JP2006278865A - Method and device for manufacturing electronic part package - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and device for efficiently manufacturing an electronic part package configured by sealing electronic parts or compact circuits in a package. <P>SOLUTION: The method for manufacturing the electronic part package comprises a step for each accommodating parts in cavities for accommodating parts of a sheeted package aggregate, before being divided into individual electronic part packages to conduct a predetermined electrical connection therebetween; a step for contacting thin plates with mesh surfaces of meshed partition sections where the cavities of the sheeted package aggregate are formed with an atmospheric difference or the like; a step for irradiating thermal beam to the thin plates to weld the thin plates onto the mesh surfaces in vacuum or an electrically insulative gas; and a step for separating the sheeted package aggregate from the thin plates welded thereto at the meshed partition sections to obtain individual electronic parts. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method and an apparatus for manufacturing an electronic component package in which an electronic component such as a crystal resonator and an electronic circuit are hermetically sealed.

  Electronic component packages that contain airtight seals that contain electronic components such as semiconductor elements, crystal resonators, crystal filters or piezoelectric bodies, or small electronic circuits such as crystal oscillators incorporating them, have been widely used in recent years. There is a strong demand for downsizing and mass production to reduce costs. In such an electronic component package, a predetermined metal film is formed on a package made of a ceramic material, an electronic component such as a crystal resonator is mounted in the package, and a lid is welded to the package and sealed. As a typical hermetic sealing method, parallel seam welding is known (see, for example, Patent Documents 1 and 2). Recently, beam welding using a laser beam or an electron beam has also been performed (see, for example, Patent Document 3).

However, the manufacturing method of the electronic component package is to separate the sheet-shaped ceramic package assembly in which a plurality of electronic component packages are arranged in a matrix into individual ceramic packages, and then align the lid (lid) with the ceramic package. And it joins by the above-mentioned various methods. In addition, as another manufacturing method, a stepped portion suitable for the lid is provided on the sheet-like ceramic package assembly in which a plurality of electronic component packages are arranged in a matrix so that alignment can be performed simply by placing the lid. In some cases, after the separated lids are dropped into the respective stepped portions, bonding is performed, and finally, individual packages are separated (for example, see Patent Document 3).
Japanese Patent Laid-Open No. 06-7946 Japanese Patent Laid-Open No. 08-90244 JP 2003-51564 A

  However, after the sheet-like ceramic package assembly in which a plurality of electronic component packages are arranged in a matrix is separated into individual ceramic packages, the lid (lid) is aligned with the ceramic package and bonded by the various methods described above. In the manufacturing methods disclosed in Patent Documents 1 and 2 and the like, a large number of individual packages regularly arranged on a tray are sequentially joined. Therefore, lids are arranged on the individual packages, and the positions of the packages and lids are also determined. They had to be welded together after being put together and tacked individually, which required considerable manufacturing time and increased costs. Further, even in the manufacturing method disclosed in Patent Document 3, the sheet-shaped ceramic package assembly must also have a stepped portion formed in each cavity portion, resulting in an increase in cost. Even if there is a stepped part, it is difficult to supply the lid to the fine stepped part and drop it automatically, and there are various restrictions on pressing the lid against the ceramic package after dropping it into the stepped part. There is a problem.

The main object of the present invention is to provide a manufacturing method and a manufacturing apparatus capable of efficiently manufacturing an electronic component package in which an element or circuit such as a semiconductor element or a crystal resonator is sealed in a package.

  In order to solve the above-mentioned problem, the first invention accommodates components in each of the component accommodating cavities of the sheet-like package assembly before being divided into individual electronic component packages, and performs a predetermined electrical connection. A first step to be performed; a second step in which one surface of the thin plate is brought into contact with the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly; A third step of irradiating the other surface of the thin plate in an insulating gas with heat rays to weld the thin plate to the mesh-like surface; and the sheet-like package assembly and the thin plate welded thereto. And a fourth step of obtaining each of the electronic component packages by separating at a mesh-like partition portion, and to provide an electronic component package manufacturing method.

  According to a second aspect of the present invention, in order to solve the above-described problem, the first component is configured to house components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and to perform predetermined electrical connection. And a second step of storing the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly, A third step of disposing a thin plate so as to cover the opening, a fourth step of pressing and holding the thin plate against a wall of the container having the opening, and sealing the opening; A fifth step of sucking gas to form a vacuum, and pressing the inner surface of the thin plate against the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly; and the inner surface of the thin plate in the vacuum Before A sixth step of welding the thin plate to the mesh surface by irradiating the outer surface of the thin plate with heat rays in a state of being pressed against the mesh surface of the mesh partition; and the sheet-like package assembly and The present invention provides a manufacturing method of an electronic component package, comprising: a seventh step of separating the welded thin plate by the mesh-like partition portion to obtain the individual electronic component package.

