JP2007115618A - Plasma treatment device by single head, plural jet ports - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device, capable of efficiently carrying out plasma treatment on a plurality of treating surfaces using simple equipment requiring small space. <P>SOLUTION: The plasma treatment head 10 comprises at least a pair of electrodes 12, 14 mutually facing each other, and a plurality of jet ports 11a, 11b communicating with a space 11x (hereinafter, called "discharge space") between the electrodes 12, 14. The plurality of jet ports 11a, 11b are arranged so as to face respectively different areas 1a, 1b of the treating object 1. By impressing a voltage on the electrodes 12, 14, electric discharge is generated in the discharge space 11x and the treating gas, which is made to pass the discharge space 11a and has become plasmatic is made to flow out to different directions from the plurality of jet ports 11a, 11b, and the treatment gas contacts respectively the different treating areas 1a, 1b of the treating object 1, facing the jet ports 11a, 11b, and the treating areas 1a, 1b are plasma-treated. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a plasma processing apparatus using a plurality of outlets for one head, and more particularly to an apparatus for plasma processing an object to be processed at a position distant from a discharge space, and is particularly suitable for performing plasma processing at substantially normal pressure. The present invention relates to a plasma processing apparatus.

  Conventionally, various atmospheric pressure plasma treatments have been proposed in which plasma treatment such as surface modification, thin film formation, ashing, and cleaning of an object to be processed is performed using plasma generated under a pressure near atmospheric pressure.

For example, in the so-called remote-type atmospheric pressure plasma processing, the processing gas is discharged from the discharge port of the plasma processing head through which the processing gas converted into plasma through the discharge space (processing gas activated through the plasma space) flows out. The object is moved relatively, and the processing gas flowing out from the outlet is sequentially brought into contact with the surface of the object to be processed, thereby performing plasma processing on the surface of the object to be processed (see, for example, Patent Document 1).
JP 2002-237480 A

  Since the conventional plasma processing head has only one outlet for spraying the plasma processing gas onto the surface to be processed, it is necessary to prepare a plasma processing head for each surface to be processed. Therefore, as the number of surfaces to be processed increases, it is necessary to increase the number of plasma processing heads, so that the equipment cost increases and the space for arranging the equipment also increases. In addition, operating costs such as voltage application and processing gas supply increase, and efficiency does not improve even if the number of surfaces to be processed increases.

  In view of such circumstances, the present invention is intended to provide a plasma processing apparatus capable of efficiently performing plasma processing on a plurality of surfaces to be processed using a simple facility in a small space.

  In order to solve the above-described problems, the present invention provides a plasma processing apparatus configured as follows.

  The plasma processing apparatus includes a plasma processing head disposed to face an object to be processed. The plasma processing head includes at least a pair of electrodes facing each other and a plurality of air outlets communicating with a space between the electrodes (hereinafter referred to as “discharge space”). The plurality of air outlets of the plasma processing head are arranged so as to face different processing regions of the processing object, respectively. From the plurality of outlets of the plasma processing head, the process gas that has been converted to plasma through the discharge space while applying a voltage to the electrode to generate a discharge in the discharge space flows out in different directions, and The processing gas comes into contact with each of the processing regions of the processing object opposite to the blow-out ports, and the processing regions are subjected to plasma processing.

  In the above configuration, since the plasma processing head has a plurality of outlets through which the processing gas flows out in different directions, a plurality of processing regions of the processing object are converted into plasma processing gas (which is actually plasma processing gas). Or a processing gas activated through plasma may be used, and plasma processing can be performed simultaneously. The purpose and type of the plasma treatment (surface modification, thin film formation, ashing, cleaning, etc.) may be different or the same for each region to be treated.

  According to the above configuration, when plasma processing is performed on a plurality of regions to be processed, the number of plasma processing heads can be reduced and equipment can be simplified. In addition, the space for installing equipment for plasma processing can be reduced. Furthermore, it is also possible to reduce the voltage application energy and the amount of processing gas by simultaneously performing plasma processing on a plurality of regions to be processed.

  Therefore, it is possible to efficiently perform plasma processing on a plurality of surfaces to be processed using simple equipment in a small space.

