JP2007101225A - Sensor and measuring instrument equipped with it - Google Patents
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- JP2007101225A JP2007101225A JP2005288151A JP2005288151A JP2007101225A JP 2007101225 A JP2007101225 A JP 2007101225A JP 2005288151 A JP2005288151 A JP 2005288151A JP 2005288151 A JP2005288151 A JP 2005288151A JP 2007101225 A JP2007101225 A JP 2007101225A
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Abstract
Description
本発明は、液中に浸漬された状態で所定振動数の信号を発振する発振子を備えたセンサ及びこれを利用して液中の物質の量を計測する装置に関する。詳細には、水溶液及び有機溶媒を使用した溶液の何れにも使用することが可能なセンサ及びこれを使用した装置に関する。 The present invention relates to a sensor including an oscillator that oscillates a signal having a predetermined frequency when immersed in a liquid, and an apparatus for measuring the amount of a substance in the liquid using the sensor. Specifically, the present invention relates to a sensor that can be used for both an aqueous solution and a solution using an organic solvent, and an apparatus using the sensor.
従来、この種のセンサとして、例えば、特許文献１乃至３に示されるものが開示されている。
これらの文献に記載されるセンサは、圧電板に設けられた両電極の一方を、これと実質上密着することなく一定の絶縁空間を介して非脱イオン溶液が浸透しないようにバリヤー被覆するものである。
しかしながら、このセンサは、気体中、或いは、水溶液中に浸漬して測定することは可能であったが、有機溶媒を使用した溶液に浸漬して測定する場合には、圧電板を接着するための材料が、溶解又は膨潤してしまうことがあり、この変形に伴い圧電板に設けられた電極や端子を構成する金属製の部材や圧電板が破損して、或いは、接着剤が剥離して、発振することができず、測定できないという問題があった。
Conventionally, as this type of sensor, for example, those disclosed in Patent Documents 1 to 3 have been disclosed.
In the sensors described in these documents, one of both electrodes provided on the piezoelectric plate is barrier-coated so that the non-deionized solution does not penetrate through a certain insulating space without substantially contacting with the electrode. It is.
However, this sensor can be measured by immersing it in a gas or an aqueous solution, but when immersing and measuring in a solution using an organic solvent, it is necessary to adhere the piezoelectric plate. The material may dissolve or swell, and the metal member or piezoelectric plate constituting the electrode or terminal provided on the piezoelectric plate is damaged along with this deformation, or the adhesive peels off, There was a problem that it could not oscillate and could not be measured.
この問題に対して、本出願人は、特願２００５−２８６８２５において、前記接着剤として、エポキシ樹脂、ポリイミド樹脂及びフェノール樹脂の何れかを主剤とした導電性接着剤を使用することを提案した。
しかしながら、上記提案したセンサにおいても、下記の問題を有していた。
即ち、上記提案したセンサの構造は、その断面を図３に示すように、圧電板３の外周の端面と被覆部材１の内周面との間から溶液が進入することを防ぐためにシール剤１７を塗布する構造としている。
このシール剤１７の量が少なすぎるとシール不良が生じて、圧電板３に設けられた電極５も溶液に浸るために短絡が生じる。また、有機溶媒を使用した溶液に浸漬して測定する場合に、このシール剤１７が溶解又は膨潤してしまい、このシール剤１７の形状が安定し、発振周波数が安定するまでに非常に時間がかかるという問題があった。
In response to this problem, the present applicant has proposed in Japanese Patent Application No. 2005-286825 to use, as the adhesive, a conductive adhesive mainly composed of any one of an epoxy resin, a polyimide resin, and a phenol resin.
However, the proposed sensor has the following problems.
That is, in the structure of the proposed sensor, as shown in FIG. 3, the sealing agent 17 is used to prevent the solution from entering between the outer peripheral end surface of the piezoelectric plate 3 and the inner peripheral surface of the covering member 1. It is set as the structure which apply | coats.
