JP2006315915A5 - - Google Patents

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Publication number
JP2006315915A5
JP2006315915A5 JP2005141202A JP2005141202A JP2006315915A5 JP 2006315915 A5 JP2006315915 A5 JP 2006315915A5 JP 2005141202 A JP2005141202 A JP 2005141202A JP 2005141202 A JP2005141202 A JP 2005141202A JP 2006315915 A5 JP2006315915 A5 JP 2006315915A5
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JP
Japan
Prior art keywords
optical member
fluoride
member according
value
center
Prior art date
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Pending
Application number
JP2005141202A
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Japanese (ja)
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JP2006315915A (en
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Priority to JP2005141202A priority Critical patent/JP2006315915A/en
Priority claimed from JP2005141202A external-priority patent/JP2006315915A/en
Publication of JP2006315915A publication Critical patent/JP2006315915A/en
Publication of JP2006315915A5 publication Critical patent/JP2006315915A5/ja
Pending legal-status Critical Current

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Claims (7)

円盤状の結晶性光学部材であって、
前記結晶性光学部材の上面及び底面において、少なくとも中心、外周部及びその中間の３点におけるアルカリ土類金属不純物濃度の最大値及び最小値をＣ1，Ｃ2としたとき、Ｃ1／Ｃ2の値が１．０５以下であることを特徴とする光学部材。 A disk-shaped crystalline optical member,
In the upper surface and bottom surface of the crystalline optical member, at least the center, when the maximum value and the minimum value of the alkaline earth metal impurity concentration in the outer peripheral portion and the three-point of the intermediate was C 1, C 2, C 1 / An optical member having a C 2 value of 1.05 or less. 前記少なくとも中心、外周部及びその中間の３点を、中心から複数の放射方向線上にとり、全ての点におけるアルカリ土類金属不純物濃度の最大値及び最小値をＣ1，Ｃ2としたとき、Ｃ1／Ｃ2の値が１．０５以下であることを特徴とする請求項１に記載の光学部材。 When at least the center, the outer periphery, and the middle three points are taken on a plurality of radial lines from the center, and the maximum and minimum values of the alkaline earth metal impurity concentration at all points are C 1 and C 2 , C The optical member according to claim 1, wherein the value of 1 / C 2 is 1.05 or less. 前記結晶性光学部材は、フッ化物であることを特徴とする請求項１又は２に記載の光学部材。 The crystalline optical member, the optical member according to claim 1 or 2, characterized in that a fluoride. 前記フッ化物は、フッ化カルシウム、フッ化リチウム、フッ化マグネシウム、又はフッ化バリウムであることを特徴とする請求項３に記載の光学部材。 The optical member according to claim 3 , wherein the fluoride is calcium fluoride, lithium fluoride, magnesium fluoride, or barium fluoride. 請求項３に記載の光学部材の製造方法であって、
原料のフッ化物にスカベンジャを添加して、融解、凝固させて前処理を行う工程と、
前記工程により前処理された原料を種結晶にして、坩堝引き下げ法によりフッ化物単結晶を成長させる工程と、
を有し、前記フッ化物単結晶を成長させる工程における、坩堝外壁の坩堝引き下げ方向の温度勾配を１０℃／ｃｍ以下にすることを特徴とする光学部材の製造方法。 It is a manufacturing method of the optical member according to claim 3 ,
Raw material fluoride by adding scavenger, and performing melt, preprocessing solidifying,
Using the raw material pretreated by the above step as a seed crystal and growing a fluoride single crystal by a crucible pulling method ;
And a temperature gradient in the crucible pulling direction of the outer wall of the crucible in the step of growing the fluoride single crystal is 10 ° C./cm or less. 請求項１ないし４のいずれか１項に記載の光学部材を用いたことを特徴とする光学装置。 Optical apparatus characterized by using an optical member according to any one of claims 1 to 4. 請求項１ないし４のいずれか１項に記載の光学部材を用い、エキシマレーザを光源としたことを特徴とする半導体露光装置。 Using an optical member according to any one of claims 1 to 4, a semiconductor exposure apparatus is characterized in that the excimer laser as a light source.
JP2005141202A 2005-05-13 2005-05-13 Optical component Pending JP2006315915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005141202A JP2006315915A (en) 2005-05-13 2005-05-13 Optical component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005141202A JP2006315915A (en) 2005-05-13 2005-05-13 Optical component

Publications (2)

Publication Number Publication Date
JP2006315915A JP2006315915A (en) 2006-11-24
JP2006315915A5 true JP2006315915A5 (en) 2008-06-26

Family

ID=37536910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005141202A Pending JP2006315915A (en) 2005-05-13 2005-05-13 Optical component

Country Status (1)

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JP (1) JP2006315915A (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10203899A (en) * 1997-01-23 1998-08-04 Nikon Corp Fluorite little in alkaline earth metal impurities and its production
JPH10281992A (en) * 1997-04-02 1998-10-23 Nikon Corp Method of measuring component concentration distribution and light transmissivity distribution thereof of optical material
JP2000119097A (en) * 1998-10-14 2000-04-25 Nikon Corp Production of calcium fluoride crystal, and lens
JP2002286913A (en) * 2001-03-27 2002-10-03 Nikon Corp Method for acquiring optical member, optical member and projection exposure device
JP2003238292A (en) * 2002-02-14 2003-08-27 Canon Inc Method of manufacturing fluorite crystal
JP2004224645A (en) * 2003-01-23 2004-08-12 Kobe Steel Ltd Manufacture method of high-purity fluoride single crystal
EP1475464A1 (en) * 2003-05-06 2004-11-10 Corning Incorporated Method for producing an optical fluoride crystal

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