JP2009248311A - Droplet ejecting device and its control method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain a satisfactory ejection state of a nozzle even when a nozzle surface of an ejection head is exposed to the outside air during washing operation of a cap, and also to finish maintenance processing of the ejection head to be performed when restarting operation and when starting up a device in a short time. <P>SOLUTION: While the inside of the cap 48 of a capping unit 15 is washed, the ejection head 3 is made to retreat to a maintenance area other than a capping area, and is finely vibrated while it retreats. When finishing the operation after washing the inside of the cap 48, power supply is turned off after the cap 48 is made to abut on the nozzle surface 2 of the ejection head 3, and when restarting the operation, the maintenance processing of the ejection head 3 is carried out. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a droplet discharge device and a control method thereof.

Conventionally, an ink jet printer (droplet discharge) that performs drawing by discharging ink (functional liquid) droplets from a plurality of nozzles provided on the nozzle surface of an ink jet head (discharge head) and landing on a paper (recording medium) Device). In recent years, the innovation of ink-jet technology originated from such an ink-jet printer has progressed, and the development in fields such as color filters, signboards, and clothing has also become active.

By the way, in such a droplet discharge device, since the nozzle surface of the discharge head is exposed to the outside air, among the plurality of nozzles provided on this nozzle surface, for the nozzle that does not perform the discharge operation, As the ink in the interior progresses and the viscosity increases, problems such as variations in the ink ejection amount and a decrease in ink landing accuracy may occur.

Therefore, in the droplet discharge device, maintenance processing for maintaining or recovering a good discharge state of the droplets discharged from the nozzles is periodically performed. Specific maintenance processes include, for example, a flushing operation for ejecting ink from each nozzle so that the ink does not increase in viscosity, and a suction operation for removing the thickened ink in the nozzle by sucking the nozzle. There is a wiping operation for removing deposits attached to the nozzle surface by wiping the nozzle surface with a wipe member (see, for example, Patent Documents 1 and 2).
JP 2003-191481 A JP 2007-185795 A

By the way, in the above-described suction operation, the nozzle is sucked through a cap that covers the nozzle surface of the ejection head, and the ink sucked through the nozzle is sent to a waste ink tank through a tube or the like connected to the bottom surface of the cap. And collect. Thereafter, the ink collected in the waste ink tank is sent to disposal such as recycling or incineration depending on the contents.

In such waste ink collecting means, it is necessary to periodically clean the inside of the cap so that the ink in the tube does not solidify by drying and cause clogging or the like. However, since the nozzle surface of the discharge head is exposed to the outside air during the cap cleaning operation, it is unavoidable that the discharge characteristics of the nozzle deteriorate due to the drying of the ink in the nozzle and the increase in viscosity. Absent. Further, it takes time for maintenance processing to recover the discharge state of the nozzles afterwards, and as a result, the productivity may be lowered.

Therefore, the present invention has been proposed in view of such conventional circumstances, and maintains a good discharge state of the nozzle even when the nozzle surface of the discharge head is exposed to the outside air during the cap cleaning operation. It is an object of the present invention to provide a droplet discharge device that can be completed in a short time, and a control method thereof, which can be completed when the operation is resumed or the device is started up.

In order to achieve the above object, a droplet discharge device according to the present invention has a nozzle surface provided with a plurality of nozzles, and discharges a droplet of a functional liquid from each nozzle of the nozzle surface; A capping unit that has a cap that can contact the nozzle surface of the ejection head, sucks the nozzle through the cap, a wiping unit that wipes the nozzle surface of the ejection head with a wipe member, and ejected from the nozzle of the ejection head Moving means for relatively moving the discharge head between a landing area for landing a droplet on a discharge target, and a maintenance area including a capping area provided with a capping unit and a wiping area provided with a wiping unit; , Microvibration imparting means for imparting microvibration to the ejection head, ejection head, capping unit, wipe pin A control unit that controls each unit including the unit, the moving unit, and the microvibration applying unit. While the cap of the capping unit is being cleaned based on a command from the control unit, the discharge head is located outside the capping area. When the work is finished after the fine vibration applying means gives a fine vibration to the discharge head and the inside of the cap is cleaned during the save, the cap is applied to the nozzle surface of the discharge head. When the power is turned off after the contact, and the work is resumed, a maintenance process for the ejection head is performed.

In this droplet discharge device, while the cap of the capping unit is being cleaned, the discharge head is retracted to a maintenance area other than the capping area, and the micro-vibration applying means applies micro vibration to the discharge head during the retract. As a result, even when the nozzle surface of the discharge head is exposed to the outside air during the cap cleaning operation, the nozzles function well while finely vibrating the functional liquid in the nozzle so that the thickening of the functional liquid does not progress inside the nozzle. A proper discharge state can be maintained. When the work is to be finished after cleaning the inside of the cap, the power is turned off after the cap is brought into contact with the nozzle surface of the ejection head, and when the work is resumed, the maintenance process for the ejection head is performed. The maintenance process of the discharge head, which is performed when the operation is resumed or when the apparatus is started up, can be completed in a short time.

Also, a method for controlling a droplet discharge apparatus according to the present invention includes a discharge head that has a nozzle surface provided with a plurality of nozzles, discharges functional liquid droplets from each nozzle on the nozzle surface, A capping unit that has a cap that can contact the nozzle surface and sucks the nozzle through the cap; a wiping unit that wipes the nozzle surface of the ejection head with a wipe member;
The ejection head is placed between a landing area where droplets ejected from the nozzle of the ejection head land on the ejection target, and a maintenance area including a capping area where the capping unit is provided and a wiping area where the wiping unit is provided. A method for controlling a droplet discharge device having a moving means for relatively moving, wherein the discharge head is retracted to a maintenance area other than the capping area while the cap of the capping unit is being cleaned, When the work is to be finished after applying a slight vibration to the discharge head and cleaning the inside of the cap, when the cap is brought into contact with the nozzle surface of the discharge head, the power is turned off and the work is resumed. A head maintenance process is executed.

In this droplet discharge device control method, while the cap of the capping unit is being cleaned, the discharge head is retracted to a maintenance area other than the capping area, and a fine vibration is applied to the discharge head during the retract. Even when the nozzle surface of the discharge head is exposed to the outside air during the cap cleaning operation, the nozzle is in a good discharge state while slightly vibrating the functional liquid in the nozzle so that the thickening of the functional liquid does not progress inside the nozzle. Can be maintained. When the work is to be finished after cleaning the inside of the cap, the power is turned off after the cap is brought into contact with the nozzle surface of the ejection head, and when the work is resumed, the maintenance process for the ejection head is performed. The maintenance process of the discharge head, which is performed when the operation is resumed or when the apparatus is started up, can be completed in a short time.

As the maintenance process, a suction operation by the capping unit,
Any one or more of a wiping operation by the wiping unit and a flushing operation for discharging droplets from the nozzles of the discharge head can be executed.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. And the predetermined direction in the horizontal plane is the X-axis direction,
In the horizontal plane, the direction orthogonal to the X-axis direction is defined as the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is defined as the Z-axis direction. In addition, the rotation (inclination) directions around the X axis, the Y axis, and the Z axis are the θ _X , θ _Y , and θ _Z directions, respectively.

FIG. 1 is a schematic configuration diagram showing a droplet discharge device IJ according to this embodiment, and FIG. 2 is a perspective view showing a part of the droplet discharge device IJ according to this embodiment.

The droplet discharge device IJ forms a device pattern (drawing pattern) on the substrate P by discharging the droplet D of the functional liquid onto the substrate (discharge target) P. The droplet discharge device IJ has a discharge head 3 in a predetermined area including a discharge head 3 having a nozzle surface 2 on which a nozzle 1 for discharging a droplet D of a functional liquid is formed, and a first position A1 facing the nozzle surface 2. And a plurality of moving bodies 4, 5, 6, 7 arranged along the Y axis, and a drive device that moves the plurality of moving bodies 4, 5, 6, 7 along the Y axis 8 is connected to the discharge head 3 through a flow path, and the discharge head 3
A functional liquid storage device 9 that stores the functional liquid to be supplied to the liquid and a control device (control means) 10 that controls the operation of the entire droplet discharge device IJ.

The droplet discharge device IJ of this embodiment is a multi-head type droplet discharge device including a plurality of discharge heads 3 and includes a carriage member 11 that supports the plurality of discharge heads 3. Further, the droplet discharge device IJ includes a controller 12 including a drive circuit that controls the drive of the discharge head 3. The controller 12 drives the ejection head 3 based on a command from the control device 10.