  In a third aspect based on the second aspect, the fifth step is performed by a difference between a pressure in the container sealed with the thin plate and a pressure outside the container, or a vacuum in the container. A force that mechanically presses the mesh-like surface of the mesh-like partition portion that forms the cavity portion of the sheet-like package assembly against the thin plate by moving the sheet-like package assembly in the direction of the thin plate. In addition, the present invention provides a method for manufacturing an electronic component package.

  According to a fourth aspect of the present invention, in order to solve the above-described problem, a first component is provided in which components are housed in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and predetermined electrical connection is performed. And a second step of storing the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly, A third step of disposing a thin plate so as to cover the opening, a fourth step of pressing and holding the thin plate against a wall of the container having the opening, and sealing the opening; A fifth step of sucking gas to form a vacuum; and moving the sheet-like package assembly to move the mesh-like surface of the mesh-like partition portion forming the cavity portion of the sheet-like package assembly to the inner surface of the thin plate Press against And in a state where the inner surface of the thin plate is brought into close contact with the mesh-like surface of the mesh-like partition portion in the vacuum, the outer surface of the thin plate is irradiated with heat rays to attach the thin plate to the mesh. A seventh step of welding the sheet-like surface, and an eighth step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion, An electronic component package manufacturing method is provided.

  According to a fifth aspect of the present invention, in order to solve the above-mentioned problem, the first part is configured to house components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages and perform predetermined electrical connection. And a second step of storing the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly, A third step of disposing a thin plate so as to cover the opening, a fourth step of pressing and holding the thin plate against the wall of the container surrounding the opening, and sealing the opening; and A fifth step of filling a dry electrical insulating gas such as nitrogen gas or inert gas, and pressurizing the outer surface of the thin plate, or moving the sheet-like package assembly in the direction of the thin plate, The sheet-like pad By mechanically pressing the mesh surface of the mesh partition portion forming the cavity portion of the cage assembly against the inner surface of the thin plate, the inner surface of the thin plate and the mesh partition portion of the sheet package assembly are A sixth step of bringing the mesh surface into close contact; and the outer surface of the thin plate is irradiated with heat rays in a state where the thin plate and the mesh surface of the mesh partition portion are pressed against each other in the dry electrically insulating gas. And separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partitioning portion, and bonding the individual electronic component packages to each other. And an eighth step of obtaining the electronic component package.

  According to a sixth aspect of the present invention, in order to solve the above-described problem, the first part is configured to house components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and to perform predetermined electrical connection. And a second step of aligning the thin plate and the sheet-like package assembly in the atmosphere, and a third step of temporarily attaching the inner surface of the thin plate to the sheet-like package assembly. A fourth step of storing the thin plate and the sheet-shaped package assembly in a container having a heat ray irradiation window part in accordance with the heat ray irradiation window part; and sealing the container to evacuate the container. Or a sixth step of filling the container with a dry electrically insulating gas, and a sixth step of pressing the thin plate and the mesh-like surface of the mesh-like partition portion of the sheet-like package assembly, Thin And the mesh-like surface of the mesh-like partition part are pressed against each other, and heat rays are applied to the outer surface of the thin plate through the heat-ray irradiation window to weld the thin plate to the mesh-like surface. And an eighth step of separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion to obtain the individual electronic component packages. A method for manufacturing a component package is provided.

  According to a seventh invention, in any one of the first invention to the sixth invention, the outer surface of the thin plate is made equal to the mesh surface of the mesh partition portion of the sheet package assembly. After the heat ray reflection suppressing layer for suppressing the reflection of heat rays is formed in a mesh shape, the heat ray reflection suppressing layer of the thin plate is aligned with the mesh surface of the mesh partition portion of the sheet-like package assembly. Or after forming the heat ray reflection suppressing layer on the entire surface of the mesh-like surface of the mesh-like partition part of the sheet-like package assembly, the thin plate is irradiated with heat rays. I will provide a.

  According to an eighth aspect of the present invention, in any one of the first to seventh aspects, the cavity portion except a surface corresponding to the mesh-like surface of the mesh-like partition portion of the sheet-like package assembly. After forming a heat ray reflective layer that reflects heat rays on the corresponding outer surface of the thin plate, and aligning the heat ray reflective layer of the thin plate on the mesh surface of the mesh partition portion of the sheet-like package assembly An electronic component package manufacturing method is provided, wherein the thin plate is irradiated with heat rays.

  According to a ninth invention, in any one of the first to eighth inventions, a laser beam or an electron beam is used as the heat ray, and the laser beam or the electron beam is used in the mesh shape of the sheet-like package assembly. There is provided a method of manufacturing an electronic component package, wherein the welding is sequentially performed by sequentially irradiating the outer surface of the thin plate corresponding to the mesh surface of the partition portion.

