JP2006332524A - High-strength complex soft magnetic material having high strength, high magnetic flux density, high resistance and less iron loss, and manufacturing method thereof - Google Patents

High-strength complex soft magnetic material having high strength, high magnetic flux density, high resistance and less iron loss, and manufacturing method thereof Download PDF

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JP2006332524A
JP2006332524A JP2005157435A JP2005157435A JP2006332524A JP 2006332524 A JP2006332524 A JP 2006332524A JP 2005157435 A JP2005157435 A JP 2005157435A JP 2005157435 A JP2005157435 A JP 2005157435A JP 2006332524 A JP2006332524 A JP 2006332524A
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Kazunori Igarashi
和則 五十嵐
Muneaki Watanabe
宗明 渡辺
Ryoji Nakayama
亮治 中山
Koichiro Morimoto
耕一郎 森本
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Diamet Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a complex soft magnetic sintered material having high strength, high magnetic flux density and high resistance, and to provide a manufacturing method thereof. <P>SOLUTION: The high-strength complex soft magnetic material having high strength, high magnetic flux density, high resistance and less iron loss is configured in such a way that an Mg-containing iron oxide film covered iron powder having a sulfur concentrated layer containing sulfur of higher concentration than that of sulfur contained in the center of iron powder in an interface region between an Mg-Fe-O three dimensional system oxide deposit film containing at least (Mg, Fe)O and the iron powder is combined in a low melting glass phase. The Mg-Fe-O three dimensional system oxide deposit film containing at least (Mg, Fe)O has a minute crystalline structure of a crystal grain size of 200 nm or low, and has the uppermost surface substantially formed of MgO. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されてなるMg含有酸化鉄膜被覆鉄粉末を低融点ガラスで相で結合してなる高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材およびその製造方法に関するものであり、この高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材で作製した複合軟磁性材は、低鉄損を必要とする各種電磁気回路部品、例えば、モータ、アクチュエータ、ヨーク、コア、リアクトルなどの各種電磁気部品の素材として使用されるものである。   According to the present invention, an Mg-containing iron oxide film-coated iron powder in which an Mg-Fe-O ternary oxide deposition film containing at least (Mg, Fe) O is coated on the surface of an iron powder is made into a phase with a low melting glass. The present invention relates to a high-strength composite soft magnetic material with low iron loss having high strength, high magnetic flux density and high resistance, and a method for producing the same, and the iron loss having high strength, high magnetic flux density and high resistance is low. Composite soft magnetic materials made of high-strength composite soft magnetic materials are used as materials for various electromagnetic circuit components that require low iron loss, such as motors, actuators, yokes, cores, reactors, etc. It is.

一般に、各種電磁気回路部品に使用される軟磁性材は、鉄損が小さいことが要求されるため、電気抵抗を高くして渦電流損を低減させ、保磁力を小さくしてヒステリシス損を低減させることは一般に知られている。さらに、近年、電磁気回路の小型化、高応答化が求められているところから、磁束密度がより高いことも重要視されている。   In general, soft magnetic materials used in various electromagnetic circuit components are required to have low iron loss. Therefore, electrical resistance is increased to reduce eddy current loss, and coercive force is reduced to reduce hysteresis loss. It is generally known. Furthermore, in recent years, since the miniaturization and high response of the electromagnetic circuit have been demanded, higher magnetic flux density is also regarded as important.

かかる高比抵抗を有する軟磁性材料を製造するための原料粉末の一例として鉄粉末の表面に化学的な方法によりMg含有フェライト膜を被覆したMg含有酸化鉄膜被覆鉄粉末が知られており(特許文献1参照)、この化学的な方法によりMg含有フェライト膜を被覆したMg含有酸化鉄膜被覆鉄粉末を低融点ガラス粉末と共に混合して混合粉末を作製し、この混合粉末を圧縮成形し熱処理して圧粉磁性材料などを製造する方法も知られている(特許文献2または3参照)。
特開平11−1702号公報 特開2004−253787号公報 特開2004−297036号公報
As an example of a raw material powder for producing a soft magnetic material having such a high specific resistance, an iron powder coated with an Mg-containing iron oxide film in which the surface of the iron powder is coated with an Mg-containing ferrite film by a chemical method is known ( Patent Document 1), an iron powder coated with an Mg-containing iron oxide film coated with an Mg-containing ferrite film by this chemical method is mixed with a low melting point glass powder to produce a mixed powder, and the mixed powder is compression-molded and heat treated Thus, a method for producing a dust magnetic material or the like is also known (see Patent Document 2 or 3).
Japanese Patent Laid-Open No. 11-1702 JP 2004-253787 A JP 2004-297036 A

しかし、従来のMg含有フェライト膜を被覆したMg含有酸化鉄膜被覆鉄粉末は、鉄粉末の表面にMg含有フェライト膜を化学的方法により被覆するために、プレス成形した圧粉体に高温歪取り焼成を行って得られた複合軟磁性材は、Mg含有フェライト膜が化学的に不安定となり変化して絶縁性が低下すると共に、鉄粉末の表面に対するMg含有フェライト膜の密着性が十分でなく、従来のMg含有フェライト膜を被覆したMg含有酸化鉄膜被覆鉄粉末を低融点ガラス粉末と混合して得られた混合粉末をプレス成形し熱処理することにより作製した複合軟磁性材はプレス成形中にMg含有フェライト膜が剥離したり破れるなどして十分な絶縁効果が発揮できず、したがって、十分な高比抵抗が得られないという問題点があった。   However, the conventional iron powder coated with Mg-containing iron oxide film coated with Mg-containing ferrite film has a high-temperature strain-relief effect on press-molded green compacts to coat the Mg-containing ferrite film on the surface of the iron powder by a chemical method. In the composite soft magnetic material obtained by firing, the Mg-containing ferrite film becomes chemically unstable and changes to deteriorate the insulation, and the adhesion of the Mg-containing ferrite film to the surface of the iron powder is not sufficient. A composite soft magnetic material produced by press-molding and heat-treating a mixed powder obtained by mixing a Mg-containing iron oxide film-coated iron powder coated with a conventional Mg-containing ferrite film with a low-melting glass powder is under press molding. In addition, the Mg-containing ferrite film is peeled off or torn, so that a sufficient insulating effect cannot be exhibited, and therefore a sufficient high specific resistance cannot be obtained.

本発明者らは、かかる問題点を解決するために、先に、
(a)少なくともMgウスタイト(以下、(Mg,Fe)Oと記す)を含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されているMg含有酸化鉄膜被覆鉄粉末、
(b)少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されているMg含有酸化鉄膜被覆鉄粉末であって、前記鉄粉末と前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜との界面領域に、鉄粉末の中心部に含まれる硫黄よりも高濃度の硫黄を含む硫黄濃化層を有するMg含有酸化鉄膜被覆鉄粉末、
(c)前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、結晶粒径:200nm以下の微細結晶組織を有する前記(a)または(b)記載のMg含有酸化鉄膜被覆鉄粉末、
(d)前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その最表面が実質的にMgOで構成されている前記(a)、(b)または(c)記載のMg含有酸化鉄膜被覆鉄粉末、などを発明した。
In order to solve such problems, the present inventors firstly
(A) Mg-containing iron oxide film-coated iron powder in which an Mg-Fe-O ternary oxide deposition film containing at least Mg wustite (hereinafter referred to as (Mg, Fe) O) is coated on the surface of the iron powder ,
(B) a Mg-containing iron oxide film-coated iron powder in which an Mg-Fe-O ternary oxide deposition film containing at least (Mg, Fe) O is coated on the surface of the iron powder, In the interface region with the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O, a sulfur enriched layer containing sulfur at a higher concentration than sulfur contained in the central portion of the iron powder. Mg-containing iron oxide film-coated iron powder having,
(C) The Mg-Fe-O ternary oxide deposited film containing at least (Mg, Fe) O has a fine crystal structure with a crystal grain size of 200 nm or less. The Mg according to (a) or (b) Containing iron oxide film coated iron powder,
(D) The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O has the outermost surface substantially composed of MgO, (a), (b) or ( c) The Mg-containing iron oxide film-coated iron powder described in the above was invented.

