectional shape of the inner wall of the paste passage hole 1a is aligned in the circumferential direction as shown in FIG. However, when forming a paste passage hole by a laser processing method, if a thin metal plate is used as a base material in order to obtain a thin printed pattern, it is not easy to hold the metal plate in a flat state. Therefore, the focal position of the laser beam with respect to the metal plate changes relatively due to the influence of the bending that can often occur in the metal plate, and the influence of the condensing angle of the laser beam is added to this, and the inner wall of the paste passage hole 1a. 3A and 3B occur in the circumferential direction (see reference numerals 1a-1 and 1a-2) in the circumferential direction, and the variation causes distortion in the contour of the printed pattern. End up.

  Further, since the paste passage hole 1a of the metal mask plate 1 matches the intended shape of the printing pattern, when the paste is filled into the paste passage hole 1a using a squeegee, the peripheral portion of the filling paste As shown in FIG. 4, the thickness of the peripheral portion of the transfer paste PAa on the printing surface of the printing material IL is also thicker than that of the inner portion, as shown in FIG. The thickness will be uneven.

  The present invention was created in view of the above circumstances, and the object of the present invention is to prevent the outline of the printed pattern from being distorted even when a thin printed pattern is obtained, and An object of the present invention is to provide a metal mask plate for screen printing and a metal mask plate for screen printing that can make the thickness of the printing pattern uniform.

  In order to achieve the above object, in the method of manufacturing a metal mask plate for screen printing according to the present invention, a plurality of recesses are formed by etching on at least one surface of a metal plate, and thereafter, the bottom walls of the recesses are respectively provided from the peripheral walls of the recesses. It is characterized in that a plurality of paste passage holes are formed by laser irradiation so as to be separated from each other.

  According to this manufacturing method, the contour of the printed pattern can be controlled by the recesses formed by etching, and there is variation in the cross-sectional shape of the inner walls of the plurality of paste passage holes formed in the bottom wall by drilling by laser irradiation. However, in addition to preventing the printed pattern outline from being distorted due to the variation, the printed pattern outline of the thin layer can be finely finished, and the bottom wall of the recessed part can be separated from the peripheral wall of the recessed part. The paste passage hole is formed and the recess is filled with the paste through the paste passage hole group, and the upper uneven portion corresponding to the paste passage hole group in the transfer paste is leveled by its own viscosity and fluidity to transfer the paste. Prevents the thickness of the peripheral part of the paste from becoming thicker than the inner part of the paste, making the thickness of the thin printed pattern uniform It is possible to, the screen printing metal mask plate can be manufactured in a stable manner.

  In addition, the method of manufacturing a metal mask plate for screen printing according to the present invention includes an operation of forming a plurality of first recesses on one surface of a metal plate by etching and each first recess on a surface opposite to the one surface. A plurality of second recesses are simultaneously formed by etching so as to face each other, and thereafter, a plurality of paste passage holes are laser-irradiated on the common bottom walls of the first and second recesses so as to be separated from the peripheral walls of both recesses. It is characterized by being formed by perforation.

  Furthermore, in the method of manufacturing a metal mask plate for screen printing according to the present invention, a plurality of first recesses are formed on one surface of the metal plate by etching, and thereafter, each surface is opposite to the one surface of the metal plate. A plurality of second recesses are formed by etching so as to face the first recesses, and then a plurality of paste passage holes are irradiated on the bottom walls shared by the first recesses and the second recesses so as to be separated from the peripheral walls of both recesses. It is characterized by being formed by perforation.

  According to these manufacturing methods, the contour of the printed pattern can be controlled by the first concave portion formed by etching, and there is variation in the cross-sectional shape of the inner walls of the plurality of paste passage holes formed in the bottom wall by drilling by laser irradiation. In addition to preventing the printed pattern outline from being distorted due to the variation, the thin printed pattern outline can be finished beautifully. In addition, the first and second recesses share a common bottom. A plurality of paste passage holes are formed on the wall so as to be separated from the peripheral walls of both recesses, and the paste is filled into the first recess through the paste passage hole group, and the upper uneven portion corresponding to the paste passage hole group in the transfer paste Prevents the thickness of the peripheral portion of the transfer paste from becoming thicker than the inner portion of the transfer paste. It is possible to equalize the thickness of the printed pattern of the thin layer, the screen printing metal mask plate can be stably manufactured.

  On the other hand, the metal mask plate for screen printing according to the present invention has a plurality of recesses formed by etching on at least the surface in contact with the surface to be printed, and perforation by laser irradiation so that each bottom wall of the recess is separated from the peripheral wall of the recess. And a plurality of paste passage holes formed by the method.

  According to this metal mask plate, the contour of the printed pattern can be controlled by the recesses formed by etching, and the cross-sectional shape of the inner walls of the plurality of paste passage holes formed in the bottom wall by drilling by laser irradiation is varied. In addition to preventing the distortion of the printed pattern outline due to the variation, the printed pattern outline of the thin layer can be finely finished, and the bottom wall of the recessed part is separated from the peripheral wall of the recessed part. A plurality of paste passage holes are formed and the recesses are filled with the paste through the paste passage hole group, and the upper uneven portion corresponding to the paste passage hole group in the transfer paste is leveled according to its own viscosity and fluidity. The thickness of the printed pattern of the thin layer prevents the peripheral part of the transfer paste from becoming thicker than the inner part. It can be made uniform.

