JP2008213051A - Switching valve device for vacuum - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To quickly discharge pressure air from an atmospheric releasing port when separating a workpiece by supplying air pressure for vacuum breaking to a suction part for workpiece holding. <P>SOLUTION: A three-port switching valve 30 for vacuum breaking communicates a supply port 31G with a pressure air supply port P1 of a device main body 10, passes through internal passages 10a and 10e of the device main body 10, passes through an internal passage 21G of a valve main body 21 of a three-port switching valve 20 for vacuum supply, is communicated with an output port P2 connected to a suction side via a valve member 23, and opens a discharge port P4 to a side surface on the same side as the pressure air supply port P1 of the device main body 10 to be opened in the atmosphere. A three-port switching valve 20 for vacuum supply opens a vacuum supply port P3 and the output port P2 to be connected to a vacuum source V to a side surface on the same side as the pressure air supply port P1 of the device main body 10 and a discharge port P4 of the three-port switching valve 30. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a vacuum switching valve device used in a vacuum transfer device in the field of semiconductor manufacturing.

Conventionally, as this type of switching valve device for vacuum, those described in Patent Document 1 (Japanese Patent Laid-Open No. 2003-311671) and Patent Document 2 (Japanese Patent No. 3866025) are known.
Patent document 1 is based on the applicant, but when such a vacuum switching valve device is used in a transfer device, a workpiece such as a semiconductor is transferred to a predetermined position and is vacuum-ruptured to a workpiece holding suction portion. After the work air pressure is supplied and the workpiece is detached, pressurized air remains in the internal passage from the suction part to the vacuum break switching valve, so if the suction part remains in that position, it remains. Since the internal pressure air is discharged from the adsorption part to the atmosphere, there is a risk that the position of workpieces such as semiconductors that have been separated after being transported at an angle may be displaced by the pressure, or may be blown off in some cases. Even when the apparatus returns to the original position, the position of the workpiece to be transported is shifted by the remaining pressurized air, and the predetermined position cannot be held or blown away.

  On the other hand, in Patent Document 2, when the vacuum breaking air pressure is supplied to the workpiece holding suction portion and the workpiece is detached, a part of the pressure air is constantly discharged from the exhaust port. After the separation, the pressure drops to atmospheric pressure in a shorter time than the structure of Patent Document 1, but when the internal passage from the suction part to the vacuum break switching valve is long, it still has the same problems as the former. there were.

Therefore, the work time, that is, the takt time as a whole takes a long time and cannot contribute to productivity as a whole. Further, the structure of Patent Document 2 has a problem in that a part of the pressure air is discharged from the exhaust port while the vacuum break switching valve is operating, leading to a wasteful consumption of energy.
JP 2003-31671 A Japanese Patent No. 3866025

As described above, in the conventional structure, when the vacuum-conveyed workpiece is detached, the pressure air for vacuum break introduced into the adsorption part remains in the pipe passage leading to the adsorption part. However, since the air flows out from the same adsorbing portion even after the workpiece is detached, there is a problem in that the pressure air has an adverse effect as described above.
The present invention has been made in order to solve such a conventional problem. The purpose of the present invention is to supply a vacuum breaking air pressure to the workpiece holding suction portion and release the workpiece from the exhaust port. An object of the present invention is to provide a vacuum switching valve device that can be quickly evacuated.

  Another object of the present invention is not to exhaust a part of the pressure air to the atmosphere at the time of vacuum break and consume the air as shown in the conventional example of Patent Document 2, but to use the pressure air for vacuum break. An object of the present invention is to provide a vacuum switching valve device that operates effectively.

