JP2007051308A5 - - Google Patents
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- Publication number
- JP2007051308A5 JP2007051308A5 JP2005235130A JP2005235130A JP2007051308A5 JP 2007051308 A5 JP2007051308 A5 JP 2007051308A5 JP 2005235130 A JP2005235130 A JP 2005235130A JP 2005235130 A JP2005235130 A JP 2005235130A JP 2007051308 A5 JP2007051308 A5 JP 2007051308A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005235130A JP4939009B2 (ja) | 2005-08-15 | 2005-08-15 | ターゲット組立体及びこのターゲット組立体を備えたスパッタリング装置 |
TW095125489A TWI381062B (zh) | 2005-08-15 | 2006-07-12 | A target assembly, and a sputtering apparatus provided with the target assembly |
KR1020060076093A KR101330651B1 (ko) | 2005-08-15 | 2006-08-11 | 타깃 조립체 및 이 타깃 조립체를 구비한 스퍼터링 장치 |
CN2006101155202A CN1916232B (zh) | 2005-08-15 | 2006-08-15 | 靶组合体以及具有该靶组合体的溅射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005235130A JP4939009B2 (ja) | 2005-08-15 | 2005-08-15 | ターゲット組立体及びこのターゲット組立体を備えたスパッタリング装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007051308A JP2007051308A (ja) | 2007-03-01 |
JP2007051308A5 true JP2007051308A5 (es) | 2008-08-14 |
JP4939009B2 JP4939009B2 (ja) | 2012-05-23 |
Family
ID=37737295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005235130A Active JP4939009B2 (ja) | 2005-08-15 | 2005-08-15 | ターゲット組立体及びこのターゲット組立体を備えたスパッタリング装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4939009B2 (es) |
KR (1) | KR101330651B1 (es) |
CN (1) | CN1916232B (es) |
TW (1) | TWI381062B (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4599473B2 (ja) * | 2008-09-30 | 2010-12-15 | キヤノンアネルバ株式会社 | スパッタリング装置および薄膜形成方法 |
WO2012036079A1 (ja) * | 2010-09-15 | 2012-03-22 | シャープ株式会社 | 半導体装置の製造方法 |
JP5653257B2 (ja) * | 2011-03-07 | 2015-01-14 | 株式会社アルバック | スパッタリング装置及びスパッタリング方法 |
EP2748351A1 (en) * | 2011-08-25 | 2014-07-02 | Applied Materials, Inc. | Sputtering apparatus and method |
CN111719123A (zh) * | 2019-03-21 | 2020-09-29 | 广东太微加速器有限公司 | 组合式靶件 |
KR20210010741A (ko) * | 2019-07-18 | 2021-01-28 | 삼성디스플레이 주식회사 | 증착 장치 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5952957B2 (ja) * | 1980-06-16 | 1984-12-22 | 日電アネルバ株式会社 | マグネトロン型スパッタ装置のカソ−ド部 |
DE4242079A1 (de) * | 1992-12-14 | 1994-06-16 | Leybold Ag | Target für eine in einer evakuierbaren mit einem Prozeßgas flutbaren Prozeßkammer angeordneten Kathode |
JP2000239841A (ja) * | 1999-02-24 | 2000-09-05 | Ulvac Japan Ltd | スパッタリング方法と装置 |
JP3993721B2 (ja) * | 1999-06-09 | 2007-10-17 | 東ソー株式会社 | スパッタリングターゲット |
-
2005
- 2005-08-15 JP JP2005235130A patent/JP4939009B2/ja active Active
-
2006
- 2006-07-12 TW TW095125489A patent/TWI381062B/zh active
- 2006-08-11 KR KR1020060076093A patent/KR101330651B1/ko active IP Right Grant
- 2006-08-15 CN CN2006101155202A patent/CN1916232B/zh active Active
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