JP2006327642A - Substrate storing container and substrate storing body - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate transport body capable of protecting a plate glass and a color filter substrate used for a liquid crystal displaying device or the like from damage and breakage, and convenient for storing and transporting. <P>SOLUTION: A storing container to store a laminate constituted by stacking a plurality of substrates, comprises a supporting table having a supporting face capable of loading the laminate with the substrates in a horizontal state, a load supporting plate connected to the supporting table facing an upper face of the laminate loaded on the supporting table, an airbag which is arranged between the load supporting plate and the laminate and supported by the load supporting plate to apply a uniform pressure to the entire upper face of the laminate, and a pressure regulating means to regulate the pressure in the airbag. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a storage container for storing a substrate having a functional layer on its surface for transportation, storage, etc., such as a glass substrate used for a color filter of a liquid crystal display or a thin film transistor (TFT), and the substrate storage container. The present invention relates to a substrate storage body that stores a substrate.

It is important to transport and store a substrate having a functional layer on the surface, such as a glass substrate used for a color filter, without damaging or contaminating the functional layer on the surface. Therefore, a resin case provided with a groove for inserting the substrates one by one has been used to transport and store these substrates. However, in this case, since the substrates are stored in a state where a gap is generated between the substrates, there is a problem that the storage efficiency is poor. Therefore, a packaging form in which a plurality of glass substrates and slip sheets are alternately stacked and obliquely stacked on an oblique stacking pallet (see Patent Document 1), a plurality of glass substrates and a frame-shaped separation member that contacts the edges of the glass substrates Are stacked alternately and obliquely stacked on a pallet (see Patent Document 2), glass substrates are sealed with PET film one by one, and these are stacked (see Patent Document 3). There has been proposed a packaging form (see Patent Document 4) and the like, which are packaged one by one in a bag-like body made of a laminated film having an unevenly processed inner wall and packed in a case.
JP 2000-351449 A JP 2000-203679 A JP 2003-237833 A Japanese Patent Laid-Open No. 11-1205

  However, both of these have problems. That is, in the method of stacking diagonally as shown in Patent Documents 1 and 2, after the glass substrate is stacked diagonally so as to lean against the inclined receiving surface, one or two places in the height direction of the glass substrate are banded or the like. Although it is fixed by tightening so as to be pressed against the receiving surface, it is difficult to press and fix the lower region of the glass substrate to the receiving surface with a necessary pressing force. This is due to the following reason. That is, when the glass substrates are stacked diagonally, each glass substrate is held with its lower end on the mounting surface of the diagonal stacking pallet, so press the lower area of the glass substrate against the inclined receiving surface and fix it. Then, the lower edge of the glass substrate that is strongly pressed against the mounting surface of the oblique stacking pallet by its own weight must be slid and moved on the mounting surface. Since the force is large, it is difficult to move the lower edge of the glass substrate. When the size of the glass substrate is small and the load is small, or the number of stacked sheets is small, the lower area of the glass substrate is sufficiently fixed by tightening the appropriate position of the glass substrate stacked diagonally with a band etc. However, the glass substrate may be moved and damaged due to vibration during transportation. Furthermore, in the method using the frame-shaped separation member shown in Patent Document 2, the separation member has a thickness as large as about 5 mm. Therefore, when the loading amount is small and the size of the glass substrate is large, it is not possible. In the structure in which only the edge is constrained by the spacing member, the glass substrate is bent due to its own weight, which may cause damage from this point.

As shown in Patent Documents 3 and 4, in a packaging form in which each glass substrate is sealed with a PET film or packaged in a bag-like body made of a laminate film, the packaging of the glass substrate takes a great deal of man-hours and the packaging cost is high. There is a problem of becoming. In addition, since glass substrates wrapped with PET film or packaging are simply stacked or packed in a case, the glass substrate may move during transportation. There is also a risk of damaging the functional layer of the glass substrate by rubbing against the PET film or laminate film.
In view of this, the present inventors have previously proposed a method in which a uniform pressing force is applied to the entire upper surface of the stack by means of an air bag so as to be transported. However, although this method is a good means, depending on the conditions of transportation and storage, the slipping of the slip sheets used for the stack may occur, and the bulk of the stack may decrease, thereby reducing the pressing force by the airbag. In some cases, the glass substrate moves during transportation and damages the functional layer of the glass substrate.

