JP2006326805A - Device of switching negative pressure/positive pressure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device of switching negative pressure/positive pressure which can quickly generate negative pressure and positive pressure on a suction nozzle and does not need to provide a negative pressure driving part. <P>SOLUTION: The negative pressure/positive pressure-switching device is equipped with an ejector nozzle 9, an ejector pipe 8 connected to the outlet side of the elector nozzle 9, and a positive pressure gas supply part 14a connected to the inlet side of the ejector nozzle 9. An output hole 12 is connected between the outlet side of the ejector nozzle 9 and the inlet side of the ejector pipe 8, and the suction nozzle 13 is connected to the output hole 12. An opening/closing head 6 which generates the negative pressure or positive pressure on the suction nozzle 13 by opening/closing the outlet side of the ejector pipe 8 is provided on the outlet side of the ejector pipe 8. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a negative pressure / positive pressure switching device for alternately supplying a negative pressure and a positive pressure to an adsorption nozzle that repeatedly adsorbs and detaches a component such as an electronic component, compared to the atmospheric pressure, and particularly a high speed. The negative pressure / positive pressure switching device that can repeatedly switch between negative pressure and positive pressure.

  A conventional negative pressure / positive pressure switching device will be described with reference to FIG. As shown in FIG. 4, the negative pressure / positive pressure switching device 20 is connected to a negative pressure air supply source 23 and a positive pressure air supply source 22 that generate negative pressure and positive pressure, respectively, compared to atmospheric pressure. An electromagnetic valve 21 is provided. In FIG. 4, negative pressure air (hereinafter referred to as negative pressure) and positive pressure air (hereinafter referred to as positive pressure) are supplied to the electromagnetic valve 21 from a negative pressure air supply source 23 and a positive pressure air supply source 22, respectively. The valve 21 switches between negative pressure and positive pressure. At this time, negative pressure and positive pressure are alternately supplied to the suction nozzle 26 through the supply pipe 25 connected to the output side port 24 of the electromagnetic valve 21, and the suction / desorption of the component w such as an electronic component is performed by the suction nozzle 26. Is to be performed.

  In such a negative pressure / positive pressure switching device 20, the operating speed of the solenoid valve 21 is limited. For example, in order to switch from positive pressure to negative pressure, the flow of the positive pressure gas in the supply pipe 25 is first stopped. After that, the positive pressure staying in the supply pipe 25 needs to be sucked by the negative pressure. In this case, it is necessary to change the pressure in the supply pipe 25 to the negative pressure after the suction of the positive pressure to the atmospheric pressure, and even if the solenoid valve 21 is switched, there is a time delay when the negative pressure is supplied to the suction nozzle 26. May occur. On the other hand, in the negative pressure / positive pressure switching device 20, when switching from negative pressure to positive pressure, the inside of the supply pipe 25 is negative at the moment when the solenoid valve 21 is switched. For this reason, after making the inside of supply piping 25 into a positive pressure, it is necessary to supply a positive pressure to adsorption nozzle 26, and time loss will arise.

  Furthermore, since the flow of air from the negative pressure air supply source 23 or the positive pressure air supply source 22 is temporarily stopped by switching the electromagnetic valve 21, the operation is further delayed by the inertial force of the air after the switching of the electromagnetic valve 21. End up.

  As described above, the method using the conventional solenoid valve 21 has too many operation delay elements, and has become a bottleneck in speeding up.

  In addition, dust may be sucked into the electromagnetic valve 21 from the suction nozzle 26 by suction at a negative pressure, causing a problem.

  As described above, in the conventional negative pressure / positive pressure switching device 20, switching of the negative pressure / positive pressure at high speed is difficult. Furthermore, since such a negative pressure / positive pressure switching device 20 requires both the negative pressure supply source 23 and the positive pressure supply source 22, it is an inexpensive negative pressure / positive pressure switch having only the positive pressure supply source 22. An apparatus is desired.

  The present invention has been made in consideration of such points, and provides a negative pressure / positive pressure switching device that can switch negative pressure and positive pressure at high speed and can be manufactured at low cost. Objective.

  The present invention relates to an ejector nozzle, an ejector pipe connected to the outlet side of the ejector nozzle and having an inner diameter larger than the inner diameter of the ejector nozzle, and a positive pressure connected to the inlet side of the ejector nozzle to supply a positive pressure gas to the ejector nozzle. Provided between the gas supply section, the outlet side of the ejector nozzle and the inlet side of the ejector pipe through the output hole, and the outlet side of the ejector pipe. The outlet side of the ejector pipe is opened and closed. Thus, there is provided a negative pressure / positive pressure switching device comprising an on-off valve that generates a negative pressure or a positive pressure in the operating part.

  The present invention is the negative pressure / positive pressure switching device characterized in that the open / close valve comprises an open / close head that linearly moves by an actuator to open and close the outlet side of the ejector pipe.

