JP2006349187A - Connecting structure of integrated panel and fluid device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connecting structure of an integrated panel and a fluid device capable of keeping good sealability though additional fastening is hardly performed, and improving its assembling workability. <P>SOLUTION: In this connecting structure, the integrated panel 1 and a valve 2 are communicated and connected with each other by using a circular gasket G in a state of integrally sealing circular tube-shaped fluid passages 3, 7, circular projections 11, 21 are formed on first and second fluid supply/discharge opening portions 1A, 2A made of fluorine resin, a gasket G having the approximate H-shape and made of fluorine resin, has a pair of circular grooves 51, 51 formed on outside diameter-side parts of fluid pathways W of the circular projections 11, 12, and further a retaining means 1 is mounted for drawing the integrated panel 1 and the valve 2 and fitting the circular projections 11, 21 of the first and second fluid supply/discharge opening portions 1A, 2A to the circular groove 51 of the gasket G to form a fit seal portion. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a connection structure between an integrated panel and a fluid device, and more specifically, a high-purity liquid or ultrapure water handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, food processing, chemical industry, and the like. Alternatively, the present invention relates to a connection structure for connecting a fluid integrated panel, which is expected to be demanded in the piping system of cleaning liquid, and a fluid device such as a pump, a valve, and an accumulator in a sealed state via a gasket.

  As the above connection structure, for example, there is one in which a valve, which is an example of a fluid device, and an integrated panel in which a fluid passage is formed are connected by connecting a pair of supply / exhaust flow paths to each other. A connection structure disclosed in Document 2 is known. The connection structure disclosed in Patent Document 1 is a structure in which a pair of supply / discharge channels are arranged close to each other, and are connected and connected in a liquid-tight manner with a plurality of bolts via independent ring-shaped gaskets. In the connection structure disclosed in Document 2, a pair of supply / exhaust flow paths are arranged close to each other, and a single gasket having a pair of flow path holes corresponding to the pair of supply / exhaust flow paths is provided as a single outer shell. It is connected and connected using a screw nut.

Each of the connection structures disclosed in Patent Documents 1 and 2 adopts a structure in which a large number of fluid devices are integrated and attached to a fluid block, that is, a so-called integrated piping structure. This is useful in that it can be realized.
JP 2001-82609 A Japanese Patent Laid-Open No. 10-169859

  In the connection structure disclosed in Patent Documents 1 and 2, effective sealing performance is obtained by tightening a bolt between a pair of flange portions sandwiched between gaskets until a predetermined surface pressure is reached. However, since it is inevitable that the bolt tightening force decreases with time, it is necessary to periodically perform additional tightening in order to prevent the tightening force from being reduced, that is, leakage from the connection portion due to torque reduction. When sealing with a gasket, a very high tightening force is required. Therefore, high strength is required for the fluid supply and discharge ports of the integrated panel and fluid device, and workability for connecting and connecting them is also required. But it was disadvantageous.

  The present invention has been made in view of such circumstances, and the object of the present invention is to perform additional tightening by devising a connection structure between the integrated panel and the fluid device in the fluid piping system. It is an object of the present invention to provide a connection structure between an integrated panel and a fluid device, which can maintain a good sealing property even if it is not necessary, and can improve its assembling workability.

According to the first aspect of the present invention, in the connecting structure between the integrated panel and the fluid device, the first of the integrated panel 1 including the first fluid supply / discharge port portion 1A made of fluororesin in which the tubular fluid passages 3 and 4 are opened. 1 fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A of the fluid device 2 including the second fluid supply / discharge port portion 2A made of fluororesin in which the tubular fluid passages 7 and 8 are opened. When the fluid passages 3, 4, 7, 8 are connected in communication with each other by a ring-shaped gasket G interposed between the first fluid supply / exhaust port 1 </ b> A and the second fluid supply / discharge port 2 </ b> A. ,
In the first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A, annular protrusions 11 and 21 are formed on the outer diameter side portions of the fluid passages 3, 4, 7, and 8 that open to the end surfaces. Formed,
The gasket G includes a fluid path W formed to communicate the fluid paths 3, 4, 7, and 8 corresponding to the first and second fluid supply / exhaust ports 1A and 2A, A pair of annular grooves 51, 51 formed on the outer diameter side portion of the fluid path W to be fitted to the annular protrusions 11, 21 formed on the end surfaces of the second fluid supply / discharge ports 1 A, 2 A; And the cross-sectional shape is made of a fluororesin having a substantially H-shape,
The first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A are attracted to each other via the gasket G, and the annular protrusion 11 and the gasket G of the first fluid supply / discharge port portion 1A are drawn. And the annular groove 51 at the other end of the gasket G are fitted into the annular groove 51 at one end thereof, the annular protrusion 21 of the second fluid supply / discharge port portion 2A, and the fitting seal portion 10 is formed. Maintenance means I for maintaining the connected state,
Projecting in the axial direction to form the annular groove 51 in the gasket G on the inner and outer diameter sides of the annular projections 11 and 21 on the end surfaces of the first and second fluid supply / discharge ports 1A and 2A. The annular presser protrusions 12, 13, 22, and 23 are formed to suppress or prevent the inner and outer peripheral wall end portions 52 and 53 from expanding and deforming due to the engagement between the annular groove 51 and the annular protrusions 11 and 21. ,
The annular pressing protrusions 12, 13, 22, and 23 are arranged on the annular protrusion side so that valleys 14, 15, 24, and 25 surrounded by the annular pressing protrusions 11, 21 and 21 are constricted. The peripheral surface is formed in a tapered annular protrusion having tapered peripheral surfaces 12a, 13a, 22a, and 23a, and the peripheral wall end portions 52 and 53 are formed on the annular presser protrusions 12, 13, 22, and 23, respectively. The tapered peripheral surfaces 12a, 13a, 22a, and 23a have tapered peripheral surfaces 52a and 53a, and are formed into tapered tapered projections that can freely enter the valley portions 14, 15, 24, and 25, In the joined state, the peripheral wall end portions 52 and 53 enter the valley portions 14, 15, 24, and 25, and the tapered peripheral surfaces 12 a, 13 a, 22 a, 23 a, 52 a, and 53 a are pressed against each other. Has been And it is characterized in and.

  The invention according to claim 2 is the connection structure between the integrated panel and the fluid device according to claim 1, wherein the peripheral wall end portions 52, 53 and the annular presser protrusions 12, 13, 22, 23 are in the joined state. Is configured to be pressed to form the seal portion S2.

  The invention according to claim 3 is the connection structure between the integrated panel and the fluid device according to claim 1 or 2, wherein a plurality of the first fluid supply / discharge ports 1A are formed in the integrated panel 1, and the fluid device 2 A plurality of the second fluid supply / discharge ports 2A are formed corresponding to the number of the first fluid supply / discharge ports 1A, and the plurality of first and second fluid supply / discharge ports 1A, 2A are provided. Each of them is configured to be able to communicate with each other via the gasket G on the same plane.