The substrate P is made of low temperature co-fired ceramics (LTCC: Low Temperatur, as disclosed in, for example, Japanese Patent Application Laid-Open Nos. 2006-114593 and 2006-261146.
e Co-fired Ceramics) is a substrate for forming multilayer circuit boards, which is the LTCC before firing.
Includes substrate (green sheet).

In the present embodiment, a functional liquid in which metal fine particles (conductive fine particles) are dispersed in a predetermined dispersion medium is used. In the present embodiment, the droplet discharge device IJ has the LTCC before firing.
An example will be described in which a droplet D of a functional liquid containing metal fine particles is discharged onto a substrate (green sheet) and a wiring pattern is formed on the substrate (green sheet) with the droplet D.

The droplet discharge device IJ has four moving bodies 4, 5, 6, and 7. The first moving body 4 is arranged closest to the −Y side among the four moving bodies arranged along the Y axis, and the fourth moving body 7 is
It is arranged on the most + Y side. That is, the 1st moving body 4 and the 2nd moving body 5 are arrange | positioned at both ends regarding the Y-axis direction among the four moving bodies 4, 5, 6, and 7 arrange | positioned along the Y-axis. The second moving body 5 and the third moving body 6 are disposed between the first moving body 4 and the fourth moving body 7.
The second moving body 5 is disposed on the −Y side of the third moving body 6.

The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The second, third, and fourth moving bodies 5, 6, and 7 include a maintenance unit that maintains the ejection head 3. Specifically, the second moving body 5 includes a landing accuracy measuring unit 13 that measures the landing accuracy of the droplet D discharged from the nozzle 1 of the discharge head 3. The third moving body 6 includes a wiping unit 14 that removes deposits (foreign matter) attached to the nozzle surface 2 of the ejection head 3.
The fourth moving body 7 includes a capping unit 15 that covers the nozzle surface 2 of the ejection head 3.

The droplet discharge device IJ includes a base member 17 having a support surface 16 that movably supports the moving bodies 4, 5, 6, and 7. Each of the moving bodies 4, 5, 6, 7 is movable along the support surface 16. The support surface 16 is substantially parallel to the XY plane. Further, the base member 17
An air bearing is formed between the support surface 16 and the opposing surfaces of the moving bodies 4, 5, 6, 7 facing the support surface 16. Each moving body 4, 5, 6, 7 is supported in a non-contact manner with respect to the support surface 16 by an air bearing.

The droplet discharge device IJ includes a guide member 18 that guides the movement of the plurality of moving bodies 4, 5, 6, 7 in the Y-axis direction. The guide member 18 is a rod-like member that is long in the Y-axis direction,
It is disposed on the support surface 16. Both ends of the guide member 18 are supported by support members 19 disposed outside the guide member 18. The support member 19 is supported on the floor surface 20.
The base member 17 is supported by a support member 21 supported by the floor surface 20.

The driving device 8 includes a linear motor and can move each of the plurality of moving bodies 4, 5, 6, 7 independently. The drive device 8 includes a linear motor stator 2 disposed on the guide member 18.
2 and linear motor movers 23, 24, 25, 26 arranged on the opposing surfaces of the movable bodies 4, 5, 6, 7 facing the guide member 18. The control device 10 can move each of the moving bodies 4, 5, 6, and 7 independently on the base member 17 using a driving device 8 including a linear motor.

Further, the driving device 8 can move each of the moving bodies 4, 5, 6, 7 to the first position A1 by moving the plurality of moving bodies 4, 5, 6, 7 in the Y-axis direction. It is. In other words, the driving device 8 can move the ejection head 3 as a moving means relative to the moving bodies 4, 5, 6, 7.

The droplet discharge device IJ may have any configuration that can change the relative positional relationship of the discharge head 3 with respect to each unit such as the substrate P, the landing accuracy measurement unit 13, the wiping unit 14, and the capping unit 15. That is, as a moving means for relatively moving the ejection head 3, each unit (facing to the fixed ejection head 3) (
In addition to the configuration in which the moving bodies 4 to 7) are moved, the configuration may be such that the ejection head 3 arranged to face each fixed unit is moved. Moreover, it is good also as a structure which enables movement of both the discharge head 3 and each unit (moving bodies 4-7) which opposes this, and changes mutual relative positional relationship. Further, the moving direction of the ejection head 3 and each unit is not limited to only one direction, and may be two directions that intersect in a plane. Furthermore, it is good also as a structure which changes a mutual relative positional relationship by becoming the direction where the moving direction of the discharge head 3 and the moving direction of each unit cross in a plane.

The droplet discharge device IJ is disposed at a position different from the discharge head 3 and performs at least one of the operation of loading the substrate P into the first moving body 4 and the operation of unloading the substrate P from the first moving body 4. A substrate transfer device 27 is provided. In the vicinity of the substrate transfer device 27, a substrate accommodation device 28 capable of accommodating the substrate P is disposed.

The substrate transfer device 27 performs an operation of loading the substrate P into the first moving body 4 disposed at the second position A2 different from the first position A1 with respect to the Y-axis direction, and an operation of unloading the substrate P from the first moving body 4. Execute at least one of the following. The first position A1 and the second position A2 are separated with respect to the Y-axis direction. The first position A1 is a position on the + Y side of the second position A2. The first moving body 4 moves along the support surface 16 of the base member 17 between the first position A1 facing the nozzle surface 2 of the ejection head 3 and the second position A2 in the vicinity of the substrate transport device 27. Is possible.

For example, the substrate transfer device 27 moves the substrate P accommodated in the substrate accommodation device 28 to the second position A.
It is possible to carry in the first moving body 4 arranged in 2. Further, the substrate transfer device 27 is moved to the second position A.
The substrate P can be unloaded from the first moving body 4 arranged at 2 and accommodated in the substrate accommodating device 28.

In addition, the droplet discharge device IJ includes a heat insulating member 29 that is disposed in at least a part of the moving path of the first moving body 4 and blocks heat dissipation of the first moving body 4 to the surroundings. The heat insulating member 29 is the first
The base member 17 is attached to a predetermined position so as not to hinder the movement of the mobile bodies 5, 6, 7 including the mobile body 4.

Further, the droplet discharge device IJ includes the above-described discharge head 3, carriage member 11, moving bodies 4, 5.
, 6, 7, base member 17, guide member 18, substrate transfer device 27, substrate storage device 28, heat insulating member 29, functional liquid storage device 9, controller 12, control device 10, and other devices, members, etc. And a chamber device 32 having a chamber body 30 and an air conditioner 31 capable of adjusting the environment (temperature, humidity, cleanliness, etc.) of the space inside the chamber body 30.

The ejection head 3 will be described with reference to FIGS. 3 and 4. FIG. 3 is a view of the plurality of ejection heads 3 supported by the carriage member 11 as viewed from below, and FIG. 4 is a cross-sectional view for explaining an example of the structure of the ejection head 3.

The ejection head 3 supplies a predetermined drive signal to a piezo element (piezoelectric element) 33 and deforms the piezo element 33 so that the pressure of the cavity 34 containing the functional liquid is changed to a flexible diaphragm (film). ) And a discharge head of a so-called electromechanical conversion system that discharges the liquid droplet D of the functional liquid from the nozzle 1 using the pressure fluctuation. The controller 12 is a control unit that controls driving of the ejection head 3 based on a command from the control device 10. Specifically, the controller 12 supplies a predetermined drive signal to the piezo element 33 of the discharge head 3 and discharges droplets D having a size corresponding to the drive signal from each of the nozzles 1.

Further, the controller 12 supplies a drive signal (microvibration voltage waveform) for generating a microvibration to the piezo element 33 of the ejection head 3 as a microvibration applying unit, and the droplet D is not ejected from the nozzle 1. The piezo element 33 is vibrated. As a result, it is possible to apply a slight vibration to the discharge head 3, and in the discharge head 3 to which such a fine vibration is applied, the functional liquid in the nozzle 1 is prevented from increasing in viscosity within the nozzle 1. Can be maintained in a good state of the droplet D ejected from the nozzle 1.

As shown in FIG. 3, the droplet discharge device IJ has a plurality of discharge heads 3. The plurality of ejection heads 3 are supported by the carriage member 11. The discharge head 3 has a nozzle surface 2 on which a nozzle 1 for discharging a droplet D of a functional liquid is formed. The nozzle surface 2 is long in a predetermined direction (
In this embodiment, it has a substantially rectangular shape). A plurality of nozzles 1 are formed on the nozzle surface 2 along a predetermined direction (longitudinal direction of the nozzle surface 2). In the present embodiment, the predetermined direction in which the plurality of nozzles 1 are arranged is a direction inclined with respect to the X-axis direction in the XY plane.