If the amount of the sealing agent 17 is too small, a sealing failure occurs, and the electrode 5 provided on the piezoelectric plate 3 is also immersed in the solution, causing a short circuit. Further, when measurement is performed by immersing in a solution using an organic solvent, the sealing agent 17 is dissolved or swollen, and it takes a very long time until the shape of the sealing agent 17 is stabilized and the oscillation frequency is stabilized. There was a problem that it took.
そこで、本発明は、水溶液及び有機溶媒を使用した溶液に浸漬しても精度の高い測定が可能なセンサ及びこれを用いた装置を提供することを目的とする。 Accordingly, an object of the present invention is to provide a sensor capable of measuring with high accuracy even when immersed in a solution using an aqueous solution and an organic solvent, and an apparatus using the sensor.
上記課題を解決するために、本発明者等は、鋭意検討の結果、圧電板の端面と基板との間を中心として封止すれば、シール剤が、溶解又は膨潤による発振周波数が安定するまでの時間を短くすることができるという知見に基づき、下記の通り解決手段を見いだした。
即ち、本発明のセンサは、請求項１に記載の通り、圧電板と、この両面の内側に設けられた電極とを備えるセンサであって、前記圧電板に設けられた両電極のうちの一方の電極は、空間を介して、前記圧電板の端面を囲繞することができるようにカップ状に形成された被覆部材により被覆され、前記圧電板の外周の端面と前記被覆部材の内周面との間をシール剤によりシールし、且つ、前記圧電板の前記空間側の面に付着した前記シール剤の回り込み量が、前記圧電板の外周の端面から内側方向に向かって、前記圧電板の最大外径に対して１０％の範囲内としたことを特徴とする。
また、請求項２に記載のセンサは、請求項１に記載のセンサにおいて、前記シール剤は、シリコーン樹脂であることを特徴とする。
また、請求項３に記載のセンサは、請求項１又は２に記載のセンサにおいて、前記被覆部材を、対象となる溶液に対して、寸法変化率が１０％以下の材料により構成したことを特徴とする。
また、請求項４に記載のセンサは、請求項３に記載のセンサにおいて、前記被覆部材は、無機材料から構成されることを特徴とする。
また、本発明の測定装置は、請求項５に記載の通り、請求項１乃至４の何れかに記載のセンサを備えたことを特徴とする。
In order to solve the above-mentioned problems, the present inventors, as a result of intensive studies, until sealing is performed around the end face of the piezoelectric plate and the substrate until the oscillation frequency due to dissolution or swelling is stabilized. Based on the knowledge that this time can be shortened, we found a solution as follows.
That is, the sensor according to the present invention is a sensor including a piezoelectric plate and electrodes provided on both sides of the piezoelectric plate according to claim 1, and one of the two electrodes provided on the piezoelectric plate. The electrode is covered with a covering member formed in a cup shape so as to surround the end face of the piezoelectric plate through a space, and an outer peripheral end face of the piezoelectric plate and an inner peripheral face of the covering member The amount of wraparound of the sealant adhered to the space-side surface of the piezoelectric plate is the maximum of the piezoelectric plate inward from the outer peripheral end surface of the piezoelectric plate. It is characterized by being within a range of 10% with respect to the outer diameter.
The sensor according to claim 2 is the sensor according to claim 1, wherein the sealing agent is a silicone resin.
The sensor according to claim 3 is the sensor according to claim 1 or 2, wherein the covering member is made of a material having a dimensional change rate of 10% or less with respect to a target solution. And
According to a fourth aspect of the present invention, in the sensor according to the third aspect, the covering member is made of an inorganic material.
Moreover, the measuring apparatus of this invention was equipped with the sensor in any one of Claims 1 thru | or 4 as described in Claim 5.