  Further, the metal mask plate for screen printing of the present invention has a plurality of first recesses formed by etching on the surface in contact with the surface to be printed, and a surface on the side opposite to the surface in contact with the surface to be printed. A plurality of second recesses formed by etching so as to face the first recesses, and a plurality of holes formed by perforation by laser irradiation on the bottom walls shared by the first recesses and the second recesses away from the peripheral walls of both recesses The paste passage hole is provided.

  According to this metal mask plate, the contour of the printed pattern can be controlled by the first recess formed by etching, and the cross-sectional shape of the inner wall of the plurality of paste passage holes formed in the bottom wall by drilling by laser irradiation varies. In addition to preventing the printed pattern outline from being distorted due to the effect of the variation, the thin printed pattern outline can be finished beautifully. A plurality of paste passage holes are formed in the bottom wall so as to be separated from the peripheral walls of both recesses, and the paste is filled into the first recesses through the paste passage hole group, and the upper unevenness corresponding to the paste passage hole group in the transfer paste The portion is leveled by its own viscosity and fluidity to prevent the peripheral portion of the transfer paste from becoming thicker than its inner portion. It is possible to equalize the thickness of the printed pattern of the thin layer is.

  ADVANTAGE OF THE INVENTION According to this invention, even when it is a case where the printing pattern of a thin layer is obtained, it can prevent that the outline of this printing pattern produces distortion, and also the thickness of this printing pattern can make the thickness of this printing pattern uniform. Manufacturing method and metal mask plate for screen printing can be provided.

  The above object and other objects, structural features, and operational effects of the present invention will become apparent from the following description and the accompanying drawings.

[First Embodiment]
5 to 18 show the first embodiment of the present invention, FIG. 5 is a partial perspective view of the metal mask plate, and FIGS. 6 to 12 are for explaining the manufacturing process of the metal mask plate shown in FIG. FIG. 13 to FIG. 15 are partial enlarged sectional views showing the printing principle of the metal mask plate shown in FIG. 5, and FIG. 16 is a first view of the metal mask plate shown in FIG. FIG. 17 and FIG. 18 are a partially enlarged sectional view and a partially enlarged bottom view showing a second modified example of the metal mask plate shown in FIG.

  The metal mask plate 10 shown in FIG. 5 is irradiated with laser so that a plurality of recesses 10a formed by etching on the surface in contact with the surface to be printed and a bottom wall 10b of the recesses 10a are separated from the peripheral wall of the recesses 10a. And a plurality of paste passage holes 10c formed by perforation.

  First, a manufacturing process of the metal mask plate shown in FIG. 5 will be described with reference to FIGS.

  First, a metal plate MP serving as a base material is prepared (see FIG. 6). As the metal plate MP, a stainless plate of about 0.02 mm to 0.30 mm is generally used.

  Then, a resist RE is applied with a predetermined thickness on one surface of the metal plate MP (the surface on the side in contact with the surface to be printed) (see FIG. 6).

  Then, a plurality of openings REa are formed in a predetermined arrangement in the resist RE (see FIG. 7). Each opening REa has a rectangular shape having a predetermined width W1 and a length L1, as shown in FIG.

  Then, one surface of the metal plate MP is etched to form a plurality of recesses 10a corresponding to the respective openings REa (see FIGS. 8 and 9). Each recess 10a has a rectangular shape having a predetermined width W1, a predetermined length L1, and a predetermined depth, and a portion having a predetermined thickness on the upper side of each recess 10a serves as a bottom wall 10b of each recess 10a.

  Then, the resist RE remaining on one surface of the metal plate MP is removed from the metal plate MP (see FIG. 10).

  Then, a plurality of paste passage holes 10c are formed in the bottom wall 10b of each recess 10a by drilling by laser irradiation so as to be separated from the peripheral wall of the recess 10a (see FIGS. 11 and 12). In the illustrated example, the plurality of paste holes 10c have a 6 × 15 matrix arrangement, and each paste passage hole 10c forms a square having a width D11a and a length D11b. In addition, the distance in the width direction between the plurality of paste passage holes 10c closest to the peripheral wall of the recess 10a and the peripheral wall of the recess 10a is D12a, the distance in the length direction is D12b, and both the distances D12a and D12b are equal. Furthermore, the width direction adjacent space | interval of the some paste passage hole 10c is D13a, the length direction adjacent space | interval is D13b, and both adjacent space | intervals D13a and D13b are equal. Incidentally, the separation distances D12a and D12b between the paste passage hole 10c group and the peripheral wall of the recess 10a are determined by the aperture angle of the laser beam used when forming the paste passage hole 10c and the maximum deflection amount of the metal plate MP. It is preferable to set it larger than the maximum diffusion width.

  Thus, the metal mask plate 10 shown in FIG. 5 is manufactured. Next, the printing principle based on the metal mask plate 10 shown in FIG. 5 will be described with reference to FIGS.

  When the thin layer printing pattern is formed on the printing surface of the printing material IL, the metal mask plate 10 is arranged so that the lower surface (the surface on which the recess 10a is formed) is in contact with the printing surface (see FIG. 13).

