JP2007118130A - Workpiece polishing method, and polishing tool and polishing device for use therein - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To avoid the following inconvenience: as the number of times of polishing by a polishing tool is increased, polishing chips entwine around abrasive grains and a nonwoven fabric on an external surface thereof, and the polishing chips cannot be washed out even by splashing water, resulting in progressive clogging of the polishing tool, to thereby degrade polishing efficiency of the polishing tool. <P>SOLUTION: The polishing tool 1 is formed such that a workpiece 3 is polished while liquid is poured out from a core side or an inside thereof onto the polishing surface 2. Preferably a chemical solution that can chemically dissolve a workpiece surface is used. The polishing tool 1 has liquid feeding sections 8 from which the liquid is fed to a polishing material 9, and therefore the liquid is poured out from the core side or the inside of the polishing material 9 onto the polishing surface 2, to thereby wash out the polishing chips. Further the polishing tool 1 is rotated by a motor and brought into contact with the workpiece 3, and while the liquid in the liquid feeding section is fed from the core side or the inside of the polishing material, onto the polishing surface 2, the workpiece is polished. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  INDUSTRIAL APPLICABILITY The present invention is a method for polishing the surface of various workpieces such as printed circuit boards, magnetic disks, liquid crystal displays (LCDs), wafers and substrates made of metal, resin, glass, etc. used in semiconductors, etc. The present invention relates to a polishing tool and a polishing apparatus.

  Conventionally, in order to polish the surface of the various workpieces, a roll-shaped, disk-shaped polishing tool is rotated, the outer peripheral surface in the case of a roll-shaped polishing tool, the lower surface in the case of a disk-shaped polishing tool, Each is pressed against the workpiece surface and polished. In this case, water such as pure water, tap water, and industrial water is sprinkled on the rotating polishing tool in order to prevent the workpiece from overheating, wash away grinding scraps, and prevent clogging of the polishing tool.

However, the conventional workpiece polishing method has the following problems.
(1) When the number of times of polishing increases, the grinding scraps get entangled with the abrasive grains and the nonwoven fabric on the outer peripheral surface of the polishing tool, and even if it is splashed with water, the grinding scraps cannot be washed away. Deteriorate.
(2) Since water is sprinkled from the outside of the polishing tool, grinding scraps may easily bite into the polishing tool. In this case, water contributes to clogging.
(3) In order to use a clogged polishing tool, it is necessary to perform a scale-out process (dressing process) for removing the clogged portion and exposing a new polished surface to the surface.
(4) In order to perform the dressing process, it is necessary to remove the polishing tool from the polishing apparatus and replace it with another polishing tool. Since it is necessary to adjust the mounting position of a newly set polishing tool, it takes a considerable amount of time before the set polishing tool is ready for use. Decrease significantly.
(5) As the number of times of polishing increases, the clogging also becomes faster, and the dressing process must be performed each time. Therefore, about one third of the working time per day takes time for the dressing process and the replacement of the polishing tool for that purpose. It is the actual situation. For this reason, work efficiency is very bad.
(6) If the polishing pressure is increased and the amount of grinding in one polishing operation is increased, the workpiece may be stretched, bent, warped (damaged) and become unusable. Polishing is performed at a pressure that does not cause the occurrence of cracks. For this reason, in order to increase the amount of grinding, it is necessary to increase the number of times of polishing, which takes time for polishing work and increases costs.
(7) When the polishing tool is clogged, the polishing power decreases and the polishing efficiency decreases. In order to increase the polishing efficiency with a clogged polishing tool, it is necessary to increase the polishing pressure, but if it is increased, the workpiece is likely to be damaged. Rather, when clogged, the polishing pressure must be weakened, and the polishing efficiency decreases with increasing weakness.
(8) If the dressing process is performed frequently, the abrasive tool will be worn and consumed abruptly, shortening the life of the abrasive tool and increasing the cost.

  The present invention provides a polishing method, a polishing tool, and a polishing apparatus that can solve the above-mentioned problems.