  According to a fourth aspect of the present invention, in the connection structure between the integrated panel and the fluid device according to any one of the first to third aspects, the maintaining means I includes the first fluid supply / discharge port portion 1A and the second The fluid supply / exhaust port portion 2 </ b> A is drawn so as to exhibit a drawing function for obtaining the joined state.

According to a fifth aspect of the present invention, in the connection structure between the integrated panel and the fluid device according to the fourth aspect, the maintaining means I includes the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A. An outward flange 9B formed at at least one of the end portions, a through hole 9a formed in the outward flange 9B, and the first fluid supply / exhaust port portion 1A and the second fluid through the through hole 9a. A bolt 66 that is screwed to a nut portion 67 provided on the other side of the supply / exhaust port portion 2A;
The first fluid supply / exhaust port portion 1A and the second fluid supply / exhaust port portion 2A are attracted to each other via the gasket G by screwing and tightening the bolt 66 to the nut portion 67. It is characterized by that.

According to a sixth aspect of the present invention, in the connection structure between the integrated panel and the fluid device according to the fourth aspect, the maintaining means I is provided between the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A. A cylindrical nut 81 having a female screw portion 81n that can be screwed into a male screw portion 1n formed on one of the outer peripheral portions, the first fluid supply / discharge port portion 1A, and the second fluid supply / discharge port portion 2A. The first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 1A and the second fluid supply / discharge port portions 1A, 2A interfere with the outward flange 9B formed at the other end in the direction of the axis P. A split ring 82 fitted on the other end of the fluid supply / exhaust port 2A;
An inward flange 83 having an opening 83a that allows passage of the outward flange 9B and interferes with the split ring 82 in the direction of the axis P is formed at one end of the cylindrical nut 81. Has been
The first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A are attracted to each other via the gasket G by the tightening operation of the cylindrical nut 81 to the male screw portion 1n. It is characterized by being.

  According to the first aspect of the present invention, the annular protrusions formed in the first and second fluid supply / exhaust ports, respectively, and the annular grooves formed in the one end surface and the other end surface of the gasket are relatively moved in the axial direction. Are fitted to each other to form a fitting seal portion, so that the fitting state between the annular protrusion and the annular groove is maintained even if both of them move slightly in the axial direction, and the first and second fluid supply / discharge It becomes possible to continue to exhibit excellent sealing properties that prevent liquid leakage from between the mouths. For example, if such a connection structure is used in the piping system of a cleaning device in a semiconductor manufacturing facility, the area occupied by the device can be reduced while ensuring good sealing performance, and a large flow path is secured. As a result, it is possible to increase the circulation flow rate, increase the purity of the chemical solution, and contribute to the yield improvement.

  Further, since the maintaining means can maintain the joined state in which the fluid supply / exhaust ports are attracted to each other via the gasket, the integrated panel and the fluid device can maintain a good sealing property without liquid leakage. It is possible to provide a connection structure between an integrated panel and a fluid device that can be maintained for a long period of time and has excellent reliability. As a result, it is possible to provide a connection structure between an integrated panel and a fluid device that can maintain good sealing performance with little additional tightening and that can improve its assembly workability.

  By the way, in the fitting structure in which the convex is inserted into the concave, even if both of them are made of the same material, the convex member hardly changes (compression deformation), and the concave member expands. It is generally known that there is a tendency to deform. Therefore, in the first aspect of the present invention, since the annular protrusion that is convex on the fluid device and the annular groove that is concave on the gasket are formed, the deformation due to creep or change with time is less than that of the fluid device. Since the fluid device side is hardly deformed on the gasket side, which is a small component, there is an effect that the advantage of maintaining good sealing performance over a long period of time can be realized at low cost by replacing the gasket.

  As described above, in the concave / convex fitting, the concave side tends to spread and deform easily, that is, in the present invention, the inner and outer peripheral wall ends formed on the gasket to expand and deform in order to form the annular groove. I mean. Therefore, since the first and second fluid supply / discharge port portions are formed with annular pressing protrusions that suppress or prevent the expansion deformation of the peripheral wall end portion, the expansion deformation of the peripheral wall end portion is eliminated or reduced, and The annular groove can be fitted with a strong pressure contact force, and an excellent sealing function due to the fitting of both can be exhibited as expected. In addition, since the rigidity of the end of the peripheral wall can be compensated for by the presence of the annular presser protrusion, it is possible to reduce the thickness of the end of the peripheral wall of the gasket as compared with the case where these do not exist. There is also an advantage that the width dimension can be reduced and the overall diameter of the fluid passage can be reduced, that is, the connection structure between the integrated panel and the fluid device can be reduced.

  In the joined state, the first and second inner diameter sides and the outer diameter side of the fitting portion between the annular protrusions of the first and second fluid supply / exhaust ports and the annular groove on one end surface or the other end surface of each gasket are provided. There is a configuration in which the taper peripheral surface of the fluid supply / discharge port and the taper peripheral surface of the gasket are in pressure contact with each other. The effect of can be obtained. In addition, since the tapered peripheral surfaces are in contact with each other, the pressure contact force increases as the integrated panel or fluidic device and the gasket are pressed strongly, and there is an advantage that the above-described effects of compactness and improvement of the sealing performance can be further strengthened. . Further, it is possible to provide a connection structure in which no liquid pool is generated between the tapered peripheral surfaces.

  Since the gasket has a substantially H-shaped cross section, it is possible to easily design and manufacture the gasket and the first and second fluid supply / exhaust port portions that are fitted with the gasket, It is also possible to achieve an excellent balance (strength balance, assembly balance) when fitted to an integrated panel or fluidic device.

  Since the gasket and both fluid supply / exhaust ports are made of a fluorine-based resin having excellent chemical resistance and heat resistance, the fluid may be a chemical solution, a chemical liquid, or a high-temperature fluid. However, the pipe joint structure portion is not deformed and easily leaks, and good sealing performance can be maintained. The fluororesin is a resinous substance obtained by polymerization of ethylene and derivatives thereof in which one or more hydrogen atoms are substituted with fluorine, and is stable at high temperatures and excellent in water repellency. Further, it is preferable in that it has a small coefficient of friction, extremely high chemical resistance, and high electrical insulation.

  According to the invention of claim 2, in the joined state, a seal portion is formed by pressure contact between the annular protrusions of the first and second fluid supply / discharge ports and the annular groove on one end surface or the other end surface of each gasket. As a result, a fitting seal portion having a higher sealing property is formed, and a connection structure between the integrated panel and the fluid device having excellent sealing performance can be obtained.

  According to the invention of claim 3, since the plurality of connection structures of the integrated panel and the fluid device are constructed on the same plane, the number of parts processing can be reduced compared to the case where they are not on the same plane. This is advantageous in that the attaching operation is easy to perform. In addition, the components (first fluid supply / discharge ports, gaskets, etc.) in each connection structure can be shared or integrated (each first fluid supply / discharge port for supply / discharge is made up of a pair of fluid passages in one block. And the like can be integrated, and there is an advantage that rationalization can be achieved.

