JP2007028139A - Manufacturing method of dielectric resonator and filter - Google Patents

Manufacturing method of dielectric resonator and filter Download PDF

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JP2007028139A
JP2007028139A JP2005206542A JP2005206542A JP2007028139A JP 2007028139 A JP2007028139 A JP 2007028139A JP 2005206542 A JP2005206542 A JP 2005206542A JP 2005206542 A JP2005206542 A JP 2005206542A JP 2007028139 A JP2007028139 A JP 2007028139A
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Mitsuo Sakakura
光男 坂倉
Masanori Yamada
昌紀 山田
Hiroyuki Kato
弘幸 加藤
Tomoki Midorikawa
智樹 緑川
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Toko Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric filter that obtains a high Q being the special feature of a coaxial type, attains downsizing and a low height by a lamination structure, and includes characteristics of a low loss and a high attenuation amount. <P>SOLUTION: The manufacturing method of the dielectric filter wherein two or more through-holes are formed in a dielectric ceramic includes: laminating and sticking ceramic dielectric green sheets with pressure; forming a plurality of holes penetrated through the laminated sheets at a prescribed interval; cutting off the laminated sheets in a way of including at least two through-holes and dividing them into a plurality of division elements; baking the elements; and forming an inner conductor in the through-holes and forming an outer conductor, a short-circuit conductor and a terminal electrode on the surface of each element. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は同軸型の誘電体共振器およびフィルタの製造方法に係るもので、特に、積層チップフィルタの製造方法によって誘電体共振器とそれらを組み合わせたフィルタを構成する方法に関するものである。   The present invention relates to a coaxial dielectric resonator and a filter manufacturing method, and more particularly, to a method of configuring a dielectric resonator and a filter combining them by a multilayer chip filter manufacturing method.

同軸型ブロックタイプの誘電体フィルタは、誘電体ブロックに複数の平行な貫通孔が形成されて、貫通孔の表面に内導体、ブロックの表面に外導体、端面の一方に短絡導体が形成される。このタイプの誘電体フィルタは、その製造プロセスが金型成型、溝加工や貼り合わせの工程を必要とするので、小型化や低背化が困難であった。これまでのところ、高さの寸法限界は1.2mmで、最近の要求の主流となっている1.0mmMAX、0.6mmMAXといった仕様に対応することが難しくなっている。また、高いアスペクト比の誘電体ブロックや、中心(内)導体を形成するための細い孔の成形も困難になっているし、細い孔への導体膜形成はめっきやペースト注入によって行うが、サイズが小さくなるにしたがって困難となる。   A coaxial block type dielectric filter has a plurality of parallel through holes formed in a dielectric block, an inner conductor on the surface of the through hole, an outer conductor on the surface of the block, and a short-circuit conductor on one of the end faces. . Since this type of dielectric filter requires a molding process, a groove process, and a bonding process, it is difficult to reduce the size and height of the dielectric filter. So far, the height dimension limit is 1.2mm, making it difficult to meet specifications such as 1.0mmMAX and 0.6mmMAX, which are the mainstream of recent requirements. In addition, it is difficult to form a high-aspect-ratio dielectric block and a narrow hole to form the center (inner) conductor. Conductor film formation in the thin hole is performed by plating or paste injection. It becomes difficult as becomes smaller.

集中定数で構成される積層LCフィルタもあるが、そのインダクタンス部分やストリップラインの部分はリボン状の構造となるので、電界がそのエッジに集中する。このため、同軸方の電極構造を有するブロックタイプの誘電体フィルタよりもQが小さくなってしまい、それによってフィルタの特性も下がることが避けられない。
特開2003−60406号公報 特開2003−8304号公報
There is a laminated LC filter composed of lumped constants, but the inductance part and strip line part have a ribbon-like structure, so that the electric field concentrates on the edge. For this reason, the Q is smaller than that of a block type dielectric filter having a coaxial electrode structure, and it is inevitable that the characteristics of the filter are lowered.
JP 2003-60406 A JP 2003-8304 A

本発明は、同軸型の特長である高いQを得るとともに、積層構造による小型、低背位化を実現するとともに、低損失で高減衰量の特性を有する誘電体フィルタを提供するものである。   The present invention provides a dielectric filter having a high Q which is a feature of the coaxial type, realizing a small size and a low profile by a laminated structure, and having a low loss and a high attenuation characteristic.

