JP2006348343A - Sliding member, sliding member of compressor, and method for manufacturing sliding member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sliding member having the slidability, in particular, the excellent conformability. <P>SOLUTION: The sliding member has a base material 1, and a sliding layer 2 which is formed on at least a sliding surface side of the base material 1 and contains molybdenum disulfide. The sliding layer 2 consists of a first sliding layer 21 which is formed on the base material 1 and contains ≤ 10 at% of a metal element and/or a compound of the metal element with the total being 100 at%, and a second sliding layer 22 which is laminated on the first sliding layer 21 and does not contain any metal element and/or any compound of the metal element. The metal element and/or the compound of the metal element of the first sliding layer is preferably contained by 3-7 at% when the first sliding layer 21 is 100 at%. In addition, an intermediate layer 3 is preferably provided, which is formed on the surface of the base material 1, located between the base material 1 and the first sliding layer 21, consisting the metal element and/or the compound of the metal element, and contains no molybdenum disulfide. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sliding member having a sliding layer formed of molybdenum disulfide having self-lubricating properties and a method for manufacturing the same.

  A sliding member used for a sliding part such as a compressor is generally composed of a metal base material and a sliding layer formed on the sliding surface side of the sliding member. The sliding property is improved. In many cases, a resin layer for holding a solid lubricant is formed as a sliding layer in addition to a film made of a solid lubricant formed by vacuum deposition or the like. Since the resin layer has a limited solid lubricant content, a sliding layer made of a solid lubricant film is promising for future miniaturization and higher performance of the compressor.

  The sliding layer is required to have wear resistance, seizure resistance, low friction, conformability, and the like. Among them, “compatibility” with respect to the mating material is an important characteristic in sliding. A large load is applied to the sliding surface before the sliding member and the mating member become compatible with each other during sliding, that is, in an initial state where sliding is newly started or in a state immediately after the pressure is increased. At this time, if the conformability is low, the friction increases, leading to wear and seizure. In particular, a sliding member having a hard sliding layer has high hardness and excellent wear resistance, but has a problem that the conformability to the counterpart material is low and the counterpart material is easily worn or seized.

  As an example of the sliding member having a coating made of a solid lubricant as the sliding layer, there are Patent Document 1 and Patent Document 2. Patent Document 1 discloses a coating (sliding layer) comprising a base layer and a surface layer formed thereon. In Patent Document 1, for example, a TiCN film as a base layer and a molybdenum disulfide film to which 3.5 at% titanium is added as a surface layer are used (see Example 1). Patent Document 2 discloses a self-lubricating sliding material having a solid lubricant layer composed of a base material, a first layer covered with the base material, and a second layer covered with the first layer. Has been. In Patent Document 2, for example, the first layer is a layer in which molybdenum disulfide is mixed with 20 at% of a metal element such as titanium, and the second layer is a layer that is formed of molybdenum disulfide and does not contain a metal element. It is a layer containing a metal element less than the layer (see Examples 1 and 3 to 6).

  However, the coating of Patent Document 1 has low conformability because the surface layer contains titanium and is hard. In the sliding material of Patent Document 2, the second layer located on the sliding surface is soft, but when used as a sliding member such as a compressor having a large variation in applied pressure, the conformability may be insufficient. .

Further, CO ₂ is used as a refrigerant in the compressor applied to the refrigeration cycle of various air conditioners from the viewpoint of environmental problems. CO ₂ has a higher operating pressure than conventional refrigerants such as R-12 and R-134a. Therefore, the sliding member is required to further improve the slidability.
JP 2000-1768 A Japanese Patent Laid-Open No. 2001-140057

  The inventors of the present invention have focused on the fact that even if the surface portion of the sliding layer that becomes the sliding surface is made soft, the internal hardness is high and sufficient conformability cannot be obtained. Accordingly, it has been conceived that a sliding member having excellent slidability can be obtained by setting an appropriate amount of the metal element contained in the sliding layer. That is, an object of the present invention is to provide a sliding member having excellent slidability, in particular, conformability.

  Moreover, it aims at providing the manufacturing method of the sliding member suitable for the sliding member of this invention.

  The sliding member of the present invention is a sliding member having a base material and a sliding layer formed on at least the sliding surface side of the base material and containing molybdenum disulfide. A first sliding layer formed on a substrate and containing 10 at% or less (but not including 0) of a metal element and / or a compound of the metal element when the whole is 100 at%, and laminated on the first sliding layer And a second sliding layer not containing a metal element and / or a compound of the metal element. The metal element and / or compound of the metal element in the first sliding layer is preferably included in 3 to 7 at% when the first sliding layer is 100 at%.

