JP2006300956A - Liquid leakage sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid leakage sensor, installed on a floor or in the lowermost part of a system, such as a liquid leakage receiving section, and enables easy identification of the location at which a liquid leakage occurs, if a liquid leakage abnormality occurs. <P>SOLUTION: The liquid leakage sensor is installed in an inner space of the liquid leakage receiving section and is provided with an alarm means including a sound means, having a resonator within a space range containing at least one of the inner space of the liquid leakage receiving section and/or an upper space of the liquid leakage receiving section, relative to an installation location of the liquid leakage sensor. If the liquid leakage sensor senses a sensor abnormality, the sound means, having at least the resonator distinguishes the liquid leakage sensors within and outside the space range, and the resonator amplifies the audible frequency tone outputted from the sound means so as to identify the installation location of the liquid leakage sensor and alarms a sensor abnormality detection in the liquid leakage sensor. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention is a liquid leakage detector for detecting leakage of electrically conductive liquids such as water, acidic solutions, alkaline solutions, and insulating liquids such as ultrapure water, organic solutions such as alcohol, thinner, and benzine. It relates to the improvement of the sensor.

  Conventional equipment such as factories supplies liquids by piping. However, since pipes are provided with connecting joints at many locations, liquid often leaks from the joints. Therefore, depending on the type of liquid, humans had to constantly monitor for leakage. As such a conventional liquid leakage sensor, there is a conductive type liquid leakage sensor that detects a change in impedance between the electrodes, or a liquid amount measurement system that measures whether or not a predetermined volume of liquid has been supplied. A liquid leakage sensor is known. Further, Patent Document 1 discloses that a filter that becomes transparent when leaking liquid is irradiated with light from a light transmitting part (light source), and when the liquid leaks, the amount of light received or reflected from the filter is measured. An optical liquid leakage sensor technique is described in which leakage can be reliably detected by detecting the amount of change. In such a conventional liquid leakage sensor, in general, when a liquid leakage detection abnormality in which a liquid leakage is detected or a sensor installation abnormality in which the sensor is not installed in a predetermined spatial position is detected, the abnormal status information such as an LED is displayed. Alarms are displayed on the display means and digitally output to the outside by contact signals or the like.

  On the other hand, in Patent Document 2, desired information such as inter-electrode impedance of a plurality of liquid leakage sensors is communicated between the slave unit and the master unit, and after the arithmetic processing is performed on the master unit side or as it is, the display unit on the master unit side The liquid leakage monitoring device to be displayed is introduced. In Patent Document 2, when it is determined that an abnormality such as a liquid leakage has occurred, an alarm display such as the liquid leakage is displayed on the video and / or recording means. In addition, sound such as a buzzer is displayed.

By the way, (A) As a cleaning agent / solvent, for example, in the case of detecting a liquid leakage having a low surface tension of 6 × 10 ⁻² N / m or less at 20 ° C., in particular, chlorine or bromine In the case of detecting a liquid leakage 2a having a low surface tension, such as low molecular weight chlorofluorocarbons (CFCs) and halon, which do not contain benzene, and a surface tension of 3 × 10 ⁻² N / m or less at 20 ° C. Leaks while forming a very thin layer, for example, as shown in FIG. 6 (B), the thickness d1 of such a leak layer diffuses uniformly and quickly into a thin film layer of 0.5 mm or less. At the same time, since it easily penetrates into the gaps of 0.1 mm or less, the gap d2 (<d1) between the holder of the case housing the leak sensor main body and the floor surface first. Leakage penetrates (Fig. 6 (C)) and the top of the holder In takes a long time to leakage is diffused, as a result, may not be at all is a small amount of liquid leakage detection, is a problem that delayed the detection of the leakage has occurred.

  (B) Conventionally, a plurality of leak sensors are wired-or-calculated for a plurality of leak sensors, and alarms are output from a sequencer, master unit, etc. in a batch for each predetermined group. Therefore, when a leak detection abnormality alarm is output, the actual location of the leak detected by the installed sensor cannot be immediately identified from the maintenance side of the system such as the plant. In general, the point and the leak sensor are installed at the bottom of the system such as the floor surface and the leak storage pan, etc. In general, when a liquid leakage abnormality occurs in a light emitting type alarm display means such as an LED attached to the liquid leakage sensor itself, it is very difficult to visually recognize and it is difficult to easily identify the location of the liquid leakage occurrence. There was also a point.

(C) Furthermore, in the leak detection system disclosed in Patent Document 2 and the like, in general, the person who installs the leak sensor and the person who maintains and manages the system such as the plant are completely unrelated, and the leak sensor Since it is required for a person who installs a large number of liquid leakage sensors to be accurately placed in a predetermined position in a short time, as a theory on the desk, the sensor installation position is one in the monitoring device. Even if it is possible to request the operation of registering one by one, it is impossible for one worker to actually register and confirm more than 40 sensors without wiring errors. In the system construction work, if the installation work is performed by a plurality of workers, the purchase cost of the device will be unnecessarily increased, and it will not be practical at all from the actual installation worker of the leak sensor. It was a technology.
Further, in the technique of Patent Document 2, since the system configuration is such that the calculation is performed on the base unit side or displayed as it is on the display unit on the base unit side, if the master unit fails, the liquid leakage sensor is normally leaked. However, there is also a problem that no alarm for abnormal detection of liquid leakage can be output.

  Furthermore, in the technique of Patent Document 2, since the leak notification is made by the voice message by the alarm means on the master unit side after the arithmetic processing on the master unit side or as it is, the location where the leak occurred is the content of the voice message. It must be included, and for those who maintain and manage systems such as plants, the location information of the location where the leak occurred actually corresponds to the spatial location of the sound, and the sound location information is accurately heard and understood. If you are not a person who can do it, it is impossible to specify the exact location information of the location of the leak, especially in the temporary / employee / workplace / site environment where the leak sensor is installed. The problem is that the alarm system is completely useless for new operators and operators with insufficient memory / learning ability. There was.

  (D) When the leak sensor and the alarm means are integrally formed, the leak sensor is generally installed in a lower installation space close to the floor surface and interferes with the operator's passage space. Since it is easy, the height of the entire sensor from the floor is preferably as low as possible.

Japanese Examined Patent Publication No. 4-70572 JP 2002-350275 A

Therefore, the present invention has been made in view of the circumstances as described above, and the object of the present invention is to provide a small amount of liquid having a low surface tension of 6 × 10 ⁻² N / m or less at 20 ° C. An object of the present invention is to provide a liquid leakage sensor that can detect liquid leakage at high speed.

  In addition, the object of the present invention is that, even when a plurality of leak sensors are integrated into a control system for each predetermined group, if a leak detection abnormality alarm is output, where It is also possible to provide a leak sensor that can accurately and easily identify the location / location of the occurrence of leak on the maintenance side of a system such as a plant, whether the leak sensor that has been installed is activated and detected. .

  Furthermore, an object of the present invention is to install a plurality of leak sensors in a control system in a batch for each predetermined group, even for one worker, a large number of leak sensors in a short time, Another object of the present invention is to provide a liquid leakage sensor and a liquid leakage detection system that can be accurately installed at predetermined positions. Even if the control system breaks down or there is no master unit, if the leak sensor detects a leak correctly, it will certainly output a leak detection abnormality alarm, Another object of the present invention is to provide a liquid leakage sensor that can accurately and easily identify the spatial position / location of occurrence of liquid leakage.

The present invention uses at least one liquid leakage sensor including at least one liquid leakage detection unit that can come into contact with the liquid leakage through a gas layer or liquid leakage infiltration layer through which liquid leakage can permeate. Regarding the detection system, the object of the present invention is to
An alarm means including a sounding means is provided within a predetermined space range with respect to the installation position of the leak sensor, and when a sensor abnormality of the leak sensor is detected, at least the sounding means can This is achieved by warning the sensor abnormality detection of the leak sensor with an audible frequency tone so that the leak sensor can be identified by distinguishing it from the leak sensor installed outside.

In addition, the present invention is coupled to at least one reflection boundary surface that can come into contact with the liquid leakage, a light projecting unit, a light receiving unit, and a gas layer or a liquid permeation layer through which the liquid leakage can permeate. The liquid leakage sensor comprising the control means also relates to the above object of the present invention.
The light projecting unit and the light receiving unit are housed and integrated in a case whose bottom is made of a transparent or translucent material, or
The light projecting part and the light receiving part are housed and integrated in a case having a bottom made of a transparent material or a semi-transparent material, and the surface of the installation location such as the floor of the liquid leakage sensor or the surface color is attached to the tip of the case. And a case holder that prevents the case from falling over,
An abnormality detection means of the liquid leakage sensor, and an alarm means including a sound generation means,
When a sensor abnormality is detected by the abnormality detection means, it is also achieved by at least alarming the abnormality detection by an audible frequency tone by the sound generation means.
The present invention also relates to a leak sensor.
The liquid leakage sensor is installed in the internal space of the liquid leakage storage unit, and the internal space of the liquid leakage storage unit and / or the liquid leakage storage unit with respect to the installation position of the liquid leakage sensor An alarm means including a sound generation means having a resonator is provided within a spatial range including at least one of the upper spaces,
When the liquid leakage sensor detects a sensor abnormality, the sound sensor having at least the resonator can distinguish the liquid leakage sensor installed outside the space range and specify the installation position of the liquid leakage sensor. Further, a sensor abnormality detection of the liquid leakage sensor is alarmed by amplifying an audible frequency output sound output from the sound generation means by the resonator.

  According to the leak detection system of the present invention, an alarm means including a sounding means is provided within a predetermined space range with respect to the installation position of the leak sensor, and the leak sensor detects a sensor abnormality of the leak sensor. If detected, at least the sound generation means distinguishes the leak sensor from the other leak sensor installation locations installed outside the predetermined space range, so that the leak sensor can be specified. Because it is possible to alert / report an abnormal sensor detection to an operator or the like with an audible frequency tone, when a plurality of leak sensors are installed in a control system for each predetermined group, Even an operator can install a large number of liquid leakage sensors accurately at predetermined positions in a short time and check the installation state by one person one by one like a conventional sensor. Do n’t peek and check Are feasible, it can greatly improve the reliability of the leak detection system.

  Moreover, in the liquid leakage sensor and the liquid leakage detection system of the present invention, the master unit of the system is unnecessary, and even if the system repeater or the like breaks down, if the liquid leakage sensor can be operated independently, it is normal. It is possible to detect a leak condition and alarm with an audible tone, and when the leak sensor detects such a leak condition, the leak detection alarm is reliably installed outside the specified space range. It is possible to alert / notify the operator, etc. with an audible frequency tone so that the installation position of the leak sensor can be identified separately from the other leak sensor installation locations. When maintaining a liquid detection system, even in a maintenance environment where confusion / misperception is likely to occur, such as a semiconductor manufacturing process in which multiple sensors with the same function are arranged in parallel, the accurate location / discovery of the location where a liquid leak occurs is an alarm. Rely on dial tone This is possible by simply approaching the sensor, and even without special training such as learning the location map of the leak sensor, it is very easy for the person in charge of the maintenance to easily leak without confusion with other sensors. The location where the liquid is generated can be identified / identified, which is very useful.

Furthermore, in the liquid leakage sensor and the liquid leakage detection system of the present invention, insulating properties such as liquids having electrical continuity such as water, acidic solutions, alkaline solutions, and organic solutions such as ultrapure water, alcohol, thinner, benzine, etc. A liquid having a low surface tension of 20 × 10 ⁻² N / m or less at 20 ° C., particularly 3 × 10 ^{− Even} a thin layered liquid having a low surface tension of ² N / m or less, that is, a minute amount of liquid leakage can be detected at high speed.