本発明のセンサによれば、圧電板の下側に回り込むシール剤の量を減らすことができ、溶液がシール剤に染み込むまでの時間が短くなり、結果として発振子が安定して発振するまでの時間を短くすることができる。更に、有機溶剤を使用した溶媒を用いた場合に、シール剤に溶媒が染み込んで膨潤して、シール剤の近傍に設けられた接続端子を破損することがない。
また、被覆部材を寸法変化率が１０％以下の材料により構成したことにより、被覆部材をの形状の変化に伴う圧電板にかかるストレスを軽減することができ、精度の高い測定が可能となる。
また、本発明の測定装置は、上記センサを備えることにより、水溶液及び有機溶媒を使用した溶液の何れでも測定することができ、しかも、測定までの時間が短い測定装置とすることができる。
According to the sensor of the present invention, the amount of the sealing agent that wraps around the lower side of the piezoelectric plate can be reduced, the time until the solution soaks into the sealing agent is shortened, and as a result, until the oscillator oscillates stably. Time can be shortened. Furthermore, when a solvent using an organic solvent is used, the solvent does not soak into the sealing agent and swell, so that the connection terminal provided in the vicinity of the sealing agent is not damaged.
In addition, since the covering member is made of a material having a dimensional change rate of 10% or less, stress applied to the piezoelectric plate due to a change in the shape of the covering member can be reduced, and highly accurate measurement can be performed.
Moreover, the measuring apparatus of this invention can measure any of the solution using an aqueous solution and an organic solvent by providing the said sensor, Furthermore, it can be set as the measuring apparatus with short time to a measurement.
以下、図面を参照し、本発明の一実施の形態について説明する。尚、本発明は、この実施の形態に制限されるものではない。
本実施の形態のセンサは、図１に示されるように、平面形状が矩形状の基板１の一端側に、発振子２を設けている。発振子２は、円形状に形成された圧電板３とその両面の内側（略中央部）に同じく円形状に形成された電極４，５とを備えている。各電極４，５からは、互いに反対方向となるように、圧電板３の外周方向に向かってリード線６，７が設けられており、リード線６，７の外縁部には円弧状に形成された接続端子８，９が形成されている。尚、図示されるように、圧電板３の表側のリード線６は、裏側に回り込み、接続端子８は圧電板３の裏側に配置されている。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The present invention is not limited to this embodiment.
As shown in FIG. 1, the sensor according to the present embodiment includes an oscillator 2 on one end side of a substrate 1 having a rectangular planar shape. The oscillator 2 includes a piezoelectric plate 3 formed in a circular shape, and electrodes 4 and 5 that are also formed in a circular shape on the inner side (substantially central portion) of both surfaces thereof. Lead electrodes 6 and 7 are provided from the electrodes 4 and 5 toward the outer peripheral direction of the piezoelectric plate 3 so as to be opposite to each other, and are formed in an arc shape on the outer edges of the lead wires 6 and 7. Connection terminals 8 and 9 are formed. As shown in the figure, the lead wire 6 on the front side of the piezoelectric plate 3 goes around to the back side, and the connection terminal 8 is arranged on the back side of the piezoelectric plate 3.