  In the workpiece polishing method of the present invention, as described in claim 1, the workpiece is polished while flowing the liquid from the inside of the rotating polishing tool to the polishing surface or / and applying the liquid to the polishing tool from the outside of the polishing tool. It is a method to do. According to a second aspect of the present invention, a chemical solution capable of chemically dissolving the work surface is used as the liquid.

  According to a third aspect of the present invention, the polishing tool is formed of a material that forms a liquid supply portion in the polishing tool, and the liquid supplied from the liquid supply portion can flow from the inner side to the outer polishing surface. As a structure, the liquid is supplied from the inside to the outside (polishing surface) of the abrasive so that the grinding waste is washed away from the inside to the outside. When the polishing tool is roll-shaped as described in claim 4, the liquid supply portion is formed on the core side of the polishing tool so that the liquid flows out from the core side to the polishing surface. In the case where the polishing tool is disk-shaped, the liquid supply part is formed on the center side or the upper side of the polishing tool so that the liquid flows out from the inner side or the upper side of the polishing tool to the polishing surface.

  The polishing tool according to the present invention uses the polishing tool as described in claim 5 and connects the rotary drive source to the rotating shaft of the polishing tool to rotate it, and connects the liquid supply source to the liquid supply part of the polishing tool. It was connected with a tool so that the liquid could be supplied to the rotating polishing tool.

Since the workpiece polishing method according to claim 1 of the present application polishes the workpiece while allowing the liquid to flow from the inside of the polishing tool to the polishing surface, the following effects are obtained.
(1) Since the grinding scraps are washed away with the liquid flowing out from the inside of the polishing tool, the polishing tool is not easily clogged, and the polishing power is not easily lowered even when used for a long time. For this reason, the frequency of the dressing process is reduced, and the workability is improved more than twice.
(2) If the liquid is allowed to flow out from the inside of the polishing tool and applied from the outside at the same time, the grinding scraps can be washed away more reliably and become more difficult to clog. In addition, the cooling effect is enhanced.
(3) Even if the polishing tool is used for a long time, clogging is difficult and the grinding force does not easily decrease. Therefore, in order to polish a workpiece by a predetermined amount, the number of polishing is reduced, and workability is improved. Further, since the polishing can be efficiently performed without increasing the polishing pressure, the workpiece is hardly damaged. For this reason, the product using the workpiece polished by the polishing method of the present invention is less likely to be defective.

The workpiece polishing method according to claim 2 of the present application uses the chemical solution capable of chemically dissolving the workpiece surface in the workpiece polishing method, and thus has the following effects in addition to the above effects.
(1) Since the chemical solution reacts with the workpiece and dissolves the workpiece, chemical polishing with the chemical solution is possible in addition to physical polishing with a polishing tool, making it difficult to reduce the grinding force, reducing the number of polishing operations, and working efficiency Will be better.
(2) Since the grinding waste is easily dissolved by the chemical solution, the grinding waste is less likely to clog the polishing tool. For this reason, the frequency of performing dressing processing is reduced, the frequency of exchanging the polishing tool and the frequency of the polishing position adjusting operation associated therewith is reduced, and the operation stop time of the polishing apparatus is shortened, so that the production efficiency is good. Further, the reduction of the polishing tool is reduced, the life is extended, and the cost is reduced.

In the polishing tool according to claim 3 of the present application, the liquid supply part is formed inside the polishing tool, and the material or / and structure of the polishing tool is changed from the inner side to the outer polishing surface. Since it can be released, it has the following effects.
(1) By simply supplying the liquid from the liquid supply unit to the polishing tool, the liquid automatically flows out from the inside of the polishing tool to the polishing surface, washing away the grinding debris, and preventing overheating of the polishing portion.
(2) Since the ingress of grinding waste into the polishing tool is prevented, the polishing tool is less likely to be clogged, the polishing power of the polishing tool is less likely to be reduced, the life of the polishing tool is prolonged, and the frequency of dressing treatment is reduced. Therefore, work efficiency is also improved.

