JP2006289559A - Hand-held vacuum tweezers - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To particularly easily and surely separate a protective sheet by the small delivery air volume, to prevent damage or falling of an adsorbing object by contact with a carrying vessel, and also to prevent reduction in adsorbing holding power. <P>SOLUTION: A tweezers body 1A is composed of: a gripping operation part 5 for incorporating a suction passage 9a and a delivery passage 10a; and a flow passage connecting part 6 for forming a flow passage for making the suction passage 9a and the delivery passage 10a act on the adsorbing part 1B side. An adsorbing part 1B is provided with an annular adsorbing surface 23 for arranging a large number of suction ports 17 on the outer peripheral side of an adsorbing plate 7 of a disk shape. The respective suction ports 17 are communicated by an annular communicating passage 22, and the communicating passage 22 is communicated with the suction passage 9a of the gripping operation part 5 via the flow passage connecting part 6. In the flow passage connecting part 6, a delivery port 20 for injecting compressed air into a partial upper surface on the outer peripheral side of the adsorbing objects 3 and 4, is arranged in an outside position adjacent to the suction ports 17, and the delivery port 20 is communicated with the delivery passage 10a of the gripping operation part 5 via a swirling flow generating part 18 by a spiral groove. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a hand-held vacuum tweezers that handles a suction object by holding the suction surface of the suction plate attached to the tip by gripping the tweezer body by hand and placing the suction surface in a vacuum state. Therefore, it is used when handling (sucking and holding) a thin plate-like or film-like suction object such as a silicon wafer or a compound semiconductor wafer.

This type of vacuum tweezers, for example, as disclosed in Patent Documents 1 to 3 and the like, attaches a suction plate to the tip of the tweezers body that is gripped by hand, and the tweezers body has a suction surface on the suction plate. A suction channel that communicates is provided, and the suction channel is connected to a vacuum pressure source such as a vacuum pump via a suction pipe connected to the tweezer body, and the tweezer body is a channel that communicates the suction channel with the atmosphere. It has a configuration provided with a switching mechanism.
JP 2001-35908 A JP 2001-144163 A JP 2002-368072 A

Further, when the adsorption object is a thin wafer having a large diameter, as disclosed in Patent Document 4, for example, a large number of wafers with thin film-like protective sheets interposed between the front and back surfaces of each wafer are disclosed. Are stacked and stored in a transport container (carrier case). First, the protective sheet on the surface side is sucked and held, and then the wafers are sucked and held and taken out one by one from the transport container for the next processing. The process is sequentially transferred to the process.
JP 09-129719 A

  However, if the wafer and the protective sheet are laminated for a long period of time, the lower layer side is pressurized from above, and static electricity is generated by vibration friction when stored and transported in the transport container. Since the protective sheet is flexible and breathable, it is possible to hold and hold the wafer immediately below when the protective sheet is adsorbed, or during adsorption Since there is a possibility of falling, it is difficult to sufficiently cope with the conventional vacuum tweezers disclosed in Patent Documents 1 to 4 and the like.

  Therefore, as a hand-held vacuum tweezer that can solve these problems of the prior art, the present inventor filed a prior application in Japanese Patent Application No. 2003-310934. In this prior application, a number of suction ports are provided on the outer peripheral side of the suction plate. Are provided concentrically, and a discharge port is provided on the side surface side of the suction plate to inject compressed air almost horizontally to flow along the suction surface. For the objects, the Bernoulli's theorem facilitates the peeling of the protective sheet and makes it easy and reliable to hold and hold the wafer.

In addition to the above-mentioned prior application by the present inventor, there is also a proposal of vacuum tweezers utilizing the Bernoulli effect in addition to suction holding by vacuum, as disclosed in Patent Documents 5 and 6, for example. In the case of Document 5, a suction port is provided at the center (center) of the suction plate, and a plurality of discharge ports are provided concentrically on the outer peripheral side of the suction plate. In the case of Patent Document 6, a discharge port is provided at the center (center) of the suction plate, and a plurality of suction ports are provided on the outer peripheral side of the suction plate. It is provided concentrically so that the air jetted from each discharge port flows to the outer peripheral side along the suction surface of the suction plate.
Japanese Patent Laid-Open No. 10-167470 JP 2003-128279 A

  However, as in the case of the prior application by the present inventor, in the structure in which the compressed air is ejected substantially horizontally from the discharge port provided on the side surface of the suction plate, when the suction plate is addressed to the suction target object Since it is not easy to maintain the height position, ejection angle, etc. of the discharge port under a certain condition, the function of making the surface of the suction object near the discharge port negative pressure and floating the suction object by the Bernoulli effect, It was difficult to carry out in a stable state at all times.

