JP2007134848A - Surface mounting quartz resonator - Google Patents

Surface mounting quartz resonator Download PDF

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JP2007134848A
JP2007134848A JP2005324317A JP2005324317A JP2007134848A JP 2007134848 A JP2007134848 A JP 2007134848A JP 2005324317 A JP2005324317 A JP 2005324317A JP 2005324317 A JP2005324317 A JP 2005324317A JP 2007134848 A JP2007134848 A JP 2007134848A
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crystal
terminal
layer
container body
layers
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JP5276773B2 (en
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Hiroaki Mizumura
浩明 水村
Koichi Moriya
貢一 守谷
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface mounting resonator of H cross-section structure having an inspection electrode of a quartz vibrator on the side face in which hermetic seal is ensured. <P>SOLUTION: The surface mounting quartz resonator comprises a container body composed of laminate ceramic including a central layer consisting of at least first and second planar layers, and upper and lower frame layers having an opening and provided with recesses in both major surfaces, wherein the outer circumferential part of a crystal piece having an extended lead-out electrode is bonded to a first crystal terminal provided on the bottom face of one recess and sealed hermetically, and the IC terminal of an IC chip is bonded to a circuit terminal including a second crystal terminal provided on the bottom face of the other recess. The first crystal terminal is connected electrically with the second crystal terminal through first and second via holes provided in the first and second layers of the central layer, and connected electrically with the inspection electrode of a quartz vibrator provided on the outer side face of the container body through the first via hole and the lamination surface of the first and second layers. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は両主面に凹部を有する断面H状の容器本体1を用いた表面実装用の水晶発振器(以下、表面実装発振器とする)を技術分野とし、特に水晶振動子の振動特性を検査する水晶検査端子を有する表面実装発振器に関する。   The present invention has a technical field of a crystal oscillator for surface mounting (hereinafter, referred to as a surface mount oscillator) using a container body 1 having an H-shaped cross section having recesses on both main surfaces, and in particular, examines vibration characteristics of a crystal resonator. The present invention relates to a surface mount oscillator having a crystal inspection terminal.

表面実装発振器は小型・軽量であり、例えば温度補償型では周波数安定度が高いことから、特に携帯電話等を含めた携帯型の電子機器に周波数や時間の基準源として適用される。近年では、ますますの小型化が進行し、表面実装発振器においても更なる小型化が求められている。   A surface-mounted oscillator is small and light, and for example, a temperature-compensated type has high frequency stability. Therefore, the surface-mounted oscillator is applied to a portable electronic device including a mobile phone or the like as a frequency or time reference source. In recent years, further miniaturization has progressed, and further miniaturization is demanded for surface mount oscillators.

(従来技術の一例)
第3図は一従来例を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は底面図である。
(Example of conventional technology)
FIG. 3 is a diagram of a surface-mount oscillator for explaining a conventional example, in which FIG. 3 (a) is a sectional view and FIG. 3 (b) is a bottom view.

表面実装発振器は、容器本体1、水晶片2及びICチップ3からなる。容器本体1は両主面に凹部を有する断面H構造とした積層セラミックからなり、例えば一層目Aと二層目Bからなら平板状の中央層1aと、開口部を有する上下枠層1(bc)とからなる。中央層1aの一層目Aと二層目Bとの間にはシールド電極層4が設けられ、他方の凹部となる下枠層の4角部には実装電極5を有する。   The surface mount oscillator includes a container body 1, a crystal piece 2, and an IC chip 3. The container body 1 is made of a laminated ceramic having a cross-section H structure having recesses on both main surfaces. For example, if the first layer A and the second layer B are used, a flat central layer 1a and an upper and lower frame layer 1 (bc) having openings. ). The shield electrode layer 4 is provided between the first layer A and the second layer B of the central layer 1a, and the mounting electrodes 5 are provided at the four corners of the lower frame layer serving as the other recess.

水晶片2は両主面に図示しない励振電極を有し、一端部両側の外周部に引出電極を延出する。そして、容器本体1の一方の凹部底面に設けられた一対の第1水晶端子6に、引出電極の延出した一端部両側が導電性接着剤7によって固着される。そして、上枠層1bの上面に設けられた図示しない金属リングに金属カバー11が接合し、水晶片2が密閉封入される。   The crystal piece 2 has excitation electrodes (not shown) on both main surfaces, and the extraction electrodes extend to the outer peripheral portions on both sides of one end. Then, both ends of the extended end portion of the extraction electrode are fixed to the pair of first crystal terminals 6 provided on the bottom surface of one of the recesses of the container body 1 by the conductive adhesive 7. The metal cover 11 is bonded to a metal ring (not shown) provided on the upper surface of the upper frame layer 1b, and the crystal piece 2 is hermetically sealed.

