JP2007119115A - Tft array inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make a pallet for conveying a glass substrate thin in a TFT array inspection device. <P>SOLUTION: In the TFT array inspection device, movement of the glass substrate 3 performed between a conveying arm 11 and the pallet 1A for conveying the glass substrate is performed at a position where an upper surface of an arm (conveying arm 11) of a robot hand is made higher than an upper surface of the pallet 1A for conveying the glass substrate. Thereby, a groove for escaping the arm of the robot hand required by a conventional pallet for conveying the glass substrate is not required and thickness is made thin to accomplish light weight by not requiring the groove. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a TFT array inspection apparatus, and more particularly to transport of a TFT substrate introduced into the inspection apparatus.

  In the manufacture of semiconductors such as LCDs, TFT arrays manufactured by a TFT array inspection apparatus are inspected.

  The TFT array inspection apparatus inspects the TFT array by, for example, irradiating an electron beam onto the TFT substrate on which the TFT array is formed. This TFT array inspection apparatus is connected to a main chamber (MC) for array inspection of a TFT substrate and a glass substrate connected to the main chamber (MC) via a gate and introduced from the outside of the inspection apparatus. A load lock chamber (LL) for carrying a glass substrate carried in or inspected from the main chamber (MC) is provided.

  The load lock chamber (LL) includes a glass substrate transfer pallet inside, and transfers the glass substrate on the glass substrate transfer pallet by a transfer mechanism such as a robot hand.

  FIGS. 9 and 10 are a schematic perspective view for explaining a transport mechanism provided in a conventional TFT array inspection apparatus, and a schematic cross-sectional view for explaining transport of a glass substrate, in which glass introduced by the robot hand 110 is shown. The operation | movement which mounts the board | substrate 103 on the pallet 101 for glass substrate conveyance is shown.

  A groove 102 for inserting the robot hand 110 is formed in the glass substrate transfer pallet 101. In order to place the glass substrate 103 on the glass substrate transfer pallet 101, the robot hand 110 on which the glass substrate 103 is placed is inserted into the load lock chamber (LL) from the outside of the inspection apparatus (FIG. 9A). , FIG. 10 (a)), after the robot hand 110 is transported above the glass substrate transport pallet 101 (FIG. 10 (b)), the glass substrate 103 is lowered together with the robot hand 110.

  In this lowering operation, the arm portion of the robot hand 110 is put into the groove 102 of the glass substrate transfer pallet 101, and further, the upper surface of the robot hand 110 is lowered to a position lower than the upper surface of the glass substrate transfer pallet 101. As a result, the glass substrate 103 is transferred from the robot hand 110 onto the glass substrate transfer pallet 101 (FIG. 10C).

  Thereafter, the robot hand 110 is pulled out from the groove 102 (FIGS. 9B and 10D), and the glass substrate transfer pallet 101 on which the glass substrate 103 is placed is moved from the load lock chamber (LL) to the main chamber (MC). Carry in.

  The above-described glass substrate transport pallet requires a groove for avoiding the arm portion of the robot hand when placing the glass substrate. The depth of this groove must be at least greater than the thickness of the arm of the robot hand. Moreover, the pallet for conveying the glass substrate needs to have a base portion below the groove in order to stably convey the glass substrate and ensure good contact with the prober at the time of inspection. Therefore, the thickness of the glass substrate carrying pallet is increased.

  As described above, when the thickness of the pallet for transporting the glass substrate is increased, the weight of the pallet itself is increased, a large amount of power is required to move the pallet, and the inspection apparatus itself is also increased in size. Become.

  SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to solve the above-described conventional problems and reduce the thickness of a pallet for conveying a glass substrate in a TFT array inspection apparatus.

  In the conventional TFT array inspection apparatus described above, the glass substrate is transferred from the robot hand to the glass substrate transfer pallet by moving the upper surface of the arm (transfer arm) of the robot hand below the upper surface of the glass substrate transfer pallet. It is configured to change. Due to this configuration, the conventional glass substrate transfer pallet requires a groove to avoid interference (collision) with the arm when the arm of the robot hand moves downward.

  The TFT array inspection apparatus of the present invention moves the glass substrate between the transfer arm and the glass substrate transfer pallet so that the upper surface of the robot hand arm (transfer arm) is above the upper surface of the glass substrate transfer pallet. By doing so, a groove for escaping the arm of the robot hand required by the conventional glass substrate transport pallet is not required. The glass substrate carrying pallet can be reduced in weight by reducing the thickness by eliminating the need for grooves. By this weight reduction, the glass substrate carrying pallet can be moved with a small driving force, and the TFT array inspection apparatus can be miniaturized.