  The “sliding layer formed on at least the sliding surface side of the base material and containing molybdenum disulfide” means that the sliding layer is formed directly on the sliding surface of the base material, This includes a state in which the sliding layer is indirectly formed on the sliding surface via an intermediate layer described later.

  Furthermore, it has an intermediate layer formed on the surface of the base material and located between the base material and the first sliding layer and made of a metal element and / or a metal element compound and not containing molybdenum disulfide. preferable. The metal element and / or metal element compound in the intermediate layer may be the same component as the metal element and / or metal element compound contained in the first sliding layer, or may be different components. Good.

  The base material is preferably a sliding part of a compressor, and particularly preferably a compressor of a vehicle air conditioner.

  Further, the sliding member of the compressor of the present invention is formed on the base material and at least the sliding surface side of the base material, molybdenum disulfide, and 10 at% or less when the whole is 100 at% (however, 0 And a sliding layer containing a metal element and / or a compound of the metal element).

Moreover, the manufacturing method of the sliding member of the present invention includes a film forming furnace,
A magnetic field means comprising: a magnetron disposed in the film forming furnace, on which a target containing molybdenum disulfide is placed; and a magnetron on which a target containing a metal element and / or a compound of a metal element is placed;
Holding means for holding the substrate so as to face each of the targets;
An electric field means for applying an electric field to the substrate;
A power supply device for discharging each of the targets;
Using a magnetron sputter ion plating apparatus comprising
The power supply device is operated to discharge the target containing molybdenum disulfide and the target containing a metal element and / or a compound of a metal element, so that the surface of the base material contains molybdenum disulfide to 100 at%. A first film forming step of forming a first sliding layer that sometimes contains a metal element and / or a compound of a metal element of 10 at% or less (but not including 0);
The power supply device is operated to stop the discharge of the target containing the metal element and / or the metal element compound, and the first sliding layer contains molybdenum disulfide and contains the metal element and / or the metal element compound. A second film-forming step of forming a non-second sliding layer;
It is characterized by comprising.

  According to the sliding member of the present invention, when the first sliding layer is 100 at%, the metal element and / or the compound of the metal element is 10 at% or less, more preferably 3 to 7 at%. The surface (surface of the second sliding layer) has an appropriate surface hardness, and the conformability of the second sliding layer that does not contain a metal element and / or a compound of the metal element is exhibited well. As a result, the fluctuation of the frictional force generated during sliding is reduced, and the slidability is improved.

  Furthermore, by forming the intermediate layer between the base material and the first sliding layer, the adhesion between the base material and the sliding layer is improved, so that the sliding characteristics of the sliding member are further improved. be able to.

  In addition, the sliding member of the present invention is effective when applied to a compressor, particularly a compressor of a vehicle air conditioner that has a large fluctuation in applied pressure during operation.

  The sliding member of the compressor of the present invention has a surface hardness that is optimal for sliding by making the metal element and / or the compound of the metal element 10 at% or less when the sliding layer is 100 at%. Thus, the conformability suitable for the sliding member of the compressor is exhibited well. As a result, the fluctuation of the frictional force generated during sliding is reduced, and the slidability is improved.

  The sliding member of the present invention can be manufactured by forming a sliding layer using a magnetron sputter ion plating method (magnetron sputter ion plating apparatus). According to the manufacturing method of the sliding member of the present invention, a sliding layer having high density and high wear resistance can be obtained by the ion assist effect of magnetron sputter ion plating (hereinafter abbreviated as “MSIP”). In addition, since the target containing molybdenum disulfide and the target containing a metal element and / or a compound of a metal element are disposed in the same film forming furnace, the first sliding layer and the second sliding layer are the same. The film can be formed in the film forming furnace.

  The best mode for carrying out the sliding member of the present invention will be described below with reference to FIG. In addition, FIG. 1 is sectional drawing which shows typically an example of the sliding member of this invention.

  The sliding member of this invention has a base material (1) and the sliding layer (2) formed in the at least sliding surface side of a base material (1) and containing molybdenum disulfide.

  The substrate is not particularly limited as long as it is a sliding part of various devices, but is preferably made of metal. For example, iron, steel, aluminum, aluminum alloy containing Mg, Cu, Zn, Si, Mn and the like, copper, copper alloy containing Zn, Al, Sn, Mn and the like are preferable.