  Further, as in the case of the prior arts disclosed in Patent Documents 5 and 6, compression is performed along the suction surface of the suction target object from the discharge port provided on the outer peripheral side or axial center side of the suction plate to the axial center side or outer peripheral side. In a structure that allows air to flow, compressed air that is ejected from each discharge port to the adsorption surface may cause the adsorption target to fall off or be damaged if it does not flow radially with a uniform flow rate. At the same time, since compressed air is dispersed to the adsorption surface, it is necessary to eject a large amount of air from the discharge port, which increases the capacity of the discharge pump, increases the size of the entire apparatus, and particles by air agitation. There is a risk of increasing the occurrence of.

  Further, in the case of the suction holding unit in the above prior application, the diameter of the suction plate is made smaller than that of the transport container (carrier case), but the wafer is sucked and held by inserting the suction plate into the transport container. At this time, there is a possibility that the outer peripheral surface of the adsorption object such as a wafer contacts the inner peripheral surface of the transfer container and is damaged or dropped.

  Furthermore, in the case of the suction holding portion in the above-mentioned prior application, a suction flow path is formed by adhering a suction auxiliary plate to the upper surface of the suction plate provided with an annular groove for communicating each suction port by adhesion or the like. However, the adsorbing plate becomes dirty due to leaked adhesive, etc., or the adsorbing plate warps due to changes in surface accuracy over time, etc., and air is leaked between the adsorbing plate and the object to be adsorbed or the adsorption auxiliary plate, and adsorbed and retained. There is a risk of reducing the force, the manufacturing cost of the suction assisting plate and the bonding cost with the suction plate, and the weight increases and the operator's hand is burdened when used for a long time.

  Therefore, the present invention aims to provide a hand-held vacuum tweezers that can solve these problems of the prior art, and the first object is to locally implement the Bernoulli action combined with the vacuum suction action. In particular, the protective sheet can be easily and reliably peeled off with a small amount of discharged air. The second purpose is to attach a guide ring to the suction plate to prevent damage or dropping of the suction target due to contact with the transport container. The third purpose is to eliminate the suction auxiliary plate and form a suction flow path in the suction plate, thereby preventing the reduction of the suction holding force, reducing the cost, and reducing the burden on the operator. is there.

  The present invention includes a tweezer main body and an adsorption holding section, the tweezer main body includes a suction channel and a discharge channel and is gripped by a hand, and the suction channel and the discharge channel to the suction holding unit side. The suction holding part is provided with an annular suction surface with a large number of suction openings on the outer peripheral side of the disk-like suction plate. In addition to communicating with the annular communication path, the communication path communicates with the suction flow path of the gripping operation part via the flow path connection part, and the flow path connection part compresses against the upper surface partly on the outer peripheral side of the adsorption object. A hand-held vacuum tweezer is provided with a discharge port for injecting air at an outer position adjacent to the suction port, and the discharge port communicates with a discharge flow path of a gripping operation unit via a swirl flow generating unit by a spiral groove. . (Claim 1)

  2. The handheld vacuum tweezers according to claim 1, wherein the swirl flow generating portion by the spiral groove is provided with a swirl flow generation passage by two spiral grooves on the outer peripheral surface of the plug member, and the plug member is connected to the discharge relay of the flow path connecting portion. It was detachably mounted in the flow path. (Claim 2)

  3. The handheld vacuum tweezers according to claim 1, wherein the suction holding unit is detachably attached to the outer periphery of the suction plate with a guide ring adapted to the inner periphery of the transport container in which the suction object is stored. (Claim 3)

  4. The hand-held vacuum tweezers according to claim 1, wherein the communication passage for communicating each suction port is formed by a stepped annular groove and is engaged with the step from the upper surface side of the suction plate. And a suction channel was formed in the suction plate. (Claim 4)

  In the hand-held vacuum tweezers of claim 1, the compressed air is not ejected from the discharge port provided on the side surface side of the suction plate as in the case of the prior application, but the outer peripheral side of the object to be sucked from the discharge port. By adopting a structure that jets compressed air as a swirl flow perpendicularly to a part of the upper surface, it is possible to maintain the height position of the discharge port, the injection angle, etc. under certain conditions. It is possible to always carry out the function of floating the object to be adsorbed in a stable state.