  The present invention is the negative pressure / positive pressure switching device characterized in that the actuator comprises a solenoid.

  The present invention is the negative pressure / positive pressure switching device characterized in that the actuator comprises a piezoelectric element.

  The present invention provides a negative pressure / positive pressure switching device in which an ejector nozzle and an ejector pipe are held in an ejector block, and an output hole is formed in the ejector block.

  As described above, according to the present invention, switching between the negative pressure and the positive pressure can be performed without stopping the supply of the positive pressure gas, and since the structure is simple, it can be performed at high speed and easily. Further, since only the positive pressure gas supply unit needs to be provided, dust is not sucked, and there is no need to separately install the negative pressure gas supply unit, so that the negative pressure / positive pressure switching device can be manufactured at low cost. .

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 are diagrams showing an embodiment of a negative pressure / positive pressure switching device according to the present invention.

  1 to 3, the negative pressure / positive pressure switching device includes a base 2, an ejector block 3 having a through hole 3 a that is fixed to a fixed surface 2 a on the base 2 and extends parallel to the fixed surface 2 a, and a base A solenoid (actuator) 4 mounted in parallel to the fixed surface 2a on the upper surface 2 and opposed to the ejector block 3; an ejector nozzle 9 and an ejector pipe 8 disposed in the through hole 3a of the ejector block 3; It has.

  Among these, the ejector block 3 has the through hole 3a extending in parallel with the fixed surface 2a of the base 2 as described above, and further has the output hole 12 orthogonal to the through hole 3a. A supply hole 10 is provided on the inlet side of the ejector nozzle 9 in the through hole 3a, and a positive pressure gas supply unit 14a for supplying positive pressure air (hereinafter referred to as positive pressure) is supplied to the supply hole 10 through a supply pipe 14. Connected through. On the outlet side of the ejector nozzle 9, an ejector pipe 8 is fitted in the through hole 3a.

  The ejector nozzle 9 is inserted into the through-hole 3a from the supply hole 10 side of the ejector block 3, and the ejector nozzle 9 has a through-hole 9a at the center, and a conical projection 9c is formed at the end on the ejector pipe 8 side. Has been. A through hole 8a is formed in the ejector pipe 8, and a conical concave portion 8b is formed at an end portion of the through hole 8a on the ejector nozzle 9 side so as to face the tip of the conical convex portion 9c of the ejector nozzle 9. A gap d is formed by the convex portion 9c and the conical concave portion 8b.

  A support piece 9 b for the ejector nozzle 9 is provided in the through hole 3 a of the ejector block 3. The ejector pipe 8 and the support piece 9b of the ejector nozzle 9 are opposed to each other through the air chamber 3b, and the above-described output hole 12 communicates with the gap d through the air chamber 3b. A through hole 8a of the ejector pipe 8 communicates with the gap d, and an exhaust hole 11 opened to the atmosphere is formed on the outlet side of the through hole 8a.

  On the other hand, a shaft 5 is attached to the solenoid 4, and an opening / closing head (open / close valve) 6 is provided on the shaft 5 of the solenoid 4 so as to face the exhaust hole 11, and faces the exhaust hole 11 of the open / close head 6. A pad 6a is attached to the surface. The opening / closing head 6 opens and closes the exhaust hole 11.

  A spring 7 as a biasing means is provided between the ejector block 3 and the opening / closing head 6, and this spring 7 biases the opening / closing head 6 so as to separate the exhaust hole 11 and the pad 6a. Further, an operating portion such as a suction nozzle 13 is screwed into the output hole 12 of the ejector block 3.

  Next, the effect | action of this Embodiment which consists of such a structure is explained in full detail.

  First, the movement of the solenoid 4 will be described with reference to FIG. When the solenoid 4 is excited, the shaft 5 moves toward the ejector block 3, and when the excitation is cut off, the shaft 5 is biased by the spring 7 and operates in a direction away from the ejector block 3.

FIG. 2 shows the ejector block 3 and the opening / closing head 6 in a state where the excitation of the solenoid 4 is cut off. 2, the opening and closing head 6 is operated in the direction indicated by the arrow L ₁ and is biased by the spring 7, the pad 6a attached to the opening and closing head 6 is separated from the exhaust hole 11 of the ejector pipe 8, thereby the exhaust hole 11 is opened to the atmosphere.

  During this time, positive pressure air is supplied from the positive pressure gas supply unit 14 a to the supply hole 10 of the ejector block 3. The positive pressure air supplied to the supply hole 10 of the ejector block 3 is jetted from the conical projection 9c at the tip through the through hole 9a of the ejector nozzle 9 to the ejector pipe 8 side, and then discharged from the exhaust hole 11 to the atmosphere. Is done.