本発明は、シート積層工法を利用することによって、上記の課題を解決するものである。すなわち、誘電体セラミック内に2つ以上の貫通孔を具えた誘電体フィルタの製造方法において、セラミック誘電体グリーンシートを積層して圧着し、積層した当該シートを貫通する複数の孔を所定の間隔で形成し、それらの貫通孔を少なくとも2つ含むように積層した当該シートを切断して複数の素子に分割し、それらの素子を焼成し、貫通孔に内導体を、素子の表面に外導体、短絡導体および端子電極を形成することに特徴を有するものである。   This invention solves said subject by utilizing a sheet | seat lamination method. That is, in a method for manufacturing a dielectric filter having two or more through holes in a dielectric ceramic, the ceramic dielectric green sheets are laminated and pressure-bonded, and a plurality of holes penetrating the laminated sheets are arranged at a predetermined interval. The sheet formed so as to include at least two through holes is cut and divided into a plurality of elements, the elements are baked, the inner conductor is formed in the through hole, and the outer conductor is formed on the surface of the element. The short-circuit conductor and the terminal electrode are formed.

本発明によれば、誘電体同軸フィルタに積層構造を採用することにより、細孔の柱状電極を形成できるので、高アスペクト比の誘電体ブロックを得ることができるようになる。その結果としてモノブロックタイプの誘電体フィルタの低背化が可能となった。従来1.2mmが限界とされていたものを、0.6mmまで下げることができた。   According to the present invention, by adopting a laminated structure in the dielectric coaxial filter, a columnar electrode with a fine pore can be formed, so that a high aspect ratio dielectric block can be obtained. As a result, it is possible to reduce the height of the monoblock type dielectric filter. The previous limit of 1.2 mm could be reduced to 0.6 mm.

本発明のプロセスを示すと次の順序となる。
(1)セラミック誘電体グリーンシートの積層
(2)積層体への貫通孔の形成
(3)チップへの分割
(4)焼成
(5)電極塗布、焼付
なお、(5)の電極の塗布を(3)のチップへの分割後に行って、焼成と焼付を同時に行うこともできる。また、セラミック誘電体グリーンシートにあらかじめ孔を形成しておき、位置合わせをしながら積層し、その後に貫通孔の高精度の加工を行うようにしてもよい。
The process of the present invention is shown in the following order.
(1) Lamination of ceramic dielectric green sheets (2) Formation of through holes in the laminate (3) Division into chips (4) Firing (5) Electrode application and baking (5) Electrode application in (5) ( It is also possible to perform baking and baking at the same time after the division into 3) chips. Alternatively, holes may be formed in the ceramic dielectric green sheet in advance, the layers may be stacked while being aligned, and then the through holes may be processed with high accuracy.

以下、図面を参照して、本発明の実施例について説明する。図1に示した例は、2素子のインターデジタル型の誘電体フィルタを製造するものである。セラミック誘電体グリーンシートを積層して所定の厚みとする。この厚みは、セラミック誘電体の誘電率と焼成後の収縮した長さで決まる誘電体フィルタの共振周波数から逆算して所定の枚数を重ねて圧着する。あらかじめレーザ加工等によってシートに孔を形成しておいてもよく、その場合にはその孔をガイドに差すなどして位置合わせをしながら積層する。(図1a)   Embodiments of the present invention will be described below with reference to the drawings. The example shown in FIG. 1 is for producing a two-element interdigital dielectric filter. A ceramic dielectric green sheet is laminated to a predetermined thickness. The thickness is back-calculated from the resonance frequency of the dielectric filter determined by the dielectric constant of the ceramic dielectric and the contracted length after firing, and a predetermined number of sheets are stacked and bonded together. Holes may be formed in the sheet in advance by laser processing or the like. In that case, the holes are stacked while being aligned by inserting the holes into a guide. (Figure 1a)

シートが積層されて仮圧着された誘電体に、積層方向(すなわちシート表面に垂直な方向)に所定の間隔で穿孔して貫通孔を形成する。この工程は、高速ドリル、パンチ等によって行う。前記のようにあらかじめシートに孔を形成しておいた場合には、その孔の直径よりも僅かに広い孔を形成するようにするとよく、孔の形成時間を短くすることができるし、精度の維持も容易となる。(図1b)   A through-hole is formed by perforating a dielectric in which sheets are laminated and pre-press-bonded at a predetermined interval in the lamination direction (that is, a direction perpendicular to the sheet surface). This process is performed by a high-speed drill, a punch, or the like. When holes are formed in the sheet in advance as described above, it is preferable to form holes slightly wider than the diameter of the holes, and the time for forming holes can be shortened. Maintenance is also easy. (Fig. 1b)