  Further, unlike the prior arts disclosed in Patent Documents 5 and 6 and the like, the compressed air injected from the discharge port causes the compressed air to flow from a part on the outer peripheral side to the axial side along the adsorption surface of the object to be adsorbed. Due to the structure, unlike the prior art, there is no risk of dropping or damaging the adsorption object due to non-uniform flow velocity, and the amount of air injected from the discharge port is small and the discharge pump has a capacity. Since a small and small size is sufficient, it is possible to reduce the size of the entire apparatus and reduce the generation of particles due to air agitation.

  In the hand-held vacuum tweezers according to claim 2, two spiral grooves for generating a swirling flow are provided on the outer peripheral surface of the plug member, and are attached and detached so that a desired swirling flow adapted to the object to be sucked can be generated. In addition, the processing is easier than in the case where the spiral groove is provided in the discharge relay flow channel of the flow channel connection portion by cutting or the like.

  In the hand-held vacuum tweezers of claim 3, by providing a guide ring on the outer periphery of the suction plate, the outer peripheral surface comes into contact with the inner peripheral surface of the transport container when sucking and holding a weak suction target object such as a wafer. If the guide ring is detachable from the suction plate, the common suction plate can be used to adapt to various sizes of suction objects (inner diameter of the transport container). However, the adsorption state can be visually observed especially when the guide ring is transparent.

  In the hand-held vacuum tweezers of claim 4, since the suction flow path can be formed without polymerizing the suction auxiliary plate on the upper surface of the suction plate, the suction plate is soiled by adhesive leaked by omission of the suction auxiliary plate. The surface of the suction plate is warped due to changes in surface accuracy over time, etc., and there is no air leak between the suction plate and the object to be sucked or the suction auxiliary plate. There is no need for the bonding cost between the suction plate and the suction plate, and the weight reduction reduces the burden on the operator even when used for a long time.

  The hand-held vacuum tweezers of the present invention will be described in detail with reference to the accompanying drawings showing a preferred embodiment to which the present invention is applied. FIG. 1 and FIG. FIG. 4 is a plan view of the main part of the vacuum tweezers 1 as viewed from the suction surface side, and FIG. 4 is a plan view of the suction flow path provided on the suction plate as viewed from the side opposite to the suction surface with a part broken away. FIG. 5 is a vertical cross-sectional view illustrating the discharge flow path by Bernoulli, and FIG. 6 is a vertical cross-sectional view illustrating the suction flow path by vacuum suction.

  As shown in FIGS. 1 and 2, the vacuum tweezers 1 according to the illustrated embodiment first protects the protection sheet 3 and the wafer 4, which are objects to be adsorbed, housed in a transport container (carrier case) 2 in a stacked state. It is particularly suitable when the operation of alternately holding and transferring the wafer 4 to the next processing step after the sheet 3 is sucked and held and then transferred to the next processing step is carried out. The present invention can also be applied to handling an object to be adsorbed in the form of a thin plate or film such as a wafer accommodated in a container.

  The vacuum tweezers 1 includes a tweezer main body 1A and a suction holding portion 1B. The tweezer main body 1A includes a suction channel 9a and a discharge channel 10a, and a gripping operation unit 5 that is gripped by hand, a suction channel 9a, and a discharge channel The suction holding unit 1B is configured to include a suction channel 9a that is connected to the suction channel 9a through the channel connection unit 6 and includes a channel connection unit 6 in which a channel for causing the channel 10a to act on the suction holding unit 1B side is formed. The suction plate 7 is provided with a mouth, and a guide ring 8 mounted on the outer periphery of the suction plate 7.

  In the tweezer body 1A, a suction operation pipe 5 is formed by arranging a suction side pipe 9 that forms a suction flow path 9a and a discharge side pipe 10 that forms a discharge flow path 10a, and the suction side pipe 9 and the discharge side pipe 10 are configured. The front end side is detachably screw-connected to the flow path connecting portion 6 via the connectors 11 and 11, and the rear end side is connected to an air pressure source (not shown) via a piping tube connected to the connector. The suction flow path 9a is connected to the suction pump provided in the source, and the discharge flow path 10a is connected to the discharge pump.