また、圧電板３の裏側の電極５は、所定の空間１０を有するようにして、基板１により被覆されている。詳細には、図２に図１のＡ−Ａ断面に示されるように、基板１の一端側の端部に、圧電板３をはめ込むことができる程度の円形状の凹部１１が設けられており、この凹部１１の内周面は階段状に形成されて、圧電板３の裏側の電極５が基板１に接触しないようになっている。
前記凹部１１の内周面の階段の平坦部１２にも接続端子１３，１４が設けられ、これらと、圧電板３に設けられた接続端子８，９は、導電性接着剤１５を介して接着されることになる。尚、前記樹脂には、導電性フィラーが混入されるが、導電性フィラーとしては導電性を有するものであれば特に制限はなく、例えば、金属やカーボン等を使用することができる。また、フィラーの混入率については、導電性接着剤として、必要な導電性能及び接着性能を有するものであれば特に制限するものではない。導電性接着剤１５としては、銀をフィラーとしたエポキシ樹脂が好ましい。
このように、導電性接着剤１５により、圧電板３に設けられた接続端子８，９と、基板１に設けられた接続端子１３，１４とを接着するようにしたので、有機溶媒を使用した溶液に浸漬した際に、膨潤して大きく変形することがない。従って、圧電板３又は基板１に設けられた接続端子８，９，１３，１４の剥離を防止することができる。
尚、基板１に設けられた接続端子８，９は、基板１内部に設けられた配線１６を介して、圧電板３とは反対側の端部において、外部電源に接続されることになる。
The electrode 5 on the back side of the piezoelectric plate 3 is covered with the substrate 1 so as to have a predetermined space 10. Specifically, as shown in FIG. 2 in the AA cross section of FIG. 1, a circular recess 11 is provided at the end of one end of the substrate 1 so that the piezoelectric plate 3 can be fitted. The inner peripheral surface of the recess 11 is formed in a step shape so that the electrode 5 on the back side of the piezoelectric plate 3 does not contact the substrate 1.
The connection terminals 13 and 14 are also provided on the flat portion 12 of the staircase on the inner peripheral surface of the recess 11, and these and the connection terminals 8 and 9 provided on the piezoelectric plate 3 are bonded via a conductive adhesive 15. Will be. In addition, although a conductive filler is mixed in the resin, the conductive filler is not particularly limited as long as it has conductivity, and for example, metal or carbon can be used. Further, the mixing rate of the filler is not particularly limited as long as the conductive adhesive has necessary conductive performance and adhesive performance. The conductive adhesive 15 is preferably an epoxy resin using silver as a filler.
As described above, since the connection terminals 8 and 9 provided on the piezoelectric plate 3 and the connection terminals 13 and 14 provided on the substrate 1 are bonded by the conductive adhesive 15, an organic solvent is used. When immersed in a solution, it does not swell and deform greatly. Accordingly, it is possible to prevent the connection terminals 8, 9, 13, and 14 provided on the piezoelectric plate 3 or the substrate 1 from being peeled off.
The connection terminals 8 and 9 provided on the substrate 1 are connected to an external power supply at the end opposite to the piezoelectric plate 3 via the wiring 16 provided inside the substrate 1.
また、前述の通り、圧電板３は、基板１のカップ状の凹部１１により囲繞されており、図２に示すように、圧電板３の端面と凹部１１の内周面との間にはシール剤１７が設けられ、且つ、圧電板３の空間側の面に付着したシール剤の回り込み量が、圧電板３の外周の端面から内側方向に向かって、圧電板３の最大外径に対して２０％の範囲としている。これにより、有機溶媒を使用した溶液に浸漬した際に、シール剤１７に溶液が染み込むまでの時間を短くすることができ、結果として、測定の際にセンサ３０の発振周波数が安定するまでの時間を短くすることができる。尚、本発明において、最大外径としているが、圧電板３の平面形状が矩形状の場合には、最大外径は、対角線の長さとなる。 Further, as described above, the piezoelectric plate 3 is surrounded by the cup-shaped recess 11 of the substrate 1, and a seal is provided between the end surface of the piezoelectric plate 3 and the inner peripheral surface of the recess 11 as shown in FIG. 2. The amount of wraparound of the sealing agent that is provided with the agent 17 and that adheres to the space-side surface of the piezoelectric plate 3 is inward from the outer peripheral end surface of the piezoelectric plate 3 with respect to the maximum outer diameter of the piezoelectric plate 3. The range is 20%. Thereby, when immersed in the solution using an organic solvent, the time until the solution soaks into the sealing agent 17 can be shortened, and as a result, the time until the oscillation frequency of the sensor 30 is stabilized during measurement. Can be shortened. Although the maximum outer diameter is used in the present invention, when the planar shape of the piezoelectric plate 3 is rectangular, the maximum outer diameter is the length of the diagonal line.
