JP2006326769A - Non-contact type measurement system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress measurement error caused by an oil film in a non-contact type measurement system such as an optical type measurement system used with an automatic control type machine such as an NC (numerical control) machine or a machining center which performs the machining of the workpiece (a machining object and measuring object) by an automatic control. <P>SOLUTION: An air supply device 10 supplies air flow to an optical axis position of the light for measurement on the surface of the measuring object 4 in measuring of the measuring object 4, and reduces the oil film thickness on the measuring point of the measuring object 4. The NC machine 1 controls the movement of a table 2 for machining in the X axis direction and the Y-axis direction by an NC control device 9 in the same way as in machining. An optical measuring device 18 detects the light for measurement from the measuring object 4 by a photo-detecting element synchronized with the X coordinate value and the Y coordinate value of the table 2 for machining which change according to the moving control of the NC control device 9. The control part of the optical measuring device calculates the shape or the like of the measuring object 4 based on the light for measurement detected by the photo-detecting element. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention is a non-contact method such as an optical measurement system used with an automatic control type processing machine that performs automatic processing of workpieces (processing objects, measurement objects) such as NC (numerical control) processing machines and machining centers. The present invention relates to a type measurement system.

2. Description of the Related Art Conventionally, various automatically controlled processing machines that use an automatic control to process a workpiece such as an NC processing machine and a machining center have been used. In the automatic control processing machine, a processing table for mounting and fixing a workpiece, a spindle head for driving a processing tool mounted at a tool spindle position passing through a tool spindle to which a tool is attached, and the spindle head And an automatic tool changer (ATC) for selecting and removing the processing tool to be attached to the machine.
The ATC selects a tool magazine for storing a plurality of machining tools and a tool necessary for machining from among a plurality of machining tools stored in the tool magazine, and is attached to and detached from the tool spindle position of the spindle head. Arm.

  When processing an object to be processed by the automatic control processing machine, the processing table to which the object to be processed is fixed is moved by a predetermined amount in the horizontal direction (X-axis direction and Y-axis direction) by automatic control by a control unit. Accordingly, the workpiece is moved by a predetermined amount in the X-axis direction and the Y-axis direction, and the spindle head is moved in the vertical direction (Z-axis direction) by a predetermined amount in synchronization with the movement of the processing table in the horizontal direction. By moving, the processing tool is moved by a predetermined amount in the vertical direction, and the processing object is processed by the tool.

  When changing the machining tool used for machining, the ATC allows the machining tool attached to the spindle axis position of the spindle bed to be attached and detached, the removed machining tool to be stored in the tool magazine, and stored in the tool magazine. A machining tool to be used for machining is selected from a plurality of machining tools that have been selected, the selected machining tool is taken out from the tool magazine, and the taken machining tool is mounted on the tool spindle position. As a result, the processing tool is exchanged for the processing machine. The processing tool is attached to a holder portion whose size, shape, etc. are determined by a predetermined standard so that it can be attached and detached by ATC (see Patent Documents 1 and 2).

It is measured whether or not the shape or the like of the object to be processed has been processed to a predetermined value during the processing of the object to be processed or at the time of completion of the temporary processing.
Conventionally, in the measurement of a workpiece (when it is measured, it becomes a measurement subject), the workpiece is fixed to a machining table on a machining table, and the tool spindle position is contact-type. A touch sensor is mounted, the touch sensor is brought into contact with the surface of the workpiece, and the position coordinate value (X coordinate value, Y coordinate value) of the processing table and the position of the spindle head (Z coordinate value) at that time are read. The shape of the measurement object is measured by obtaining the three-dimensional coordinates of the measurement point.

Since measurement is performed using a contact-type touch sensor, scanning is intermittently performed on the surface of the measurement object, so that detailed measurement of the measurement object having an uneven shape is difficult. That is, the shape measurement on the scanning line is a limited intermittent point cloud measurement, and a direct three-dimensional shape measurement cannot be performed.
In addition, the touch sensor may be damaged due to contact with the measurement object or cutting powder, which may cause a problem in durability and may cause damage to the surface of the measurement object.
In addition, due to the structure of the touch sensor, it is necessary to always contact the measurement object from the same direction, so that there are restrictions on measurement, and high-speed measurement is difficult because high-speed contact is impossible.

In addition, the ATC cannot be used due to restrictions on electrical connection and mechanical connection related to vibration resistance, structural complexity, and utilities (electric system, air, etc.), so the touch sensor must be manually attached to and detached from the spindle head. Inevitably, there is a problem that the measurement work becomes complicated.
Further, when the measurement is performed according to the machining program of the NC machine, it is limited to measuring a difference (error) in the machining target value.

