JP2006292484A - Inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device solving the problem of heat due to upsizing of an inspection device. <P>SOLUTION: The inspection device 1 is provided with: a work table 2 supporting a liquid crystal panel 7; a backlight 3 illuminating the liquid crystal panel 7 supported by the work table 2 from the backside; and an alignment stage 4 supporting the work table 2 and the backlight 3 and performing the positioning of the liquid crystal panel 7. An air passage 28 provided from the front side to the backside and discharging air heated by the backlight 3 to the side of the backside is provided in the alignment stage 4. The air passage 28 is provided with fans 10, 29 discharging the air heated by the backlight 3 to the side of the backside. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection apparatus that supports an inspection object plate on a work table and illuminates it with a backlight from the back thereof.

  An inspection apparatus that inspects an inspection target plate such as a liquid crystal substrate by illuminating it from the back is generally known. In such an inspection apparatus, a test target plate is supported on a work table, and a test is performed by illuminating with a backlight from the back of the test target plate.

  In such an inspection apparatus, until now, the apparatus was small, the inspection target plate was not so large, and the brightness of the backlight was not so high. Heat was never a problem.

  By the way, in the above-described conventional inspection apparatus, when the apparatus is small, there is no problem even if measures for the heat generated by the backlight are not taken. However, when the apparatus is enlarged, the heat generated by the backlight increases. This heat has caused problems. For example, in an inspection apparatus used for a liquid crystal substrate used in a large-screen liquid crystal television, the backlight itself needs to be increased in size and brightness. As a result, the liquid crystal substrate is heated and expanded by the heat generated by the backlight, and the pitch of the electrodes and the pitch of the probe needles may shift to cause poor contact.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an inspection apparatus that solves the heat problem associated with the increase in size of the apparatus.

  The inspection apparatus according to the present invention includes a work table that supports the inspection target plate, a backlight that illuminates the inspection target plate supported by the work table from the back side, and the inspection that supports the work table and the backlight. In an inspection apparatus comprising an alignment stage for aligning a target plate, an air passage that passes through the alignment stage from the front side to the back side and discharges air heated by the backlight to the back side It is provided with.

  The air passage prevents the air heated by the backlight from being discharged to the back side, thereby heating the inspection object plate.

  The air passage preferably includes a fan that discharges air heated by the backlight to the back side.

  The fan is preferably provided on the back side of the alignment stage.

  A light source storage chamber storing a light source of the backlight, an air intake port provided in a back surface of the light source storage chamber, and a fan for discharging the air heated by the backlight to the back surface side. The passage communicates with the air intake port and discharges the air taken in from the air intake port to the back side, and the fan is provided in one or both of the light source storage chamber and the air passage. It is desirable to cool the light source by drawing the air in the storage chamber and discharging it from the air passage to the back side.

  The heat source chamber is provided facing the back plate and stores heat from the light source transmitted through the back plate, and stores heat from the light source in the heat storage chamber. Desirably, the heated air around the light source is sucked into the heat storage chamber from the air intake port by the fan and discharged together with the air in the heat storage chamber from the air passage to the back side.

  As described above, according to the present invention, the following effects can be obtained.

  In order to prevent the air heated by the backlight from being discharged to the back side by the air passage and heating the inspection target plate, contact failure with the probe needle due to thermal expansion of the inspection target plate, etc. The problem due to heat can be solved.

