JP2007000965A - Grinding wheel and grinding device - Google Patents

Grinding wheel and grinding device Download PDF

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JP2007000965A
JP2007000965A JP2005183728A JP2005183728A JP2007000965A JP 2007000965 A JP2007000965 A JP 2007000965A JP 2005183728 A JP2005183728 A JP 2005183728A JP 2005183728 A JP2005183728 A JP 2005183728A JP 2007000965 A JP2007000965 A JP 2007000965A
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grinding
grinding wheel
base
filter
grinding fluid
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Masami Masuko
正美 益子
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Nikon Corp
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Nikon Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To significantly reduce solid matters in a grinding fluid used for machining compared with the conventional grinding wheel used for grinding glass and metals or the like and a grinding device provided with the grinding wheel. <P>SOLUTION: A grinding fluid channel for allowing the grinding fluid to flow out is formed to a base 13 having a part where abrasive grains are fixed. A filtration means 15 for removing the solid matters mixed into the grinding fluid is provided to the grinding fluid channel in the base 13. The filtration means 15 is arranged attachably/detachably to/from the base 13. The filtration means 15 is composed such that a plurality of filters 21, 23 are arranged in the grinding fluid channel at an interval and an opening size of the downstream side filter 21 is set smaller than that of the upstream side filter 23. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ガラス,金属等の研削加工に使用される研削砥石およびこの研削砥石を備えた研削装置に関する。   The present invention relates to a grinding wheel used for grinding of glass, metal and the like, and a grinding apparatus provided with the grinding wheel.

従来、ガラス,金属等の研削加工では、研削砥石と被加工物との間に研削液を供給しながら加工することが行われている。このように研削液を供給することにより、加工により生じる摩擦熱を除去することができる。また、被加工物の削り屑や脱落した砥粒等の固形物を速やかに排出することができる。
一方、研削液は、循環使用するのが経済的,環境的にも有効である。従って、従来、加工に供された研削液を遠心分離器等に導き、研削液に混入した削り屑や砥粒等の固形物を除去した後、ポンプにより循環することが行われている。
特開2001−277113公報 実用新案登録第3093941号公報
Conventionally, in grinding processing of glass, metal or the like, processing is performed while supplying a grinding liquid between a grinding wheel and a workpiece. By supplying the grinding fluid in this manner, frictional heat generated by processing can be removed. In addition, it is possible to quickly discharge solids such as shavings of the workpiece and dropped abrasive grains.
On the other hand, it is economically and environmentally effective to use the grinding fluid in a circulating manner. Therefore, conventionally, the grinding fluid used for processing is guided to a centrifugal separator or the like, and solids such as shavings and abrasive grains mixed in the grinding fluid are removed and then circulated by a pump.
JP 2001-277113 A Utility Model Registration No. 3093941

しかしながら、研削液に混入した砥粒とは異なる固形物は遠心分離器等を使用しても完全に除去することが困難であり、被加工物によってはこの固形物が表面に衝突した際に深い傷となって不良品となったり、不良品には至らなくても、その欠陥を除去するために、後工程での加工が長時間化するという問題があった。
本発明は、かかる従来の問題を解決するためになされたもので、加工に供される研削液中の砥粒とは異なる固形物を従来より大幅に低減することができる研削砥石および研削装置を提供することを目的とする。
However, it is difficult to completely remove the solid matter different from the abrasive particles mixed in the grinding fluid even if a centrifuge is used. Depending on the work piece, the solid matter is deep when it collides with the surface. Even if it becomes a defective product due to scratches or does not lead to a defective product, there is a problem that processing in a subsequent process takes a long time to remove the defect.
The present invention has been made in order to solve such a conventional problem, and provides a grinding wheel and a grinding apparatus capable of significantly reducing solids different from abrasive grains in a grinding liquid used for processing than before. The purpose is to provide.

第1の発明の研削砥石は、砥粒が固定された部分を有する基台に、研削液を流出する研削液通路を形成するとともに、前記基台中の前記研削液通路に前記研削液中に混入した固形物を除去する濾過手段を設けてなることを特徴とする。
第2の発明の研削砥石は、第1の発明の研削砥石において、前記濾過手段は、前記基台に着脱可能に配置されていることを特徴とする。
The grinding wheel according to the first aspect of the present invention forms a grinding fluid passage for flowing out the grinding fluid in a base having a portion to which abrasive grains are fixed, and is mixed in the grinding fluid in the grinding fluid passage in the base. It is characterized by providing a filtering means for removing the solid matter.
The grinding wheel of the second invention is the grinding wheel of the first invention, wherein the filtering means is detachably disposed on the base.