シール剤１７は、圧電板３の端面と凹部１１の内周面との隙間、通常、０．２〜２．０ｍｍの隙間をシールすることができる程度のシール性を有するものであれば特に制限はないが、シリコーン樹脂により構成することが好ましい。有機溶媒を使用した溶液が速やかに染み込むことができるからである。 The sealing agent 17 is not particularly limited as long as it has a sealing property that can seal a gap between the end face of the piezoelectric plate 3 and the inner peripheral surface of the recess 11, usually a gap of 0.2 to 2.0 mm. However, it is preferable to use a silicone resin. This is because a solution using an organic solvent can permeate quickly.
また、本実施の形態では、被覆部材は、基板１の一部により構成しているが、被覆部材を構成する材料は、寸法変化率が１０％以下の材料とすることが好ましい。また、単一の部材であっても、単一の部材に対して溶液が浸透したりすることがないようにコーティングが施されたものであってもよい
寸法変化率が１０％を超える材料では、有機溶媒を使用した溶液中において、被覆部材が膨潤するまでの間、発振周波数が安定しないことによる測定開始までの時間がかかることや導電性接着剤の剥離等の不都合が生じるからである。
Moreover, in this Embodiment, although the coating | coated member is comprised by a part of board | substrate 1, it is preferable that the material which comprises a coating | coated member shall be a material whose dimensional change rate is 10% or less. Moreover, even if it is a single member, it may be coated so that the solution does not penetrate into the single member. This is because, in a solution using an organic solvent, it takes time until measurement starts due to the oscillation frequency being unstable until the covering member swells, and inconvenience such as peeling of the conductive adhesive occurs.
また、基板１を構成する材料としては、ガラス、セラミック、金属、カーボン、水晶等の硬質な無機材料、これらの中でも、セラミックを使用することが好ましい。従来は、シリコーン樹脂等の柔軟な材料を使用しないと、早期に発振周波数を安定させることができないとされていたが、セラミック等の無機材料であっても早期に発振周波数を安定させることを発見したためである。 Moreover, as a material which comprises the board | substrate 1, it is preferable to use ceramics among hard inorganic materials, such as glass, a ceramic, a metal, carbon, a crystal | crystallization, among these. Previously, it was said that the oscillation frequency could not be stabilized early unless a flexible material such as silicone resin was used. However, it was discovered that the oscillation frequency could be stabilized early even with inorganic materials such as ceramics. This is because.
尚、本明細書において、寸法変化率は、以下のように定義される。
基板１を構成する材料からなる試験片（縦辺１ｃｍ、横辺１ｃｍ、厚さ５ｍｍ）を、温度２５±０．１℃、常圧に設定された恒温槽内に２４時間放置して、精密測長機により、縦辺と横辺の長さを測定して、これらを、それぞれ、ａ，ｂとする。
そして、常圧下において、対象となる溶液中に前記試験片を浸漬して、３時間後に取り出し、上記と同様に、縦辺と横辺の長さを測定し、これらを、それぞれ、ａ'，ｂ'とする。尚、溶液への浸漬に際しては、常温常圧下で、溶液の温度を２５℃±０．１℃に設定する。
そして、下記式により、当該試験片の寸法変化率を算出する。合計５個の試験片に対して寸法変化率を得、その平均値を、本明細書でいう寸法変化率とした。
寸法変化率（％）＝｜（（ｂ'−ｂ）＋（ａ'−ａ））／２｜／（ａ＋ｂ）×１００
In the present specification, the dimensional change rate is defined as follows.
A test piece made of the material constituting the substrate 1 (longitudinal side 1 cm, lateral side 1 cm, thickness 5 mm) is allowed to stand for 24 hours in a thermostatic chamber set at a temperature of 25 ± 0.1 ° C. and normal pressure. The length measuring device measures the length of the vertical side and the horizontal side, and these are set as a and b, respectively.