In the liquid leakage detection system of the present invention, at least one liquid leakage sensor comprising at least one liquid leakage detection unit that can come into contact with the liquid leakage through a gas layer or a liquid leakage infiltration layer through which liquid leakage can permeate. It is configured to use one,
An alarm means including a sounding means is provided within a predetermined space range with respect to the installation position of the leak sensor, and when a sensor abnormality of the leak sensor is detected, at least the sounding means can While distinguishing from the leak sensor installed outside, so that the installation position of the leak sensor can be specified, the sensor abnormality detection of the leak sensor is warned with an audible tone,
Preferably, the alarm means can be used in common by a single or a plurality of liquid leakage sensors installed inside the predetermined space range, and the warning light of the alarm means can be easily visually confirmed. It is more preferable that it is installed at the position.

  Thus, in the leak sensor used in the leak detection system of the present invention, the leak sensor and the alarm means including the sound generation means may be formed integrally and / or the leak sensor and the sound generation. The alarm means including the means may be installed separately, and the leak sensor and the alarm means including the sound generation means may be connected to each other by wire and / or wireless.

  In the system configuration in which the leak sensor and the alarm means including the sounding means are integrally formed, the alarm means is also integrally fixed at the position where the leak sensor is installed. It is not necessary at all, system construction is very easy, connection confirmation work is easy, maintenance and monitoring work of such system is also very intuitive, it is possible to provide a system that is easy to understand .

  Further, in the system configuration in which the liquid leakage sensor and the alarm means including the sound generation means are separately installed and the liquid leakage sensor and the alarm means including the sound generation means are connected to each other by wire, such a separation is provided. The alarm means can be installed at a position with good visibility in the upper space of the system, and there is an advantage that anyone can easily perform system adjustment work and maintenance / management work.

  Further, in the system configuration in which the liquid leakage sensor and the alarm means including the sounding means are separately installed and the liquid leakage sensor and the alarm means including the sounding means are connected to each other wirelessly, such a separation is provided. The alarm means can be installed at a position with good visibility in the upper space of the system, and an alarm means with an explosion-proof structure can be provided. Leakage detection and / or alarm of volatile liquid and flammable liquid The monitoring process can be performed very safely and reliably, and there is an advantage that anyone can easily perform system adjustment work and maintenance / management work without learning a special sensor arrangement map.

Furthermore, in one example of the liquid leakage sensor of the present invention, at least one reflective boundary surface that can come into contact with the liquid leakage through a gas layer or a liquid leakage infiltration layer through which liquid leakage can penetrate, a light projecting unit, A liquid leakage sensor comprising a light receiving unit and control means coupled thereto can be used,
The light projecting unit and the light receiving unit are housed and integrated in a case whose bottom is made of a transparent or translucent material, or
The light projecting part and the light receiving part are housed and integrated in a case having a bottom made of a transparent material or a semi-transparent material, and the surface of the installation location such as the floor of the liquid leakage sensor or the surface color is attached to the tip of the case. And a case holder that prevents the case from falling over,
It is possible to identify the location of the leak sensor by distinguishing the leak detection means and the alarm means including the sound generation means from other leak sensor locations installed outside the predetermined space range. As such, the sensor abnormality detection of the leak sensor is warned with an audible frequency tone,
It is preferable that the alarm means can be used singly or in common by a single or a plurality of liquid leakage sensors installed inside the predetermined space range, and further, a spatial position where the alarm means can be easily visually confirmed. It is more preferable that it is installed.

Hereinafter, a liquid leakage sensor and a liquid leakage detection system according to the present invention will be described with reference to the drawings.
FIG. 1 is a block diagram showing one mechanical configuration example when the liquid leakage detection system 1a of the present invention is applied to a coating and developing apparatus.
FIG. 2 shows an example of a configuration in which the leak detection unit (leak sensor unit) is integrally formed with a leak sensor 20a and an alarm unit 70a including a sound generation unit.
FIG. 2A is a plan view showing the structure of the leak sensor 20a of the present invention.
FIG. 2B is a cross-sectional view taken along line 2B-2B.
FIG. 2C is a side view thereof.
FIG. 3A is a longitudinal sectional view taken along line 3A-3A.
FIG. 3B is an enlarged view of FIG.
FIG. 3C is a cross-sectional view taken along 3C-3C.
FIG. 4A is a plan view of the holder 5 of the present invention.
FIG. 4B is a central cross-sectional view thereof.
FIG. 4C is a plan view of the thin paper 8 having the cutting portion 8d.
FIG. 5 is an enlarged cross-sectional view showing the operating principle of the high-speed liquid leakage drawing means 6 of the present invention.
FIG. 6 is a block diagram showing one configuration example of signal processing of the leak sensor 20a of the present invention.
FIG. 7 is a block diagram showing one mechanical configuration example of the explosion-proof leakage detection system 1b of the present invention.
FIG. 8 shows an example of a configuration in which the leak detection unit (leak sensor unit) is separated from the leak sensor 20b and the alarm unit 70b including a sound generation unit.
FIG. 9 is a block diagram showing one configuration example of signal processing of the explosion-proof alarm means 70b of the present invention.

The case where the liquid leakage detection system of the present invention is applied to a semiconductor wafer (hereinafter referred to as a wafer) coating and developing apparatus will be described below with reference to FIGS.
First, FIG. 1 shows a leak detection system in which a leak detection unit (leak sensor) 20a of the present invention is formed by integrally forming a leak sensor unit 20a and an alarm unit 70a including a sound generation unit 72. 1a, at least one leak detection unit that can come into contact with the leak via the gas layer or leak penetration layer that can penetrate the leak (in FIG. 1, the leak detection unit is at least A conductive leakage detector comprising an electrode pair whose impedance is changed by the presence of a non-insulating liquid, or an amount of liquid, which is composed of an optical leakage detector including one optical reflective boundary surface It is configured to use at least one liquid leakage sensor having a measurement type liquid leakage detection unit (in the example of FIG. 1, the number is the same, but the area is the same). A plurality of leak sensors are distributed at multiple locations on the bottom and floor of the This is an example of the leakage detection system 1a, and the leakage sensor 20a is connected to the bottom surface 99 of each leakage storage portion 98, which will be described later, and each leakage storage portion is a system administrator / Alarm means including a sounding means to be described later within a predetermined space range (space above the bottom surface of the liquid leakage storage unit 98) with respect to the installation position for the maintenance person so as to be distinguished and spatially distinguishable 70a is provided, and when a sensor abnormality (leakage detection abnormality or sensor installation abnormality) of the liquid leakage sensor 20a is detected, at least by a sounding means, the other liquid leakage sensor installation locations installed outside the predetermined space range Distinct (so that each leak container can be identified independently), and sensor leak detection of leak sensor is transmitted with audible frequency so that the location of leak sensor can be specified easily and directly Alarm with sound Obtained by the so that, the liquid leakage sensor 20a and alarm unit 70a, and is connected by a signal line, is installed integrally formed.

  The wafer coating and developing apparatus is generally composed of a processing mechanism unit in which a processing mechanism for performing various processes on the wafer is disposed, and a loading / unloading mechanism for loading / unloading the wafer into / from the processing mechanism unit. The loading / unloading mechanism includes a wafer carrier for storing the unprocessed wafer, a wafer carrier for storing the processed wafer, an arm for sucking and holding the wafer, and the arm in the horizontal X and Y directions. And an X direction moving mechanism, a Y direction moving mechanism, and a θ direction moving mechanism for moving in the θ (rotation) direction, respectively, and a mounting table for delivering the wafer to and from the processing mechanism unit. The processing mechanism unit includes an adhesion coating mechanism for performing a pretreatment for improving the adhesion between the wafer and the resist film, a coating mechanism 81a for coating a resist solution on the upper surface of the wafer, and a coating. A cooling mechanism that cools the wafer before applying the resist solution by the cloth mechanism 81a and adjusts the wafer to a predetermined temperature, and a baking mechanism that performs heat treatment for evaporating the solvent remaining in the resist film applied to the wafer. And a developing mechanism 81b for developing the exposed resist. Further, the processing mechanism unit is provided with a transport mechanism having an arm for loading / unloading wafers in / from each of the processing mechanisms 81a, 81b, etc., along the transport path. In the processing unit, the wafer loaded from the loading / unloading mechanism is pre-processed by the adhesion coating mechanism, then cooled and coated, heated by the baking mechanism, and developed by the developing mechanism 81b. Then, it is sent to the loading / unloading mechanism and stored in the wafer carrier. In such a configuration, the processing liquid, that is, the resist liquid is supplied from the processing liquid tank 82 having the liquid leakage detection system 1a of the present invention to the resist liquid coating mechanism 81a.

The arrangement of the treatment liquid tank 82 and the arrangement of the treatment liquid temperature control unit 84 in the semiconductor wafer processing apparatus are shown in FIG. 1, and the leakage detection system 1a is provided in each of the treatment liquid tank 82 and the temperature control unit 84. It has been. Thus, the delivery conduit 83 exiting from the treatment liquid tank 82 is connected to the coating mechanism 81a, and a leakage sensor can be provided in the outer tub 89 provided around the upper portion of the treatment liquid tank 82. Is provided with a temperature control unit 85, whereby the processing liquid supplied to the coating mechanism 81a is maintained at a constant temperature. The temperature control unit 85 is circulated and supplied with constant temperature water which is a temperature control liquid controlled at a constant temperature by the temperature adjustment unit 84a. The temperature control unit 84 includes a constant temperature water tank 91, a feed conduit 87 having a pump 90 and a thermo module 88, a temperature control unit 84a including a return conduit 86 and the like, and a temperature control unit 85 configured as a heat exchanger. It is configured. Although the thermo module 88 is not shown in detail, the temperature adjustment water can be maintained at a constant temperature by supplying a control current thereto.
The constant temperature water tank 91 is provided with a float 94 for detecting the liquid level. The float 94 has an electrical contact 96 near the support portion 95. The contact 96 is connected so as to control the operation of the solenoid valve 97 via a logic circuit (not shown). Under the constant temperature water tank 91 and the treatment liquid tank 82, a leakage storage pan 98 is independently arranged, and a leakage detection leak sensor 20 a is independent of the bottom 99 of the leakage storage pan 98. So that they can be distinguished from each other.

The logic circuit (not shown) is for supplying a temperature control liquid (hereinafter referred to as a temperature control liquid) by opening the solenoid valve 97 when the liquid amount decreases. The changeover switch is used for switching between automatic and manual supply of the temperature adjustment liquid. When the contact of the switch is connected to the right side, a current flows through the solenoid valve 97, the valve is opened, and the temperature adjustment liquid is manually supplied and supplied. When the contact of the switch is connected to the left side, the temperature adjustment liquid is automatically supplied.
When the liquid level in the tank 91 is lowered, the float 94 is lowered and the contact 96 is turned on. At this time, the input of the inverter A1 becomes 0 and the output becomes 1 (positive logic H level state). The output of the inverter A1 is transmitted to the inverters A2 and A3 via the delay circuits D1 and D2, respectively. The delay circuit D1 has a delay time of about 1 minute, and the delay circuit D2 has a delay time of about 2 seconds. Have Accordingly, about 2 seconds after the contact 96 is turned on, the signal 1 is generated at the output terminal of the inverter A4. At this time, the transistor Tr is turned on, and a current flows through the solenoid valve 97. Further, after about 1 minute, the output of the inverter A2 becomes 0, so that the transistor Tr is turned off again, and the current of the solenoid valve 97 is cut off. Each delay circuit D1, D2 is provided with a diode, and these delay circuits D1, D2 delay the signal of 0 → 1, but transmit the signal of 1 → 0 without delay. Therefore, the delay circuit D1 can prevent the solenoid valve 97 from opening for a period of 1 minute or longer, and the delay circuit D2 can prevent the solenoid valve 97 from frequently repeating ON and OFF due to the liquid level undulation. .