  Preferably, the apparatus further includes a transfer device that moves at least one of the plasma processing head and the workpiece.

  According to the said structure, a plasma processing head and a to-be-processed object can be moved relatively, and a to-be-processed object can be continuously plasma-processed.

  Specifically, it can be set as various aspects as follows.

  As one aspect, the conveying device conveys the sheet-like object to be processed by folding the conveying direction. The plasma processing head includes a plurality of outlets of the plasma processing head between the first portion and the second portion that are conveyed in opposite directions before and after the processing object is folded back. It arrange | positions so that 1 part and the said 2nd part may each be opposed. While conveying the object to be processed by the conveying device, the processing gas that has been converted into plasma is caused to flow out from the plurality of outlets of the plasma processing head, and into the first part and the second part of the object to be processed. Each of the process gases comes into contact with each other to plasma process the first part and the second part.

  In this case, both sides of the sheet-like workpiece can be plasma-treated, or only one side can be treated a plurality of times. According to the above aspect, it is possible to efficiently plasma-treat a sheet-like object to be processed using simple equipment in a small space.

  As another aspect, the transport device transports the first and second objects to be processed so that their transport paths are substantially parallel to each other. The plasma processing head includes a plurality of outlets of the plasma processing head between the first and second objects to be processed between the first and second objects to be processed, which are substantially parallel to each other. It arrange | positions so that the said conveyance path | route may be opposed. While the first and second objects to be processed are transferred by the transfer device, the process gas that has been converted to plasma is caused to flow out from the plurality of outlets of the plasma processing head, and the first and second objects to be processed. The processing gas comes into contact with the surfaces facing each other, and the surfaces facing each other are plasma-treated.

  In this case, the transport path can be simplified or shortened compared to the case where the first and second objects to be processed are plasma processed by separate plasma processing heads, and simple equipment is used in a small space. And plasma processing can be performed efficiently.

  As another aspect, the plasma processing head is inserted into the object to be processed, and the plurality of air outlets of the plasma processing head are opposed to the processing regions having different inner surfaces of the object to be processed. Placed in. The plasma-treated processing gas is caused to flow out from the plurality of outlets of the plasma processing head, and the processing gas comes into contact with the processing target regions on the inner surface of the processing target, and the processing target region is plasma processed. To do.

  According to the above aspect, since the plasma processing is simultaneously performed by the plurality of outlets of the plasma processing head, plasma processing is performed on different processing regions (for example, inner surfaces facing each other) on the inner surface of the processing object, It can be achieved in a short time that the entire inner surface of the object is plasma treated substantially uniformly. Therefore, it is possible to efficiently perform plasma processing using a simple facility in a small space.

  In this case, the plasma processing head and the workpiece may be moved relative to each other.

The plasma processing apparatus of the present invention is particularly suitable for an open system of 1 Pa or higher, particularly a substantially normal pressure (near atmospheric pressure) or a low airtight system, but is not limited thereto. In the present invention, “substantially normal pressure” refers to a range of 1.013 × 10 ^{4 to} 50.663 × 10 ⁴ Pa, and considering the ease of pressure adjustment and the simplification of the apparatus configuration, 1.333 × 10 ^4. ˜10.664 × 10 ⁴ Pa is preferable, and 9.331 × 10 ^{4 to} 10.397 × 10 ⁴ Pa is more preferable.

  According to the present invention, it is possible to efficiently plasma process a plurality of surfaces to be processed using simple equipment in a small space.

  Embodiments of the present invention will be described below with reference to FIGS.

  (Example 1) The plasma processing apparatus of Example 1 is demonstrated referring FIG.1 and FIG.2.

  FIG. 1A is a perspective view showing a configuration of a main part. FIG.1 (b) is the longitudinal cross-sectional view cut | disconnected along line BB of Fig.1 (a). FIG.1 (c) is the cross-sectional view cut | disconnected along line CC of Fig.1 (a). As shown in FIG. 1, the plasma processing apparatus includes a plasma processing head 10 having two outlets 11a and 11b through which a processing gas flows out. For example, the plasma processing apparatus is disposed in an open system or a low airtight system of 1 Pa or more, in particular, substantially normal pressure (near atmospheric pressure).