かかる先に発明した前記(a)、(b)、(c)または(d)記載のMg含有酸化鉄膜被覆鉄粉末は、鉄粉末を予め酸化雰囲気中で加熱するなどして酸化処理を施すことにより鉄粉末の表面に酸化鉄膜を形成した鉄粉末(以下、酸化処理鉄粉末という)を作製し、この酸化処理鉄粉末にMg粉末を添加し混合して得られた混合粉末を不活性ガス雰囲気または真空雰囲気中で加熱するなどした後さらに酸化性雰囲気中で加熱する酸化処理を施すことにより得られるものであり、これら先に発明したMg含有酸化鉄膜被覆鉄粉末は、
(イ)一般に知られているMgO−FeO−Fe系で代表される(Mg,Fe)O、(Mg,Fe)などのMg−Fe−O三元系各種酸化物のうちで、少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に形成され、この少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されたMg含有酸化鉄膜被覆鉄粉末は、従来の鉄粉末の表面にMg含有フェライト膜を形成したMg含有酸化鉄膜被覆鉄粉末に比べてMg含有酸化鉄膜の鉄粉末に対する密着性が格段に優れることから、プレス成形中に絶縁皮膜である酸化鉄膜が破壊されて鉄粉末同士が接触することが少なく、プレス成形後に高温歪取り焼成を行ってもMg含有酸化鉄膜の絶縁性が低下することなく高抵抗を維持することができるところから渦電流損失が低くなり、さらに歪取り焼成を行った場合に、より保磁力が低減できることからヒステリシス損失を低く抑えることができ、したがって、低鉄損を有する複合軟磁性材料が得られること、
(ロ)前記鉄粉末と少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜との界面領域には、鉄粉末の中心部に不可避不純物として含まれている硫黄よりも高濃度の硫黄を含む硫黄濃化層が形成されること、
(ハ)前記前記鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は結晶粒径:200nm以下の微細結晶組織を有すること、
(ニ)前記鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その最表面に含まれるMgOの量が多いほど好ましく、その最表面は実質的にMgOで構成されていることが最も好ましい、ことなどの知見に基づいて成されたものである。
The Mg-containing iron oxide film-coated iron powder described in (a), (b), (c) or (d) previously invented is subjected to oxidation treatment by heating the iron powder in an oxidizing atmosphere in advance. As a result, an iron powder having an iron oxide film formed on the surface of the iron powder (hereinafter referred to as “oxidized iron powder”) was prepared, and the mixed powder obtained by adding and mixing Mg powder into this oxidized iron powder was inert. After being heated in a gas atmosphere or vacuum atmosphere, etc., it is obtained by performing an oxidation treatment in which it is further heated in an oxidizing atmosphere, and the Mg-containing iron oxide film-coated iron powder previously invented is
(A) Various oxides of Mg-Fe-O ternary system such as (Mg, Fe) O, (Mg, Fe) 3 O 4 and the like represented by the generally known MgO-FeO-Fe 2 O 3 system Among them, a Mg—Fe—O ternary oxide deposition film containing at least (Mg, Fe) O is formed on the surface of the iron powder, and this Mg—Fe—O ternary containing at least (Mg, Fe) O. Mg-containing iron oxide film-coated iron powder coated with an oxide-based oxide film on the surface of iron powder is more Mg than iron powder coated with Mg-containing iron oxide film in which an Mg-containing ferrite film is formed on the surface of conventional iron powder. Since the adhesion of the iron oxide film to the iron powder is remarkably superior, the iron oxide film, which is an insulating film, is less likely to break during press molding and the iron powder does not come into contact with each other. Even if it goes, the insulating property of the Mg-containing iron oxide film decreases The eddy current loss is low because it can maintain a very high resistance, and the hysteresis loss can be kept low because the coercive force can be further reduced when the strain relief firing is performed. A composite soft magnetic material having
(B) In the interface region between the iron powder and the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O, sulfur contained as an inevitable impurity in the center of the iron powder A sulfur-enriched layer containing a high concentration of sulfur is formed,
(C) The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the iron powder has a fine crystal structure with a crystal grain size of 200 nm or less;
(D) The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the iron powder is preferably as the amount of MgO contained in the outermost surface is larger. The outermost surface is made based on the knowledge that it is most preferable that the outermost surface is substantially composed of MgO.

これら先に発明した前記(a)〜(c)のMg含有酸化鉄膜被覆鉄粉末の製造方法を一層具体的に説明すると、まず、鉄粉末を予め酸化雰囲気中、温度:50〜500℃に加熱して酸化処理することにより鉄粉末の表面に酸化鉄膜を形成した酸化処理鉄粉末を作製し、これらの粉末にMg粉末を添加し混合して得られた混合粉末を温度:150〜1100℃、圧力:1×10−12〜1×10−1MPaの不活性ガス雰囲気または真空雰囲気中で加熱した後、必要によりさらに酸化性雰囲気中、温度:50〜350℃で加熱したのち酸化処理を施すことにより作製する。 The production method of the Mg-containing iron oxide film-coated iron powders (a) to (c) previously invented will be described more specifically. First, the iron powder is preliminarily set in an oxidizing atmosphere at a temperature of 50 to 500 ° C. Oxidation-treated iron powder in which an iron oxide film is formed on the surface of the iron powder by heating and oxidation treatment is produced, and the mixed powder obtained by adding and mixing Mg powder to these powders is temperature: 150 to 1100 C., pressure: 1 × 10 −12 to 1 × 10 −1 MPa in an inert gas atmosphere or vacuum atmosphere, and if necessary, further heated in an oxidizing atmosphere at a temperature of 50 ° C. to 350 ° C. and then oxidized. It is produced by applying.

また、先に発明した前記(d)記載の少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜の最表面が実質的にMgOで構成されているMg−Fe−O三元系酸化物堆積膜は、鉄粉末を予め酸化雰囲気中、温度:50〜500℃に加熱して酸化処理することにより鉄粉末の表面に酸化鉄膜を形成した酸化処理鉄粉末を作製し、これらの粉末にMg粉末を一層多く添加し混合して得られた混合粉末を温度:150〜1100℃、圧力:1×10−12〜1×10−1MPaの不活性ガス雰囲気または真空雰囲気中で加熱した後、さらに酸化性雰囲気中で一層長時間加熱したのち酸化処理を施すことにより得られる。 In addition, the Mg—Fe— in which the outermost surface of the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O described in the above (d) is substantially composed of MgO. O ternary oxide deposited film is prepared by oxidizing iron powder by heating it in an oxidizing atmosphere at a temperature of 50-500 ° C in advance to form an iron oxide film on the surface of the iron powder. Then, the mixed powder obtained by adding and mixing more Mg powder to these powders is an inert gas atmosphere or vacuum at a temperature of 150 to 1100 ° C. and a pressure of 1 × 10 −12 to 1 × 10 −1 MPa. After heating in an atmosphere, it is obtained by further heating in an oxidizing atmosphere for a longer time and then performing an oxidation treatment.