As shown in FIG. 4, the ejection head 3 includes a head main body 36 and a plate member (nozzle plate) 37 disposed at the lower end of the head main body 36. The nozzle 1 is a plate member 37.
Is formed. The plate member 37 has a plurality of holes penetrating in the vertical direction. Nozzle 1
Is disposed at the lower end of the hole. The nozzle surface 2 is disposed on the plate member 37.

The nozzle surface 2 of the discharge head 3 (plate member 37) faces downward (−Z side). The surface of the substrate P on which the droplets D from the ejection head 3 are ejected (supplied) is directed upward (+ Z side) so as to face the nozzle surface 2 of the ejection head 3. The first moving body 4 holds the substrate P so that the surface of the substrate P faces upward (+ Z side). The nozzle surface 2 of the ejection head 3 is X
It is almost parallel to the Y plane. The first moving body 4 holds the substrate P so that the surface of the substrate P and the XY plane are substantially parallel. The control device 10 includes the nozzle surface 2 of the ejection head 3 and the first moving body 4.
A distance (platen gap) between the substrate P and the surface of the substrate P held at a predetermined value (for example, 600)
In the state maintained at μm), the droplet D is discharged from the nozzle 1 onto the substrate P.

Further, the ejection head 3 includes a cavity (space) 34 formed above the plate member 37 (nozzle 1), a flexible plate (vibrating plate) 35 disposed above the cavity 34, and a vibrating plate 35. And a piezo element 33 disposed above the piezo-electric element. A plurality of cavities 34 are formed so as to correspond to each of the plurality of nozzles 1. The cavity 34 is connected to the functional liquid storage device 9 through a flow path. The cavity 34 stores the functional liquid from the functional liquid storage device 9 and supplies it to the nozzle 1.

The diaphragm 35 can vary the pressure (volume) of the cavity 34 by vibrating in the vertical direction. The piezo element 33 can vibrate the diaphragm 35 in the vertical direction. A plurality of piezo elements 33 are arranged so as to correspond to each of the plurality of nozzles 1. Piezo element 3
3, the vibration plate 35 is vibrated on the basis of the drive signal from the controller 12, and the pressure of the cavity 34 is fluctuated to discharge the functional liquid droplet D from the nozzle 1.

Further, the controller 12 adjusts the drive signal (drive waveform) supplied to the piezo element 33 as disclosed in, for example, Japanese Patent Application Laid-Open No. 2001-58433, and droplets ejected from each of the nozzles 1. The amount (size, volume) of D can be adjusted.

As illustrated in FIG. 1, the droplet discharge device IJ includes a holding device 38 that holds the plurality of discharge heads 3 so that the positions of the plurality of discharge heads 3 do not substantially move. The holding device 38 includes a carriage member 11 and a support mechanism 39 that supports the carriage member 11. The support mechanism 39 is fixed to the ceiling surface (inner surface) of the chamber body 30. That is, the plurality of ejection heads 3 are held so as not to move substantially with respect to the ceiling surface (inner surface) of the chamber body 30 via the holding device 38 including the carriage member 11 and the support mechanism 39.

The support mechanism 39 includes an actuator that can finely move the carriage member 11. Support mechanism 3
9, the carriage member 11 can be finely moved in directions of six degrees of freedom in the X axis, Y axis, Z axis, θ _X , θ _Y , and θ _Z directions.

Next, the first moving body 4 will be described with reference to FIG. FIG. 5A is a perspective view showing the first moving body 4, and FIG. 5B is a view of the first moving body 4 as viewed from the −Y side.

The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The first movable body 4 includes a first movable member 40 having a mover 23 of a linear motor, and a holder member 42 having a holding mechanism 41 mounted on the first movable member 40 and holding the substrate P.
On the lower surface of the first movable member 40 facing the support surface 16 of the base member 17, the air bearing 4
3 is formed. The first movable member 40 is supported by the air bearing 43 without contact with the support surface 16. The holder member 42 of the first moving body 4 is configured so that the surface of the substrate P and the nozzle surface 2 of the ejection head 3 face each other, and the surface of the substrate P and the XY plane are substantially parallel. Hold.

As described above, the substrate P of the present embodiment includes a green sheet, and a hole (via) penetrating in the thickness direction is formed in the green sheet. A film F formed of, for example, polyethylene terephthalate (PET) is attached to the back surface of the substrate P (green sheet), and the holder member 42 of the first moving body 4 is a substrate supported by the film F. Hold P. That is, in the present embodiment, the holder member 42 of the first moving body 4 is the film F.
The substrate P (green sheet) is held via

A concave portion 44 in which the guide member 18 can be disposed is formed on the lower surface of the first movable member 40. The inner surface of the recess 44 of the first movable member 40 faces the guide member 18. As described above, the linear motor stator 22 is disposed on the guide member 18. A mover 23 of a linear motor is disposed on the inner surface of the recess 44 of the first movable member 40 facing the guide member 18.
The drive device 8 including the stator 22 and the mover 23 can move the first movable member 40 in the Y-axis direction. As the first movable member 40 moves in the Y-axis direction, the holder member 42 (substrate P) mounted on the first movable member 40 also moves in the Y-axis direction together with the first movable member 40. Moving.

A plurality of actuators 45 are disposed between the first movable member 40 and the holder member 42. The actuator 45 includes, for example, a piezo element. The control device 10 can move (finely move) the holder member 42 holding the substrate P on the first movable member 40 by controlling these actuators 45. The holder member 42 holding the substrate P is moved by the actuator 45 on the first movable member 40 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θ _X , θ _Y , and θ _Z directions ( Fine movement) is possible.

In order to supply the droplets D ejected from the ejection head 3 to the substrate P, the control device 10 moves the first moving body 4 using the driving device 8 and faces the nozzle surface 2 of the ejection head 3. The board | substrate P currently hold | maintained at the 1st moving body 4 (holder member 42) is arrange | positioned in 1st position A1. In addition, the control device 10 uses the actuator 45 disposed between the first movable member 40 and the holder member 42 so that the droplet D ejected from the nozzle 1 on the nozzle surface 2 is placed at a predetermined position on the substrate P. The distance (platen gap) between the nozzle surface 2 of the ejection head 3 and the surface of the substrate P held by the first moving body 4, the nozzle surface 2 of the ejection head 3 and the first moving body, as supplied. 4, the positional relationship in the tilt direction (θ _X , θ _Y direction) with the surface of the substrate P held by 4, and the rotation direction (θ _Z
(Direction) is adjusted. The control device 10 uses the actuator 45 to make the nozzles of the ejection head 3 so that the nozzle surface 2 of the ejection head 3 and the surface of the substrate P are substantially parallel and the platen gap is a predetermined value. The positional relationship between the surface 2 and the surface of the substrate P held by the first moving body 4 is adjusted.

Further, flushing areas 46 are provided on both sides in the Y-axis direction of the holding mechanism 41 that holds the substrate P on the upper surface of the holder member 42 that can face the nozzle surface 2 of the ejection head 3.
The flushing area 46 is formed on the upper surface of a porous member capable of absorbing the droplet D ejected from the nozzle 2 of the ejection head 3. The porous member includes, for example, a sponge-like member. The controller 10 supplies the droplet D from the nozzle 1 with the nozzle 1 of the ejection head 3 and the flushing area 46 of the holder member 42 facing each other before supplying the droplet D to the substrate P from the ejection head 3. An operation of discharging in advance, a so-called flushing operation is performed.

Further, the first moving body 4 includes a heating device 47 that heats the substrate P. The heating device 47 is provided on the holder member 42. The control device 10 can heat the substrate P held by the holder member 42 using the heating device 47 of the holder member 42.

The heating device 47 can instantaneously vaporize the liquid component contained in the droplet D discharged from the nozzle 1 of the discharge head 3 and supplied (contacted) to the substrate P. The droplet discharge device IJ uses the heating device 47 to heat the substrate P, and supplies the droplet D to the heated substrate P from the nozzle 1 of the discharge head 3 to thereby contact the substrate P with the droplet D. D can be dried instantly.

Further, by supplying the droplet D to the substrate P while heating the substrate P, the pinning phenomenon can be caused. In the drying process of the droplet D after being supplied to the substrate P, when the solid content concentration at the peripheral portion of the droplet D reaches the saturation concentration, the solid content locally precipitates at the peripheral portion. Then, the peripheral portion of the droplet D is pinned by the deposited solid content, and the contraction of the droplet D (outer diameter contraction) accompanying the subsequent drying is suppressed. In this way, a drawing pattern (in this embodiment, a wiring) formed on the substrate P by causing a phenomenon (pinning phenomenon) in which the shrinkage of the droplet D due to drying is suppressed by the solid content deposited on the peripheral edge portion. The edge (outer shape) of the (pattern) can be well defined.