  The plasma processing head 10 includes a pair of electrodes 12 and 14 arranged in parallel to each other. Each of the electrodes 12 and 14 includes dielectrics 13 and 15 on surfaces facing each other. The spacing between the dielectrics 13 and 15 is held constant by insulating spacers 16 and 17 disposed along the upper and lower sides of the dielectrics 13 and 15 as shown in FIG. The left and right ends are opened to form the air outlets 11a and 11b. The air outlets 11a and 11b communicate with a discharge space 11x formed between the dielectrics 13 and 15 and the insulating spacers 16 and 17.

  One insulating spacer 16 has an opening 16x in the center, and a processing gas is supplied into the discharge space 11x from a pipe (not shown) connected to the opening 16x. In the discharge space 11x, a pair of rectifying members 18 having through holes 18x are arranged between the opening 16x and the outlets 11a and 11b, and the flow of the processing gas supplied from the opening 16x is adjusted, and each outlet is arranged. The processing gas flows out from 11a and 11b substantially uniformly. The processing regions 1 a and 1 b of the processing object 1 are opposed to the air outlets 11 a and 11 b of the plasma processing head 10. For example, the processing regions 1a and 1b facing the air outlets 11a and 11b of the plasma processing head 10 may be the same side surface or different surfaces (front and back surfaces) of the sheet-like workpiece 1. Good. Furthermore, you may make it a separate to-be-processed object oppose to each blower outlet 11a, 11b of the plasma processing head 10, respectively.

  For example, as shown in FIG. 2, the sheet-like workpiece 1 is conveyed in a zigzag manner as indicated by arrows 4 a to 4 e using a plurality of rollers 3. In addition, the plasma processing head 10 is disposed. In the example of FIG. 2, the both surfaces 2 a and 2 b of the workpiece 1 are alternately subjected to plasma processing twice each by the plasma processing head 10. The sheet-like workpiece 1 may be twisted about 180 degrees around the conveyance direction so that the front and back surfaces are reversed.

  Next, the operation of the plasma processing apparatus will be described with reference to FIG.

  For example, an AC voltage or a pulse voltage is applied between the electrodes 12 and 14 of the plasma processing head 10 by a power source (not shown), and a discharge is generated in the discharge space 11x. As the form of discharge, glow discharge is preferable for uniform treatment, but corona discharge, dielectric barrier discharge, and creeping discharge may be used. At this time, the processing gas is supplied to the discharge space 11x of each plasma processing head 10 from the opening 16x, and is converted into plasma by discharge. The processing gas plasmified in the discharge space flows out in different directions (opposite directions) from the outlets 11a and 11b toward the processing regions 1a and 1b of the processing object 1 as indicated by broken arrows. To do. The processing gas flowing out from the air outlets 11a and 11b (which may be processing gas that is actually plasma or processing gas activated through plasma) may be processed region 1a, Contact 1b. Thus, plasma processing such as surface modification, thin film formation, ashing, and cleaning is performed on the processing regions 1a and 1b of the processing object 1 using plasma (active species, ions, and the like) by discharge.

  The processing gas may be selected according to the purpose of the plasma processing. For example, a mixed gas of nitrogen and oxygen is used for the oxidation treatment. Nitrogen and hydrogen are used for the reduction treatment. Fluorocarbon is used for water repellency and etching. The processing gas may be mixed with an inert gas such as nitrogen or argon as a dilution gas.

  While blowing the processing gas from the outlets 11a and 11b, the workpiece 1 is conveyed as indicated by arrows 1s and 1t, and the workpiece 1 is moved by moving the position where the workpiece 1 contacts the processing gas. Plasma treatment is performed continuously.

  The plasma processing head 10 plasma-processes the to-be-processed area | region 1a, 1b of the to-be-processed object 1 by blower outlet 11a, 11b from which the direction which blows off process gas differs. Therefore, the number of plasma processing heads can be reduced, and in some cases, equipment for supplying power and processing gas can be reduced in size and simplified, so that facilities can be simplified. In addition, the space for installing equipment for plasma processing can be reduced. Further, by simultaneously performing plasma processing on a plurality of regions to be processed while sharing the discharge space 11x, it is possible to reduce voltage application energy and the amount of processing gas and improve efficiency.