  The present invention has been made in view of such problems, and can accommodate a large amount of a substrate such as a glass substrate used for a color filter or a thin film transistor (TFT) of a liquid crystal display in a compact manner and can move during transportation. The storage container that can be transported and stored without damaging the substrate and the substrate in the substrate storage container in response to changes in the bulkiness of the substrate stack during transportation and storage. A substrate storage body having a stored structure is provided.

  The present invention is a storage container for storing a stack formed by stacking a plurality of substrates, the support having a support surface on which the stack can be placed in a horizontal state, A load support plate connected to the support base and disposed between the load support plate and the stack so as to face the upper surface of the stack placed on the support base. A substrate storage container comprising an airbag that is supported and applies a uniform pressing force to the entire upper surface of the stack, and pressure adjusting means that adjusts the pressure in the airbag.

  According to the substrate storage container of the present invention, the substrate stack is placed on the support surface of the support table in a state where the support table is horizontally arranged (or on the support table). By stacking the substrates horizontally to form a stack, and by applying a uniform pressing force to the entire upper surface of the stack with an air bag, the stack can be pressed against the support base and fixed. By having a pressure adjusting means for adjusting the pressure in the airbag by supplying air to the airbag as needed or constantly, the thickness of the slip sheets used for the stack decreased due to a special transportation environment such as high temperature. Even in such a case, the necessary pressing force can continue to be applied to the entire upper surface of the stack, so that the fixing is reliable and the substrate does not move during transportation and cause damage.

  By using the airbag, a uniform pressing force can be easily applied to a wide area, and the pressing force can be easily adjusted by adjusting the air pressure supplied to the airbag.

  Since multiple boards are stacked horizontally and a uniform pressing force is applied to the entire upper surface, even if the board size is large or the number of stored sheets is large, each board has a uniform pressure over the entire area. For this reason, the substrate is securely fixed and does not move and damage the substrate during transportation.

  Conventionally, when locally tightening with a band or the like, a portion with a large pressing force is locally generated, and there is a risk of damaging the portion. In the present invention, a uniform pressing force is applied to the entire substrate. Therefore, even if the pressing force per unit area is set small, the substrate can be restrained so as not to move, and the substrate can be prevented from being damaged in this respect. Thus, by using the storage container of the present invention, a large number of large-sized substrates can be stored in a compact manner, and can be safely transported and stored without causing damage to the substrate, thereby reducing the cost of transporting the substrate. Can do.

  In the present invention, the pressing means is configured to apply a uniform pressing force to the entire upper surface of the stack. However, the “upper surface” in the claims is not necessarily limited to the entire upper surface. Even if the area is somewhat smaller than the entire area, it may be any area as long as the substrate can be restrained from moving by applying a uniform load to the area. Specifically, the area is about 80% or more of the entire upper surface. Means.

  In addition, if a flat reinforcing plate is disposed between the airbag and the stack and / or between the stack and the support base, the substrate is supported or pressed by the flat reinforcing member. And the effect of further preventing damage to the substrate can be obtained.

  Further, if the support base is a pallet, an effect of facilitating transportation using a forklift or the like can be obtained. Further, when the lid is detachably attached to the pallet so as to surround the stacked body placed on the pallet, and the top plate of the lid acts as the load support plate, the lid By combining the load support plate, the structure can be simplified, and the stacked body can be covered with the lid to prevent the adhesion of dust, dust and the like to the substrate.