In the polishing tool according to claim 4 of the present application, the polishing tool is in a roll shape or a disk shape, the liquid supply part is formed on the inner side or the inner side of the polishing tool, and the liquid flows out to the polishing surface from the inner side or the inner side. The following effects can be obtained.
(1) By simply supplying a liquid from the liquid supply unit to the polishing tool, the liquid flows out from the center side of the polishing tool to the outer peripheral surface (polishing surface), washing away the grinding scraps, and preventing overheating of the polishing portion.
(2) Since the ingress of grinding waste into the polishing tool is prevented, the polishing tool is less likely to be clogged, the polishing power of the polishing tool is less likely to be reduced, the life of the polishing tool is prolonged, and the frequency of dressing treatment is reduced. Therefore, work efficiency is also improved.

The polishing apparatus according to claim 5 of the present application uses the above-described polishing tool, a rotation drive source is connected to the rotation shaft of the polishing tool, and a liquid supply source that supplies liquid to the liquid supply portion of the polishing tool is connected. Since they are connected by tools, the following effects are obtained.
(1) The workpiece can be automatically and continuously polished only by supplying the liquid from the liquid supply source to the liquid supply unit while rotating the polishing tool with the rotation drive source.
(2) Since the liquid flows out from the center side or inside of the polishing tool to the polishing surface, the polishing apparatus having the effect of the polishing tool is obtained.

(Embodiment 1 of Work Polishing Method)
An example of an embodiment of a workpiece polishing method of the present invention will be described with reference to FIGS. 1 to 5. This embodiment is a case where the polishing tool 1 is in a roll shape, and an outer peripheral surface (polishing surface) of the polishing tool 1. This is a method in which the liquid 4 is caused to flow out from the center side of the polishing tool 1 to the polishing surface 2 while rotating 2 in contact with the work 3. In this case, if necessary, the liquid can also be poured from the outside (polishing surface) 2 of the polishing tool 1.

  The polishing tool 1 is made of a material or a structure that allows liquid to easily permeate or flow. As the liquid 4 that flows out from the core side of the polishing tool 1, water such as industrial water or tap water, or a chemical solution that can chemically dissolve the surface of the work 3 can be used. The chemical varies depending on the material of the workpiece 3 to be polished. For example, when the workpiece 3 is made of copper, cupric chloride capable of dissolving copper can be used. As the chemical solution, the surface of the workpiece 3 can be chemically dissolved, and at the same time, any liquid such as a material that protects the surface of the workpiece 3 or a material that imparts rust prevention to the surface of the workpiece 3 can be used according to the purpose. .

(Embodiment 2 of work polishing method)
In the work polishing method of the present invention, a disc-shaped polishing tool 1 as shown in FIG. 6 can also be used. In that case, the liquid 4 is caused to flow out from the inner side of the polishing tool 1 to the polishing surface 2 while polishing while the bottom surface (polishing surface) 2 of the disk-shaped polishing tool 1 is in rotational contact with the work 3. Also in this case, the same material and structure of the polishing tool 1 and the type of liquid used can be the same as those in the first embodiment. Also in this case, if necessary, the liquid can be poured from the outside (polishing surface) 2 of the polishing tool 1.

(Embodiment 1 of polishing tool)
An example of an embodiment of the polishing tool of the present invention will be described with reference to FIGS. The polishing tool 1 of this embodiment is used for carrying out the above-described work polishing method, and is formed in a roll shape. In this polishing tool 1, a cylindrical outer cylinder 6 having a diameter larger than that of the core material 5 is fixed to the outer periphery of the cylindrical core material 5 via a support piece 7, and a liquid is supplied to the space between the outer cylinder 6 and the core material 5. A portion 8 is provided so that the liquid 4 can be supplied thereto, and an abrasive 9 is attached to the outer peripheral surface of the outer cylinder 6 in a roll shape. As shown in FIG. 2, a large number of through holes 10 are opened in the outer cylinder 6, and the liquid 4 supplied into the liquid supply portion 8 flows out to the abrasive 9.

