JP2006341228A - Coating applicator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To precisely remove a precipitated solution stuck to the bottom surface of an ink-jet head. <P>SOLUTION: A ring member 8 which surrounds a nozzle plate 13 from the outside and has almost the same plane as the bottom surface (the tip surface) of the nozzle plate 13 is fit freely detachably to the head 1 by a magnet 8a. Even when the solution is spread along the bottom surface of the nozzle plate and dried, if the ring member 8 is exchanged, a precipitate to be generated when the solution is evaporated/dried can be removed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an improvement of an ink jet type coating apparatus that sprays a solution from a discharge hole of a nozzle plate to coat a substrate surface.

  In a manufacturing process of a liquid crystal display device or a semiconductor device, there is a film forming process for forming a circuit pattern on a substrate such as a glass substrate or a semiconductor wafer. In the film forming process, an ink jet type coating apparatus is used in which a solution for forming a functional thin film is sprayed from a nozzle plate and applied to a substrate surface.

  The ink jet type coating apparatus is configured to eject (discharge) a solution such as ink from a nozzle plate provided with a large number of small holes (orifices) as small discharge holes of several tens of μm.

  FIG. 8 is a cross-sectional view of a head including a nozzle plate of a conventional coating apparatus. The head 1 includes a head main body 11, and a flexible plate 12 is provided on the lower surface of the head main body 11.

  The flexible plate 12 is covered with a plate-like nozzle plate 13, and a main pipe 14 a and a liquid chamber 14 b are formed on the nozzle plate 13.

  FIG. 9 is a bottom view of the head 1 to which the nozzle plate 13 is attached. As shown in FIG. 9, the nozzle plate 13 has a plurality of pores having a pitch P along the longitudinal direction (Y direction in the drawing) of the head body 11. 13a is provided in a bottom surface (discharge surface) in a zigzag manner.

  As shown in FIG. 8, a liquid supply hole 15 communicating with the main pipe 14a is formed at one end portion in the longitudinal direction of the head body 11, and functionalities such as an alignment film and a resist are provided from the liquid supply hole 15 to the main pipe 14a. Since the solution for forming the thin film is supplied, the liquid chamber 14b is filled with the supplied solution.

  In addition, a plurality of piezoelectric elements 16 are provided on the upper surface of the flexible plate 12 so as to face the respective pores 13 a of the nozzle plate 13.

  Each piezoelectric element 16 expands and contracts by voltage drive by a drive unit 17 provided in the head body 11 and partially deforms the flexible plate 12, so that the nozzle plate 13 positioned facing the piezoelectric element 16 is The solution is sprayed from the pores 13a and applied onto the substrate to be transported and moved.

  A recovery hole 18 communicating with the main pipe 14 a is formed at the other longitudinal end of the head body 11. The remaining solution supplied from the liquid supply hole 15 to the main pipe 14 a and the liquid chamber 14 b is discharged from the recovery hole 18. The

  As described above, the ink jet type coating apparatus is configured to eject the solution from the pores 13 a formed toward the outer surface of the nozzle plate 13, but the solution from the pores 13 a is ejected. At this time, a part of the solution spreads and adheres to the bottom surface (discharge surface) of the nozzle plate 13.

In addition, if the fine holes 13a of the nozzle plate 13 are clogged or if dust adhering to the bottom surface blocks the fine holes 13a, the spraying operation of the solution becomes unstable and the coating quality deteriorates. A method of wiping off the bottom surface of the nozzle plate 13 has been proposed. (For example, refer to Patent Document 1).
JP-A-6-115083

  As described above, in the ink jet type coating apparatus, when the solution is ejected from the pores 13 a of the nozzle plate 13, a phenomenon that a part of the solution spreads outside on the bottom surface of the nozzle plate 13 is seen.

  In the solution or the like that forms the functional thin film spreading on the bottom surface of the nozzle plate 13, the volatile component contained in the solution evaporates when exposed to air, the solid component contained in the solution is deposited and dried, and eventually sticks to the bottom surface. To adhere.

  The solution spreading on the bottom surface of the nozzle plate 13 is not easily dried in the vicinity of the pores 13a because the solution is ejected from the pores 13a one after another during the application, but is separated from the pores 13a. At the position, the momentum is slow, so that it dries relatively early, and adheres to the bottom so that precipitates are deposited.