  According to the invention of claim 4, the maintaining means not only maintains the joined state of the first fluid supply / exhaust port and the second fluid supply / discharge port, but also the first fluid supply / discharge port and the second fluid supply. Since the drawing function for drawing the outlet part to obtain the joined state can also be exhibited, it is not necessary to prepare any other drawing means, and it is possible to reduce the assembly work and the cost as a whole. There are advantages.

  According to the invention of claim 5, if an outward flange with a hole is formed in at least one of the fluid supply / exhaust port portions, a bolt through which the hole passes, and a nut portion provided in the other fluid supply / discharge port portion, It is possible to draw and maintain the two fluid supply / exhaust ports by a simple means simply by providing the two. That is, it is possible to obtain a connection structure between an integrated panel and a fluid device, which has various advantages while being a simple and inexpensive maintaining means with a drawing function.

  According to the sixth aspect of the present invention, the cylindrical nut engaged with the outward flange formed at either one of the first and second fluid supply / exhaust ports via the split ring is already provided. An integrated panel in which the annular protrusions of the first and second fluid supply / exhaust ports and the annular groove of the gasket are fitted by a simple operation by simply screwing them into the male threads of the first and second fluid supply / discharge ports. The fluid device and the fluid device can be connected in a sealed state, and it is possible to maintain the connection state simply by stopping the screwing of the cylindrical nut. It is obtained as a reasonable one that does not take up space.

  Further, the cylindrical nut can be externally fitted and detached at the end of the first fluid supply / exhaust port or the second fluid supply / exhaust port, and in the externally fitted state, both the outward flange and the split ring are attached. Since it interferes in the axial direction, the split ring and cylindrical nut are retrofitted to the first or second fluid supply / exhaust port while enabling direct connection between the first and second fluid supply / discharge ports using the cylindrical nut. You can do it freely. Therefore, the cylindrical nut can be externally fitted to the fluid supply / exhaust port during the manufacture of the first or second fluid device while making the number of parts as small as the cylindrical nut and split ring economical and reasonable. The connecting operation between the integrated panel and the fluid device can be performed easily and conveniently by using the cylindrical nut without taking the difficult manufacturing method of keeping.

  Embodiments of a connection structure between an integrated panel and a fluid device according to the present invention will be described below with reference to the drawings. 1 to 3 show the connection structure between the integrated panel and the fluid device according to the first embodiment, and FIGS. 4 and 5 show the connection structure between the integrated panel and the fluid device according to the second and third embodiments, respectively. 12 shows another structure of the maintaining means, FIG. 6 shows a first separate structure, FIGS. 7 and 8 show a second separate structure, FIGS. 9 and 10 show a third separate structure, FIG. 11 shows a fourth separate structure, and FIG. There are five different structures. 13 and 14 are cross-sectional views of the main parts showing various different fitting structures between the fluid device and the gasket.

[Example 1]
The connection structure between the integrated panel and the fluid device according to the first embodiment is shown in FIGS. The connection structure between the integrated panel and the fluid device includes an integrated panel 1 in which a pair of circular fluid passages 3 and 4 are formed inside, and a valve mounted on the upper surface 1a of the integrated panel 1 via a ring-shaped gasket G ( Open / close valve, stop valve, etc.) 2 and is a single flow path type that shares a longitudinal axis P that is formed across the two. That is, a pair of connection structures are configured to be the same for supply and discharge.

  As shown in FIGS. 1 and 2, the integrated panel 1 has vertical vertical passages 3 a and 4 a that open in the panel upper surface 1 a inside a panel material (or block material) 5 made of fluororesin such as PFA or PTFE. And a pair of circular supply / exhaust fluid passages 3 and 4 including lateral passages 3b and 4b. A portion of the integrated panel 1 where the supply and discharge fluid passages 3 and 4 are opened is referred to as a first fluid supply and discharge port portion 1A. In the first fluid supply and discharge port portion 1A, circular tubular vertical passages 3a and 4a are provided. Are each formed in a passage having an axis P. The first fluid supply / exhaust port 1A has an annular shape centered on the axis P and protrudes upward from each of the outer diameter side portions of the fluid passages 3 and 4 that open to the upper end surface thereof. A lower first seal end t21 and a lower second seal end t22 having the inner and outer annular protrusions 21 are formed.

  As shown in FIGS. 1 and 2, the valve (an example of a fluid device) 2 has a valve case 6 made of a fluororesin such as PFA or PTFE and having a circular shape when viewed in the vertical direction. The lower end portion is arranged in a vertical direction in a state in which it opens vertically to the lateral side of the supply side fluid passage 7 and a circular supply side fluid passage 7 arranged in a vertical direction so as to protrude downward from the bottom surface 6a. It is formed in the second fluid supply / exhaust port portion 2 </ b> A having a round tubular discharge side fluid passage 8. That is, in the second fluid supply / discharge port portion 2A, each of the cylindrical supply / discharge fluid passages 7 and 8 is formed as a passage having the axis P. That is, at the lower end of the valve case 6, a pair of mounting flanges 9 made of fluororesin such as PFA or PTFE having a pair of bolt insertion holes 9a is formed to project downward, and a pipe portion 9A having fluid passages 7 and 8 is provided. Each mounting flange 9 is formed by a flange portion (outward flange) 9B. A supply-side mounting flange 9 is formed on the upper first seal end t11 having an annular protrusion 11 protruding downward, and a discharge-side mounting flange 9 is an upper second seal end t12 having an annular protrusion 11 protruding upward. Is formed.

  The pair of gaskets G are the same as each other, and the structure thereof will be described by taking the supply side gasket G as an example. The gasket G includes a tubular fluid path W formed to communicate the longitudinal passage 3a and the supply side fluid passage 7 which are fluid passages corresponding to the upper and lower fluid supply / discharge ports 1A and 2A on the supply side. In order to fit into the annular projection 11 of the upper first seal end t11 and the annular projection 21 of the upper second seal end t12 formed on the end surfaces of the first and second fluid supply / exhaust ports 1A and 2A, respectively. It is made of a fluororesin such as PFA or PTFE having a pair of upper and lower annular grooves 51, 51 formed in the outer diameter side portion of the fluid path W.

  That is, the cross-sectional shape of the gasket G includes a pair of upper and lower annular grooves 51, 51 and an inner peripheral wall 54 and an outer peripheral wall 55 for forming the annular grooves 51, 51. The depth and width are the same in the vertical direction, and the inner and outer peripheral walls 54 and 55 are also left and right symmetrical, and are longitudinal along the axis P direction of the first and second fluid supply / discharge ports 1A and 2A. The center Z and the horizontal center line X orthogonal to the vertical center line Z are formed in a substantially H shape that is line symmetric (may be substantially line symmetric). The upper and lower ends of the inner peripheral wall 54 are formed on tapered inner peripheral surfaces 52a and 52a in which the upper and lower ends of the fluid path W, which is the inner peripheral surface 54a, incline outwardly, and are formed on the upper and lower ends of the outer peripheral wall 55. The upper and lower end portions of the outer peripheral surface 55a are also formed on tapered outer peripheral surfaces 53a and 53a inclined inward.