  According to the first aspect of the present invention, there is provided an apparatus main body having a pressure air supply port connected to a pressure air source, a vacuum breaking three-port switching valve mounted on one side surface of the apparatus main body, and the other of the apparatus main body. In the vacuum switching valve device having a vacuum supply three-port switching valve mounted on a side surface, the vacuum breaker three-port switching valve communicates a supply passage to the pressure air supply port of the device body, and Through the internal passage of the apparatus main body, through the internal passage of the valve body of the three-port switching valve for vacuum supply, and through the valve member to the output port connected to the adsorption side, the exhaust port is connected to the pressure of the apparatus main body. The air supply port opens to the side surface on the same side and opens to the atmosphere. The three-port switching valve for vacuum supply connects the vacuum supply port connected to a vacuum source and the output port to the pressure air of the apparatus main body. Serving Characterized in that an opening to the port and the same side of the side surface and the exhaust port of the vacuum-breaking 3-port switch valve.

According to a second aspect of the present invention, in the vacuum switching valve device according to the first aspect, a flow rate is provided in the middle of the passage communicating the pressurized air supply port of the device main body with the supply port of the vacuum breaking three-port switching valve. A control valve is mounted, and the supply amount of the vacuum breaking pressure air can be adjusted.
According to a third aspect of the present invention, in the vacuum switching valve device according to the first aspect, the pressure is applied in the middle of the passage communicating the pressurized air supply port of the device main body and the supply port of the vacuum breaking three-port switching valve. A control valve is mounted, and the pressure of the vacuum break pressure air can be adjusted.

According to a fourth aspect of the present invention, in the vacuum switching valve device according to the third aspect, the pressure control valve is a pressure reducing valve.
According to a fifth aspect of the present invention, there is provided an apparatus main body having a pressure air supply port connected to a pressure air source, a vacuum breaking three-port switching valve mounted on one side surface of the apparatus main body, and the other of the apparatus main body. In a vacuum switching valve device having a vacuum supply three-port switching valve mounted on a side surface, the device main body is connected to the pressure air supply port and the pressure air supply port, and the vacuum break three-port switching is performed. The three-port switching valve for vacuum supply is attached to a valve main body and a side surface of the valve main body. A solenoid, an output port that opens to the bottom side of the valve body to connect to the suction side, a supply port that opens to the bottom side of the valve body to connect to a vacuum source, and the output port Both the internal passage provided in the valve main body so as to open on the side of the valve main body on the side of the device main body, and the valve opening provided on the side of the valve main body on the side of the device main body for connection to the output port An opening provided in the solenoid-side side surface of the valve body for connection to the supply port, a communication hole provided in the valve body for connecting the output port and the supply port, and the communication A valve member disposed in the valve opening and the opening through a hole; a spring that presses the valve member in the opening direction; and the valve member in the valve opening direction through a movable iron core of the solenoid. The vacuum breaking three-port switching valve includes a valve main body, a solenoid attached to a side surface of the valve main body, and the valve for connecting the inside of the vacuum switching device to the atmosphere side. Open on the bottom side of the main unit An exhaust port to be connected, a valve opening provided in the valve body for connection to the exhaust port, and a valve opening provided in the valve body so as to be connected to the valve opening and open to the device body side of the valve body. An output port provided on the side of the valve body on the solenoid side, and a supply passage provided on the valve body so as to be connected to the opening and open on the side of the valve body on the device body side. A valve, a communication hole provided in the valve main body to connect the valve opening and the opening, a valve member disposed in the valve opening and the opening through the communication hole, and the valve A spring that presses the member in the opening direction; and a spring that presses the valve member in the opening direction for the valve via the movable iron core of the solenoid. Connected to the supply port of the port switching valve, An internal passage of the main body is connected to an output port of the vacuum breaking three-port switching valve, and an internal passage of the apparatus main body is connected to an internal passage of the three-port switching valve for vacuum supply, and the three ports for vacuum supply When the solenoid of the switching valve is ON, the movable iron core is sucked, and the vacuum supply port is connected to the output port through the opening of the vacuum supply 3-port switching valve, the communication hole, and the valve opening, When the solenoid of the 3-port switching valve for vacuum supply is OFF, the output port is an internal passage of the 3-port switching valve for vacuum supply, an internal passage of the apparatus body, an output port of the 3-port switching valve for vacuum breaking, and the vacuum It is connected to the exhaust port through the valve opening of the three-port switching valve for breaking, and when the solenoid of the three-port switching valve for vacuum breaking is turned on, the movable iron core is sucked and the vacuum breaking The opening of the three-port switching valve is connected to the valve opening through the communication hole, and the output is supplied through the output port, the internal passage of the apparatus body, and the valve opening of the vacuum supply three-port switching valve. It is connected to a port.