  Then, the paste PA placed on the upper surface of the metal mask plate 10 is moved in a predetermined direction by a squeegee (not shown) and pushed into the paste passage hole 10c group of the bottom wall 10b of each recess 10a, and the pushed paste PA is put into the paste passage hole. The 10c group and the recess 10a are filled (see FIG. 13). At this time, the paste passage hole 10c group serves to control the amount of paste filled in the recess 10a to be a predetermined amount, and the separation distances D12a and D12b between the paste passage hole 10c group and the peripheral wall of the recess 10a are as follows. It fulfills the role of filling the paste in the vicinity of the peripheral wall of the recess 10a in the same manner as the other portions. That is, paste filling into the paste passage hole 10c group of each concave portion 10a and its bottom wall 10b is performed evenly.

  Then, the metal mask 10 is separated from the substrate IL (see FIG. 14). When the metal mask 10 is separated from the printing material IL, the paste PA filled in each concave portion 10a and the paste passage hole 10c group of the bottom wall 10b is transferred to the printing surface in a substantially unchanged shape, but each concave portion 10a. In addition, the paste filling into the paste passage hole 10c group of the bottom wall 10b is performed evenly, and the upper uneven portion corresponding to the paste passage hole 10c group in the transfer paste PAa is shown in FIG. As described above, the transfer paste PAa (printing pattern) is made uniform in thickness by being evenly leveled by its own viscosity and fluidity.

  According to the first embodiment, since the contour of the print pattern can be controlled by the recess 10a formed by etching, the cross-sectional shape of the inner wall of the plurality of paste passage holes 10c formed in the bottom wall 10b by drilling by laser irradiation is obtained. Even if there is a variation, it is possible to prevent the outline of the printed pattern from being distorted due to the influence of the variation, and to finish the outline of the thin layer printed pattern cleanly.

  Further, according to the first embodiment, the plurality of paste passage holes 10c are formed in the bottom wall 10b of the recess 10a so as to be separated from the peripheral wall of the recess 10a, and the paste filling into the recess 10a is performed through the paste passage hole 10c group. In addition, since the upper uneven portion corresponding to the paste passage hole 10c group in the transfer paste PAa is leveled by its own viscosity and fluidity, the peripheral portion of the transfer paste PAa is thicker than the inner portion. Can be prevented, and the thickness of the thin printed pattern can be made uniform.

  Furthermore, according to the first embodiment, a plurality of paste passage holes 10c are formed in each of the bottom walls 10b of the recesses 10a, and the recesses are formed even when the large-area metal mask plate 10 having a large number of printing patterns is formed. Since the bending rigidity and strength can be improved as compared with the conventional metal mask plate in which holes corresponding to 10a are formed, a large number of thin printed patterns can be formed simultaneously and satisfactorily without deformation.

  FIG. 16 shows a first modification of the metal mask plate 10 shown in FIG. The metal mask plate 10 shown in the figure is different from the metal mask plate 10 shown in FIG. 5 in that the shape of the paste passage hole 10c ′ formed in each bottom wall 10b of the recess 10a is a circle having a diameter R11. It is in. The distance between the plurality of paste passage holes 10c 'closest to the peripheral wall of the recess 10a and the peripheral wall of the recess 10a is D12a, the distance between the lengths is D12b, and the distances D12a and D12b are equal. The plurality of paste passage holes 10c 'have a width direction adjacent interval D13a, a length direction adjacent interval D13b, and both adjacent intervals D13a and D13b are equal.

  In this first modification, the same effects as those described above can be obtained although the shape of the paste passage hole 10c 'is different. Of course, even if the shape of the paste passage hole 10c is a polygon other than a square, the same effect as described above can be obtained.

  17 and 18 show a second modification of the metal mask plate 10 shown in FIG. The difference between the metal mask plate 10 shown in FIG. 5 and the metal mask plate 10 shown in FIG. 5 is that the most of the plurality of paste passage holes 10c formed in the bottom wall 10b of the recess 10a is located on the peripheral wall of the recess 10a. The opening areas of the plurality of paste passage holes 10c1 close to each other are made smaller than the opening areas of the other paste passage holes 10c surrounded by the plurality of paste passage holes 10c1, and the plurality of paste passages closest to the peripheral wall of the recess 10a The adjacent interval between the holes 10c1 is larger than the adjacent interval between the plurality of paste passage holes 10c surrounded by the plurality of paste passage holes 10c1. The plurality of paste passage holes 10c1 closest to the peripheral wall of the recess 10a form a square having a width D11c and a length D11d, and the width D11c and the length D11d are the width D11a and the length D11b of the other plurality of paste passage holes 10c. Smaller than. The plurality of paste passage holes 10c1 closest to the peripheral wall of the recess 10a have a width direction adjacent interval of D13c and a length direction adjacent interval of D13c. Both adjacent spaces D13c and D13d are adjacent to the other plurality of paste passage holes 10c. It is larger than the distances D13a and D13b.

  In this second modification, among the plurality of paste passage holes 10c formed in each bottom wall 10b of the recess 10a, the plurality of paste passage holes 10c1 closest to the peripheral wall of the recess 10a are passed to the peripheral portion of the recess 10a. By suppressing the paste filling, it is possible to more accurately prevent the peripheral portion of the transfer paste PAa from becoming thicker than the inner portion, thereby contributing to the uniform thickness of the thin printed pattern. . Of course, the same effect can be obtained by reducing the number of paste passage holes 10c1 closest to the peripheral wall of the recess 10a without changing the opening area. Other functions and effects are the same as those described above.