  The core material 5, the outer cylinder 6, and the support piece 7 are made of a material such as a metal or a hard resin that is hard to be deformed and hardly dissolved by a liquid, particularly a chemical solution. The core material 5 is for inserting the rotating shaft 11. The support piece 7 connects and holds the core material 5 and the outer cylinder 6. As shown in FIG. 1, one end is connected to the outer peripheral surface of the core material 5 and the other end is connected to the inner peripheral surface of the outer cylinder 6. . Three support pieces 7 are provided at a plurality of locations in the axial direction of the core material 5, three support pieces 7 in the outer peripheral direction of the core material 5.

  The liquid supply unit 8 is a space formed in the axial direction between the core material 5 and the outer cylinder 6 as shown in FIGS. 1 and 2, and the liquid 4 is supplied from an external liquid supply source 13 to the liquid supply unit 8. The supplied liquid 4 flows out from the through holes 10 of the outer cylinder 6 to the abrasive 9.

  Non-woven fabric through which the liquid 4 easily passes is used for the abrasive 9, and abrasive grains such as silicon carbide and short fibers are fixed with a binder and flow out from each through hole 10 of the outer cylinder 6. The incoming liquid 4 can flow out to the outer peripheral surface (polishing surface) 2.

  In the polishing tool 1 of the present invention, the shape, the number, the mounting position, etc. of the support piece 7 are not limited to those described above, and the core material 5 and the outer cylinder 6 can be reliably fixed. As long as the flow of the liquid 4 flowing out to the abrasive 9 through each of the through holes 10 of 6 is not blocked, other shapes, numbers, and attachment positions can be used. For example, the support piece 7 is formed in a plate shape that is long in the axial direction of the core material 5, and is arranged as a partition plate between the core material 5 and the outer cylinder 6, and the liquid supply unit 8 between the core material 5 and the outer cylinder 6 is used as the core material. It can also be divided into a plurality of 5 circumferential directions.

(Embodiment 2 of the polishing tool)
There are no particular limitations on the type, grain size, length, and the like of the abrasive grains and short fibers used in the abrasive 9, and those suitable for the application can be selected as appropriate. If the short fibers are too short, the entanglement between the short fibers will be weak and the strength and durability of the nonwoven fabric will be inferior. If the short fibers are too long, mixing with the binder will be insufficient and the uniformity of the nonwoven fabric will be impaired. In order to prevent this from happening, it is desirable to determine the type and length of the short fiber. The abrasive 9 of the present invention may be other than the nonwoven fabric as long as the liquid 4 can easily flow.

(Embodiment 3 of the polishing tool)
Another example of the embodiment of the polishing tool of the present invention will be described with reference to FIGS. The polishing tool 1 of this embodiment is also used for carrying out the work polishing method of the present invention, and is formed in a roll shape. In this polishing tool 1, an abrasive 9 is attached to the outer peripheral surface of a cylindrical core material 5, and several liquid supply portions 8 are formed inside the abrasive 9. The liquid supply unit 8 can be supplied with the liquid 4 from the external liquid supply source 13, can supply the liquid 4 inside, and the supplied liquid 4 flows out to the abrasive 9. .

  The core material 5 in FIGS. 3 and 4 is also a cylinder having a diameter through which the rotary shaft 11 can be inserted, and is made of the same material as the core material 5 in FIG. 1 and has the same shape. The abrasive 9 attached to the outer periphery of the core material 5 in the form of a roll also has the same material, shape and structure as the abrasive 9 of FIG.

  As shown in FIGS. 3 and 4, the polishing tool 1 of the present invention has a plurality of liquid supply portions 8 spirally formed in the axial direction of the polishing tool 1 on the core material 5 side of the polishing material 9. Without being limited thereto, as shown in FIG. 5, a plurality of liquid supply portions 8 may be spirally formed in the axial direction of the polishing tool 1 on the core material 2 side of the polishing material 9. The shape, the formation position, and the number of formation of the liquid supply unit 8 may be any shape, formation position, and formation number other than those described above.