1. When the vacuum break air pressure is supplied to the workpiece holding suction part and the workpiece is detached, the pressure air can be quickly exhausted from the exhaust port, and the next suction operation can be made in a short time. It has become possible to shorten the tact time.
2. Since it is configured to discharge pressure air to the atmosphere only when the workpiece is detached, instead of exhausting a part of the pressure air to the atmosphere at the time of vacuum break, the pressure air for vacuum break is effective. It can comprise so that it may act on.

  3. In the switching valve for vacuum break, since the inflow amount of the supply break air can be controlled effectively, it is possible to expect a practical effect that it can cope with the purpose such as the shape of the workpiece.

Hereinafter, the present invention will be described based on embodiments shown in the drawings.
1 to 3 show a vacuum switching valve device according to a first embodiment of the present invention.
In the vacuum switching valve device according to the present embodiment, a vacuum supply switching valve 20 and a vacuum breaking switching valve 30 comprising two-position three-port electromagnetic valves are arranged on both sides of a substantially rectangular parallelepiped device body 10. Is made up of.

  The vacuum supply switching valve 20 includes a valve body 21 and a solenoid 22, and valve openings 21 </ b> A and 21 </ b> B each having a bottom surface from both sides of the central part of the valve body 21 are formed. Valve seats 21C and 21D are formed on the bottom surfaces of the valve openings 21A and 21B. Between the bottom surfaces, communication holes 21E having a predetermined size are formed through a plurality of circumferentially fixed positions of the valve seats 21C and 21D.

  An annular projection 10A formed on the side surface of the apparatus main body 10 on the side of the switching valve 20 for vacuum supply is fitted to the valve passage 21A, and a space defined by the annular projection 10A and the valve passage 21A. A valve member 23 is disposed, and a coil spring 24 is mounted between the valve member 23 and the side surface of the apparatus main body 10 on the side of the switching valve 20 for vacuum supply. A hole 10B that sits in the center of the annular protrusion 10A is formed, and the end of the coil spring 24 on the vacuum supply switching valve 20 side is inserted and disposed. Further, the valve member 23 holds its outer peripheral portion with a valve support member 25. As shown in FIG. 2, the valve support member 25 includes an annular portion 25B that supports the valve member 23 and a plurality of leg portions 25A that protrude in the longitudinal direction. The leg portions 25A Passes through the communication hole 21 </ b> E of the valve body 21, and is pressed toward the solenoid 22 by the valve member 23 by the pressing force of the coil spring 24, and the tip abuts against the end surface of the movable iron core (plunger) 22 </ b> A of the solenoid 22. ing. Further, the movable iron core 22A of the solenoid 22 is always pressed and supported toward the apparatus main body 10 by a coil spring 22B. At this time, the pressing force of the coil spring 24 and the coil spring 22B acts on both sides of the support member 25, but the valve seat 22C on the end surface of the movable iron core 22A normally seals the valve seat 21D when the solenoid 22 is OFF. The pressing force of the coil spring 22B is set stronger than that of the coil spring 24.