As a method for solving the above problems, a non-contact measurement system such as an optical measurement system that measures the shape or the like of a measurement object using measurement light such as a laser beam can be considered.
In the non-contact type measurement system, it is possible to solve the contact type problem as described above.
However, when a non-contact type measurement system is used together with a processing machine, there is a problem that a measurement error occurs due to an oil film formed on the surface of the measurement object because oil used at the time of processing adheres to the measurement object.

  FIG. 9 is a diagram for explaining how a measurement error occurs due to an oil film on the surface of the measurement object. In FIG. 9, an optical measuring device 91 that measures the distance, shape, and the like to a measurement object by a triangulation method includes a light source 92 that outputs measurement light such as a laser beam to the measurement object 94, and the measurement object. A light detection element 93 such as a PSD (Position Sensitive Detector) for detecting the measurement light reflected by 94 is provided. An oil film 95 is attached on the surface of the measurement object 94.

The position detected by the light detection element 93 is h1, the distance from the end of the optical measurement device 91 (position of the light receiving lens) to the light detection element 93 is s, the thickness of the oil film is t, and the actual measurement is performed. If the measurement error between the measured distance H1 is H1, the original distance (the distance from the position where the light projection lens of the optical measuring device 91 is disposed to the surface of the object to be measured) and the measured value H1, is To do.
δ = t (√ (s ² / (h 1 ² (n ² −1) + n ² s ² )) − 1) (1)

In this way, under the influence of the oil film thickness t and the refractive index between the air and the cutting oil, the scattered reflected light is measured with a shorter displacement (distance) than when there is no oil film. That is, the actual measurement value h1 is shorter than the original distance by the measurement error δ. The measurement error δ increases in proportion to the thickness of the oil film.
In order to suppress the measurement error δ, the influence of oil adhering to the measurement target 94 is reduced by wiping with a cloth or the like manually or degreasing.

In this case, the operation to remove the attached oil is not performed automatically, and it is difficult to wipe only the part to be measured, and the work time required is redundant, resulting in uneven oil film thickness and reducing measurement errors. In addition to being unable to do so, there are problems such as variations in measurement error.
In addition, the oil film is subjected to a viscosity force and an adhesive force depending on the temperature, and also has a surface tension and a pressure depending on the thickness and specific gravity of the oil film to form an adhesion force to the measurement object. It is difficult to increase the temperature to obtain fluidity and flow it because of the nature of the processing machine. Therefore, there is a problem that it is difficult to reduce measurement errors caused by the oil film.

Japanese Patent Laid-Open No. 10-80834 Japanese Patent Laid-Open No. 10-80834

  An object of the present invention is to suppress measurement errors caused by an oil film.

According to the present invention, a non-contact type measurement unit that is attached to an automatic control type processing machine and measures the shape of a measurement object, and a gas supply unit that supplies a gas flow to a measurement point of the measurement object by the measurement unit; There is provided a non-contact measurement system.
The non-contact type measuring means is attached to the automatic control type processing machine and measures the shape of the measuring object. The gas supply means supplies a gas flow to the measurement point of the measurement object by the measurement means, and when the oil film adheres to the measurement object, the oil film thickness is reduced by the gas flow, and the measurement error is reduced. The

In addition, according to the present invention, a measuring unit having a light source that is attached to the automatic control processing machine and irradiates the measuring object with the measuring light, and a light detecting unit that detects the measuring light from the measuring object, There is provided a non-contact type measurement system comprising gas supply means for supplying a gas flow to the optical axis position of the measurement light on the surface of the measurement object.
The gas supply means supplies a gas flow to the optical axis position of the measurement light on the surface of the measurement object. The measurement means irradiates measurement light from the light source to the measurement object, and the measurement light from the measurement object is detected by the light detection means.

Here, the gas supply means reduces the oil film thickness of the oil film adhering to the measurement object by supplying a predetermined air flow to the oil film surface adhering to the measurement object, and the light source is You may comprise so that the said measurement light may be irradiated to the area | region which supplied the said airflow.
Further, the measuring means has a holder portion that can be engaged with a tool mounting portion provided at a tool spindle position of the automatic control type processing machine, and is configured to be attached to and detached from the tool mounting portion. You may comprise as follows.

  According to the present invention, it is possible to suppress measurement errors caused by an oil film. Further, it is possible to easily attach and detach the measuring means to the tool spindle position of the automatic control type processing machine.

Hereinafter, a non-contact measurement system according to an embodiment of the present invention will be described with reference to the drawings. In addition, in each following figure, the same code | symbol is attached | subjected to the same part.
1 and 2 are a front view and a side view, respectively, showing the external appearance of the non-contact measurement system according to the embodiment of the present invention. The non-contact type measurement system is a system that performs measurement in a state where the measurement object does not contact the measurement device (non-contact state), and in this embodiment, NC (numerical value) control, which is a type of automatic control type processing machine. An example of an optical measurement system that uses an optical measurement device together with a mold processing machine is given. 3 and 4 are partially enlarged views of FIGS. 1 and 2, respectively.