  Further, when a cushion material inserted between the side surface of the stack and the side plate of the lid is provided, an effect that the motion of the stack can be further restricted by the cushion material is obtained.

  Moreover, when it is set as the structure which has the 2nd pallet which accommodates the inner pallet formed with the said pallet and the cover attached to it, and the outer box which consists of a 2nd cover body, in the inner box accommodated in the outer box When this inner box is carried into a factory that uses a substrate without dust, dust, etc., the factory can be kept clean without being accompanied by dust, dust, etc. can get.

  The substrate storage body of the present invention has a configuration in which a stack body in which substrates and interleaving paper are alternately stacked is stored in the substrate storage container according to any one of claims 1 to 7. Can be stored in a state protected with a slip sheet, and can be safely transported and stored without causing damage to the substrate. Even if the thickness of the slip sheets used for the stack is reduced due to a special transport environment such as high temperature, the necessary pressing force can continue to be applied to the entire upper surface of the stack during transportation and storage. It is reliable and does not cause damage by moving the substrate during transportation.

  Here, if the interleaf paper is a foamed sheet of resin, the substrate can be well protected because it has appropriate softness, and damage to the substrate can be further prevented.

  The substrate to be stored in the substrate storage body of the present invention is arbitrary, but is preferably a glass substrate provided with a functional layer, whereby a glass substrate provided with a functional layer that is easily damaged during transportation. Can be transported safely without causing damage.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic cross-sectional view of a substrate storage body formed by storing a stack of substrates in a substrate storage container according to the first embodiment of the present invention, and FIG. 2 is a diagram of the substrate storage body of FIG. 3 is a schematic perspective view, and FIG. 3 is a schematic side view showing a state in which a stack of substrates is placed on a pallet. FIG. 4 is a schematic perspective view showing a state in which a stack of substrates is placed on a pallet. FIG. The substrate storage body 1 is obtained by storing a stack 2 formed by stacking a large number of substrates alternately with interleaf sheets in a substrate storage container.

  In the present invention, the substrate 3 to be stored is a glass substrate used for a color filter, a thin film transistor (TFT) or the like of a liquid crystal display, and a typical structure thereof is schematically shown in FIG.

  In FIG. 5, the substrate 3 has a functional layer 3b (for example, a layer provided with a black matrix, colored pixels, ITO electrodes, etc. in the case of a substrate for a color filter) on one side of a substrate body 3a such as a glass plate. In addition, a protective film 3c for preventing damage during storage, transportation, etc. is formed thereon.

  The protective film 3c is made of a material that can be easily formed and easily removed, and a water-soluble resin (for example, polyvinyl alcohol) is often used. About 10-20 micrometers is used as a film thickness. Usually, the functional layer 3b and the protective film 3c are formed in the entire region except for several millimeters on the periphery of the substrate body 3a. In the present specification, a region where the functional layer 3b and the protective film 3c are formed thereon is referred to as an effective region.

  The planar size of the substrate 3 is not particularly limited, and may be a large size such as 1800 mm wide × 2000 mm long, for example. Further, the thickness of the substrate is not limited, but can be suitably used at about 0.3 to 1.0 mm.

  When a large number of substrates 3 are stacked to form the stack 2, the interleaving paper 4 is sandwiched between the substrates 3 so that the functional layer 3 b and the protective film 3 c of each substrate 3 can be protected.

  The form for inserting the interleaving paper is not particularly limited, and it is sufficient that the interleaving paper is present at a position covering at least the effective area of the substrate 3. However, as a preferable form, as shown in FIG. A configuration in which the interleaf paper 4A is arranged so that both ends thereof extend outward from the substrate 3, or an interleaf paper 4B having the same size as the substrate 3 in a folded state as shown in FIG. In this state, it is possible to use a form of sandwiching between the substrates 3.

  In the form shown in FIG. 6, since the end of the interleaf paper 4A extends to the outside of the substrate 3, when peeling the interleaf paper, it is only necessary to grasp the extending portion, and to grasp the interleaf paper. The mechanism can be simplified and can be reliably grasped.