  Since the gasket has a substantially H-shaped cross section that is symmetrical in the vertical and horizontal directions, for example, the first and second fluid supply / exhaust ports, which are parts fitted with the gasket, compared to the asymmetrical one, for example. In addition to facilitating the design and manufacture of the part, the balance (strength balance, assembly balance) when fitted to the integrated panel or fluid device can be improved.

  Inside the annular projection 21 at the lower first seal end t21 of the first fluid supply / discharge port portion 1A of the integrated panel 1 and the annular projection 11 at the upper first seal end t11 of the second fluid supply / discharge port portion 2A of the valve 2 Further, on the outer diameter side, inner and outer peripheral wall end portions 52 and 53 formed so as to project in the direction of the axis P in order to form the annular groove 51 in the gasket G are formed by fitting the annular groove 51 and the annular protrusions 11 and 21. An annular presser protrusion 12, 13, 22, 23 is formed to prevent the expansion and deformation.

  The structure relating to the annular pressing protrusion will be described with respect to the gasket G and the upper first seal end t11. The inner and outer annular presser protrusions 12 and 13 are symmetrical, and the valley protrusions 14 and 15 surrounded by these and the annular protrusions 11 are in the form of a constricted shape (upper constricted shape). The peripheral surface is formed into a tapered annular protrusion having a tapered outer peripheral surface 12a and a tapered inner peripheral surface 13a. That is, the upper first seal end t11 is a general term for the annular protrusion 11 and the annular presser protrusions 12 and 13 and the troughs 14 and 15 formed on both the inner and outer sides.

  The upper ends of the inner and outer peripheral walls 54, 55 of the gasket G have a tapered inner peripheral surface 52a and a tapered outer peripheral surface 53a that are in contact with the tapered outer peripheral surface 12a and the tapered inner peripheral surface 13a of the annular presser protrusions 12, 13, respectively. 14 and 15 have tapered annular sealing protrusions (an example of peripheral wall end portions) 52 and 53 that can freely enter, and in the joined state (see FIG. 1), the upper peripheral wall of the inner and outer peripheral walls 54 and 55 The annular seal protrusions 52 and 53, which are ends, enter the corresponding valley portions 14 and 15, the tapered outer peripheral surface 12a of the upper first seal end t11 and the tapered inner peripheral surface 52a of the gasket G are in pressure contact, and the upper The tapered inner peripheral surface 13a of the first seal end t11 and the tapered outer peripheral surface 53a of the gasket G are configured to be in pressure contact with each other.

  In other words, the upper seal portion g11 is formed at the upper end portion of the gasket G by the annular groove 51 and the inner and outer annular seal protrusions 52 and 53, and similarly, the lower seal portion g12 is formed at the lower end portion. . The upper seal part g11 is fitted with the upper first seal end part t11 to form the fitting seal part 10, and the lower seal part g12 is fitted with the lower second seal end part t21 to form the fitting seal part 10. To do.

  The fitting structure of the fitting seal portion 10 will be described in detail with respect to the upper first seal end t11 and the upper seal portion g11 of the gasket G. As shown in FIGS. And the inner and outer annular seal protrusions 52 and 53 are symmetrical to each other, and are between the included angle α ° of the entire inner and outer valleys 14 and 15 and the sharp angle β ° of the entire inner and outer annular seal protrusions 52 and 53. Is set to α ° <β °, preferably α ° + (5 to 15 °) = β °. With this configuration, in the joined state (described later) in which the upper annular protrusion 11 and the annular groove 51 of the upper first seal end t11 are fitted, the upper inner annular pressing protrusion 12 and the upper inner annular sealing protrusion 52 are The taper outer peripheral surface 12a and the taper inner peripheral surface 52a are brought into pressure contact with each other at the innermost diameter side portion (see the phantom line in FIG. 3), and the fluid passing through the fluid passage W passes between these outer peripheral taper peripheral surfaces 12a and 52a. The advantage of functioning as the secondary seal portion S2 that also prevents entry into the space is obtained.

  A relationship of d1> d2 is set between the width d1 of the upper annular protrusion 11 and the width d2 of the upper annular groove 51, and preferably d1 × (0.6 to 0.8) = d2. It is good to set it as a relationship. A relationship of h1 <h2 is set between the protrusion length h1 of the upper annular protrusion 11 and the depth h2 of the upper annular groove 51. With these configurations, the upper annular protrusion 11 and the upper annular groove 51 are in strong pressure contact with the inner and outer side peripheral surfaces of the upper annular protrusion 11 and the corresponding inner peripheral surfaces of the upper annular groove 51 in detail. A primary seal portion S1 that exhibits excellent sealing performance that prevents fluid leakage is formed, and the tapered outer peripheral surface 12a of the upper inner annular presser protrusion 12 and the tapered inner peripheral surface 52a of the upper inner annular seal protrusion 52 are necessarily formed. There is an advantage that the secondary seal portion S2 described above is satisfactorily formed.

  Further, the tip of the inner annular presser projection 12 and the tips of the annular seal projections 52 and 53 are formed in a shape cut so as not to have a pin angle, that is, the inclined cut surface 12b and the cut surfaces 52b and 53b. . With these configurations, even if the tip of the upper inner annular presser protrusion 12 is slightly spread and deformed toward the fluid passage W side, the shape is originally cut, so that a recess having a triangular shape that is wide open in the middle of the fluid passage W is formed. As much as possible, the fluid existing in the dent can easily flow out, and substantially no liquid pool is generated. In addition, the opening angle of the recess, that is, the included angle between the inclined cut surface 12b and the tapered inner peripheral surface 52a is sufficiently large, and the possibility of liquid accumulation due to surface tension is avoided. Further, since the inner and outer angles of the tip of the annular protrusion 11 are formed as a chamfered shape 11a, the press-fitting movement into the narrow annular groove 51 can be smoothly performed without inconvenience such as galling.

  The outer annular presser protrusion 13 has a lower end inner peripheral portion 9b for forming the lower end portion of the valve case 6 in a state following the tapered inner peripheral surface 13a of the annular presser protrusion 13, and the inner annular presser protrusion 13 The overall shape is different from 12. The lower first seal end t21 also has an upper end inner peripheral portion 5b for forming the upper end portion of the panel material 5 in a state following the tapered inner peripheral surface 23a of the annular presser protrusion 23. The shape of the inner annular pressing protrusion 22 is different from that of the inner annular pressing protrusion 22. The upper and lower inner peripheral portions 5b and 9b function as guides when the upper and lower seal portions g11 and g12 are fitted to the upper and lower first seal end portions t11 and t21, and the taper inner peripheral surface. A function of preventing the outer peripheral wall 55 of the gasket G from being expanded and deformed together with 13a and 23a can be exhibited.