  A known opening / closing valve mechanism 12 (detailed illustration is omitted) that opens and closes the flow path by an opening / closing operation button 12a is attached to the grip operation unit 5 in the middle of the suction flow path 9a formed in the suction side pipe 9. When the opening / closing operation button 12a is not pressed, the suction channel 9a is connected to the upstream side and the downstream side by the valve body biased by the spring force to perform the suction operation, and the opening / closing operation button 12a is pressed. At this time, the suction passage 9a is blocked on the upstream side and the downstream side by the valve body that slides against the spring force, and the suction operation is stopped because the downstream side communicates with the atmosphere.

  In the flow path connection portion 6, a suction relay flow path 14 communicating with the suction flow path 9 a of the suction side pipe 9 and a discharge relay flow path 15 communicating with the discharge flow path 10 a of the discharge side pipe 10 are provided in the connection block 13. As shown in FIG. 6, the suction relay flow path 14 communicates with each suction port 17 via the communication path 16 provided in the suction plate 7, and the discharge relay flow path 15 is located on the end side as shown in FIG. It is opened to the outside through the provided swirl flow generator 18.

  In the illustrated embodiment, the swirling flow generating portion 18 is a plug member having a swirling flow generating passage formed by two spiral grooves 19a and 19b on the outer peripheral surface with respect to the terminal end side of the discharge relay flow path 15 formed vertically. 19 is detachably mounted so that the discharge air flows out as a swirling flow from the end side opening of the discharge relay flow path 15. Each suction port 17 is opened in this end side opening. A cylindrical discharge port 20 is provided so as to be a position slightly retracted (for example, about 1 to 2 mm) from the bottom surface of the suction plate 7 so that a gap portion d is formed.

  As shown in FIGS. 3 and 4, the suction plate 7 is formed of an annular disk provided with a shaft center hole 21, and a stepped annular groove 22 is formed concentrically with the shaft center hole 21 on the outer peripheral side of the upper surface. An annular suction face plate 23 slightly projecting from the other bottom face is formed on the outer peripheral side of the bottom face, and suction holes 17 are formed in the suction face board 23 at predetermined intervals along the circumferential direction. An annular seal member 24 such as an O-ring is attached to the annular groove 22 in such a manner that the annular groove 22 is communicated with the stepped portion from the upper surface side.

  Further, the suction plate 7 is provided with a mounting hole 25 and connected to the connection block 13 of the flow path connection portion 6 with a mounting screw 26, and one end side of the flow path connection portion 6 is adjacent to the mounting hole 25. A communication passage 27 that communicates with the suction relay flow path 14 and communicates with the annular groove 2 2 at the other end side is provided, whereby each suction port 17 is provided in the vacuum tweezers 1 via the annular groove 22 and the suction relay flow path 14. A suction channel that communicates with the suction channel 9a of the suction side pipe 9 is formed.

  The guide ring 8 is formed of an annular disk whose inner peripheral side is fitted to the outer peripheral side of the suction plate 7 and whose outer peripheral side is fitted to the inner peripheral side of the transport container (carrier case) 2. An annular fitting provided on the outer peripheral surface of the suction plate 7 is provided with a locking hole 28 that is loosely fitted to the discharge port 20 of the connection block 13 to prevent rotation, and a cut portion 29 is provided in a part thereof so that the diameter can be increased. Although it can be detachably attached to the joint groove 30, it is desirable to form it with a transparent plate so that the adsorbed object of the object to be adsorbed can be seen.

  The vacuum tweezers 1 having the above configuration includes the suction flow path 9a of the suction side pipe 9, the suction relay flow path 14 and the communication path 16 of the connection block 13, the communication path 27 of the suction plate 7, the annular groove 22 and the suction port 17. The suction side flow path is connected to the suction pump of the air pressure source, and the open / close valve mechanism 12 provided in the middle of the suction flow path 9a is pressed by the open / close operation button 12a. When the suction pump is operated, the suction object can be sucked and held via the suction port 17, and when the opening / closing operation button 12a is pressed, the opening / closing valve mechanism 12 is closed. It is possible to release the adsorption object by releasing the air in the front flow path to the atmosphere.