  According to a tenth aspect of the invention, in any one of the first to eighth aspects of the invention, the heat ray is applied to the entire outer surface or a predetermined surface area of the thin plate, and the thin plate is divided at once or divided into a plurality of times. Is provided on the mesh-like surface of the mesh-like partition portion of the sheet-like package assembly.

  In an eleventh aspect according to any one of the first aspect to the tenth aspect, a perforation, a groove, or a mechanical brittleness is provided along the mesh-like partition portion of the sheet-like package assembly. A scribe line is formed in advance, and after the thin plate is welded to the sheet-shaped package assembly, the sheet-shaped package assembly is cut or separated along these perforations, grooves, or scribe lines. According to the present invention, there is provided an electronic component package manufacturing method characterized by obtaining individual electronic component packages.

  According to a twelfth aspect of the present invention, in order to solve the above-described problem, an electronic device comprising separation means for separating the individual electronic component packages after the thin plate is welded to the sheet-like package assembly before being divided into the individual electronic component packages. An apparatus for manufacturing a component package, wherein the sheet-shaped package assembly is configured such that the components are housed in the respective cavity portions of the sheet-shaped package assembly before being divided into individual electronic component packages and predetermined electrical connection is performed. A container having an opening with an area larger than the area of the main surface, a mounting table provided in the container on which the sheet-like package assembly is placed, and a thin plate arranged so as to cover the opening A pressing member that presses the inside of the container, a vacuum mechanism that evacuates the container, and a heat ray source that radiates heat rays to the outer surface of the thin plate, The mesh-like surface of the mesh-like partition that forms the cavity portion is pressed against the inner surface of the thin plate, and in that state, the outer surface of the thin plate is irradiated with heat rays to weld the thin plate to the mesh-like surface. An electronic component package manufacturing apparatus is provided.

  In a thirteenth aspect based on the twelfth aspect, the force for pressing the mesh surface of the mesh partition portion forming the cavity portion of the sheet package assembly against the inner surface of the thin plate is An apparatus for manufacturing an electronic component package is provided, which corresponds to a pressure difference between a pressure inside the container and a pressure outside the container.

  According to a fourteenth aspect of the present invention, there is provided an electronic apparatus comprising: a separating unit that separates the individual electronic component packages after the thin plate is welded to the sheet-like package assembly before being divided into the individual electronic component packages. An apparatus for manufacturing a component package, wherein the sheet-shaped package assembly is configured such that the components are housed in the respective cavity portions of the sheet-shaped package assembly before being divided into individual electronic component packages and predetermined electrical connection is performed. A container having an opening with an area larger than the area of the main surface, a mounting table provided in the container on which the sheet-like package assembly is placed, and the container disposed so as to cover the opening A sealing means for pressing the thin plate so as to seal the opening together with the thin plate, an electrically insulating gas supply mechanism for supplying a dry electrically insulating gas into the container, A container comprising: a gas supply mechanism for supplying a gas to the sealing means so that the pressure is higher than the pressure in the container; and a heat ray source for irradiating the outer surface of the thin plate through the sealing means. The thin plate is pressed against the mesh-like surface of the mesh-like partition portion that forms the cavity portion of the sheet-like package assembly by the pressure of the difference between the atmospheric pressure inside and the pressure inside the sealing means, and in that state the thin plate An apparatus for manufacturing an electronic component package is provided, wherein the thin plate is welded to the mesh surface by irradiation with heat rays.

  According to a fifteenth aspect, in the thirteenth aspect or the fourteenth aspect, a drive member that moves the mounting table in both directions in a direction perpendicular to the opening, the mounting table being movable. By providing, the sheet-like package assembly is moved in the direction of the thin plate in the container, and in addition to the difference between the pressure of the thin plate in the container and the pressure of the sealing means, a mechanical pressing force is also applied. Thus, an electronic component package manufacturing apparatus is provided, wherein the mesh-like surface of the mesh-like partition portion forming the cavity portion of the sheet-like package assembly is pressed against the thin plate.

According to a sixteenth aspect of the present invention, there is provided an electronic apparatus comprising: a separation unit that separates the individual electronic component packages after the thin plate is welded to the sheet-like package assembly before being divided into the individual electronic component packages. An apparatus for manufacturing a component package, which can be selectively shielded from the atmosphere, includes a container with a heat ray irradiation window, and a component provided in the container, each of the cavities of the sheet-like package assembly. And a movable mounting table on which the sheet-like package assembly having a predetermined electrical connection is mounted, and the mounting table are moved in both directions in a direction perpendicular to the opening. A drive member capable of being and / or a glass plate;
The vacuum mechanism that evacuates the container, or the electrically insulating gas supply mechanism that supplies dry electrically insulating gas to fill the container, and the transparent container wall of the heat ray irradiation window portion of the container. A heat ray source for irradiating the outer surface of the thin plate with a heat ray, and the driving unit moves the mounting table to push the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly against the thin plate. And / or placing the glass plate on the thin plate and pressing the thin plate against the mesh-like surface of the mesh-like partition that forms the cavity portion of the sheet-like package assembly, and in that state the thin plate An apparatus for manufacturing an electronic component package is provided, wherein the thin plate is welded to the mesh-like surface by irradiating with heat rays.