  As described above, the glass substrate is transferred from the robot hand arm to the glass substrate transfer pallet at a position where the upper surface of the robot hand arm (transfer arm) is higher than the upper surface of the glass substrate transfer pallet. The present invention has the following configuration.

  A TFT array inspection apparatus for performing an array inspection of a TFT substrate of the present invention includes a glass substrate transfer pallet for transferring a glass substrate and a holding unit for temporarily holding the glass substrate in the TFT array inspection apparatus. The glass substrate carrying pallet and the holding part are relatively movable in the vertical direction, and the glass substrate carrying pallet includes an opening through which the holding part passes when moving relative to the holding part.

  By passing the opening through the opening, the holding unit moves the glass substrate from the robot hand arm to the holding unit at a position above the upper surface of the glass substrate transfer pallet. Furthermore, the glass substrate can be transferred from the holding unit to the glass substrate carrying pallet.

  The holding part and the glass substrate carrying pallet are relatively movable in the vertical direction, and the glass substrate carrying pallet for moving the holding part in the up and down direction or fixing the holding part to the glass substrate The transfer pallet can be moved in the vertical direction, or both the holding unit and the glass substrate transfer pallet can be moved in the vertical direction.

  One mode of the holding unit may be a pin including a support end that supports the glass substrate at the upper end. At this time, the pallet for conveying the glass substrate can be a planar member or a mesh member provided with a hole through which the pin passes, or a frame member provided with a rib member or a wire at a position not interfering with the pin.

  According to this glass substrate carrying pallet, the pin can pass through the hole formed in the glass substrate carrying pallet, and the glass substrate can be supported and temporarily held by the upper end. Moreover, the planar member, mesh member, rib material, wire, and the like included in the glass substrate transport pallet can hold the glass substrate above the glass substrate transport pallet.

  Moreover, the other aspect of a holding | maintenance part can be used as a supporting member provided with the support surface part which supports a glass substrate in an upper end. At this time, the aspect of the pallet for conveying the glass substrate can be configured to include an opening that allows the support member to pass therethrough.

  The support member passes through the opening, and supports and holds the glass substrate on the support surface above the upper surface of the glass substrate transport pallet.

  According to the present invention, in the TFT array inspection apparatus, the glass substrate transport pallet can be thinned.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  The TFT array inspection apparatus includes a main chamber (MC) for performing an array inspection of a glass substrate of the TFT array, and a load lock chamber (LL) for carrying in and out of the glass substrate between the outside and the TFT array inspection apparatus. Moreover, it is good also as a structure which has a conveyance chamber which conveys a glass substrate between a load lock and a main chamber.

  The load lock chamber (LL) and the transfer chamber are means for transferring a glass substrate between chambers such as a main chamber (MC), and for example, a transfer robot can be used. Note that the transfer chamber is not always necessary, and the transfer robot may be installed in the load lock chamber or the main chamber.

  The main chamber includes a mechanism for performing a TFT array inspection of the glass substrate. The substrate inspection mechanism can be a mechanism normally provided in a TFT array inspection apparatus. For example, a charged particle beam source or sample stage that scans a charged particle beam such as an electron beam on a glass substrate, a charged particle beam A detector for detecting secondary electrons and the like emitted from the sample by scanning is provided.

  Hereinafter, a first embodiment of the TFT array inspection apparatus of the present invention will be described with reference to FIGS. Here, only the mechanism for transferring the glass substrate between the transfer arm of the robot hand and the glass substrate transfer pallet in the configuration of the TFT array inspection apparatus is shown, and the other configurations are omitted.

  In FIG. 1, the first embodiment of the TFT array inspection apparatus of the present invention includes a glass substrate carrying pallet 1 </ b> A and pins 2 </ b> A constituting a holding unit 2.

  The glass substrate carrying pallet 1A includes a through hole 1a in a planar member having an area sufficient to hold a glass substrate. The through hole 1a is formed so as to penetrate the planar member in the vertical direction, and has an inner diameter sufficient for the pin 2A to penetrate.