前述の先に発明した前記(a)〜(d)のMg含有酸化鉄膜被覆鉄粉末について、さらに詳細に説明する。前記(a)〜(d)のMg含有酸化鉄膜被覆鉄粉末の表面に形成されているMg−Fe−O三元系酸化物堆積膜は、一般に知られているMgウスタイト((Mg,Fe)O)、(Mg,Fe)などのMg−Fe−O系酸化物の内でもMgウスタイト(Mg,Fe)O酸化物を含むことが好ましいことから、少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜であることが好ましく、この少なくとも(Mg,Fe)Oを含む堆積膜の最表面はMgOで構成さていることが最も好ましい。このMgウスタイトは(Mg,Fe):O=1:1のものだけではなくOが固溶幅を有していても良い。
「堆積膜」という用語は、通常、真空蒸発やスパッタされた皮膜構成原子が例えば基板上に堆積した皮膜を示すが、前記鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、酸化鉄膜を有する鉄粉末表面の酸化鉄(Fe−O)とMgが反応を伴って当該鉄粉末表面に堆積した皮膜を示す。そして、この鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜の膜厚は、圧粉成形した複合軟磁性材の高磁束密度と高比抵抗を得るために、5nm〜500nmの範囲内にあることが好ましい。膜厚が5nmより薄いと圧粉成形した複合軟磁性材の比抵抗が充分でなく渦電流損が増加するので好ましくなく、一方、膜厚が500nmより厚いと圧粉成形した複合軟磁性材の磁束密度が低下して好ましくないからである。さらに好ましい膜厚は5nm〜200nmの範囲内である。
The Mg-containing iron oxide film-coated iron powders (a) to (d) previously invented will be described in more detail. The Mg-Fe-O ternary oxide deposited film formed on the surface of the Mg-containing iron oxide film-coated iron powders (a) to (d) is generally known as Mg wustite ((Mg, Fe ) O) and Mg-Fe-O-based oxides such as (Mg, Fe) 3 O 4 are preferable to contain Mg wustite (Mg, Fe) O oxide, so at least (Mg, Fe) O. An Mg—Fe—O ternary oxide deposited film containing is preferable, and the outermost surface of the deposited film containing at least (Mg, Fe) O is most preferably composed of MgO. This Mg wustite is not limited to (Mg, Fe): O = 1: 1, but O may have a solid solution width.
The term “deposited film” usually refers to a film in which atoms constituting the film formed by vacuum evaporation or sputtering are deposited on a substrate, for example, and includes at least (Mg, Fe) O formed on the surface of the iron powder. The Mg—Fe—O ternary oxide deposition film indicates a film in which iron oxide (Fe—O) and Mg on the iron powder surface having an iron oxide film are deposited on the iron powder surface with a reaction. The film thickness of the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the iron powder is equal to the high magnetic flux density of the compacted composite soft magnetic material. In order to obtain a high specific resistance, it is preferably in the range of 5 nm to 500 nm. If the film thickness is less than 5 nm, the specific resistance of the powder-molded composite soft magnetic material is not sufficient and the eddy current loss increases. On the other hand, if the film thickness is thicker than 500 nm, it is not preferable. This is because the magnetic flux density is lowered, which is not preferable. A more preferable film thickness is in the range of 5 nm to 200 nm.

先に発明した前記(a)〜(d)のMg含有酸化鉄膜被覆鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜と鉄粉末との界面領域に、鉄粉末の中心部に含まれる硫黄よりも高濃度の硫黄を含む硫黄濃化層を有する。この硫黄濃化層を有することはオージェ電子分光法により硫黄濃度を測定し、これをグラフに表すと、硫黄濃度ピークを示すことから確認することができる。界面領域にこの様な硫黄濃化層を有することにより少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜の鉄粉末表面に対する密着性がより一層優れるようになり、圧粉成形時の粉末の変形に堆積膜が追従して被覆の破れを防止することができ、焼成時にも鉄粉末同士の接触結合を防止することができて高抵抗を維持することができ、したがって渦電流損失が低くなる。硫黄濃化層の硫黄は、鉄粉末には不可避不純物として硫黄が含まれており、大部分はこの鉄粉末の表面部分に含まれる硫黄から供給されると考えられる。
前記(a)〜(d)のMg含有酸化鉄膜被覆鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その結晶粒が微細であるほど好ましく、結晶粒径が200nm以下の微細結晶組織を有する事が好ましい。この様な微細結晶組織を有することにより、圧粉成形時の粉末の変形に微結晶Mg−Fe−O三元系酸化物堆積膜が追従して被覆の破れを防止することができ、焼成時にも鉄粉末同士の接触結合を防止することができ、また、高温歪取り焼成を行っても酸化物が安定で絶縁性低下が防止でき高抵抗で渦電流損失が低くなる。結晶粒径が200nmより大きいと、圧縮成形時に被膜が破れて絶縁性が低下したり、Mg−Fe−O三元系酸化物堆積膜の膜厚が500nmよりも厚くなったりして圧粉成形した複合軟磁性材の磁束密度が低下するようになるので好ましくない。
また、前記(d)のMg含有酸化鉄膜被覆鉄粉末の表面に形成されている少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その最表面におけるMgOの含有量が多くなるほど好ましく、実質的にMgOで構成されていることが最も好ましい。最表面が実質的にMgOであると、プレス成形した圧粉体の焼成時にもFeの拡散が防止され鉄粉末同士の接触結合を防止することができ絶縁性低下が防止でき高抵抗で渦電流損失が低くなるからである。
The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the iron powder coated with the Mg-containing iron oxide film of the above-described inventions (a) to (d), , Sulfur containing a higher concentration of sulfur than the sulfur contained in the center of the iron powder in the interface region between the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O and the iron powder Has a thickened layer. Having this sulfur-concentrated layer can be confirmed from the fact that the sulfur concentration is measured by Auger electron spectroscopy, and this is shown in a graph, indicating a sulfur concentration peak. By having such a sulfur-concentrated layer in the interface region, the adhesion of the Mg-Fe-O ternary oxide deposited film containing at least (Mg, Fe) O to the iron powder surface becomes even better. The deposited film can follow the deformation of the powder at the time of compacting to prevent the coating from being torn, the contact bonding between the iron powders can be prevented even during firing, and high resistance can be maintained, Therefore, eddy current loss is reduced. The sulfur in the sulfur-concentrated layer is considered to be supplied from sulfur contained in the surface portion of the iron powder because the iron powder contains sulfur as an unavoidable impurity.
The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the Mg-containing iron oxide film-coated iron powders (a) to (d) has crystal grains. Is preferably as fine as possible, and preferably has a fine crystal structure with a crystal grain size of 200 nm or less. By having such a fine crystal structure, the microcrystalline Mg—Fe—O ternary oxide deposited film can follow the deformation of the powder during compacting and prevent the coating from being broken. In addition, contact bonding between iron powders can be prevented, and even when high-temperature strain relief firing is performed, the oxide is stable and insulation deterioration can be prevented, and eddy current loss is reduced with high resistance. If the crystal grain size is larger than 200 nm, the coating will be broken during compression molding, resulting in reduced insulation, and the Mg—Fe—O ternary oxide deposited film will be thicker than 500 nm. This is not preferable because the magnetic flux density of the composite soft magnetic material is lowered.
In addition, the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O formed on the surface of the Mg-containing iron oxide film-coated iron powder (d) is MgO on the outermost surface. The content of is preferably as high as possible, and is most preferably substantially composed of MgO. When the outermost surface is substantially MgO, the diffusion of Fe is prevented even during firing of the green compact that has been press-molded, and contact bonding between iron powders can be prevented. This is because loss is reduced.