Then, under normal pressure, the test piece is immersed in the target solution and taken out after 3 hours, and the lengths of the vertical and horizontal sides are measured in the same manner as described above. Let b ′. In the immersion in the solution, the temperature of the solution is set to 25 ° C. ± 0.1 ° C. under normal temperature and normal pressure.
And the dimensional change rate of the said test piece is computed by a following formula. The dimensional change rate was obtained for a total of five test pieces, and the average value was defined as the dimensional change rate referred to in this specification.
Dimensional change rate (%) = | ((b′−b) + (a′−a)) / 2 | / (a + b) × 100
上記対象となる溶液とは、本発明のセンサが浸漬される溶液のことで、各測定毎に異なる。尚、測定に使用される溶液の例を挙げると、アセチレン、アセトアルデヒド、アセトニトリル、アセトン、アニリン、イソブチルアルコール、イソプロピルアルコール、ジエチルエーテル、エタノールアミン、エチルアルコール、エチルベンゼン、エチレングリコール、塩化エチル、塩化メチル、キシレン、グリセリン、クロロトルエン、クロロナフタリン、クロロホルム、ジエチルエーテル、ジエチレングリコール、四塩化炭素、ジオキサン、シクロヘキサン、ジクロロベンゼン、ジブチルエーテル、ジメチルスホキシド、ジメチルホルムアミド、テトラクロロエタン、テトラヒドロフラン、トリエタノールアミン、トリクロロエチレン、トルエン、パークロルエチレン、ピリジン、フェノール、ブチルアルコール、ブチルセルソルブ、プロピルアルコール、フロロベンゼン、ヘキサアルデヒド、ヘキサン、ベンジルアルコール、ベンズアルデヒド、ベンゼン、ホルムアルデヒド及びメチルアルコールの何れか又はこれらのうちの少なくとも２種の混合物等がある。 The target solution is a solution in which the sensor of the present invention is immersed, and is different for each measurement. Examples of solutions used for measurement include acetylene, acetaldehyde, acetonitrile, acetone, aniline, isobutyl alcohol, isopropyl alcohol, diethyl ether, ethanolamine, ethyl alcohol, ethylbenzene, ethylene glycol, ethyl chloride, methyl chloride, Xylene, glycerin, chlorotoluene, chloronaphthalene, chloroform, diethyl ether, diethylene glycol, carbon tetrachloride, dioxane, cyclohexane, dichlorobenzene, dibutyl ether, dimethyl sulfoxide, dimethylformamide, tetrachloroethane, tetrahydrofuran, triethanolamine, trichloroethylene, toluene , Perchlorethylene, pyridine, phenol, butyl alcohol, butyl cellosolve, Pills alcohol, difluorobenzene, hexa aldehydes, hexane, there are benzyl alcohol, benzaldehyde, benzene, any or a mixture of at least two of these formaldehyde and methyl alcohol.
また、本発明の測定装置は、圧電板３の電極４，５に対して交流電圧を印加して振動させ、この振動周波数等の変化を測定することができるものであれば、特に制限はなく、単に発振回路とセンサ３０の周波数等の電気的特性を測定できるものや、ネットワークアナライザ、インピーダンスアナライザを使用したものも当然含まれる。 The measuring device of the present invention is not particularly limited as long as it can vibrate by applying an AC voltage to the electrodes 4 and 5 of the piezoelectric plate 3 and can measure changes in the vibration frequency and the like. Of course, those that can simply measure electrical characteristics such as the frequency of the oscillation circuit and the sensor 30, and those that use a network analyzer or impedance analyzer are naturally included.
上記した圧電板３も、公知のものを使用することができ、例えば、水晶以外にも、チタン酸バリウム、ＰＺＴ（登録商標）等をを使用することができる。
また、基板１に設けられる接続端子１３，１４や、圧電板３に設けられる電極４，５や接続端子８，９についても、同様に公知のものであり、金等の金属製材料を蒸着等して設けられる。
The above-mentioned piezoelectric plate 3 can also use a well-known thing, For example, besides quartz, barium titanate, PZT (trademark), etc. can be used.