On the other hand, the vacuum break switching valve 30 includes a valve body 31 and a solenoid 32, and valve openings 31A and 31B each having a bottom surface from both sides of the central portion of the valve body 31 are formed. Valve seats 31C and 31D are formed on the bottom surfaces of the respective holes. Between the bottom surfaces, communication holes 31E having a predetermined size are formed through a plurality of locations around the valve seats 31C and 31D.
An annular projection 10C formed on the side surface of the apparatus main body 10 on the side of the switching valve for vacuum break 30 is fitted to the valve passage 31A, and a space formed by the annular projection 10C and the valve passage 31A is formed. A valve member 33 is arranged, and a coil spring 34 is mounted between the valve member 33 and the side surface of the apparatus main body 10 on the vacuum break switching valve 30 side. A counterbore 10D is formed at the center of the annular protrusion 10C, and the left end of the coil spring 34 is inserted and arranged. Further, the valve member 33 holds its outer peripheral portion with a valve support member 35. As shown in FIG. 2, the valve support member 35 includes an annular portion 35B that supports the valve member 33 and a plurality of leg portions 35A that protrude in the longitudinal direction. The leg portion 35A extends through the communication hole 31E of the valve body 31 described above, presses the valve member 33 toward the solenoid 32 by the pressing force of the coil spring 34, and the tip is movable by the solenoid 32. It is in contact with the end surface of the iron core (plunger) 32A. Further, the movable iron core 32A of the solenoid 32 is always pressed and supported in the direction of the apparatus main body 10 by a coil spring 32B. At this time, the pressing force of the coil spring 34 and the coil spring 32B acts on both sides of the valve support member 35. Normally, the valve seat 32C on the surface of the movable iron core 32A seals the valve seat 31D when the solenoid 32 is OFF. Further, the pressing force of the coil spring 32B is set stronger than that of the coil spring 34. In the figure, reference numerals 26 and 36 denote manual switching valves.

Next, the structure of the opening and passage in these two switching valve structures will be described.
In FIG. 1, a pressure supply port Pl connected to a pressure air source opens on the bottom surface of the apparatus main body 10, the inside of the apparatus main body 10 is formed vertically, has a reduced diameter portion 10 a in the middle, and opens from the upper end. It communicates with the screw hole 10b. And the through-opening 10c connected to the switching valve 30 side for vacuum breaking from near the screw hole 10b bottom face is opened. The internal passage 10d formed below the side surface of the main valve body 10 on the vacuum break switching valve 30 side passes through the main valve body 10 and opens upward on the vacuum supply switching valve 20 side. 10e is connected.

  On the other hand, two ports are opened at intervals in the bottom surface of the valve body 21 of the switching well 20 for vacuum supply, and the output closer to the apparatus body 10 is connected to a vacuum device such as a suction pad. The side closer to the port P2 and the solenoid 22 side is a vacuum supply port P3 connected to a vacuum generator (such as a vacuum pump) V that is a vacuum supply source. The output port P2 communicates with the valve port 21A, and the vacuum supply port P3 opens as a valve port 21F to the center of the valve seat 21D. Further, an internal passage 21G that communicates with the internal passage 10e that opens on the end face of the apparatus main body 10 on the vacuum supply switching valve 20 side opens as 21 at the center of the valve seat 21C.

Further, an exhaust port P4 is opened on the bottom surface of the valve body 31 of the vacuum break switching valve 30, and is opened as a valve port 31F to the center of the valve seat 31C.
Furthermore, in the apparatus main body 10, a flow rate control valve 40 is mounted in a screw hole 10b that opens from the upper end, and a valve function that moves in the longitudinal direction is incorporated therein, and a conical portion 41 at the tip is a reduced diameter portion 10a. The amount of compressed air for vacuum breaking (positive pressure) flowing from the pressure supply port Pl is controllable. That is, the flow rate that flows from the communication port 10c to the destruction switching valve 30 through the supply communication port 31G is controlled. Further, the valve opening 31A communicates with the opening 10d of the apparatus main body 10 through the output port 31J.

FIG. 3 shows a circuit configuration of the vacuum switching valve device according to the present embodiment.
The operation of the vacuum switching valve device according to this embodiment will be described with reference to FIG.
First, the movement during vacuum suction will be described. 1 and 3, the solenoid 22 of the vacuum supply switching valve 20 is turned ON. Then, the movable iron core 22A is attracted toward the solenoid 22, so that the valve seat 21D is opened, and the vacuum supply port P3 communicates with the valve port 21A from the valve port 21F, the hole 21B, and the communication hole 21E. Connected. Therefore, the vacuum source V communicates with the vacuum suction device SA through the vacuum supply switching valve 20, and the workpiece W is sucked and held.