1 to 4, the NC processing machine 1 is installed on a bed frame 14 as an installation unit. The bed frame 14 is a stationary system that does not move, and is a predetermined reference position.
An object to be measured (a workpiece: a workpiece to be processed at the time of machining, and a workpiece to be measured at the time of measurement) 4 is fixed by the fixture 3 while being placed on the upper surface of the movable measuring table 2 of the NC processing machine 1. . A spindle head 6 on which a processing tool (for example, a cutting tool) 5 for processing the measurement object 4 is mounted is disposed at a position separated from the measurement table 2.

  The spindle head 6 has a tool mounting portion 24 for mounting the tool 5 at a predetermined position (tool spindle position) passing through the tool spindle 19 that is an axis to which the tool 5 is mounted, and in the tool spindle 19 direction (Z-axis direction). The movement is controlled, whereby the tool 5 mounted on the tool mounting portion 24 is linearly moved in the direction of the tool spindle 19. Although not shown in detail, the spindle head 6 has a mechanism for feeding the machining tool 5 linearly in the Z-axis direction (vertical direction) and the tool 5 within a horizontal plane (a plane passing through the X-axis and the Y-axis). It has a mechanism that gives rotational motion. The tool spindle 19 serves as a rotation axis around which the machining tool 5 rotates. The optical axis of the measurement light is provided so as to pass along the tool spindle 19.

  The tool 5 can be manually attached to and removed from the spindle head 6. Further, the automatic tool changer (ATC) 7 uses the arm 17 under the control of the NC controller 9 to transfer the tool 5 from the tool magazine 8 which is a tool storage unit for storing the processing tool 5. A mechanism for taking out, attaching the tool 5 to the spindle head 6, attaching / detaching the tool 5 to / from the spindle head 6, and storing the tool 5 in the tool magazine 8 is provided. The tool 5 is automatically attached to and detached from the spindle head 6.

  A series of these controls related to machining such as cutting, such as movement control of the measurement table 2 in the X-axis and Y-axis directions, movement control of the spindle head 6 in the Z-axis direction, exchange control of the tool 5, etc. is NC control. This is performed by the apparatus 9 executing a machining program stored therein. Further, the NC control device 9 controls the movement of the measurement table 2 in the horizontal plane and the movement control of the spindle head 6 in the Z-axis direction when measuring the shape of the measurement object 4 and the processing error. Is also performed by executing a program stored therein. The NC control device 9 constitutes a control means.

As will be described later, the optical measuring instrument 18 configured to be stored in the tool magazine 8 has a holder portion that can be engaged with the machining tool mounting portion 24. 9 is configured so that it can be automatically attached to and detached from the tool mounting portion 24 of the spindle head 6 by the ATC 7 by executing the program.
The NC machine 1 also includes a cutting oil supply device 23 that supplies cutting oil having a lubrication function, a cooling function, a cleaning function, and the like suitable for the cutting work to the tool 5 and the measurement object 4 that are being used for the cutting work. The NC controller 9 controls the cutting oil supply device 23 by adjusting the amount of cutting oil supplied by the cutting oil supply device 23 by executing the NC program.

  The optical measuring instrument 18 is covered with a cover 12 to protect it from dust and the like. In order to protect the optical measuring instrument 18 from chips and the like in the cover 12, a shutter (for opening and closing the discharge port 13 is provided in a gas discharge port 13 provided at a position in the cover 12 that passes through the tool spindle 19. (Not shown) is provided. When the measurement is performed using the optical measuring instrument 18, the shutter is opened, and the gas flow for removing the oil film and the measurement light can pass therethrough.

  A gas supply device (in this embodiment, an air supply device) 10 as a gas supply means supplies a gas jet (in this embodiment, an air jet). The air supply device 10 includes an air regulator 20 that can adjust the pressure and flow rate of the supplied air. The air flow from the air supply device 10 is supplied from the region including the tool spindle 19 to the surface of the measurement object 4 directly below the tool spindle 19 via the tubes 21 and 22 and the discharge port 13 of the cover 12.

  FIG. 5 is a diagram showing a gas (air in the present embodiment) supply system in the optical measurement system according to the present embodiment. The air supply system includes an air supply device 10, a tube 21, a quick joint 58, a tube 22, and a variable throttle 59. The air supply device 10 includes an air regulator 20. The air regulator 20 includes an air compression motor 51, an air tank 52, a stop valve 53, a direction switching valve 54, a filter 55, a pressure adjustment valve (for example, a pressure reducing valve) 56, and a lubricator 57. The air supply device 10 is configured so that the pressure and flow rate of air supplied to the measurement object 4 can be adjusted by the air regulator 20 having the above-described configuration, whereby a predetermined gas flow is supplied to the measurement object 4. Is done.