FIG. 2 shows an enlarged view of a configuration in which an alarm means 70a including a sounding means in the present invention is formed integrally with an optical liquid leakage sensor (a liquid leakage sensor having a liquid leakage detection portion formed of an optical reflecting surface) 20a. As an example, the liquid leakage sensor 20a includes a case 12 in which the light source means 14a and the light receiving means 16 are housed and integrated in a case having a bottom 12d made of a transparent material or a translucent material, and a case holder for mounting the case. 5, and a screw / nail or the like on a leak detection target bottom surface of the leak storage portion 98 (if the leak sensor is installed directly on the floor surface of a building, the installation floor surface is indicated) 99. The fixing member is fixed by a fixing member or fixed to a predetermined leakage detection portion of the leakage container 98 by other fixing means (not shown), and the surface tension is 6 × 10 ⁻² N / at 20 ° C. Low surface tension leakage that is less than or equal to m Gaps and gaps that can exhibit capillary action with a predetermined cross-sectional shape (for example, parallel gaps with a gap of 1 mm or less and / or wedge-like gaps that gradually narrow upward with a maximum gap of 1 mm or less) ), High-speed liquid leakage pull-in to be described later, for directly pulling up even a small amount of liquid from the leakage detection target floor surface 99 to the liquid leakage detection position on the reflective boundary surface for liquid leakage detection against gravity. At least one means 6 is provided,
ABS resin, polyethylene, polyvinyl chloride, polystyrene, polypropylene, polyvinyl alcohol, methacrylic resin, petroleum resin, polyamide, polyvinylidene chloride, polycarbonate, polyacetal, fluorine resin, polyimide, polyetheresterketone, polyphenylene sulfide, polybenzimidazole, poly Thermoplastic resins such as cycloolefin, or thermosetting resins such as phenolic resins, urea resins, unsaturated polyesters, polyurethanes, alkyd resins, melamine resins, and epoxy resins, that is, thermoplastic resins or thermosetting resins Synthetic resin / plastic members, or polyamino acids, aliphatic polyesters, poly-ε-caprolactone, polyvinyl alcohol, chitosan, starch, cellulose, etc. Solution resin member, or, those selected from the group consisting of combinations,
Furthermore, polyamide, polycarbonate, polyacetal, polyethylene terephthalate, polybutylene terephthalate, polyphenylene ether, polyether ester ketone, polyphenylene sulfide, polyarylate, polysulfone, polyethersulfone, polyketone sulfide, polyetherimide, polyamideimide, polyimide, polytetrafluoroethylene. FIG. 5 shows a case bottom portion 12d made of an engineering plastic member such as fluorinated ethylene, aromatic polyester, polyaminobismaleimide, triazine resin, or the like, or a transparent material or translucent material containing at least one glass or ceramic. In the convex shape as shown, the bottom surface 12p is provided to project one end of a liquid leakage detection unit that can be in close contact with the liquid leakage detection target bottom surface 99 of the liquid leakage storage unit 98,
The detection unit is provided with planar liquid leakage detection total reflection surfaces 12m and 12n at a predetermined inclination angle of about 35 degrees to 50 degrees with respect to the leakage detection target bottom surface (or floor surface) 99. The planar total reflection surfaces 12m and 12n are formed such that the extension of the total reflection surface intersects each other at a predetermined angle so as to perform the same function as the corner cube, and includes at least one light source means, light receiving means, and these Control means coupled to each of the reflection boundary surfaces is disposed on the same side, and light is projected from the light source means to the first total reflection boundary surface 12m. The reflected light from the total reflection boundary surface 12m is projected onto the second total reflection boundary surface 12n, the reflected light from the second total reflection boundary surface 12n is received by the light receiving means, and the output is calculated by the control means. In order to detect leaks,
First, the projection light 22u from the light source means 14a forming the first optical system for detecting liquid leakage is totally reflected on the total reflection surface 12m from the upper side to the lower side by the total reflection surface 12m at a predetermined critical angle or more. Irradiated at a predetermined incident angle corresponding to the refractive index of the transparent or translucent material 12d, the reflected light 22v is projected onto the total reflection surface 12n, and the total reflection light 24u from the total reflection surface 12n The leakage detection light that is received by the light receiving means 16 of the photoelectric conversion element composed of a CCD, a MOS type photodiode or the like at a predetermined light receiving angle corresponding to the refractive index of the translucent material 12d is converted into an electric signal. The output is converted into a digital signal by an A / D conversion means 32 at a predetermined sampling period via a multiplexer 31 as shown in FIG. In the control means 30 also serving as the leakage detection means 18, the data is sequentially written into the buffer memory 34 and digitally processed, or the analog output of the light receiving means 16 is directly constituted by an analog computing means such as an analog comparator (not shown). It is also possible to perform analog processing for the presence or absence of liquid leakage according to the amount of reflected light in the control means 30 that also serves as the detection means 18 composed of an analog circuit and compared with a predetermined reference level.

Accordingly, the leakage detection information indicating the presence or absence of leakage generated by calculation processing inside the leakage sensor 20a is transmitted via the external output setting device 33 and the signal line 26 (such as a dip switch in the setting device 33). Alarm means that is digitally output to the outside (in the PNP output or NPN output external output format specified in the above) and operates independently of such external output information, for example, means for sounding by striking a resonator Sound generating means and / or sound generating means including a whistle or siren and / or means for sounding by vibration (for example, a piezoelectric buzzer) and / or means for sounding by vibration and coupled thereto The sound generation means 72 including the resonance means is also output to the alarm means 70a having at least one, and the alarm light 29 is also connected to the alarm means 70a. Preferred, and the leak detection point to distinguish it from the other leak detection points, so that the so as to be recognized directly in the tone of the audible frequency even a beginner, to the alarm and notification to the maintenance people.
As the light source means / light projecting means, an LED, an infrared light emitting element, a semiconductor laser, a light projecting optical fiber, or the like can be used, and the alarm means 70a including the sound generating means 72 and the liquid leakage sensor 20a are integrated. In the liquid leakage detection system 1a formed and configured as described above, the light source means 14a, the light receiving means 16, the warning light 29, the detection means 18, the control unit 700 of the alarm means 70a for controlling the supply of driving power to the sound generation means 72, and It is preferable that the control means 30 or the like is integrally formed and fixed on the circuit board 7 that also serves as a light shielding material. In addition, it is preferable to provide a wired or wireless communication means 702 inside the electrical control unit 700 of the alarm means 70a. With the communication means 702, on / off control of the sound generation means 72 and volume control of the output dial tone are performed. If the resetting operation of the sound generating means 72 can be executed through a remote operation command from the outside, it is preferable that the maintenance / recovery work after the occurrence of liquid leakage can be carried out reliably / rapidly.

Thus, the electric control unit 700 of the alarm means 70a can be used also as the control means 30, and the fixing base 71 is fixed to the circuit board 7 by a fixing tool such as a screw, and on the upper surface thereof. The sound generating means 72 including a piezoelectric vibration element (for example, a piezoelectric vibration element PKLCS1212E4001-R1 of Murata Manufacturing Co., Ltd. in Kyoto Prefecture) is fixed at a predetermined position in a state where the sound generation means 72 can vibrate. A vibration transmitting surface 74 is formed on the inner lower surface, and the cylindrical shell 73 forming the main body of the alarm means 70a is formed in the fitting recess groove formed in the upper circumferential peripheral portion of the optical leak sensor 20a, and the lower end peripheral portion. The hollow portion of the cylindrical shell 73 forms a resonator 75 of the sound generating means 72 together with the lid portion 76, and is further formed into a cylindrical shell 7 through a fitting convex portion 78 formed on the cylindrical portion 73. The hollow upper sidewall and / or the lid part 76, windows 77 for emitting a resonance sound of the sound generating means 72 alone, or is adapted to be formed in plural. Note that the window 77 is preferably formed on the side surface rather than on the upper surface of the shell 73 so that the leaked liquid can be prevented from flowing directly into the resonator 75.
Furthermore, it is preferable that the resonator 75 be made of a transparent material and / or a translucent material because the lighting state of the warning lamp 29 provided on the upper surface of the circuit board 7 can be directly observed from the outside.

In the above embodiment, the alarm means 70a is described as being formed integrally with the case 12 of the leak sensor body. However, the vibration source / vibration portion of the sound generation means of the alarm means 70a may be provided on the holder 5 side. It is also possible to disperse and form in two places, the case and the holder. Further, the resonance means / resonator may be arranged on the holder 12 side, or may be arranged and formed in two locations, the case and the holder, in addition to the arrangement arranged on the case 12 side. In addition, as will be described later, it may be separately installed via a wired / wireless communication means at a predetermined spatial position above the location where the liquid leakage sensor is installed.
If the resonance means / resonator is distributed and arranged at two locations on the case 12 side and the holder 5 side, the main body case 12 is removed from the holder 5 during maintenance / inspection / restoration after leakage. It is preferable that the volume of the alarm sound can be reduced and unnecessary high alarm sound in the restoration work can be reduced.

  Next, a second optical system serving as the installation abnormality detection means 4 for checking parallelism to check whether a float / inclination has occurred with respect to the bottom surface 99 of the liquid leakage detection target of the case 12 is the first liquid leakage detection optical system. In this second optical system, the projection light from the light source means 14c is refracted and transmitted through the case bottom 12d and projected from above to the thin paper 8, and the hollow portion of the holder 5 is projected. A protrusion 5h is formed integrally with the frame 5a on the inner periphery of the ring-shaped frame 5a in the direction toward the center of the inner ring. A light absorber / translucent material is formed on the upper surface of the protrusion 5h. The formed thin paper placement plane 5j is formed, a part of the thin paper 8 is placed on the flat surface 5j, and the critical angle of the case bottom 12d with respect to the thin paper 8 which is the third optical reflection (boundary) surface. The light 22z is irradiated at an incident angle of less than Isa is, the reflected light 24z is received by the light receiving unit 16c, are input to the control unit 30 is converted into an electric signal in the same manner as described above. In addition, it is preferable to fill / form the light shielding material 12q of the projection light directly incident on the light receiving means 16c from the light source means 14c between the light source means 14c and the light receiving means 16c. In order to optically separate the system and the second optical system, it is preferable to fill / form the light shielding material 12q between the first and second optical systems.

  Further, the control means 30 can be operated as a leakage presence / absence determination means (leakage detection means), a case installation abnormality determination means, and a control unit 700 of the alarm means 70a. The installation abnormality detection means 4 for checking the parallelism with the bottom surface (or floor surface) 99 of the case 12 is an optical installation abnormality detection means in the above example, but in addition to this, a change in magnet or capacitance is used. The installation abnormality detection means that has been used can also be used.

Further, a light shielding material such as a metal foil can be attached to the inside of the case bottom 12d. The light shielding material excludes the light irradiation surface at the case bottom and the reflected light receiving surface near the light receiving means. When arranged in the space range, there is an optical effect that the reflected light from the unnecessary floor surface is not received by the light receiving means even when the liquid leaks into the floor surface having a white floor surface or a mirror surface. Further, sensor abnormality information such as leakage detection output and installation abnormality processed by the control means 30 is output to the outside as an electrical signal via the cable 26 and further provided on the upper surface of the circuit board 7 of the case 12. A warning is also displayed on the display means 29 by an LED or the like that can be switched between green and red.
Note that it is preferable to use a holder 5 having an outer diameter 1.3 times or more larger than the outer diameter of the case 12 from the viewpoint of preventing the sensor 20a from falling down. Since the case 12 is easily tumbled when installed alone, normally, the holder 5 into which the case 12 is inserted is firmly fixed to the bottom surface 99 of the leak detection target with a fixing material such as a screw, and / or the building. Arm-like pressure contact means 60 for fixing the case 12 from the side wall 61 or the side surface 61 of the apparatus or the like is extended to the case side surface, and one end 62 thereof is fixed to the building 61 side by a fixing material 64 such as a screw or a nail. At the same time, the other end 66 may be pressed against the side surface of the case to prevent the case 12 from falling.