第3の発明の研削砥石は、第1の発明または第2の発明の研削砥石において、前記濾過手段は、前記研削液通路に複数のフィルタを間隔を置いて配置してなり、下流側のフィルタの目開き寸法を上流側のフィルタの目開き寸法より小さくしてなることを特徴とする。 第4の発明の研削装置は、第1の発明ないし第3の発明のいずれか1の研削砥石を有することを特徴とする。   A grinding wheel of a third invention is the grinding wheel of the first invention or the second invention, wherein the filtering means has a plurality of filters arranged at intervals in the grinding fluid passage, and a downstream filter. The aperture size of the filter is smaller than the aperture size of the upstream filter. A grinding apparatus according to a fourth aspect of the invention includes the grinding wheel according to any one of the first to third aspects of the invention.

本発明の研削砥石では、基台の研削液通路に、研削液中に混入した砥粒とは異なる固形物を除去する濾過手段を設けたので、加工に供される研削液中の砥粒とは異なる固形物を従来より大幅に低減することができる。
本発明の研削装置では、本発明の研削砥石を用いているため、研削液中の固形物に起因する被加工物への傷等の発生を効果的に抑制することができる。
In the grinding wheel of the present invention, since the filtering means for removing the solid matter different from the abrasive grains mixed in the grinding liquid is provided in the grinding liquid passage of the base, the abrasive grains in the grinding liquid to be processed and Can significantly reduce the different solids than before.
In the grinding device of the present invention, since the grinding wheel of the present invention is used, it is possible to effectively suppress the occurrence of scratches and the like on the workpiece due to the solid material in the grinding fluid.

以下、本発明の実施形態を図面を用いて詳細に説明する。
図1および図2は、本発明の研削砥石の一実施形態を示している。
この研削砥石11は、台皿となる基台13を有している。基台13は円板状をしておりアルミニウム等の金属により形成されている。基台13は、例えば、外径が270mm、厚さが20mmとされている。基台13の中心には、貫通穴13aが形成され、この貫通穴13aに濾過手段15が配置されている。貫通穴13aの直径は、例えば16mmとされている。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 and 2 show an embodiment of the grinding wheel of the present invention.
The grinding wheel 11 has a base 13 serving as a base plate. The base 13 has a disk shape and is made of a metal such as aluminum. For example, the base 13 has an outer diameter of 270 mm and a thickness of 20 mm. A through hole 13a is formed at the center of the base 13, and a filtering means 15 is disposed in the through hole 13a. The diameter of the through hole 13a is, for example, 16 mm.

基台13の上面13b(研削面)には、複数の砥石部材17が固定されている。砥石部材17は、貫通穴13aを中心にして同心状に、所定角度をおいて配置されている。砥石部材17は、レジンボンドやNi−Pメッキ等の結合材により多数の砥粒を保持した所謂ペレット型砥石とされている。砥石部材17は、例えば外径が10mmの円柱状をしており、基台13の上面13bに接着剤等により貼り付けられている。   A plurality of grindstone members 17 are fixed to the upper surface 13 b (grinding surface) of the base 13. The grindstone member 17 is disposed concentrically around the through hole 13a at a predetermined angle. The grindstone member 17 is a so-called pellet grindstone in which a large number of abrasive grains are held by a binder such as resin bond or Ni-P plating. The grindstone member 17 has a cylindrical shape with an outer diameter of 10 mm, for example, and is attached to the upper surface 13b of the base 13 with an adhesive or the like.