  In a seventeenth aspect based on the sixteenth aspect, alignment means for aligning the thin plate with the mesh surface of the mesh partition portion forming the cavity portion of the sheet package assembly, and the sheet Temporary attaching means for temporarily attaching the thin plate to the mesh-like surface of the mesh-like partition portion forming the cavity portion of the package-like package assembly, and the temporarily attached sheet-like package assembly and the thin plate An apparatus for manufacturing an electronic component package, comprising: a transport unit that transports the container into a container.

In an eighteenth aspect of the present invention, the sheet-like package assembly according to the sixteenth or seventeenth aspect, further comprising a baking chamber for baking the sheet-like package assembly temporarily attached and the thin plate. An apparatus for manufacturing an electronic component package is provided that performs a welding process between a body and the thin plate.

  According to the first aspect of the present invention, an electronic component package in which an element or a circuit such as a semiconductor element or a crystal resonator is hermetically sealed in the package can be efficiently manufactured.

  According to the second aspect of the invention, the thin plate can be brought into close contact with the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly by the pressure difference, so that the light beam or the like passes through the transparent member such as glass. Therefore, it is possible to directly irradiate the welded spot directly in the atmosphere without irradiating the welded part with the heat ray. Therefore, the welding efficiency is high, and the electronic component package can be efficiently manufactured with the heat ray with small energy. it can.

  According to the third invention, the step of pressing the mesh-like surface of the mesh-like partition part forming the cavity part of the sheet-like package assembly against the thin plate includes the pressure inside the container sealed with the thin plate and the pressure outside the container. Or in addition to the pressure difference, the sheet-like package assembly is moved in the direction of the thin plate, and the mesh-like surface of the mesh-like partition portion forming the cavity portion of the sheet-like package assembly is formed. Since the thin plate is mechanically pressed, a higher quality electronic component package can be efficiently manufactured.

  According to the fourth aspect of the present invention, even when the thin plate is made of an inorganic material such as ceramic or glass and is not easily bent, the element or circuit such as a semiconductor element in vacuum or a crystal resonator It is possible to efficiently manufacture an electronic component package that is hermetically sealed in a package.

  According to the fifth aspect of the invention, an electronic component package formed by hermetically sealing an element or circuit such as a semiconductor element or a crystal resonator in a package in an electrically insulating gas such as nitrogen gas or inert gas. Can be efficiently manufactured.

  According to the sixth aspect of the invention, since the sheet-like package assembly and the thin plate to be the lid are aligned and temporarily attached in the atmosphere, the element or circuit such as a semiconductor element or a crystal resonator is hermetically sealed in the package. An electronic component package that is stopped can be manufactured with higher accuracy and efficiency.

  According to the seventh aspect of the present invention, since the heat absorption of the welded portion is good, the thin plate is welded to the sheet-like package assembly more reliably and in a short time without adversely affecting the parts to be sealed. Can do.

  According to the eighth aspect of the present invention, since the heat absorption at locations other than the welding location is lowered, the sheet-like package assembly can be more reliably and in a short time without adversely affecting the parts to be sealed. Can be welded to.

  According to the ninth aspect of the invention, the laser beam or the electron beam is sequentially irradiated onto the thin plate corresponding to the mesh surface of the mesh partition portion of the sheet-like package assembly, and the welding is sequentially performed. The thin plate can be surely welded to the sheet-like package assembly without adversely affecting the parts to be processed.

  According to the tenth aspect, the thin plate can be welded to the sheet-like package assembly efficiently in a short time.

  According to the eleventh aspect, the sheet-like package assembly and the thin plate welded to each other can be easily separated, and unnecessary mechanical stress is not given to the parts at the time of separation. Obtainable.

  According to the twelfth aspect of the present invention, the thin plate can be brought into close contact with the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly by the pressure difference, so that the heat ray is directly welded in the atmosphere. It is possible to provide a manufacturing apparatus capable of efficiently manufacturing an electronic component package in which an element or circuit such as a semiconductor element or a crystal resonator is hermetically sealed in the package.

  According to the thirteenth aspect of the invention, the mesh-like surface of the mesh-like partition part forming the cavity part of the sheet-like package assembly is formed by the pressure of the difference between the pressure inside the container of the thin plate and the pressure outside the container. Since it is pressed against the inner surface, it is effective when the thin plate is flexible, and the apparatus can be simplified.

  According to the fourteenth aspect of the present invention, the sheet-like package assembly and the thin plate can be reliably brought into close contact with each other even in a vacuum or in an electrically insulating gas by a pressure difference between both sides of the thin plate. In this case, it is possible to provide a manufacturing apparatus that can efficiently manufacture an electronic component package with high welding efficiency, a relatively simple mechanism, and a small energy heat ray.