  In the conventional ink jet type coating apparatus, the solution adhering to the bottom surface of the nozzle plate is wiped off by a wiping member such as an elastic blade between coating operations. As shown in FIG. Since the solution in the region away from the 13 pores 13a (portion indicated by the mesh pattern) is dried and adheres relatively early, it may not be easily removed even if wiped off with a wiping member.

  Further, even if the wiping member can peel off a part of the dried solution, the dried piece does not fall down completely, but sticks to the wet bottom as it is or closes the pores of the nozzle plate. There has been a demand for an improvement due to problems such as partial drying pieces falling on the substrate due to vibration or impact during solution application.

  Therefore, the present invention is capable of easily and appropriately removing the deposited deposit even if the solution spreading on the bottom surface of the nozzle plate is dried and deposits are deposited, and improves the quality of the coating film formed by coating. An object of the present invention is to provide a coating apparatus capable of performing the above.

  The present invention provides an inkjet type coating apparatus that sprays a solution from a discharge hole provided in a nozzle plate and applies the solution onto a substrate, and is provided detachably on the nozzle plate, and is substantially the same as a discharge surface on which the discharge hole opens. An annular member forming a plane is provided.

  According to the present invention, it is possible to easily remove a solution that dries relatively early and deposits, or a solution that has already adhered as precipitates, by replacing the ring member.

  Hereinafter, a first embodiment of a coating apparatus according to the present invention will be described in detail with reference to FIGS. The same components as those in the conventional configuration shown in FIGS. 8 to 10 are denoted by the same reference numerals, and detailed description thereof is omitted.

  1 is a schematic configuration diagram showing a coating apparatus according to a first embodiment of the present invention, and FIG. 2 is a right side view of a main part of FIG.

  As shown in FIGS. 1 and 2, the coating apparatus has a base 2, and a pair of rails 2 a spaced apart from each other at a predetermined interval on the upper surface of the base 2 along the longitudinal direction of the base 2 (arrow X direction in the drawing). The transport table 2b that is laid and passed to the rail 2a is driven by a drive source (not shown) so that it can run.

  A large number of support pins 2c are provided on the upper surface of the transport table 2b, and a glass substrate W used in, for example, a liquid crystal display device is supplied to and supported by these support pins 2c.

  Above the substrate W supported by the transfer table 2b, three heads 1 for ejecting (discharging) a solution for forming a functional thin film on the substrate W by an inkjet method are orthogonal to the traveling direction of the substrate W. It is arranged in a line along the direction (arrow Y direction shown in the figure).

  FIG. 3A shows a longitudinal sectional view of the head 1. The head 1 includes a head main body 11, and a flexible plate 12 is provided on the lower surface thereof.

  The flexible plate 12 is covered with a plate-like nozzle plate 13, and a main pipe 14 a and a liquid chamber 14 b are formed on the nozzle plate 13.

  FIG. 3B shows a bottom view of the head 1. As shown in FIG. 3B, the bottom surface (ejection surface) of the nozzle plate 13 has a direction (arrow) orthogonal to the transport direction of the substrate W. A plurality of fine holes 13a as discharge holes are formed in a zigzag pattern along the (Y direction).

  This plate-like nozzle plate 13 has a stepped portion, and is configured such that the central portion provided with the pores 13a protrudes downward, and is substantially the same as the bottom surface of the nozzle plate 13 while surrounding the central portion from the outside. An annular member 8 having a flat surface (bottom surface) is detachably fitted.

  The ring member 8 is formed of a magnetic material such as iron or nickel, and a magnet 8 a is embedded in the head 1 so as to face the peripheral edge of the ring member 8. Therefore, the ring member 8 is drawn into the magnet 8a and stabilized while being fitted into the nozzle plate 13 of the head 1.

  As in the prior art, a liquid supply hole 15 communicating with the main pipe 14a is formed at one end in the longitudinal direction (arrow Y) of the head body 11, and the solution L is supplied from the liquid supply hole 15 through the main pipe 14a. Is supplied and filled in the liquid chamber 14b.

  In addition, a plurality of piezoelectric elements 16 facing the respective pores 13 a of the nozzle plate 13 are provided on the upper surface of the flexible plate 12, and each piezoelectric element 16 is driven from a driving unit 17 provided in the head body 11. Since the voltage is supplied, the solution is sprayed and applied from the fine holes 13a positioned facing the piezoelectric element 16 toward the upper surface of the substrate W to be transported.

