JP2006284894A5 - - Google Patents

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Publication number
JP2006284894A5
JP2006284894A5 JP2005104388A JP2005104388A JP2006284894A5 JP 2006284894 A5 JP2006284894 A5 JP 2006284894A5 JP 2005104388 A JP2005104388 A JP 2005104388A JP 2005104388 A JP2005104388 A JP 2005104388A JP 2006284894 A5 JP2006284894 A5 JP 2006284894A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005104388A
Other languages
Japanese (ja)
Other versions
JP4589163B2 (ja
JP2006284894A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005104388A priority Critical patent/JP4589163B2/ja
Priority claimed from JP2005104388A external-priority patent/JP4589163B2/ja
Publication of JP2006284894A publication Critical patent/JP2006284894A/ja
Publication of JP2006284894A5 publication Critical patent/JP2006284894A5/ja
Application granted granted Critical
Publication of JP4589163B2 publication Critical patent/JP4589163B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005104388A 2005-03-31 2005-03-31 画像処理装置、基板配線露光システム及び基板配線形成システム Expired - Fee Related JP4589163B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005104388A JP4589163B2 (ja) 2005-03-31 2005-03-31 画像処理装置、基板配線露光システム及び基板配線形成システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005104388A JP4589163B2 (ja) 2005-03-31 2005-03-31 画像処理装置、基板配線露光システム及び基板配線形成システム

Publications (3)

Publication Number Publication Date
JP2006284894A JP2006284894A (ja) 2006-10-19
JP2006284894A5 true JP2006284894A5 (ru) 2010-09-09
JP4589163B2 JP4589163B2 (ja) 2010-12-01

Family

ID=37406902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005104388A Expired - Fee Related JP4589163B2 (ja) 2005-03-31 2005-03-31 画像処理装置、基板配線露光システム及び基板配線形成システム

Country Status (1)

Country Link
JP (1) JP4589163B2 (ru)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6139197B2 (ja) * 2013-03-18 2017-05-31 株式会社Ｓｃｒｅｅｎホールディングス Ｒｉｐ装置、画像記録装置、ｒｉｐ方法およびプログラム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10221851A (ja) * 1997-02-10 1998-08-21 Fujitsu Ltd パターン形成方法
JPH11112142A (ja) * 1997-10-01 1999-04-23 Kyocera Corp 多層配線基板
JP4274784B2 (ja) * 2002-05-28 2009-06-10 新光電気工業株式会社 配線形成システムおよびその方法
JP2004228228A (ja) * 2003-01-21 2004-08-12 Toshiba Corp 形状シミュレーション方法、形状シミュレーションプログラム及びマスクパターン作成方法
JP2004319899A (ja) * 2003-04-18 2004-11-11 Nikon Corp 露光装置及び露光方法

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