  According to the fifteenth aspect of the present invention, not only the mesh surface of the mesh partition portion forming the cavity portion of the sheet package assembly is pressed against the inner surface of the thin plate due to the pressure difference between the two sides of the thin plate, but also mechanically. Since pressure is also used, the structural margin of the device is high, and the mesh surface of the mesh partition part that forms the cavity part of the sheet package assembly can be pressed against the inner surface of the thin plate with a greater force. As a result, a higher quality electronic component package may be obtained.

  According to the sixteenth aspect of the present invention, a high-quality electronic component package formed by hermetically sealing an element or circuit such as a semiconductor element or a crystal resonator in a package in a vacuum or in an electrical insulating gas, In addition, it is possible to provide a manufacturing apparatus that can be manufactured efficiently.

  According to the seventeenth aspect of the present invention, alignment and temporary attachment between the thin plate and the sheet-like package assembly are performed in the atmosphere, so that the container constituting the welding chamber can be simplified and reduced in size until the vacuum is applied. The time required can be shortened.

According to the eighteenth aspect, since the welding is performed preferably after baking, the temperature between the thin plate and the sheet-like package assembly is increased, and the welding can be performed efficiently.

[Embodiment 1]
Embodiment 1 of a method and apparatus for manufacturing an electronic component package according to the present invention will be described with reference to FIGS. 1 and 2 are views for explaining welding in the method of manufacturing an electronic component package according to the present invention. The rectangular parallelepiped container 1 forms a welding chamber W. The ceiling wall 1A has a quadrangular opening 2 and a suction port 3. A vacuum mechanism such as a vacuum pump (not shown) is connected to the suction port 3. The container 1 becomes airtight by sealing the opening 2. The quadrangular opening 2 has an area larger than the upper surface of the normal sheet-shaped package assembly P before being divided, that is, the main surface Pa of the quadrangle. The sheet-like package assembly P will be described later with reference to FIG.

  The sheet-like package assembly P is placed on the mounting table 4 having a flat surface by a transfer mechanism (not shown). A mounting table 4 is supported in the container 1 by a driving mechanism 6 such as a cylinder device via an elastic member 5 such as a spring material. Assuming that the drive mechanism 6 is a cylinder device, the sheet-like package assembly P moves in the vertical direction of the drawing as the cylinder rod 6A (FIG. 2) of the cylinder device expands and contracts. The drive mechanism 6 extends from the outside of the container to the inside through the sealing member 1C of the bottom wall 1B of the container 1.

  A thin plate F is disposed in the opening 2 in the container 1. The thin plate F becomes a lid (lid) when divided into individual packages. For example, a thin sheet metal made of Kovar (trade name), nickel, stainless steel, etc. and silver solder, gold tin, or lead-free solder It consists of a brazing filler metal layer (for example, AgSnCu type). That is, the thin plate F includes a high melting point layer and a low melting point layer. Alternatively, the thin plate F may be a thin plate composed of a thin plate made of an inorganic material such as a ceramic thin plate or a glass thin plate having good heat conduction and a low melting point layer serving as a brazing filler metal layer. F is a single thin plate having a larger overall area than the opening 2 in the container 1. The thin plate F has a thickness of 15 to 100 μm, preferably 20 to 70 μm. In the first embodiment, the thin plate F has an area larger than the area of the opening 2 and is relatively easy to bend. That is, the thin plate F is drawn out from the metal thin plate roll FR wound with a flexible thin metal plate every time welding is performed. The opening 2 is completely covered. The pressing member 7 presses the thin plate F against the ceiling wall 1 </ b> A of the container 1 and seals the opening 2 of the container 1 with the thin plate F. The pressing member 7 is a frame-shaped member that surrounds the opening 2 and can be moved up and down on the drawing by a driving mechanism (not shown) to pressurize or release the thin plate F. The pressing member 7 and the ceiling wall 1A of the container 1 are provided with an O-ring (not shown) so as to surround the opening 2. By pressing the thin plate F from both sides with both O-rings, The opening 2 of the container 1 is sealed.

  And as shown in FIG. 2, the heat ray irradiation apparatus 8 is arrange | positioned above the container 1. As shown in FIG. The heat ray irradiation device 8 includes a laser device such as a carbon dioxide laser device that irradiates laser light, a YAG laser device, a semiconductor laser device, and a fiber laser device, an electron beam heating device that irradiates an electron beam, and a sheet-like package assembly 4. A lamp heating device that heats the entire surface by irradiating light for a short time or an infrared heater that gives radiant heat is used. The thin plate F is welded to the sheet-like package assembly P by the heat of the heat rays radiated from the heat ray irradiation device 8. After the thin plate F is welded to the sheet-like package assembly P, a combination of a dicing saw, a diamond cutter, a laser beam, or a roller that is currently used to divide the sheet-like package assembly P into individual packages is combined. Each electronic component package is separated by a separating device (not shown) represented by a separating mechanism. Note that H is a baking heater attached to the inside of the container 1, for example, the bottom plate of the container 1. When baking is performed in the container 1, the container 1 is made of a material having a relatively high heat resistance. Baking will be described later. The power source for the heater H for baking is provided outside the container 1, but is not shown in the figure.