  And it is preferable that especially a base material is a sliding component of a compressor. That is, the sliding member of the present invention can be used as a sliding member for a compressor. Specifically, in addition to a swash plate and a shoe, the bearing can be used to support a drive shaft. In addition, it is pivotally supported on the drive shaft of the piston type compressor, and the drive shaft is rotatably supported on the housing of the piston type compressor. It can also be used for a rotary valve that can open and close a gas passage between them and a piston of a piston type compressor.

  It is desirable that the surface of the substrate is processed to have a low surface roughness by grinding or polishing. Specifically, the surface roughness Ra (arithmetic average roughness (JIS B 0601 (1994))) of the surface of the base material on which the sliding layer is formed is preferably 0.5 μm or less. Note that the slidability is improved as the surface roughness of the base material is lower, but Ra is preferably 0.05 to 0.3 μm from the viewpoint of manufacturing cost and the like.

  Further, the surface portion of the base material may be a cured layer cured by various heat treatments. As a hardened layer, the surface layer part hardened | cured by the induction hardening etc. to the steel material, the carbonized layer formed in the base-material surface part by carburizing or nitriding process, a nitride layer, a carbonitride layer, etc. are mentioned. In addition, Ni—P plating may be applied to an aluminum base material. By increasing the surface hardness of the substrate, the adhesion between the substrate and the sliding layer is improved.

The sliding layer (2) is formed on at least the sliding surface side of the substrate (1). The sliding layer (2) is formed on the base material (1) and contains the metal element and / or the compound of the metal element at 10 at% or less (excluding 0) when the whole is 100 at%. It comprises a layer (21) and a second sliding layer (22) which is laminated on the first sliding layer (21) and does not contain a metal element and / or a compound of a metal element. At this time, since the sliding layer includes both the first sliding layer and the second sliding layer, molybdenum disulfide (MoS ₂ ) which is a solid lubricant, the sliding member of the present invention The friction coefficient and the frictional force generated by sliding are kept low, and the sliding property is excellent.

  The first sliding layer mainly contains molybdenum disulfide. Since molybdenum disulfide is a kind of solid lubricant, the layer containing molybdenum disulfide has high lubricity. That is, the ratio of molybdenum disulfide in the first sliding layer is preferably 90 at% or more, and more preferably 93 at% or more when the first sliding layer is 100 at%.

  Furthermore, the first sliding layer contains a metal element. The metal element contained may be a metal element and / or a compound of a metal element. The metal element is preferably composed of at least one element belonging to Groups IV to VI of the periodic table. Elements belonging to Group IV to Group VI include Mo and elements having properties similar to Mo. Therefore, in the first sliding layer, it is convenient to disperse and mix a metal element or a metal element compound in molybdenum disulfide. Among these, at least one of Ti, Cr, W, Zr and V is preferable.

  The metal element and / or compound of the metal element is contained at 10 at% or less, preferably 7 at% or less when the first sliding layer is 100 at%. When the first sliding layer contains a metal element or a compound of a metal element, the first sliding layer has an optimum hardness for sliding and constitutes a sliding layer having excellent wear resistance. Molybdenum disulfide has a hygroscopic property and thus easily deteriorates due to moisture. However, by including a metal element or a compound of a metal element, strength reduction of the first sliding layer and peeling from the substrate are suppressed. These effects are manifested if molybdenum disulfide contains any metal element or metal element compound, but the metal element and / or metal element compound is 3 at% when the first sliding layer is 100 at%. It is preferable that these are included.

  Even a sliding member having a sliding layer composed only of the first sliding layer exhibits excellent slidability. However, the sliding member of the present invention has a second sliding layer laminated on the first sliding layer. Has a dynamic layer. The second sliding layer is a layer made of molybdenum disulfide. When the sliding member slides with the mating member, the outermost surface becomes the sliding surface. Since the second sliding layer does not contain a metal element or a compound of a metal element, it is a soft layer having a lower hardness than the first sliding layer. Therefore, high adaptability to the counterpart material during sliding is exhibited. Furthermore, as described above, since the ratio of the metal element and / or the compound of the metal element in the first sliding layer is 10 at% or less, the sliding member of the present invention has good compatibility with the second sliding layer. To be demonstrated. For example, in the sliding member of the present invention manufactured under the same conditions except that the ratio of the metal element and the compound of the metal element in the first sliding layer is changed, the metal element and the compound of the metal element of the first sliding layer The lower the ratio, the lower the surface hardness of the sliding layer (second sliding layer) (see [Evaluation 1] described later). Therefore, if the metal element of the first sliding layer and / or the compound of the metal element is 7 at% or less, the conformability is further improved. That is, if the metal element and / or the compound of the metal element in the first sliding layer is 3 to 7 at%, both conformability and wear resistance can be achieved.