基台13の下面13cの中心には、軸取り付け部19が配置されている。この軸取り付け部19の中心には、例えば直径13mmの貫通穴19aが形成されている。軸取り付け部19は、基台13の下面13cにろう付け等により固定されている。なお、軸取り付け部19を基台13に一体形成しても良い。
図3は、上述した濾過手段15が配置される基台13の中央部の詳細を示している。
A shaft mounting portion 19 is disposed at the center of the lower surface 13 c of the base 13. A through hole 19a having a diameter of 13 mm, for example, is formed at the center of the shaft attachment portion 19. The shaft mounting portion 19 is fixed to the lower surface 13c of the base 13 by brazing or the like. Note that the shaft attachment portion 19 may be integrally formed with the base 13.
FIG. 3 shows details of the central portion of the base 13 on which the above-described filtering means 15 is arranged.

濾過手段15は、基台13の貫通穴13aに収容される第1のフィルタ部材21および第2のフィルタ部材23を有している。第1のフィルタ部材21の下方に第2のフィルタ部材23が配置されている。
第1のフィルタ部材21は、フィルタ25と、フィルタ25を保持する保持部材27とを有している。保持部材27は、ステンレスからなり円環状に形成されている。保持部材27は、例えば厚さが6mmで、外径が15mmとされている。また、穴部27aの直径が、例えば10mmとされている。
The filtering means 15 includes a first filter member 21 and a second filter member 23 that are accommodated in the through hole 13 a of the base 13. A second filter member 23 is disposed below the first filter member 21.
The first filter member 21 includes a filter 25 and a holding member 27 that holds the filter 25. The holding member 27 is made of stainless steel and has an annular shape. For example, the holding member 27 has a thickness of 6 mm and an outer diameter of 15 mm. The diameter of the hole 27a is, for example, 10 mm.

保持部材27の下面には凹部27bが形成され、この凹部27bにフィルタ25が配置されている。フィルタ25は、円形状をしており、保持部材27に溶接(不図示)等により接合されている。フィルタ25は、ステンレス線を網状に形成してなり、目開きサイズが例えば32μmとされている。このフィルタ25には、JIS−Z8801に規定される試験用ふるいで使用されるフィルタを用いるのが望ましい。このようなフィルタを用いることで、フィルタ25の目開きサイズの精度を容易,確実に確保することができる。   A recess 27b is formed on the lower surface of the holding member 27, and the filter 25 is disposed in the recess 27b. The filter 25 has a circular shape and is joined to the holding member 27 by welding (not shown) or the like. The filter 25 is formed by forming a stainless steel wire in a net shape and has an opening size of, for example, 32 μm. As the filter 25, it is desirable to use a filter used in a test sieve defined in JIS-Z8801. By using such a filter, the accuracy of the opening size of the filter 25 can be easily and reliably ensured.

第2のフィルタ部材23は、フィルタ29と、フィルタ29を保持する保持部材31とを有している。この第2のフィルタ部材23は、フィルタ29の目開きサイズが100μmであることを除いて第1のフィルタ部材21と同様である。従って、詳細な説明を省略する。
第1のフィルタ部材21の保持部材27と、第2のフィルタ部材23の保持部材31との間には、ゴム等のOリングからなるシール部材33が配置されている。また、第2のフィルタ部材23の保持部材31と、軸取り付け部19との間には、ゴム等のOリングからなるシール部材35が配置されている。
The second filter member 23 includes a filter 29 and a holding member 31 that holds the filter 29. The second filter member 23 is the same as the first filter member 21 except that the opening size of the filter 29 is 100 μm. Therefore, detailed description is omitted.
Between the holding member 27 of the first filter member 21 and the holding member 31 of the second filter member 23, a seal member 33 made of an O-ring such as rubber is disposed. Further, a seal member 35 made of an O-ring such as rubber is disposed between the holding member 31 of the second filter member 23 and the shaft mounting portion 19.

基台13の貫通穴13aの上部には、固定部材37が配置されている。この固定部材37は、例えばステンレスからなり、円環状に形成されている。固定部材37の外周には、雄螺子部37aが形成されている。この雄螺子部37aは、基台13の貫通穴13aの内周に形成される雌螺子部13dに螺合されている。固定部材37の上面の穴部37bの外側には、一対の係止溝37cが対向して形成されている。この係止溝37cに硬貨等を係止することにより固定部材37を回動することが容易に可能になる。   A fixing member 37 is disposed above the through hole 13 a of the base 13. The fixing member 37 is made of stainless steel, for example, and is formed in an annular shape. A male screw portion 37 a is formed on the outer periphery of the fixing member 37. The male screw portion 37 a is screwed into a female screw portion 13 d formed on the inner periphery of the through hole 13 a of the base 13. A pair of locking grooves 37 c are formed on the outer side of the hole 37 b on the upper surface of the fixing member 37 so as to face each other. By locking a coin or the like in the locking groove 37c, the fixing member 37 can be easily rotated.