  Next, the manufacturing method of the electronic component package of Embodiment 1 will be described with reference to FIGS. FIG. 3A shows a top view of the sheet-like package assembly P made of a ceramic material, and FIG. 3B illustrates a structure cut along the broken line XX ′ in FIG. It is a figure for doing. FIG. 4 is a view for explaining a process of welding the thin plate F to the sheet-like package assembly P. 3 and 4, the package structures constituting the individual electronic component packages are the same. Therefore, for one electronic component package, the electronic component Ep sealed in the cavity portion Ca and the sheet-like package assembly P are included. An example of the electrode Ed formed inside and outside of the bottom wall Pb and the through hole Th connecting them is shown, and the others are not shown. Separation lines Ln extending from the mesh surface Sm in the direction of the bottom wall Pb are formed in a grid pattern in the mesh partition portion Ms that forms the respective cavity portions Ca in the sheet-like package assembly P, as indicated by chain lines. ing. The separation line Ln indicated by a chain line is from a cutting line in which small vacancies are formed intermittently as perforated lines, or from a groove or a scribe line that is mechanically fragile. It is easy to cut. As an example of the sheet-like package assembly P, it has a length and width of 85 mm × 70 mm, and can be separated into 11 × 23 individual packages. From the viewpoint that the thin plate F and the mesh-like surface Sm of the mesh-like partition part Ms can be reliably and easily joined, the mesh-like surface Sm is composed of a low melting point layer, and the mesh that is the low melting point layer and the low melting point layer of the thin plate F. The surface Sm is preferably bonded to the surface. The leakage groove Gd will be described later.

  First, an electronic component Ep such as a crystal resonator, a semiconductor element, or an oscillation circuit is formed by the mesh-like partition portion Ms and the bottom wall Pb by an electronic component mounting device (not shown) in the atmosphere as in the conventional method. It mounts in each cavity part Ca, and it solders to the electrode Ed currently formed in cavity part Ca. Such operations are sequentially performed, and the electronic component Ep is mounted on all the cavity portions Ca, and the sheet-like package assembly P formed by soldering is transported by a transport mechanism (not shown) and loaded in the welding chamber W. It is placed on the table 4. At this time, the main surface Pa of the sheet-like package assembly P is usually at a position lower than the opening 2 of the container 1. Here, the main surface Pa of the sheet-like package assembly P is generally equal to the area of the bottom wall Pb.

  Next, the thin plate F is pulled on the ceiling wall 1A of the container 1 in the right direction of the drawing (arrow A), and is pulled out from the thin plate roll FR under the pressing member 7 being lifted so as to cover the opening 2. Thereafter, the pressing member 7 is pushed down by a vertical drive mechanism (not shown), and the thin plate F is pressed against the ceiling wall 1A with a predetermined force. As described above, although not shown, O-rings are provided at the portions where the pressing member 7 presses the ceiling wall 1A, and the thin plate F is pressed from both sides by their elasticity. Thereby, the thin plate F seals the opening 2 of the container 1. Almost simultaneously with this, a vacuum mechanism (not shown) starts operating, and the air in the welding chamber W is sucked from the suction port 3 of the container 1. At this time, air in the cavity portion Ca of the sheet-like package assembly P is also excluded. As the degree of vacuum in the welding chamber W increases, the difference in atmospheric pressure between the welding chamber W and the atmosphere increases, so that the thin plate F curves to the inside of the container 1 through the opening 2 to some extent.

  When the vacuum operation is performed for a predetermined time, the inside of the welding chamber W becomes a predetermined degree of vacuum, and at this time, the heater H is energized while performing the vacuum operation, so that the temperature in the container 1 rises and forms a sheet. The package assembly P and the thin plate F are baked. By this baking, a gas that adversely affects the quality of the electronic component is emitted from the thin plate F, the sheet-shaped package assembly, or its component Ep. Next, after the energization of the heater H is stopped, the drive mechanism 6 such as a cylinder device starts operating, and the mounting table 4 and the sheet-like package assembly P are raised through the elastic member 5. A thin plate that is slightly raised after the mesh-like surface Sm of the mesh-like partition portion Ms that forms the cavity portion Ca of the sheet-like package assembly P abuts on the lower surface of the thin plate F, and is curved to such an extent that the thin plate F becomes substantially flat. By lifting the F portion, the lower surface of the thin plate F and the mesh surface Sm of the mesh partition portion Ms abut with a substantially uniform force. That is, since the thin plate F is pressed against the mesh surface Sm of the mesh partition part Ms by the atmospheric pressure that is the difference between the atmospheric pressure and the pressure in the welding chamber W, the thin plate F and the mesh surface Sm are uniformly and closely in contact with each other. To do.