Although not shown, these switching valves are integrated with the transfer device, and the workpiece W held is transferred to a predetermined place.
Next, a case where the workpiece W transported to a predetermined position is detached will be described.
As described above, when the vacuum supply switching valve 20 operates and the workpiece W reaches a predetermined position, the vacuum supply switching valve 20 is turned OFF. Then, it returns to the state of FIG. Due to the pressing force of the coil spring 22B, the movable iron core 22A and further the valve member 23 move toward the apparatus body 10, the valve port 21F is closed, the valve port 21H is opened, and the output port P2 has internal passages 21G, 10e, 10d, output The exhaust port P4 communicates with the exhaust port P4 through the port 3lJ, the valve communication port 31A, and the valve port 31F, and the vacuum in the vacuum adsorption device communicates with the atmosphere side, and the atmosphere flows in and the vacuum is broken.

  After a short time has elapsed after the vacuum supply switching valve 20 is turned off, the vacuum break switching valve 30 is further turned on. Then, the valve port hole 31H sealed by the movable iron core 32A is opened, and communicates with the valve port 31A through the communication hole 31E. Accordingly, the valve port 31A portion that has been in communication with the exhaust port P4 so far communicates with the pressure air source side, and the vacuum break pressure air suddenly flows into the vacuum supply device SA and is adsorbed. Is withdrawn.

When the separation of the workpiece W to the predetermined position is completed, the vacuum break switching valve 30 is turned OFF. Thereby, the state shown in FIG. 1 is restored. Then, the pressure supply port Pl is closed by the movable iron core 32A. The pressurized air that has flowed into the vacuum supply device SA flows out from the exhaust port P4 and returns to the atmospheric pressure in these internal passages.
4 and 5 show a vacuum switching valve device according to a second embodiment of the present invention.

As shown in FIG. 4, the vacuum switching valve device according to the present embodiment is equipped with a regulator (pressure reducing valve) 140 instead of the flow rate control valve 40 in FIG. 1.
The function of the regulator 140 may be generally a general structure, and is selected by setting the pressure from the air pressure source to a predetermined pressure on the secondary side.
The regulator 140 is a cartridge type built in the apparatus main body 110, and the regulator main body 141 is inserted into a hole 110A formed in a vertical passage connecting the port P1 of the apparatus main body 110 and the passage 110c. The A pressure regulating mechanism is built in the upper part of the regulator body 141, and a check valve mechanism is built in the lower part. The pressure adjusting mechanism includes a piston 142, a spring 143 that presses the piston 142 downward, and a screw 144. By operating the screw 144, the piston 142 is operated in the vertical direction via the spring 143.

The check valve mechanism includes a sphere 145 and a spring 146 that presses the sphere 145 upward, and the tip small diameter portion 142 a of the piston 142 is always in contact with the sphere 145.
A communication port 141 a is formed below the apparatus main body 110, and a communication port 141 b is formed in the radial direction above the device main body 110, and is configured to communicate through a hole 142 c through which the small diameter portion 142 a of the piston 143 passes.

Therefore, by rotating the screw 144, the sphere 145 is pushed down by the small-diameter portion 142a of the piston 142, and by controlling the gap amount between the sphere 145 and the hole 142a of the apparatus main body 110, the vacuum is supplied from the supply port P1. The breaking air pressure flowing into the vacuum suction side via the breaking switching valve 130 can be controlled to a predetermined pressure.
Other structures are the same as those of the first embodiment, and detailed description thereof is omitted.

The vacuum switching valve device according to the present embodiment includes a regulator (pressure reducing valve) 140 instead of the variable throttle valve 40 in the device main body 110, and the pressure air from the pressure supply port Pl is supplied to the vacuum breaking switching valve 130. The following new effects can be further produced.
Normally, the pressure reducing valve is connected between the pneumatic source and the valve device, and the pressure of the subsequent device is made constant. However, when many pneumatic devices are used, the vacuum switching valve device of the present invention is operated by the operation of other devices. Since the air pressure for vacuum breakage at this time may be affected by pressure fluctuations, disposing the pressure reducing valve near the switching valve in this way makes it less susceptible to the pressure fluctuations described above. Therefore, in the transportation of semiconductors and the like, the transportation work can be carried out under constant conditions at all times.