For example, as disclosed in JP-A-2005-28276, JP-A-2005-144324, etc., adjusting the drying conditions, convection conditions, etc. of the droplets D arranged on the surface of the substrate P, You may make it produce the pinning phenomenon in the droplet D discharged (supplied) to the substrate P.

In the following description, the substrate P of the first moving body 4 is disposed at the first position A1, and the ejection head 3 is disposed.
The step of causing the droplets D discharged from the nozzle 1 to land on the substrate P and forming a pattern on the substrate P is appropriately referred to as a drawing step (landing step), and a region in which such an operation is performed (first moving body). 4)
Corresponds to the drawing area (landing area) of the present invention.

Next, the 2nd mobile body 5 is demonstrated, referring FIG.6 and FIG.7. FIG. 6 is a diagram of the second moving body 5 as viewed from the −X side, and FIG. 7 is a diagram for explaining an example of the operation of the second moving body 5. The second moving body 5 includes a landing accuracy measuring unit 13 that measures the landing accuracy of the droplet D discharged from the nozzle 1 of the discharge head 3.

As shown in FIG. 6, the landing accuracy measuring unit 13 includes a belt-like sheet member 71 having a recording surface 70 that is movable relative to the nozzle surface 2 in a state of facing the nozzle surface 2 of the ejection head 3. And a feeding mechanism 72 for feeding the recording surface 70 of the sheet member 71 and a housing member 73 for accommodating the sheet member 71 and the feeding mechanism 72. Further, at least a part of the sheet member 71 is an opening 73 formed on the upper surface of the housing member 73 that can face the ejection head 3.
It is exposed from a and can face the nozzle surface 2 of the ejection head 3.

For the sheet member 71, for example, a recording paper such as a roll paper can be used as a recording medium (measuring member) on which the landing positions of the droplets D discharged from the nozzles 1 of the discharge head 3 can be recorded.

The feed mechanism 72 includes a supply reel 74 that supplies the sheet member 71, a take-up reel 75 that takes up the sheet member 71 supplied from the supply reel 74, a rotation motor that rotates the supply reel 74 and the take-up reel 75, and the like. Actuators 76 and 77, and the control device 10
Controls the actuators 76 and 77 to feed the sheet member 71 to the supply reel 74.
To the take-up reel 75.

The second moving body 5 includes a second movable member 78 having a linear motor movable element 24, and the housing member 73 of the landing accuracy measuring unit 13 is mounted on the second movable member 78. Similar to the first movable member 40 described above, the second movable member 78 facing the support surface 16 of the base member 17.
An air bearing is formed on the lower surface of the second movable member 78, and the second movable member 78 is supported in a non-contact manner with respect to the support surface 16. Similarly to the first movable member 40 described above, a recess in which the guide member 18 can be disposed is formed on the lower surface of the second movable member 78.
Are disposed on the inner surface of the concave portion of the second movable member 78 facing each other. Stator 22 and mover 24
Can move the second movable member 78 in the Y-axis direction. As the second movable member 78 moves in the Y-axis direction, the housing member 73 of the landing accuracy measuring unit 13 mounted on the second movable member 78 also moves together with the second movable member 78 in the Y-axis direction. Move in the direction.

Further, similarly to the first moving body 4 described above, a plurality of actuators 79 are arranged between the second movable member 78 and the housing member 73. The control device 10 includes these actuators 7
9, the housing member 73 is moved (finely moved) on the second movable member 78.
Is possible. The housing member 73 can be moved (finely moved) on the second movable member 78 by the actuator 79 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θ _X , θ _Y , and θ _Z directions. . Further, the feed mechanism 7 including the sheet member 71 of the landing accuracy measuring unit 13 and a roller.
2 on the second movable member 78 as the housing member 73 moves.
Move with.

In order to measure the landing accuracy of the droplet D ejected from each nozzle 1 of the ejection head 3, first,
The control device 10 moves the second moving body 5 using the driving device 8 and arranges the landing accuracy measuring unit 13 of the second moving body 5 at the first position A1 facing the nozzle surface 2 of the ejection head 3. To do.

Next, the control device 10 uses the actuator 79 disposed between the second movable member 78 and the housing member 73 to use the nozzle surface 2 of the ejection head 3 and the recording surface 7 of the sheet member 71.
The positional relationship is adjusted so that 0 is parallel.

Then, as shown in FIG. 7, the landing accuracy measuring unit 13 discharges the droplet D from each nozzle 1 of the discharge head 3 to the sheet member 71 between the supply reel 74 and the take-up reel 75,
It is landed on the recording surface 70 of the sheet member 71. The landing accuracy of the droplet D ejected from each nozzle 1 can be measured from the landing position of the droplet D recorded on the recording surface 70 of the sheet member 71.

In the following description, the step of measuring the landing accuracy of the droplet D discharged from the nozzle 1 of the discharge head 3 by arranging the second moving body 5 at the first position A1 is appropriately referred to as a landing accuracy measurement step. The region (second moving body 5) where such an operation is performed corresponds to the landing accuracy measurement area of the present invention.

Next, the third moving body 6 will be described with reference to FIGS. 8 and 9. FIG. 8 is a view of the third moving body 6 as viewed from the −X side, and FIG. 9 is a view for explaining an example of the operation of the third moving body 6. The third moving body 6 includes a wiping unit 14 that removes deposits (foreign matter) attached to the nozzle surface 2 of the ejection head 3. Deposits (foreign matter) adhering to the nozzle surface 2 of the discharge head 3 are
Including functional liquid droplets D attached thereto.

As shown in FIG. 8, the wiping unit 14 includes a belt-like wipe member 57 having a wiping surface 57a that is movable relative to the nozzle surface 2 in a state of facing the nozzle surface 2 of the ejection head 3, and a wipe. It has a drive mechanism 58 for moving (running) the wiping surface 57 a of the member 57, and a housing member 59 that houses the wipe member 57 and the drive mechanism 58.
Further, at least a part of the wiping member 57 is a housing member 5 that can face the ejection head 3.
9 is exposed (projects) from an opening 60 formed on the upper surface of the nozzle 9 and can face the nozzle surface 2 of the ejection head 3.

The wipe member 57 is made of a material that can absorb liquid, for example, a nonwoven fabric that can absorb liquid. The wipe member 57 may be a woven fabric such as polyester.

The drive mechanism 58 includes a supply reel 61 that supplies the wipe member 57, a take-up reel 62 that takes up the wipe member 57 supplied from the supply reel 61, a rotation motor that rotates the supply reel 61 and the take-up reel 62, and the like. Actuators 64 and 65, and the control device 10
Controls the actuators 64, 65, thereby wiping the wipe member 57 into the supply reel 61.
To the take-up reel 62 at a predetermined speed.

Further, the wiping unit 14 is disposed at a position closest to the nozzle surface 2 of the ejection head 3, and a wiping roller 63 that supports a surface opposite to the wiping surface 57 a of the wiping member 57 facing the nozzle surface 2 of the ejection head 3. A pair of tension rollers 68 capable of adjusting the tension of the wipe member 57 between the supply reel 61 and the wiping roller 63, the take-up reel 62 and the wiping roller 6
3 and a guide roller 69 that guides the movement (running) of the wipe member 57.

The third moving body 6 includes a third movable member 66 having a linear motor movable element 25, and the housing member 59 of the wiping unit 14 is mounted on the third movable member 66. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the third movable member 66 facing the support surface 16 of the base member 17, and the third movable member 66 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the third movable member 66, and the movable element 25 is a third movable member facing the guide member 18. The member 66 is disposed on the inner surface of the recess. The drive device 8 including the stator 22 and the movable element 25 can move the third movable member 66 in the Y-axis direction. As the third movable member 66 moves in the Y-axis direction, the housing member 59 of the wiping unit 14 mounted on the third movable member 66 also moves in the Y-axis direction together with the third movable member 66. Moving.

Further, similarly to the first moving body 4 described above, a plurality of actuators 67 are arranged between the third movable member 66 and the housing member 59. The control device 10 includes these actuators 6
7, the housing member 59 is moved (finely moved) on the third movable member 66.
Is possible. The housing member 59 can be moved (finely moved) on the third movable member 66 by the actuator 67 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θ _X , θ _Y , and θ _Z directions. . The driving mechanism 58 includes a wipe member 57 of the wiping unit 14 and a roller.
Moves along with the housing member 59 on the third movable member 66 as the housing member 59 moves.

In order to wipe the nozzle surface 2 of the ejection head 3 with the wipe member 57, first, the control device 10 moves the third moving body 6 using the driving device 8 to face the nozzle surface 2 of the ejection head 3. The wiping unit 14 of the third moving body 6 is disposed at the first position A1.