  A recovery hole 18 communicating with the main pipe 14 a is formed at the other longitudinal end of the head body 11, and the solution L supplied from the liquid supply hole 15 to the main pipe 14 a and the liquid chamber 14 b is recovered from the recovery hole 18.

  Further, as shown in FIG. 1, the supply pipe 3a and the recovery pipe 4a are connected in common to the three heads 1 arranged in a line along the direction of the arrow Y, via the on-off valves 3aa and 4aa. The supply pipe 3a and the collection pipe 4a are connected via a communication valve 5 at the tip.

  The proximal end of the supply pipe 3a is connected to the bottom of the solution tank 6 in which the solution L is stored, and the recovery pipe 4a is connected to a storage tank 7 that stores the solution supplied to the solution tank 6 via the main recovery valve 4ab. Has been.

  The base end of the recovery pipe 4 a also serves as a supply pipe, and a supply branch pipe 3 b having a supply valve 3 ba is branched from the base end and connected to the bottom of the solution tank 6.

  An atmosphere release pipe 6a provided with an opening / closing control valve 6aa is connected to the upper part of the solution tank 6, and the inside of the solution tank 6 is communicated with the atmosphere by opening the opening / closing control valve 6aa.

  A gas supply pipe 6b provided with an open / close control valve 6ba is connected to the upper part of the solution tank 6, and an inert gas such as nitrogen is supplied to the gas supply pipe 6b from a gas supply source (not shown). A filter 6bb and an opening / closing control valve 6bc are sequentially connected upstream of the opening / closing control valve 6ba, and a throttle valve 6bd is provided in parallel to the opening / closing control valve 6bc. The throttle valve 6bd and the opening / closing control valve 6bc Gas flow rate control means is configured.

  On the other hand, similarly to the solution tank 6, an atmosphere open pipe 7a having an open / close control valve 7aa is connected to the upper part of the storage tank 7, and a gas supply pipe 7b having an open / close control valve 7ba is further connected. . A filter 7bb and an open / close control valve 7bc are sequentially connected to the gas supply pipe 7b, and a throttle valve 7bd is provided in parallel to the open / close control valve 7bc.

  Further, the liquid level of the solution L in the solution tank 6 is detected by the level sensor 6c, and when the level sensor 6c detects that the liquid level of the solution L is below a predetermined level, the storage tank 7 is based on the detection. Solution is replenished. That is, the solution L is supplied to the solution tank 6 by pressurizing the solution L in the storage tank 7 with the inert gas supplied through the opening / closing control valve 7ba. Thereby, the liquid level in the solution tank 6 is maintained at a constant level.

  Therefore, as shown in FIG. 2, one end surface of the transport table 2 b transports one vertical side so as to correspond to the heads 1 having three L-shaped side surfaces arranged side by side. It is fixedly attached to the end surface of the table 2b.

  The upper and lower cylinders 22 are vertically installed on the horizontal plate portion of the mounting member 21.

  A table 24 that also serves as a recovery tank is attached to the operating rod of the upper and lower cylinders 22 via an elastic member 23.

  A wiping member 25 formed of an elastic material such as blade-like rubber is attached to the table 24.

  A guide plate 26 is provided on one side of the table 24, and a guide member 26a is provided on the guide plate 26. The guide member 26a is provided on a guide rail 2ba provided on the end surface of the transport table 2b along the vertical direction. It is guided and can move up and down.

  With the above configuration, the table 24 is driven by the drive of the upper and lower cylinders 22, and the guide plate 26 can be moved up and down along the guide rail 2ba.

  Accordingly, the table 24 is raised to bring the wiping member 25 into contact with the lower surface of the head 1, and the transport table 2 b is reciprocated in this state, whereby the wiping member 25 causes the lower surface of the head 1, that is, the bottom surface of the nozzle plate 13 (discharge). Surface) and the solution adhering to the bottom surface of the ring member 8 connected to the surface) can be wiped off.

  As shown in FIG. 2, the rail 2a on the base 2 corresponds to the three heads 1, and is similar to the transfer table 2b and is guided by the rail 2a and can move in the X direction. Is placed.

  The delivery mechanism 9 moves on the rail 2 a, reaches the lower position of the head 1, receives the ring member 8 detachably attached to the nozzle plate 13 of the head 1, and conveys the ring member 8. The transfer operation of the head 1 to the nozzle plate 13 is performed.