  Further, the vacuum tweezers 1 include a discharge flow path 10a of the discharge side pipe 10, a discharge relay flow path 15 of the connection block 13, a swirl flow generation passage formed by two spiral grooves 19a and 19b of the plug member 19, and a discharge port. 20 is connected to the discharge pump of the air pressure source, so that when the discharge pump is operated, air is injected through the discharge port 20, The suction target can be lifted to the discharge port 20 side by the negative pressure due to the Bernoulli action, and the suction holding of the suction target by the suction port 17 can be assisted.

  Accordingly, as shown in FIG. 1, the transfer container 2 in which the holding operation unit 5 in which the suction side pipe 9 and the discharge side pipe 10 are arranged in parallel is manually held and the protective sheet 3 and the wafer 4 are alternately stacked is shown in FIG. 1. When the suction face plate 23 is applied to the protective sheet 3 with the guide ring 8 inserted in the peripheral wall, the swirling flow injected from the discharge port 20 onto the upper surface of the protective sheet 3 is passed through the gap portion d. Since it flows to the axial side along the upper surface and a negative pressure due to Bernoulli action is generated on a part of the upper surface of the protective sheet 3, a part of the protective sheet 3 is peeled off from the wafer 4 and is first adjacent to the discharge port 20. The suction face 17 is sucked and held on the suction face plate 23, and the remaining portion of the protective sheet 3 is also immediately sucked and held on the suction face plate 23 by the other suction openings 17.

  The protective sheet 3 held by suction is separated by closing the on-off valve mechanism 12 by pressing the open / close operation button 12a, and then the protective sheet 3 is removed from the wafer 4 in the transport container 2 from which the protective sheet 3 has been removed. In the case of the wafer 4 that is heavier than the protective sheet 3, the portion adjacent to the discharge port 20 is first sucked and held with the aid of Bernoulli action. By doing so, it is possible to perform reliable suction holding.

  For example, when a wafer having a diameter of about 300 mm (12 mm) or 200 mm (8 mm) is sucked and held, the suction pump and discharge pump used as an air pressure source have a pressure of − It has been confirmed that a flow rate of about 6.5 L / min at 70 kilopascals and a pressure of 30 kilopascals and a flow rate of about 7.5 L / min are desirable in the case of a discharge pump.

  In the vacuum tweezers 1 according to the above embodiment, the compressed air is not ejected from the discharge port provided on the side surface side of the suction plate in a substantially horizontal manner as in the case of the prior application, but the upper surface of the object to be sucked from the discharge port 20. Since the compressed air is injected vertically as a swirling flow, it is possible to maintain the discharge port height position, injection angle, etc. under certain conditions. It is possible to always carry out the function of floating an object in a stable state.

  In particular, unlike the prior arts disclosed in Patent Documents 5 and 6 and the like, the compressed air injected from the discharge port causes the compressed air to flow from a part on the outer peripheral side to the axial side along the adsorption surface of the object to be adsorbed. Due to the structure, unlike the prior art, there is no risk of dropping or damaging the adsorption object due to non-uniform flow velocity, and the amount of air injected from the discharge port is small and the discharge pump has a capacity. Since a small and small size is sufficient, it is possible to reduce the size of the entire apparatus and reduce the generation of particles due to air agitation.

  Unlike the prior application in which the suction holding portion is formed by a suction plate having a smaller diameter than the inner periphery of the transport container 2, a guide ring 8 that fits the inner periphery of the transport container 2 is attached to the outer periphery of the suction plate 7. As a result, it is possible to prevent the outer peripheral surface from coming into contact with the inner peripheral surface of the transport container 2 and causing it to be damaged or dropped when the wafer 4 that is the suction target is sucked and held, and the guide ring 8 is attached to the suction plate. 7 can be adapted to various sizes of the wafer 4 (inner diameter of the transfer container 2) using the common suction plate 7, and the suction state can be visually observed when the guide ring 8 is transparent. it can.