ICチップ3は回路機能面に図示しない複数のIC端子を有する。IC端子は一対の水晶端子、及び実装電極5に電気的に接続する電源、出力、アース、自動周波数制御(AFC)端子からなる。但し、温度補償型の場合は、温度補償データの書込端子10(ab)を有する。そして、容器本体1の他方の凹部底面に設けられた第2水晶端子8aを含む各回路端子8にバンプを用いた超音波熱圧着によって固着される(所謂フリップチップボンディング)。   The IC chip 3 has a plurality of IC terminals (not shown) on the circuit function surface. The IC terminal includes a pair of crystal terminals and a power source, an output, a ground, and an automatic frequency control (AFC) terminal that are electrically connected to the mounting electrode 5. However, the temperature compensation type has a temperature compensation data write terminal 10 (ab). And it adheres to each circuit terminal 8 including the 2nd crystal terminal 8a provided in the other recessed part bottom face of the container main body 1 by ultrasonic thermocompression using a bump (so-called flip chip bonding).

各一対の第1水晶端子6と第2水晶端子8aとは、容器本体1の中央層1aに設けられたクランク状の各一対の第1及び第2ビアホール9(ab)等によって接続する。通常では、他方の凹部底面には、第1及び第2水晶端子8aに接続して、これよりも形状の大きい水晶検査端子X(1、2)が接続する。そして、ICチップ3の書込IC端子と電気的に接続する書込端子10(ab)が容器本体1の側面に形成される。ICチップ3と水晶片2(励振電極)とはシールド電極層4によって電気的に遮断される。   The pair of first crystal terminals 6 and the second crystal terminals 8a are connected by a pair of crank-shaped first and second via holes 9 (ab) provided in the central layer 1a of the container body 1. Usually, the bottom surface of the other concave portion is connected to the first and second crystal terminals 8a, and the crystal inspection terminals X (1, 2) having a larger shape are connected to the first and second crystal terminals 8a. A write terminal 10 (ab) that is electrically connected to the write IC terminal of the IC chip 3 is formed on the side surface of the container body 1. The IC chip 3 and the crystal piece 2 (excitation electrode) are electrically cut off by the shield electrode layer 4.

このようなものでは、容器本体1の一方の凹部に金属カバー11を接合して水晶振動子を形成した後、水晶検査端子X(1、2)に図示しない測定器からのプローブを当接して水晶振動子の振動特性を測定する。そして、水晶振動子単独での例えばクリスタルインピーダンス等に異常がある場合には廃棄する。そして、良品のみにICチップ3を搭載し、例えば図示しない保護樹脂を塗布する(アンダーフィル)。   In such a case, after a metal cover 11 is joined to one concave portion of the container body 1 to form a crystal resonator, a probe from a measuring instrument (not shown) is brought into contact with the crystal inspection terminal X (1, 2). Measure the vibration characteristics of the crystal unit. If there is an abnormality in, for example, the crystal impedance of the crystal unit alone, it is discarded. Then, the IC chip 3 is mounted only on the non-defective product and, for example, a protective resin (not shown) is applied (underfill).

(従来技術の問題点)
しかしながら、上記構成の表面実装発振器では、一方の凹部底面に設けた水晶検査端子X(1、2)はICチップ3に覆われ、特にアンダーフィルを設けた製品化後は、水晶振動子単独での振動特性を測定できない問題があった。この場合、例えば製品出荷後に発振不良等を引き起こす事故があったとすると、水晶振動子の解析ができないことから、発振不良の真因究明を困難にする。
(Problems of conventional technology)
However, in the surface mount oscillator having the above-described configuration, the crystal inspection terminal X (1, 2) provided on the bottom surface of one of the recesses is covered with the IC chip 3, and in particular after commercialization with an underfill, the crystal resonator alone There was a problem that the vibration characteristics of the can not be measured. In this case, for example, if there is an accident that causes an oscillation failure after product shipment, the crystal resonator cannot be analyzed, making it difficult to determine the true cause of the oscillation failure.