  Further, the distance d4 between the case bottom 12d and the leak detection target bottom surface 99 can be changed to various values according to the viscosity / surface tension of the liquid to be detected. If the angle or interval between the boundary surfaces 12m, 12n and the leak detection target bottom surface 99 changes, it may easily cause a malfunction of the leak detection of the leak sensor, so the holder 5 and the case 12 are one-touch as described later. A structure that is detachable and has a structure in which the distance d4 does not change even with external vibration is preferable. In addition, when the holder 5 is made of a light shielding material, there is an effect of preventing noise light from entering around the case 12 and receiving unnecessary reflected light from the floor surface. Further, when the holder 12 is not used and the case 12 is used alone as the liquid leakage sensor 20a, the bottom surface is pressed by a separately installed pressure contact means 60 or the like so that the distance d4 does not change even with external vibration. It is preferable to fix to 99. The light source means 14c, the light receiving means 16c, the display means 29 and the like are also preferably formed and fixed integrally on the circuit board 7 also serving as a light shielding material.

  Next, the irradiation position of the liquid leakage detection projection light 22u to the total reflection surface 12m is preferably a lower position near the liquid leakage detection target bottom surface 99 that is a part of the total reflection surface 12m and is provided at the bottom of the case 12. The convex liquid leakage detection unit bottom surface 12p and the like thus formed can be used as an adhesive sheet presser for the thin paper 8 in which cutting lines 8d as shown in FIG. Further, it is preferable to fill / form between the light source means 14a and the light receiving means 16 with a light shielding material 12q for the projection light that directly enters the light receiving means 16 from the light source means 14a.

  Thus, the entire case 12 is fitted and fixed by insertion / mounting to the holder 5 (FIGS. 4A and 4B) mainly composed of the ring-shaped frame 5a having the central hollow portion of the present invention. 2 (FIG. 2), the bottom surface 5b (FIG. 4B) facing the leakage detection target bottom surface 99 of the frame 5a is a predetermined distance d5 (usually 2 mm to 5 mm) from the leakage detection target bottom surface 99. The liquid leakage detection unit is formed in a substantially parallel shape while maintaining a gap that can form a gap in the range), and has a convex bottom surface 12p sandwiching the thin paper 8 between the bottom 12d of the case 12 and directly contacting the bottom surface 99. (FIGS. 2 (B) and 5), the leakage 2a having a low surface tension that diffuses in the form of a thin film on the leakage detection target bottom surface 99 is leaked into the central hollow portion. It is possible to detect directly from the bottom 99 of the liquid detection target, The slider 5 is fixed to the bottom surface 99 with a fixing material such as a nail / screw using the through holes 5d formed in the single or plural protrusions 5c provided on the outer peripheral portion in the outward direction from the ring center. Alternatively, an adhesive may be attached to the fan-shaped bottom surface of the protrusion 5c and adhered and fixed to the bottom surface 99 (FIG. 4). Furthermore, arm-shaped pressure contact means 60 for fixing the case 12 from the side wall 61 or the side surface 61 of the building or device etc. is extended to the side surface of the case, and one end 62 thereof is fixed. The member 64 may be fixed to the building 61 side (FIG. 8), and the other end 66 may be pressed against the side surface of the case to prevent the case 12 from falling.

Further, in the example of FIG. 2, the light source means 14a and 14c and the light receiving means 16 and 16c are an example of a case in which the bottom 12d is housed and integrated in a case made of a transparent material or a semi-transparent material. The case holder 5 to which the case 12 is mounted and the case 12 constitute the high-speed liquid leakage drawing means 6, and the configuration (FIG. 5) is, for example, an inner ring on the inner periphery of the frame 5 a. A rectangular protrusion 5e having a wedge-shaped tip 5f is formed integrally with the frame 5a toward the center, and the protrusion 5e is formed of an absorbing material / translucent material for leakage detection light. Preferably, the bottom surface 5g of the protrusion 5e is not in close contact with the leakage detection target bottom surface 99, and a predetermined gap d6 = 1 mm or less (preferably 0.9 mm or less, More preferably, the parallel gap part d6 of 0.5 mm or less) is formed. 5 g of the bottom surface 5 g facing the leakage detection target bottom surface 99 by using the capillary phenomenon of the parallel gap portion d 6, using the low surface tension leakage liquid 2 a that is 6 × 10 ⁻² N / m or less at 20 ° C. Further, a predetermined gap d7 = 1 mm or less (preferably between the end 5f of the protrusion 5e at one end of the bottom surface 5g and the total reflection surface 12m of the case 12). 0.9 mm or less, more preferably 0.5 mm or less) and / or the maximum gap d7 at the lower end is 1 mm or less (preferably 0.9 mm or less, more preferably, A low surface that is 6 × 10 ⁻² N / m or less at 20 ° C. by using the capillary phenomenon of the gap d7. Reflection boundary for leakage detection against gravity leakage 2a against gravity From the bottom surface 99 to above the predetermined leakage detection position of the surface 12m, even in small amounts, so that the direct quickly lead pulling.

  Note that a part of the leakage detection thin paper 8 having the cut piece 8d can be inserted into the gap d7, and the speed of detecting the low surface tension leakage 2a is determined according to the experiment. The detection speed was almost the same whether or not it was interposed in the gap d7. Further, the entire case 12 is fitted by insertion / attachment to fitting engagement portions 5n provided at a plurality of positions on the inner peripheral portion of the upper surface of the ring-shaped frame 5a so as to be rotatably fixed. (FIGS. 2 (A) and 2 (B)), and the tip 5p of the locking portion 5n is formed with a tapered surface obliquely upward so that the case 12 can be attached and detached with one touch. (FIG. 4B).

  The operation of the leak sensor 20a in this configuration will be described with reference to FIGS. 3C and 5. First, the case 12 is firmly fixed to the leak detection target bottom surface 99 by the holder 5 and the press contact means 60. Otherwise, the case 12 and the holder 5 are in an abnormal installation state where the case 12 floats, tilts obliquely, or falls, and therefore the optical path 22z / 24z of the projection light / reflected light of the optical installation abnormality detection means 4 Cannot be formed in a normal position, and the projection light 22z of the light source means 14c is transmitted / diffused from the optical reflection boundary surface 12a of the main body 12d to a gas layer such as air and does not reach the reflection member (thin paper 8). Alternatively, the reflected light 24z is bent and projected at a predetermined angle or more and hardly reaches the light receiving means 16c, so that the output of the light receiving means 16c with a greatly reduced amount of received light is detected by the detecting means 1. By comparing with the normal reflected light level, the installation abnormality of the liquid leakage sensor 20a is easily detected, and the installation abnormality alarm signal (or error code ER-A) is externally transmitted via the control means 30 such as MPU. It is output to the outside through the cable 26 in the digital output format of PNP output or NPN output set in the output setting device 33, and further supplied to the light source means 14a, 14c and the light receiving means 16, 16c by a power supply control unit (not shown). The power supply is stopped, and the leak sensor 20a enters an error standby state.

At this time, an alarm transmission signal having an audible frequency is output from the installation abnormality detection unit 4 to the alarm unit 70a independently of the installation abnormality alarm signal, and the vibration of the sound generation unit 72 is amplified by the resonator 75 and radiated into the air. When an operator (usually waiting in a maintenance room) who has been warned by an installation abnormality alarm signal rushes to the site where the alarm is generated, an installation abnormality of the leak sensor installed at any location immediately occurs. There is no need to inspect the floor surface or the bottom of the liquid leakage storage part one by one as in the conventional case, and sound is generated by relying on an audible alarm sound emitted from the sound generating means 72 and the resonator 75. If it is close to the source, it is very easy to distinguish the location of abnormal installation from other locations where the liquid leakage sensor is installed. Note that the alarm sound transmitted from the sound generating means 72 and the resonator 75 is an intermittent sound and / or a continuous sound with a constant or variable frequency, or an intermittent sound and / or a continuous sound with a constant or variable timbre. Intermittent tones and / or continuous tones with constant or variable intensity, intermittent tones and / or continuous tones with constant or variable pitch, intermittent tones and / or continuous tones with constant or variable duty ratio A dial tone including an alarm sound or a combination thereof can be used.
Further, in the alarm means 70a, the warning light / display means 29 can be lit in error (red), but in response to the change in the audible frequency alarm sound transmitted from the sound generation means 72, the warning light 29 It is also possible to vary the brightness, and the correspondence relationship may vary the brightness, the emission wavelength, etc. in synchronization with the variation of the alarm sound, or may vary independently.

In a normal normal installation state where no alarm signal is output, power is supplied from the power supply control unit to the light source means 14a and 14c and the light receiving means 16 and 16c, the leakage sensor 20a is activated, and any leakage occurs. If not, the optical path 22z / 24z of the projection light / reflected light of the optical installation abnormality detection means 4 is formed at a normal position as shown in FIG. 3C, and the projection light 22z from the light source means 14c. Is reflected by the reflecting surface of the reflecting material (thin paper 8) placed on the holder bottom surface 5j, the reflected light 24z is input to the light receiving element 16c, and the output is compared with the normal reflected light level by the detecting means 18. Thus, the normal installation state of the liquid leakage sensor 20a is easily detected.
Further, the projection light 22u from the light source means 14a forming the leak detection optical system is totally reflected on the first total reflection surface 12m from above to below at the total reflection surface 12m at a predetermined critical angle or more. Irradiated at a predetermined incident angle corresponding to the refractive index of the transparent or translucent material 12d, the total reflection light 22v is projected onto the second total reflection surface 12n, and the total reflection light 24u from the total reflection surface 12n is The leakage detection light received by the light receiving means 16 at a predetermined light receiving angle corresponding to the refractive index of the transparent material or translucent material 12d and propagated through the optical path is converted into an electrical signal by the photoelectric conversion element, and the output is In the control means 30 also serving as the detection means 18, digital processing is performed, or the analog output of the light receiving means 16 is directly input to the analog calculation means including an analog comparator or the like, and the detection means 18 configured by an analog circuit is provided. In proof control means 30 within, are analog processing. In the case where there is no leakage, in any of the above examples, a normal amount of received light is detected by any of the light receiving means, and the phenomenon of a decrease in the amount of received light does not occur.

Next, when the leaked liquid 2a having a low surface tension of 6 × 10 ⁻² N / m or less at 20 ° C. has diffused into the leak detection target bottom surface 99 in a thin film shape, the high-speed leak-in means 6 When the leak 2a of the liquid level d1 has diffused to the area of the leak detection target bottom 99 facing the bottom 5g of the rectangular protrusion 5e that forms a part of the rectangular protrusion 5e, the leak detection target bottom 99 and the bottom 5g The distance between the gap d6 and the liquid level d1 of the leaked liquid 2a is approximately the same length, or the length of the liquid level d1> the distance d6. Is set, the leak 2a is rapidly drawn into the parallel gap d6 by utilizing the capillary action of the gap d6 (2a1 in FIG. 5), and the leak 2a contacts the bottom surface 5g and leaks. It is diffused at high speed over the entire bottom surface 5g facing the liquid detection target bottom surface 99.

  Thereafter, when the leak 2a diffuses at one end of the bottom surface 5g to the lowest end forming one end of the tip 5f of the protrusion 5e (2a2 in FIG. 5), the leak 2a further flows into the total reflection surface of the case 12 Since it reaches one end of the parallel gap part d7 formed by 12m and the tip part 5f, and the gap part d7 is set so that the capillary phenomenon of the liquid leak 2a appears in the predetermined gap d7, the liquid leak 2a Even if the amount of leakage is small, the liquid leakage detection target bottom surface 99 is promptly and directly pulled up to a position above the predetermined leakage detection position of the leakage detection reflective boundary surface 12m against gravity. 2a3) in FIG. Thus, when the liquid leakage 2a passes upward through a predetermined liquid leakage detection position on the liquid leakage detection reflecting boundary surface 12m, most of the projection light 22u from the light source means 14a is totally reflected by the total reflection surface 12m. The rectangular protrusion 5e formed by the projection light absorber / translucent material after the bottom portion 12d and the total reflection surface 12m substantially straightly traveled, and the liquid leakage 2a filled in the gap portion d7 refracted straight. In addition, it travels substantially straight through the leaked liquid 2a filled in the gap d6, is reflected by the leak detection target bottom surface 99, and propagates and travels in the direction opposite to the total reflection surface 12n.