[Second Embodiment]
19 to 29 show a second embodiment of the present invention. FIG. 19 is a partial perspective view of the metal mask plate, and FIGS. 20 to 26 are for explaining the manufacturing process of the metal mask plate shown in FIG. FIG. 27 is a partially enlarged bottom view showing a first modification of the metal mask plate shown in FIG. 19, and FIGS. 28 and 29 are views of the metal mask plate shown in FIG. It is the partial expanded sectional view and partial expanded bottom view which show 2 modifications.

  The metal mask plate 20 shown in FIG. 19 has a plurality of first recesses 20a formed by etching on the surface in contact with the surface to be printed, and each surface on the surface opposite to the surface in contact with the surface to be printed. Laser irradiation is performed so that a plurality of second recesses 20b formed by etching so as to face one recess 20a and a bottom wall 20c shared by the first recess 20a and the second recess 20b are separated from the peripheral walls of both recesses 20a and 20b. A plurality of paste passage holes 20d formed by perforation.

  First, a manufacturing process of the metal mask plate shown in FIG. 19 will be described with reference to FIGS.

  First, a metal plate MP serving as a base material is prepared (see FIG. 20). As the metal plate MP, a stainless plate of about 0.02 mm to 0.30 mm is generally used.

  Then, a resist RE is applied with a predetermined thickness on one surface of the metal plate MP (the surface in contact with the surface to be printed) and the surface opposite to the one surface (see FIG. 20).

  A plurality of openings REa are formed in a predetermined arrangement in the lower resist RE, and a plurality of openings REa are formed in the upper resist RE so as to face the respective openings REa of the lower resist RE. An array is formed (see FIG. 21). Each upper opening REa and each lower opening REa form a rectangle having a predetermined width W2 and length L2, as shown in FIG.

  Then, one surface of the metal plate MP and the surface opposite to the one surface are simultaneously etched to form a plurality of first recesses 20a corresponding to the openings REa on the one surface, A plurality of second recesses 20a corresponding to the openings REa are formed on the surface (see FIGS. 22 and 23). Each of the first recesses 20a and each of the second recesses 20b has a rectangular shape having a predetermined width W1, a predetermined length L1, and a predetermined depth, and since the etching is performed at the same time, the depths of both the recesses 20a and 20b are almost equal. equal. Further, a portion having a predetermined thickness existing between both concave portions 20a and 20b serves as a common bottom wall 20c between the concave portions 20a and 20b. Furthermore, when the metal plate MP is seen through in the thickness direction, the outline of the second recess 20b matches the outline of the first recess 20a.

  Then, the resist RE remaining on the surface opposite to the one surface of the metal plate MP is removed from the metal plate MP (see FIG. 24).

  Then, a plurality of paste passage holes 20d are formed on the common bottom wall 20c of both the recesses 20a and 20b by laser irradiation so as to be separated from the peripheral walls of the both recesses 20a and 20b (see FIGS. 25 and 26). In the illustrated example, the plurality of paste holes 20d have a 6 × 15 matrix arrangement, and each paste passage hole 20d forms a square having a width D21a and a length D21b. In addition, the width direction interval between the plurality of paste passage holes 20d closest to the peripheral walls of both concave portions 20a and 20b and the peripheral walls of both concave portions 20a and 20b is D22a, the length direction interval is D22b, and both intervals D22a and D22b are equal. . Furthermore, the width direction adjacent space | interval of the some paste passage hole 20d is D23a, the length direction adjacent space | interval is D23b, and both adjacent space | intervals D23a and D23b are equal. Incidentally, the separation distances D22a and D22b between the paste passage hole 20d group and the peripheral walls of the recesses 20a and 20b are determined by the aperture angle of the laser beam used when forming the paste passage hole 20d and the maximum deflection amount of the metal plate MP. It is preferable to set larger than the determined maximum diffusion width.

  Thus, the metal mask plate 20 shown in FIG. 19 is manufactured. Next, the printing principle based on the metal mask plate 20 shown in FIG. 19 will be described.

  When the thin layer printing pattern is formed on the printing surface of the printing material IL, the metal mask plate 20 is disposed such that the lower surface (the surface on which the first recess 20a is formed) is in contact with the printing surface.

  Then, the paste PA placed on the upper surface of the metal mask plate 20 is moved in a predetermined direction by a squeegee (not shown), and passes through the second recesses 20b into the paste passage holes 20d in the common bottom wall 20c at both recesses 20a and 20b. The paste PA pushed in is filled into the paste passage hole 20d group and the first recess 20a. At this time, the paste passage hole 20d group serves to control the amount of paste filled in the first recess 20a to be a predetermined amount, and the separation interval between the paste passage hole 20d group and the peripheral wall of the first recess 20a. D22a and D22b serve to perform paste filling in the vicinity of the peripheral wall of the first recess 20a in the same manner as other portions. That is, paste filling into the paste passage hole 20d group of each first recess 20a and its bottom wall 20c is performed without any bias.

  Then, the metal mask 20 is separated from the substrate IL. When the metal mask 20 is separated from the substrate IL, the paste PA filled in the first recesses 20a and the paste passage holes 20d in the bottom wall 20c is transferred to the surface to be printed in almost the same shape. Combined with the fact that the paste filling into the paste passage hole 20d group of the first recess 20a and its bottom wall 20c is performed without bias, the upper uneven portion corresponding to the paste passage hole 20d group in the transfer paste PAa is It is leveled evenly by its own viscosity and fluidity, and the thickness of the transfer paste PAa (print pattern) is made uniform.