ここで、貫通孔の表面に最終的に誘電体フィルタの内導体となる導体膜を形成しておくことができる。この導体膜は、誘電体ブロックの焼成後に形成してもよいが、分割前に一括して多数の貫通孔に導体膜が形成できるので、製造工数の面では有利となる。その後に素子に切断して誘電体ブロックのチップを得る。(図1c、図1d)   Here, a conductor film that finally becomes the inner conductor of the dielectric filter can be formed on the surface of the through hole. This conductor film may be formed after firing the dielectric block. However, since the conductor film can be formed in a large number of through holes before division, it is advantageous in terms of manufacturing man-hours. Thereafter, the device is cut to obtain a dielectric block chip. (Fig. 1c, Fig. 1d)

このチップの状態で焼成するが、焼成の前に誘電体ブロックの表面および端面の所定の位置に導体膜を形成しておくとよい。表面に形成される導体膜が外導体となり、端面の一部に形成される導体膜が短絡導体となり、外導体の一部を分離して内導体と対向する導体膜が結合容量を得る端子電極となる。セラミック誘電体の焼成と同時に導体膜の焼付も行われて、図2に示した誘電体フィルタが得られる。   Although firing is performed in the state of this chip, a conductor film may be formed at predetermined positions on the surface and end face of the dielectric block before firing. A terminal electrode in which a conductor film formed on the surface serves as an outer conductor, a conductor film formed on a part of the end surface serves as a short-circuit conductor, and a conductor film that separates a part of the outer conductor and faces the inner conductor obtains a coupling capacity It becomes. The conductor film is baked simultaneously with the firing of the ceramic dielectric, and the dielectric filter shown in FIG. 2 is obtained.

本発明においてはセラミック誘電体がグリーンシートの状態で穿孔することが必要であるが、導体膜の形成順序等は任意に変えることができる。また、導体膜の信頼性を高めるとともに高いQを維持するためにめっきを施す工程を付加してもよい。   In the present invention, it is necessary to perforate the ceramic dielectric in the form of a green sheet, but the order of forming the conductor film can be arbitrarily changed. In addition, a plating process may be added to increase the reliability of the conductor film and maintain a high Q.

上記のような製造方法を利用して図3に示すサイズの素子を試作した。すなわち、長さ2.8mm、幅1.6mm、高さ0.6mmの誘電体ブロックに直径0.2mmの貫通孔を形成して図2と同様な電極を形成した2素子のフィルタである。その特性を図4に示す。中心周波数が5.874GHz、ピークから0.8dB減衰する帯域幅が250MHz、5.8−5.85GHzの挿入損失が2.2dBとなっていた。同じ体積の集中定数型の積層フィルタに比較して共振器のQを高くできるので、シャープな減衰特性が得られる。   A device having the size shown in FIG. That is, this is a two-element filter in which a through hole having a diameter of 0.2 mm is formed in a dielectric block having a length of 2.8 mm, a width of 1.6 mm, and a height of 0.6 mm to form an electrode similar to that shown in FIG. The characteristics are shown in FIG. The center frequency was 5.874 GHz, the bandwidth that attenuated 0.8 dB from the peak was 250 MHz, and the insertion loss from 5.8 to 5.85 GHz was 2.2 dB. Since the resonator Q can be made higher than that of a lumped constant type multilayer filter having the same volume, sharp attenuation characteristics can be obtained.

上記の例は2素子のインターデジタル構造であるが、コムラインでもよいし、素子数は3素子以上任意の数とすることができる。もちろん、デユプレクサや帯域阻止フィルタに利用することもできるし、1素子として共振子やトラップとすることもできる。   Although the above example has a two-element interdigital structure, a comb line may be used, and the number of elements may be any number of three or more. Of course, it can be used for a duplexer or a band rejection filter, and a single element can be a resonator or a trap.

本発明は、移動体通信機器の端末用のフィルタなど、小型、薄型、軽量の要求が強い分野のフィルタの製造に適したものである。   The present invention is suitable for manufacturing filters in fields where there is a strong demand for small size, thinness, and light weight, such as filters for terminals of mobile communication devices.

本発明の実施例を示す斜視図The perspective view which shows the Example of this invention 本発明により得られる誘電体フィルタの斜視図The perspective view of the dielectric filter obtained by this invention 本発明により得られる誘電体フィルタの斜視図The perspective view of the dielectric filter obtained by this invention 本発明により得られる誘電体フィルタの特性の説明図Explanatory drawing of characteristics of dielectric filter obtained by the present invention

符号の説明Explanation of symbols

11:セラミック誘電体グリーンシート
13:貫通孔
15:入出力電極(端子)
17:アース電極(外導体、短絡導体)
11: Ceramic dielectric green sheet
13: Through hole
15: Input / output electrode (terminal)
17: Earth electrode (outer conductor, short-circuit conductor)

Claims (6)