  Note that a leak groove Gd is provided on the mesh surface Sm of each mesh partition portion Ms forming the cavity portion Ca in the sheet package assembly P. One or more leak grooves Gd are formed at substantially right angles on each of the mesh surfaces Sm of the mesh partitions Ms surrounding each cavity portion Ca, and even if the thin plate F is in close contact with the mesh surface Sm, the leak grooves Gd are formed. Since each cavity part Ca is connected through Gd, each cavity part Ca is evacuated.

  Here, what is important is that the leakage groove Gd must be completely closed by a brazing filler metal layer (not shown) of the thin plate F at the time of welding. Therefore, the leakage groove Gd must be thinner than the thickness of the brazing filler metal layer (not shown) of the thin plate F, and the brazing filler metal layer (not shown) melted during welding flows into the leakage groove Gd and is completely Must be blocked. By providing such a leakage groove Gd, as the degree of vacuum in the container increases, even if the thin plate F is in close contact with the mesh surface Sm, the cavity portion Ca of the sheet-like package assembly P passes through the leakage groove Gd. The degree of internal vacuum can be increased, and gas generated during baking can be discharged.

  In a state where the thin plate F and the mesh-like surface Sm of the mesh-like partition portion Ms are in close contact with each other, heat rays are applied from the heat source 8 to the outer surface of the thin plate F as shown in FIG. When the heat ray source 8 is a laser device and the heat ray is a laser beam, as shown in FIG. 4, the laser beam is applied to the thin plate F portion corresponding to the mesh surface Sm of the mesh partition portion Ms, and the mesh shape is obtained. The thin plate F is welded to the mesh surface Sm of the partition part Ms. The laser beam travels along the mesh surface Sm of the mesh partition part Ms and first welds in the vertical direction, and after the welding in the vertical direction is completed, it travels sequentially in the horizontal direction and welds in the horizontal direction. At this time, by using two laser devices, the welding time can be shortened by causing the laser beam to travel simultaneously in the vertical direction and the horizontal direction of the mesh surface Sm of the mesh partition part Ms. The same applies when using an electron beam. When the heat ray source 8 is a xenon lamp, the entire surface of the thin plate F corresponding to the main surface Pa of the sheet-like package assembly P is irradiated with flash light for about 100 ms for a short time to form a mesh partition part Ms. The thin plate F can be welded all at once or a predetermined area can be welded to the entire mesh surface Sm. At the time of this welding, the temperature of the sheet-like package assembly P is increased by the baking, for example, at a temperature of around 200 ° C. Therefore, welding is performed more easily than when the sheet-like package assembly P is at room temperature.

  After the welding process is completed, the vacuum mechanism is stopped, the pressing member 7 is returned to the original position, the irradiation intensity of the laser beam is increased, and the laser beam travels along the outer periphery of the sheet-like package assembly P. The unnecessary thin plate F protruding from the outer peripheral portion of the sheet-like package assembly P is cut. Thereafter, the sheet-like package assembly P sealed with the thin plate F is taken out from the container 1 by the transport mechanism (not shown). The sealed package assembly of the thin plate F and the sheet-like package assembly P taken out to the atmosphere is separated by the above-described separation device (not shown) in the separation line Ln to form individual electronic component packages. In the first embodiment, since the sheet-like package assembly P and the thin plate F before separation are welded and separated into individual electronic component packages, the production efficiency is of course greatly improved. Since the brazing material of the thin plate F is melted by irradiating the F with heat rays and welded to the sheet-like package assembly P, the thermal efficiency is high. Therefore, the electronic component Ep in the cavity portion Ca of the sheet-like package assembly P is high. The welding operation can be performed with a small amount of power without adversely affecting the welding. In addition, when irradiating with heat rays, if necessary, a transparent glass plate (not shown) having a smaller area than the opening 2 of the container 1 is placed on the thin plate F as a heavy stone, and in that state, the heat rays are irradiated through the glass plate. May be. Although not shown, a transparent glass plate having a larger area than the opening 2 of the container 1 is placed on the opening 2 and the sheet-like package assembly P is pushed up by the drive mechanism 6 and pressed against the lower surface of the thin plate F. By pressing the upper surface of the thin plate F against the glass plate, the degree of adhesion between the mesh-like surface Sm of the sheet-like package assembly P and the thin plate F may be further increased, and then heat rays may be applied. In this case, even if there is some variation in the ascending operation of the drive mechanism 6, the elastic member 5 such as a spring material absorbs the pressing force, so that a glass plate (not shown) is not damaged.