上述した研削砥石11は、以下述べるようにして製造される。
先ず、基台13を洗浄し乾燥した後、基台13の上面(表面側)13bに接着剤(不図示)を塗布し、砥石部材17を貼り付ける。接着剤の硬化後に、基台13の貫通穴13a内に、軸取り付け部19と反対側から、シール部材35、第2のフィルタ部材23、シール部材33および第1のフィルタ部材21を順次収容する。次に、固定部材37の雄螺子部37aを貫通穴13aの雌螺子部13dに螺合し、固定部材37を所定の力で回動しなくなるまで締め付ける。これにより、第1のフィルタ部材21および第2のフィルタ部材23がシール部材33,35を介して貫通穴13a内に保持される。
The grinding wheel 11 described above is manufactured as described below.
First, after the base 13 is washed and dried, an adhesive (not shown) is applied to the upper surface (surface side) 13b of the base 13, and the grindstone member 17 is attached. After the adhesive is cured, the seal member 35, the second filter member 23, the seal member 33, and the first filter member 21 are sequentially accommodated in the through hole 13a of the base 13 from the side opposite to the shaft attachment portion 19. . Next, the male screw portion 37a of the fixing member 37 is screwed into the female screw portion 13d of the through hole 13a, and the fixing member 37 is tightened until it does not rotate with a predetermined force. Accordingly, the first filter member 21 and the second filter member 23 are held in the through hole 13a via the seal members 33 and 35.

図4は、上述した研削砥石11を用いた研削装置の要部を概略的に示している。
この研削装置では、研削砥石11の基台13の下部に配置される軸取り付け部19が、取付部材41を介して砥石軸43に固定されている。取付部材41および砥石軸43には、研削液を流通させる研削液通路41a,43aが形成されている。
一方、研削砥石11の上方には、ワーク軸45が配置されている。ワーク軸45の下端には、例えばガラスからなる被加工物47が、取付部材49を介して固定されている。ワーク軸45は図示しない駆動機構を介して、砥石軸43の回転に伴い楕円運動あるいは左右に往復運動される。
FIG. 4 schematically shows a main part of a grinding apparatus using the above-described grinding wheel 11.
In this grinding apparatus, the shaft mounting portion 19 disposed at the lower portion of the base 13 of the grinding wheel 11 is fixed to the grinding wheel shaft 43 via the mounting member 41. The mounting member 41 and the grindstone shaft 43 are formed with grinding fluid passages 41a and 43a for circulating the grinding fluid.
On the other hand, a work shaft 45 is disposed above the grinding wheel 11. A workpiece 47 made of glass, for example, is fixed to the lower end of the work shaft 45 via an attachment member 49. The work shaft 45 is elliptically moved or reciprocated left and right with the rotation of the grindstone shaft 43 through a drive mechanism (not shown).

研削砥石11の下方には、研削砥石11から流出した研削液を受けるテーブル51が配置されている。テーブル51には、排出口53が形成されている。この排出口53は、循環管路55を介して、砥石軸43の研削液通路43aに接続されている。循環管路55には、上流側から順に、タンク57、ポンプ59、遠心分離器61およびポンプ63が配置されている。   A table 51 that receives the grinding fluid that has flowed out of the grinding wheel 11 is disposed below the grinding wheel 11. A discharge port 53 is formed in the table 51. The discharge port 53 is connected to the grinding fluid passage 43 a of the grindstone shaft 43 through the circulation pipe 55. In the circulation line 55, a tank 57, a pump 59, a centrifuge 61, and a pump 63 are arranged in this order from the upstream side.