また、表面実装発振器が小型例えば平面外形が3.2×2.5mm以下になるほど、容器本体1の凹部底面も小さくなり、充分な大きさの水晶検査端子X(1、2)X1、X2を形成することが困難になる。水晶検査端子X(1、2)は測定器からのプローブとの関係等から例えば0.6×0.6mm以上を必要とするが、この場合にはこれ以下になって確実な測定を困難にする。   In addition, the smaller the surface-mounted oscillator, for example, the smaller the planar outer shape is 3.2 × 2.5 mm, the smaller the bottom surface of the concave portion of the container body 1 and the sufficiently large crystal inspection terminals X (1, 2) X1, X2 are formed. Becomes difficult. The crystal inspection terminal X (1, 2) requires, for example, 0.6 × 0.6 mm or more because of the relationship with the probe from the measuring instrument, etc., but in this case, it becomes less than this, making reliable measurement difficult.

このことから、例えばICチップ3を凹部底面に、水晶片2を内壁段部に固着した一部屋型の表面実装発振器で周知されるように、容器本体1の外側面に水晶検査端子X(1、2)を配置することが考えられた。すなわち、水晶片2の固着される第1水晶端子6から、外側面に設けた水晶検査端子X(1、2)には積層面の導電路12を経て接続する。この場合、内底面の第2水晶端子8aには内壁段部の第1ビアホール9aを経て電気的に接続する。なお、導電路12の厚みは第1水晶端子6の厚みより小さい。   For this reason, for example, a crystal inspection terminal X (1 on the outer surface of the container body 1 is well known as a one-chamber surface mount oscillator in which the IC chip 3 is fixed to the bottom of the recess and the crystal piece 2 is fixed to the inner wall step. , 2) was considered to place. That is, the first crystal terminal 6 to which the crystal piece 2 is fixed is connected to the crystal inspection terminal X (1, 2) provided on the outer surface through the conductive path 12 on the laminated surface. In this case, the second crystal terminal 8a on the inner bottom surface is electrically connected through the first via hole 9a on the inner wall step. The thickness of the conductive path 12 is smaller than the thickness of the first crystal terminal 6.

これをH構造の容器本体1にそのまま適用すると、第 図に示したように、上枠層と中央層1aとの積層面の導電路12を経て外側面の水晶検査端子X(1、2)に接続する。しかし、小型化に伴い、容器本体1(H構造)の上枠層の幅も小さくなるので、積層面での導電路12のスルーパスが短くなる。このため、衝撃等によって、水晶振動子にとっては致命的な欠陥となる気密漏れを生じるおそれがあった。なお、積層セラミックの積層面には導電路(電極膜)がない方が接合強度が高異事に起因する。   When this is applied to the H-structure container body 1 as it is, as shown in the figure, the crystal inspection terminal X (1, 2) on the outer surface passes through the conductive path 12 on the laminated surface of the upper frame layer and the central layer 1a. Connect to. However, as the size is reduced, the width of the upper frame layer of the container body 1 (H structure) is also reduced, so that the through path of the conductive path 12 on the laminated surface is shortened. For this reason, there is a possibility that an airtight leak which becomes a fatal defect for the crystal unit due to an impact or the like occurs. It should be noted that the bonding strength is higher when there is no conductive path (electrode film) on the laminated surface of the laminated ceramic.

(発明の目的)
本発明は水晶振動子の検査電極を側面に有し、気密封止を確実にした断面H構造の表面実装発振器を提供することを目的とする。
(Object of invention)
It is an object of the present invention to provide a surface mount oscillator having a cross-sectional H structure having a test electrode of a crystal resonator on a side surface and ensuring hermetic sealing.