  The sliding layer preferably has a surface hardness of 10 GPa or less. The surface hardness of the sliding layer is the surface hardness of the sliding surface of the sliding member of the present invention, that is, the hardness of the outermost surface of the sliding layer. The surface hardness can be measured by the nanoindentation method described in detail in the [Example] column. According to the nanoindentation method, only the surface hardness of the surface layer portion of the sliding layer can be measured. If the surface hardness of the sliding layer (second sliding layer) is 8 GPa or less, the conformability is good. Moreover, since the conformability improves as the surface hardness is smaller, it is more preferably 6 GPa or less. However, in order to maintain the function as the sliding layer, it is preferable to have a surface hardness of 3 GPa or more.

  The sliding member of the present invention having high compatibility is slid in a state close to a steady state. Since the sliding member that slides in a steady state is reduced in fluctuation of frictional force generated during sliding, wear and seizure are also reduced, and excellent slidability can be maintained over a long period of time.

  The thickness of the sliding layer, the first sliding layer, and the second sliding layer is not particularly limited. Particularly, if the thickness of the second sliding layer is 0.1 to 0.5 μm, the conformability is good. Further improve. That is, the first sliding layer is preferably 0.5 μm or more, more preferably 0.7 μm or more, and the second sliding layer is 0.05 μm or more, more preferably 0.1 μm or more. Is preferably 0.5 μm or more, and more preferably 0.6 μm or more. The first sliding layer is preferably 2.0 μm or less, more preferably 1.5 μm or less, and the second sliding layer is 1.0 μm or less, more preferably 0.5 μm or less. Is preferably 3.0 μm or less, more preferably 2.0 μm or less.

The sliding member of the present invention is further formed on the surface of the substrate (1) to improve the adhesion between the substrate and the sliding layer, and the substrate (1) and the first sliding layer (21) And an intermediate layer (3) made of a metal element and / or a compound of a metal element and not containing molybdenum disulfide. As the metal element or the compound of the metal element, the same metal element (described above) as that of the first sliding layer can be used. In particular, the metal element is at least one of Ti, Cr, W, Zr and V. If it is a seed | species, adhesiveness will improve further. The first sliding layer and the intermediate layer may contain the same component metal element or may be different components. Specific examples of the intermediate layer include a metal-based intermediate layer made of a single element belonging to Groups IV to VI of the periodic table, TiN, TiC, TiCN, CrN, ZrN, VC, TiO ₂ , and TiAlN. Ceramic intermediate layers such as TiCNO, TiCrN, WC, W ₂ C, ZrO, and ZrO ₂ may be used. Moreover, the intermediate layer which combined the metal layer and the nitride layer may be sufficient. Since the nitride layer has high hardness, it is preferable because the deformation of the sliding layer can be suppressed to suppress cracks and peeling occurring in the sliding layer, and the wear resistance is also improved.

  The thickness of the intermediate layer is not particularly limited, but is preferably 0.01 μm or more, more preferably 0.05 μm or more, preferably 3.0 μm or less, more preferably 2.0 μm or less.

  Note that the sliding layer and the intermediate layer are preferably vapor-deposited films formed on the surface of the substrate. As a vapor deposition method, a film can be formed by a CVD method (chemical vapor deposition method) such as a plasma CVD method or a thermal CVD method, a PVD method (physical vapor deposition method) such as a vacuum vapor deposition method or sputtering. The vapor deposition method may be appropriately selected according to the material of each layer to be produced, but the magnetron sputter ion plating (MSIP) method and the closed field unbalanced magnetron sputter ion plating (CFUBMSIP) method are optimal. According to these methods, since the film quality of molybdenum disulfide is improved by ion irradiation (ion assist effect), a sliding layer having high density and high wear resistance can be obtained.

  The MSIP apparatus mainly includes a film forming furnace, a magnetic field means disposed in the film forming furnace, a holding means for holding a base material such as a sliding component, an electric field means for applying an electric field to the base material, and a target. A power supply device for discharging. The magnetic field means mainly comprises a magnetron, and a target containing molybdenum disulfide or the like is placed on the magnetron. Usually, the magnetron has an inner pole located on the central axis and an outer pole located on the outer periphery thereof, and is arranged so that the inner pole and the outer pole have different polarities. One or more magnetrons are arranged in the same film forming furnace. At this time, if a magnetron on which a target containing molybdenum disulfide is placed and a magnetron on which a target containing a metal element and / or a compound of a metal element is placed in the same film formation furnace, the first slide is formed. The dynamic layer and the second sliding layer can be formed in the same film formation furnace. Furthermore, it is desirable to arrange the magnetrons in a ring shape so that the outer poles of the plurality of magnetrons have different polarities, because a closed magnetic field is formed as a whole.

