JP2006292760A - 可変軸感度を有する3軸加速度計 - Google Patents
可変軸感度を有する3軸加速度計 Download PDFInfo
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- JP2006292760A JP2006292760A JP2006109862A JP2006109862A JP2006292760A JP 2006292760 A JP2006292760 A JP 2006292760A JP 2006109862 A JP2006109862 A JP 2006109862A JP 2006109862 A JP2006109862 A JP 2006109862A JP 2006292760 A JP2006292760 A JP 2006292760A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Abstract
【解決手段】支持材/センサは、取り付けパッドの間に吊され、発振器40により振動を発生する両頭デュアルビーム音叉34であるのが好ましい。静定支持システムに必要な支持材/センサを超える1つまたは複数の支持材/センサを加えることにより、支持システムは不静定にされ、したがって1つまたは複数の方向で敏感である。
【選択図】図3
Description
12,14;16,18;20,22 支持材
30 筐体
32 加速装置モジュール
34 音叉または支持材/センサ
36、38 取り付けパッド
40 発振器
42 支持材/センサ
44 支持材/センサ
42、44 リード線
24 支持材/センサ
50、52、62 支持材/センサ
54、56 支持材/センサ
58、60 支持材/センサ
70、72、74、76 支持材/センサ
78、80、82、84 支持材/センサ
86、88、90、92 支持材/センサ
Claims (10)
- 3つの次元で加速度を測定するためのセンサであって、
慣性質量(10)、および前記慣性質量用の支持システムであって、基部(30)および前記基部と前記慣性質量との間に延びて前記慣性質量を直交方向で吊し不静定構造物をなす複数の支持部材(12、14、16、18、20、22、24)を備える支持システムと、
前記支持部材内の加速度誘起応力を測定し、それにより質量の加速度の測定を行えるようにする応力センサ(34)とを備えるセンサ。 - 前記複数の支持部材は、前記基部と前記慣性質量との間に少なくとも7つの支持部材(12、14、16、18、20、22、24)を含む請求項1記載のセンサ。
- 前記複数の支持部材は、それぞれ前記直交方向で前記基部と前記慣性質量との間に延びる支持部材の対(12と14、16と18、20と22と24)を含み、支持部材のそれぞれの対の個々の支持部材は互いに平行に延びており、前記複数の支持部材はさらに前記直交方向のうちの1つの方向に前記基部と前記慣性質量との間で延びて前記一方の直交方向の剛性が他方の直交方向における剛性を超えるようにする他の支持部材(24)を含む請求項1記載のセンサ。
- 前記複数の支持部材の個々の支持部材(12と14、16と18、20と22と24)は、前記直交方向に概して平行な前記質量の反対側から延びる請求項1記載のセンサ。
- 前記複数の支持部材(12と14、16と18、20と22と24)は、それぞれ前記直交方向で前記基部と前記慣性質量との間に延びる支持部材の対を含み、支持部材のそれぞれの対の個々の支持部材は互いに平行に延びており、前記複数の支持部材(24)のうちの少なくとも1つは前記直交方向のうちの少なくとも他の1つの方向で加えられる加速度に対する感度と異なる前記直交方向のうちの1つの方向で加えられる加速度に対する感度をもたらす請求項1記載のセンサ。
- 前記支持部材(24)は、さもなければ前記支持システムを静定にする支持部材の3つの対(12と14、16と18、20と22)に加えて支持部材である請求項5記載のセンサ。
- 前記支持部材のそれぞれの対の個々の支持部材(12、14、16、18、20、22)は、前記質量の反対側から延びる請求項6記載のセンサ。
- 前記複数の支持部材(12と14、16と18、20と22と24)は、それぞれ前記直交方向で前記基部と前記慣性質量との間に延びる支持部材の対を含み、支持部材のそれぞれの対の個々の支持部材は互いに平行に、前記質量の反対側から延びており、前記複数の支持部材はさらに前記直交方向のうちの2つの方向で前記慣性質量と前記基部との間に少なくとも2つの追加の支持部材(22、24)を含み、それぞれ前記2つの直交方向の剛性が他方の直交方向の剛性を超えるようにする請求項1記載のセンサ。
- 前記支持部材のそれぞれは、水晶振動子ビーム共振器を備える請求項1記載のセンサ。
- 前記支持部材のそれぞれは、水晶振動子デュアルビーム共振器を備える請求項1記載のセンサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/105,474 US7178401B2 (en) | 2005-04-14 | 2005-04-14 | Three axis accelerometer with variable axis sensitivity |
US11/105,474 | 2005-04-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006292760A true JP2006292760A (ja) | 2006-10-26 |
JP5090660B2 JP5090660B2 (ja) | 2012-12-05 |
Family
ID=37101483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006109862A Expired - Fee Related JP5090660B2 (ja) | 2005-04-14 | 2006-04-12 | 可変軸感度を有する3軸加速度計 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7178401B2 (ja) |
JP (1) | JP5090660B2 (ja) |
KR (1) | KR101332136B1 (ja) |
CA (1) | CA2542216A1 (ja) |
CH (1) | CH698079B1 (ja) |
RU (1) | RU2390030C2 (ja) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