Accordingly, the amount of light 24u that is totally reflected by the total reflection surface 12m that forms a part of the optical path for detecting leakage and then totally reflected by the total reflection surface 12n is significantly reduced by the light receiving means 16. Then, the output is calculated by the control means 30, and a very small amount of the liquid leakage 2a can be detected at a very high speed at the very early stage when the liquid leakage detection target bottom surface 99 starts to diffuse thinly. . In addition, when a large amount of low surface tension leakage 2a leaks to the leakage detection target bottom surface 99 at once, the outer periphery of the case 12 is completely immersed in the leakage 2a, and the reflection for detecting leakage Since the predetermined leakage detection position of the boundary surface 12n is also submerged in the leakage 2a, the projection light 22u from the light source means 14a is totally reflected by the total reflection surface 12m, and the total reflection light 22v is reflected on the total reflection surface 12n. Even if it is projected, it is not totally reflected at the total reflection surface 12n due to the leaked liquid 2a, but immediately travels substantially straight through the total reflection surface 12n, and further goes straight through the inside of the leaked liquid 2a filled in the gap portion d4. The light is diffused / radiated in the outer peripheral direction of the case 12 and propagates / moves in a direction completely unrelated to the installation position of the light receiving means 16. Accordingly, the amount of light received by the light receiving means 16 of the light 24u totally reflected by the total reflection surface 12n forming a part of the optical path for detecting leakage is greatly reduced, and the output is calculated by the control means 30. It is possible to detect a large amount of the leaked liquid 2a at a very early stage by processing at a very high speed.
Thus, when the liquid leakage 2a is detected by the control means 30 also serving as the liquid leakage detection means 18, the display means 29 is turned on from the normal (green) lighting to the error (red) lighting, and is set in the external output setting device 33. In addition, a leak detection signal is digitally output to the outside via the cable 26 in a digital output format of PNP output or NPN output (leak detection error code ER-B).

At this time, when an alarm sound transmission signal is output from the leak detection unit 18 to the alarm means 70a separately from the leak detection signal digitally output to the outside, the sound generation means 72 is driven, for example, a piezoelectric element or the like. Since the oscillation sound generated by the vibration due to the vibration is resonantly amplified by the resonator 75 and radiated into the air, the operator waiting in the maintenance monitoring room or the like warns of the occurrence of liquid leakage by the liquid leakage detection signal ER-B. After that, when rushing to the site where the alarm occurred, where the leak sensor installed immediately detected the leak, as in the past, one by one on the floor and leak container If it is not necessary to check the bottom surface and the amplified alarm sound transmitted from the sound generating means 72 and the resonator 75 is relied on the sound source, it is very easy to distinguish the leak occurrence location from other leak sensor installation locations. It can be specified separately.
Note that the alarm sound transmitted from the sound generating means 72 and the resonator 75 is an intermittent sound and / or a continuous sound with a constant or variable frequency, or an intermittent sound and / or a continuous sound with a constant or variable timbre. Intermittent tones and / or continuous tones with constant or variable intensity, intermittent tones and / or continuous tones with constant or variable pitch, intermittent tones and / or continuous tones with constant or variable duty ratio A dial tone including an alarm sound or a combination thereof can be used.
Further, in the alarm means 70a, the warning light / display means 29 can be lit in error (red), but in response to the change in the audible frequency alarm sound transmitted from the sound generation means 72, the warning light 29 It is also possible to vary the brightness, and the correspondence relationship may vary the brightness, the emission wavelength, etc. in synchronization with the variation of the alarm sound, or may vary independently.
Furthermore, the alarm sound emitted from the sound generating means 72 when detecting leakage is not the same sound as the alarm sound emitted when the case is abnormal, and can be distinguished from each other so that any sensor abnormality can be identified. Different dial tones are preferred, and as such different dial tones that can be distinguished from each other, for example, the volume of the alarm dial tone is changed, the tone of the alarm dial tone is changed, the frequency of the alarm dial tone is changed, the alarm dial tone Various combinations can be used, such as changing the duty ratio, outputting a warning sound as a continuous sound and an intermittent sound, or using a combined sound as a combination thereof.

Next, when the liquid leakage 2 having a surface tension of 6 × 10 ⁻² N / m or more at 20 ° C. has diffused into the liquid leakage detection target bottom surface 99, the liquid leakage detection target bottom surface 99, the case bottom 12d, Since the thin paper 8 is inserted in the parallel gap part d4 formed between the two, the liquid leakage d2 at the liquid level d3 comes into contact with the outer peripheral part or a part of the thin paper 8 (FIG. 5). The liquid 2 penetrates / diffuses on the entire surface of the thin paper 8, and the leaked liquid 2 is rapidly drawn to the vicinity of the total reflection surface 12n through the thin paper 8. Thus, when the leaked liquid 2 reaches the predetermined leak detection position of the leak detection reflective boundary surface 12n, the projection light 22u from the light source means 14a is totally reflected by the total reflection surface 12m, and the total reflected light 22v. However, the total reflection surface 12n does not totally reflect due to the leak 2, but the total reflection surface 12n travels substantially straight, and further refracts straight through the thin paper 8 into which the leak 2 has penetrated. The light is reflected by the bottom surface 99 and propagates and travels in a direction completely unrelated to the installation position of the light receiving means 16. Accordingly, the amount of light received by the light receiving means 16 of the light 24u totally reflected by the total reflection surface 12n forming a part of the optical path for detecting leakage is greatly reduced, and the output is calculated by the control means 30. The leaked liquid 2 can be detected at a very high speed at the very early stage where the liquid leakage 2 starts to diffuse thinly into the bottom surface 99.

Further, when a large amount of liquid leakage 2 occurs at a time, the entire outer periphery of the case 12 is immersed in the liquid leakage 2 and the predetermined liquid leakage detection position of the liquid leakage detection reflection boundary surface 12n is also in the liquid leakage 2 Therefore, when the total reflection surface 12m is submerged in the liquid leakage 2, the projection light 22u from the light source means 14a does not totally reflect but travels straight through the total reflection surface 12m. refracts straight in the leaked liquid 2 filled in d7, propagates and travels in a direction completely unrelated to the total reflection surface 12n, or
When the total reflection surface 12m is totally reflected and the total reflection light 22v is projected onto the total reflection surface 12n, the total reflection surface 12n is not totally reflected by the total reflection surface 12n because of the liquid leakage 2. It travels substantially straight, and further refracts straight through the leaked liquid 2 filled in the gap d4, and then is reflected by the leak detection target bottom surface 99 and propagates and travels in a direction completely unrelated to the installation position of the light receiving means 16.
Accordingly, when a large amount of liquid leakage 2 occurs at a time, the light amount received by the light receiving means 16 from the light 24u totally reflected by the total reflection surface 12n forming a part of the optical path for liquid leakage detection is as follows: Compared with the case where the liquid leak 2 does not exist, the output is greatly reduced, and the output is calculated by the control means 30 to detect a large amount of the liquid leak 2 at a very early stage at a very high speed. be able to.
Thus, when the leakage means 2a or leakage 2 is detected by the control means 30 that also serves as the leakage detection means 18, the display means 29 is turned on in error and the presence / absence of leakage is digitally detected via the cable 26. Output (leak detection error code ER-B).

  At the same time, an alarm sound transmission signal is output from the leak detection means 18 to the alarm means 70a, and the vibration of the sound generation means 72 is resonantly amplified by the resonator 75 and radiated into the air, and warned by the leak detection signal ER-B. When the operator of the maintenance monitoring room rushes to the site where the leak occurred, the location where the leak sensor installed immediately detected the leak, as in the past, There is no need to check the bottom of the leak container, and it is very easy to distinguish the leak location from other leak sensor installation locations by approaching the location where the alarm sound is emitted after resonance amplification. It can be specified.

When a one-dimensional or two-dimensional array sensor is used as the light receiving means in the above light receiving process, after the digital output after A / D conversion of each of the plurality of light receiving elements is written in the double buffer memory 34, The following processing may be performed by the MPU 36 or the like.
a) After correcting the sensitivity of each light receiving element 28i (i = a to n), the light receiving pattern is smoothed by moving average processing or the like.
b1) The light / dark peak position of the smoothed light receiving pattern is calculated, and the presence / absence of leakage is determined based on whether or not this position is within the range without leakage.
b2) The center of gravity XG of the luminance distribution of the reflected light quantity of the smoothed light receiving pattern R (j) is calculated by the following equation, and the presence / absence of leakage is determined based on whether or not the position of the center of gravity is within the range without leakage. .
XG = ΣR (j) · j / Σj (j = 1 to n) (1)
However, R (j): Light reception level, j = 1 to n: Light reception position

b3) A waveform rising portion and / or a waveform peak portion and / or a waveform falling portion of the light-dark pattern of the reflected light is cut out from the reflected light pattern with leakage in advance to the template memory 35 or the like. The correlation value CR (m) is calculated in the light receiving pattern R (j) obtained by registering the waveform position similar to the template pattern T (j) as a leaked template pattern T (j). Ask for it.
For example, if a light / dark pattern CR (m) similar to the template waveform is detected at a position (m> mth) that is a predetermined distance (mth) or more away from the position without liquid leakage and a predetermined similarity Thcr or more, It is determined that there is liquid, otherwise it is determined that there is no liquid leakage.
c) Thus, when the leakage 2 is detected by a desired calculation or a combined calculation from the calculations b1) to b3) by the control means 30 also serving as the leakage detection means 18, the cable 26 is disconnected. The presence or absence of leakage is digitally output to the outside (leak detection error code ER-B).
In the above-described processes b1) and b2), the presence / absence calculation of liquid leakage can be performed by a minimum of two light receiving portions (elements) by collecting reflected light widely by a condensing means such as a lens or a concave mirror. . In the correlation calculation of b3), it is preferable to collect the reflected light data from the light receiving portions (light receiving elements) from a minimum of 4 to 8 different positions.

  In addition, since the thin paper 8 is inserted between the case 12 and the holder 5 in the liquid leakage sensor 20a, the liquid leakage 2 that has diffused to the bottom surface 99 of the liquid leakage detection permeates the thin paper 8 sequentially. When the thin paper 8 is diffused while being converted into a transparent layer, and the leaked liquid 2 penetrates and diffuses to the mounting plane 5j formed on the upper surface of the protrusion 5h provided on the inner peripheral side of the ring-shaped frame 5a, 3, the light 22z irradiated from the case bottom 12d does not reflect on the surface of the thin paper 8 and travels straight through the thin paper 8 into which the liquid leaks. Further, since the light travels straight within the mounting plane 5j formed of the light absorber / translucent material at a predetermined refraction angle, the amount of the reflected light 24z received by the light receiving means 16c is greatly reduced. The control means 30 as the installation abnormality detection means 4 is activated and the case is installed. Even abnormal error, leakage 2 can be detected. Therefore, even when the first optical system for detecting liquid leakage fails and does not operate normally, the liquid leakage 2 can be detected as a case installation error, and the error detection function of the sensor can be further improved. it can.