  According to the second embodiment, since the contour of the print pattern can be controlled by the first recess 20a formed by etching, the cross section of the inner wall of the plurality of paste passage holes 20d formed in the bottom wall 20c by drilling by laser irradiation. Even if there is variation in shape, the contour of the printed pattern can be prevented from being distorted due to the variation, and the contour of the thin printed pattern can be finished finely.

  Further, according to the second embodiment, a plurality of paste passage holes 20d are formed in the common bottom wall 20c of the first recess 20a and the second recess 20b so as to be separated from the peripheral walls of both the recesses 20a, 20b. The paste is filled into the first recess 20a through the passage hole 20d group, and the upper uneven portion corresponding to the paste passage hole 20d group in the transfer paste PAa is leveled by its own viscosity and fluidity, so that the peripheral edge of the transfer paste PAa The thickness of the portion can be prevented from becoming thicker than the inner portion, and the thickness of the thin printed pattern can be made uniform.

  Furthermore, according to the second embodiment, the second concave portion 20b that is not related to the thickness of the printing pattern is formed so as to face the first concave portion 20a with the bottom wall 20c interposed therebetween. A printed pattern thinner than that can be formed.

  Furthermore, according to the second embodiment, the first recess 20a and the second recess 20b have a structure in which a plurality of paste passage holes 20d are formed in the common bottom wall 20c, and a large area metal having a large number of print patterns. Even if the mask plate 20 is formed, the bending rigidity and strength can be improved as compared with the conventional metal mask plate in which holes corresponding to the first recesses 20a are formed. And can be formed satisfactorily.

  FIG. 27 shows a first modification of the metal mask plate 20 shown in FIG. The metal mask plate 20 shown in the figure is different from the metal mask plate 20 shown in FIG. 19 in that the shape of the paste passage hole 20d ′ formed in each of the bottom walls 20c shared by the concave portions 20a and 20b is the diameter R21. It is in the point made into the circle. The distance in the width direction between the plurality of paste passage holes 20d 'closest to the peripheral walls of both the recesses 20a and 20b and the peripheral wall of both the recesses 20a and 20b is D22a, the distance in the length direction is D22b, and both the distances D22a and D22b are equal. The plurality of paste passage holes 20d 'have an adjacent interval in the width direction of D23a, an adjacent interval in the length direction of D23b, and the both adjacent intervals D23a and D23b are equal.

  In this first modification, the same effects as those described above can be obtained, although the shape of the paste passage hole 20d 'is different. Of course, even if the shape of the paste passage hole 20d is a polygon other than a square, the same effects as described above can be obtained.

  17 and 18 show a second modification of the metal mask plate 20 shown in FIG. The metal mask plate 20 shown in the figure is different from the metal mask plate 20 shown in FIG. 19 in that both of the plurality of paste passage holes 20d formed in the bottom wall 20c shared by the concave portions 20a and 20b are both. The opening areas of the plurality of paste passage holes 20d1 closest to the peripheral walls of the recesses 20a and 20b are made smaller than the opening areas of the other paste passage holes 20d surrounded by the plurality of paste passage holes 20d1, and both the recesses 20a , 20b, the distance between adjacent paste passage holes 20d1 closest to the peripheral wall is larger than the distance between adjacent paste passage holes 20d surrounded by the plurality of paste passage holes 20d1. The plurality of paste passage holes 20d1 closest to the peripheral walls of both concave portions 20a, 20b form a square having a width D21c and a length D21d, and the width D21c and the length D21d are the widths D21a and D21a of the other plurality of paste passage holes 20d. It is smaller than the length D21b. Further, the plurality of paste passage holes 20d1 closest to the peripheral walls of both concave portions 20a and 20b have a width direction adjacent interval D23c and a length direction adjacent interval D23c, and both adjacent spaces D23c and D23d are other paste passage holes. It is larger than the adjacent spacing D23a and D23b of 20d.

  In the second modification, among the plurality of paste passage holes 20d formed in the bottom wall 20c shared by both the recesses 20a and 20b, a plurality of paste passage holes closest to the peripheral walls of the both recesses 20a and 20b. By suppressing the paste filling to the peripheral portion of the first recess 20a through 20d1, it is possible to more accurately prevent the peripheral portion of the transfer paste PAa from becoming thicker than the inner portion, thereby printing a thin layer. Contributes to uniform pattern thickness. Of course, the same effect can also be obtained by reducing the number of the plurality of paste passage holes 20d1 closest to the peripheral walls of the recesses 20a and 20b without changing the opening area. Other functions and effects are the same as those described above.

[Third Embodiment]
30 to 44 show a third embodiment of the present invention. FIG. 30 is a partial perspective view of the metal mask plate, and FIGS. 31 to 41 are for explaining the manufacturing process of the metal mask plate shown in FIG. FIG. 42 is a partially enlarged bottom view showing a first modification of the metal mask plate shown in FIG. 30, and FIGS. 43 and 44 are shown in FIG. It is the partial expanded sectional view and partial expanded bottom view which show the 2nd modification of a metal mask plate.