  In the form shown in FIG. 7, the slip sheet 4B is folded in half, so that the protective film 3c (see FIG. 5) of the substrate 3 absorbs moisture during transportation and adheres to the slip sheet 4Ba in contact therewith. Even if the upper piece 4Bb is not adhered, the upper piece 4Bb can be easily sucked and held by a suction pad or the like when the interleaf 4B is peeled off. The slip sheet can be reliably peeled from the substrate by adding the piece to a means (for example, a nip roll or the like) that can securely peel the slip sheet.

  The material used for the interleaving papers 4A and 4B is arbitrary as long as it can protect the substrate 3, and paper, a resin sheet, or the like is used. As a particularly preferable material, a foamed sheet of resin having closed cells, for example, trade name “Miramat” manufactured by JSP Corporation can be given. Since the foamed sheet of resin having closed cells has an appropriate softness, the protection of the functional layer 3b on the surface of the substrate is sure and the air-permeable property prevents the protective film 3c from absorbing moisture. If the thickness of the interleaving papers 4A and 4B is too thin, the protective effect is lowered. On the other hand, if the thickness is too thick, the cost becomes high and the bulk becomes disadvantageous. Therefore, in consideration of these, the thickness is selected to be about 0.25 to 1 mm. It is preferable.

  1-4, the substrate storage container 10 has a double structure including an inner box for storing the stack 2 and an outer box for storing the inner box. The inner box is detachably attached to the pallet 11 so as to surround the pallet 11 constituting a support base having a support surface 11 a for supporting the stack 2 and the stack 2 placed on the pallet 11. The lid 13 is provided.

  Here, the support surface 11a of the pallet 11 is formed in an area larger than the area of the substrate 3 so that the stack 2 can be supported in a state where the substrate 3 is parallel to the support surface 11a. The lid 13 includes a top plate 13a that is parallel to the support surface 11a in a state of being attached to the pallet 11, and four side plates 13b that are perpendicular to the support surface 11a.

  In order to position the lid 13 at a predetermined position with respect to the pallet 11, projections 11 b that fit into the inner surface of the side plate 13 b of the lid 13 are formed at a plurality of locations on the top surface of the pallet 11. The means for positioning the lid 13 with respect to the pallet 11 is not limited to the one using the projection 11b, and can be changed as appropriate.

  As will be described later, the top plate 13a of the lid body 13 acts as a load support plate that supports a reaction force when a pressing force is applied to the upper surface of the stack 2 by the airbag 9. Has a structure that can withstand the reaction force.

  The lid 13 is connected to the pallet 11 by a connecting means having a strength capable of supporting the reaction force. In this embodiment, since the lid 13 can be connected to the pallet 11 with a required strength, a plurality of snap locks 12 are used. Since the snap lock 12 can be opened and closed with a single touch, it has good workability and can withstand a large tensile force. The connecting means for connecting the lid body 13 to the pallet 11 is not limited to a snap lock, and any means such as one using a bolt or nut, one using a connecting pin, or the like can be used.

  On the support surface 11a of the pallet 11, a reinforcing plate member 5 with high plane accuracy is placed, and the stack 2 is placed thereon. A reinforcing plate 7 with high surface accuracy is placed on the stack 2, and an airbag 9 is placed thereon. The airbag 9 is inflated by supplying pressurized air therein, and the upper surface of the airbag 9 is restrained by a top plate (load support plate) 13a of the lid 13 so that the entire upper surface of the stack 2 is a reinforcing plate. 7 is arranged so as to be able to be pressed uniformly through 7.

  Therefore, the airbag 9 and the top plate 13 that supports the airbag 9 constitute a pressing means that applies a uniform pressing force to the entire upper surface of the stack 2 and presses and fixes the stack to the support base.