  Hereinafter, an inspection apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. 1 is a cross-sectional view taken along line I-I in FIG. 8 showing an alignment stage of the inspection apparatus according to the embodiment of the present invention, FIG. 2 is a front view showing the inspection apparatus according to the embodiment of the present invention, and FIG. 2 is a sectional view taken along line III-III in FIG. 2 showing the inspection apparatus according to the embodiment of the invention, and FIG. 4 is a sectional view taken along line IV-IV in FIG. 5 showing the backlight of the inspection apparatus according to the embodiment of the present invention. 5 is a front view showing the backlight of the inspection apparatus according to the embodiment of the present invention, FIG. 6 is a side view showing the backlight of the inspection apparatus according to the embodiment of the present invention, and FIG. 7 is the embodiment of the present invention. FIG. 8 is a front view showing the alignment stage of the inspection apparatus according to the embodiment of the present invention, and FIG. 9 is a diagram showing the alignment stage of the inspection apparatus according to the embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line IX-IX of FIG. FIG. 11 is a plan view showing the alignment stage of the inspection apparatus according to the embodiment of the present invention, and FIG. 12 shows the alignment stage of the inspection apparatus according to the embodiment of the present invention. It is a bottom view shown.

  The inspection apparatus according to this embodiment is configured as shown in FIGS. The inspection apparatus 1 mainly includes a work table 2, a backlight 3, an alignment stage 4, an inspection unit 5, and a frame 6.

  The work table 2 is a member for supporting the liquid crystal panel 7 that is an inspection target plate. The work table 2 includes a support base 2 </ b> A for supporting the liquid crystal panel 7. A diffusion plate 2B is attached to the support base 2A. The liquid crystal panel 7 is placed outside the diffusion plate 2B. The work table 2 is attached to the alignment stage 4, and the XYZ direction and the θ rotation direction are controlled by the alignment stage 4.

  The backlight 3 is a member for illuminating the liquid crystal panel 7 supported by the work table 2 from the back side. As shown in FIG. 4, the backlight 3 mainly includes a housing 8, a lamp 9, and a fan 10.

  The housing 8 is a member for housing the lamp 9 that is a light source. The housing 8 includes a light source storage chamber 12 and a heat storage chamber 13.

  The light source storage chamber 12 is a space in which a lamp 9 that is a light source is stored. The light source storage chamber 12 is provided on the outer side (the upper side in FIG. 4) of the two spaces partitioned inside the housing 8 by the back plate 15. An opening 16 is provided outside the light source storage chamber 12, and light from the lamp 9 illuminates the back surface of the liquid crystal panel 7 from the opening 16.

  The heat storage chamber 13 is a space for storing heat from the lamp 9. The heat storage chamber 13 is provided adjacent to the back plate 15 of the light source storage chamber 12. The light source storage chamber 12 and the heat storage chamber 13 are partitioned by a back plate 15. The back plate 15 is made of a material having a high thermal conductivity so that the heat of the lamp 9 can be easily transferred into the heat storage chamber 13. That is, the heat of the lamp 9 heats the back plate 15, and the back plate 15 heats the air in the heat storage chamber 13 to store the heat of the lamp 9 in the heat storage chamber 13. The back plate 15 is provided with an air intake port 17 and communicates the light source storage chamber 12 and the heat storage chamber 13 with each other. The air intake port 17 is provided on the back surface of each lamp 9 so that the heated air around each lamp 9 is efficiently sucked into the heat storage chamber 13. The air intake port 17 is formed in an elongated hole shape according to the lamp 9.

  The lamp 9 is a light source for illuminating the liquid crystal panel 7 from the back side. The lamp 9 is composed of a thin cylindrical fluorescent tube. A plurality of the thin cylindrical lamps 9 are arranged in the light source storage chamber 12. A control unit (not shown) for the lamp 9 is provided in the heat storage chamber 13.

  The fan 10 is a fan for discharging the air in the heat storage chamber 13 to the outside. A plurality of the fans 10 are provided on the back plate 18 in the heat storage chamber 13. Each fan 10 is provided facing the ventilation hole 19. The fan 10 discharges the heated air in the heat storage chamber 13 to the outside, and the heated air around the lamp 9 is sucked into the heat storage chamber 13 through the air intake port 17 to store the heat. The air is discharged into the frame 6 together with the air in the chamber 13. The air in the frame 6 is discharged to the outside of the building through a duct (not shown) or is directly discharged to the outside of the apparatus.