Next, the control device 10 can wipe the nozzle surface 2 with the wiping surface 57a using the actuator 67 disposed between the third movable member 66 and the housing member 59.
The positional relationship between the nozzle surface 2 of the ejection head 3 and the wiping surface 57a of the wipe member 57 at the portion supported by the wiping roller 63 is adjusted. Specifically, the wiping roller 6 that supports the wipe member 57 as the housing member 59 is moved in the Z-axis direction by the actuator 67.
3 also moves in the Z-axis direction. Then, the nozzle surface 2 of the ejection head 3 and the wiping surface 57 a of the wiping member 57 that is engaged with the outer peripheral surface of the wiping roller 63 are brought into contact with each other with a predetermined pressure.

Next, the control device 10 drives the supply reel 61 and the take-up reel 62 to discharge the ejection head 3.
The wiping surface 57a of the wiping member 57 is moved (traveled) with respect to the nozzle surface 2.

Then, as shown in FIG. 9, the wiping unit 14 is in a state where the nozzle surface 2 of the ejection head 3 and the wiping surface 57 a of the wiping member 57 engaged with the outer peripheral surface of the wiping roller 63 are in contact with each other. 3 move the wipe member 57 relative to the nozzle surface 2 (
The wiping operation is performed to remove deposits (foreign matter) adhering to the nozzle surface 2 by wiping the nozzle surface 2 with the wiping surface 57a of the wiping member 57.

In the present embodiment, the wiping unit 14 has a configuration in which the nozzle surface 2 of the ejection head 3 is wiped by the wipe member 57 that travels between the supply reel 61 and the take-up reel 62, and therefore the wiping surface 57 a of the wipe member 57. Can always be kept in a state suitable for wiping the nozzle surface 2 of the ejection head 3. And the wipe member 5 which consists of material which can absorb a liquid
7, the adhering matter such as the droplet D adhering to the nozzle surface 2 of the ejection head 3 can be appropriately wiped and removed.

In the following description, the process of disposing the third moving body 6 at the first position A1 and removing the adhering matter (foreign matter) adhering to the nozzle surface 2 of the ejection head 3 with the wipe member 57 is appropriately referred to as a wiping process. The region where the wiping operation is performed (third moving body 6) corresponds to the wiping area of the present invention.

Next, the 4th moving body 7 is demonstrated, referring FIG.10 and FIG.11. FIG. 10 is a diagram of the fourth moving body 7 viewed from the −X side, and FIG. 11 is a diagram for explaining an example of the operation of the fourth moving body 7. The fourth moving body 7 includes a capping unit 15 that covers the nozzle surface 2 of the ejection head 3.
including.

The capping unit 15 includes a cap 48 that covers the nozzle surface 2 of the ejection head 3. The cap 48 includes an upper surface that can face the ejection head 3, and a cap portion 50 that is formed on the upper surface and can form a sealed space 49 between the nozzle surface 2 of the ejection head 3. The cap portion 50 includes a recess (groove) formed on the upper surface of the cap 48, and a space 49 can be formed between the cap portion 50 and the nozzle surface 2 of the ejection head 3. A plurality of cap portions 50 are provided so as to correspond to the plurality of ejection heads 3.

As shown in FIG. 11, the capping unit 15 can arrange all the nozzle surfaces 2 of the ejection head 3 inside the cap portion (recessed portion) 50. For example, the capping unit 15 forms the space 49 by bringing the upper end of the inner side surface of the cap part (concave portion) 50 into contact with the side surface of the ejection head 3 (plate member 37) outside the nozzle surface 2.

The capping unit 15 is formed on the bottom surface of the cap portion (recessed portion) 50 and has a suction port 53 capable of sucking the fluid in the space 49, and a vacuum system (suction means) connected via the suction port 53 and the flow path 54. 55).

The fourth moving body 7 includes a fourth movable member 51 having a linear motor movable element 24, and the cap 48 of the capping unit 15 is mounted on the fourth movable member 51. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the fourth movable member 51 facing the support surface 16 of the base member 17, and the fourth movable member 51 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the fourth movable member 51, and the movable element 24 is a fourth movable member facing the guide member 18. It is disposed on the inner surface of the recess of the member 51. The drive device 8 including the stator 22 and the mover 24 can move the fourth movable member 51 in the Y-axis direction. The fourth movable member 51
With the movement in the Y-axis direction, the cap 48 of the capping unit 15 mounted on the fourth movable member 51 also moves in the Y-axis direction together with the fourth movable member 51.

Further, similarly to the first moving body 4 described above, a plurality of actuators 52 are arranged between the fourth movable member 51 and the cap 48. The control device 10 can move (finely move) the cap 48 on the fourth movable member 51 by controlling these actuators 52.
The cap 48 is moved on the fourth movable member 51 by the actuator 52 on the X axis, Y axis, and Z axis.
It can move (finely move) in the direction of 6 degrees of freedom in the axis, θ _X , θ _Y , and θ _Z directions.

In order to cover the nozzle surface 2 of the ejection head 3 with the cap 48, the control device 10 includes a drive device 8.
The fourth moving body 7 is moved using the capping unit 15 of the fourth moving body 7 at the first position A1 facing the nozzle surface 2 of the ejection head 3. And the control apparatus 10 is 4th.
Using the actuator 52 disposed between the movable member 51 and the cap 48, the ejection head 3 is formed so that a space 49 is formed between the nozzle surface 2 of the ejection head 3 and the cap portion 50 of the cap 48. The positional relationship between the nozzle surface 2 and the cap portion 50 of the cap 48 is adjusted. For example, the control device 10 uses the actuator 52 to move the cap 48 in the + Z direction. Thereby, the nozzle surface 2 is arrange | positioned inside the cap part 50, and the cap part 50 is arranged.
The upper end of the inner surface of this nozzle is in contact with the side surface of the ejection head 3 (plate member 37) outside the nozzle surface 2 to form a space 49.

The capping unit 15 can suck the fluid in the space 49 through the suction port 53 by driving the vacuum system 55 in a state where the space 49 is formed between the nozzle surface 2 of the ejection head 3 and the cap unit 50. It is. The capping unit 15 can suck the fluid (mainly gas) in the space 49 from the suction port 53 to make the space 49 have a negative pressure. The capping unit 15 makes the discharge head 3 such as the cavity 34 by making the space 49 negative pressure.
It is possible to perform a suction operation for sucking the functional liquid inside the nozzle 1 through the nozzle 1. The capping unit 15 can generate the flow of the functional liquid toward the nozzle 1 inside the ejection head 3 by sucking the fluid in the space 49. The sucked functional liquid (waste liquid) is finally collected into a waste ink tank (not shown).

The capping unit 15 described with reference to FIGS. 10 and 11 has a suction function for mainly sucking the functional liquid of the ejection head 3, but a function for suppressing drying of the nozzle surface 2 (nozzle 1) (moisturizing). Function). For example, a wet porous member (mesh member) is disposed inside the cap unit 50, and the cap unit 50 and the ejection head 3 including the wet porous member.
By making the nozzle surface 2 face each other, drying of the nozzle surface 2 can be suppressed. That is,
By disposing the wet porous member inside the space 49 formed by the nozzle surface 2 and the cap portion 50, drying of the nozzle surface 2 can be suppressed.

In the following description, the step of arranging the fourth moving body 7 at the first position A1 and sucking the nozzle 1 through the cap 48 that covers the nozzle surface 2 of the ejection head 3 is appropriately referred to as a capping step. The region (fourth moving body 7) where a simple suction operation is performed corresponds to the capping area of the present invention.

In the following description, the suction operation, the wiping operation, and the flushing operation are collectively referred to as a maintenance process for the ejection head 3, and a region where these maintenance processes are performed corresponds to the maintenance area of the present invention.

Next, the heat insulating member 29 will be described with reference to FIGS. 12 and 13. FIG.
The perspective view which shows the heat insulation member 29, FIG. 13 is the figure which looked at the heat insulation member 29 from the -Y side.

The heat insulating member 29 is disposed on at least a part of the moving path of each moving body 5, 6, 7 including the first moving body 4. The heat insulating member 29 blocks the diffusion of the heat of the first moving body 4 to the surroundings. As described above, the first moving body 4 (holder member 42) includes the heating device 47 that heats the substrate P. The heat insulating member 29 blocks heat radiating from the first moving body 4 including the heating device 47 to the surroundings.

The heat insulating member 29 is arranged on the moving path of the moving bodies 4, 5, 6, 7 other than the first position A <b> 1.
That is, the heat insulating member 29 is not disposed at the first position A1 where the process using the ejection head 3 is performed. Thereby, execution of various processing (pattern formation processing, maintenance processing, etc.) by the cooperation of the ejection head 3 and each of the moving bodies 4, 5, 6, 7 is not hindered.