  That is, the delivery mechanism 9 is provided with a receiving chuck 9d and a delivery chuck 9e corresponding to the table 9c mounted on the movable base 9a that is passed between the pair of rails 2a. It is attached via cylinders 9da and 9ea.

  Accordingly, the receiving chuck 9d and the transferring chuck 9e are moved between the head 1 and the ring member 8 between the head 9 and the nozzle plate 13 by the movement operation in the Z direction shown in the figure by the cylinders 9da and 9ea and the opening / closing operation of the chuck. Delivery is possible.

  Next, the operation will be described.

  At the position shown in FIG. 2, the substrate W is supplied and supported on the transfer table 2b.

  When the substrate W is supplied, the transfer table 2b moves in the right direction in the drawing at a preset speed. During the movement of the transport table 2b, the solution L is sprayed from the pores 13a of the head 1 in accordance with the timing at which the coating pattern formation region on the substrate W passes below the pores 13a of the head 1. .

  When the transfer table 2b reaches the moving end on the right side of the rail 2a, the transfer table 2b turns back and moves to the left in the drawing at the set speed. During this movement, the solution L is sprayed onto the substrate W from the pores 13a of the head 1 in the same manner as when moving in the right direction.

  Due to the injection of the solution L from the pores 13a of the head 1 performed during the reciprocating movement of the transfer table 2b in the rightward direction and the backward movement in the leftward direction, it is scheduled on the substrate W. Solution L is applied in a pattern.

  The substrate W on which the solution L has been applied is carried out to a subsequent process such as a coating film leveling process or a drying process by a transfer device (not shown).

  At this time, as shown in FIG. 4, the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8 are coated with the solution L on the substrate W, as shown in FIG. ) L is attached.

  Therefore, when the substrate 2 is carried out, the solution L attached to the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8 is wiped off by the wiping member 25.

  That is, as shown in FIG. 2, the wiping member 25 is positioned on the left side of the head 1. It should be noted that the wiping member 25 is positioned at this position in a state where the transfer table 2b is positioned at a delivery position where the substrate W is supplied to and transferred from the transfer table 2b.

  At this position, the wiping member 25 is raised by the operation of the upper and lower cylinders 22 to a height at which the tip thereof can reliably contact the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8.

  When the wiping member 25 moves up, the transport table 2b moves rightward in the drawing by a stroke necessary for wiping the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8 by the wiping member 25.

  Thereafter, the wiping member 25 is lowered to the original position by the upper and lower cylinders 22. The transport table 2b returns to the delivery position in order to receive the supply of the substrate W to which the solution L is applied next.

  The substrate W to which the solution L is applied next is supplied onto the transfer table 2b moved to the delivery position, and the application of the solution L is performed.

  By repeating such an operation, the solution L is sequentially applied to the substrate W to be supplied.

  By the way, while repeatedly applying the solution L as described above, the solid component (precipitate) contained in the solution L adheres to the bottom surface of the ring member 8 so as to stick.

  As described in the prior art, this is because the solution L that has not completely ejected from the pores 13a and adhered to the bottom surface of the nozzle plate 13 is applied to the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8 as shown in FIG. This is because the spread and the spread solution L are dried.

  Then, as shown in FIG. 4, this drying is performed by a central portion (part indicated by hatching in FIG. 4) near the pores 13 in the solution L spreading on the bottom surface of the nozzle plate 13 and the bottom surface of the ring member 8. ) More likely to occur in a peripheral portion (portion shown by a mesh pattern in FIG. 4) away from the pore 13.

  For this reason, even if the wiping member 25 is wiped off, the solution L adhering to the hatched portion in FIG. 4 can be removed, but precipitates gradually accumulate in the portion shown in the mesh pattern in FIG.

  Therefore, the ring member 8 is replaced every time the application of the solution L to the preset number of substrates W is completed using the delivery mechanism 9.

  Hereinafter, the replacement operation of the ring member 8 using the delivery mechanism 9 will be described.

  The delivery mechanism 9 does not disturb the reciprocation of the transfer table 2b when the ring member 8 is not delivered to the nozzle plate 13, that is, during the application of the solution L to the substrate W. Retreat to the right end position of the rail 2a shown in FIG.

  On the other hand, the delivery mechanism 9 moves on the rail 2 a so as to be positioned below the head 1 when delivering the ring member 8 to and from the nozzle plate 13. At this time, the transport table 2b is retracted to the left end position of the rail 2a in FIG. 2 so as not to hinder the movement of the delivery mechanism 9.