  As shown by phantom lines in FIG. 1, if a ring-shaped attachment / detachment flange 1f that projects laterally is integrally formed on the outer peripheral wall 55 of the gasket G, the first or second fluid supply / exhaust ports 1A, 2A When extracting the gasket G, there is an advantage that the flange 1f can be easily removed by pulling it with a tool or fingers. In this case, the thickness of the desorption flange 1f is set to a value smaller than the gap between the first and second fluid supply / exhaust port portions 1A and 2A in the joined state.

  Next, the maintenance means I will be described. As shown in FIGS. 2 and 3, the maintaining means I includes the first fluid supply / exhaust port portion 1 </ b> A of the integrated panel 1 and the second fluid supply / discharge port portion 2 </ b> A of the valve 2 that are attracted to each other via the gasket G. By the drawing action, the upper first seal end t11 of the first fluid supply / discharge port portion 1A, the upper seal portion g11 of the gasket G, and the lower first seal end of the second fluid supply / discharge port portion 2A The part t21 and the lower seal part g12 of the gasket G are fitted together to maintain the joined state in which each fitting seal part 10 is formed. That is, the annular projection 11 of the second fluid supply / exhaust male port portion 2A and the annular groove 51 on the upper side of the gasket G, and the annular projection 21 of the first fluid supply / exhaust male port portion 1A and the annular groove on the lower side of the gasket G are provided. 51 are fitted together.

  The specific structure of the maintaining means I includes a pair of bolts 66 inserted into the bolt insertion holes 9a of the flange portion 9B of the second fluid supply / exhaust port portion 2A, and the first fluid corresponding to the pair of bolt insertion holes 9a, 9a. Nut portions 67 and 67 formed in the supply / exhaust port portion 1A (in the panel material 5), and the valve 2 is attached to the integrated panel 1 by a tightening operation by screwing the bolt 66 to the nut portion 67. It is comprised in the maintenance means I with a drawing function which can be drawn and can maintain the drawing state. Further, when the pressure contact force of each fitting seal portion 10 is reduced due to aging, creep, or the like, it can be dealt with by tightening the bolt 66, and good sealing performance can be maintained. It is.

[Example 2]
FIG. 4 shows a connection structure between the integrated panel and the fluid device according to the second embodiment. This is a structure for connecting and connecting the filter 2 which is an example of the fluid device and the integrated panel 1, and the connection structure itself is the same as that according to the first embodiment shown in FIGS. Accordingly, the same parts are denoted by the same reference numerals, and the description thereof is omitted.

  The filter 2 includes a main body case 2K, a lower case 2B, and a filter body 2C. The lower case 2B has a supply-side fluid passage 7, a discharge-side fluid passage 8, and the fluid passages 7 and 8 in a horizontal state. A pair of mounting flanges 9 and 9 are formed so as to project from each other. These mounting flanges 9 and 9 and the integrated panel 1 are connected and connected via a gasket G.

Example 3
The connection structure between the integrated panel and the fluidic device according to the third embodiment is a connection structure between the integrated panel 1 and the bellows type valve 2 as shown in FIG. The bellows type valve 2 has a casing 2C composed of an upper case, an intermediate case, and a lower case, and a bellows (not shown) whose outer peripheral portion is sandwiched between the upper case and the intermediate case, an intermediate case and a lower case It comprises a valve body (not shown) whose outer periphery is sandwiched between them, a return spring (not shown) accommodated in the lower case, and the like.

  The casing 2C is integrally provided with a pair of mounting flanges 9 and 9 which are formed to project laterally, and the bellows type valve 2 is gasketed on the upper surface 1a of the integrated panel 1 using these mounting flanges 9 and 9. G is connected through G. The connection structure between the mounting flange 9 and the upper surface 1a of the integrated panel 1 through the gasket G is the same as that according to the first embodiment shown in FIGS. 1 to 3, and the detailed description thereof is omitted.

Example 4
A connection structure between the integrated panel and the fluidic device according to the fourth embodiment is shown in FIGS. This is different from the first embodiment only in the maintenance means I, and the maintenance means I having the first separate structure will be described. 6 and 7, parts corresponding to those of the first embodiment shown in FIGS. As shown in FIGS. 6 and 7, the maintaining means I having the first different structure is provided on the outer peripheral portion of the first fluid supply / exhaust port portion 1 </ b> A having a circular shape in plan view formed on the upper surface of the integrated panel 1. An annular fluid is formed on a cylindrical nut 81 formed with a male screw 1n and having a female screw 81n that can be screwed to the male screw 1n, and an outward flange 9 formed at the lower end of the valve case 6 of the valve 2. The split ring 82 is divided into two or three or more split rings 82 that interfere with each other in the direction of the axis P of the passage 7. Direction in which both fluid supply / discharge port portions 1A, 2A approach each other via gasket G by tightening operation of cylindrical nut 81 by screwing female screw 81n to male screw 1n of first fluid supply / discharge port portion 1A It is comprised in the maintenance means I with the attracting function which can be attracted | sucked and can maintain a attracted state.

  The opening 83 a of the inward flange 83 formed on the valve 2 side (upper side) of the cylindrical nut 81 is set to a minimum inner diameter dimension sufficient to allow passage of the outward flange 9. The outer diameter of the split ring 82 is set to be slightly smaller than the inner diameter of the female screw 81n so that it can enter the cylindrical nut 81, and the inner diameter is the circular second fluid supply / exhaust port of the valve 2 It is set to a minimum dimension that can be fitted onto the outer diameter portion of the portion 2A. In this case, in order to equip the split ring 82, the axial length of the thin portion excluding the outward flange 9 in the second fluid supply / exhaust port portion 2 </ b> A is divided by the axial length of the cylindrical nut 81. It is necessary to set a value exceeding the sum of the thickness of the mold ring 82. Specifically, as shown in FIG. 7 (b), the length d3 between the cylindrical nut 81 and the outward flange 9 in a state of being in contact with the root portion 6t of the valve case 6 has a split ring. The condition is that the thickness is greater than the thickness d4 of 82 (d3> d4).