誘電体セラミック内に2つ以上の貫通孔を具えた誘電体フィルタの製造方法において、
セラミック誘電体グリーンシートを積層して圧着し、
積層した当該シートを貫通する複数の孔を所定の間隔で形成し、
それらの貫通孔を少なくとも2つ含むように積層した当該シートを切断して複数の素子に分割し、
それらの素子を焼成し、
貫通孔に内導体を、素子の表面に外導体、短絡導体および端子電極を形成することを特徴とする誘電体フィルタの製造方法。
In a method of manufacturing a dielectric filter having two or more through holes in a dielectric ceramic,
Laminate ceramic dielectric green sheets and crimp them.
Forming a plurality of holes penetrating the laminated sheets at a predetermined interval;
The sheet laminated so as to include at least two through-holes is cut and divided into a plurality of elements,
Firing those elements,
An inner conductor is formed in the through hole, and an outer conductor, a short-circuit conductor, and a terminal electrode are formed on the surface of the element.
誘電体セラミック内に貫通孔を具えた誘電体共振器の製造方法において、
セラミック誘電体グリーンシートを積層して圧着し、
積層した当該シートを貫通する複数の孔を所定の間隔で形成し、
それらの貫通孔を少なくとも1つ含むように積層した当該シートを切断して複数の素子に分割し、
それらの素子を焼成し、
貫通孔に内導体を、素子の表面に外導体、短絡導体および端子電極を形成することを特徴とする誘電体共振器の製造方法。
In a method for manufacturing a dielectric resonator having a through hole in a dielectric ceramic,
Laminate ceramic dielectric green sheets and crimp them.
Forming a plurality of holes penetrating the laminated sheets at a predetermined interval;
The sheet laminated to include at least one of those through holes is cut and divided into a plurality of elements,
Firing those elements,
An inner conductor is formed in a through-hole, and an outer conductor, a short-circuit conductor, and a terminal electrode are formed on the surface of the element.
少なくとも内導体の焼付けを素子の焼成と同時に焼付けする請求項1または請求項2記載の製造方法。   3. The manufacturing method according to claim 1, wherein at least the inner conductor is baked simultaneously with the baking of the element. 誘電体セラミック内に2つ以上の貫通孔を具えた誘電体フィルタの製造方法において、
セラミック誘電体グリーンシートに所定の配置で複数の貫通孔を形成し、
そのセラミック誘電体グリーンシートを孔の位置を合わせて積層して圧着し、
それらの貫通孔を少なくとも2つ含むように積層した当該シートを切断して複数の素子に分割し、
それらの素子を焼成し、
貫通孔に内導体を、素子の表面に外導体、短絡導体および端子電極を形成することを特徴とする誘電体フィルタの製造方法。
In a method of manufacturing a dielectric filter having two or more through holes in a dielectric ceramic,
A plurality of through holes are formed in a predetermined arrangement in the ceramic dielectric green sheet,
Laminate the ceramic dielectric green sheets with the holes aligned, and press
The sheet laminated so as to include at least two through-holes is cut and divided into a plurality of elements,
Firing those elements,
An inner conductor is formed in the through hole, and an outer conductor, a short-circuit conductor, and a terminal electrode are formed on the surface of the element.
誘電体セラミック内に貫通孔を具えた誘電体共振器の製造方法において、
セラミック誘電体グリーンシートに所定の配置で複数の貫通孔を形成し、
そのセラミック誘電体グリーンシートを孔の位置を合わせて積層して圧着し、
それらの貫通孔を少なくとも1つ含むように積層した当該シートを切断して複数の素子に分割し、
それらの素子を焼成し、
貫通孔に内導体を、素子の表面に外導体、短絡導体および端子電極を形成することを特徴とする誘電体共振器の製造方法。
In a method for manufacturing a dielectric resonator having a through hole in a dielectric ceramic,
A plurality of through holes are formed in a predetermined arrangement in the ceramic dielectric green sheet,
Laminate the ceramic dielectric green sheets with the holes aligned, and press
The sheet laminated to include at least one of those through holes is cut and divided into a plurality of elements,
Firing those elements,
An inner conductor is formed in a through-hole, and an outer conductor, a short-circuit conductor, and a terminal electrode are formed on the surface of the element.
シートを積層した後に孔を成形して貫通孔を形成する請求項4又は請求項5記載の製造方法。   6. The method according to claim 4, wherein the through holes are formed by forming holes after laminating the sheets.
JP2005206542A 2005-07-15 2005-07-15 Manufacturing method of dielectric resonator and filter Pending JP2007028139A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103972620A (en) * 2013-02-05 2014-08-06 成都摩宝网络科技有限公司 Metal cavity microwave band-pass filter for audio near field communication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103972620A (en) * 2013-02-05 2014-08-06 成都摩宝网络科技有限公司 Metal cavity microwave band-pass filter for audio near field communication

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