Thus, the leak sensor 20a shown in FIGS. 2B and 5 is configured to detect gas leaks in the gas layers d6 and d7 or the leak penetration layer (for example, in FIG. At least one leakage detecting reflection boundary surface 12m, 12n, light source means 14a, light receiving means 16 that can come into contact with the liquid leakage via a part of thin paper 8 sandwiched between bottom surface 99 and case bottom surface 12p). And a leakage sensor including the control means 30 coupled thereto, and leakage of the gas layer d6 or the leakage penetration layer (d4 or the thin paper 8 sandwiched between the leakage detection target bottom surface 99 and the bottom surface 12p). A part or the whole of the surface facing the bottom surface 99 of the liquid storage part 98 is directly opened to the liquid leakage detection target bottom surface 99 side (in the example of FIG. 5, the gas layer d6 is the entire floor surface side), or Configure the floor as part of a gas layer or a liquid permeation layer (for example, In 5, a portion of the thin paper 8 which is sandwiched between the leakage detection target bottom 99 and the case bottom surface 12p of the leak accommodating portion 98), further, surface tension, at ^{20 ℃, 6 × 10 -2 N} / m or less Leakage 2a of low surface tension is leaked to the reflection boundary surface 12m for leak detection against gravity using a gap that can exhibit capillary action having a predetermined gap d0 and a predetermined cross-sectional shape. At least one high-speed liquid-leakage drawing means 6 for directly pulling up even a small amount from the liquid-leakage detection target bottom surface 99 of the liquid storage unit 98, and the projection light 22u of the light source means 14a is reflected for liquid-leakage detection. The boundary surface 12m is irradiated, the reflected light from the reflection boundary surface 12m is received by the light receiving means 16, and the output is subjected to arithmetic processing by the control means 30, so that the presence or absence of the low surface tension leakage 2a can be quickly determined. It can be referred to as a leak sensor.

2B and FIG. 5 includes at least two leak detection total reflection boundary surfaces 12m and 12n that can come into contact with the leak, gas layers d6 and d7, or a leak penetration layer ( For example, in FIG. 5, at least one of the light source means 14 a and the light receiving means 16 is formed by interposing a part of the thin paper 8 sandwiched between the liquid leakage detection target bottom surface 99 and the case bottom surface 12 p of the liquid leakage storage unit 98. And the control means 30 coupled thereto are arranged on the same side with respect to each of the reflection boundary surfaces, and the light 22u is projected from the light source means 14a to the first total reflection boundary surface 12m, The reflected light 22v from the first total reflection boundary surface 12m is projected onto the second total reflection boundary surface 12n, the reflected light 24u from the second total reflection boundary surface 12n is received by the light receiving means 16, and the output is received. Liquid leakage is detected by arithmetic processing by the control means 30. A part of the surface of the gas layer d6, d7 or the liquid permeation layer facing the liquid leakage detection target bottom surface 99 is directly opened to the liquid leakage detection target bottom surface 99 side. Alternatively, the bottom surface 99 side of the liquid leakage accommodating portion 98 is configured as a part of the gas layer or the liquid leakage permeation layer, and the surface tension is 6 × 10 ⁻² N / m or less at 20 ° C. The bottom surface of the leak detection target is the liquid leakage detection target 2a up to the reflection boundary surface 12m for leak detection against gravity by utilizing the gap 2 that can exhibit capillary action with a predetermined gap d0 and a predetermined cross-sectional shape. From 99, at least one high-speed liquid-leakage pulling means 6 for directly pulling up and guiding even a small amount can be provided so that the presence or absence of the liquid 2a having a low surface tension can be quickly determined even with a small amount of leakage. It can also be called a leak sensor.

  In addition, as the predetermined gap d0 of the gap portion that can exhibit the capillary phenomenon, a low-surface-tension liquid leakage 2a is dropped on the bottom surface 99 of the liquid leakage detection target of the liquid leakage storage section 98 in a small amount. The length is equivalent to the thickness d1 of the leaked liquid 2a shown in 1 (C) or smaller (d0 <d1), and is a length capable of stably expressing the capillary phenomenon of the leaked liquid 2a. Preferably, the predetermined cross-sectional shape of the gap portion that can stably exhibit the capillary phenomenon is, for example, a cross-section of a parallel gap portion having a gap d0 or less and / or gradually upward upward with a maximum gap d0 or less. A narrow wedge-shaped void section or the like can be used, and any cross-sectional shape can be used as long as it can stably exhibit capillary action.

  Next, FIG. 7 to FIG. 9 shown corresponding to FIG. 1 to FIG. 6 show the liquid leakage detection part (leakage sensor part) of the present invention, the liquid leakage sensor main body 20b, and alarm means 70b including sounding means. FIG. 7 shows another embodiment of the leak detection systems 1b and 1c installed separately, and the apparatuses with the same numbers perform the same functions, and the leak detection system 1b of FIG. Then, the leak sensor 20b and the alarm means 70b installed separately are an explosion-proof leak detection system 1b in which signals are relayed via radio. In the leak detection system 1c, The sensor 20b and the alarm means 70b installed separately are an explosion-proof type leakage detection system 1c relayed via a wire.

  Furthermore, in the explosion-proof type leakage detection system, as shown in FIG. 8, a leakage sensor unit (leakage detection unit) 20b installed in a dangerous space, and a control unit 39 installed in a safe space and constituting an electric circuit, Are installed in a physically separated manner, and the high-speed liquid leakage lead-in means 6b is configured only on the case 12 side, and the electric wiring is completely eliminated on the liquid leakage detection unit 20b side to An explosion-proof structure in which an accident never occurs is realized, the holder 5 is not required, and the sensor case can be operated alone. The first optical transmission means 40a, 40c such as an optical fiber can be used for remote locations. The projection light 22x and 22z are transmitted from the light source means 14 separately provided in the control section 39 installed in the safety zone to the liquid leakage detection section 20b by the light transmission means 40a and 42a, respectively, and reflected. Interface 1 The first optical system (14-40a-12m-12n-42a-16) for projecting and receiving light to m and 12n is formed, and the light transmission means 40c and 42c of the high-speed liquid leakage drawing means 6b described later are used. A second light projecting / receiving light on the reflective mounting surface 5j formed on the upper surface (in this example, the surface 5j preferably uses a light reflecting material (white or mirror surface) since it does not use the thin paper 8). The optical system (optical path of the optical installation abnormality detecting means 4b: 14-40c-5j-42c-16c) is formed, so that the liquid 2 / 2a for leak detection is volatile and there is a risk of ignition or explosion. Even in some cases, leak detection can be performed extremely safely.

In other words, in the first optical system described above, a critical angle at which a part of the irradiation light from the light source means 14 provided at a remote place is guided into the case 12 by the light transmission means 40a and causes total reflection. At the above predetermined angle, the reflection boundary surface 12m at the bottom of the case is irradiated as the projection light 22u and further totally reflected by the reflection boundary surface 12n. The reflected light 24u is received by the light transmission means 42a and provided at a remote place. The light is transmitted to the light receiving element 16 in the control unit 39 and input to the control means 30 that also serves as the detection means 18 via the multiplexer 31, the AD conversion means 32, and the double buffer 34.
In the second optical system described above, another part of the light emitted from the light source means 14 provided at a remote place is guided into the case 12 by the light transmission means 40c, and is within the critical angle or above the critical angle. The reflecting member 5j is irradiated as the projection light 22z at a predetermined angle, and the reflected light 24z is received by the light transmission means 42c and transmitted to the light receiving element 16c provided at a remote place. The multiplexer 31 and the AD conversion means 32 The control means 30 also serving as the detection means 18 is input via the double buffer 34. Further, the bottom of the case 12 is configured by using a transmitted light member 12d made of a transparent material or a translucent material as a base material, and the outside thereof is made of a light-shielding synthetic resin or the like except for the light irradiation surface and the reflection surface / light reception surface. It is preferable to cover or configure with a light shielding material and to be integrally formed with the transmitted light member 12d. When such a light shielding member is used, it is not easily affected by ambient noise light even without the holder 5, and liquid leakage is detected when liquid leakage enters. Even if the target floor surface is white or a mirror surface, an optical structure that does not receive unnecessary reflected light from the floor surface can be realized.

Thus, in the control unit 39, the light receiving means 16 and 16c constantly check the amount of reflected light on the leakage detection surface, and in the example of FIG. 8, if the predetermined amount of reflected light is not detected, the leakage is detected, or It is determined that an installation abnormality has occurred, and the abnormality detection signal is output to the external control unit via the wire 26 as in the conventional case, and the abnormality detection signal is transmitted via the wireless communication means 37 including a wireless LAN. The data is transmitted to a wireless reception means 79c of an alarm means 70b described later.
Further, in the liquid leakage sensor 20b, the holder 12 is not used, and the case 12 is used as a single liquid leakage sensor. Therefore, an arm-shaped pressure contact means for fixing the case 12 from the side wall 61 or the side surface 61 of a building or device or the like. 60 is extended to the case upper lid, and one end 62 thereof is fixed to the building 61 side by a fixing member 64, and the other end 66 is pressed against the upper portion of the case to prevent the case 12 from falling.

Further, in the example of FIG. 8, the high-speed liquid leakage drawing means 6 b is configured only on the case 12 side, and the configuration is, for example, between the case bottom 12 d and the liquid leakage detection target bottom surface 99. The rectangular protrusion 12u having a wedge-shaped tip 12v is formed of a transparent material or a semi-transparent material with respect to the case bottom 12d, and the main body 12d and the high-speed liquid leakage drawing means 6b It is made of a synthetic resin material which is integrally molded and can be bent / divided. The protrusion 12u is preferably formed of an absorbing material / translucent material for liquid leakage detection projection light, and the bottom surface 12w of the protrusion 12u does not come into close contact with the bottom surface 99 of the liquid leakage detection target, and is between the bottom surface 99. A parallel gap d6 having a predetermined gap d6 = 1 mm or less (preferably 0.9 mm or less, more preferably 0.5 mm or less) is formed, and at 20 ° C., 6 × 10 ⁻² N / m or less. A certain low surface tension leakage 2a is diffused at high speed to the bottom surface 12w facing the leakage detection target bottom surface 99 by utilizing the capillary phenomenon of the parallel gap portion d6. The tip 12v of the protrusion 12u at one end is parallel to the total reflection surface 12m of the case 12 with a predetermined gap d7 = 1 mm or less (preferably 0.9 mm or less, more preferably 0.5 mm or less). Forming void d7 and / or lower end A wedge-shaped gap d7 that gradually narrows upward with a maximum gap d7 of 1 mm or less (preferably 0.9 mm or less, more preferably 0.5 mm or less), and utilizes the capillary phenomenon of the gap d7. Then, the liquid leakage 2a having a low surface tension of 6 × 10 ⁻² N / m or less at 20 ° C. is against gravity and above the predetermined leakage detection position on the reflection boundary surface 12m for leakage detection. Even from a leak detection target bottom surface 99, a small amount can be directly and quickly pulled up.

As the synthetic resin member for integral molding, a general thermoplastic resin or thermoplastic elastomer can be used. Examples of the thermoplastic resin include polyethylene terephthalate, amorphous polyethylene terephthalate, and polyethylene. Polystyrene resin can be used as the thermoplastic elastomer for integral molding.
Specifically, the case bottom portion is integrally formed by connecting the main body portion 12d and the high-speed liquid leakage drawing means 6b with a hinge, and the main body portion 12d and the high-speed liquid leakage drawing means 6b are V-shaped at the outer periphery. It is connected by a groove part, and is integrally formed of a synthetic resin material, that is, a thermoplastic resin or a thermoplastic elastomer, and is bent to a total reflection surface 12m side through a V-shaped groove part. A gap portion d7 is formed through a plurality of small protrusions having a predetermined height d7 formed on the tip end side of 12v, and a predetermined height d6 formed on the surface 12w side of the high-speed liquid leakage drawing means 6b. When bent through a plurality of small protrusions, a gap d6 is formed between the bottom surface 99 of the leak detection target and an opening / closing mechanism that generates a repulsive force is configured. Accordingly, when the main body 12d of the case and the high-speed liquid leakage drawing means 6b are bent toward the total reflection surface 12m side and closed in a substantially horizontal state with respect to the installation surface of the case 12, the pressure contact means from its own weight or from the outside 60, the main body portion 12d and the high-speed liquid leakage drawing means 6b can maintain the state of forming the gap portion d7, and form a part of the optical path of the optical installation abnormality detection means 4b. That is, when the case 12 is installed on the horizontal liquid leak detection target bottom surface 99, the installation surface of the case 12 is horizontal / parallel to a reference horizontal plane defined by a level or the like.