  The glass substrate transport pallet 1A and the pin 2A are relatively movable. For example, when the glass substrate transport pallet 1A is fixed, the pin 2A is movable in the vertical direction, and the pin 2A is fixed. In this case, the glass substrate carrying pallet 1A is movable in the vertical direction. Further, both the glass substrate carrying pallet 1A and the pin 2 may be movable in the vertical direction. Here, a mechanism for moving the glass substrate carrying pallet 1A and / or the pin 2A is not shown.

  The through-hole 1a and the pin 2A formed in the glass substrate carrying pallet 1A are aligned so that the pin 2A can pass through the through-hole 1a when they are relatively moved in the vertical direction.

  FIG. 1A shows a state in which the glass substrate carrying pallet 1A is separated from the pin 2A, and FIG. 1B shows a state in which the pin 2A has passed through the through hole 1a of the glass substrate carrying pallet 1A. ing.

  Next, in the first embodiment of the TFT array inspection apparatus of the present invention, an operation example of transferring the glass substrate between the transfer arm of the robot hand and the glass substrate transfer pallet will be described with reference to FIGS. To do. 2 is a schematic perspective view for explaining the operation, FIG. 3 is a schematic sectional view for explaining the movement operation from the transfer arm to the glass substrate transfer pallet, and FIG. 4 is a view from the glass substrate transfer pallet. It is a schematic sectional drawing for demonstrating the movement operation | movement to a conveyance arm.

  In the following, an example in which the glass substrate transport pallet is fixed and the pins are moved in the vertical direction in the relative movement between the glass substrate transport pallet and the holding portion (pin) will be described.

  First, the movement onto the glass substrate carrying pallet will be described with reference to FIGS.

  In the movement operation from the transfer arm to the glass substrate transfer pallet, the glass substrate 3 is placed on the transfer arm 11 of the robot hand 10 and transferred to a position above the glass substrate transfer pallet 1A.

  At this time, the pin 2A is passed through the through hole 1a of the glass substrate transport pallet 1A, and the support end 2a at the tip of the pin 2A is positioned above the upper surface 1b of the glass substrate transport pallet 1A. Thus, a gap enough to insert the transfer arm 11 can be formed between the upper surface 1b of the glass substrate transfer pallet 1A and the support end 2a of the pin 2A (FIGS. 2A and 3). (A)).

  After the transfer arm 11 is moved to a position above the glass substrate transfer pallet 1A (FIG. 3B), the transfer arm 11 is lowered, and the lower surface of the glass substrate 3 is brought into contact with the support end 2a of the pin 2A to support it. The glass substrate 3 is supported by the end 2a (FIG. 3C). At this time, as described above, by forming a gap enough to insert the transfer arm 11 between the upper surface 1b of the glass substrate transfer pallet 1A and the support end 2a of the pin 2A, the transfer arm is formed. 11 can be pulled out without contacting the upper surface 1b of the pallet 1A for conveying the glass substrate.

  When the transport arm 11 is pulled out from this state, the glass substrate 3 is held in a state of being supported on the support end 2a of the pin 2A (FIGS. 2B and 3D).

  After completely pulling out the transfer arm 11 from the glass substrate transfer pallet 1A, the pin 2A is lowered. As the pin 2A is lowered, the glass substrate 3 is also lowered. The glass substrate 3 is supported on the glass substrate transport pallet 1A while the pins 2A are lowered. This completes the movement of the glass substrate 3 to the glass substrate carrying pallet 1A (FIGS. 2C and 3E).

  The glass substrate 3 placed on the glass substrate transport pallet 1A is transported to the main chamber (MC) by a transport mechanism (not shown) and subjected to array inspection.

  Next, the movement operation of the glass substrate from the glass substrate transfer pallet to the transfer arm will be described with reference to FIG.

  The glass substrate carrying pallet 1A with the glass substrate 3 placed on the upper surface is moved onto the pins 2A, and alignment is performed so that the positions of the pins 2A and the through holes 1a are aligned. In this state, the pin 2A is raised (FIG. 4A), and the pin 2A is passed through the through hole 1a of the pallet 1A for conveying the glass substrate. As a result, the support end 2a at the tip of the pin 2A passes through the through hole 1a and then comes into contact with the lower surface of the glass substrate 3. Further, by raising the pin 2A, the glass substrate 3 is supported and raised on the a support end 2a of the pin 2A. As the glass substrate 3 rises, a gap is formed between the upper surface 1 b of the glass substrate carrying pallet 1 </ b> A and the lower surface of the glass substrate 3. In a state where the gap is larger than the thickness of the transfer arm 11, the transfer arm 11 is inserted into the gap (FIGS. 4B and 4C).