(Embodiment 4 of the polishing tool)
The liquid supply unit 8 of the polishing tool 1 of FIG. 3 can also be formed by disposing a tube material such as a tube or a pipe having many through holes inside the abrasive material 9.

(Embodiment 5 of the polishing tool)
Another example of the embodiment of the polishing tool of the present invention will be described with reference to FIG. The polishing tool 1 of FIG. 6 is also used for carrying out the workpiece polishing method of the present invention. The polishing tool 1 has a disc 9 in which an abrasive 9 has a disc-like shape, and a shaft mounting hole 20 is opened at the center of the polishing tool 1 so that the rotating shaft 11 can be inserted and fixed. The polishing tool 1 is provided with a liquid supply portion 8 above the abrasive 9, and the liquid 4 supplied to the liquid supply portion 8 flows downward from the through-hole 10 on the bottom surface of the polishing material 9 and the bottom surface of the abrasive 9. (Polished surface) 2 flows out.

  The abrasive 9 of this embodiment is also made of a non-woven fabric in which abrasive grains such as silicon carbide and short fibers are fixed with a binder (resin) as in the abrasive 9 of the above embodiment, or the liquid 4 easily flows. It can also be made of other materials.

(Embodiment 1 of polishing apparatus)
An example of an embodiment of the polishing apparatus of the present invention will be described with reference to FIGS. This polishing apparatus 30 (FIG. 2) is an apparatus using the roll-shaped polishing tool 1 of FIG. 1, and a rotating shaft 11 is inserted into the core material 5 of the polishing tool 1, and the rotating shaft 11 is used as a rotational drive source such as a motor. When rotating at 12, the polishing tool 1 rotates, its outer peripheral surface (polishing surface) 2 contacts and rotates with the workpiece 3, and the liquid 4 is supplied from the external liquid supply source 13 into the liquid supply part 8 of the polishing tool 1. When pressurized and supplied, the liquid 4 passes through the through hole 10 of the outer cylinder 6 and flows into the abrasive 9 and flows out to the polishing surface 2 of the abrasive 9.

  The liquid supply source 13 is a ring-shaped container and is attached to the rotary shaft 11 with a bearing 22 such as a rotary joint so that the liquid supply source 13 does not rotate (idle) even when the rotary shaft 11 rotates. Thereby, even if the rotating shaft 11 rotates, the hose 14 connected to the liquid supply source 13 can be smoothly rotated without being twisted or tangled.

  In the polishing apparatus 30 of the present invention, a liquid scattering prevention wall can be provided around the polishing tool 1 in order to prevent the liquid 4 from scattering from the rotating polishing tool 1 to the surroundings.

(Embodiment 2 of polishing apparatus)
Another example of the embodiment of the polishing apparatus of the present invention will be described with reference to FIGS. This polishing apparatus 30 (FIG. 4) is an apparatus using the polishing tool 1 of FIG. 3, in which a rotating shaft 11 is inserted into the core material 5 of the polishing tool 1, and the rotating shaft 11 is rotated by a rotary drive source 12 such as a motor. Then, the polishing tool 1 rotates, and the outer peripheral surface (polishing surface) 2 rotates in contact with the work 3 to pressurize the liquid 4 from the external liquid supply source 13 into the liquid supply portion 8 of the polishing tool 1. When supplied, the liquid 4 passes through the through hole 10 of the outer cylinder 6 and flows into the abrasive 9, and flows out to the polishing surface 2 of the abrasive 9.

  The liquid supply source 13 of this apparatus is also a ring-shaped container, and is attached to the rotary shaft 11 by a bearing 22 such as a rotary joint. Even if the rotary shaft 11 rotates, the liquid supply source 13 rotates idly without rotating. Even if the rotary shaft 11 rotates, the hose 14 connected to the liquid supply source 13 can be smoothly rotated without being twisted or tangled.