上述した研削装置では、砥石軸43を回転して、ワーク軸45を楕円運動あるいは左右に往復運動しながらワーク軸45を下方に移動し、被加工物47を研削砥石11の砥石部材17の上面に当接することにより被加工物47の研削が行われる。そして、この研削時には、基台13に配置される濾過手段15を介して研削液が被加工物47と砥石部材17との間に供給される。   In the above-described grinding apparatus, the grindstone shaft 43 is rotated to move the work shaft 45 downward while moving the work shaft 45 elliptically or reciprocating left and right, and the workpiece 47 is moved to the upper surface of the grindstone member 17 of the grinding wheel 11. The workpiece 47 is ground by coming into contact with. At the time of grinding, a grinding fluid is supplied between the workpiece 47 and the grindstone member 17 through the filtering means 15 disposed on the base 13.

被加工物47と砥石部材17との間に供給された研削液は、テーブル51の排出口53を通りタンク57内に集められる。タンク57内で大きな固形物の大半が沈殿し、そのうわずみがポンプ59により吸い出される。タンク57内の研削液はポンプ59により遠心分離器61に導かれ、この遠心分離器61により、被加工物47の削り屑や脱落した砥粒等の固形物が殆ど取り除かれる。固形物を殆ど取り除かれた研削液は、ポンプ63により砥石軸43の研削液通路43aに循環される。研削液通路43aに循環された研削液は、取付部材41の研削液通路41aを通り研削砥石11の軸取り付け部19を介して濾過手段15に導かれる。   The grinding fluid supplied between the workpiece 47 and the grindstone member 17 passes through the discharge port 53 of the table 51 and is collected in the tank 57. Most of the large solids settle in the tank 57 and the stagnation is sucked out by the pump 59. The grinding liquid in the tank 57 is guided to the centrifugal separator 61 by the pump 59, and the centrifugal separator 61 removes almost all solid matter such as shavings of the workpiece 47 and dropped abrasive grains. The grinding liquid from which the solid matter is almost removed is circulated by the pump 63 to the grinding liquid passage 43 a of the grindstone shaft 43. The grinding fluid circulated through the grinding fluid passage 43 a passes through the grinding fluid passage 41 a of the attachment member 41 and is guided to the filtering means 15 through the shaft attachment portion 19 of the grinding wheel 11.

濾過手段15では、先ず、第2のフィルタ部材23のフィルタ29により、例えば100μm以上の粒径の固形物が除去され、次に、第1のフィルタ部材21のフィルタ25により、例えば32μm以上の粒径の固形物が除去される。そして、32μm以上の粒径の固形物が略完全に除去された研削液が、研削砥石11の中心部から被加工物47と砥石部材17との間に供給される。   In the filtering means 15, first, solids having a particle size of, for example, 100 μm or more are removed by the filter 29 of the second filter member 23, and then, particles of, for example, 32 μm or more are removed by the filter 25 of the first filter member 21. Diameter solids are removed. Then, the grinding fluid from which the solid matter having a particle diameter of 32 μm or more is substantially completely removed is supplied between the workpiece 47 and the grindstone member 17 from the center of the grinding stone 11.

上述した研削砥石11では、基台13に形成される研削液通路となる貫通穴13aに、研削液中に混入した砥粒以外の固形物を除去する濾過手段15を設けたので、加工に供される研削液中の固形物を従来より大幅に低減することができる。従って、研削加工時に被加工物47の表面に固形物が衝突し、被加工物47に傷が付くことを有効に低減することができる。   In the grinding wheel 11 described above, the filtering means 15 for removing solids other than the abrasive grains mixed in the grinding fluid is provided in the through hole 13a serving as the grinding fluid passage formed in the base 13, so that it is used for processing. It is possible to significantly reduce the solids in the grinding fluid that is used. Accordingly, it is possible to effectively reduce the solid object colliding with the surface of the workpiece 47 during grinding and scratching the workpiece 47.

そして、研削砥石11に濾過手段15を設けたので、研削砥石11の砥粒の粒度に対応して、フィルタ25の目開きサイズを設定することにより、砥粒以外の固形物を有効に除去することができる。例えば、研削砥石11が仕上げ加工用で砥粒が細粒の場合には、その粒径に合わせてフィルタ25の目開きサイズを小さくすることにより、より小さな固形物を研削液中から除去することが可能になる。従って、仕上げ加工中の被加工物47の表面に大きな傷が付くおそれを低減することができる。   And since the filtration means 15 was provided in the grinding wheel 11, the solids other than an abrasive grain are removed effectively by setting the opening size of the filter 25 according to the particle size of the abrasive grain of the grinding wheel 11. be able to. For example, when the grinding wheel 11 is for finishing and the abrasive grains are fine, the smaller solids are removed from the grinding liquid by reducing the aperture size of the filter 25 according to the grain size. Is possible. Accordingly, it is possible to reduce the possibility of a large scratch on the surface of the workpiece 47 during the finishing process.