この発明は、先に発明した(a)〜(d)記載のMg含有酸化鉄膜被覆鉄粉末を使用して一層高強度、高磁束密度および高比抵抗を有する高強度複合軟磁性材およびその製造方法を提供することを目的とするものであって、先に発明した前記(a)〜(d)記載のMg含有酸化鉄膜被覆鉄粉末をガラス相で結合してなる高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材およびその製造方法に関するものである。すなわち、この発明は、
(1)少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されているMg含有酸化鉄膜被覆鉄粉末を低融点ガラス相で結合してなる高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材、
(2)少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されておりかつ前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜と鉄粉末との界面領域に鉄粉末の中心部に含まれる硫黄よりも高濃度の硫黄を含む硫黄濃化層を有するMg含有酸化鉄膜被覆鉄粉末が、低融点ガラス相で結合されてなる高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材、
(3)前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、結晶粒径:200nm以下の微細結晶組織を有する前記(1)または(2)記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材、
(4)前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その最表面が実質的にMgOで構成されている前記(1)、(2)または(3)記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材、
(5)前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末に低融点ガラス粉末を混合して混合粉末を作製し、この混合粉末を圧縮成形したのち熱処理する高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法、に特徴を有するものである。
This invention is a high-strength composite soft magnetic material having higher strength, higher magnetic flux density and higher specific resistance using the Mg-containing iron oxide film-coated iron powder described in (a) to (d) above, and its An object of the present invention is to provide a production method, which is a high-strength, high-magnetic flux formed by bonding the Mg-containing iron oxide film-coated iron powder described in (a) to (d) above in a glass phase. The present invention relates to a high-strength composite soft magnetic material having low density and high resistance, and a method for producing the same. That is, this invention
(1) An Mg-containing iron oxide film-coated iron powder in which an Mg-Fe-O ternary oxide deposited film containing at least (Mg, Fe) O is coated on the surface of the iron powder is bonded with a low melting glass phase. High strength composite soft magnetic material with low iron loss and high strength, high magnetic flux density and high resistance,
(2) A Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O is coated on the surface of the iron powder, and the Mg—Fe—O containing at least (Mg, Fe) O. The Mg-containing iron oxide film-coated iron powder having a sulfur-concentrated layer containing a higher concentration of sulfur than the sulfur contained in the center of the iron powder in the interface region between the ternary oxide deposited film and the iron powder has a low melting point. High strength composite soft magnetic material with low iron loss having high strength, high magnetic flux density and high resistance bonded by glass phase,
(3) The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O has a fine crystal structure with a crystal grain size of 200 nm or less. High strength composite soft magnetic material with low iron loss with strength, high magnetic flux density and high resistance,
(4) The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O has the outermost surface substantially composed of MgO (1), (2) or ( 3) A high-strength composite soft magnetic material having a low iron loss and having a high strength, a high magnetic flux density and a high resistance as described above,
(5) A low melting point glass powder is mixed with the Mg-containing iron oxide film-coated iron powder described in (1), (2), (3) or (4) to produce a mixed powder, and the mixed powder is compression molded. It is characterized by a method for producing a high-strength composite soft magnetic material having a high iron strength, high magnetic flux density, and high resistance and low iron loss.

前記低融点ガラス粉末は、融点が低くても常温では硬い粉末であり、前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末に低融点ガラス粉末を混合して作製した混合粉末を圧縮成形する際にMg含有酸化鉄膜被覆鉄粉末の表面に形成されているMg含有酸化鉄膜を傷つけたり破損したりする可能性がある。
これを避けるために、前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末における低融点ガラス前駆体の有機成分を加熱分解することによりMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラスを被覆した低融点ガラスを被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラスを被覆したMg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち温度:300〜1000℃で熱処理するか、または前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末の表面に、低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち温度:300〜1000℃で熱処理し、前記熱処理する際に低融点ガラス前駆体の有機成分を加熱分解させることにより作製することが一層好ましい。したがって、この発明は、
(6)前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末の表面に、低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末における低融点ガラス前駆体の有機成分を加熱分解することによりMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラスを被覆した低融点ガラスを被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラスを被覆したMg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち熱処理する高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法、
(7)前記(1)、(2)、(3)または(4)記載のMg含有酸化鉄膜被覆鉄粉末の表面に、低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち熱処理し、前記熱処理する際に低融点ガラス前駆体の有機成分を加熱分解させる高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法、
(8)前記熱処理の温度は300〜1000℃の範囲内である前記(5)、(6)または(7)記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法、に特徴を有するものである。
The low-melting-point glass powder is a hard powder at room temperature even though the melting point is low, and the low-melting-point glass powder is added to the Mg-containing iron oxide film-coated iron powder described in (1), (2), (3) or (4). There is a possibility that the Mg-containing iron oxide film formed on the surface of the Mg-containing iron oxide film-coated iron powder may be damaged or damaged when the mixed powder produced by mixing is compression molded.
In order to avoid this, the complex or alkoxide of the element constituting the low melting point glass is used as the organic solvent on the surface of the Mg-containing iron oxide film-coated iron powder described in (1), (2), (3) or (4). The low melting point in the Mg-containing iron oxide film-coated iron powder coated with the low-melting glass precursor was prepared by applying the melted solution and drying to prepare the Mg-containing iron oxide film-coated iron powder coated with the low-melting-point glass precursor. An Mg-containing iron oxide film-coated iron powder was prepared by thermally decomposing the organic components of the glass precursor to coat the low-melting glass with the low-melting glass coated on the surface of the Mg-containing iron oxide film-coated iron powder. After compression-molding the Mg-containing iron oxide film-coated iron powder coated with glass, heat treatment is performed at a temperature of 300 to 1000 ° C., or the Mg-containing oxidation described in the above (1), (2), (3) or (4) An iron powder coated with Mg-containing iron oxide film coated with a low-melting-point glass precursor by applying a solution obtained by dissolving a complex or alkoxide of an element constituting the low-melting-point glass in an organic solvent on the surface of the film-coated iron powder and drying it. After producing and compression-molding the Mg-containing iron oxide film-coated iron powder coated with this low-melting glass precursor, heat treatment is performed at a temperature of 300 to 1000 ° C., and the organic component of the low-melting glass precursor is heated during the heat treatment. It is more preferable to prepare by decomposing. Therefore, the present invention
(6) A complex or alkoxide of an element constituting the low-melting glass was dissolved in an organic solvent on the surface of the Mg-containing iron oxide film-coated iron powder described in (1), (2), (3) or (4). An Mg-containing iron oxide film-coated iron powder coated with a low-melting glass precursor was prepared by applying the solution and drying, and the low-melting-point glass precursor in the Mg-containing iron oxide film-coated iron powder coated with this low-melting glass precursor The organic component of the body is thermally decomposed to produce a Mg-containing iron oxide film-coated iron powder coated with a low-melting glass coated with a low-melting glass on the surface of the Mg-containing iron oxide film-coated iron powder. A method for producing a high-strength composite soft magnetic material with low iron loss, having high strength, high magnetic flux density and high resistance, which is compression-molded and coated with Mg-containing iron oxide film-coated iron powder,
(7) On the surface of the Mg-containing iron oxide film-coated iron powder described in (1), (2), (3) or (4), an element complex or alkoxide constituting the low-melting glass is dissolved in an organic solvent. After the solution is applied and dried, an iron powder coated with Mg-containing iron oxide film coated with a low-melting glass precursor is prepared, and the iron powder coated with Mg-containing iron oxide film coated with the low-melting glass precursor is compression-molded. A method for producing a high-strength composite soft magnetic material having low iron loss and having high strength, high magnetic flux density and high resistance by heat-treating and thermally decomposing an organic component of the low-melting-point glass precursor during the heat treatment,
(8) The temperature of the heat treatment is in the range of 300 to 1000 ° C. The high strength composite softening having high strength, high magnetic flux density and high resistance and low iron loss as described in (5), (6) or (7). It is characterized by a method for manufacturing a magnetic material.