(Embodiment 3 of the polishing apparatus)
The polishing apparatus 30 of the present invention can also use the polishing tool 1 shown in FIG. In this case, the liquid supply unit 8 is attached to the rotary shaft 11 with a bearing 22 such as a rotary joint.

(Embodiment 4 of polishing apparatus)
Another example of the embodiment of the polishing apparatus of the present invention will be described with reference to FIG. In this polishing apparatus 30, the polishing tool 1 has a disk shape, and a liquid supply source 13 is attached to a rotary shaft 11 by a bearing 22 such as a rotary joint, and is pressed into the abrasive 9 from the liquid supply source 13 and flows into the polishing material 9. The liquid 4 flows out to the bottom surface (polishing surface) 2 of the abrasive 9.

  Also in the polishing apparatus 30 of FIG. 6, a liquid scattering prevention wall can be provided around the polishing tool 1 in order to prevent the liquid 4 from scattering from the rotating polishing tool 1 to the surroundings.

  The workpiece polishing method, polishing tool, and polishing apparatus of the present invention are not limited to polishing of a workpiece such as a wafer, substrate, etc. made of metal, resin, glass, etc. used for a printed circuit board, magnetic disk, liquid crystal, semiconductor, etc. It can also be applied to fields such as polishing of parts for other electrical and electronic products and parts for mechanical products.

The perspective view which shows an example of embodiment of the polishing tool of this invention. It is a figure which shows an example of embodiment of the grinding | polishing apparatus of this invention provided with the polishing tool shown in FIG. 1, Comprising: Cross-sectional explanatory drawing which showed the polishing tool shown in FIG. 1 in the AA cross section. The perspective view which shows another example of embodiment of the polishing tool of this invention. It is a figure which shows an example of embodiment of the grinding | polishing apparatus of this invention provided with the polishing tool shown in FIG. 1, Comprising: Section explanatory drawing which showed the polishing tool shown in FIG. 1 in the BB cross section. The perspective view which shows another example of embodiment of the polishing tool of this invention. The fragmentary sectional view which shows another example of embodiment of the polishing tool and polishing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Polishing tool 2 Polishing surface 3 Work piece 4 Liquid 5 Core material 6 Outer cylinder 7 Support piece 8 Liquid supply part 9 Polishing material 10 Through hole 11 Rotating shaft 12 Rotation drive source 13 Liquid supply source 14 Hose 20 Shaft mounting hole 22 Bearing 30 Polishing device

Claims (5)

  In a workpiece polishing method in which a polishing tool is rotated and brought into contact with a workpiece to polish the workpiece, the workpiece is polished while allowing liquid to ooze out from the inside of the rotating polishing tool and / or spraying liquid from the outside of the polishing tool to the polishing tool. A work polishing method characterized by comprising:   2. The workpiece polishing method according to claim 1, wherein a chemical solution capable of chemically dissolving the workpiece surface is used as the liquid.   A polishing tool that polishes a workpiece by rotating contact with the surface of the workpiece, wherein a liquid supply part is formed in the polishing tool, and the polishing tool is a material that allows the liquid supplied from the supply part to flow from the inner side to the outer polishing surface. A polishing tool made of or / and having a structure.   4. The polishing tool according to claim 3, wherein the polishing tool is in the form of a roll or a disk, and in the case of a roll, the liquid supply part is formed on the center side of the polishing tool, and the liquid flows out from the core side to the polishing surface. In the case of the shape, the polishing tool characterized in that the liquid supply part is formed on the center side or the upper side of the polishing tool so that the liquid flows out from the core side or from the upper side to the polishing surface. A polishing apparatus for polishing a workpiece by rotating the polishing tool in contact with the workpiece. The polishing tool according to claim 3 or 4 is used as a polishing tool, and a rotational drive source is connected to a rotation shaft of the polishing tool. A polishing apparatus, wherein a liquid supply source for supplying a liquid to a liquid supply unit of the polishing tool is connected by a connecting tool.

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