  When the pin 2A is lowered while the transfer arm 11 is inserted into the gap, the glass substrate 3 is transferred from the pin 2A to the transfer arm 11. Note that this transfer may raise the transfer arm 11 instead of lowering the pin 2A (FIG. 4D).

  After the glass substrate 3 is transferred to the transport arm 11, the glass substrate 3 is unloaded by moving the transport arm 11 (FIG. 4E).

  Next, a second embodiment of the TFT array inspection apparatus of the present invention will be described with reference to FIG. In FIG. 5, the 2nd form of the TFT array test | inspection apparatus of this invention is equipped with the pallet 1B for glass substrate conveyance, and the pin 2A which comprises the holding part 2. In FIG. FIG. 5A shows a state before the glass substrate 3 is moved above the glass substrate transport pallet 1B, and FIG. 5B shows the state where the glass substrate 3 is moved above the glass substrate transport pallet 1B. The state supported on the pin 2A is shown.

  The glass substrate carrying pallet 1B includes a frame member 1c having an area sufficient to hold the glass substrate 3. The frame portion 1c is provided with a plurality of ribs 1d, and penetrates between the ribs 1d in the vertical direction. A notch 1e is formed. The notch 1e penetrates in the vertical direction and has a size sufficient for the pin 2A to penetrate.

  The arrangement interval between the pins 2A is formed in accordance with the interval between any of the cutouts 1e, and the glass substrate carrying pallet 1B and the pin 2A are relatively movable in the vertical direction. Since the relative relationship between the glass substrate carrying pallet 1B and the pin 2A can be the same as that in the first embodiment, the description thereof is omitted here.

  Next, a third embodiment of the TFT array inspection apparatus of the present invention will be described with reference to FIG. In FIG. 6, the third embodiment of the TFT array inspection apparatus of the present invention includes a glass substrate carrying pallet 1 </ b> C and pins 2 </ b> A constituting the holding unit 2. FIG. 6A shows a state before the glass substrate 3 is moved above the glass substrate transport pallet 1C, and FIG. 6B shows the glass substrate 3 moved above the glass substrate transport pallet 1C. The state supported on the pin 2A is shown.

  The glass substrate carrying pallet 1C includes a frame member 1c having an area sufficient to hold the glass substrate 3. The frame portion 1c is provided with a mesh material 1f, and the mesh material 1f has a hole penetrating in the vertical direction. Part 1g is formed. The hole 1g has a size sufficient for the pin 2A to pass therethrough.

  The arrangement interval between the pins 2A and the interval between the holes 1g are formed so as to coincide with each other, and the glass substrate carrying pallet 1C and the pins 2A are relatively movable in the vertical direction. Since the relative relationship between the glass substrate carrying pallet 1C and the pin 2A can be the same as that in the first embodiment, the description thereof is omitted here.

  Next, a fourth embodiment of the TFT array inspection apparatus of the present invention will be described with reference to FIG. In FIG. 7, the fourth embodiment of the TFT array inspection apparatus of the present invention includes a glass substrate carrying pallet 1 </ b> D and pins 2 </ b> A constituting the holding unit 2. FIG. 7A shows a state before the glass substrate 3 is moved above the glass substrate transport pallet 1D, and FIG. 7B shows the state where the glass substrate 3 is moved above the glass substrate transport pallet 1D. The state supported on the pin 2A is shown.

  The glass substrate carrying pallet 1D includes a frame member 1c having an area sufficient to hold the glass substrate 3, a wire 1h is stretched on the frame member 1c, and an opening 1i is formed between the wire members 1h. Is done. The opening 1i is large enough to allow the pin 2A to pass therethrough.

  The arrangement interval between the pins 2A and the interval between any one of the openings 1i are formed to coincide with each other, and the glass substrate carrying pallet 1D and the pins 2A are relatively movable in the vertical direction. Since the relationship of relative movement between the glass substrate carrying pallet 1D and the pin 2A can be the same as that in the first embodiment, the description thereof is omitted here.