Further, the heat insulating member 29 is not arranged at the second position A2 where the processing by the substrate transfer device 27 is executed. That is, the heat insulating member 29 is a moving body 4 other than the first position A1 and the second position A2.
5, 6, 7 are arranged on the movement route. As a result, the loading operation of the substrate P by the substrate transfer device 27 to the first moving body 4 arranged at the second position A2 and the substrate P from the first moving body 4 are performed.
The unloading operation is not hindered.

The heat insulating member 29 is arranged so as to surround the moving bodies 4, 5, 6, 7 at positions away from the moving bodies 4, 5, 6, 7 on the base member 17. The heat insulating member 29 forms an internal space 80 in which each moving body 4, 5, 6, 7 can move. Specifically, the heat insulating member 29 forms an internal space 80 in which each of the moving bodies 4, 5, 6, 7 can move (can be arranged) with the support surface 16 of the base member 17. The heat insulating member 29 is a heat outer space 81 of the first moving body 4 disposed in the inner space 80.
Block the release to The external space 81 is a space outside the heat insulating member 29 with respect to the internal space 80. The external space 81 includes a space between the chamber body 30 (the inner surface of the chamber body 30) and the heat insulating member 29 (the outer surface of the heat insulating member 29).

The air conditioner 31 of the chamber device 32 adjusts at least the temperature of the external space 81. Thereby, each apparatus and member in the chamber body 30 are arranged in a desired environment (temperature).

The heat insulating member 29 has a heat insulating property, and is formed of a material that can block the diffusion of heat from the first moving body 4 disposed in the internal space 80 to the external space 81. The heat insulating member 29 is made of a synthetic resin having heat insulating properties such as, for example, styrene foam or urethane foam.

The heat insulating member 29 has a tunnel shape, and each moving body 4 is provided on both sides of the heat insulating member 29 in the Y-axis direction.
An opening (entrance / exit) 82 through which 5, 6, 7 can pass is formed. The opening 82 is formed so as to communicate the internal space 80 and the external space 81 formed by the heat insulating member 29.

Next, an example of a procedure for manufacturing a device using the droplet discharge apparatus IJ having the above-described configuration will be described.

The control device 10 controls the driving device 8 to place the first moving body 4 at the second position A2. The control device 10 loads the substrate P into the first moving body 4 disposed at the second position A2 using the substrate transport device 27. The control device 10 controls the driving device 8 to move the first moving body 4 holding the substrate P to the first position A1.

FIG. 14 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the first position A1. The control device 10 has a first position A1 that faces the nozzle surface 2 of the ejection head 3,
The first moving body 4 holding the substrate P is disposed. Then, the control device 10 controls the controller 12 and the driving device 8 to move the substrate P of the first moving body 4 in the Y-axis direction with respect to the nozzle 1 of the discharge head 3, while the nozzle of the discharge head 3. 1, droplets D are discharged (supplied) onto the substrate P. Thereby, a pattern is formed on the substrate P by the droplets D. The control device 10 includes a heating device 4
7, while the substrate P is heated, the droplets D are discharged onto the substrate P.

In the present embodiment, among the nozzles 1 of the plurality of ejection heads 3, the most + X side nozzle 1
And the distance between the nozzle 1 closest to the −X side and the size of the substrate P in the X-axis direction are substantially equal. Accordingly, the droplet discharge device IJ moves the substrate P of the first moving body 4 to Y with respect to the nozzle 1 of the discharge head 3.
When ejecting (supplying) droplets D to the substrate P from the nozzle 1 of the ejection head 3 while moving in the axial direction,
By moving the substrate P only once in the Y-axis direction, the droplet D can be supplied to almost the entire surface of the substrate P.

The droplet discharge device IJ discharges the droplet D onto the substrate P from the nozzle 1 of the discharge head 3 while moving the substrate P of the first moving body 4 in the Y axis direction with respect to the nozzle 1 of the discharge head 3 ( Supply) may be repeated a plurality of times. For example, the operation of discharging the droplet D while moving the substrate P in the + Y direction and the operation of discharging the droplet D while moving the substrate P in the −Y direction may be repeated a plurality of times. Further, as disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-146996, the substrate P
The position of the substrate P in the X-axis direction may be changed by a slight distance (for example, one pixel) every time the substrate P moves in the Y-axis direction. Also in these cases, in order to stabilize the discharge amount of the droplets D from the nozzle 1, it is preferable to appropriately perform flushing (preliminary discharge) on the flushing area 46.

As described above, the substrate P is an LTCC substrate (green sheet) before sintering,
Supported by film F. The droplet discharge device IJ discharges the droplet D onto the substrate P (green sheet) supported by the film F.

After the operation of ejecting the droplets D on the substrate P is completed, the control device 10 controls the driving device 8 to carry the substrate P out of the first moving body 4 to move the first moving body 4 to the second position. Move to A2. The driving device 8 moves the plurality of moving bodies 4, 5, 6, 7 in the −Y direction (from the first position A 1 to the second position A
Move in the direction of 2).

Since the heat insulating member 29 is arranged in the moving path of the first moving body 4 between the first position A1 and the second position A2, the first moving between the first position A1 and the second position A2. It can suppress that the heat of the mobile body 4 is dissipated to the external space 73.

FIG. 15 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the second position A2. The first moving body 4 that can hold the substrate P includes a plurality of (four) moving bodies 4, 5, 6,
7 is a moving body arranged closest to the −Y side (second position A2 side). As shown in FIG. 15, when the first moving body 4 is arranged at the second position A2, a plurality (four) of moving bodies 4 are disposed.
5, 6, 7, each moving body 4, 5, 6, so that the fourth moving body 7 disposed on the most + Y side (first position A <b> 1 side) is disposed at the first position A <b> 1. 7 size, number, and first position A
The distance between 1 and the second position A2 is set. Therefore, as shown in FIG.
When the moving body 4 is disposed at the second position A2, the fourth moving body 7 is disposed at the first position A1.

The control device 10 uses the substrate transfer device 27 and the first moving body 4 disposed at the second position A2.
Then, the substrate P is unloaded and a new substrate P is loaded into the first moving body 4.

On the other hand, the control device 10 executes the capping process of the ejection head 3 using the fourth moving body 7 disposed at the first position A1. Specifically, the control device 10 covers the nozzle surface 2 of the ejection head 3 with a cap 48 using the capping unit 15 of the fourth moving body 7 disposed at the first position A1, and through the cap 48, A suction operation for sucking the nozzle 1 of the discharge head 3 is executed.

Further, the control device 10 performs a suction operation on the ejection head 3 by the fourth moving body 7 disposed at the first position A1, and unloading the substrate P using the first moving body 4 disposed at the second position A2. It is possible to execute at least a part of the carry-in process in parallel. Thereby, the processing efficiency of the droplet discharge device IJ can be improved.

After the capping step using the capping unit 15 of the fourth moving body 7 is completed, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, 7 to the + Y direction (second position). The third moving body 6 is arranged at the first position A1 by moving together in the direction from the A2 toward the first position A1. The control device 10 performs the wiping process of the ejection head 3 using the third moving body 6 disposed at the first position A1. Specifically, the control device 10 wipes the nozzle surface 2 of the ejection head 3 with the wiping surface 57a of the wiping member 57 using the wiping unit 14 of the third moving body 6 disposed at the first position A1. Then, a wiping operation for removing the deposit (foreign matter) adhering to the nozzle surface 2 is executed.

In the present embodiment, the suction operation by the capping unit 15 is performed before the wiping operation by the wiping unit 14. In this case, there is a possibility that functional liquid droplets may adhere to or remain on the nozzle surface 2 for some reason. Further, if the droplet D adhering to the nozzle surface 2 is allowed to stand, the droplet D of the functional liquid may solidify (precipitate) and become foreign matter. If the solidified functional liquid moves to the vicinity of the nozzle 1 or enters the nozzle 1, there is a possibility that a discharge failure of the nozzle 1 occurs. Using the wiping unit 14, the control device 10 can appropriately remove such deposits such as droplets attached to the nozzle surface 2 of the ejection head 3.

Here, the nozzle surface 2 of the ejection head 3 preferably has liquid repellency. In particular, the nozzle surface 2 of the ejection head 3 preferably has liquid repellency with respect to the functional liquid droplets D. The surface of the nozzle surface 2 is formed of a film of a liquid repellent material covered with a plate member 37. In this embodiment, as an example, the plate member 37 is made of stainless steel, and a silicon resin film such as a polymer-polymerized silicon film and a silicon-based silane coupling agent are formed on the nozzle surface 2 of the plate member 37 made of stainless steel. The film is formed. Specifically, a polymer-polymerized silicon film is formed on the nozzle surface 2, and a silane coupling agent film is formed on the polymer-polymerized silicon film.