また、研削砥石11に濾過手段15を設けたので、例えば、循環管路55の途中にカートリッジ形のフィルタを設置する場合に比較して、装置を非常に簡易なものにすることが可能になり、設備コストを低減することができる。
そして、上述した研削砥石11では、濾過手段15を基台13に着脱可能に配置したので、フィルタ25,29の目が詰まった場合にも、容易に取り外して、洗浄や交換をすることができる。また、他の研削砥石の基台にも共通の濾過手段15を設けることで、使用していない研削砥石の第1のフィルタ部材21および第2のフィルタ部材23を付け替えて使用することが可能になる。これにより、研削砥石11の全数分のフィルタ部材21,23を用意する必要がなくなる。
Further, since the filtering means 15 is provided in the grinding wheel 11, for example, compared with the case where a cartridge type filter is installed in the middle of the circulation pipe 55, the apparatus can be made very simple. The equipment cost can be reduced.
In the grinding wheel 11 described above, the filtering means 15 is detachably disposed on the base 13, so that even when the filters 25 and 29 are clogged, they can be easily removed and cleaned or replaced. . Further, by providing the common filtering means 15 to the base of other grinding wheels, it is possible to replace the first filter member 21 and the second filter member 23 of grinding wheels that are not used. Become. Thereby, it is not necessary to prepare the filter members 21 and 23 for the total number of the grinding wheels 11.

さらに、上述した研削砥石11では、濾過手段15の下流側に位置する第1のフィルタ部材21のフィルタ25の目開き寸法を、上流側に位置する第2のフィルタ部材23のフィルタ29の目開き寸法より小さくしたので、研削液中に混入している固形物を効果的に除去することができる。
なお、フィルタ25,29の目開き寸法は、粗すぎてもフィルタ25,29の本来の効果が得られず、細かすぎる場合には目詰まりを起こし易いため、状況に応じて選定するのが望ましい。例えば、濾過手段15に流入する研削液中の固形物のサイズを予め調査して、このサイズの固形物を除去できるような目開きサイズにするのが望ましい。
(実施形態の補足事項)
以上、本発明を上述した実施形態によって説明してきたが、本発明の技術的範囲は上述した実施形態に限定されるものではなく、例えば、以下のような形態でも良い。
Further, in the grinding wheel 11 described above, the opening size of the filter 25 of the first filter member 21 located on the downstream side of the filtering means 15 is set to the opening size of the filter 29 of the second filter member 23 located on the upstream side. Since it is smaller than the size, the solid matter mixed in the grinding fluid can be effectively removed.
The openings of the filters 25 and 29 are preferably selected according to the situation because the original effect of the filters 25 and 29 cannot be obtained even if they are too coarse, and clogging is likely to occur if they are too fine. . For example, it is desirable to examine in advance the size of solids in the grinding fluid flowing into the filtering means 15 and to set the opening size so that solids of this size can be removed.
(Supplementary items of the embodiment)
As mentioned above, although this invention was demonstrated by embodiment mentioned above, the technical scope of this invention is not limited to embodiment mentioned above, For example, the following forms may be sufficient.

(1)上述した実施形態では、所謂ペレット型砥石からなる砥石部材17を基台13に貼り付けた例について説明したが、例えば、基台13に砥粒を直接固着しても良い。
(2)上述した実施形態では、研削砥石11の上方に被加工物47を配置した例について説明したが、研削砥石11の下方に被加工物47を配置しても良い。
(3)上述した実施形態では、濾過手段15に2つのフィルタ部材21,23を配置した例について説明したが、例えば、1つ、あるいは、3つ以上のフィルタ部材を配置するようにしても良い。
(1) In the above-described embodiment, the example in which the grindstone member 17 made of a so-called pellet type grindstone is attached to the base 13 has been described. For example, abrasive grains may be directly fixed to the base 13.
(2) In the above-described embodiment, the example in which the workpiece 47 is disposed above the grinding wheel 11 has been described. However, the workpiece 47 may be disposed below the grinding wheel 11.
(3) In the above-described embodiment, the example in which the two filter members 21 and 23 are arranged in the filtering unit 15 has been described. However, for example, one or three or more filter members may be arranged. .