  Incidentally, as shown in FIGS. 1 to 3, the inner diameter of the through hole 8 a of the ejector pipe 8 is larger than the inner diameter of the through hole 9 a of the ejector nozzle 9. For this reason, in the gap d formed between the conical convex portion 9c of the ejector nozzle 9 and the conical concave portion 8b of the ejector pipe 8, the positive pressure air injected from the conical convex portion 9c of the ejector nozzle 9 Of air is involved. The air thus entrained is discharged from the exhaust hole 11 (ejector effect).

  In this case, the air in the air chamber 3b formed in the ejector block 3 is sucked out from the gap d and released together with the positive pressure air from the exhaust hole 11 to the atmosphere. For this reason, the inside of the air chamber 3 b becomes negative pressure, and air flows from the output hole 12. Since the suction nozzle 13 communicates with the output hole 12 as described above, a negative pressure is generated at the tip of the suction nozzle 13 and the fine component w such as an electronic component is sucked by the suction nozzle 13.

  On the other hand, as shown in FIG. 3, when the solenoid 4 (see FIG. 1) is excited, the shaft 5 moves to the ejector block 3 side, and the pad 6 a of the opening / closing head 6 is pressed against the exhaust hole 11 of the ejector pipe 8. Thus, the exhaust hole 11 is closed. At this time, the release of positive pressure air from the exhaust hole 11 stops. During this time, positive pressure air is continuously sent from the positive pressure gas supply unit 14a to the supply hole 10, and the positive pressure air sent into the supply hole 10 flows into the air chamber 3b through the gap d, and then the positive pressure air. Is exhausted from the output hole 12 (see FIG. 3).

  In this case, since the output hole 12 communicates with the suction nozzle 13, a positive pressure is generated in the suction nozzle 13, and the sucked fine component w at the tip of the suction nozzle 13 is forcibly separated from the suction nozzle 13. At the same time, dust or the like adhering to the suction nozzle 13 is discharged outward.

  In the present embodiment, the exhaust hole 11 is opened and closed by the solenoid (actuator) 4. However, an actuator such as a piezoelectric element that responds at high speed may be used.

  As described above, according to the present embodiment, while the positive pressure air is supplied from the positive pressure gas supply unit 14a to the supply hole 10, the opening / closing head 6 is driven by the solenoid 4 to open and close the exhaust hole 11, A negative pressure and a positive pressure can be generated in the suction nozzle 13 easily and quickly. Moreover, the negative pressure and the positive pressure can be generated in the suction nozzle 13 only by continuously supplying the positive pressure air from the positive pressure gas supply unit 14a to the supply hole 10, and therefore a negative pressure supply unit is provided separately. There is no need, and the negative pressure / positive pressure switching device can be manufactured at low cost.

1 is a partial cross-sectional view showing an embodiment of a negative pressure / positive pressure switching device according to the present invention. It is a principal part enlarged view of FIG. 1, and is a figure which shows the effect | action of negative pressure generation. It is a principal part enlarged view of FIG. 1, and is a figure which shows the effect | action of positive pressure generation | occurrence | production. The conceptual diagram which shows the negative pressure / positive pressure switching apparatus of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Negative pressure / positive pressure switching device 2 Base 2a Fixed surface 3 Ejector block 3a Through-hole 3b Air chamber 4 Solenoid 5 Shaft 6 Open / close head (open / close valve)
6a Pad 7 Spring 8 Ejector pipe 8a Through hole 8b Conical recess 9 Ejector nozzle 9a Through hole 9b Support piece 9c Conical convex part 10 Supply hole 11 Exhaust hole 12 Output hole 13 Adsorption nozzle 14 Supply pipe 14a Positive pressure gas supply part w Micro parts

Claims (5)

An ejector nozzle,
An ejector pipe connected to the outlet side of the ejector nozzle and having an inner diameter larger than the inner diameter of the ejector nozzle;
A positive pressure gas supply unit connected to the inlet side of the ejector nozzle and supplying a positive pressure gas to the ejector nozzle;
An operating part communicated between the outlet side of the ejector nozzle and the inlet side of the ejector pipe via an output hole;
An on-off valve provided on the outlet side of the ejector pipe and opening and closing the outlet side of the ejector pipe to generate a negative pressure or a positive pressure in the operating portion.   2. The negative pressure / positive pressure switching device according to claim 1, wherein the on-off valve comprises an on-off head that linearly moves by an actuator to open and close the outlet side of the ejector pipe.   3. The negative pressure / positive pressure switching device according to claim 2, wherein the actuator comprises a solenoid.   3. The negative pressure / positive pressure switching device according to claim 2, wherein the actuator comprises a piezoelectric element.   4. The negative pressure / positive pressure switching device according to claim 1, wherein the ejector nozzle and the ejector pipe are held in the ejector block, and the output hole is formed in the ejector block.

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