  The metal mask plate 30 shown in FIG. 30 has a plurality of first recesses 30a formed by etching on the surface in contact with the surface to be printed, and each surface on the surface opposite to the surface in contact with the surface to be printed. Laser irradiation is performed so that a plurality of second recesses 30b formed by etching so as to face one recess 30a and a bottom wall 30c shared by the first recess 30a and the second recess 30b are separated from the peripheral walls of both recesses 30a and 30b. A plurality of paste passage holes 30d formed by perforation, and when the metal mask plate 30 is seen through in the thickness direction, the outline of the second recess 30b is positioned outside the outline of the first recess 30a. To do.

  First, a manufacturing process of the metal mask plate shown in FIG. 30 will be described with reference to FIGS.

  First, a metal plate MP as a base material is prepared (see FIG. 31). As the metal plate MP, a stainless plate of about 0.02 mm to 0.30 mm is generally used.

  Then, a resist RE is applied with a predetermined thickness on one surface of the metal plate MP (the surface in contact with the surface to be printed) and the surface opposite to the one surface (see FIG. 31).

  Then, a plurality of openings REa are formed in a predetermined arrangement in the lower resist RE (see FIG. 32). Each opening REa has a rectangular shape having a predetermined width W31 and a length L31 as shown in FIG.

  Then, one surface of the metal plate MP is etched to form a plurality of first recesses 30a corresponding to the openings REa (see FIGS. 33 and 34). Each first recess 30a has a rectangular shape having a predetermined width W31, a predetermined length L31, and a predetermined depth.

  Then, after removing the resist RE remaining on the surface opposite to the one surface of the metal plate MP from the metal plate MP, a new resist RE is applied to both surfaces of the metal plate MP with a predetermined thickness (FIG. 35). reference). Each first recess 30a formed on one surface of the metal plate MP is covered by the application of the resist RE.

  Then, a plurality of openings REa are formed in a predetermined arrangement in the upper resist RE (see FIG. 36). As shown in FIG. 38, each opening REa has a rectangular shape having a predetermined width W32 and a length L32. The width W32 and the length L32 are larger than the width W31 and the length L31.

  Then, the surface opposite to the one surface of the metal plate MP is etched to form a plurality of second recesses 30a corresponding to the openings REa (see FIGS. 37 and 38). Each second recess 30b has a rectangular shape having a predetermined width W31, a predetermined length L31, and a predetermined depth, and the depth is larger than the depth of the first recess 30a. Further, a portion having a predetermined thickness existing between both the concave portions 30a and 30b serves as a common bottom wall 30c for both the concave portions 30a and 30b. Furthermore, when the metal plate MP is seen through in the thickness direction, the outline of the second recess 30b is located outside the outline of the first recess 30a.

  Then, the resist RE remaining on the surface opposite to the one surface of the metal plate MP is removed from the metal plate MP (see FIG. 39).

  Then, a plurality of paste passage holes 30d are formed on the common bottom wall 30c of both the recesses 30a and 30b by laser drilling so as to be separated from the peripheral walls of the both recesses 30a and 30b (see FIGS. 40 and 41). In the illustrated example, the plurality of paste holes 30d have a 6 × 15 matrix arrangement, and each paste passage hole 30d has a square shape having a width D31a and a length D31b. In addition, the width direction interval between the plurality of paste passage holes 30d closest to the peripheral walls of both concave portions 30a and 30b and the peripheral wall of the first concave portion 30a is D32a, the length direction interval is D32b, and both intervals D32a and D32b are equal. Furthermore, the width direction adjacent space | interval of the some paste passage hole 30d is D33a, the length direction adjacent space | interval is D33b, and both adjacent space | intervals D33a and D33b are equal. Incidentally, the separation distances D32a and D32b between the paste passage hole 30d group and the peripheral wall of the first recess 30a are determined by the aperture angle of the laser beam used when forming the paste passage hole 30d and the maximum deflection amount of the metal plate MP. It is preferable to set it larger than the maximum diffusion width.

  Thus, the metal mask plate 30 shown in FIG. 30 is manufactured. Next, the printing principle based on the metal mask plate 30 shown in FIG. 30 will be described.

  When the thin layer printing pattern is formed on the printing surface of the printing material IL, the metal mask plate 30 is arranged such that the lower surface (the surface on which the first recess 30a is formed) is in contact with the printing surface.

  Then, the paste PA placed on the upper surface of the metal mask plate 30 is moved in a predetermined direction by a squeegee (not shown), and passes through the second recesses 30b into the paste passing holes 30d in the common bottom wall 30c at both recesses 30a and 30b. The paste PA that has been pushed in is filled into the paste passage hole 30d group and the first recess 30a. At this time, the paste passage hole 30d group serves to control the amount of paste filled in the first recess 30a to be a predetermined amount, and the separation interval between the paste passage hole 30d group and the peripheral wall of the first recess 30a. D32a and D32b serve to perform paste filling in the vicinity of the peripheral wall of the first recess 30a in the same manner as other portions. That is, paste filling into the paste passage hole 30d group of each first recess 30a and its bottom wall 30c is performed without any bias.

  Then, the metal mask 30 is separated from the substrate IL. When the metal mask 30 is separated from the printing material IL, the paste PA filled in the first through-holes 30a and the paste passage holes 30d of the bottom wall 30c is transferred to the printing surface in a substantially unchanged shape. Combined with the fact that the paste filling into the paste passage hole 30d group of the first recess 30a and its bottom wall 30c is performed without any bias, the upper uneven portion corresponding to the paste passage hole 30d group in the transfer paste PAa is It is leveled evenly by its own viscosity and fluidity, and the thickness of the transfer paste PAa (print pattern) is made uniform.