  The holding means only needs to hold the substrate so that at least the film formation surface of the substrate faces each target. When a plurality of magnetrons are arranged in a ring shape, the base material is preferably arranged in the center of the ring. At this time, the substrate may be rotated with respect to the center axis of the ring.

  When a target containing molybdenum disulfide and a target containing a metal element and / or a compound of a metal element are placed in the same film forming furnace, first, a sputtering gas such as argon is used in the film forming furnace. Then, the power supply device is operated to discharge the target containing molybdenum disulfide and the target containing the metal element and / or the compound of the metal element to form the first sliding layer (first film forming step) ). Next, the discharge of the target containing the metal element and / or the compound of the metal element is stopped by operating the power supply device (second film forming step). Since the discharging target is a target containing molybdenum disulfide, the second sliding layer can be formed. Further, when forming the intermediate layer before the formation of the sliding layer, if the intermediate layer and the first sliding layer have the same metal element components, the intermediate layer and the sliding layer are placed in the same deposition furnace. Can be formed. By forming the intermediate layer and the sliding layer (first sliding layer, second sliding layer) in the same film forming furnace, the number of manufacturing steps of the sliding member can be reduced. In addition, contamination of the surface of the intermediate layer and the first sliding layer attached when taking out from the film forming furnace can be suppressed, and the adhesion with the next layer to be laminated is improved, which is desirable.

The sliding member of the present invention can be suitably used for a compressor. This is because the sliding parts of the compressor slide at high speed and high surface pressure, and depending on the operating conditions, the oil film is destroyed and the lubrication state becomes poor. In particular, it is effective to apply to a compressor of a vehicle air conditioner in which the fluctuation of the applied pressure during operation is large. In the sliding member of the present invention, the ratio of the metal element and / or the compound of the metal element when the first sliding layer is 100 at% is set to 10 at% or less. Even in a state immediately after the pressure rises, the compatibility with the counterpart material is excellent. As a result, the fluctuation of the frictional force during sliding is reduced, and wear and seizure on the counterpart material are suppressed. Further, as described above, since the compressor using CO ₂ as the refrigerant has a high operating pressure, it is desirable to use the sliding member of the present invention having excellent conformability.

  The sliding member of the present invention is preferably used for a swash plate and a shoe of a swash plate type compressor among the compressors. The swash plate and the shoe may slide relative to each other in a dry state without lubricating oil. Even when sliding in such a very severe unlubricated state, it is desirable not to cause seizure or wear. If the sliding member of the present invention is used as a swash plate or a shoe, the fluctuation of the friction torque is reduced by improving the conformability, so that a swash plate type compressor having excellent slidability is constructed. The required conditions can be fully met.

  The sliding member of the compressor of the present invention has the same configuration as the above-described sliding member of the present invention except that the first sliding layer is a sliding layer and the second sliding layer is not formed. In the sliding member of the compressor of the present invention, when the sliding layer is set to 100 at%, the metal element and / or the compound of the metal element is set to 10 at% or less, so that the compatibility of the sliding member of the compressor is sufficient. Is obtained. Moreover, if the surface hardness of the sliding layer is 10 GPa or less, the conformability is good.

  As mentioned above, although embodiment of the sliding member of this invention was described, this invention is not limited to the said embodiment. The present invention can be carried out in various forms with modifications and improvements that can be made by those skilled in the art without departing from the gist of the sliding member of the present invention.

  Below, the Example of the sliding member of this invention is described using Table 1 and FIGS. 2-9 with a comparative example.

[Example 1]
As a base material, a compressor swash plate (spheroidal graphite cast iron product: FCD600 (φ96 mm × 6 mm)) was prepared. Grinding was performed on both end faces of the swash plate so that the surface roughness Ra was 0.05 to 0.3 μm, and a sliding layer was formed by the CFUBMSIP method. Below, the film-forming procedure of a sliding layer is demonstrated. For the CFUBMSIP apparatus, UDP850 / 4 manufactured by Teer Coatings Limited was used. This device has one titanium (Ti) target and three molybdenum disulfide (MoS ₂ ) targets in the chamber, and the four targets are independently operated and discharged by the power supply device. Can do.