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US7487679B2 (en) * | 2005-05-10 | 2009-02-10 | Eaton Corporation | Vehicle vibration analyzer |
US7437255B2 (en) * | 2007-01-22 | 2008-10-14 | General Electric Company | Method and system for calibrating triaxial acceleration sensors |
US8006557B2 (en) * | 2007-05-16 | 2011-08-30 | Intellisense Software Corporation | Multi-axis sensor |
FR2919393A1 (fr) * | 2007-07-27 | 2009-01-30 | Thales Sa | Accelerometre simplifie d'unite de mesure inertielle a cout reduit ou securite amelioree. |
US8616054B2 (en) * | 2008-08-06 | 2013-12-31 | Quartz Seismic Sensors, Inc. | High-resolution digital seismic and gravity sensor and method |
US8113053B2 (en) * | 2008-09-30 | 2012-02-14 | General Electric Company | Capacitive accelerometer |
US8453506B2 (en) | 2010-11-29 | 2013-06-04 | General Electric Company | Spring mounting element for an accelerometer |
US9140717B2 (en) | 2011-09-20 | 2015-09-22 | The Regents Of The University Of Michigan | Apparatus and method for identifying and analyzing the free flight dynamics of a body |
US20130068017A1 (en) * | 2011-09-20 | 2013-03-21 | Noel Perkins | Apparatus and method for analyzing the motion of a body |
US20140090471A1 (en) * | 2011-12-13 | 2014-04-03 | Ying Wen Hsu | Three-Axis Nano-Resonator Accelerometer Device and Method |
RU2488849C1 (ru) * | 2012-02-15 | 2013-07-27 | Открытое акционерное общество "Газпром" | Скважинный трехкомпонентный цифровой акселерометр |
KR101376597B1 (ko) * | 2012-07-20 | 2014-03-27 | 주식회사 내비오닉스코리아 | 이동체의 움직임 측정장치 및 그의 측정방법 |
US9032794B2 (en) | 2012-08-09 | 2015-05-19 | The Regents Of The University Of Michigan | Pitcher training apparatus and method using a ball with an embedded inertial measurement unit |
FR3001549B1 (fr) * | 2013-01-29 | 2015-01-09 | Sagem Defense Securite | Capteur accelerometrique a deux lames vibrantes ayant des axes sensibles non paralleles |
US9213889B2 (en) | 2013-03-28 | 2015-12-15 | The Regents Of The University Of Michigan | Athlete speed prediction method using data from attached inertial measurement unit |
US9645267B2 (en) | 2014-09-26 | 2017-05-09 | Quartz Seismic Sensors, Inc. | Triaxial accelerometer assembly and in-situ calibration method for improved geodetic and seismic measurements |
US9689888B2 (en) | 2014-11-14 | 2017-06-27 | Honeywell International Inc. | In-plane vibrating beam accelerometer |
US10823754B2 (en) | 2014-11-14 | 2020-11-03 | Honeywell International Inc. | Accelerometer with strain compensation |
US9810535B2 (en) | 2015-02-10 | 2017-11-07 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope systems and method |
BR112018008500A2 (pt) | 2015-10-30 | 2019-06-18 | Ion Geophysical Corp | sistemas sísmicos de fundo de oceano |
RU2657351C1 (ru) * | 2017-08-18 | 2018-06-13 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") | Микроэлектромеханический первичный преобразователь ускорения |