本発明は、平板状とした少なくとも一層目と二層目からなる中央層と開口部を有する上枠層と下枠層との積層セラミックからなる両主面に凹部を有する容器本体を備え、前記凹部のうちの一方の凹部底面に設けられた第1水晶端子に引出電極が延出した水晶片の外周部を固着して密閉封入し、前記凹部のうちの他方の凹部底面に設けられた第2水晶端子を含む回路端子にICチップのIC端子を固着してなる表面実装用の水晶発振器において、前記第1水晶端子は前記中央層の一層目と二層目に設けた第1及び第2ビアホールを経て前記第2水晶端子と電気的に接続するとともに、前記第1水晶端子は前記第1ビアホール及び前記一層目と二層目との積層面を経て前記容器本体の外側面に設けられた水晶振動子の検査電極と電気的に接続した構成とする。   The present invention comprises a container body having concave portions on both main surfaces made of a laminated ceramic of a center layer composed of at least a first layer and a second layer, an upper frame layer having an opening, and a lower frame layer, which are flat. An outer peripheral portion of a crystal piece with an extraction electrode extending to a first crystal terminal provided on the bottom surface of one of the concave portions is fixed and hermetically sealed, and a first crystal terminal provided on the other bottom surface of the concave portion is provided. In a surface-mount crystal oscillator in which an IC terminal of an IC chip is fixed to a circuit terminal including two crystal terminals, the first crystal terminal is provided in the first and second layers of the central layer. The first crystal terminal is electrically connected to the second crystal terminal through a via hole, and the first crystal terminal is provided on the outer surface of the container body through the first via hole and the laminated surface of the first and second layers. Electrically connected to the test electrode of the crystal unit And it formed.

このような構成であれば、水晶片を密閉封入する一方の凹部底面の第1水晶端子は、容器本体の中央層の一層目に設けた第1ビアホール及び一層目と二層目との積層面を経て外側面の水晶振動子の検査電極と電気的に接続する。したがって、上枠層と中央層との積層面を経て検査電極と電気的に接続した場合に比較し、上枠層の幅に制限を受けずにスルーパスを長くできる。したがって、気密封止を確実にできる。   With such a configuration, the first crystal terminal on the bottom surface of one of the recesses that hermetically encloses the crystal piece is the first via hole provided in the first layer of the central layer of the container body and the laminated surface of the first and second layers. And electrically connected to the inspection electrode of the crystal unit on the outer surface. Therefore, the through path can be lengthened without being limited by the width of the upper frame layer as compared with the case where the inspection electrode is electrically connected via the laminated surface of the upper frame layer and the central layer. Therefore, airtight sealing can be ensured.

また、他方の凹部底面の第2水晶端子に電気的に接続する一層目の第1ビアホールを共通にして水晶検査端子に接続するので、新たなビアホールを形成することなく、設計を容易にする。   In addition, since the first via hole of the first layer electrically connected to the second crystal terminal on the bottom surface of the other concave portion is connected to the crystal inspection terminal in common, the design is facilitated without forming a new via hole.

第1図は本発明の一実施形態を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は底面図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。   FIG. 1 is a diagram of a surface mount oscillator for explaining an embodiment of the present invention. FIG. 1 (a) is a sectional view and FIG. 1 (b) is a bottom view. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

表面実装発振器は、前述したように、一層目A及び二層目Bからなる中央層1aと上下枠層1(bc)を有する両主面に凹部を備えた断面H構造の容器本体1と、一方の凹部の一対の第1水晶端子6に引出電極の延出した一端部両側の外周部が固着されて密閉封入された水晶片2と、他方の凹部底面の一対の第2水晶端子8aを含む回路端子8にIC端子が固着されたICチップ3とからなる。   As described above, the surface-mount oscillator includes a container body 1 having a cross-section H structure including recesses on both main surfaces including a central layer 1a composed of a first layer A and a second layer B and an upper and lower frame layer 1 (bc); A pair of first crystal terminals 6 in one recess has an outer peripheral portion on both sides of one end portion where the extraction electrode extends and is fixed in a sealed manner, and a pair of second crystal terminals 8a on the bottom surface of the other recess. An IC chip 3 having an IC terminal fixed to a circuit terminal 8 is included.

この実施形態では、引出電極の延出した水晶片2の一端部両側が固着される一方の凹部底面の一対の第1水晶端子6は、中央層1aの一層目A及び二層目Bに設けたクランク状の各一対の第1及び第2ビアホール9(ab)によって他方の凹部底面に延出し、ICチップ3の水晶IC端子が固着される一対の第2水晶端子8aにそれぞれ直接に接続する。すなわち、他方の凹部底面からは従来の水晶検査端子X(1、2)を排除する。   In this embodiment, a pair of first crystal terminals 6 on the bottom surface of one recess to which both ends of one end of the crystal piece 2 from which the extraction electrode extends are fixed are provided in the first layer A and the second layer B of the central layer 1a. Each pair of crank-shaped first and second via holes 9 (ab) extend to the bottom surface of the other recess and are directly connected to the pair of second crystal terminals 8a to which the crystal IC terminals of the IC chip 3 are fixed. . That is, the conventional crystal inspection terminal X (1, 2) is excluded from the bottom surface of the other recess.