A swash plate was placed in the chamber of the film forming apparatus, and the inside of the chamber was evacuated to an ultimate vacuum of 0.01 mTorr (1.3 × 10 ⁻³ Pa). Next, argon gas was supplied into the chamber, ion bombarding was performed as a pretreatment before film formation, and the surface of the swash plate was etched.

After the ion bombardment, the degree of vacuum in the chamber was adjusted to 6 mTorr (0.8 Pa). Then, only the Ti target was glow-discharged, and a 0.1 μm Ti film was formed by discharge for 25 minutes. Subsequently, the Ti target and the MoS ₂ target were glow-discharged to form a 1.0 μm Ti-containing MoS ₂ film by discharging for 110 minutes. Thereafter, only the MoS ₂ target was glow-discharged to form a 0.5 μm MoS ₂ film by discharging for 50 minutes.

By the above film formation, a swash plate of Example 1-1 having a Ti film as an intermediate layer, a MoS ₂ film containing 5 at% Ti as a first sliding layer, and a MoS ₂ film as a second sliding layer was obtained. .

  Moreover, the swash plate of Example 1-2 was obtained like Example 1-1 except not forming a 2nd sliding layer.

[Example 2]
A swash plate of Example 2-1 and Example 2-2 (first sliding layer only) was prepared in the same manner as in Example 1 except that the first sliding layer was a MoS ₂ film containing 10 at% Ti. did.

[Comparative Example 1]
A swash plate of Comparative Example 1-1 and Comparative Example 1-2 (only the first sliding layer) was prepared in the same manner as in Example 1 except that the first sliding layer was a MoS ₂ film containing 15 at% Ti. did.

  Table 1 shows the ratio and thickness of Ti contained in the intermediate layer and the sliding layer (first sliding layer, second sliding layer, and first sliding layer) of the above examples and comparative examples. .

[Comparative Example 2]
The swash plate of Comparative Example 2 was formed in the same manner as in Example 1 except that a resin layer in which a solid lubricant made of molybdenum disulfide, graphite, and polytetrafluoroethylene powder was held by a polyamide resin was formed as the sliding layer. Produced.

[Evaluation 1]
For the swash plates of Examples 1-1 and 1-2, Examples 2-1 and 2-2, and Comparative Examples 1-1 and 1-2, the surface hardness of the sliding surface was measured by the nanoindentation method. As the nano indenter, a Triboscope manufactured by HYSITRON Corporation attached to an atomic force microscope (SPM9500J2 manufactured by SHIMADZU) was used. The measurement was performed with a load of 250 μN. At this time, the indenter indentation depth of the nanoindenter was about 40 nm. The results are shown in FIG.

  According to FIG. 2, in Examples 1-2, 2-2 and Comparative Example 1-2 in which the sliding layer is composed only of the first sliding layer, the smaller the Ti ratio of the sliding layer, the more the sliding surface. The surface hardness tends to decrease. And in Examples 1-2 and 2-2 in which Ti of the sliding layer is 10 at% or less, the surface hardness of the sliding layer was 7 GPa or less. The swash plates of Examples 1-2 and 2-2 having low surface hardness are excellent in wear resistance and conformability.

  In Examples 1-1, 2-1 and Comparative Example 1-1, in which the sliding layer is composed of the first sliding layer and the second sliding layer, the smaller the Ti ratio of the first sliding layer, The surface hardness of the sliding surface tends to decrease. In Comparative Example 1-1, the surface hardness of the sliding surface is the same as that of the first sliding layer (Comparative Example 1-2) containing 15 at% Ti even though the second sliding layer does not contain Ti. It had the same hardness. On the other hand, in Examples 1-1 and 2-1, in which Ti of the first sliding layer was 10 at% or less, the surface hardness of the sliding surface was 6 GPa or less. In particular, the swash plate of Example 1-1 in which the Ti of the first sliding layer is 5 at% has high hardness of the first sliding layer and excellent wear resistance, and the surface hardness of the sliding surface is reduced. It was a swash plate with excellent conformability.

  In addition, Examples 1-2 and 2-2 were swash plates having lower surface hardness and excellent conformability than the swash plate of Comparative Example 1-1 in which the second sliding layer was formed.

[Evaluation 2]
A seizure test was performed on the swash plate of each example. In the seizure test, the sliding surface of the swash plate and the sliding contact surface of the shoe for the compressor (NiPB plating was applied to the sliding surface side of the high Si content aluminum alloy base material) were in contact with each other. The swash plate was rotated. At this time, the test was performed by rotating the swash plate at a sliding speed of 7.5 m / s while spraying the refrigerating machine oil (ND8) on the sliding portion and increasing the test load stepwise. The results are shown in FIGS. 3 to 6 are graphs showing the friction torque with respect to the test time of each swash plate, and show the test load together with the friction torque.