  The delivery mechanism 9 first moves so that the receiving chuck 9d is positioned directly below the head 1. At this position, the delivery mechanism 9 operates the cylinder 9da to raise the receiving chuck 9d, and causes the receiving chuck 9d to hold the ring member 8 attached to the nozzle plate 13 of the head 1.

  When the ring member 8 is held by the receiving chuck 9, the delivery mechanism 9 lowers the receiving chuck 9 by the cylinder 9da and removes the ring member 8 from the nozzle plate 13 against the magnetic force of the magnet 8a.

  Next, the delivery mechanism 9 moves so that the delivery chuck 9 e is positioned directly below the head 1. At this position, the delivery mechanism 9 raises the delivery chuck 9e by the cylinder 9ea, and the new ring member 8 previously held by the delivery chuck 9e is transferred to the used ring member 8 by the delivery chuck 9d. The nozzle plate 13 is attached to the removed nozzle plate 13.

  If the ring member 8 is attached to the nozzle plate 13, the delivery mechanism 9 lowers the delivery chuck 9e by the cylinder 9ea and moves it to the right end position on the rail 2a.

  At this position, the operator takes out the used ring member 8 held by the receiving chuck 9d, holds the new ring member 8 on the transfer chuck 9e, and moves the transfer mechanism 9 for the next replacement work. Wait.

  According to the coating apparatus of the first embodiment, as shown in the sectional view of FIG. 4A and the bottom view of FIG. 4B, the solution L is the nozzle plate 13 in which the pores 13a are formed. The bottom surface (ejection surface) of the central portion of the ring member spreads outward, and the solution L adhered to the bottom surface of the ring member 8 that formed the same surface as the bottom surface. However, as shown in the sectional view of FIG. 5 (a) and the bottom view of FIG. 5 (b), the ring member 8 is removed from the bottom of the ring member 8 by removing it against the magnetic force of the magnet 8a. The precipitated solution L can be completely removed.

  Since the new ring member 18 is attached to the nozzle plate 13 of the head 1 from which the ring member 8 has been removed, the bottom surface of the ring member 8 can be made a clean surface.

  For this reason, it is possible to prevent problems such as the deposits of the solution L being dried and sticking to the pores 13a of the nozzle plate 13 or dropping onto the substrate W during application of the solution LK. The coating quality of L can be improved.

  Further, the ring member 8 is fixed to the nozzle plate 13 by the magnetic force of the magnet 8a. Therefore, as shown in FIG. 3, if the ring member 8 is fitted in the nozzle plate 13, it can be pulled in and fixed by the magnetic force of the magnet 8a. Further, if the ring member 8 is pulled down against the magnetic force of the magnet 8a, it can be removed from the nozzle plate 13. Accordingly, the ring member 8 can be easily attached to and detached from the nozzle plate 13, and the replacement work of the ring member 8 can be performed quickly.

  Further, since the ring member 8 can be easily attached to and detached from the nozzle plate 13, the delivery mechanism 9 for attaching and detaching the ring member 8 to the nozzle plate 13 includes chucks 9d and 9e for holding the ring member 8 and the chuck 9d. , 9e can be made a relatively simple configuration of cylinders 9da, 9ea for raising and lowering, and the delivery mechanism 9 can be simplified.

  Further, since the ring member 8 is exchanged using the delivery mechanism 9, the ring member 8 can be automatically exchanged, and the burden on the operator regarding the exchange work of the ring member 8 is reduced as much as possible. Can be made.

  Further, the operation of taking out the used ring member 8 from the receiving chuck 9d of the delivery mechanism 9 and the operation of holding the new ring member 8 on the delivery chuck 9e are the right end position of the rail 2a in FIG. It was performed at the end of the coating apparatus. Therefore, during the above work, the distance between the worker and the delivery mechanism 9 is reduced, and the operator's hand can easily reach the delivery mechanism 9, so that the worker can work in an unreasonable posture, It is possible to prevent as much as possible from entering the coating apparatus and working. Therefore, the above work can be performed safely with good workability.

  In the first embodiment, the ring member 8 is attracted to the nozzle plate 13 by using a magnet. However, the ring member 8 may be attracted by providing a suction mechanism such as a vacuum pad on the head 1 side. .