  The alignment stage 4 (see FIG. 3) is a member that supports the work table 2 and the backlight 3 on the front surface thereof and aligns the liquid crystal panel 7 that is the inspection target plate. As shown in FIGS. 1 and 5 to 7, the alignment stage 4 includes an XYθ stage 4A and a Z stage 4B. The XYθ stage 4A is a part that adjusts the XY axis direction and the θ rotation direction of the liquid crystal panel 7. The XYθ stage 4A includes a moving mechanism (not shown) that moves the work table 2 in the X-axis direction and the Y-axis direction, and a rotating mechanism (not shown) that rotates the work table 2. The XYθ stage 4A is supported on the stage mounting base 20 via the moving mechanism and the rotating mechanism.

  The Z stage 4B is a member for moving the work table 2 in the Z-axis direction. The Z stage 4B directly supports the work table 2 and the backlight 3 while being supported by the XYθ stage 4A. As a result, the XYθ stage 4A and the Z stage 4B cooperate to move the work table 2 in the XYZ direction and rotate it in the θ direction. The Z stage 4 </ b> B includes a fixed plate portion 23, a rail 24, a guide 25, a slide housing portion 26, and a drive portion 27.

  The fixed plate portion 23 is disposed so as to sandwich the slide housing portion 26 from both sides thereof, and is fixed to the XYθ stage 4A. Thereby, the fixed plate portion 23 is moved in the XY axis direction by the XYθ stage 4A and rotated in the θ direction.

  The rail 24 is a member for sliding the slide housing portion 26 in the Z-axis direction. The rail 24 is attached to the inner side surface of each fixed plate portion 23 toward the Z-axis direction.

  The guide 25 is a member that is fitted to the rail 24 and guides the slide of the slide housing portion 26 in the Z-axis direction. The guide 25 is slidably fitted to the rail 24 while being fixed to the side surface of the slide housing portion 26.

  The slide housing part 26 is a member for supporting the work table 2 and the backlight 3 and sliding them in the Z-axis direction. The slide housing portion 26 is supported so as to be slidable with respect to the fixed plate portion 23. Specifically, the guide 25 is fixed to the slide housing portion 26 and is slidably supported on the fixed plate portion 23 via the rail 24 and the guide 25. A drive unit 27 is provided at the center of the slide housing unit 26. On both sides of the slide housing portion 26, air passages 28 for guiding and discharging the air taken in from the air intake port 19 are provided. The air passage 28 is formed by utilizing spaces on both sides of the slide housing portion 26 that has not been used so far. An air passage 28 is formed by providing a communication hole 28A on the front side (backlight 3 side) of the space on both sides of the slide casing 26 and providing a communication hole 28B on the back side. The communication hole 28 </ b> A is provided facing the air intake port 19. A fan 29 is provided in the communication hole 28B so that the air in the air passage 28 is discharged to the outside.

  The drive unit 27 is a member for moving the slide housing unit 26 in the Z-axis direction. The drive unit 27 mainly includes a Z-axis motor 31, a ball screw 32, and a nut 33.

  The Z-axis motor 31 is fixed to the horizontal plate portion 23 </ b> A of the fixed plate portion 23 and rotates the ball screw 32. The ball screw 32 is formed integrally with the rotation shaft of the Z-axis motor 31 and is rotatably supported by the coupling 34 on the horizontal plate portion 23A on the fixed plate portion 23 side. The nut 33 is a member for moving the slide housing portion 26 in the Z-axis direction. The nut 33 is screwed into the ball screw 32. Further, the nut 33 is fixed to the slide housing portion 26. As a result, when the ball screw 32 rotates, the nut 33 does not rotate but moves in the Z-axis direction along the ball screw 32 to move the slide housing portion 26 in the Z-axis direction.