この発明の高強度、高磁束密度および高抵抗を有する鉄損の少ない複合軟磁性焼結材およびその製造方法において、先に発明した前記(a)〜(d)記載のMg含有酸化鉄膜被覆鉄粉末の表面に形成する低融点ガラスは、SiO2−B23−Al23系ガラス、SiO2−BaO−Al23系ガラス、SiO2−BaO−B23系ガラス、SiO2−BaO−Li23系ガラス、SiO2−B23−CaO系ガラス、SiO2−MgO−Al23系ガラス、B23−Li23系ガラス、PbO−B23系ガラス、PbO−B23−ZnO系ガラス、Bi23−B23系ガラス、Li2O−ZnO系ガラス、SiO2−B23−PbO系ガラス、Al23−B23−PbO系ガラス、SnO−P25系ガラス、ZnO−P25系ガラス、CuO−P25系ガラスなどのリン酸系ガラスなどがあり、これら低融点ガラスはいずれも軟化温度が300〜800℃の低軟化温度を有する低融点ガラスである。 In the composite soft magnetic sintered material having a high strength, a high magnetic flux density and a high resistance and a small iron loss according to the present invention, and a method for producing the same, the Mg-containing iron oxide film coating according to the above (a) to (d) described above The low melting point glass formed on the surface of the iron powder is SiO 2 —B 2 O 3 —Al 2 O 3 glass, SiO 2 —BaO—Al 2 O 3 glass, SiO 2 —BaO—B 2 O 3 glass. , SiO 2 —BaO—Li 2 O 3 glass, SiO 2 —B 2 O 3 —CaO glass, SiO 2 —MgO—Al 2 O 3 glass, B 2 O 3 —Li 2 O 3 glass, PbO —B 2 O 3 glass, PbO—B 2 O 3 —ZnO glass, Bi 2 O 3 —B 2 O 3 glass, Li 2 O—ZnO glass, SiO 2 —B 2 O 3 —PbO glass , Al 2 O 3 -B 2 O 3 -PbO based glass, SnO-P 2 O 5 based glass, Z O-P 2 O 5 based glass, phosphoric acid-based glass such as CuO-P 2 O 5 based glass, low-melting glass All of these low-melting glass having a softening temperature has a low softening temperature of 300 to 800 ° C. It is.

これら低融点ガラスを形成するための低融点ガラス前駆体である低融点ガラスを構成する元素の錯体としては、ヒドリド錯体、カルボニル錯体、メタロセン錯体、アルキル錯体、シリル錯体、ポルフィリン錯体、アリル錯体、芳香環錯体、オレフィン錯体、ジエン錯体、カルベン錯体、カルビン錯体、アレーン錯体、ホスフィン錯体、アルキン錯体、ジケトン錯体(ジケトナート化合物)を使用することができ、また、低融点ガラスを構成する元素のアルコキシドとしては、メトキシ基、エトキシ基、n−プロポキシ基、i−プロポキシ基、n−ブトキシ基、i−ブトキシ基、sec−ブトキシ基、t−ブトキシ基、アミロキシ基、フェノキシ基、ナフトキシ基などのうちの1種または2種以上を官能基として有するアルコキシドを使用することができる。
その他の有機金属、例えばカルボン酸などの有機酸の金属塩なども使用することができるが、有機成分が分解する際に、分解生成物である炭素が粉末表面に残留し易く、圧粉磁心の機械的強度を低下させるので好ましくない。
The complex of the elements constituting the low melting glass, which is a low melting glass precursor for forming these low melting glasses, includes hydride complexes, carbonyl complexes, metallocene complexes, alkyl complexes, silyl complexes, porphyrin complexes, allyl complexes, aromatics. Ring complexes, olefin complexes, diene complexes, carbene complexes, carbene complexes, arene complexes, phosphine complexes, alkyne complexes, diketone complexes (diketonate compounds) can be used, and alkoxides of elements that constitute low-melting glass , Methoxy group, ethoxy group, n-propoxy group, i-propoxy group, n-butoxy group, i-butoxy group, sec-butoxy group, t-butoxy group, amyloxy group, phenoxy group, naphthoxy group, etc. Use an alkoxide having a species or two or more species as functional groups Door can be.
Other organic metals such as metal salts of organic acids such as carboxylic acids can also be used, but when the organic component decomposes, the decomposition product carbon tends to remain on the powder surface, and the dust core This is not preferable because it reduces the mechanical strength.

この発明の高強度、高磁束密度および高抵抗を有する複合軟磁性焼結材の製造方法において、先に発明した前記(a)〜(d)記載のMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラス前駆体または低融点ガラスを被覆した粉末を焼結する温度は、300〜1000℃(一層好ましくは400〜800℃)の範囲内であることが好ましい。その理由は、焼結温度が300℃未満ではガラス前駆体またはガラスが溶融せず、したがって、ガラスとの接合が十分行われないので得られた複合軟磁性焼結材の強度が不足するので好ましくなく、一方、1000℃を越えた温度で焼結すると比抵抗の低下が起こるので好ましくないからである。この時の焼結雰囲気は、大気、水素、不活性ガス、窒素ガス、炭酸ガスまたは真空の内のいずれでも良いが、不活性ガスまたは窒素ガス雰囲気が最も好ましい。   In the method for producing a composite soft magnetic sintered material having high strength, high magnetic flux density and high resistance according to the present invention, the surface of the iron powder coated with Mg-containing iron oxide film described in the above (a) to (d) is invented. The temperature for sintering the low melting point glass precursor or the powder coated with the low melting point glass is preferably in the range of 300 to 1000 ° C. (more preferably 400 to 800 ° C.). The reason is that if the sintering temperature is less than 300 ° C., the glass precursor or glass does not melt, and therefore, the composite soft magnetic sintered material obtained is insufficient in strength because it is not sufficiently bonded to the glass. On the other hand, if the sintering is performed at a temperature exceeding 1000 ° C., the specific resistance is lowered, which is not preferable. The sintering atmosphere at this time may be any of air, hydrogen, inert gas, nitrogen gas, carbon dioxide gas or vacuum, but an inert gas or nitrogen gas atmosphere is most preferable.

この発明によると、少量の低融点ガラスの添加により高強度および高抵抗を有し、さらに高磁束密度の複合軟磁性焼結材を提供することができ、電気および電子産業において優れた効果をもたらすものである。   According to the present invention, the addition of a small amount of low-melting glass can provide a composite soft magnetic sintered material having high strength and high resistance, and having a high magnetic flux density, and has excellent effects in the electrical and electronic industries. Is.