The air supply device 10 can be controlled by the NC control device 9. In this case, the NC control device 9 executes the NC program to control the air regulator 20 of the air supply device 10 to control the pressure and flow rate of the air supplied by the air supply device.
The air supply device 10 supplies an air flow that is a kind of gas flow to the optical axis position of the measurement light on the surface of the measurement object 4. Thereby, the air supply apparatus 10 reduces the oil film thickness of the oil film adhering to the measuring object 4 by supplying a predetermined air flow to the oil film surface adhering to the measuring object 4.
The air supply device 10 can be used in combination with a chip removal air supply device. In this case, the oil film removal air flow bypasses the chip removal air flow supply circuit. It is possible to configure an air supply circuit for removal, thereby supplying an air flow for removing the oil film.

6 and 7 are a front view and a left side view, respectively, showing the configuration of the optical measuring instrument 18 which is an optical light measuring means and a non-contact measuring means.
The optical measuring instrument 18 includes a mounting part (holder part) 11 having a shape and dimensions conforming to the standard of the machining tool 5 and a surface (horizontal plane (X axis) that is integrally attached to the holder part 11 and orthogonal to the light source. And a direction changing mechanism 40 that constitutes a direction changing means for changing the direction in the vertical plane (plane passing through the Z axis) and the vertical plane (plane passing through the Z axis). 35 is held in a state in which the direction can be changed, and the direction of the optical measuring instrument main body 35 is changed by a built-in motor (not shown) according to the control of the control device 9.

The holder part 11 has a pull stud 31, a tapered (conical frustum-shaped) shank 30, a straight spindle 32 as a connecting part, and a groove part 41 provided in a circumferential shape, and these are integrated. It is.
The arm 17 of the ATC 7 has a pair of U-shaped portions as engaging portions at both ends thereof. By engaging the groove portion 41 and the U-shaped portion of the arm 17, the optical measuring instrument 18 is operated by the ATC 7. Hold and hold and remove.

The shank 30 has a shape that engages with a tool mounting hole (not shown) provided in the spindle head 6, and the holder portion 11 is attached to the spindle head 6 by the engagement.
The holder 11 can employ a known configuration that is used according to the standard of the tool 5.
The optical measuring instrument 18 is attached to the tool spindle 19 position of the spindle head 6 by inserting and holding the shank 30 of the holder part 11 in the tool attachment part 24 which is a tool attachment hole of the spindle head 6. The optical measuring instrument 18 is covered with a cover 12 for protection.

Since the configuration of the holder portion 11 (configured by the pull stud 31, the shank 30, the straight spindle 32, and the groove 41) that is the mounting portion of the optical measuring instrument 18 is configured to meet the standard of the tool 5, It can be handled in the same way as a tool and can be easily and automatically attached to the tool mounting portion of the spindle head 6 at the same mounting position as the tool.
The optical measuring instrument 18 is provided with positioning protrusions, and the spindle head 6 is provided with positioning holes into which the protrusions are inserted when the optical measuring instrument 18 is attached to the spindle head 6. The optical measuring instrument 18 can be securely attached to a predetermined position of the spindle head 6.

  The optical measuring instrument 18 can be manually attached to and detached from the spindle head 6, but when it is automatically performed, it is performed in the same manner as when the tool 5 is attached and detached by the ATC 7. That is, the ATC 7 controls the rotation of the arm 17 having a pair of U-shaped portions at both ends in the horizontal plane and the vertical movement control in the vertical direction, thereby taking out the optical measuring instrument 18 from the tool magazine 8 and the spindle. Mounting of the optical measuring instrument 18 at the position of the tool spindle 19 in the head 6 (for example, mounting of the spindle head 6 to the tool mounting portion), removal of the optical measuring instrument 18 from the spindle head 6, and attachment to the tool magazine 8 Storing.

The direction changing mechanism 40 includes a turning mechanism 33 having an encoder for measuring the rotation amount of the optical measurement device main body 35 in the horizontal plane A, and the rotation amount (tilt angle) of the optical measurement device main body 35 in the vertical plane B. ) Includes a tilt mechanism 34 having an encoder for measuring.
The tilt mechanism 34 is controlled by the turning mechanism 33 to change its direction in the horizontal plane A. In the tilt mechanism 34, an optical measuring device main body 35 as a light measuring unit is held by a pair of rotating shafts 38. The optical measuring instrument main body 35 includes a light source 36 that outputs measurement light to a measurement object and a light detection element 37 as a light detection means that detects the measurement light. That is, the optical measuring instrument 18 is attached to the NC processing machine 1 and has a light source 36 that irradiates the measuring object 4 with the measuring light and a light detection element 37 that detects the measuring light from the measuring object 4. is doing.

