JP2006289443A - レーザ加工装置 - Google Patents

レーザ加工装置 Download PDF

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Publication number
JP2006289443A
JP2006289443A JP2005114024A JP2005114024A JP2006289443A JP 2006289443 A JP2006289443 A JP 2006289443A JP 2005114024 A JP2005114024 A JP 2005114024A JP 2005114024 A JP2005114024 A JP 2005114024A JP 2006289443 A JP2006289443 A JP 2006289443A
Authority
JP
Japan
Prior art keywords
optical axis
position detector
laser beam
laser
axis position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005114024A
Other languages
English (en)
Japanese (ja)
Inventor
Masafumi Okuno
雅史 奥野
Akira Watabe
明 渡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HIKARI PHYSICS KENKYUSHO KK
Cyber Laser Inc
Original Assignee
HIKARI PHYSICS KENKYUSHO KK
Cyber Laser Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HIKARI PHYSICS KENKYUSHO KK, Cyber Laser Inc filed Critical HIKARI PHYSICS KENKYUSHO KK
Priority to JP2005114024A priority Critical patent/JP2006289443A/ja
Priority to TW095120975A priority patent/TW200800459A/zh
Publication of JP2006289443A publication Critical patent/JP2006289443A/ja
Pending legal-status Critical Current

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  • Lasers (AREA)
  • Laser Beam Processing (AREA)
JP2005114024A 2005-04-11 2005-04-11 レーザ加工装置 Pending JP2006289443A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005114024A JP2006289443A (ja) 2005-04-11 2005-04-11 レーザ加工装置
TW095120975A TW200800459A (en) 2005-04-11 2006-06-13 Laser beam machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005114024A JP2006289443A (ja) 2005-04-11 2005-04-11 レーザ加工装置

Publications (1)

Publication Number Publication Date
JP2006289443A true JP2006289443A (ja) 2006-10-26

Family

ID=37410601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005114024A Pending JP2006289443A (ja) 2005-04-11 2005-04-11 レーザ加工装置

Country Status (2)

Country Link
JP (1) JP2006289443A (https=)
TW (1) TW200800459A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216552A (ja) * 2010-03-31 2011-10-27 Japan Synchrotron Radiation Research Inst 各段がモジュール化された多段増幅式レーザーシステムの自動最適化システム
WO2021210104A1 (ja) * 2020-04-15 2021-10-21 株式会社ニコン 加工システム及び計測部材

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5931537B2 (ja) * 2012-03-28 2016-06-08 東レエンジニアリング株式会社 レーザの光軸アライメント方法およびそれを用いたレーザ加工装置
WO2020241783A1 (ja) * 2019-05-30 2020-12-03 パナソニックＩｐマネジメント株式会社 変動要因特定方法及びレーザ加工装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417991A (ja) * 1990-05-11 1992-01-22 Amada Co Ltd レーザ加工機のノズル芯出し装置
JPH05138383A (ja) * 1991-11-14 1993-06-01 Nec Corp レーザ加工装置の光軸調整方法
JPH05228672A (ja) * 1992-02-17 1993-09-07 Laser Noushiyuku Gijutsu Kenkyu Kumiai 自動アライメント調整装置
JPH07116872A (ja) * 1993-10-22 1995-05-09 Niigata Eng Co Ltd レーザ加工機の制御方法及び装置
JPH11202110A (ja) * 1998-01-20 1999-07-30 Nippon Steel Corp 可変形反射鏡
JP2000167683A (ja) * 1998-12-03 2000-06-20 Mitsubishi Electric Corp 反射鏡による光路調整装置
JP2004066300A (ja) * 2002-08-07 2004-03-04 Matsushita Electric Ind Co Ltd レーザ加工装置およびレーザ加工方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417991A (ja) * 1990-05-11 1992-01-22 Amada Co Ltd レーザ加工機のノズル芯出し装置
JPH05138383A (ja) * 1991-11-14 1993-06-01 Nec Corp レーザ加工装置の光軸調整方法
JPH05228672A (ja) * 1992-02-17 1993-09-07 Laser Noushiyuku Gijutsu Kenkyu Kumiai 自動アライメント調整装置
JPH07116872A (ja) * 1993-10-22 1995-05-09 Niigata Eng Co Ltd レーザ加工機の制御方法及び装置
JPH11202110A (ja) * 1998-01-20 1999-07-30 Nippon Steel Corp 可変形反射鏡
JP2000167683A (ja) * 1998-12-03 2000-06-20 Mitsubishi Electric Corp 反射鏡による光路調整装置
JP2004066300A (ja) * 2002-08-07 2004-03-04 Matsushita Electric Ind Co Ltd レーザ加工装置およびレーザ加工方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216552A (ja) * 2010-03-31 2011-10-27 Japan Synchrotron Radiation Research Inst 各段がモジュール化された多段増幅式レーザーシステムの自動最適化システム
WO2021210104A1 (ja) * 2020-04-15 2021-10-21 株式会社ニコン 加工システム及び計測部材
JP2024096206A (ja) * 2020-04-15 2024-07-12 株式会社ニコン 加工システム及び計測部材
JP7790470B2 (ja) 2020-04-15 2025-12-23 株式会社ニコン 加工システム及び計測部材

Also Published As

Publication number Publication date
TWI374786B (https=) 2012-10-21
TW200800459A (en) 2008-01-01

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