  Further, a tube 17 for connecting the air supply tube 15 and the pressure switch 21 is connected to the airbag 9 so as to extend to the outside of the lid 13, and a valve 25 is attached to the tip of the tube 15. A pressure switch 21 is attached to the tip of the tube 17.

  An electric pump 19 connected to a pressure switch 21 is connected to the tube 15 as a pressure adjusting means for the airbag 9 on the top plate 13. The pressure switch 21 measures the pressure of the air in the airbag 9, and when this pressure falls below a predetermined value, the electric pump 19 is activated and air is supplied from the tube 15. Keep pressure constant.

  The pressure of air in the airbag 9 is preferably 30 gf to 300 gf per square centimeter. An excessively high pressure is not preferable because an excessive pressing force is applied to the substrate, and an excessively low pressure is not preferable because the substrate may be displaced.

  The reinforcing plate members 5 and 7 arranged above and below the stack 2 are provided so that the substrate of the stack 2 can be supported or pressed in a flat state as much as possible. As the reinforcing plate members 5 and 7, a lightweight plate member having excellent planar accuracy is used. Specifically, it is preferable to use a honeycomb panel or a laminated plate having a foam as a core and an FRP plate as a skin.

  The reinforcing plate members 5 and 7 have the same or larger area as the substrate 3 so that the entire surface of the stack 2 can be supported or pressed. As the planar accuracy of the reinforcing members 5 and 7, it is preferable that the surface roughness is about 100 μm Rmax or less, and the flatness is such that the minimum curvature radius is about 700 m.

  The outer box that houses the inner box composed of the pallet 11 and the lid 13 is formed by a second pallet 27 and a lid 29 that can be attached to and detached from the second pallet 27. The lid 29 is box-shaped and can be attached to and detached from the pallet 27 by the snap lock 12. Although not shown, the outer box pallet 27 is provided with means for positioning and fixing the inner box pallet 11 at a predetermined position.

  Next, a method for storing the stack 2 in the storage container 10 will be described. As shown in FIGS. 3 and 4, the reinforcing plate 5 is placed on the pallet 11, and then the substrate 3 and the interleaving paper are alternately stacked thereon to form the stack 2. Alternatively, the stack 2 may be formed in another place and changed so that it is placed on the pallet 11. After the stacked body 2 is placed on the pallet 11, the reinforcing member 7 and the airbag 9 are placed on the pallet 11, and the lid body 13 is placed thereon, and the lid body 13 is fixed to the pallet 11.

  After that, the pressure switch 21 and the electric pump 19 are installed on the top plate 13a as pressure adjusting means. A pressurized air supply device (not shown) such as a compressor is connected to the air supply tube 15 connected to the airbag 9 to supply pressurized air to the airbag 9. After the pressurized air of a desired pressure is supplied to the airbag 9, the valve 25 is closed and the pressurized air supply device is removed. Thereby, the airbag 9 is inflated, the upper surface of the stack 2 is pressed through the reinforcing plate 16, and the stack 2 is pressed against the pallet 11 and fixed.

  At this time, since the airbag 9 exerts a uniform pressing force on the entire upper surface of the stack 2, even when the substrate size is large or the number of stored sheets is large, each substrate 3 is applied with a uniform pressure over the entire region. The substrate can be fastened and fixed, and the substrate does not move during transportation and cause damage.

  Further, since the airbag 9 applies a uniform pressing force to the entire surface of the substrate, even if the pressing force per unit area is set to be small, the substrate can be restrained so as not to move. Can be prevented. The pressing force of the airbag 9 can be adjusted to a desired value by adjusting the air pressure supplied to the airbag 9. In addition, when the height of the stack 2 is insufficient and the airbag 9 cannot apply the pressing force to the stack 2, an appropriate spacer may be inserted between the reinforcing plate 7 and the airbag 9. .

  Thereafter, the whole is housed in an outer box formed by the second pallet 27 and the lid 29, and in that state, transported and stored in a desired place.