そして、一層目Aの一対の第1ビアホール9aからは一層目Aと二層目Bとの積層面に設けた各導電路12を経て、容器本体1の外側面に設けた水晶検査端子X(1、2)に電気的に接続する。要するに、第1水晶端子6に接続する第1ビアホール9aから分岐して、第2水晶端子8aと水晶検査端子X(1、2)とに電気的に接続する。   Then, from the pair of first via holes 9a of the first layer A, through the respective conductive paths 12 provided on the laminated surface of the first layer A and the second layer B, the crystal inspection terminals X ( Electrically connect to 1 and 2). In short, it branches from the first via hole 9a connected to the first crystal terminal 6 and is electrically connected to the second crystal terminal 8a and the crystal inspection terminal X (1, 2).

この例での水晶検査端子X(1、2)は、引出電極の延出した水晶片2の一端部両側となる、容器本体1の長さ方向及び幅方向の一側面に形成される。そして、温度補償データの2個の書込端子10(ab)が容器本体1の長さ方向の他側面に形成される。   The crystal inspection terminals X (1, 2) in this example are formed on one side surface of the container body 1 in the length direction and the width direction, which are on both sides of one end of the crystal piece 2 from which the extraction electrode extends. Then, two write terminals 10 (ab) for temperature compensation data are formed on the other side surface of the container body 1 in the length direction.

このような構成であれば、第1水晶端子6から第1ビアホール及び一層目Aと二層目Bとの積層面を経て外側面の水晶検査端子X(1、2)に電気的に接続する。したがって、上枠層と中央層1aとの積層面を経て接続する場合に比較し、導電路12のスルーパスを長くできる。これにより、衝撃時等における気密漏れを防止して、気密封止を確実にする。   With such a configuration, the first crystal terminal 6 is electrically connected to the crystal inspection terminal X (1, 2) on the outer surface through the first via hole and the laminated surface of the first layer A and the second layer B. . Therefore, the through path of the conductive path 12 can be made longer than in the case where the upper frame layer and the central layer 1a are connected via the laminated surface. Thereby, airtight leakage at the time of impact or the like is prevented, and airtight sealing is ensured.

また、ここでは、第1及び第2水晶端子8aを電気的に接続する一層目Aの一対の第1ビアホール9aから分岐して水晶検査端子X(1、2)に接続する。したがって、第1ビアホール9aを共用するので、新たなビアホールを形成することがない。したがって、設計を容易にできる。   Further, here, the first and second crystal terminals 8a are branched from the pair of first via holes 9a in the first layer A and are connected to the crystal inspection terminals X (1, 2). Therefore, since the first via hole 9a is shared, no new via hole is formed. Therefore, the design can be facilitated.

(他の事項)
上記実施形態では、第1水晶端子6の下面方向に第1ビアホール9aを形成したが、例えば第2図に示したように第1水晶端子6よりも他端側の内壁側寄りにビアホールを形成してもよい。この場合、一層目Aと二層目Bとの積層面の導電路12は水晶検査電極X(1、2)までの距離が長くなるので、気密封止をさらに確実にできる。また、表面実装発振器は書込端子10(ab)を有する温度補償型としたが、例えばクロックオシレータとした非温度補償型であってもよいことは勿論である。
(Other matters)
In the above embodiment, the first via hole 9a is formed in the lower surface direction of the first crystal terminal 6. However, for example, as shown in FIG. 2, the via hole is formed closer to the inner wall side on the other end side than the first crystal terminal 6. May be. In this case, since the conductive path 12 on the laminated surface of the first layer A and the second layer B has a longer distance to the crystal inspection electrode X (1, 2), the hermetic sealing can be further ensured. The surface mount oscillator is a temperature compensation type having the write terminal 10 (ab), but it is needless to say that it may be a non-temperature compensation type such as a clock oscillator.