Next, with reference to FIG. 9, an example of the configuration of the separately installed explosion-proof alarm means 70b will be described. The zener barrier 78a is connected to the control unit 39 from the power source 79a installed separately in a safe space (non-hazardous place). Via the identification number setting unit 79d for distinguishing and identifying the alarm unit 70b from the other alarm unit 70b or the like separately installed. The output of (for example, consisting of a dip switch or the like) is input to the control unit 79b, and the alarm means 70b further determines that the control unit 79b has detected a leak from the control unit 39 or that an installation abnormality has occurred. In this case, a wireless receiving means 79c for receiving an abnormality detection signal output from the wireless communication means 37 is provided, and the electric power from the Zener barrier 78a is provided via the switch means 79e. When power is supplied to the output drive means 79h, a warning light 79k such as a patrol light composed of a red LED or the like is driven to drive, and an abnormality occurrence warning sound is emitted into the air via the sound generation means 72, the resonator 75, and the like. It has come to be.
In the configuration in which the leak sensor 20b and the alarm means 70b including the sounding means 72 are separately installed and the leak sensor 20b and the alarm means 70b are connected to each other wirelessly, the separated alarm means is provided. 70b is an upper space of the liquid leakage detection system 1b, and can be distinguished from other liquid leakage containers 98 in an upper space formed by extending the horizontal section of the liquid leakage storage portion 98 substantially vertically upward. It is preferable to install it in a high-visibility upper space position separated from each other by a predetermined distance (for example, within 2 m, more preferably within 1.5 m, further preferably within 1 m). By using the means 70b, leakage detection and / or alarm processing of volatile liquids and flammable liquids can be carried out very safely and reliably, and special adjustment and maintenance / monitoring work can be performed. Training There is also anyone advantage that can be easily without receiving.

In this configuration, the operation will be described next. In the high-speed liquid leakage drawing means 6 of FIG. 5 and the high-speed liquid leakage drawing means 6b of FIG. The light transmission / reception light transmission means is added to a part of the optical path and is completely the same except that it is added. It is the same.
Specifically, first, in the optical installation abnormality detection means 4b, the projection light 22z from the light source means 14-light transmission means 40c is applied to the reflector 5j provided on the upper surface of the high-speed liquid leakage drawing means 6b, at a critical angle. The reflected light 24z is received by the light transmission means 42c-light receiving means 16c, converted into an electrical signal, and input to the control means 30. The reflective surface based on the reflective material 5j such as white or mirror surface can be provided on the upper surface of the protrusion 12u, and can be formed by bonding, melting, and press-fitting to the protrusion 12u, or the protrusion An uneven reflecting surface may be formed on the upper surface of 12u to form a reflecting surface for the projection light 22z.

  On the other hand, when the main body 12d and the protrusion 12u of the case 12 do not form the gap d7 at a predetermined interval, the repulsive force generated from the hinge mechanism causes the main body 12d and the protrusion 12u to An opening / closing mechanism that can maintain the state where the main body 12d and the protrusion 12u are opened at a distance d7 or more is energized to the case 12 in advance. Therefore, in the abnormal installation state, a normal second optical path is not formed, and the projection light diffuses into a gas layer such as air, so that the optical path 22z / of the projection light and the reflected light of the optical installation abnormality detection means 4b described above. 24z cannot be formed at a normal position, and an abnormal installation of the case 12 is easily detected, and the control unit 39 provided in the non-hazardous area is provided with an abnormal installation alarm signal (or an error signal) via the control means 30 comprising an MPU or the like. Error Code ER-A) is a digital output to the outside by a cable 26, leakage sensor 20b is in error standby state.

  At this time, the installation abnormality detection signal is further emitted as a radio signal by the wireless communication means 37 in the control unit 39 provided in the non-hazardous area from the installation abnormality detection means 4b, and the alarm means 70b provided in the danger area. When the radio abnormality detection signal is received by the receiving means 79c, the control unit 79b supplies the power supplied from the Zener barrier 78a to the output driving means 79h via the switch means 79e, and a warning light 79k such as a patrol light is generated. While being lit, an abnormality occurrence warning sound is radiated to the outside through the sound generation means 72, the resonator 75, and the like. When the common alarm means 70b is shared by the plurality of liquid leakage sensors 20b or when a plurality of alarm means 70b are installed in a nearby space, the plurality of alarm means 70b are mutually connected. In order to make a distinction, it is preferable to add an identification number or the like identifying each alarm means to the radio abnormality signal radiated from the communication means 37 and output the radio detection signal. The identification number is automatically extracted by the control unit 79b, and compared with the identification number output from the setting unit 79d, it is determined whether or not the alarm unit 70b is selected.

  Thus, when the alarm means 70b is specified by the identification number or the like, the sound generating means 72 is driven by the output driving means 79h of the alarm means 70b, and the vibration is amplified by the resonator 75 and radiated into the air, which is processed separately. The operator who has been warned by the installed abnormality alarm signal 26 immediately knows where the installation abnormality of the leak sensor is occurring, or the floor surface and the leak container one by one as in the past. It is not necessary to inspect the bottom surface of the unit, and if you rush to the site where the alarm occurred, you can very easily rely on the resonance-amplified leakage source warning sound to place the installation abnormality detection point at another leakage sensor installation point. And can be specified separately.

In a normal normal installation state in which such an alarm signal is not output, the liquid leakage sensor 20b is in an operating state, and when no liquid leakage exists, the optical path 22z / light of the projection light / reflected light of the optical installation abnormality detection means 4b. 24z is formed at a normal position, the projection light 22z from the light source means 14-light transmission means 40c is reflected by the reflection surface 5j of the protrusion 12u, and the reflected light 24z is transmitted via the light transmission means 42c. The normal installation state of the liquid leakage sensor 20b is easily detected by inputting the output to the light receiving element 16c and comparing the output with the normal reflected light level by the detecting means 18.
Further, the projection light 22u from the light source means 14-light transmission means 40a forming the liquid leakage detection optical system is totally transmitted from above to below the first total reflection surface 12m at the total reflection surface 12m above a predetermined critical angle. It is irradiated at a predetermined incident angle corresponding to the refractive index of the transparent or translucent material 12d so as to be reflected, and the total reflected light 22v is projected onto the second total reflection surface 12n, and the total reflection from the total reflection surface 12n. The reflected light 24u is received at one end of the light transmitting means 42a at a predetermined light receiving angle corresponding to the refractive index of the transparent or translucent material 12d, and transmitted to the light receiving means 16 via the light transmitting means 42a. The leakage detection light propagating through the path is converted into an electric signal by the photoelectric conversion element 16, and the output is digitally processed in the control means 30 that also serves as the detection means 18, or the analog output of the light receiving means 16 is directly output. Analog comparator It is input to the analog arithmetic means comprising, in the control means 30 which also serves as a detection unit 18 which is an analog circuit, is analog processing. In the case where there is no leakage, in any of the above examples, a normal amount of received light is detected by any of the light receiving means, and the phenomenon of a decrease in the amount of received light does not occur.

Next, when the leaked liquid 2a having a low surface tension of 6 × 10 ⁻² N / m or less at 20 ° C. has diffused in the form of a thin film layer on the bottom 99 of the leak detection target, the high-speed leak drawing means 6b When the leak 2a at the liquid level d1 has diffused to the area of the leak detection target bottom face 99 facing the bottom face 12w of the rectangular protrusion 12u that forms a part of the rectangular protrusion 12u, the leak detection target bottom face 99 and the case bottom face Due to the parallel gap portion d6 formed between 12w and the gap d6, the distance between the gap d6 and the liquid level d1 of the liquid leakage 2a is substantially the same length, or the length of the liquid level d1> the gap d6. If it is set, the leak 2a is rapidly drawn into the parallel gap d6 using the capillary phenomenon of the gap d6 (2a1 in FIG. 5), the leak 2a contacts the bottom surface 12w, It diffuses at high speed over the entire case bottom surface 12w facing the leak detection target bottom surface 99.

  Thereafter, when the leaked liquid 2a diffuses at one end of the bottom surface 12w to the lowermost end part forming one end of the tip end part 12v of the projecting part 12u (2a2 in FIG. 5), the leaked liquid 2a further flows into the total reflection surface of the case 12 Since it reaches one end of the parallel gap part d7 formed by 12m and the tip part 12v, and the gap part d7 is set so that the capillary phenomenon of the liquid leak 2a appears in the predetermined gap d7, the liquid leak 2a Even if the amount of leakage is small, the liquid leakage detection target bottom surface 99 is promptly and directly pulled up to a position above the predetermined leakage detection position of the leakage detection reflective boundary surface 12m against gravity. 2a3) in FIG. Thus, when the leaked liquid 2a passes above the predetermined leak detection position of the leak detection reflective boundary surface 12m, most of the light 22u projected from the light source means 14 is totally reflected by the total reflection surface 12m. First, the rectangular protrusion 12u formed by the projection light absorber / translucent material after the bottom portion 12d and the total reflection surface 12m substantially straightly traveled, and after the liquid leakage 2a filled in the gap d7 refracted straight. In addition, it travels substantially straight through the leaked liquid 2a filled in the gap d6, is reflected by the leak detection target bottom surface 99, and propagates and travels in the direction opposite to the total reflection surface 12n. Accordingly, the light 24u that is totally reflected by the total reflection surface 12m that forms a part of the optical path for detecting leakage and then totally reflected by the total reflection surface 12n is received by one end of the light transmission means 42a, and the light transmission means. The amount of received light transmitted to the light receiving means 16 via 42a is greatly reduced, and the output is subjected to arithmetic processing by the control means 30, so that a small amount of leaked liquid 2a is diffused thinly on the leak detection target bottom surface 99. It can be detected very quickly at the very beginning.

In addition, when a large amount of low surface tension leakage 2a leaks to the leakage detection target bottom surface 99 at once, the outer periphery of the case 12 is completely immersed in the leakage 2a, and the reflection for detecting leakage Since the predetermined leakage detection position of the boundary surface 12n is also submerged in the leakage 2a, the projection light 22u from the light source means 14 is totally reflected by the total reflection surface 12m, and the total reflection light 22v is reflected on the total reflection surface 12n. Even if it is projected, it is not totally reflected at the total reflection surface 12n due to the leaked liquid 2a, but immediately refracts the total reflection surface 12n and travels substantially straight, and further refracts inside the leaked liquid 2a filled in the gap portion d4. After traveling straight, the light is reflected by the leak detection target bottom surface 99 and propagates and travels in a direction completely unrelated to the installation position of the optical transmission means 42a. Accordingly, the amount of light 24u totally reflected by the total reflection surface 12n that forms a part of the optical path for detecting leakage is received by one end of the light transmission means 42a, and the light transmission means 42a is reduced. The light receiving output transmitted to the light receiving means 16 through the arithmetic processing is processed by the control means 30 so that a large amount of leaked liquid 2a can be detected at a very early stage.
Thus, when the leakage means 2a and / or leakage 2 is detected by the control means 30 that also serves as the leakage detection means 18, the presence / absence of leakage is digitally output via the cable 26 (leak detection error). Code ER-B).

  At this time, a leakage detection error signal is further emitted from the leakage detection means 18/30 by the wireless communication means 37 in the control unit 39 provided in the non-hazardous area, and in the alarm means 70b provided in the danger area. When this leakage error detection signal is received by the receiving means 79c, the control unit 79b supplies the power supplied from the Zener barrier 78a to the output driving means 79h via the switch means 79e, and a warning light 79k such as a patrol light. Is driven to turn on an error, and an abnormality occurrence warning sound that is resonance-amplified via the sound generation means 72, the resonator 75, and the like is emitted to the outside. When the common alarm means 70b is shared by the plurality of liquid leakage sensors 20b or when a plurality of alarm means 70b are installed in a nearby space, the plurality of alarm means 70b are mutually connected. In order to make a distinction, it is preferable to add an identification number or the like identifying the alarm means to the radio abnormality signal radiated from the communication means 37 and output the radio detection signal. The identification number is automatically extracted by the control unit 79b, and compared with the identification number output from the setting unit 79d, it is determined whether or not the alarm unit 70b is selected.