(4)上述した実施形態では、基台13の貫通穴13aに第1のフィルタ部材21および第2のフィルタ部材23を固定部材37により保持した例について説明したが、例えば、第1のフィルタ部材21および第2のフィルタ部材23の保持部材27,31の外周に雄螺子部を形成し、この雄螺子部を貫通穴13aに形成される雌螺子部に直接螺合するようにしても良い。   (4) In the above-described embodiment, the example in which the first filter member 21 and the second filter member 23 are held in the through hole 13a of the base 13 by the fixing member 37 has been described. For example, the first filter member A male screw portion may be formed on the outer periphery of the holding members 27 and 31 of the 21 and the second filter member 23, and this male screw portion may be directly screwed into a female screw portion formed in the through hole 13a.

本発明の研削砥石の一実施形態を示す縦断面図である。It is a longitudinal section showing one embodiment of a grinding wheel of the present invention. 図1の研削砥石の上面図である。It is a top view of the grinding wheel of FIG. 図1の研削砥石の濾過手段の詳細を示す縦断面図である。It is a longitudinal cross-sectional view which shows the detail of the filtration means of the grinding wheel of FIG. 図1の研削砥石を備えた研削装置を示す説明図である。It is explanatory drawing which shows the grinding device provided with the grinding wheel of FIG.

符号の説明Explanation of symbols

11:研削砥石、13:基台、15:濾過手段、17:砥石部材、21:第1のフィルタ部材、23:第2のフィルタ部材、25,29:フィルタ。   11: grinding wheel, 13: base, 15: filtering means, 17: grinding wheel member, 21: first filter member, 23: second filter member, 25, 29: filter.

Claims (4)

砥粒が固定された部分を有する基台に、研削液を流出する研削液通路を形成するとともに、前記基台中の前記研削液通路に前記研削液中に混入した固形物を除去する濾過手段を設けてなることを特徴とする研削砥石。   Filtration means for forming a grinding fluid passage for flowing out the grinding fluid in a base having a portion to which abrasive grains are fixed, and removing solid matter mixed in the grinding fluid in the grinding fluid passage in the base. A grinding wheel characterized by being provided. 請求項1記載の研削砥石において、
前記濾過手段は、前記基台に着脱可能に配置されていることを特徴とする研削砥石。
In the grinding wheel according to claim 1,
The said grinding | polishing means is arrange | positioned at the said base so that attachment or detachment is possible, The grinding wheel characterized by the above-mentioned.
請求項1または請求項2記載の研削砥石において、
前記濾過手段は、前記研削液通路に複数のフィルタを間隔を置いて配置してなり、下流側のフィルタの目開き寸法を上流側のフィルタの目開き寸法より小さくしてなることを特徴とする研削砥石。
In the grinding wheel according to claim 1 or 2,
The filtering means is characterized in that a plurality of filters are arranged at intervals in the grinding fluid passage, and the opening size of the downstream filter is made smaller than the opening size of the upstream filter. Grinding wheel.
請求項1ないし請求項3のいずれか1項記載の研削砥石を有することを特徴とする研削装置。   A grinding apparatus comprising the grinding wheel according to any one of claims 1 to 3.
JP2005183728A 2005-06-23 2005-06-23 Grinding wheel and grinding device Withdrawn JP2007000965A (en)

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JP2005183728A JP2007000965A (en) 2005-06-23 2005-06-23 Grinding wheel and grinding device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI693121B (en) * 2019-04-22 2020-05-11 豪昱電子有限公司 Magnetic grinding machine
CN113635217A (en) * 2021-08-30 2021-11-12 丹阳市镖准思自动化科技有限公司 Grinding wheel internal cooling structure and assembling method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI693121B (en) * 2019-04-22 2020-05-11 豪昱電子有限公司 Magnetic grinding machine
CN113635217A (en) * 2021-08-30 2021-11-12 丹阳市镖准思自动化科技有限公司 Grinding wheel internal cooling structure and assembling method thereof

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