  In the present embodiment, the regulator (pressure reducing valve) 140 is cartridge-type and incorporated in the apparatus main body 110. For example, a sub-base is provided in the lower part of the apparatus main body 110, and is built in the sub-tank and connected to the air pressure source. Even if it does, the same effect is acquired.

It is a partial section front view of the switching valve device for vacuum which shows a first embodiment of the present invention. It is a perspective view of the external appearance shape of the valve support member shown in FIG. It is a circuit explanatory drawing of FIG. It is a partial cross section front view of the switching valve apparatus for vacuum which shows 2nd embodiment of this invention. FIG. 5 is a circuit explanatory diagram of FIG. 4.

Explanation of symbols

10, 110 Device body 10A, 10C Annular projection 10B Counterbore 20 Vacuum supply switching valve 21, 31 Valve body 21A, 21B, 31A, 31B Valve port 21C, 21D, 31C, 31D Valve seat 21E, 31E Communication hole 22, 32 Solenoid 22A, 32A Movable iron core (plunger)
22B, 24, 32B, 34 Coil springs 23, 33 Valve members 25, 35 Valve support member 30 Vacuum break switching valve 31G Supply port 31J Output port 40 Flow control valve 140 Regulator (pressure reducing valve)
P Pressure air source P1 Pressure supply port P2 Output port P3 Vacuum supply port P4 Exhaust port V Vacuum source SA Vacuum suction device W Workpiece

Claims (5)