原料粉末として、平均粒径:70μmを有し不可避不純物として硫黄を極微量含む純鉄粉末を用意し、さらに、平均粒径:50μmのMg粉末を用意した。
まず、前記純鉄粉末を大気中、温度:220℃、2時間保持の条件で酸化処理することにより表面に酸化鉄膜を有する酸化処理鉄粉末を作製し、この酸化処理鉄粉末に対し先に用意したMg粉末を、酸化処理鉄粉末:Mg粉末=99.7質量%:0.3質量%の割合で添加し混合して混合粉末を作製し、得られた混合粉末を温度:650℃、圧力:2.7×10−4MPa、1時間保持したのち、さらに大気中、温度:200℃、1時間保持することにより鉄粉末の表面に堆積膜が被覆されているMg含有酸化鉄膜被覆鉄粉末を作製した。このMg含有酸化鉄膜被覆鉄粉末に形成された堆積膜をX線光電子分光装置により分析を行い、結合エネルギーを解析したところ、少なくとも(Mg,Fe)Oが含まれているMg−Fe−O三元系酸化物堆積膜であることが解った。このMg含有酸化鉄膜被覆鉄粉末における鉄粉末とMg−Fe−O三元系酸化物堆積膜との界面領域をオージェ電子分光装置を用いた方法により調べた結果、少なくとも(Mg,Fe)Oが含まれているMg−Fe−O三元系酸化物堆積膜と鉄粉末との界面領域に、鉄粉末の中心部に含まれる不純物硫黄(バックグラウンド)よりも明らかにオージェ電子分光法でピークをもって硫黄が検出されていることから鉄粉末の中心部に含まれる硫黄よりも高濃度の硫黄を含む硫黄濃化層を有することが解った。さらに、Mg含有酸化鉄膜被覆鉄粉末における少なくとも(Mg,Fe)Oが含まれているMg−Fe−O三元系酸化物堆積膜の組織を電子顕微鏡で観察した結果、その堆積膜の平均厚さは60nm、最大結晶粒径は40nmであることがわかった。
さらに、平均粒径:1.4μmでSiO2:80質量%、B23:20質量%の組成を有する低融点ガラス粉末を用意し、さらに低融点ガラスを構成する元素の錯体またはアルコキシドとしてSiO2原料となるシリコンテトラエトキシド(テトラエトキシシラン)、P25原料となるリン酸トリフェニル、SnO原料となるスズアセチルアセトナート、Bi23原料となるトリ−i−プロポキシビスマス、ZnO原料となるジ−n−ブトキシ亜鉛、BaO原料となるバリウムジピバロイルメタナートなどの金属アルコキシドおよび金属錯体を用意した。さらにこれら金属アルコキシドおよび金属錯体を溶かす有機溶媒としてヘキサンを用意した。
A pure iron powder having an average particle size of 70 μm and containing an extremely small amount of sulfur as an inevitable impurity was prepared as a raw material powder, and an Mg powder having an average particle size of 50 μm was prepared.
First, an oxidized iron powder having an iron oxide film on its surface is produced by oxidizing the pure iron powder in the atmosphere at a temperature of 220 ° C. for 2 hours. The prepared Mg powder was added and mixed in a ratio of oxidized iron powder: Mg powder = 99.7% by mass: 0.3% by mass to prepare a mixed powder. The obtained mixed powder was heated at 650 ° C. Pressure: 2.7 × 10 −4 MPa After holding for 1 hour, further in the atmosphere, temperature: 200 ° C., and holding for 1 hour, the Mg-containing iron oxide film coated with the deposited film on the surface of the iron powder Iron powder was produced. The deposited film formed on the Mg-containing iron oxide film-coated iron powder was analyzed by an X-ray photoelectron spectrometer and the binding energy was analyzed. As a result, Mg—Fe—O containing at least (Mg, Fe) O was found. It was found to be a ternary oxide deposited film. As a result of investigating the interface region between the iron powder and the Mg—Fe—O ternary oxide deposited film in this Mg-containing iron oxide film-coated iron powder by a method using an Auger electron spectrometer, at least (Mg, Fe) O In the interface region between the Mg-Fe-O ternary oxide deposited film containing iron and the iron powder, and more clearly in the Auger electron spectroscopy than the impurity sulfur (background) contained in the center of the iron powder From the fact that sulfur was detected, it was found that a sulfur concentrated layer containing a higher concentration of sulfur than the sulfur contained in the central part of the iron powder was found. Furthermore, as a result of observing the structure of the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O in the Mg-containing iron oxide film coated iron powder with an electron microscope, the average of the deposited film It was found that the thickness was 60 nm and the maximum crystal grain size was 40 nm.
Furthermore, a low melting point glass powder having an average particle size of 1.4 μm and a composition of SiO 2 : 80% by mass and B 2 O 3 : 20% by mass is prepared, and further as a complex or alkoxide of the elements constituting the low melting point glass Silicon tetraethoxide (tetraethoxysilane) as a SiO 2 raw material, triphenyl phosphate as a P 2 O 5 raw material, tin acetylacetonate as a SnO raw material, tri-i-propoxybismuth as a Bi 2 O 3 raw material, Metal alkoxides and metal complexes such as di-n-butoxy zinc as a ZnO raw material and barium dipivaloylmethanate as a BaO raw material were prepared. Furthermore, hexane was prepared as an organic solvent for dissolving these metal alkoxides and metal complexes.

実施例1
金属アルコキシドおよび金属錯体を酸化物換算で表1に示される低融点ガラス組成となるように有機溶媒に溶かして溶液を作製し、得られた溶液を先に用意したMg含有酸化鉄膜被覆鉄粉末に表1に示される割合となるように添加して浸漬し、撹拌しながら乾燥することによりMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラス前駆体を被覆した被覆鉄粉末(以下、前駆体被覆粉末という)A1〜A4を作製した。
Example 1
A metal alkoxide and a metal complex are dissolved in an organic solvent so as to have a low-melting glass composition shown in Table 1 in terms of oxides, and a solution is prepared. The coated iron powder (hereinafter referred to as precursor) coated with a low-melting-point glass precursor on the surface of the Mg-containing iron oxide film-coated iron powder by adding and immersing in the ratio shown in Table 1 and drying while stirring. A1 to A4 (referred to as body-coated powder) were prepared.

Figure 2006332524
Figure 2006332524

これら表1に示される前駆体被覆鉄粉末A1〜A4をそれぞれ内壁に潤滑剤を塗布した金型に充填し、980MPaの成形圧力で成形することにより外径:35mm、内径:25mm、厚さ:5mmの寸法を有するリング状成形体と長さ:60mm、幅:10mm、厚さ:5mmの寸法を有するバー状成形体を作製し、これらリング状成形体およびバー状成形体を窒素雰囲気中、温度:600℃、1時間保持の熱処理を施すことにより本発明複合軟磁性材1〜4からなるリング試験片およびバー状試験片を作製した。
本発明複合軟磁性材1〜4からなるリング状試験片の水中密度を測定したのち、巻線を施し、B−Hアナライザにより最大比透磁率、励磁磁束密度、1.5T、周波数50Hzおよび1.0T、周波数400Hzにおける鉄損W1.5/50、W1.0/400をそれぞれ測定し、表2に示した。
また、バー状試験片において四端子法により比抵抗を、スパン45mmの三点曲げにより抗折強度をそれぞれ測定し、それらの結果を表2に示した。
These precursor-coated iron powders A1 to A4 shown in Table 1 are filled in dies each having a lubricant applied to the inner wall, and are molded at a molding pressure of 980 MPa, so that the outer diameter is 35 mm, the inner diameter is 25 mm, and the thickness is: A ring-shaped molded body having dimensions of 5 mm and a bar-shaped molded body having dimensions of length: 60 mm, width: 10 mm, and thickness: 5 mm were prepared, and these ring-shaped molded body and bar-shaped molded body were placed in a nitrogen atmosphere. Temperature: 600 ° C. A ring test piece and a bar-shaped test piece made of the composite soft magnetic materials 1 to 4 of the present invention were produced by heat treatment for 1 hour.
After measuring the underwater density of the ring-shaped test piece comprising the composite soft magnetic materials 1 to 4 of the present invention, winding was performed, and the maximum relative magnetic permeability, excitation magnetic flux density, 1.5 T, frequency 50 Hz and 1 were measured using a BH analyzer. The iron losses W 1.5 / 50 and W 1.0 / 400 at 0.0T and a frequency of 400 Hz were measured and shown in Table 2.
Further, specific resistance was measured for the bar-shaped test piece by the four probe method, and bending strength was measured by three-point bending with a span of 45 mm. The results are shown in Table 2.