  Example 2 FIG. 3 is a cross-sectional view of a plasma processing head 10a of Example 2. FIG. The plasma processing head 10a is configured in substantially the same manner as in the first embodiment, and has two air outlets 11a and 11b.

  Unlike the first embodiment, the plasma processing head 10a divides the discharge space into two 11y and 11z by a partition member 19 disposed between the insulating spacers 16a and 17, and the insulating spacer 16a includes the discharge spaces 11y and 11z. Openings 16y and 16z communicating with each other are provided.

  In the second embodiment, by changing the types and combinations of the processing gases supplied to the discharge spaces 11y and 11z from the openings 16y and 16z of the plasma processing apparatus, respectively, the processing surface of the processing object facing the outlets 11a and 11b is changed. The type of plasma treatment can be changed.

  (Example 3) FIG. 4 is explanatory drawing in the case of performing the plasma process of wiring and an electrode as pre-processing at the time of mounting the electronic component 7 on the printed circuit board 6. FIG.

  As shown by arrows 6x and 7x in FIG. 4A, plasma having two outlets 21a and 21b between the transport path for transporting the printed circuit board 6 and the electronic component 7 substantially in parallel as in the first embodiment. The processing head 20 is arranged so that one air outlet 21 a faces the lower surface 7 b of the electronic component 7 and the other air outlet 21 b faces the upper surface 6 a of the printed circuit board 6. As a result, the upper surface 6a of the printed circuit board 6 and the lower surface 7b of the electronic component 7 can be subjected to plasma processing simultaneously.

  The printed circuit board 6 and the electronic component 7 that have passed through the plasma processing head 20 are conveyed toward the printed circuit board 6 as indicated by an arrow 7y in FIG. Implemented in position.

  In the third embodiment, as compared with the case where the plasma processing head is provided on each of the printed circuit board 6 and the electronic component 7 and the plasma processing is performed, the transport path can be simplified or shortened, and the apparatus configuration can be simplified. Can do.

  Note that the plasma processing head 20 divides the discharge space as in the second embodiment, so that different types of plasma processing gases flow out from the outlets, or the flow states (flow rate, flow velocity, etc.) are different. Good.

  Example 4 FIG. 5 is an explanatory diagram in the case where a plurality of regions to be processed inside a box-shaped object 8 are simultaneously processed by one plasma processing head 30.

  As shown in FIG. 5, a plasma processing head 30 having two outlets 31 a and 31 b is inserted into the workpiece 8 as in the first embodiment. The plasma processing head 30 is arranged so that the air outlets 31a and 31b are opposed to the opposed inner side surfaces 8a and 8b inside the workpiece 8, and the opposed inner side surfaces 8a and 8b inside the workpiece 8 are arranged. At the same time, plasma processing is performed efficiently.

  For example, in order for the conventional air outlet to simultaneously process the inner side surfaces 8a and 8b using one plasma processing head, the air outlet of the plasma processing head is opposed to the bottom surface 8x of the workpiece 8, and the bottom surface 8x A processing gas is blown toward the bottom, and the processing gas flows from the bottom surface 8x along the inner side surfaces 8a and 8b.

  On the other hand, if the plasma processing head 30 having two outlets 31a and 31b as in the fourth embodiment is used and the processing gas is blown directly onto the inner side surfaces 8a and 8b, the processing gas is efficiently used for the plasma processing. be able to.

  (Example 5) The number of outlets of the plasma processing head is not limited to two, and may be three or more. For example, as shown in the partial cross-sectional configuration diagram of FIG. 6, the plasma processing head 50 is provided with a discharge space having a substantially cross-sectional shape and four outlets 51 a to 51 d. In this case, the four electrodes 52, 54, 56, 58 are preferably provided with dielectrics 53, 55, 57, 59 on the surfaces facing the other electrodes 52, 54, 56, 58. A processing gas is supplied into the discharge space from a pipe (not shown), and the processing gas flows out in four directions from the outlets 51a to 51d as indicated by arrows 50a to 50d. For example, a voltage is applied between the electrodes 52 and 56 and the electrodes 54 and 58 to generate a discharge in the discharge space.