  Further, between the inner back end portion of the female screw 81 n and the inward flange 83 in the cylindrical nut 81, the split ring 82 is slidable in the axial direction and covers the width of the split ring 82. An inner peripheral surface portion 81m having a length in the axial center P direction is formed on a flat inner peripheral surface concentrically with the axial center P. That is, an inner diameter portion 81 a between the female screw 81 n of the cylindrical nut 81 and the inward flange 83 is formed on a flat inner peripheral surface concentric with the supply-side fluid passage 7, and the inner peripheral surface portion 81 m has an inner diameter. While the fitting tolerance is set to be slightly larger than the outer diameter of the split ring 82 having a rectangular cross section, the outer diameter portion of the second fluid supply / discharge port portion 2A is connected to the supply-side fluid passage 7. Concentrically formed on a flat outer peripheral surface, the outer diameter of the outer diameter portion and the inner diameter of the split ring 82 are formed to have substantially the same diameter. As a result, when the cylindrical nut 81 is screwed, the split ring 82 is tilted and bent, or the pressing force in the direction of the axis P due to the screwing of the cylindrical nut 81 is applied to the outward flange 9. It is possible to prevent the inconvenience of not being transmitted well, effectively pushing the outward flange 9 and pulling the first and second fluid supply / exhaust port portions 1A and 2A toward each other well. Has been.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I having the first different structure is as follows. First, as shown in FIG. 7A, the tubular flange 81 is fitted over the outer periphery of the second fluid supply / exhaust port portion 2A of the valve 2 by passing through the outward flange 9 (up to the innermost side). Move until it touches the root 6t). Next, as shown in FIG. 7B, the split ring 82 is fitted between the outward flange 9 and the tip of the cylindrical nut 81 and fitted to the second fluid supply / exhaust port portion 2 </ b> A. At this time or before that, the gasket G is attached to the end face of one of the fluid supply / discharge ports 1A, 2A through temporary fitting of the annular protrusions 11, 21, 31, 41 and the annular grooves 51, 61. May be. Next, the first fluid supply / exhaust port portion 1A is applied to the second fluid supply / discharge port portion 2A via the gasket G, and the cylindrical nut 81 is slid in this state before the tightening operation [see FIG. 7 (c)]. By doing so, the connection state shown in FIG. 6 is obtained. In FIG. 7, the integrated panel 1 and the valve 2 stacked one above the other are drawn in a lying state for convenience of drawing.

Example 5
8 and 9 show a connection structure between the integrated panel and the fluidic device according to the fifth embodiment. This is different from the first embodiment only in the maintaining means I, and the second different structure maintaining means I will be described. 8 and 9, portions corresponding to those of the first embodiment shown in FIGS. The second separate structure maintaining means I includes first and second truncated frustoconical ends formed by expanding the first and second fluid supply / exhaust port portions 1A and 2A so that the diameter increases toward the end surface side. Portions 1D, 2D, a first tapered inner peripheral surface 84a that contacts the tapered outer peripheral surface 1d of the first truncated frustoconical end 1D, and a tapered outer peripheral surface 2d of the second truncated frustoconical end 2D. A split presser ring 85 including a pair of half arc members 84 and 84 having an inner circumferential surface having a substantially square cross section by the second taper inner circumferential surface 84b that abuts, and the half arc members 84 and 84. And a nut 87 formed on one half arc member 84.

  In the state in which the pair of half arc members 84 are covered over the first truncated frustoconical end portion 1D and the second truncated frustoconical end portion 2D in the joined state, the other half arc member 84 is covered. When the bolts 86 and nuts 87 passed through the insertion holes 84h are tightened, the half arc members 84 and 84 pivotally supported by the fulcrum Q at one end are attracted to each other so that the tapered surfaces contact each other. The fluid supply / exhaust port portions 1A and 2A are attracted to each other by the force of contact. The split mold retaining ring 85 is preferably made of a fluororesin material, but may be made of other materials such as an aluminum alloy.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the second different structure maintaining means I is as follows. First, as shown in FIG. 9A, a preliminary coupling operation is performed in which the first and second fluid supply / exhaust ports 1A and 2A are lightly connected and connected via the gasket G. Next, as shown in FIG. 9 (b), the first and second truncated frustoconical end portions 1 </ b> D and 2 </ b> D that are pre-connected are covered with a split retainer ring 85 and tightened with a bolt 86. By tightening the bolts 86, the gasket G is deeply fitted into the fluid supply / discharge ports 1A and 2A, and the connected state of the integrated panel 1 and the valve 2 is obtained as shown in FIG. 9C.

Example 6
FIG. 10 shows a connection structure between the integrated panel and the fluid device according to the sixth embodiment. This is different from the first embodiment only in the maintaining means I, and the third different structure maintaining means I will be described. In FIG. 10, portions corresponding to those of the first embodiment shown in FIGS. The third different structure maintaining means I includes a first fluid supply / exhaust port 1A having a protruding shape that is circular in a plan view and formed on the upper surface of the integrated panel 1 with a male screw 1n on the outer periphery. A flange portion 9 formed at the lower end portion of the valve case 6 with a male screw 9n on the outer peripheral portion in the two-fluid supply / discharge port portion 2A, and female screws 91n, 92n that can be screwed to the male screws 1n, 9n. The first and second ring nuts 91 and 92 have an engagement ring 93 having a substantially U-shaped cross section that can be fitted into the outer peripheral grooves 91m and 92m of the ring nuts 91 and 92.

  Both the ring nuts 91 and 92 and the engagement ring 93 are made of a fluororesin such as PFA or PTFE, and have a certain degree of flexibility. Therefore, the procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I of the third separate structure was integrated by engaging the engagement rings 93 with the ring nuts 91 and 92 in advance. First and second ring nuts 91 and 92 are formed, and the integrated first and second ring nuts 91 and 92 are drawn together through a gasket G to be in an assembled state. The first and second fluid supply / discharge port portions 1A and 2A are screwed to form a connection structure between the integrated panel and the fluid device. Of course, in this case, it is a condition that the male screws 1n and 9n are identical to each other, and after the screwing, the ring nuts 91 and 92 can be turned to be tightened more strongly or to be tightened later.

  The following assembly procedure is also possible. That is, in a state where the respective ring nuts 91 and 92 are screwed to the corresponding male screws 1n and 9n, both fluid supply / discharge port portions 1A and 2A are drawn through the gasket G, and the gasket G is pressed against the seal. The drawing process of connecting in a state is performed. This drawing step is performed using a dedicated drawing means different from the maintenance means I. Then, the engagement ring 93 is forcibly expanded and deformed in the outer peripheral grooves 91m and 92m of the first and second ring nuts 91 and 92 that are screwed to the male screws 1n and 9n, respectively. By doing so, a connection structure between the integrated panel and the fluidic device is formed. That is, the engagement ring 93 is engaged with the ring nuts 91 and 92 by forcible fitting.

  The maintenance means I having this configuration literally has only the function of maintaining the seal connection state via the gasket G of the first and second fluid supply / exhaust port portions 1A, 2A. However, since the ring nuts 91 and 92 and the engagement ring 93 can be rotated relative to each other, both of the ring nuts 91 and 92 can be independently rotated, and the seal pressure contact is caused by a change with time, creep or the like. When the force decreases, it is possible to perform a retightening operation by forcibly turning one or both of the ring nuts 91 and 92.

Example 7
FIG. 11 shows a connection structure between the integrated panel and the fluid device according to the seventh embodiment. This is different from the first embodiment only in the maintaining means I, and the fourth different structure maintaining means I will be described. As shown in FIG. 11, the fourth different structure maintaining means I has a protrusion-like first fluid supply which is formed on the upper surface of the integrated panel 1 and has a male screw 1n on the outer peripheral portion and has a circular shape in plan view. The exhaust port 1A, the flange portion 9 formed at the lower end of the valve case 6 with the external thread 9n on the outer periphery of the second fluid supply / exhaust port 2A, and these male screws 1n, 9n can be screwed together. And a cylindrical nut 101 having a female screw 101n.