本発明の一実施形態を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は底面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the surface mount oscillator explaining one Embodiment of this invention, The figure (a) is sectional drawing, The figure (b) is a bottom view. 本発明の他の実施形態を説明する表面実装発振器の断面図である。It is sectional drawing of the surface mount oscillator explaining other embodiment of this invention. 従来例を説明する表面実装発振器の図で、同図(a)は断面図、同図(b)は底面図である。It is a figure of the surface mount oscillator explaining a prior art example, the figure (a) is a sectional view and the figure (b) is a bottom view. 同図(ab)ともに本発明が参考とした従来例の表面実装水晶発振器の断面図である。FIG. 5B is a cross-sectional view of a conventional surface mount crystal oscillator referred to by the present invention.

符号の説明Explanation of symbols

1 容器本体、2 水晶片、3 ICチップ、4 シールド層、5 実装電極、6 第1水晶端子、7 導電性接着剤、8a 第2水晶端子、8 回路端子、9 ビアホール、10 書込端子、11 金属カバー、12 導電路。   DESCRIPTION OF SYMBOLS 1 Container body, 2 Crystal piece, 3 IC chip, 4 Shield layer, 5 Mounting electrode, 6 1st crystal terminal, 7 Conductive adhesive, 8a 2nd crystal terminal, 8 Circuit terminal, 9 Via hole, 10 Write terminal, 11 Metal cover, 12 conductive path.

Claims (1)

平板状とした少なくとも一層目と二層目からなる中央層と開口部を有する上枠層と下枠層との積層セラミックからなる両主面に凹部を有する容器本体を備え、前記凹部のうちの一方の凹部底面に設けられた第1水晶端子に引出電極が延出した水晶片の外周部を固着して密閉封入し、前記凹部のうちの他方の凹部底面に設けられた第2水晶端子を含む回路端子にICチップのIC端子を固着してなる表面実装用の水晶発振器において、前記第1水晶端子は前記中央層の一層目と二層目に設けた第1及び第2ビアホールを経て前記第2水晶端子と電気的に接続するとともに、前記第1水晶端子は前記第1ビアホール及び前記一層目と二層目との積層面を経て前記容器本体の外側面に設けられた水晶振動子の検査電極と電気的に接続したことを特徴とする表面実装用の水晶発振器。   A container body having a concave portion on both main surfaces made of a laminated ceramic of a center layer composed of at least a first layer and a second layer and an upper frame layer having an opening and a lower frame layer, each of which is a flat plate, An outer peripheral portion of a crystal piece with an extraction electrode extending to a first crystal terminal provided on one recess bottom surface is fixed and hermetically sealed, and a second crystal terminal provided on the other recess bottom surface of the recess is provided. In a surface-mount crystal oscillator in which an IC terminal of an IC chip is fixed to a circuit terminal including the first crystal terminal, the first crystal terminal passes through first and second via holes provided in the first and second layers of the central layer. The first crystal terminal is electrically connected to the second crystal terminal, and the first crystal terminal is connected to the first via hole and the laminated surface of the first layer and the second layer. It is electrically connected to the inspection electrode Crystal oscillator for surface mounting to.
JP2005324317A 2005-11-09 2005-11-09 Crystal oscillator for surface mounting Expired - Fee Related JP5276773B2 (en)

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US11/594,739 US7378780B2 (en) 2005-11-09 2006-11-09 Surface mount type crystal oscillator

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JP2010171475A (en) * 2009-01-20 2010-08-05 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2013150034A (en) * 2012-01-17 2013-08-01 Kyocera Crystal Device Corp Substrate for piezoelectric oscillator and piezoelectric oscillator
JP2016027749A (en) * 2015-09-28 2016-02-18 京セラクリスタルデバイス株式会社 Piezoelectric oscillator

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JP6769220B2 (en) 2016-10-03 2020-10-14 セイコーエプソン株式会社 Electronic component packages, oscillators, electronics, and mobiles

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JP2002026680A (en) * 2000-07-11 2002-01-25 Toyo Commun Equip Co Ltd Piezoelectric vibrator
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171475A (en) * 2009-01-20 2010-08-05 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2013150034A (en) * 2012-01-17 2013-08-01 Kyocera Crystal Device Corp Substrate for piezoelectric oscillator and piezoelectric oscillator
JP2016027749A (en) * 2015-09-28 2016-02-18 京セラクリスタルデバイス株式会社 Piezoelectric oscillator

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