  Next, a fifth embodiment of the TFT array inspection apparatus of the present invention will be described with reference to FIG. In FIG. 8, the fifth embodiment of the TFT array inspection apparatus of the present invention includes a glass substrate carrying pallet 1 </ b> E and a support member 2 </ b> B that constitutes the holding unit 2. FIG. 8A shows a state before the glass substrate 3 is moved above the glass substrate carrying pallet 1E, and FIG. 8B shows the glass substrate 3 being moved above the glass substrate carrying pallet 1E. The state supported on the support member 2B is shown.

  The glass substrate carrying pallet 1E includes a support member 2B having a sufficient area for holding the glass substrate 3, and an opening 1j is formed in the planar member. The opening 1j is large enough for the support member 2B to pass therethrough.

  The glass substrate carrying pallet 1E and the support member 2B are relatively movable in the vertical direction. Further, the height of the support member 2B is such that when inserted into the opening 1j, the upper end protrudes from the opening 1j, and the transfer arm can be freely inserted into the gap. Since the relationship of relative movement between the glass substrate carrying pallet 1D and the pin 2A can be the same as that in the first embodiment, the description thereof is omitted here.

  The substrate delivery mechanism provided in the TFT array inspection apparatus of the present invention is not limited to the TFT substrate, and can be applied to other semiconductor substrates.

It is a figure for demonstrating the 1st form of the TFT array test | inspection apparatus of this invention. It is a schematic perspective view for demonstrating operation | movement of the TFT array test | inspection apparatus of this invention. It is a schematic sectional drawing for demonstrating the movement operation from the conveyance arm of the TFT array inspection apparatus of this invention to the pallet for glass substrate conveyance. It is a schematic sectional drawing for demonstrating the movement operation from the pallet for glass substrate conveyance to the conveyance arm of the TFT array inspection apparatus of this invention. It is a figure for demonstrating the 2nd form of the TFT array test | inspection apparatus of this invention. It is a figure for demonstrating the 3rd form of the TFT array test | inspection apparatus of this invention. It is a figure for demonstrating the 4th form of the TFT array test | inspection apparatus of this invention. It is a figure for demonstrating the 5th form of the TFT array test | inspection apparatus of this invention. It is a schematic perspective view for demonstrating the conveyance mechanism with which the conventional TFT array inspection apparatus is provided. It is a schematic sectional drawing for demonstrating conveyance of the glass substrate of the conventional TFT array test | inspection apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1A-1E ... Pallet for glass substrate conveyance, 1a ... Through-hole, 1b ... Upper surface, 1c ... Frame member, 1d ... Rib, 1e ... Notch part, 1f ... Mesh member, 1g ... Hole part, 1h ... Wire, DESCRIPTION OF SYMBOLS 1i, 1j ... Opening part, 2 ... Holding part, 2A ... Pin, 2B ... Support member, 2a ... Support end part, 3 ... Glass substrate, 10 ... Robot hand, 11 ... Transfer arm.

Claims (5)

In a TFT array inspection apparatus that performs array inspection of a TFT substrate,
In the transfer of the glass substrate between the transfer arm that places the glass substrate on the upper surface and carries it in and out, and the glass substrate transfer pallet that transfers the glass substrate placed on the upper surface in the inspection device,
A TFT array inspection apparatus, wherein the glass substrate is transferred at a position where the upper surface of the transfer arm is above the upper surface of the glass substrate transfer pallet. In a TFT array inspection apparatus that performs array inspection of a TFT substrate,
The TFT array inspection apparatus includes a glass substrate transport pallet for transporting a glass substrate, and a holding unit for temporarily holding the glass substrate,
The glass substrate transport pallet and the holding portion are relatively movable in the vertical direction,
The glass substrate carrying pallet includes an opening through which the holding unit passes by the relative movement,
The glass substrate transport pallet and the holding unit perform the transfer of the glass substrate by relative movement,
The TFT array inspection apparatus, wherein the holding unit transfers the glass substrate to and from the transfer arm.   The TFT array inspection apparatus according to claim 2, wherein the holding portion is a pin having a support end portion that supports a glass substrate at an upper end. The glass substrate transport pallet is:
4. The TFT according to claim 3, comprising one of a planar member or a mesh member provided with a hole through which the pin passes, and a frame member including a rib member or a wire at a position not interfering with the pin. Array inspection device. The holding part is a support member including a support surface part that supports a glass substrate at an upper end,
The TFT array inspection apparatus according to claim 2, wherein the glass substrate transport pallet includes an opening through which the support member passes.

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