An apparatus main body (10) having a pressure air supply port (P1) connected to a pressure air source (P), and a vacuum break three-port switching valve (30) mounted on one side surface of the apparatus main body (10) A vacuum switching valve device having a vacuum supply three-port switching valve (20) mounted on the other side surface of the device body (10),
The vacuum break three-port switching valve (30) communicates the supply passage (31G) to the pressure air supply port (P1) of the apparatus main body (10), and the internal passage (10a) of the apparatus main body (10). 10e), through the internal passage (21G) of the valve body (21) of the vacuum supply three-port switching valve (20), and connected to the suction side via the valve member (23) (P2 ), The exhaust port (P4) is opened to the side surface on the same side as the pressure air supply port (P1) of the apparatus body (10), and is opened to the atmosphere.
The three-port switching valve (20) for vacuum supply connects a vacuum supply port (P3) connected to a vacuum source (V) and the output port (P2) to a pressure air supply port (P1) of the apparatus body (10). And a vacuum switching valve device that opens to the side surface on the same side as the exhaust port (P4) of the vacuum break three-port switching valve (30).   A flow control valve (40) is mounted in the middle of the passage communicating the pressurized air supply port (P1) of the apparatus body (10) and the supply port (31G) of the vacuum breaker 3 port switching valve (30). 2. The vacuum switching valve device according to claim 1, wherein the supply amount of the vacuum break pressure air is adjustable.   A pressure control valve (140) is mounted in the middle of the passage communicating the pressure air supply port (P1) of the apparatus body (10) and the supply port (31G) of the vacuum breaker 3 port switching valve (30). 2. The vacuum switching valve device according to claim 1, wherein the pressure of the vacuum breaking pressure air is adjustable.   The vacuum switching valve device according to claim 3, wherein the pressure control valve (140) is a pressure reducing valve. An apparatus main body (10) having a pressure air supply port (P1) connected to a pressure air source (P), and a vacuum break three-port switching valve (30) mounted on one side surface of the apparatus main body (10) A vacuum switching valve device having a vacuum supply three-port switching valve (20) mounted on the other side surface of the device body (10),
The apparatus main body (10) is connected to the pressurized air supply port (P1) and the pressurized air supply port (P1), and has an opening (10c) that opens to the vacuum breaker 3 port switching valve (30) side. And internal passages (10d, 10e) penetrating in a direction orthogonal to the pressurized air supply port (P1),
The three-port switching valve for vacuum supply (20) includes a valve body (21), a solenoid (22) attached to a side surface of the valve body (21), and the valve body (21) for connection to the suction side. An output port (P2) that opens to the bottom side of the valve, a supply port (P3) that opens to the bottom side of the valve body (21) for connection to the vacuum source (V), and a connection to the output port (P2) In order to connect to the output port (P2) and the internal passage (21G) provided in the valve body (21) so as to open to the side surface of the valve body (21) on the device body (10) side. A valve opening (21A) provided on a side surface of the valve body (21) on the device body (10) side and the solenoid (22) of the valve body (21) for connection with the supply port (P3). Opening (21B) provided on the side surface A communication hole (21E) provided in the valve body (21) for connecting the output port (P2) and the supply port (P3), and the valve opening (21A) via the communication hole (21E). ) And the opening (21B), a valve member (23, 25), a spring (24) for pressing the valve member (23, 25) in the direction of the opening (21B), and the valve member (23 , 25) and a spring (22B) that presses the solenoid (22) through the movable iron core (22A) toward the valve opening (21A),
The three-port switching valve for vacuum break (30) connects the valve body (31), a solenoid (32) attached to the side surface of the valve body (31), and the vacuum switching device to the atmosphere side. An exhaust port (P4) opened on the bottom surface side of the valve body (31), a valve opening (31A) provided in the valve body (31) for connection to the exhaust port (P4), and the valve An output port (31J) provided in the valve body (31) so as to be connected to the opening (31A) and open to the device body (10) side of the valve body (31), and the valve body (31) The opening (31B) provided on the side surface on the solenoid (32) side of the valve and the opening (31B) and the valve body (31) so as to open on the side surface on the device body (10) side. Supply port (3) provided in the valve body (31) G), a communication hole (31E) provided in the valve body (31) for connecting the valve opening (31A) and the opening (31B), and the valve via the communication hole (31E). A valve member (33, 35) disposed in the opening (31A) for use and the opening (31B), a spring (34) for pressing the valve member (33, 35) in the direction of the opening (31B), A spring (32B) for pressing the valve member (33, 35) in the direction of the valve opening (31A) through the movable iron core (32A) of the solenoid (32);
The passage (10c) of the apparatus body (10) is connected to the supply passage (31G) of the vacuum breaker 3 port switching valve (30), and the internal passage (10d) of the apparatus body (10) is The internal passage (10e) of the apparatus body (10) is connected to the output port (31J) of the vacuum break 3-port switching valve (30), and the internal passage (10e) of the vacuum supply 3-port switching valve (20) ( 21G),
When the solenoid (22) of the vacuum supply 3-port switching valve (20) is turned on, the movable iron core (22A) is sucked, and the vacuum supply port (P3) is connected to the vacuum supply 3-port switching valve (20). Connected to the output port (P2) through the opening (22B), the communication hole (21E) and the valve opening (21A);
When the solenoid (22) of the vacuum supply three-port switching valve (20) is OFF, the output port (P2) is connected to the internal passage (21G) of the vacuum supply three-port switching valve (20), the device body (10). ) Through the internal passages (10e, 10d), the output port (31J) of the vacuum breaking three-port switching valve (30) and the valve opening (31A) of the vacuum breaking three-port switching valve (30). Connected to the exhaust port (P4),
When the solenoid (32) of the vacuum break three-port switching valve (30) is turned on, the movable iron core (32A) is sucked, and the opening (31B) of the vacuum break three-port switching valve (30) is the communication hole. (31E) and connected to the valve opening (31A), the output port (31J), the internal passages (10d, 10e) of the apparatus body (10), and the vacuum supply 3-port switching valve (20) A switching valve device for vacuum, which is connected to the output port (P2) through a valve opening (21A).

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