実施例2
実施例1で作製した表1に示される低融点ガラス前駆体をMg含有酸化鉄膜被覆鉄粉末の表面に被覆した前駆体被覆鉄粉末A1〜A4を大気雰囲気中、温度:550℃に1時間保持することによりMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラスを被覆した被覆鉄粉末(以下、低融点ガラス被覆粉末という)a1〜a4を作製した。
これら低融点ガラス被覆鉄粉末a1〜a4をそれぞれ内壁に潤滑剤を塗布した金型に充填し、980MPaの成形圧力で成形することにより外径:35mm、内径:25mm、厚さ:5mmの寸法を有するリング状成形体と長さ:60mm、幅:10mm、厚さ:5mmの寸法を有するバー状成形体を作製し、これらリング状成形体およびバー状成形体を窒素雰囲気中、温度:600℃、1時間保持の熱処理を施すことにより本発明複合軟磁性材5〜8からなるリング試験片およびバー状試験片を作製した。得られたリング状試験片の水中密度を測定したのち、巻線を施し、B−Hアナライザにより最大比透磁率、励磁磁束密度、1.5T、周波数50Hzおよび1.0T、周波数400Hzにおける鉄損W1.5/50、W1.0/400をそれぞれ測定し、表2に示した。
また、バー状試験片において四端子法により比抵抗を、スパン45mmの三点曲げにより抗折強度をそれぞれ測定し、それらの結果を表2に示した。
Example 2
Precursor-coated iron powders A1 to A4 obtained by coating the surface of the Mg-containing iron oxide film-coated iron powder with the low melting point glass precursor shown in Table 1 prepared in Example 1 in an air atmosphere at a temperature of 550 ° C. for 1 hour. By holding, coated iron powders (hereinafter referred to as low melting point glass-coated powders) a1 to a4 in which the surface of the Mg-containing iron oxide film-coated iron powder was coated with a low melting point glass were produced.
These low melting point glass-coated iron powders a1 to a4 are filled in dies each having an inner wall coated with a lubricant, and are molded at a molding pressure of 980 MPa, so that the outer diameter is 35 mm, the inner diameter is 25 mm, and the thickness is 5 mm. A ring-shaped molded body having a length of 60 mm, a width of 10 mm, and a thickness of 5 mm was prepared, and the ring-shaped molded body and the bar-shaped molded body were heated in a nitrogen atmosphere at a temperature of 600 ° C. A ring test piece and a bar-shaped test piece made of the composite soft magnetic materials 5 to 8 of the present invention were prepared by performing heat treatment for 1 hour. After measuring the underwater density of the obtained ring-shaped test piece, it was wound, and the iron loss at a maximum relative magnetic permeability, excitation magnetic flux density, 1.5 T, frequencies 50 Hz and 1.0 T, and frequency 400 Hz was measured with a BH analyzer. W 1.5 / 50 and W 1.0 / 400 were measured and shown in Table 2.
Further, specific resistance was measured for the bar-shaped test piece by the four probe method, and bending strength was measured by three-point bending with a span of 45 mm. The results are shown in Table 2.

実施例3
先に用意したMg含有酸化鉄膜被覆鉄粉末に、先に用意した平均粒径:1.4μmでSiO2:80質量%、B23:20質量%の組成を有するガラス粉末を、Mg含有酸化鉄膜被覆鉄粉末:ガラス粉末=99.3質量%:0.7質量%の割合となるように配合し、混合して混合粉末を作製し、得られた混合粉末を金型に入れ、プレス成形して縦:60mm、横:10mm、厚さ:5mmの寸法を有するバー状圧粉体および外径:35mm、内径:25mm、高さ:5mmの寸法を有するリング形状圧粉体を成形し、得られた圧粉体を窒素雰囲気中、温度:600℃、30分保持の条件で焼結を行い、本発明複合軟磁性材9からなるリング試験片およびバー状試験片を作製した。得られたリング状試験片の水中密度を測定したのち、巻線を施し、B−Hアナライザにより最大比透磁率、励磁磁束密度、1.5T、周波数50Hzおよび1.0T、周波数400Hzにおける鉄損W1.5/50、W1.0/400をそれぞれ測定し、表2に示した。
また、バー状試験片において四端子法により比抵抗を、スパン45mmの三点曲げにより抗折強度をそれぞれ測定し、それらの結果を表2に示した。
Example 3
To the Mg-containing iron oxide film-coated iron powder prepared in advance, a glass powder having an average particle diameter of 1.4 μm and a composition of SiO 2 : 80% by mass and B 2 O 3 : 20% by mass was prepared. Containing iron oxide film coated iron powder: Glass powder = 99.3 wt%: Blended to a ratio of 0.7 wt% to produce a mixed powder, and put the obtained mixed powder into a mold A bar-shaped green compact having dimensions of 60 mm in length, 10 mm in width, and 5 mm in thickness, and a ring-shaped green compact having dimensions of 35 mm in outer diameter, 25 mm in inner diameter, and 5 mm in height. The green compact thus obtained was sintered in a nitrogen atmosphere at a temperature of 600 ° C. and held for 30 minutes to prepare a ring test piece and a bar-shaped test piece made of the composite soft magnetic material 9 of the present invention. . After measuring the underwater density of the obtained ring-shaped test piece, it was wound, and the iron loss at a maximum relative magnetic permeability, excitation magnetic flux density, 1.5 T, frequencies 50 Hz and 1.0 T, and frequency 400 Hz was measured with a BH analyzer. W 1.5 / 50 and W 1.0 / 400 were measured and shown in Table 2.
Further, specific resistance was measured for the bar-shaped test piece by the four probe method, and bending strength was measured by three-point bending with a span of 45 mm. The results are shown in Table 2.

従来例1
純鉄粉末の表面にMg含有フェライト層を化学的方法で形成した従来Mg含有酸化鉄膜被覆鉄粉末を用意し、この従来Mg含有酸化鉄膜被覆鉄粉末に先に用意した平均粒径:1.4μmでSiO2:80質量%、B23:20質量%の組成を有するガラス粉末を、Mg含有酸化鉄膜被覆鉄粉末:ガラス粉末=99.3質量%:0.7質量%の割合となるように配合し、混合して混合粉末を作製し、得られた混合粉末を金型に入れ、プレス成形して縦:60mm、横:10mm、厚さ:5mmの寸法を有するバー状圧粉体および外径:35mm、内径:25mm、高さ:5mmの寸法を有するリング形状圧粉体を成形し、得られた圧粉体を窒素雰囲気中、温度:600℃、30分保持の条件で焼結を行い、従来複合軟磁性材からなるリング試験片およびバー状試験片を作製した。
得られたリング状試験片の水中密度を測定したのち、巻線を施し、B−Hアナライザにより最大比透磁率、励磁磁束密度、1.5T、周波数50Hzおよび1.0T、周波数400Hzにおける鉄損W1.5/50、W1.0/400をそれぞれ測定し、表2に示した。
また、バー状試験片において四端子法により比抵抗を、スパン45mmの三点曲げにより抗折強度をそれぞれ測定し、それらの結果を表2に示した。
Conventional Example 1
A conventional Mg-containing iron oxide film-coated iron powder in which a Mg-containing ferrite layer is formed on the surface of pure iron powder by a chemical method is prepared, and the average particle diameter prepared in advance for this conventional Mg-containing iron oxide film-coated iron powder is 1 A glass powder having a composition of SiO 2 : 80% by mass and B 2 O 3 : 20% by mass at 4 μm was used. Mg-containing iron oxide film-coated iron powder: glass powder = 99.3% by mass: 0.7% by mass It mixes so that it may become a ratio, mixes and produces mixed powder, puts the obtained mixed powder into a metal mold, press-molds it, and it is bar shape which has a size of length: 60mm, width: 10mm, thickness: 5mm A green compact and a ring-shaped green compact having an outer diameter of 35 mm, an inner diameter of 25 mm, and a height of 5 mm were molded, and the obtained green compact was maintained at a temperature of 600 ° C. for 30 minutes in a nitrogen atmosphere. Sintering is performed under the conditions, and a conventional ring test made of composite soft magnetic material is performed. To prepare a piece and the bar-shaped test piece.
After measuring the underwater density of the obtained ring-shaped test piece, it was wound, and the iron loss at a maximum relative magnetic permeability, excitation magnetic flux density, 1.5 T, frequencies 50 Hz and 1.0 T, and frequency 400 Hz was measured with a BH analyzer. W 1.5 / 50 and W 1.0 / 400 were measured and shown in Table 2.
Further, specific resistance was measured for the bar-shaped test piece by the four probe method, and bending strength was measured by three-point bending with a span of 45 mm. The results are shown in Table 2.