Similarly, the connection terminals 13 and 14 provided on the substrate 1, the electrodes 4 and 5 and the connection terminals 8 and 9 provided on the piezoelectric plate 3 are also publicly known, and a metal material such as gold is vapor deposited. Provided.
次に、本発明の以下の構成の実施例のセンサと、比較例のセンサを作製して比較実験を行った。
（実施例１）
図２に示すように、基板１をセラミックにより構成し、圧電板３として厚さ０．１４７５ｍｍ、半径４．３５ｍｍのＡＴカット２７ＭＨｚの水晶を用い、圧電板３の両面の略中央部には、金を厚さ０．５μｍ、半径２．５ｍｍの円形状に蒸着して電極４，５を形成した。そして、圧電板３に設けられた接続端子１３，１４と、基板１に設けられた接続端子８，９とを、銀分散エポキシ樹脂１４により接着した。更に、圧電板３と基材１との間からシール剤１７を流し込み、圧電板３の裏側においてシール剤１７の回り込み量（ｗ１）が、圧電板３の外周の端面から内側方向に向かって、圧電板３の最大外径（２ｒ）に対して６％の範囲内に収まるようにして、シールし、本実施例のセンサとした。
Next, the sensor of the Example of the following structure of this invention and the sensor of a comparative example were produced, and the comparative experiment was conducted.
Example 1
As shown in FIG. 2, the substrate 1 is made of ceramic, and an AT-cut 27 MHz crystal having a thickness of 0.1475 mm and a radius of 4.35 mm is used as the piezoelectric plate 3. Gold was deposited in a circular shape having a thickness of 0.5 μm and a radius of 2.5 mm to form electrodes 4 and 5. Then, the connection terminals 13 and 14 provided on the piezoelectric plate 3 and the connection terminals 8 and 9 provided on the substrate 1 were bonded by a silver dispersed epoxy resin 14. Furthermore, the sealing agent 17 is poured from between the piezoelectric plate 3 and the base material 1, and the amount of wraparound (w1) of the sealing agent 17 on the back side of the piezoelectric plate 3 is inward from the outer peripheral end face of the piezoelectric plate 3. The sensor was used by sealing the piezoelectric plate 3 so as to be within a range of 6% with respect to the maximum outer diameter (2r) of the piezoelectric plate 3.
（比較例１）
図３に示すように、シール剤１７が、圧電板３の下側において、圧電板３の外周の端面から圧電板３の最大外径（２ｒ）に対する回り込み量が、２０％の範囲まで塗布した以外は、実施例１のセンサと同じ構成として、比較例１のセンサとした。
(Comparative Example 1)
As shown in FIG. 3, the sealing agent 17 was applied on the lower side of the piezoelectric plate 3 from the outer peripheral end surface of the piezoelectric plate 3 to a wraparound amount with respect to the maximum outer diameter (2r) of the piezoelectric plate 3 within a range of 20%. Except for the above, the sensor of Comparative Example 1 has the same configuration as that of the sensor of Example 1.
次に、液温が、２５±０．１℃に保たれた恒温ヒートブロック内に、８ｍｌのテトラクロロエタンを注入し、そこに、発振回路から基本周波数２７ＭＨｚで水晶を発振させた上記実施例１及び比較例１のセンサを浸漬して、周波数の変動を測定した。
測定の結果を図４及び図５に示す。実施例１のセンサでは、発振周波数が安定するまでに１時間であったのに対して、比較例１のセンサでは、７時間かかった。尚、図４の横軸は時間であり、縦軸は周波数（ＭＨｚ）であり、評価の方法は、１分間に周波数変動が１Ｈｚ以内となった時に、発振周波数が安定したと判定した。従って、図５では、実際に安定するまでの周波数変動は表示されていない。
Next, 8 ml of tetrachloroethane was injected into a constant temperature heat block where the liquid temperature was maintained at 25 ± 0.1 ° C., and the crystal was oscillated at a fundamental frequency of 27 MHz from the oscillation circuit. And the sensor of the comparative example 1 was immersed and the fluctuation | variation of the frequency was measured.