  A backlight mounting base 35 is attached to the slide housing portion 26. A number of support columns 36 are provided around the backlight mounting base 35. A work table base 37 is attached to the upper side of the column 36. The work table 2 is attached to the work table base 37. The backlight 3 is fixed to the backlight mounting base 35 in a state where the backlight 3 is mounted in a space surrounded by the backlight mounting base 35, the column 36 and the work table base 37. The backlight mounting base 35 is provided with a communication hole 35A at a position facing the air intake port 19 and the communication hole 28A. The heat storage chamber 13 and the air passage 28 of the backlight 3 communicate with each other through the communication hole 35A, the air intake port 19, and the communication hole 28A. Thereby, the air in the heat storage chamber 13 is sucked into the air passage 28 by the fans 10 and 29 and discharged to the outside from the communication hole 28B.

  The inspection unit 5 is a member for inspecting the display state by sending an inspection signal to the liquid crystal panel 7. The inspection unit 5 is mainly composed of a probe unit 41. As shown in FIGS. 2 and 3, the probe unit 41 mainly includes a probe base 42, a probe block 43, a camera 44, and a probe stage 45.

  The probe base 42 is a member for supporting the probe block 43 and the camera 44. The probe base 42 is fixed to the frame 6 via the probe stage 45 in a state desired by the liquid crystal panel 7 placed on the work table 2. The probe block 43 is fixed to the probe base 42 with a probe needle (not shown) at the tip desired by the liquid crystal panel 7. The camera 44 is a camera for aligning the liquid crystal panel 7 while looking at the marks provided on the liquid crystal panel 7. Although three cameras 44 are provided here, there may be two cameras. The probe stage 45 supports the probe base 42 while being fixed to the frame 6.

  The frame 6 is an outer shell for supporting the work table 2, the backlight 3, the alignment stage 4, the inspection unit 5, and the like. The entire configuration is assembled according to the arrangement of the backlight 3 and the like.

[Operation]
The inspection apparatus configured as described above operates as follows.

  First, the inspection apparatus 1 is started up and the backlight 3 is turned on. Next, the liquid crystal panel 7 is conveyed to the work table 2 automatically or manually. Next, the liquid crystal panel 7 is aligned by the alignment stage 4, and an electrode (not shown) of the liquid crystal panel 7 is brought into contact with the probe needle of the probe block 43. Next, in a state where the liquid crystal panel 7 is illuminated from behind by the backlight 3, an inspection signal is sent and a lighting test is performed. At this time, the fans 10 and 29 are operated in the alignment stage 4.

  Heat is generated in the light source storage chamber 12 of the backlight 3 as the lamp 9 emits light. And the circumference | surroundings are heated with progress of test | inspection time. Thereby, the inside of the light source storage chamber 12 is heated, and the liquid crystal panel 7 placed on the work table 2 is also heated.

  On the other hand, the heat generated by the lamp 9 is transmitted to the liquid crystal panel 7 side and also to the back plate 15 side. The heat transmitted to the back plate 15 heats the air in the heat storage chamber 13.

  At this time, the air in the heat storage chamber 13 is discharged to the outside through the air passage 28 by the operation of the fans 10 and 29. Further, as the air in the heat storage chamber 13 is discharged, the heated air around the lamp 9 is sucked from the air intake port 17 of the back plate 15. Then, the air is discharged from the air passage 28 to the outside. In a clean room or the like, a duct is provided from the frame 6 to the outside of the clean room, and heat is discharged outside the clean room.

  Accordingly, the air around the lamp 9 directly heated by the lamp 9 is discharged to the outside, and the heat transmitted from the back plate 15 to the heat storage chamber 13 is also discharged to the outside at the same time. Can be minimized.

  As a result, a large amount of heat generated with an increase in the size of the inspection apparatus is efficiently cooled, and the liquid crystal panel 7 is prevented from thermally expanding to eliminate poor contact and the like. 1 can be improved in reliability.