  The cylindrical nut 101 is formed with a turn inner peripheral portion 101a having a diameter larger than that of the male screws 1n and 9n between the female screw 101n on the distal end side and the inward flange 102 on the proximal end side. Reference numeral 102 denotes an inner diameter that interferes with the flange portion 9 in the axial center P direction. In the assembled state shown in FIG. 11, the male screw 9n of the fluid device 2 is accommodated in the inner peripheral part 101a of the turn, and only the male screw 1n and the female screw 101n of the integrated panel 1 are screwed together. Thus, the first and second fluid supply / exhaust port portions 1A and 2A are maintained in a state of being attracted to each other.

  To assemble, first, the female screw 101n of the cylindrical nut 101 is screwed into the male screw 9n of the flange portion 9 of the fluid device 2 and tightened, and the male screw 9n is passed over and turned to the inner peripheral portion 101a. In this state, the female screw 101n is screwed into the male screw 1n of the integrated panel 1 via the gasket G and tightened. Then, since the cylindrical nut 101 is idled relative to the male screw 9n of the flange portion 9, only the integrated panel 1 is screwed by tightening, and as a result, the integrated panel 1 and the fluid device 2 are drawn, The drawing state in which the fluid passages 3 and 7 are connected in a sealed state by the gasket G is maintained, and the holding means I having a drawing function is configured.

Example 8
FIG. 12 shows a connection structure between the integrated panel and the fluid device according to the eighth embodiment. This is different from the first embodiment only in the maintaining means I, and the maintaining means I having the fifth separate structure will be described. The fifth different structure maintaining means I is a compromise of the first different structure maintaining means I shown in FIG. 6 and the fourth different structure maintaining means I shown in FIG. 12, a first fluid supply / exhaust port 1 </ b> A that has a circular shape in a plan view formed on the upper surface of the integrated panel 1 with a male screw 1 n on the outer periphery, and a second fluid supply / discharge A flange portion 9 formed at the lower end portion of the valve case 6 with a male screw 9n on the outer peripheral portion in the mouth portion 2A, and a cylindrical nut 111 having a female screw 111n that can be screwed to both the male screws 1n and 9n. , And a split ring 112.

  The cylindrical nut 111 is formed with a turn inner peripheral portion 111a having a diameter larger than that of the male screws 1n and 9n between the female screw 111n on the distal end side and the inward flange 113 on the proximal end side. 113 is formed in what has the internal diameter part 113a of the grade which does not interfere with the flange part 9 in the axial center P direction. The split ring 112 is such that a circular ring is divided into three or more pieces (eg, consisting of three fan-shaped members of less than 120 degrees), and the inward flange 113 and the female screw 111n are passed over. It is possible to enter the inner peripheral part 111a from the outside and to form a ring shape in the inner peripheral part 111a. Further, it is also possible to configure the split ring 112 from a single C-shaped body having flexibility such that it can be inserted into the inner peripheral portion 111a by bending to some extent in the radial direction like a snap ring. .

  The assembly using the maintenance means I according to the fifth separate structure is as follows. That is, the split ring 112 is turned into the inner peripheral portion 111a in advance according to the above-described procedure, and the subsequent steps are the same as in the case of the maintaining means I having the fourth separate structure. Therefore, further explanation of the assembly procedure is omitted.

[Other Examples]
(1) Various examples of fitting structures between the fluid device and the gasket will be described below. As shown in FIG. 13 (a), in the fitting structure between the valve 2 and the gasket G, which is a fluid device, one or a plurality of peripheral protrusions 11t for pressure contact are formed on the inner and outer side peripheral surfaces as the annular protrusions 11. Also good shape. In the joined state, the circumferential protrusion 11t is in strong contact with the annular groove 51 of the gasket G to form the primary seal portion S1. In this structure, since the annular protrusion 11 and the annular groove 51 are in contact with each other at a plurality of locations, there is an advantage that the frictional resistance when the annular protrusion 11 is inserted into the annular groove 51 is reduced compared to the case of surface contact. is there. This configuration may be applied to a fitting structure between the integrated panel 1 and the gasket G.

(2) As shown in the left part of FIG. 13B, in the fitting structure between the valve 2 as a fluid device and the gasket G, the tapered peripheral surfaces 12a and 52a are annular in the second fluid supply / exhaust port portion 2A. One or a plurality of peripheral protrusions 12t are formed on the taper outer peripheral surface 12a of the presser protrusion 12, and the peripheral protrusion 12t and the taper inner peripheral surface 52a of the peripheral wall end 52 of the gasket G are pressed to form the secondary seal portion S2. A structure is also possible. Further, as shown in the right part of FIG. 13B, conversely to the above, one or a plurality of peripheral protrusions 53t are formed on the tapered inner peripheral surface 53a of the gasket G, and the peripheral protrusion 53t and the annular presser protrusion 13 are formed. The taper inner peripheral surface 13a may be pressed to constitute the secondary seal portion S2. In addition, this structure may be applied to the fitting structure of the integrated panel 1 and the gasket G, and a structure including both of FIGS. 13A and 13B is also possible.

(3) “Fluid device” in the present invention means a valve, pump, accumulator, fluid storage container, heat exchanger, regulator, pressure gauge, flow meter, heater, flange piping, etc. It is defined as a general term for things. Further, as a means for maintaining with a pulling function, a turnbuckle type (eg, in the structure shown in FIG. 10, one of the male screws 1n and 9n is a reverse screw and a turnbuckle nut straddling both the male screws 1n and 9n is screwed) (A structure to be worn) is also possible.

[Reference example]
As shown in FIG. 14A, in the fitting structure between the valve 2 as a fluid device and the gasket G, the annular peripheral end 53 on the outer side of the gasket G protrudes laterally from the outer peripheral wall 55. It is formed on the side projection and the valley 15 on the outer diameter side is formed in a columnar shape, and the annular side projection 53 and the lower end inner peripheral portion 9b of the annular presser projection 13 of the second fluid supply / discharge port portion 2A are formed. A structure in which pressure contact is made may be used. In this structure, a strong pressure contact force acts between the outer peripheral wall end portion 53 of the gasket G and the annular protrusion 11, and the outer peripheral wall 55 other than the outer peripheral wall end portion 53 does not contact the lower end inner peripheral portion 9b. The frictional resistance when inserting the wall end portion 53 into the valley 15 can be reduced. As a result, the load for inserting the annular protrusion 11 into the annular groove 51 is reduced, and there is an advantage that the assembly is easy. The fitting structure of the inner peripheral wall end 52 and the inner peripheral annular pressing protrusion 12 is the same as that of the first embodiment shown in FIGS.