  When the number of outlets is increased as in the fifth embodiment, it is possible to increase the number of processing areas that can be processed at the same time, plasma processing is performed on different processing areas of the processing target, or the entire inner surface of the processing target is approximately uniformly plasma. Processing can be achieved in a short time.

  (Summary) As described above, the plasma processing apparatus can efficiently perform plasma processing using simple equipment in a small space.

  The present invention is not limited to the above-described embodiment, and can be implemented with various modifications.

  For example, the opening of the plasma processing head can arbitrarily select the direction in which the processing gas flows out, and is not limited to the embodiment. Further, the opening of the plasma processing head may be provided at a position away from the discharge space.

It is (a) principal part perspective surface of a plasma processing apparatus, (b) principal part longitudinal cross-section, (c) principal part cross-sectional view. Example 1 It is a principal part block diagram of a plasma processing apparatus. Example 1 It is a principal part longitudinal cross-section of a plasma processing head. (Example 2) It is explanatory drawing of the process using a plasma processing apparatus. (Example 3) It is principal part explanatory drawing of a plasma processing apparatus. (Example 4) It is a partial cross-section structure surface of a plasma processing head. (Example 5)

Explanation of symbols

1 Processed object 1a, 1b Processed area 6 Printed circuit board (processed object)
6a Upper surface (processed area)
7 Electronic parts (processing object)
7b Bottom surface (processed area)
8 To-be-processed object 8a, 8b Inner side surface (processed area)
10, 10a Plasma processing head 11a, 11b Outlet 11x, 11y, 11z Discharge space 12, 14 Electrode 20 Plasma processing head 21a, 21b Outlet 30 Plasma processing head 31a, 31b Outlet 50 Plasma processing head 51a, 51b, 51c, 51d outlet 52, 54, 56, 58 electrode

Claims (5)

A plasma processing apparatus including a plasma processing head disposed opposite to an object to be processed,
The plasma processing head has at least a pair of electrodes facing each other and a plurality of air outlets communicating with a space between the electrodes (hereinafter referred to as “discharge space”),
The plurality of air outlets of the plasma processing head are arranged so as to face different processing regions of the processing object,
From the plurality of outlets of the plasma processing head, the process gas that has been converted to plasma through the discharge space while applying a voltage to the electrode to generate a discharge in the discharge space flows out in different directions, and The plasma processing apparatus characterized in that the processing gas comes into contact with each of the processing target regions of the processing target opposite to the blower outlets to perform plasma processing on the processing target regions.   The plasma processing apparatus according to claim 1, further comprising a transfer device that moves at least one of the plasma processing head or the workpiece. The conveying device conveys the sheet-shaped workpiece by folding the conveying direction,
The plasma processing head includes a plurality of outlets of the plasma processing head between the first portion and the second portion that are conveyed in opposite directions before and after the processing object is folded back. 1 part and the second part are arranged to face each other,
While conveying the object to be processed by the conveying device, the processing gas that has been converted into plasma is caused to flow out from the plurality of outlets of the plasma processing head, and into the first part and the second part of the object to be processed. The plasma processing apparatus according to claim 2, wherein the processing gas is brought into contact with each other to perform plasma processing on the first portion and the second portion. The transport device transports the first and second objects to be processed so that their transport paths are substantially parallel to each other,
The plasma processing head includes a plurality of outlets of the plasma processing head between the first and second objects to be processed between the first and second objects to be processed, which are substantially parallel to each other. Arranged to face the transport path of
While the first and second objects to be processed are transferred by the transfer device, the process gas that has been converted to plasma is caused to flow out from the plurality of outlets of the plasma processing head, and the first and second objects to be processed. The plasma processing apparatus according to claim 2, wherein the processing gas comes into contact with the surfaces facing each other to perform plasma processing on the surfaces facing each other. The plasma processing head is inserted into the object to be processed, and a plurality of the air outlets of the plasma processing head are arranged so as to face different processing areas on the inner surface of the object to be processed,
The plasma-treated processing gas is caused to flow out of the plurality of outlets of the plasma processing head, and the processing gas comes into contact with the processing target regions on the inner surface of the processing target, and the processing target region is subjected to plasma processing. The plasma processing apparatus according to claim 1, wherein:

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