[Modification]
In the above embodiment, the back plate 15 is formed in a flat plate shape. However, heat radiation fins may be provided on both side surfaces or one side surface of the back plate 15 in order to improve thermal conductivity. The radiating fin provided on the lamp 9 side absorbs heat generated by the lamp 9, and the radiating fin provided on the heat storage chamber 13 side releases heat into the air in the heat storage chamber 13 to heat the air. Thereby, the heat generated by the lamp 9 can be more efficiently excluded to the outside. At this time, the radiation fins may be provided on the front surface in the heat storage chamber 13.

  In the above embodiment, the inspection apparatus in which the work table 2 is inclined has been described as an example. However, the present invention is not limited to this, and the inspection apparatus in which the work table 2 is vertical and the work table 2 is horizontal is also applicable. Can be applied. Also by this, the effect | action and effect similar to the said embodiment can be show | played.

It is the II sectional view taken on the line of FIG. 8 which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the inspection apparatus which concerns on embodiment of this invention. It is the III-III arrow directional cross-sectional view of FIG. 2 which shows the inspection apparatus which concerns on embodiment of this invention. FIG. 6 is a cross-sectional view taken along line IV-IV in FIG. 5 illustrating a backlight of the inspection apparatus according to the embodiment of the present invention. It is a front view which shows the backlight of the test | inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the backlight of the test | inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the alignment stage of the test | inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention. It is IX-IX arrow directional cross-sectional view of FIG. 8 which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention. It is front sectional drawing which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention. It is a bottom view which shows the alignment stage of the inspection apparatus which concerns on embodiment of this invention.

Explanation of symbols

1: inspection apparatus, 2: work table, 2A: support base, 2B: diffusion plate, 3: backlight, 4: alignment stage, 4A: XYθ stage, 4B: Z stage, 5: inspection section, 6: frame, 7: liquid crystal panel, 8: housing, 9: lamp, 10: fan, 12: light source storage chamber, 13: heat storage chamber, 15: back plate, 16: opening, 17: air intake port, 18: back plate , 19: Air intake port, 20: Stage mounting base, 21:23: Fixed housing part, 23A: Horizontal plate part, 24: Rail, 25: Guide, 26: Slide housing part, 27: Drive part, 28: Air passage, 28A, 28B: communication hole, 29: fan, 31: Z-axis motor, 32: ball screw, 33: nut, 35: backlight mounting base, 35A: communication hole, 36: support column, 37: work table Scan, 41: probe unit, 42: probe base, 43: probe block, 44: camera, 45: probe stage.

Claims (5)

A work table that supports the inspection target plate, a backlight that illuminates the inspection target plate supported by the work table from the back side, and an alignment that supports the work table and the backlight and aligns the inspection target plate. In an inspection apparatus equipped with a stage,
An inspection apparatus comprising an air passage provided in the alignment stage so as to penetrate from the front surface side to the back surface side and for discharging air heated by the backlight to the back surface side. The inspection apparatus according to claim 1,
An inspection apparatus comprising: a fan for discharging air heated by the backlight to the back side in the air passage. The inspection apparatus according to claim 2,
An inspection apparatus, wherein the fan is provided on a back side of the alignment stage. The inspection apparatus according to claim 1,
A light source storage chamber storing the light source of the backlight, an air intake port provided on the back surface of the light source storage chamber, and a fan for discharging the air heated by the backlight to the back surface side,
The air passage communicates with the air intake port and discharges the air taken in from the air intake port to the back side,
The fan is provided in one or both of the light source storage chamber and the air passage, draws air in the light source storage chamber, discharges it from the air passage to the back side, and cools the light source. Inspection device. The inspection apparatus according to claim 4,
A heat storage chamber that is provided facing the back plate of the light source storage chamber and that stores heat from the light source transmitted through the back plate;
While storing heat from the light source in the heat storage chamber, the air heated around the light source by the fan is sucked into the heat storage chamber from the air intake port, and the air is stored together with the air in the heat storage chamber. Inspection apparatus characterized by discharging from the passage to the back side.

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