  In Example 1-2 (see FIG. 5), seizure did not occur until the test load exceeded 4000N. And in Example 1-1 (refer FIG. 3), even if it increased the test load, the fluctuation | variation of the friction torque was hardly seen, and even if the test time became 5000 seconds, seizure did not arise. That is, in the swash plate of Example 1-1, the conformability of the sliding layer to the shoe was further improved by forming the second sliding layer. Similarly, in Example 2-1 (see FIG. 4), the variation in the friction torque was suppressed to be smaller than that in Example 2-2, and seizure did not occur until the test load exceeded 5000N.

[Evaluation 3]
The seizure test was performed on the swash plates of Example 2-2 and Comparative Example 2. The test was performed in the same manner as in Evaluation 2, except that the rotation of the swash plate was 1750 rpm and the test load was increased stepwise from 500 N to 5800 N in 3000 seconds from the start of the test. The dynamic friction coefficient with respect to the test time is shown in FIG.

  Further, the swash plate of Example 2-2 and Comparative Example 2 was subjected to a seizure test in the same manner as in Evaluation 2 except that the swash plate was not lubricated (no lubricant sprayed). The friction torque with respect to the test time is shown in FIG.

  The swash plate of Example 2-2 was excellent in durability as compared with Comparative Example 2 in which the sliding layer contained a resin. In particular, in the test while spraying the lubricating oil (see FIG. 7), the test time of Example 2-2 was significantly increased. Moreover, in Example 2-2, the value of the dynamic friction coefficient at the time of sliding and the friction torque under non-lubrication was kept lower than the comparative example 2. In addition, if the swash plates of Examples 1-1 and 1-2 and Example 2-1 that are superior in compatibility and durability as compared to Example 2-2 are used, further excellent results can be obtained. Easily guessed.

  Further, when the swash plate of each embodiment is applied to a swash plate type compressor, the configuration is as follows.

(Configuration of swash plate compressor)
FIG. 9 shows the configuration of the swash plate compressor. As shown in FIG. 9, the drive shaft 90 is housed in a swash plate chamber 94 formed by a cylinder block 92 and a front housing 93, and is rotatably supported by a radial bearing. A plurality of bores 95 are disposed in the cylinder block 92 at positions surrounding the drive shaft 90. A single-headed piston 96 is fitted in each bore 95 so as to reciprocate. In the swash plate chamber 94, a rotor 97 is coupled to the drive shaft 90, and a swash plate 98 is fitted behind the rotor 97. In particular, in the variable capacity type single-head swash plate compressor, the swash plate 98 can be tilted around a fulcrum, and the balance of gas pressure acting on both end faces of the piston 96 based on the pressure change in the swash plate chamber 94 The tilt displacement of the swash plate 98 is controlled. The swash plate 98 has a sliding layer (not shown) on the outer peripheral side of both end faces, and the surface of this sliding layer becomes the sliding face 98p. The sliding contact surface 99p of the shoe 99 is in contact with the sliding surface 98p. These shoes 99 are engaged with the hemispherical seat 96 p of the piston 96. When the piston 96 is linked to the swash plate 98 via the shoe, the rotational motion of the swash plate 98 is converted into the linear motion of the piston 96 and the medium is compressed.

It is sectional drawing which shows typically an example of the sliding member of this invention. 3 is a graph showing surface hardness of sliding surfaces of swash plates of Examples 1 and 2 and Comparative Example 1. It is a graph which shows the fluctuation | variation of the friction torque of the swash plate of Example 1-1 in a seizure test. It is a graph which shows the fluctuation | variation of the friction torque of the swash plate of Example 2-1 in a seizure test. It is a graph which shows the fluctuation | variation of the friction torque of the swash plate of Example 1-2 in a seizure test. It is a graph which shows the fluctuation | variation of the friction torque of the swash plate of Example 2-2 in a seizure test. It is a graph which shows the friction coefficient of Example 2-2 and the swash plate of the comparative example 2 in a seizure test. It is a graph which shows the fluctuation | variation of the friction torque of the swash plate of Example 2-2 and the comparative example 2 in a non-lubricated seizure test. It is a figure which shows typically the cross section of the swash plate type compressor which applied the sliding member of this invention to the swash plate.