  Furthermore, unlike the case of the suction holding part in the above-mentioned prior application in which a suction flow path is formed by adhering a suction auxiliary plate to the upper surface of the suction plate provided with an annular groove for communicating each suction port. An annular groove hole that communicates each suction port is formed by a stepped groove, and an annular seal member 24 such as an O-ring is attached to form a suction channel in a manner of being locked to the step portion from the upper surface side of the suction plate. As a result, the suction plate is soiled by adhesive leaked due to omission of the suction auxiliary plate, and the suction plate is warped due to changes in surface accuracy over time, etc., between the suction plate and the suction object or suction auxiliary plate. Leakage does not reduce the suction holding force due to air leaks, and the manufacturing cost of the suction auxiliary plate and the bonding cost with the suction plate are unnecessary, and the weight reduction reduces the burden on the operator even during prolonged use. The

  In this way, the hand-held vacuum tweezers according to the present invention can locally implement the Bernoulli action combined with the vacuum suction action, and can easily and reliably peel off the protective sheet especially with a small amount of discharged air. Yes, it is possible to attach a guide ring to the suction plate to prevent damage or drop of the object to be sucked due to contact with the transport container. The suction auxiliary plate is omitted and a suction flow path is formed in the suction plate. In this way, it is possible to prevent the suction holding force from being lowered, reduce the cost, and reduce the burden on the operator.

A state in which the vacuum tweezers are in use and a state in which a suction holding portion (a suction plate with a guide ring) is inserted into the transport container is shown in a perspective view. A state in which the vacuum tweezers are used, and a state in which the object to be sucked is held by suction and taken out from the transport container is shown in a perspective view. The state which looked at the principal part of the vacuum tweezers from the adsorption surface side is shown with a top view. The state of the suction channel provided on the suction plate is partially broken and viewed from the side opposite to the suction surface in a plan view. The description of the discharge flow path by Bernoulli is shown in a longitudinal sectional view. The explanation of the suction channel by vacuum suction is shown in a longitudinal sectional view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum tweezers 1A Tweezers main body 1B Adsorption holding part 2 Transport container (carrier case)
3 Protection sheet (object to be adsorbed)
4 Wafer (Adsorption object)
DESCRIPTION OF SYMBOLS 5 Grip operation part 6 Flow path connection part 7 Suction plate 8 Guide ring 9 Suction side pipe 9a Suction flow path 10 Discharge side pipe 10a Discharge flow path 11 Connector 12 Open / close valve mechanism 12a Open / close operation button 13 Connection block 14 Suction relay flow path 15 Discharge relay flow path 16 Communication path 17 Suction port 18 Swirling flow generating portion 19 Plug member 19a, 19b Spiral groove 20 Discharge port 21 Center hole 22 Annular groove (stepped)
23 Adsorption face plate 24 Annular seal member (O-ring)
25 mounting hole 26 mounting screw 27 communication path 28 locking hole 29 notch 30 fitting groove

Claims (4)

  A tweezers body and a suction holding part, the tweezers body includes a suction channel and a discharge channel, and a gripping operation unit gripped by hand, and a channel for causing the suction channel and the discharge channel to act on the suction holding unit side The suction holding portion is provided with an annular suction surface having a large number of suction ports opened on the outer peripheral side of the disc-shaped suction plate, and each suction port is provided with an annular communication path. And the communication path communicates with the suction flow path of the gripping operation section via the flow path connecting portion, and the compressed air is injected onto the partial upper surface of the outer periphery side of the adsorption object to the flow path connecting portion. A hand-held vacuum tweezers characterized in that a discharge port is provided at an outer position adjacent to the suction port, and the discharge port communicates with a discharge flow path of a gripping operation unit through a swirl flow generating unit formed by a spiral groove.   The swirl flow generating portion by the spiral groove is provided with a swirl flow generation passage by two spiral grooves on the outer peripheral surface of the plug member, and the plug member is detachably mounted in the discharge relay flow channel of the flow channel connecting portion. Item 1. A hand-held vacuum tweezer described in item 1.   The hand-held vacuum tweezers according to claim 1 or 2, wherein the suction holding unit is detachably attached to the outer periphery of the suction plate with a guide ring adapted to the inner periphery of the transport container in which the suction target is accommodated.   The communication passage for communicating each suction port is formed with a stepped annular groove, and an annular seal member is attached to the suction plate from the upper surface side of the suction plate to form a suction channel in the suction plate. The hand-held vacuum tweezers according to any one of claims 1 to 3.

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