  As described above, by using this storage container, the stack 2 formed by stacking a large number of large-sized substrates 3 can be safely transported without damaging the substrates 3. In addition, when storing a board | substrate in the storage container 10, the pallet 11 is made into a horizontal state, and it piles up in the state which the board | substrate was horizontal, but when conveying the formed storage body 1, the pallet 11 is in a horizontal state. The pallet 11 may be tilted or may be set up vertically as necessary. Even in this case, since the substrate 3 is clamped over the entire surface with a uniform pressure and pressed against the pallet 11, the substrate 3 does not move and can be safely transported without causing damage to the substrate 3. .

  In unpacking, the outer lid 29 is removed, the inner box (pallet 11, lid 13, etc.) stored therein is taken out and carried into a desired place. At this time, since the inner box was covered with the outer box, dust, dust, etc. were not attached. For this reason, carry the inner box to a place where cleanliness is required such as in a factory where the substrate is used. Will not cause any trouble. Next, after the air in the airbag 9 is evacuated, the lid 13 is removed from the pallet 11 together with the electric pump 19 and the like, and after the airbag 9 and the reinforcing plate 7 are removed, the substrate 3 is removed from the upper surface side of the stack 2. The interleaving paper 4 may be taken out alternately.

  According to the present embodiment, when the substrate is transported and stored, the airbag 9 is kept in a state in which pressurized air is sealed at a predetermined pressure by the pressure switch 21 and the electric pump 19 which are pressure adjusting means. Therefore, even if the bulk of the stack becomes low due to the crushing of the interleaf paper 4, the airbag 9 can continue to exert a uniform pressing force on the upper surface of the stack 2, and the substrate 3 is displaced and damaged. Will not occur.

In the above embodiment, only the pressing force by the airbag 9 disposed on the upper surface of the stack 2 is used to fix the substrate 3 in the stack 2, but if necessary, the side surface of the stack 2 It is also possible to dispose an appropriate cushion material between the side plates 13b of the lid 13.
FIG. 8 shows a substrate housing 31 according to the embodiment in that case. In this embodiment, an airbag 33 is inserted as a cushioning material between the side surface of the stack 2 and the side plate 13b of the lid 13. And the pressurized air is enclosed and the side surface of the stacked body 2 is restrained. With this configuration, the displacement of the substrate 3 during transportation can be prevented more reliably.

Next, a substrate storage body according to the second embodiment will be described.
FIG. 9 is a schematic cross-sectional view of the substrate storage body 41 according to the second embodiment. In FIG. 9, components having the same functions as those described in the first embodiment are given the same numbers, and detailed descriptions thereof are omitted.

  A tube 45 for connecting the air supply tube 43 and the pressure regulating valve 53 is connected to the airbag 9 so as to extend to the outside of the lid body 13, and the valve 24 is connected to the tip of the tube 43 and the tube 45. A pressure regulating valve 53 is attached to the tip of the.

  Further, as a pressure regulating means for the airbag, a vibration driving pump 47 connected to the pressure regulating valve 53 and the tube 43 is provided on the top of the top plate 13a. The vibration drive pump 47 may be driven by vibration and is not limited in shape, but in FIG. 9, a diaphragm 51 supported by a spring 49 is provided with a weight 51 and is connected to a tube 43 below the weight 51. A pump 53 is provided. The weight 51 supported by the spring 49 swings up and down due to vibration during transportation and the like, and air is supplied into the airbag 9 by the pump 43. Further, the inside of the airbag 9 is kept at a constant pressure by the pressure regulating valve 53.

  The pressure of the air in the airbag 9 is preferably adjusted to 30 gf to 300 gf per square centimeter. An excessively high pressure is not preferable because an excessive pressing force is applied to the substrate, and an excessively low pressure is not preferable because the substrate may be displaced.