  As shown in FIG. 14B, in the fitting structure between the valve 2 and the gasket G, which is a fluid device, the gasket G has tapered peripheral surfaces 52a and 53a formed at the upper ends of the inner and outer peripheral wall portions 54 and 55, respectively. It may be symmetrical (same as the gasket G according to the first embodiment), and may have a structure in which the lower end inner peripheral portion 9b of the annular presser protrusion 11 forming the cylindrical valley 15 and the outer peripheral surface 55a of the outer peripheral wall 55 are in surface contact. . In this case, the operation force for inserting the annular protrusion 11 into the annular groove 51 is slightly increased due to the surface contact, but a sufficient pressure contact force between the annular protrusion 11 and the outer peripheral wall portion 53 of the gasket G [FIG. This is almost the same as in the case of the configuration of a). 14A and 14B can be applied to the fitting structure between the integrated panel 1 and the gasket G. FIG.

Sectional drawing which shows connection structure of integrated panel and valve (Example 1) Sectional drawing of the principal part of the gasket used for the connection structure of FIG. Enlarged sectional view of the main part showing details of the fitting structure between the gasket and fluid device Sectional drawing which shows the connection structure of an integrated panel and a bellows type valve (Example 2) Sectional drawing which shows connection structure of integrated panel and filter (Example 3) Sectional drawing of the principal part which shows the 1st another structure of the maintenance means with a drawing function (Example 4) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the 2nd another structure of the maintenance means with a drawing function (Example 5) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the 3rd another structure of the maintenance means with a drawing function (Example 6) Sectional drawing of the principal part which shows the 4th another structure of the maintenance means with a drawing function (Example 7) Sectional drawing of the principal part which shows the 5th another structure of the maintenance means with a drawing function (Example 8) (A), (b) is sectional drawing of the principal part which shows the separate fitting structure of a fluid device and a gasket together (A), (b) is sectional drawing of the principal part which shows the reference example of the fitting structure of a fluid device and a gasket

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Integrated panel 1A 1st fluid supply / exhaust part 1n Male thread part 2 Fluid device 2A 2nd fluid supply / exhaust part 3,4 Fluid path of integrated panel 7, 8 Fluid path of fluid device 9a Through hole 9B Outward flange 10 Mating seal part 11, 21 Annular protrusion 12, 13, 22, 23 Annular presser protrusion 12a, 13a, 22a, 23a Tapered peripheral surface 14, 15, 24, 25 Valley part 51 Annular groove 52, 53 Peripheral wall end part 52a, 53a Tapered peripheral surface 66 Bolt 67 Nut part 81 Cylindrical nut 81n Female thread part 82 Split ring 83 Inward flange 83a Opening G Gasket I Maintenance means P Axis S2 Seal part W Fluid path X Center line orthogonal to center line Z Center line along the axial direction

Claims (6)

The first fluid supply / exhaust portion of the integrated panel having the first fluid supply / exhaust port made of fluororesin in which the tubular fluid passage opens, and the second fluid supply / exhaust made of fluororesin in which the tubular fluid passage opens. The fluid passage is formed by a ring-shaped gasket interposed between the first fluid supply / discharge port portion and the second fluid supply / discharge port portion. When connecting in a sealed state,
In the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion, an annular protrusion is formed on an outer diameter side portion of each fluid passage that opens to each end face,
The gasket is formed on a fluid path formed to communicate the fluid passages corresponding to each other of the first and second fluid supply / exhaust ports, and on end surfaces of the first and second fluid supply / discharge ports. A pair of annular grooves formed in the outer diameter side portion of the fluid path to be fitted to each of the annular protrusions, and the cross-sectional shape is made of a fluororesin having a substantially H-shape,
The first fluid supply / discharge port portion and the second fluid supply / discharge port portion are attracted to each other via the gasket, and the annular protrusion of the first fluid supply / discharge port portion and the annular groove at one end of the gasket And a maintaining means for maintaining a joined state in which the annular protrusion of the second fluid supply / exhaust port portion and the annular groove at the other end of the gasket are fitted to each other to form a fitting seal portion,
Inner and outer peripheral wall end portions protruding in the axial direction to form the annular groove in the gasket are formed on the inner and outer diameter sides of the annular protrusions on the end surfaces of the first and second fluid supply / discharge ports. , An annular presser protrusion is formed that suppresses or prevents the annular groove and the annular protrusion from being expanded and deformed by fitting,
The annular presser projection has a tapered annular projection having a tapered circumferential surface with a side circumferential surface inclined on the annular projection side so that a trough surrounded by the annular projection is recessed. The end portion of the peripheral wall has a tapered peripheral surface that abuts the tapered peripheral surface of the annular presser protrusion, and is formed into a tapered annular protrusion that can enter the valley portion, A connection structure between an integrated panel and a fluid device configured such that, in a joined state, the end of the peripheral wall enters the trough and the tapered peripheral surfaces are pressed against each other.   The connection structure between the integrated panel and the fluid device according to claim 1, wherein the peripheral wall end portion and the annular pressing protrusion are pressed to form a seal portion in the joined state.   A plurality of the first fluid supply / discharge ports are formed in the integrated panel, and a plurality of the second fluid supply / discharge ports are formed in the fluid device corresponding to the number of the first fluid supply / discharge ports. The integrated panel and the fluid device according to claim 1, wherein the plurality of first and second fluid supply / exhaust ports are configured to be freely connected to each other via the gasket on the same plane. Connection structure.   The said maintenance means is comprised by what exhibits the attraction | suction function for attracting the said 1st fluid supply / exhaust part and a 2nd fluid supply / exhaust part, and obtaining the said joining state. A connection structure between the integrated panel and the fluid device according to any one of the above. The maintaining means includes an outward flange formed at at least one end of the first fluid supply / exhaust port and the second fluid supply / exhaust port, and a through-hole formed in the outward flange. And a bolt that is screwed into a nut portion provided on the other of the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion through the through hole,
5. The first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion are configured to be attracted to each other via the gasket by screwing and tightening the bolt to the nut portion. The connection structure of the integrated panel and fluid device as described in 1. A cylindrical nut provided with a female screw portion that can be screwed into a male screw portion formed on an outer peripheral portion of one of the first fluid supply / discharge port portion and the first fluid supply / discharge port portion; , So as to interfere with the outward flange formed at the other end of the first fluid supply / exhaust port and the second fluid supply / discharge port in the axial direction of the first and second fluid supply / discharge ports. A split ring that is externally fitted to one of the other ends of the first fluid supply / exhaust port and the second fluid supply / discharge port;
An inward flange having an opening that allows passage of the outward flange and that interferes with the split ring in the axial direction is formed at one end of the cylindrical nut,
The first fluid supply / discharge port portion and the second fluid supply / discharge port portion are configured to be attracted to each other via the gasket by a tightening operation of the cylindrical nut to the male screw portion. 5. A connection structure between the integrated panel according to 4 and a fluid device.

Images