The light source 36 may be any light source that can output measurement light along the optical axis 15. For example, in addition to the semiconductor laser, other light emitting elements such as an infrared light emitting diode can be used. The light detection element 37 can be constituted by, for example, a PSD (Position Sensitive Detector), and a CCD (Charge Coupled Device) or the like can also be used.
The turning mechanism 33 rotates the optical measuring device main body 35 in the horizontal plane A by an angle corresponding to the control amount of the control device 9, and at least the direction of the light source 36 in the horizontal plane A by the angle corresponding to the control amount. Control to change. The tilt mechanism 34 rotates the optical measuring device main body 35 in the vertical plane by an angle corresponding to the control amount of the control device 9, and the orientation of at least the light source 36 in the vertical plane B by the angle corresponding to the control amount. Control to change.
The light source 36 irradiates measurement light to a region where the air supply device 10 supplies an air flow. As a result, the measurement light is irradiated to the region where the oil film thickness is reduced by the air flow supplied from the air supply device 10.

FIG. 8 is a circuit block diagram of the optical measuring device 60 including the optical measuring device main body 35.
FIG. 8 shows an example of a laser displacement meter that measures the distance, shape, and the like to the measurement object by the triangulation method as the optical measuring device 60. A light source 36 configured by a laser to output measurement light, a light detection element 37 as a light detection means, light emission control of the light source 36 and detection control of the light detection element 37 and connection to the control device 9 via an electric cable 39 The control unit 61 is provided. The light source 36 and the light detection element 37 are configured to be mounted on the optical measuring instrument 18, but the control unit 61 is not necessarily mounted in the optical measuring instrument 18, for example, separated from the processing machine 1. The controller 9, the light source 36, the light detection element 37, and the controller 61 may be configured to be installed in a predetermined fixed system and electrically connected by the electric cable 39.

  When the control unit 61 functions as a calculation unit, the control unit 61 receives the X coordinate value and the Y coordinate value representing the X coordinate and the Y coordinate of the current machining table 2 from the control device 9, and receives the received X of the machining table 2. Based on the measurement light (laser light) detected by the light detection element 37 obtained in synchronization with the X coordinate value and the Y coordinate value, the shape and the like of the measurement object 4 are calculated. That is, the control unit 61 calculates the height of the measurement point on the object 4 based on the measurement light detected by the light detection element 37, and the X coordinate value and the Y coordinate value of the measurement point are synchronized with each other. The X coordinate value and Y coordinate value of the processing table 2 received from the control device 9 are used. The controller 61 calculates the shape or the like of the measurement object 4 by repeating the above operation.

At this time, the control unit 61 as the calculating means moves the moving direction of the machining table 2 in one direction and detects it by the light detecting means synchronized with the X coordinate value and the Y coordinate value of the machining table. Based on the measured light, the cross-sectional shape between two points on the surface of the measurement object may be calculated.
Further, at this time, the control unit 61 as the calculating means moves the machining table in a plurality of directions in a polygonal line, and synchronizes with the X coordinate value and the Y coordinate value of the machining table of the automatic control processing machine. Based on the measurement light detected by the light detection means, a cross-sectional shape along a broken line configured by combining a plurality of cross-sections between two points on the surface of the measurement object may be calculated.

Further, when the control unit 61 functions as another calculation unit, the movement amount in the tool spindle 19 direction of the spindle head 6 that is the same as that at the time of machining synchronized with the X coordinate value and the Y coordinate value of the machining table 2 ( That is, the amount of movement of the spindle head 6 in the direction of the tool spindle 19 from the predetermined reference position or the amount of movement of the optical measuring instrument 18 in the direction of the tool spindle 19 from the predetermined reference position) and the light detection element 37. A processing error of the measurement object 4 is calculated based on the measurement light.
That is, the control unit 61 calculates the height of the measurement point on the object 4 based on the measurement light detected by the light detection element 37, and the tool axis direction of the spindle head 6 from the calculated height of the measurement point. By subtracting the amount of movement, the processing error of the measurement object 4 at this measurement point is calculated. If there is no machining error, the difference is zero. The X coordinate value and the Y coordinate value of the measurement point are the X coordinate value and the Y coordinate value of the processing table 2 received from the control device 9 in synchronization. The controller 61 calculates the processing error of the measurement object 4 by repeating the above operation.

  Further, when the control unit 61 further functions as another calculation unit, the control unit 61 receives the X coordinate value and the Y coordinate value representing the X coordinate and the Y coordinate of the current processing table 2 from the control device 9 and receives them. Based on the measurement light (laser light) detected by the light detection element 37 obtained in synchronization with the X coordinate value and the Y coordinate value of the processing table 2, the shape of the measurement object 4 and the like are calculated. That is, the control unit 61 calculates the height of the measurement point on the object 4 based on the measurement light detected by the light detection element 37, and the X coordinate value and the Y coordinate value of the measurement point are synchronized with each other. The X coordinate value and Y coordinate value of the processing table 2 received from the control device 9 are used. The controller 61 calculates the shape or the like of the measurement object 4 by repeating the above operation.