  According to the present embodiment, when the substrate is transported and stored, the airbag 9 is maintained in a state in which pressurized air is sealed at a predetermined pressure by the pressure regulating valve 53 and the vibration drive pump 47 as pressure regulating means. Therefore, even when the bulk of the stacked body is reduced due to the crushing of the interleaf paper 4, the airbag 9 can continue to apply a uniform pressing force to the upper surface of the stacked body 2, and the substrate 3 is displaced. There is no damage.

It is a schematic sectional drawing of a board | substrate storage body. It is a schematic perspective view of a board | substrate storage body. It is a schematic side view which shows the state which mounted the stacked body of the board | substrate on the pallet. It is a schematic perspective view which shows the state which mounted the stacked body of the board | substrate on the pallet. It is a schematic sectional drawing explaining the cross-sectional structure of a board | substrate. It is a schematic sectional drawing which shows an example of a laminated body. It is a schematic sectional drawing which shows an example of a laminated body. It is a schematic sectional drawing of the board | substrate storage body which concerns on 2nd Embodiment. It is a schematic sectional drawing of the board | substrate storage body which concerns on 3rd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ......... Substrate container 2 ......... Stacking body 3 ......... Substrate 3a ......... Substrate body 3b ...... Functional layer 3c ......... Protective film 4 ......... Interleaf paper 5 ......... Reinforcing plate 7 ... …… Reinforcement plate 9 ……… Airbag 11 ……… Pallet 11a ……… Support surface 11b ……… Protrusion 12 ……… Click lock 13 ……… First lid 13a ……… Top plate 13b …… … Side plate 15 ……… Tube 17 ………… Tube 19 ……… Electric pump 19a ……… Electric motor 21 ……… Pressure switch 23 ……… Battery 25 ……… Valve 27 ……… Pallet 29 ……… Second Lid 31 ……… Substrate housing 33 ……… Airbag 41 ……… Substrate housing 43 ……… Tube 45 ……… Tube 47 ……… Vibration drive pump 49 ……… Spring 51 ……… Weight 53 ... …… Diaphragm pump

Claims (10)

  A storage container for storing a stack formed by stacking a plurality of substrates, the stack being mounted on a support base having a support surface on which the substrate can be placed in a horizontal state. A load support plate connected to the support base so as to face the upper surface of the stacked body, and is disposed between the load support plate and the stack, supported by the load support plate and A substrate storage container, comprising: an airbag that applies a uniform pressing force to the entire upper surface of the stack; and pressure adjusting means that adjusts the pressure in the airbag.   The pressure adjusting means includes an electric pump that operates according to a change in pressure in the airbag, and when the pressure in the airbag decreases, air is supplied by the electric pump to adjust the pressure in the airbag. The substrate storage container according to claim 1, wherein:   2. The substrate storage container according to claim 1, wherein the pressure regulating means includes a pressure regulating valve and a vibration drive pump that is driven by vibration to supply air, and performs pressure regulation in the airbag.   4. The substrate storage container according to claim 2, wherein the pressure adjusting means keeps the pressure in the airbag at 30 gf to 300 gf per square centimeter.   The flat reinforcing plate material is arrange | positioned in any one or both between the said airbag and the said stack, and between the said stack and the said support stand, The Claim 2 or Claim 3 characterized by the above-mentioned. Board storage container.   The support base is a pallet, and a first lid body detachably attached so as to surround the stack placed on the pallet is provided on the pallet, and the top of the first lid body is provided. 4. The substrate storage container according to claim 2, wherein a plate acts as the load support plate.   The substrate storage container according to claim 6, further comprising a cushion material inserted between a side surface of the stack and a side plate of the first lid.   The board | substrate storage body formed by accommodating the laminated body which laminated | stacked the board | substrate and the interleaving paper alternately in the board | substrate storage container of any one of Claim 1-7.   9. The substrate container according to claim 8, wherein the interleaving paper is a resin foam sheet.   The substrate storage body according to claim 8 or 9, wherein the substrate is a glass substrate provided with a functional layer.

Images