US10648811B2 (en) * | 2017-12-01 | 2020-05-12 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope system |
CN108802427B (zh) * | 2018-06-11 | 2020-06-02 | 南京林业大学 | 预紧式并联六维加速度传感器及其测量和灵敏度分析方法 |
EP3850373A1 (en) | 2018-09-13 | 2021-07-21 | ION Geophysical Corporation | Multi-axis, single mass accelerometer |
US11733263B2 (en) * | 2018-09-21 | 2023-08-22 | Analog Devices, Inc. | 3-axis accelerometer |
US11754590B2 (en) * | 2019-01-24 | 2023-09-12 | Uti Limited Partnership | Particle based accelerometer |
RU204922U1 (ru) * | 2019-03-19 | 2021-06-17 | Российская Федерация, От Имени Которой Выступает Министерство Промышленности И Торговли Российской Федерации | Чувствительный элемент трехосевого микромеханического акселерометра |
RU2729175C1 (ru) * | 2019-10-02 | 2020-08-04 | Акционерное общество "Научно-исследовательский институт электронных приборов" | Способ виброиспытаний изделий |
US11474126B2 (en) | 2020-03-05 | 2022-10-18 | Quartz Seismic Sensors, Inc. | High precision rotation sensor and method |
Citations (1)
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US20040025590A1 (en) * | 2002-08-07 | 2004-02-12 | Schaad Theo P. | Triaxial acceleration sensor |
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US3002391A (en) * | 1957-08-07 | 1961-10-03 | Borg Warner | Plural axis transducer |
US3238789A (en) | 1961-07-14 | 1966-03-08 | Litton Systems Inc | Vibrating bar transducer |
US3382724A (en) | 1965-01-04 | 1968-05-14 | North American Rockwell | Three axis accelerometer |
US4215570A (en) | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
US4398417A (en) | 1981-08-13 | 1983-08-16 | Rockwell International Corporation | Three-axis accelerometer having flexure bearing with overload protection |
US5962788A (en) | 1994-08-18 | 1999-10-05 | Btg International Limited | Transducer |
US5531115A (en) | 1995-06-29 | 1996-07-02 | Erdley; Harold F. | Self-calibrating three axis angular rate sensor |
-
2005
- 2005-04-14 US US11/105,474 patent/US7178401B2/en not_active Expired - Fee Related
-
2006
- 2006-04-06 CA CA002542216A patent/CA2542216A1/en not_active Abandoned
- 2006-04-12 JP JP2006109862A patent/JP5090660B2/ja not_active Expired - Fee Related
- 2006-04-13 RU RU2006112318/28A patent/RU2390030C2/ru not_active IP Right Cessation
- 2006-04-13 KR KR1020060033584A patent/KR101332136B1/ko not_active IP Right Cessation
- 2006-04-13 CH CH00628/06A patent/CH698079B1/de not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040025590A1 (en) * | 2002-08-07 | 2004-02-12 | Schaad Theo P. | Triaxial acceleration sensor |
Also Published As
Publication number | Publication date |
---|---|
CH698079B1 (de) | 2009-05-15 |
US7178401B2 (en) | 2007-02-20 |
RU2006112318A (ru) | 2007-10-20 |
US20060230829A1 (en) | 2006-10-19 |
JP5090660B2 (ja) | 2012-12-05 |
RU2390030C2 (ru) | 2010-05-20 |
KR20060108534A (ko) | 2006-10-18 |
KR101332136B1 (ko) | 2013-11-21 |
CA2542216A1 (en) | 2006-10-14 |
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