Explanation of symbols

1: base material 2: sliding layer 21: first sliding layer 22: second sliding layer 3: intermediate layer

Claims (25)

A sliding member comprising a base material and a sliding layer formed on at least the sliding surface side of the base material and containing molybdenum disulfide, wherein the sliding layer includes:
A first sliding layer formed on the base material and containing 100 at% or less of the metal element and / or a compound of the metal element (not including 0),
A second sliding layer that is laminated on the first sliding layer and does not contain a metal element and / or a compound of a metal element;
A sliding member comprising:   2. The sliding member according to claim 1, wherein the metal element and / or the compound of the metal element of the first sliding layer is contained in 3 to 7 at% when the first sliding layer is 100 at%.   The sliding member according to claim 1, wherein the sliding layer has a surface hardness of 6 GPa or less.   The sliding member according to claim 1, wherein the metal element is made of at least one element belonging to Groups IV to VI of the periodic table.   The sliding member according to claim 4, wherein the metal element is at least one of Ti, Cr, W, Zr, and V.   The sliding member according to claim 1, wherein the sliding layer is a vapor deposition film.   The sliding member according to claim 6, wherein the sliding layer is a deposited film formed by a magnetron sputter ion plating method.   The sliding member according to claim 1, wherein the second sliding layer has a thickness of 0.1 to 0.5 μm.   The sliding member according to claim 1, wherein the first sliding layer has a thickness of 0.5 to 2.0 μm.   Furthermore, it has an intermediate | middle layer which is formed in the surface of the said base material, is located between the said base material and said 1st sliding layer, consists of a metal element and / or a compound of a metal element, and does not contain molybdenum disulfide. The sliding member according to 1.   The sliding member according to claim 1, wherein the base material is a sliding component of a compressor.   The sliding member according to claim 11, wherein the compressor is a compressor of a vehicle air conditioner. A substrate;
It is formed on at least the sliding surface side of the base material, and contains molybdenum disulfide and a metal element and / or a compound of a metal element of 10 at% or less (excluding 0) when the whole is 100 at%. A sliding layer;
A sliding member for a compressor, comprising:   The sliding member for a compressor according to claim 13, wherein the metal element and / or the compound of the metal element in the sliding layer is contained in an amount of 3 to 7 at% when the sliding layer is 100 at%.   The sliding member for a compressor according to claim 13, wherein the sliding layer has a surface hardness of 10 GPa or less.   The sliding member for a compressor according to claim 13, wherein the metal element is made of at least one element belonging to Groups IV to VI of the periodic table.   The sliding member for a compressor according to claim 16, wherein the metal element is at least one of Ti, Cr, W, Zr, and V.   The sliding member for a compressor according to claim 13, wherein the sliding layer is a vapor deposition film.   The sliding member for a compressor according to claim 18, wherein the sliding layer is a deposited film formed by a magnetron sputter ion plating method.   Furthermore, it has an intermediate | middle layer which is formed in the surface of the said base material, is located between the said base material and the said sliding layer, consists of a metal element and / or a compound of a metal element, and does not contain molybdenum disulfide. The sliding member of the compressor.   The compressor sliding member according to any one of claims 13 to 20, wherein the compressor is a compressor of a vehicle air conditioner.   The compressor sliding member according to claim 21, wherein the base material is a swash plate of a swash plate compressor.   The sliding member for a compressor according to claim 21, wherein the base material is a shoe of a swash plate compressor. A deposition furnace;
A magnetic field means comprising: a magnetron disposed in the film forming furnace, on which a target containing molybdenum disulfide is placed; and a magnetron on which a target containing a metal element and / or a compound of a metal element is placed;
Holding means for holding the substrate so as to face each of the targets;
An electric field means for applying an electric field to the substrate;
A power supply device for discharging each of the targets;
Using a magnetron sputter ion plating apparatus comprising
The power supply device is operated to discharge the target containing molybdenum disulfide and the target containing a metal element and / or a compound of a metal element, so that the surface of the base material contains molybdenum disulfide to 100 at%. A first film forming step of forming a first sliding layer that sometimes contains a metal element and / or a compound of a metal element of 10 at% or less (but not including 0);
The power supply device is operated to stop the discharge of the target containing the metal element and / or the metal element compound, and the first sliding layer contains molybdenum disulfide and contains the metal element and / or the metal element compound. A second film-forming step of forming a non-second sliding layer;
The manufacturing method of the sliding member characterized by comprising.   The magnetron sputter ion plating apparatus has an inner pole and an outer pole with different polarities, and two or more magnetrons are arranged in a ring shape so that the outer poles have different polarities, 25. The method for manufacturing a sliding member according to claim 24, wherein the substrate is a closed field unbalanced magnetron sputter ion plating apparatus held at the center of the magnetron arranged in a ring shape.

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