The operation of the optical measurement system configured as described above will be described in detail. In addition, since the operation | movement which processes the measuring object 4 using the processing tool 5 is well-known, description of operation | movement of a processing process is abbreviate | omitted, and the state which performed the predetermined processing using the optical measuring device 18 is carried out. An operation when measuring the shape and processing error of the measurement object 4 will be described.
Here, an example in which the light emission axis is perpendicularly incident on the measurement object 4 will be described, but the same applies to the case where the light is incident obliquely.

  When measuring the measuring object 4, the measuring object 4 is fixed to the table 2 in the state at the time of the machining operation. In this state, under the control of the NC controller 9, the ATC 7 uses the arm 17 to take out the optical measuring instrument 18 stored in the tool magazine 8 and attach it to the tool mounting hole of the spindle head 6. Thus, instead of the processing tool 5, the optical measuring instrument 18 is mounted at a predetermined position of the tool spindle 19 position (in this embodiment, the tool mounting portion of the spindle head 6). Thereafter, as shown in FIGS. 1 to 4, the cover 12 to which the air supply tubes 21 and 22 are attached is attached.

Next, the control device 9 controls the air supply device 10 to output a predetermined air flow having a predetermined pressure and a predetermined flow rate from the air supply device 10. The air flow 16 output from the air supply device 10 passes through the tubes 21 and 22 and is supplied from the region including the tool spindle 19 to the surface of the measurement object 4 immediately below the tool spindle 19.
As shown in FIG. 9, the film thickness of the oil film 81 attached on the surface of the measurement object 4 is reduced by the air flow 16. That is, in FIG. 9, the oil film on the surface of the measuring object 4 is reduced to the oil film thickness t1 by applying the air flow 16 of a predetermined pressure to the measuring object 4.

The light source 36 irradiates the measurement light onto a region where the oil film thickness of the measurement target 4 is reduced (a region on the tool spindle 19 in the measurement target 4). The light detection element 37 detects the measurement light reflected by the measurement object 4. The control unit 61 calculates the height of the measurement point on the measurement object 4, the shape of the measurement object 4, and the like based on the measurement light detected by the light detection element 37.
In a state where the spindle head 6 of the NC machine 1 is fixed at a predetermined position in the Z-axis direction (in other words, the light source 36 of the optical measuring instrument 18 is held at a predetermined Z-axis coordinate position on the tool spindle 19). By controlling the movement of the machining table 2 in the same direction (X-axis direction and Y-axis direction) as during machining by the same control program as during machining, the measurement object 4 during machining is the same as during machining. By measuring while moving, the three-dimensional shape of the measuring object 4 can be measured.

In this case, the current X coordinate value and Y coordinate value of the table 2 are supplied from the control device 9 to the optical measurement device 60. The optical measurement device 60 outputs measurement laser light from the light source 36 in synchronization with the movement control of the table 2 by the control device 9, and the measurement light reflected by the measurement object 4 is detected by the light detection element 37. Then, the shape of the measurement object 4 is calculated by the control unit 61.
The operation at this time will be described in more detail. The measurement light emitted from the light source 36 of the optical measurement device 60 travels along the main axis 19 and reaches the measurement object 4.

The optical measuring device 18 is attached to the main shaft 19 of the main shaft head 6 of the NC processing machine 1 by the ATC 7, and the optical axis of the output light of the light source 36 coincides with the main shaft 19 of the NC processing machine 1.
Therefore, the measurement light emitted from the optical measuring instrument 18 travels so that its optical axis coincides with the main axis 19 of the NC processing machine 1 and is irradiated onto the measurement object 4. The measurement light reflected by the measurement object 4 is detected by the light detection element 37 of the optical measuring instrument 37.

  The control unit 61 of the optical measurement device 60 applies the measurement light detected by the light detection element 37 obtained in synchronization with the X coordinate value and the Y coordinate value of the processing table 2 that changes as needed by the movement control of the control device 9. Based on this, the shape of the measuring object 4 is calculated. That is, the X coordinate value, the Y coordinate value (coordinate value supplied from the control device 9), and the predetermined Z coordinate (the bed frame 14 in this embodiment) of the measurement point measured by the optical measurement device 60 are used as a reference. Based on the Z coordinate value of the surface of the measuring object 4 measured by the optical measuring device 60, the shape of the measuring object 4 is calculated, and the calculated result is displayed on a display device (not shown). .