  In the coating apparatus of the first embodiment, the ring member 8 is attached to the nozzle plate 13 with a magnet, but the ring member 8 may be fixed to the nozzle plate 13 with screws.

  That is, FIG. 6 is a view for explaining a coating apparatus according to the second embodiment of the coating apparatus of the present invention, and is a view corresponding to FIG. 3 shown in the first embodiment.

  That is, as shown in the sectional view of FIG. 6A and the bottom view of FIG. 6B, the ring member 8 can be attached to and detached from the nozzle plate 13 with screws 8b without providing the magnet 8a in the head 1. It is configured to be attached.

  Accordingly, even with such a configuration, the ring L in which the solution L spreads outward on the bottom surface (discharge surface) of the central portion of the nozzle plate 13 in which the pores 13a are formed, and is formed on the same surface as the bottom surface. 7 is a cross-sectional view of FIG. 7A after the solution L adheres to the bottom surface of FIG. And as shown in the bottom view of FIG.7 (b), the solution L which dried and precipitated on the bottom face of the ring member 8 can be removed completely by loosening the screw 8b and removing the ring member 8. FIG.

  In each of the above embodiments, the nozzle plate 13 has been described as having a large number of pores 13a arranged in a row. However, a large number of tubular nozzles having individual pores 13a projectingly formed. It may be arranged.

  As described above, in a state where the nozzle protrudes downward, it is desirable that the bottom surface of the outer ring member is at substantially the same height as the tip surface of the protruding nozzle.

  Further, in each of the above embodiments, the quadrangular ring member 8 surrounding the central portion where the pores 13a are formed is integrally formed with a frame-like body, but the ring member 8 is appropriately divided to form, for example, four sides. It is also possible to configure such that each plate portion is detachably attached to the nozzle plate 13 or the head body.

  Further, the example in which the ring member 8 is replaced every time the application of the solution L to the preset number of substrates W is completed using the delivery mechanism 9 has been described. As long as the replacement can be performed periodically, it may be performed at set time intervals or every time the application of the solution L to one substrate is completed.

  Further, the example in which the fine holes 13a are arranged in a staggered manner in the nozzle plate 13 has been described, but the nozzle plates 13 may be arranged in a straight line.

It is the whole schematic block diagram which showed the 1st Example of the coating device by this invention. It is a principal part right view of the apparatus shown in FIG. 3A is a bottom view of the head and the ring member shown in FIG. 2, and FIG. 3B is a bottom view thereof. 4A is a cross-sectional view showing a state in which the solution L has adhered to the head and the ring member shown in FIG. 3, and FIG. 4B is a bottom view thereof. 5A is a cross-sectional view showing a state where the ring member is removed from the head shown in FIG. 4A, and FIG. 5B is a cross-section of the ring member removed from the head shown in FIG. FIG. FIG. 6A is a sectional view of the head and the ring member of the coating apparatus according to the second embodiment of the present invention, and FIG. 6B is a bottom view thereof. 7A is a cross-sectional view showing a state where the ring member is removed from the head shown in FIG. 6A, and FIG. 7B is a cross-section of the ring member removed from the head shown in FIG. 6A. FIG. It is sectional drawing of the head concerning the conventional coating device. FIG. 9 is a bottom view of the head shown in FIG. 8. FIG. 9 is a cross-sectional view illustrating a state where a solution L is attached to the head illustrated in FIG. 8.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Head 11 Head main body 12 Flexible plate 13 Nozzle plate 13a Fine hole 14b Liquid chamber 16 Piezoelectric element 2 Base 2a Rail 2b Transfer table 25 Wiping member 8 Ring member 8a Magnet 9 Delivery mechanism 9d Delivery chuck 9e Delivery chuck L Solution W Substrate

Claims (4)

In an inkjet type coating apparatus that sprays a solution from a discharge hole provided in a nozzle plate and coats the substrate,
An inkjet-type coating apparatus comprising: a ring member that is detachably provided on the nozzle plate and forms a substantially same plane as a discharge surface where the discharge hole opens.   2. The ink jet type coating apparatus according to claim 1, wherein the nozzle plate includes a magnet capable of attracting the ring member.   The inkjet-type coating apparatus according to claim 1, further comprising a wiping member capable of wiping the discharge surface of the nozzle plate.   The inkjet-type coating device according to any one of claims 1 to 3, further comprising a delivery mechanism configured to deliver the ring member to and from the nozzle plate. .

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