That is, as an example of the liquid repellent treatment that makes the nozzle surface 2 liquid repellent, a technique using plasma polymerization can be used. The liquid repellent treatment using plasma polymerization includes a step of converting a raw material liquid vapor containing silicon into plasma in a plasma treatment apparatus. When the activated silicon material reaches the surface of the plate member 37, the silicon is polymerized with each other on the plate member 37 to form liquid-repellent silicon. It becomes a polymerized film (polymer polymerized silicon film). Then, a silicon-based silane coupling agent film is formed on the formed silicon polymer film (polymer polymer silicon film).

In addition, as the liquid repellent treatment using plasma polymerization, linear P such as C ₄ F ₁₀ , C ₈ F _16, etc.
You may make it make the vapor | steam of the raw material liquid which consists of FC (polyfluorocarbon) into plasma in a plasma processing apparatus. By converting the vapor of linear PFC into plasma, linear P
FC bonds are partially broken and activated. When a part of the bond is cut in this way and the activated PFC reaches the surface of the plate member 37, the PFC is transferred to the plate member 37.
The above polymerizes each other to form a fluororesin polymer film having liquid repellency.

In this case, for example, decatriene can be used as a raw material liquid for the liquid repellent treatment. In that case, by adding CF4 or oxygen activated by plasma treatment, liquid repellency can be imparted to the resulting polymer film, and thus a liquid-repellent polymer film can be formed. Moreover, fluorocarbon can also be used as a raw material liquid for the liquid repellent treatment. In that case, by adding CF4 activated by the plasma, even if a part of the fluorine in the fluorocarbon which is the raw material liquid is released by the plasma, the above-mentioned active fluorine is taken into the polymer film obtained. Therefore, the liquid repellency of the fluororesin polymer film to be formed can be improved.

By making the nozzle surface 2 liquid repellent, the liquid does not spread on the nozzle surface 2 but remains on the nozzle surface 2 in a ball-like shape. That is, by making the nozzle surface 2 liquid repellent, the droplets D are less likely to adhere during the suction operation, and even when the droplets D adhere to the nozzle surface 2, the wiping unit 14 is used to discharge the head. 3 and the attached matter such as droplets attached to the nozzle surface 2 can be easily removed.

As described above, a silicon resin film such as a polymer-polymerized silicon film and a silicon-based silane coupling agent film are formed on the nozzle surface 2 of the present embodiment, and the functional liquid contains a material having a moisturizing effect. In this case, a dispersion medium containing water as a main component in which silver fine particles are dispersed is included. Therefore, the nozzle surface 2 has very high liquid repellency with respect to the functional liquid. Further, the amount of the surfactant contained in the functional liquid of the present embodiment is very small, and the functional liquid has a high surface tension. Therefore, the functional liquid does not spread on the nozzle surface 2 but remains on the nozzle surface 2 in a ball-like shape. Therefore, the wiping unit 14 can smoothly contact the functional liquid droplets on the nozzle surface 2 and the wiping surface 57a in a state where the nozzle surface 2 and the wiping surface 57a are separated from each other. In this manner, the wiping unit 14 can smoothly remove the functional liquid droplets (liquid foreign matter). Further, the wiping unit 14 can satisfactorily remove the foreign matter even if the liquid droplet of the functional liquid is solidified (solid foreign matter), and can prevent the foreign matter from entering the nozzle 1.

It should be noted that the liquid droplet D of the functional liquid does not cause the above suction operation to be performed for some reason on the nozzle surface 2.
There is also the possibility of sticking to. Therefore, the wiping unit 14 can execute a wiping operation for removing the functional liquid droplets D attached to the nozzle surface 2 without being limited to after the suction operation.

Further, as the deposit (foreign matter) adhering to the nozzle surface 2 of the ejection head 3, for example, there is a possibility of a foreign matter (particle) generated from the substrate P or a foreign matter (particle) floating in the chamber body 31. The wiping unit 14 can also remove these deposits appropriately.

After the wiping process for the ejection head 3 by the third moving body 6 is completed, the control device 10
Controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, and 7 together in the + Y direction (the direction from the second position A2 toward the first position A1) and to the first position A1. Two moving bodies 5 are arranged.
The control device 10 executes the landing accuracy measurement process of the ejection head 3 using the second moving body 5 arranged at the first position A1. Specifically, the control device 10 uses the landing accuracy measurement unit 13 of the second moving body 5 disposed at the first position A1 to drop the functional liquid droplet D discharged from each nozzle 1 of the discharge head 3. It is landed on the recording surface 70 of the sheet member 71. And this sheet member 7
The landing accuracy of the droplet D discharged from each nozzle 1 is measured from the landing position of the droplet D recorded on one recording surface 70.

After the landing accuracy measurement step is completed, the control device 10 controls the drive device 8 to move the plurality of moving bodies 4, 5, 6, and 7 in the + Y direction (the direction from the second position A2 toward the first position A1). ) And move the first moving body 4 to the first position A1. The control device 10 starts a process (pattern forming process) for ejecting the droplets D from the ejection head 3 to the substrate P held by the first moving body 4 arranged at the first position A1. The first moving body 4 cooperates with the ejection head 3,
A drawing process for forming a pattern on the substrate P with the droplets D is executed.

In the present embodiment, a plurality of (for example, about 10 to 20) substrates P (green sheets)
A droplet D is discharged on the substrate P, and a pattern is formed on each substrate P with the droplet D. The film F is removed from the substrate P after the pattern is formed with the droplets D. Then, a plurality of substrates P having a pattern formed by droplets D are stacked, and a stacked body of the substrates P is formed. Thereafter, the laminated body of the substrates P is heat-treated. Thereby, the droplets D on the substrate P are dried and fired, and the substrate P (green sheet) is also fired. Thereby, an LTCC substrate (LTCC multilayer circuit substrate) having a predetermined wiring pattern is formed.

By the way, in the droplet discharge device IJ, in the capping unit 15, the flow path 54
It is necessary to periodically clean the inside of the cap 48 so that the functional liquid inside does not solidify by drying and cause clogging.

Therefore, in the droplet discharge device IJ according to the present embodiment, a regular cleaning operation in the cap 48 is performed according to the flowchart shown in FIG. The cleaning operation in the cap 48 is performed as follows.
Although it is performed mainly when the apparatus is lowered, it may be performed every time a certain time elapses as a cap cleaning sequence. For example, in the case of operation for 24 hours, the cleaning operation is periodically performed once a day.

When performing the cleaning operation in the cap 48, first, in step S1, the ejection head 3 is retracted to a maintenance area other than the capping area. The maintenance area for retracting the ejection head 3 includes a wiping area and a landing accuracy measurement area. In this case, the wiping unit 14 of the third moving body 6 or the landing accuracy measuring unit 13 of the second moving body 5 may be disposed at the first position A1 facing the nozzle surface 2 of the ejection head 3. It is preferable to apply fine vibration to the ejection head 3. When applying a slight vibration to the ejection head 3, the controller 12 causes the piezoelectric element 33 to vibrate slightly according to the command (encoder input) from the control device 10 while the ejection head 3 is relatively moving. Drive signal to generate (
Fine vibration voltage waveform).

Next, in step S <b> 2, a slight vibration is applied to the evacuating ejection head 3. While the ejection head 3 is stopped, the drive of the piezo element 33 by the encoder input is stopped, but the controller 12 causes the piezo element 33 to vibrate slightly based on a command from the control device 10 as a cap cleaning mode. What is necessary is just to supply the drive signal (microvibration voltage waveform) for generating. Note that the order in which the minute vibration is applied in step S1 and step S2 is not particularly limited. Even if the withdrawal of the ejection head 3 and the application of the minute vibration of the ejection head 3 are reversed, the order is the same. There may be.

Next, in step S3, after the suction of the cap 48 is started, the process proceeds to step S4, and the inside of the cap 48 is cleaned. The cleaning operation of the cap 48 can be performed manually or automatically. For example, the cleaning operation is performed while flowing a cleaning liquid in which an additive such as a surfactant is added into water into the cap portion 50 of the cap 48.

Further, while cleaning the inside of the cap 48 (specifically, the cap portion 50), the ejection head 3 retracted in the maintenance area is given fine vibration as described above. As a result, the ejection head 3 maintains a good state of the liquid droplets D ejected from the nozzle 1 while slightly vibrating the functional liquid in the nozzle 1 so that the thickening of the functional liquid does not proceed in the nozzle 1. be able to.