  When measuring the cross-sectional shape between two points on the surface of the measuring object, the control device 9 moves the machining table 2 to the X axis while the spindle head 6 of the NC machine 1 is fixed at a predetermined Z axis coordinate position. While controlling movement in one direction such as the direction and the Y-axis direction, the optical measuring device 60 scans the measuring object 4 with the measuring light in synchronization with this. Thereby, the cross-sectional shape of the DUT 4 cut by the scanning line in one direction is measured.

  Moreover, when measuring the cross-sectional shape along the broken line formed by combining a plurality of cross-sections between two points on the surface of the measurement object, the spindle head 6 of the NC processing machine 1 is fixed to a predetermined Z-axis coordinate position. The control device 9 controls the movement of the machining table 2 in one direction such as the X-axis direction and the Y-axis direction, and then controls the movement of the machining table 2 in a broken line by controlling the movement in the other direction. In synchronization with this, the optical measuring device 60 scans the measuring object 4 with the measuring light. As a result, the control unit 61 determines 2 on the surface of the measurement object 4 based on the measurement light detected by the light detection element 37 synchronized with the X coordinate value and the Y coordinate value of the machining table 2 of the NC machine 1. A cross-sectional shape along a broken line configured by combining a plurality of cross-sections between points is calculated.

  Further, when measuring the machining error of the measuring object 4, the control device 9 performs movement control of the machining table 2 and the spindle head 6 in the same manner as during machining, and in synchronization with this, the optical measuring device 60 Based on the movement amount of the spindle head 6 and the measurement light detected by the light detection element 37, which are the same as those at the time of machining synchronized with the X coordinate value and the Y coordinate value of the machining table 2, the machining error of the measurement object 4 is calculated. calculate.

  That is, the control device 9 controls the movement of the machining table 2 in the same direction as that during machining, and controls the movement of the spindle head 6 to the same position in the Z-axis direction as in the machining. The control unit 61 of the optical measurement device 60 is based on the measurement light detected by the light detection element 37 obtained in synchronization with the X coordinate value and the Y coordinate value of the processing table 2 that is changed by movement control of the control device 9. Then, the distance to each measurement point of the measuring object 4 is measured, and a machining error is calculated based on the distance and the amount of movement of the spindle head 6 in the direction of the spindle 19.

In this way, the table 2 and the spindle head 6 move in the same manner as in machining during measurement, so that it is possible to directly calculate the machining error amount at each measurement point.
During the measurement, the machining table 2 and the spindle head 6 are controlled to move in the same manner as during machining, while the control unit 61 of the optical measuring device 60 changes at any time according to the movement control of the control device 9. The shape of the measurement object 4 may be calculated based on the measurement light detected by the light detection element 37 obtained in synchronization with the X coordinate value and the Y coordinate value.

Thereby, it becomes possible to measure the shape and processing error of the measuring object 4 by a series of movement control operations by the control device 9.
The control device 9 reflects the error amount as a correction amount in the machining program executed by the control device 9 during machining, and corrects and executes the program. Thereby, the control device 9 performs machining control so as to correct the movement amounts of the machining table 2 and the spindle head 6 so that machining errors are reduced when machining the measurement object 4.
After the measurement, when the air flow supply from the air supply device 10 is stopped, the cutting oil is not wiped off, so the cutting oil returns to the measurement point with time, and the film thickness of the oil film is leveled. .

In this way, by reducing the oil film thickness in the region including the irradiation point by appropriately supplying the air flow to the region including the irradiation point of the measurement light, it is possible to reduce a decrease in measurement accuracy. .
In addition, when an oil film is present, the displacement (distance) to the measurement object 4 is measured to be shorter than the true distance, but the oil film is reduced in thickness, and closer to the true value. Measurement error is reduced.
In addition, it is possible to suppress a decrease in measurement accuracy, and since there is no generation of filth because it is not wiped off, it can be performed automatically, thereby reducing the burden on the operator.

Further, since it is possible to measure the shape or the like of the measurement object by non-contact continuous scanning, there is no risk of damage, and three-dimensional measurement of the uneven measurement object 4 can be performed directly. The cross-sectional shape measurement on the scanning line, the cross-sectional shape measurement on an arbitrary line between two points, and the cross-sectional shape measurement along the broken line can be performed.
Further, at the time of measurement, the NC machine 1 is operated using the same program as the machining program, the difference (error) from the machining target value is measured, and the result is used as a correction machining program to reduce machining errors. In addition to being able to be used to correct the machining program, it is possible to perform best fitting that minimizes the total sum of differences between CAD data and measurement data.

In addition, the optical measuring instrument 18 is configured to be automatically controlled by the ATC 7 so that it can be stored in the tool magazine 8, removed from the tool magazine 8, and conveyed, and the tool spindle 19 of the spindle head 6 in the NC processing machine 1. The optical measuring instrument 18 can be easily attached to and detached from the position of the main shaft 19 because the optical measuring instrument 18 can be attached to and detached from the position.
In addition, without removing the measuring object 4 from the NC processing machine 1, it is possible to measure the three-dimensional shape, arbitrary cross-sectional shape, etc. of the measuring object 4 without any interference with the measuring object 4 without contact. Become.