  According to the third embodiment, since the contour of the print pattern can be controlled by the first recess 30a formed by etching, the cross section of the inner wall of the plurality of paste passage holes 30d formed in the bottom wall 30c by drilling by laser irradiation. Even if there is variation in shape, the contour of the printed pattern can be prevented from being distorted due to the variation, and the contour of the thin printed pattern can be finished finely.

  Further, according to the third embodiment, a plurality of paste passage holes 30d are formed on the bottom wall 30c shared by the first recess 30a and the second recess 30b so as to be separated from the peripheral walls of both the recesses 30a, 30b, and the paste The paste is filled into the first concave portion 30a through the group of passage holes 30d, and the upper uneven portion corresponding to the paste passage hole 30d in the transfer paste PAa is leveled by its own viscosity and fluidity, so that the peripheral edge of the transfer paste PAa The thickness of the portion can be prevented from becoming thicker than the inner portion, and the thickness of the thin printed pattern can be made uniform.

  Furthermore, according to the third embodiment, when the metal mask plate 30 is seen through in the thickness direction, the outline of the second recess 30b is located outside the outline of the first recess 30a, and the second recess 30b Since it is formed larger than the 1st recessed part 30a, the paste filling property to 30d of several paste passage holes 30d and the 1st recessed part 30a which were formed in the bottom wall 30c using the 2nd recessed part 30b can be improved. In addition, since the certainty of paste filling into the plurality of paste passage holes 30d closest to the peripheral wall of the second recess 30b can be improved, a blur due to the lack of paste is generated in the peripheral portion of the thin printed pattern. Nor.

  Furthermore, according to the third embodiment, the second concave portion 30b that is not related to the thickness of the printing pattern is formed so as to face the first concave portion 30a with the bottom wall 30c interposed therebetween. A printed pattern thinner than that can be formed.

  Furthermore, according to the third embodiment, the first concave portion 30a and the second concave portion 30b have a structure in which a plurality of paste passage holes 30d are formed in the common bottom wall 30c, and a large-area metal having a large number of printing patterns. Even if the mask plate 30 is formed, the bending rigidity and strength can be improved as compared with the conventional metal mask plate in which holes corresponding to the first recesses 30a are formed. And can be formed satisfactorily.

  FIG. 42 shows a first modification of the metal mask plate 30 shown in FIG. The metal mask plate 30 shown in the figure is different from the metal mask plate 30 shown in FIG. 30 in that the shape of the paste passage hole 30d ′ formed in each of the bottom walls 30c shared by the concave portions 30a and 30b is the diameter R31. It is in the point made into the circle. The distance in the width direction between the plurality of paste passage holes 30d 'closest to the peripheral walls of both the recesses 30a and 30b and the peripheral wall of the first recess 30a is D32a, the distance in the length direction is D32b, and both the distances D32a and D32b are equal. Further, the width direction adjacent interval of the plurality of paste passage holes 30d 'is D33a, the length direction adjacent interval is D33b, and both adjacent intervals D33a and D33b are equal.

  In the first modified example, although the shape of the paste passage hole 30d 'is different, the same effect as that described above can be obtained. Of course, even if the shape of the paste passage hole 30d is a polygon other than a square, the same effect as described above can be obtained.

  43 and 44 show a second modification of the metal mask plate 30 shown in FIG. The metal mask plate 30 shown in the figure is different from the metal mask plate 30 shown in FIG. 30 in that both of the plurality of paste passage holes 30d formed in the bottom wall 30c shared by both concave portions 30a and 30b are both. The opening areas of the plurality of paste passage holes 30d1 closest to the peripheral walls of the recesses 30a and 30b are made smaller than the opening areas of the other paste passage holes 30d surrounded by the plurality of paste passage holes 30d1, and both the recesses 30a , 30b, the distance between adjacent paste passage holes 30d1 closest to the peripheral wall is larger than the distance between adjacent paste passage holes 30d surrounded by the plurality of paste passage holes 30d1. The plurality of paste passage holes 30d1 closest to the peripheral walls of both concave portions 30a, 30b form a square having a width D31c and a length D31d, and the width D31c and the length D31d are the widths D31a and D31a of the other plurality of paste passage holes 30d. It is smaller than the length D31b. Further, the plurality of paste passage holes 30d1 closest to the peripheral walls of both the recesses 30a and 30b have a width direction adjacent interval D33c and a length direction adjacent interval D33c, and both adjacent spaces D33c and D33d are the other plurality of paste passage holes. It is larger than the adjacent distances D33a and D33b of 30d.

  In the second modification, among the plurality of paste passage holes 30d formed in the bottom wall 30c shared by both the concave portions 30a and 30b, the plurality of paste passage holes closest to the peripheral walls of the both concave portions 30a and 30b. By suppressing the paste filling to the peripheral portion of the first recess 30a through 30d1, it is possible to more accurately prevent the peripheral portion of the transfer paste PAa from becoming thicker than the inner portion thereof, thereby printing a thin layer. Contributes to uniform pattern thickness. Of course, the same effect can be obtained by reducing the number of paste passage holes 30d1 closest to the peripheral walls of the recesses 30a and 30b without changing the opening area. Other functions and effects are the same as those described above.