  Thus, when the alarm means 70b is specified by the identification number or the like, the sound generating means 72 is driven by the output driving means 79h of the alarm means 70b, and the vibration is resonantly amplified by the resonator 75 and radiated into the air. When an operator who has been warned by the processed leak detection error signal immediately rushes to the site where the leak has occurred, he or she will approach the resonance-amplified alarm sound source, thereby leaking the leak at any location. It is not necessary to inspect the floor surface or the bottom of the liquid leakage storage part one by one as in the past, whether there is a liquid sensor installation abnormality, and it is extremely easy to locate the liquid leakage occurrence point to another liquid leakage It can be specified separately from the sensor installation location.

Next, when the leaked liquid 2 (as shown in FIG. 6D) having a surface tension of 6 × 10 ⁻² N / m or more at 20 ° C. has diffused into the leak detection target bottom surface 99, In the example of FIG. 8, even if the liquid leak 2 at the liquid level d3 diffuses into the parallel gap portion d4 formed between the bottom surface 99 and the case bottom portion 12d, the thin paper 8 is not inserted. The leak detection target bottom surface 99 is diffused in the direction of the total reflection surface 12n. Thus, when the leakage 2 reaches the predetermined leakage detection position on the leakage detection reflection boundary surface 12n, the projection light 22u from the light source means 14-light transmission means 40a is totally reflected by the total reflection surface 12m, The total reflected light 22v is not totally reflected at the total reflection surface 12n due to the liquid leakage 2, but is refracted through the total reflection surface 12n and travels substantially straight, and further refracts straight through the liquid leakage 2. It is reflected by the detection target bottom surface 99 and propagates and travels in a direction that is completely unrelated to a predetermined position where one end of the light transmission means 42a is installed. Accordingly, the amount of light 24u totally reflected by the total reflection surface 12n that forms a part of the optical path for detecting leakage is received by one end of the light transmission means 42a, and the light transmission means 42a is reduced. The output of the light receiving means 16 transmitted via the control means 30 is processed by the control means 30 and detected at a very high speed at the very early stage when the leaked liquid 2 starts to diffuse thinly into the leak detection target bottom surface 99. Can do.

Further, when a large amount of liquid leakage 2 occurs at a time, the entire outer periphery of the case 12 is immersed in the liquid leakage 2 and the predetermined liquid leakage detection position of the liquid leakage detection reflection boundary surface 12n is also in the liquid leakage 2 Even if the projection light 22u from the light source means 14-light transmission means 40a is totally reflected by the total reflection surface 12m and the total reflection light 22v is projected on the total reflection surface 12n, the liquid leakage 2 is present. In addition, the total reflection surface 12n does not totally reflect, but immediately refracts the total reflection surface 12n and travels substantially straight, and further refracts straight in the leaked liquid 2 filled in the gap portion d4. It is reflected and propagates and travels in a direction that has nothing to do with the position where one end of the optical transmission means 42a is installed. Therefore, the amount of light 24u totally reflected by the total reflection surface 12n that forms a part of the optical path for detecting leakage is received by the light receiving means 16 via the light transmission means 42a is greatly reduced. The output is arithmetically processed by the control means 30, and a large amount of leakage 2 can be detected at a very high speed at a very early stage.
Thus, when the leakage means 2a or 2 is detected by the control means 30 that also serves as the leakage detection means 18, an operator or the like is warned via the cable 26, so the presence or absence of leakage is digitally output (leakage). Liquid detection error code ER-B). In the light receiving process described above, it is also possible to improve the sensitivity of the light receiving means (elements) 16 and 16c by collecting reflected light widely by a light collecting means such as a lens or a concave mirror.

  At this point, a wireless leakage detection error signal is further emitted from the leakage detection means 18/30 by the wireless communication means 37 in the control unit 39 provided in the non-hazardous area, and an alarm means 70b provided in the danger area. When the wireless leak error detection signal is received by the receiving means 79c, the control unit 79b supplies the power supplied from the Zener barrier 78a to the output driving means 79h via the switch means 79e, and a warning such as a patrol light. The lamp 79k is driven to turn on, and an audible abnormality warning sound that is amplified by resonance is emitted to the outside via the sound generating means 72, the resonator 75, and the like. Thus, when the alarm means 70b is specified by the identification number or the like, the sound generating means 72 is driven by the output driving means 79h of the alarm means 70b, and the vibration is amplified by the resonator 75 and radiated into the air, which is processed separately. The operator who has been warned by the leaked detection error signal immediately detects where the leak sensor installed at the location is abnormal, and as usual, the floor surface and the leak containment one by one It is not necessary to inspect the bottom surface of the unit, and when a warning is dispatched to the site where an alarm is generated, the leakage occurrence point can be distinguished from other leakage sensor installation points and specified.

  Therefore, according to the leak sensor 20b having the structure as shown in FIG. 8, only the leak sensor 20b is placed on the leak detection target bottom surface 99, and the influence of extraneous light is almost eliminated even without the holders 4, 5 and the thin paper 8. Without leaking, the leak 2a or 2 quickly detects the leak at the initial stage of the leak that leaked a small amount to the leak detection bottom surface 99 before reaching the top surface of the holder 4 There is an advantage that can be. In addition, since no electrical signal flows through the leak detection unit, even volatile leaks can be detected extremely safely, even if a large amount of leaks leaks at once. The liquid leakage can be detected by checking the leakage in double and triple, and the reliability of the leakage detection process can be further improved. By changing the length of the light transmission means 40/42, the light source means 14 and The physical distance between the light receiving means 16, 16c and the like and the reflection boundary surface 12m / 12n and the like can be changed to a desired variable distance.

Further, when the case main body 12d and the protrusion 12u cannot maintain the predetermined distances d6 and d7, the optical path of the optical installation abnormality detecting means 4b is not formed at the predetermined position, and is generated from the hinge mechanism. Due to the repulsive force, the main body portion 12d and the projection portion 12u are in an abnormal installation state where the main body portion 12d and the projection portion 12u are maintained in an open abnormal state in which the main body portion 12d and the projection portion 12u are in an abnormal state. Since the light reflection path is greatly bent, an abnormal installation state can be easily detected, and a leak error and an abnormal installation error can be detected separately, transmitted, and dealt with.
Note that the thin paper 8 can also be used in the leak sensor 20b of FIG. 8 as in FIG.

  In the above embodiment, the detection of the leakage of the resist solution supplied to the resist solution application mechanism 81a and the detection of the leakage of the temperature adjustment liquid for the resist solution has been described. However, the leakage and development of the developer supplied to the development mechanism 81b are described. The same can be applied to the detection of leakage of the liquid temperature control liquid as described above. It can also be applied to etching processing, cleaning processing, and the like. Furthermore, the present invention can also be applied to detection of liquid leakage from a tank that temporarily stores the processing liquids. Examples of the cause of the liquid leakage include damage to each liquid tank, overflow due to a supply system failure, leakage from a piping section, overflow due to a failure in the discharge system, and the like.

In the above embodiment, the processing apparatus according to the present invention is applied to a semiconductor wafer coating / developing apparatus. However, the present invention is not limited to this apparatus, and other semiconductor wafer processing apparatuses, LCD substrates, and glass substrates are used. Of course, the present invention can also be applied to a processing apparatus such as a CD / DVD substrate. According to the liquid leakage detection system of the present invention, since it is configured as described above, it is possible to accurately and safely detect the leakage of the processing liquid and the temperature control liquid, Corrosion and the like can be prevented. In addition, when the occurrence of leakage is detected, it is possible to intuitively understand where the leakage is from spatially by means of a resonance-amplified audible alarm warning sound, which makes maintenance easier and the processing device The processing efficiency can be improved.

Note that the high-speed liquid leakage drawing means can be optically configured only on the holder side. Further, even if it is not an explosion-proof leakage sensor, as shown in FIG. 7, it is possible to connect the leakage sensor unit and the alarm means to each other by wireless communication means.

It is a block diagram which shows the mechanical 1 structural example at the time of applying the liquid leak detection system 1a of this invention to a coating and developing apparatus. The leak detection unit of the present invention is an example of a configuration in which a leak sensor 20a and an alarm means 70a including a sounding means are integrally formed. It is the sectional view and the enlarged view. It is a figure which shows one structural example of the holder 5 of this invention. It is an expanded sectional view which shows the principle of operation of the high-speed liquid leakage drawing-in means 6 of this invention. It is a block diagram which shows one structural example of the signal processing of the leak sensor 20a of this invention. It is a block diagram which shows one mechanical structural example of the explosion-proof type leak detection system 1b of this invention. The leak detector is an example of a configuration in which the leak sensor 20b and the alarm means 70b are separated and installed. It is a block diagram which shows one structural example of the signal processing of the explosion-proof alarm means 70b of this invention.

Explanation of symbols

1a, 1b, 1c Leakage detection system 2, 2a Leakage 4 Installation abnormality detection means 5 Holders 5s, 5t, 12m, 12n Optical boundary surface 6, 6b High-speed leak drawing means 8 Thin paper d, d1-d8 Cavity 12 Cases 14 and 14b Light source means 16 and 16c Light receiving means 20a and 20b Liquid leakage sensors 22u and 22z Projected light 24u and 24z Reflected light 30 Control means 37 and 79c Communication means 39 and 700 Control units 40a, 40c, 42a and 42c Light transmission means 70a, 70b Alarm means 72 Sound generation means 75 Resonator 79k Warning light 98 Leakage container 99 Bottom surface, floor surface

Claims (10)

In the leak sensor,
The liquid leakage sensor is installed in the internal space of the liquid leakage storage unit, and the internal space of the liquid leakage storage unit and / or the liquid leakage storage unit with respect to the installation position of the liquid leakage sensor An alarm means including a sound generation means having a resonator is provided within a spatial range including at least one of the upper spaces,
When the liquid leakage sensor detects a sensor abnormality, the sound sensor having at least the resonator can distinguish the liquid leakage sensor installed outside the space range and specify the installation position of the liquid leakage sensor. In addition, a sensor for detecting abnormality of the leak sensor is alerted by amplifying an audible frequency output sound output from the sounding means by the resonator.     The liquid leakage sensor according to claim 1, wherein the liquid leakage sensor and a sound generation unit having the resonator are integrally formed.     The liquid leakage sensor according to claim 1, wherein the liquid leakage sensor is divided into a main body portion and a lid portion, and sound generation means having the resonator is formed integrally with the lid portion.   4. The sound generation means includes means for sounding by hitting a resonator and / or a whistle or siren and / or means for sounding by vibration. The liquid leakage sensor described in 1.     The audible alarm sound emitted from the sound generation means having the resonator is an intermittent sound and / or a continuous sound whose frequency is constant or variable, and an intermittent sound and / or a continuous sound whose sound color is constant or variable. Intermittent sound and / or continuous sound with constant or variable sound intensity, intermittent sound and / or continuous sound with constant or variable sound pitch, intermittent sound and / or continuous sound with constant or variable duty ratio The liquid leakage sensor according to any one of claims 1 to 4, comprising an alarm sound that is a sound or a combination thereof.   The liquid leakage sensor according to claim 1, wherein the alarm means further includes a warning light.   The liquid leakage sensor according to claim 6, wherein the warning light includes a patrol light and / or an LED.   The liquid leakage sensor according to claim 6 or 7, wherein the warning means changes the brightness of the warning light in response to a change in an audible alarm sound transmitted from the sound generation means.   When the audible alarm sound transmitted from the sound generation means warns of the liquid leakage abnormality of the sensor and the installation abnormality of the sensor, an alarm is generated with a different transmission sound so that any sensor abnormality can be identified. The liquid leak sensor according to any one of claims 1 to 8.   The liquid leakage sensor according to claim 1, wherein the liquid leakage sensor has an explosion-proof structure.

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