In each of the above-described embodiments, the NC processing machine 1 cited as an automatically controlled processing machine may be various NC processing machines such as an NC milling machine, a machining center, an NC lathe, and an NC electric discharge machine, regardless of whether they are vertical or horizontal. Is included.
The scanning range at the time of measurement can be a method according to the NC machining program, a method of specifying an area by the program, a method of specifying an area by teaching, or a method of specifying an oblique incident area for detecting a special edge.

The optical measuring instrument 18 is separately attached to a tool presetter and adjusted so that the main axis of the optical measuring instrument 18 itself and the optical axis of the light source 36 are aligned with each other. 1 may be adjusted so that its spindle coincides with the tool spindle 19.
Moreover, although it can apply to the measurement of the measuring object to which an oil film adheres, the optical measuring device 18 and the gas flow supply tubes 21 and 22 do not necessarily have to be attached to the NC processing machine 1, and are located away from the machine tool 1. You may comprise so that it may arrange | position and measure.
In addition, as an example of the embodiment, an optical measuring instrument using a laser beam or the like has been transferred, but non-contact measurement such as an optical measuring system using an optical measuring instrument using a camera or the like. The system can be applied to non-contact measurement systems using ultrasonic waves and the like.

  The present invention can be applied to non-contact type measurement systems that use non-contact type measuring means together with various automatic control processing machines such as an NC milling machine, a machining center, an NC lathe, and an NC electric discharge machine.

It is a front view which shows the external appearance of the optical measuring system which concerns on embodiment of this invention. It is a side view which shows the external appearance of the optical measuring system which concerns on embodiment of this invention. It is the elements on larger scale of FIG. FIG. 3 is a partially enlarged view of FIG. 2. It is a figure which shows the gas supply system | strain in embodiment of this invention. It is a front view of the optical measuring device used for embodiment of this invention. It is a left view of the optical measuring device used for embodiment of this invention. It is a block diagram of the optical measuring device used for embodiment of this invention. It is operation | movement explanatory drawing of the optical measuring system which concerns on embodiment of this invention. It is operation | movement explanatory drawing of the conventional optical measurement system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... NC processing machine as an automatic control type processing machine 2 ... Measurement table 3 ... Fixing tool 4 ... Measurement object 5 ... Processing tool 6 ... Spindle head 7 ... ATC
DESCRIPTION OF SYMBOLS 8 ... Tool magazine 9 ... NC control apparatus 10 as a control means ... Air supply apparatus 11 as a gas supply means ... Holder part 12 ... Cover 13 ... Gas discharge port 14 ... The bed frame 15 ... the optical axis 16 ... the air flow 17 as the gas flow ... the arm 18 ... the optical measuring device 19 which is an optical light measuring means and a non-contact type measuring means .... Tool spindle 20 ... Air conditioners 21, 22 ... Tube 23 ... Cutting oil supply device 24 ... Cutting tool mounting part 30 ... Shank 31 ... Pull stud 32 ... Straight spindle 33 ... turning mechanism 34 constituting direction changing mechanism ... tilt mechanism 35 constituting direction changing mechanism ... optical measuring device main body 36 ... light source 37 ... light as light detecting means Detection element 38... Rotating shaft 3 ... Electric cable 40 ... Direction changing mechanism 41 ... Groove 51 as an engaging part ... Air compression motor 52 ... Air tank 53 ... Stop valve 54 ... Switching valve 55 .. Filter 56... Pressure regulating valve 57... Lubricator 58... Quick joint 59. Variable aperture 60 .. Optical measuring device 61.

Claims (4)

  A non-contact type measuring means attached to the automatic control type processing machine for measuring the shape of the measuring object, and a gas supply means for supplying a gas flow to a measuring point of the measuring object by the measuring means. Characteristic non-contact measurement system. A measuring means attached to the automatic control type processing machine and having a light source for irradiating the measuring object with the measuring light and a light detecting means for detecting the measuring light from the measuring object;
A non-contact type measurement system comprising gas supply means for supplying a gas flow to an optical axis position of the measurement light on the surface of the measurement object. The gas supply means reduces the oil film thickness of the oil film adhering to the measurement object by supplying a predetermined air flow to the oil film surface adhering to the measurement object;
The non-contact measurement system according to claim 2, wherein the light source irradiates the measurement light to a region to which the air flow is supplied.   The measuring means has a holder portion that can be engaged with a tool mounting portion provided at a tool spindle position of the automatic control processing machine, and is configured to be attached to and detached from the tool mounting portion. The non-contact type measurement system according to claim 1, wherein the measurement system is a non-contact type measurement system.

Images