Next, in step S5, it is confirmed whether or not the cleaning of the cap 48 has been completed.
Specifically, in the case of automatic cleaning, after a certain time (for example, 1 minute per head) determined according to the number of cap portions 50 (that is, the number of ejection heads 3) has elapsed, the limiter is turned on. In operation, the injection of the cleaning liquid stops, and the process proceeds to step S6. On the other hand, in the case of manual operation, the operator confirms whether or not the cleaning inside the cap 48 is actually completed. If the cleaning is completed, the process proceeds to step S6. If the cleaning is insufficient, the process returns to step S4 again. The cleaning operation in the cap 48 is repeated.

Next, in step S6, after stopping the suction of the cap 48, the process proceeds to step S7, and the application of fine vibration to the ejection head 3 is stopped. Then, the process proceeds to step S8, and it is confirmed whether or not the operation is to be ended after the inside of the cap 48 is cleaned. This confirmation work can be performed at the operator's discretion. When the work is finished, the process proceeds to step S9, and when the work is resumed, the process proceeds to step S11. This determination may be given as an argument as a work end flag at the start of the flowchart. For example, if the work end flag is ON, the process proceeds to step S9. If the work end flag is OFF, the process proceeds to step S11. Can be performed automatically.

In step S9, when the work is finished, the ejection head 3 is returned to the capping area. In this case, the capping unit 15 of the fourth moving body 7 is disposed at the first position A1 facing the nozzle surface 2 of the ejection head 3. At this time, it is preferable to apply fine vibration to the ejection head 3. Then, the process proceeds to step S10, the cap 48 is brought into contact with the nozzle surface 2 of the ejection head 3, and then the operation is ended by turning off the power of the apparatus. After work is complete
Since the nozzle surface 2 of the discharge head 3 is covered with the cap 48, drying of the nozzle surface 2 (nozzle 1) can be suppressed.

On the other hand, when the operation is resumed in step S11, a discharge head maintenance process is executed. In this maintenance process, the capping unit 15 of the fourth moving body 7 disposed at the first position A1 is used to cover the nozzle surface 2 of the ejection head 3 with a cap 48, and through the cap 48, the ejection head 3 A suction operation for sucking the nozzle 1 is executed. After that, by wiping the nozzle surface 2 of the ejection head 3 with the wiping surface 57a of the wiping member 57 using the wiping unit 14 of the third moving body 6 arranged at the first position A1,
A wiping operation for removing the deposit (foreign matter) adhering to the nozzle surface 2 is executed. In addition,
This suction operation is not necessarily forced and can be performed arbitrarily. That is, it is good also as a maintenance process only of wiping operation | movement, without performing suction operation.

In step S12, a flushing operation for discharging the droplet D from the nozzle 1 of the discharge head 3 to the cap 48 is performed using the capping unit 15 of the fourth moving body 7 arranged at the first position A1. May be. Note that this flushing operation is not necessarily compulsory and can be arbitrarily executed. Then, after the maintenance process is completed, the normal drawing sequence is resumed.

As described above, according to the present invention, even when the nozzle surface 2 of the ejection head 3 is exposed to the outside air during the cleaning operation in the cap 48, the nozzle 1 is prevented from increasing in viscosity in the nozzle 1. It is possible to maintain a good discharge state of the nozzle 1 while slightly vibrating the functional liquid inside.
When the work is to be finished after cleaning the inside of the cap 48, the power is turned off after the cap 48 is brought into contact with the nozzle surface 2 of the discharge head 3, and the work is resumed when the work is resumed.
By executing this maintenance process, it is possible to complete the maintenance process of the ejection head 3 performed at the time of resuming the work or starting up the apparatus in a short time. Therefore, according to the present invention,
Maintenance time for recovering the good discharge state of the nozzle 1 can be shortened, and as a result, productivity can be further improved.

In this embodiment, the order of the capping step, wiping step, landing accuracy measurement step, drawing step, and flushing step is merely an example, and the order and combination of these steps are arbitrarily changed. Is possible. In addition, the first moving body 4,
Substrate P and landing accuracy measuring unit 13 for second moving body 5, third moving body 6, and fourth moving body 7.
The arrangement of the wiping unit 14 and the capping unit 15 can be arbitrarily changed and implemented.

In addition, the maintenance process is performed for each operation of unloading the substrate P from the first moving body 4 and for each operation of loading the substrate P into the first moving body 4. For example, for each lot, every predetermined time interval Maintenance processing may be executed.

In the above-described embodiment, the case where the substrate is an LTCC substrate (green sheet) and a wiring pattern (circuit pattern) is formed on the substrate has been described as an example. However, the substrate is not limited to a green sheet, Depending on the device to be manufactured, such as a glass substrate or a semiconductor wafer, it can be appropriately selected. Further, the conductive fine particles of the functional liquid used are not only silver but also metal fine particles such as gold, copper, palladium, and nickel as disclosed in, for example, JP-A-2005-34837. It may be a conductive polymer. Moreover, the dispersion medium used can also be suitably selected according to electroconductive fine particles. In addition to the wiring pattern, at least a part of a thin film transistor (TFT) can be formed.

A device that can be manufactured using a droplet discharge device is not limited to a circuit board, and can form at least a part of a liquid crystal device, such as a color filter or an alignment film, or at least one of organic EL devices. A part can also be formed.

It is a schematic block diagram which shows the droplet discharge apparatus which concerns on this embodiment. It is a perspective view which shows a part of droplet discharge device concerning this embodiment. It is the figure which looked at the some discharge head supported by the carriage member from the lower side. It is sectional drawing for demonstrating an example of the structure of a discharge head. It is a figure which shows an example of a 1st moving body. It is a figure which shows an example of a 2nd moving body. It is a figure for demonstrating an example of operation | movement of a 2nd moving body. It is a figure which shows an example of a 3rd moving body. It is a figure for demonstrating an example of operation | movement of a 3rd moving body. It is a figure which shows an example of a 4th moving body. It is a figure for demonstrating an example of operation | movement of a 4th moving body. It is a perspective view which shows a heat insulation member. It is a side view which shows a heat insulation member. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on this embodiment. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on this embodiment. It is a figure which shows the operation | movement flow of the droplet discharge apparatus which concerns on this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Nozzle, 2 ... Nozzle surface, 3 ... Discharge head, 4 ... 1st moving body, 5 ... 2nd moving body, 6 ...
3rd moving body, 7 ... 4th moving body, 8 ... Drive apparatus, 9 ... Functional liquid storage apparatus, 10 ... Control apparatus, 1
2 ... Controller (control means), 13 ... Landing accuracy measuring unit, 14 ... Wiping unit, 1
5 ... Capping unit, 33 ... Piezo element (microvibration generating means), 48 ... Cap, I
J: Droplet ejection device, A1: First position, A2: Second position, D: Droplet, P: Substrate

Claims (2)

An ejection head having a nozzle surface provided with a plurality of nozzles, and ejecting droplets of functional liquid from each nozzle on the nozzle surface;
A capping unit having a cap that can contact the nozzle surface of the discharge head, and sucking the nozzle through the cap;
A wiping unit for wiping the nozzle surface of the ejection head with a wipe member;
A landing area for landing droplets discharged from the nozzles of the discharge head on a discharge target;
Moving means for relatively moving the ejection head between a capping area in which the capping unit is provided and a maintenance area including a wiping area in which the wiping unit is provided;
Fine vibration applying means for applying fine vibration to the ejection head;
Control means for controlling each part including the ejection head, the capping unit, the wiping unit, the moving means, and the fine vibration applying means,
Based on a command from the control unit, the cleaning head is retracted to a maintenance area other than the capping area while the cap of the capping unit is being cleaned, and the micro-vibration applying unit is configured to discharge the discharge during the retracting. Give a slight vibration to the head,
When the work is finished after cleaning the inside of the cap, the power is turned off after the cap is brought into contact with the nozzle surface of the discharge head, and when the work is resumed, the maintenance process of the discharge head is executed. A droplet discharge apparatus characterized by the above. An ejection head having a nozzle surface provided with a plurality of nozzles, and ejecting droplets of functional liquid from each nozzle on the nozzle surface;
A capping unit having a cap that can contact the nozzle surface of the discharge head, and sucking the nozzle through the cap;
A wiping unit for wiping the nozzle surface of the ejection head with a wipe member;
A landing area for landing droplets discharged from the nozzles of the discharge head on a discharge target;
A method for controlling a droplet discharge apparatus, comprising: a moving unit that relatively moves the discharge head between a capping area provided with the capping unit and a maintenance area including a wiping area provided with the wiping unit. Because
While cleaning the inside of the cap of the capping unit, the discharge head is retracted to a maintenance area other than the capping area, and a slight vibration is applied to the discharge head during the retracting,
When the work is finished after cleaning the inside of the cap, the power is turned off after the cap is brought into contact with the nozzle surface of the discharge head, and when the work is resumed, the maintenance process of the discharge head is executed. A method for controlling a droplet discharge device.

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