It is a fragmentary perspective view of the conventional metal mask plate for screen printing. FIG. 1 is a partially enlarged cross-sectional view of a metal mask plate. It is a partial expanded sectional view which shows the variation which arises in the cross-sectional shape of the inner wall of a paste passage hole. It is a partial expanded sectional view which shows the printing pattern with non-uniform thickness. It is a fragmentary perspective view of the metal mask plate which shows 1st Embodiment of this invention. FIG. 6 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 5. It is a partial expanded sectional view which shows the printing principle by the metal mask plate shown in FIG. It is a partial expanded sectional view which shows the printing principle by the metal mask plate shown in FIG. It is a partial expanded sectional view which shows the printing principle by the metal mask plate shown in FIG. FIG. 6 is a partially enlarged bottom view showing a first modification of the metal mask plate shown in FIG. 5. FIG. 6 is a partial enlarged cross-sectional view showing a second modification of the metal mask plate shown in FIG. 5. FIG. 6 is a partially enlarged bottom view showing a second modification of the metal mask plate shown in FIG. 5. It is a fragmentary perspective view of the metal mask plate which shows 2nd Embodiment of this invention. FIG. 20 is a partial enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partial enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partial enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partial enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partial enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 19. FIG. 20 is a partially enlarged bottom view showing a first modification of the metal mask plate shown in FIG. 19. FIG. 20 is a partial enlarged cross-sectional view showing a second modification of the metal mask plate shown in FIG. 19. FIG. 20 is a partially enlarged bottom view showing a second modification of the metal mask plate shown in FIG. 19. It is a fragmentary perspective view of the metal mask plate which shows 3rd Embodiment of this invention. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged top view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged bottom view for explaining a manufacturing process of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged bottom view showing a first modification of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged cross-sectional view showing a second modification of the metal mask plate shown in FIG. 30. FIG. 31 is a partially enlarged bottom view showing a second modification of the metal mask plate shown in FIG. 30.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Metal mask plate, 10a ... Recessed part, 10b ... Bottom wall, 10c ... Paste passage hole, 20 ... Metal mask plate, 20a ... First recessed part, 20b ... Second recessed part, 20c ... Bottom wall, 20d ... Paste passage hole, 30 ... Metal mask plate, 30a ... 1st recessed part, 30b ... 2nd recessed part, 30c ... Bottom wall, 30d ... Paste passage hole.

Claims (8)

A plurality of recesses are formed by etching on at least one surface of the metal plate, and thereafter, a plurality of paste passage holes are formed by drilling by laser irradiation on the bottom walls of the recesses so as to be separated from the peripheral walls of the recesses.
A method for producing a metal mask plate for screen printing. An operation of forming a plurality of first recesses on one surface of the metal plate by etching and an operation of forming a plurality of second recesses on the surface opposite to the one surface by etching so as to face each first recess. After that, a plurality of paste passage holes are formed by drilling by laser irradiation so that the first concave portion and the second concave portion are separated from the peripheral walls of both concave portions on the shared bottom wall.
A method for producing a metal mask plate for screen printing. A plurality of first recesses are formed by etching on one surface of the metal plate, and then a plurality of second recesses are formed by etching on the surface opposite to the one surface of the metal plate so as to face each first recess. Then, a plurality of paste passage holes are formed by laser irradiation perforation so as to be separated from the peripheral walls of both concave portions on the bottom walls shared by the first concave portion and the second concave portion,
A method for producing a metal mask plate for screen printing. A plurality of recesses formed by etching on at least a surface in contact with the surface to be printed, and a plurality of paste passage holes formed by drilling by laser irradiation on the bottom walls of the recesses so as to be separated from the peripheral walls of the recesses,
This is a metal mask plate for screen printing. Of the plurality of paste passage holes formed in the bottom wall of the recess, the opening area of the plurality of paste passage holes closest to the peripheral wall of the recess is the opening of the other plurality of paste passage holes surrounded by the plurality of paste passage holes. The adjacent interval of the plurality of paste passage holes smaller than the area and closest to the peripheral wall of the recess is larger than the adjacent interval of the other paste passage holes surrounded by the plurality of paste passage holes,
The metal mask plate for screen printing according to claim 4. A plurality of first recesses formed by etching on the surface in contact with the printing surface and a plurality of etching formed on the surface opposite to the surface in contact with the printing surface so as to face each first recess. A plurality of paste passage holes formed by perforation by laser irradiation on the bottom walls shared by the first and second recesses so as to be separated from the peripheral walls of both recesses,
This is a metal mask plate for screen printing. Among the plurality of paste passage holes formed in the bottom wall shared by the first recess and the second recess, the opening area of the plurality of paste passage holes closest to the peripheral wall of the recess is surrounded by the plurality of paste passage holes. The adjacent spacing of the plurality of paste passage holes that is smaller than the opening area of the plurality of paste passage holes and closest to the peripheral wall of the recess is larger than the adjacent spacing of the other paste passage holes surrounded by the plurality of paste passage holes. Is also big,
The metal mask plate for screen printing according to claim 6. When the metal mask plate is seen through in the thickness direction, the outline of the second recess is located outside the outline of the first recess,
The metal mask plate for screen printing according to claim 6 or 7, wherein

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