The measurement results are shown in FIGS. In the sensor of Example 1, it took 1 hour for the oscillation frequency to stabilize, whereas in the sensor of Comparative Example 1, it took 7 hours. In FIG. 4, the horizontal axis represents time, the vertical axis represents frequency (MHz), and the evaluation method determined that the oscillation frequency was stable when the frequency fluctuation was within 1 Hz per minute. Therefore, in FIG. 5, frequency fluctuations until actual stabilization are not displayed.
本発明は、水溶液及び有機溶媒を使用した溶液を使用した測定においても利用することができる。 The present invention can also be used for measurement using an aqueous solution and a solution using an organic solvent.
１ 基板（被覆部材）
２ 発振子
３ 圧電板
４ 電極
５ 電極
６ リード線
７ リード線
８ 接続端子
９ 接続端子
１０ 空間
１１ 凹部
１２ 平坦部
１３ 接続端子
１４ 接続端子
１５ 導電性接着剤
１６ 配線
１７ シール剤
３０ センサ
1 Substrate (coating material)
2 Oscillator 3 Piezoelectric plate 4 Electrode 5 Electrode 6 Lead wire 7 Lead wire 8 Connection terminal 9 Connection terminal 10 Space 11 Recess 12 Flat part 13 Connection terminal 14 Connection terminal 15 Conductive adhesive 16 Wiring 17 Sealant 30 Sensor
Claims (5)
A measuring apparatus comprising the sensor according to claim 1.
Priority Applications (2)
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|---|---|---|---|
| JP2005288151A JP2007101225A (en) | 2005-09-30 | 2005-09-30 | Sensor and measuring instrument equipped with it |
| PCT/JP2006/319495 WO2007037386A1 (en) | 2005-09-30 | 2006-09-29 | Sensor and device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005288151A JP2007101225A (en) | 2005-09-30 | 2005-09-30 | Sensor and measuring instrument equipped with it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2007101225A true JP2007101225A (en) | 2007-04-19 |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009162528A (en) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | Piezoelectric sensor and sensing apparatus |
| WO2009142045A1 (en) * | 2008-05-20 | 2009-11-26 | 日本電波工業株式会社 | Piezoelectric sensor and sensing device |
| JP2010185890A (en) * | 2010-06-02 | 2010-08-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric sensor and sensing device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09145583A (en) * | 1995-11-14 | 1997-06-06 | Dev Center For Biotechnol | Piezoelectric sensor chip of cartridge-form |
| JP2000258324A (en) * | 1999-03-04 | 2000-09-22 | Hokuto Denko Kk | Qcm sensor device |
| JP2005156289A (en) * | 2003-11-25 | 2005-06-16 | Ulvac Japan Ltd | Cell, oscillator, biosensor device equipped with these, and measuring method |
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2005
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09145583A (en) * | 1995-11-14 | 1997-06-06 | Dev Center For Biotechnol | Piezoelectric sensor chip of cartridge-form |
| JP2000258324A (en) * | 1999-03-04 | 2000-09-22 | Hokuto Denko Kk | Qcm sensor device |
| JP2005156289A (en) * | 2003-11-25 | 2005-06-16 | Ulvac Japan Ltd | Cell, oscillator, biosensor device equipped with these, and measuring method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009162528A (en) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | Piezoelectric sensor and sensing apparatus |
| WO2009142045A1 (en) * | 2008-05-20 | 2009-11-26 | 日本電波工業株式会社 | Piezoelectric sensor and sensing device |
| JP2010185890A (en) * | 2010-06-02 | 2010-08-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric sensor and sensing device |
| JP4685962B2 (en) * | 2010-06-02 | 2011-05-18 | 日本電波工業株式会社 | Piezoelectric sensor and sensing device |
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