Figure 2006332524
Figure 2006332524

表1〜2に示される結果から、本発明複合軟磁性材1〜9で作製した試験片は、表2の従来複合軟磁性材で作製した試験片に比べて直流磁気特性、交流磁気特性、機械的強度のいずれも優れた値を示しことから、本発明複合軟磁性焼結材1〜9は、従来複合軟磁性材に比べて優れた特性を示すことが分かる。
特に本発明複合軟磁性材9と従来複合軟磁性材を比較すると、本発明複合軟磁性材9で作製した試験片は、従来複合軟磁性材と同様に低融点ガラス粉末を使用して作製していても、先に発明した少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が被覆されているMg含有酸化鉄膜被覆鉄粉末は鉄粉末に対する密着性が優れているために、従来の化学的方法で形成したMg含有酸化鉄膜被覆鉄粉末に比べて鉄損が極めて少ないことが分かる。
From the results shown in Tables 1 and 2, the test pieces prepared with the composite soft magnetic materials 1 to 9 of the present invention were compared with the test pieces prepared with the conventional composite soft magnetic materials shown in Table 2 in terms of DC magnetic characteristics, AC magnetic characteristics, Since all the mechanical strengths show excellent values, it can be seen that the composite soft magnetic sintered materials 1 to 9 of the present invention show superior characteristics as compared with conventional composite soft magnetic materials.
In particular, when the composite soft magnetic material 9 of the present invention is compared with the conventional composite soft magnetic material, the test piece prepared with the composite soft magnetic material 9 of the present invention is prepared using low melting point glass powder in the same manner as the conventional composite soft magnetic material. Even so, the Mg-containing iron oxide film-coated iron powder coated with the Mg-Fe-O ternary oxide deposited film containing at least (Mg, Fe) O, invented earlier, has excellent adhesion to iron powder. Therefore, it can be seen that the iron loss is extremely small as compared with the iron powder coated with Mg-containing iron oxide film formed by a conventional chemical method.

Claims (8)

少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されているMg含有酸化鉄膜被覆鉄粉末を低融点ガラス相で結合してなることを特徴とする高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材。 An Mg-Fe-O ternary oxide deposited film containing at least (Mg, Fe) O is bonded to the iron powder coated with Mg-containing iron oxide film coated on the surface of the iron powder with a low melting glass phase. A high-strength composite soft magnetic material with low iron loss and having high strength, high magnetic flux density and high resistance. 少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜が鉄粉末の表面に被覆されておりかつ前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜と鉄粉末との界面領域に鉄粉末の中心部に含まれる硫黄よりも高濃度の硫黄を含む硫黄濃化層を有するMg含有酸化鉄膜被覆鉄粉末が、低融点ガラス相で結合されてなることを特徴とする高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材。 A Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O is coated on the surface of the iron powder, and the Mg—Fe—O ternary system containing at least (Mg, Fe) O. The Mg-containing iron oxide film-coated iron powder having a sulfur-concentrated layer containing a higher concentration of sulfur than the sulfur contained in the center of the iron powder in the interface region between the oxide deposited film and the iron powder is a low melting glass phase. A high-strength composite soft magnetic material having low iron loss and having high strength, high magnetic flux density, and high resistance. 前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、結晶粒径:200nm以下の微細結晶組織を有することを特徴とする請求項1または2記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材。 3. The high strength according to claim 1, wherein the Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O has a fine crystal structure with a crystal grain size of 200 nm or less. High strength composite soft magnetic material with low magnetic loss and high magnetic flux density and high resistance. 前記少なくとも(Mg,Fe)Oを含むMg−Fe−O三元系酸化物堆積膜は、その最表面が実質的にMgOで構成されていることを特徴とする請求項1、2または3記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材。 4. The Mg—Fe—O ternary oxide deposited film containing at least (Mg, Fe) O has an outermost surface substantially composed of MgO. High strength composite soft magnetic material with low iron loss and high strength, high magnetic flux density and high resistance. 請求項1、2、3または4記載のMg含有酸化鉄膜被覆鉄粉末に低融点ガラス粉末を混合して混合粉末を作製し、この混合粉末をを圧縮成形したのち熱処理することを特徴とする高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法。 A mixed powder is prepared by mixing a low melting point glass powder with the Mg-containing iron oxide film-coated iron powder according to claim 1, 2, 3 or 4, and the mixed powder is compression-molded and then heat-treated. A method for producing a high-strength composite soft magnetic material having high strength, high magnetic flux density and high resistance and low iron loss. 請求項1、2、3または4記載のMg含有酸化鉄膜被覆鉄粉末の表面に、低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末における低融点ガラス前駆体の有機成分を加熱分解することによりMg含有酸化鉄膜被覆鉄粉末の表面に低融点ガラスを被覆した低融点ガラス−Mg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス−Mg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち熱処理することを特徴とする高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法。 A low melting point by applying and drying a solution of an element complex constituting a low melting point glass or an alkoxide in an organic solvent on the surface of the Mg-containing iron oxide film-coated iron powder according to claim 1, 2, 3 or 4 By producing an iron powder coated with Mg-containing iron oxide film coated with a glass precursor and thermally decomposing the organic components of the low-melting glass precursor in the iron powder coated with Mg-containing iron oxide film coated with this low-melting glass precursor Low melting point glass-Mg containing iron oxide film coated iron powder coated with low melting point glass on the surface of Mg containing iron oxide film coated iron powder was produced, and this low melting point glass-Mg containing iron oxide film coated iron powder was compression molded. A method for producing a high-strength composite soft magnetic material having low iron loss and having high strength, high magnetic flux density and high resistance, characterized by heat treatment. 請求項1、2、3または4記載のMg含有酸化鉄膜被覆鉄粉末の表面に、低融点ガラスを構成する元素の錯体またはアルコキシドを有機溶媒に溶かした溶液を塗布し乾燥することにより低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を作製し、この低融点ガラス前駆体を被覆したMg含有酸化鉄膜被覆鉄粉末を圧縮成形したのち熱処理し、前記熱処理する際に低融点ガラス前駆体の有機成分を加熱分解させることを特徴とする高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法。 A low melting point by applying a solution of an element complex or alkoxide constituting the low melting point glass in an organic solvent on the surface of the iron powder coated with Mg-containing iron oxide film according to claim 1, 2, 3 or 4 and drying. An iron powder coated with Mg-containing iron oxide film coated with a glass precursor was prepared, heat-treated after compression-molding the iron powder coated with Mg-containing iron oxide film coated with this low-melting glass precursor, A method for producing a high-strength composite soft magnetic material having low iron loss and having high strength, high magnetic flux density and high resistance, characterized by thermally decomposing an organic component of a glass precursor. 前記熱処理の温度は300〜1000℃の範囲内であることを特徴とする請求項5、6または7記載の高強度、高磁束密度および高抵抗を有する鉄損の少ない高強度複合軟磁性材の製造方法。
8. The high-strength composite soft magnetic material with low iron loss having high strength, high magnetic flux density and high resistance according to claim 5, 6 or 7, wherein the temperature of the heat treatment is in the range of 300 to 1000 ° C. Production method.
JP2005157435A 2005-05-30 2005-05-30 High-strength complex soft magnetic material having high strength, high magnetic flux density, high resistance and less iron loss, and manufacturing method thereof Pending JP2006332524A (en)

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JP2008244347A (en) * 2007-03-28 2008-10-09 Mitsubishi Materials Pmg Corp Manufacturing method of high-strength soft magnetism compound consolidation burning material, and the high-strength soft magnetism compound consolidation burning material
JP2009060050A (en) * 2007-09-03 2009-03-19 Mitsubishi Materials Corp High specific resistance and low loss composite soft magnetic material, and manufacturing method thereof
EP2219195A4 (en) * 2007-11-07 2016-08-03 Diamet Corp High-strength soft-magnetic composite material obtained by compaction/burning and process for producing the same
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