[Embodiment 2]
In the first embodiment, the elastic member 5 and the driving mechanism 6 are provided in consideration of the structural margin, and the mounting table 4 is movable. However, as shown in FIG. When the vacuum state is applied at an appropriate position, for example, about several mm to 5 mm below the ceiling wall 1A of the container 1, the lower surface of the flexible thin plate F is the mesh surface Sm of the mesh partition portion Ms. It suffices to be present at a position that is almost uniformly in close contact with the entire surface. As the degree of vacuum in the container 1 increases, the degree of vacuum inside the cavity portion Ca of the sheet-like package assembly P also increases, and the thin plate F curves downward due to the pressure difference between the inside and outside of the container 1 and its lower surface and mesh shape. Since the close contact with the mesh-like surface Sm of the partition portion Ms is made with substantially equal force, basically, the joining method of the first embodiment can be realized even if the elastic member 5 and the drive mechanism 6 are not present.

  In the case of Embodiment 2, it is preferable to provide a leakage groove in the sheet-like package assembly P. By providing such a leakage groove Gd, as the degree of vacuum in the container increases, even if the thin plate F is in close contact with the mesh surface Sm, the cavity portion Ca of the sheet-like package assembly P passes through the leakage groove Gd. The degree of internal vacuum can be increased, and gas generated during baking can be discharged. As described above, the thin plate F and the mesh-like surface Sm are subjected to an applied pressure that is the difference between the atmospheric pressure in the container 1 and the atmospheric pressure, but when this is not sufficient, the area is larger than the opening 2 of the container 1. Of course, a vacuum operation may be performed in a state where a small transparent glass plate (not shown) is placed on the thin plate F as a weight, or a welding operation may be performed after performing the vacuum operation before that.

  Moreover, it is convenient if the mounting table 4 also serves as a heater H for baking. When the degree of vacuum reaches a predetermined value, baking is performed by energizing the heater H that also serves as the mounting table 4. When the mounting table 4 also serves as the heater H for baking, the heat generated by the heater H is directly transmitted to the bottom wall Pb of the sheet-like package assembly P, so that the baking temperature can be efficiently reached and baking is performed in a short time. It can be performed. Furthermore, the thin plate F is brought into close contact with the mesh-like surface Sm of the sheet-like package assembly P due to the difference between the air pressure outside the container 1 and the air pressure inside the container 1, but when the conditions for obtaining a sufficiently good close state are severe Further, a transparent and flat glass plate (not shown) having a smaller area than the opening of the container 1 may be placed on the thin plate F as a weight. Further, the entire container 1 may be baked in another baking mechanism. According to this manufacturing method, not only the manufacturing apparatus can be miniaturized, but also the apparatus can be greatly simplified, the cost can be reduced, etc., and the practical effect is great.

[Embodiment 3]
Next, an embodiment in which the dried electrically insulating gas is sealed in the cavity portion Ca of the sheet package assembly P will be described with reference to FIG. In FIG. 6, the same symbols as those used in FIGS. 1 to 5 indicate members having the same names. The container 1 is different from the first embodiment in that the container 1 has a gas supply port 3 ′. Although not shown, an electrically insulating gas supply mechanism that can supply a dry electrically insulating gas such as a selectively dried nitrogen gas is connected to the gas supply port 3 ′. A second container 9 is provided on the container 1. The container 9 includes a frame-like side wall portion 9A that also performs the same function as that of the pressing member 7 in the first embodiment, and a ceiling wall 9B that is at least partially formed of a transparent glass plate, and the side wall portion 9A. Is provided with a gas supply port 10 for supplying a gas such as air. The second container 9 moves up and down by a vertical drive mechanism (not shown), and the lower end surface of the side wall 9A is separated from the ceiling wall 1A of the first container 1 or pressurizes the ceiling wall 1A with a predetermined force. When pressurizing, the second container 9 constitutes a sealing means together with the ceiling wall 1A of the first container 1 and the thin plate F. Although not shown, the lower end surface of the side wall portion 9A has an O-ring similar to the pressing member 7 in the first embodiment, and presses the thin plate F in cooperation with the ceiling wall 1A of the container 1 so that the thin plate F can hold the container. 1 and the container 9 are separated and each is hermetically sealed.

  Next, the operation of the third embodiment according to the present invention will be described with reference to FIG. Initially, the second container 9 is at a predetermined position where the second container 9 is removed from the first container 1 or at a predetermined position above the container 1 (referred to as the original position). In this state, similarly to the first embodiment, a transport mechanism (not shown) transports the sheet-like package assembly P from an external stacking location to the mounting table 4 in the welding chamber W of the container 1. Next, the thin plate F is arrange | positioned so that the opening part 2 of the container 1 may be covered. The thin plate F may pull out a thin plate wound in a roll shape as in the first embodiment, or may be a thin sheet cut to a predetermined size. The thin plate F is larger than the area of the opening 2, and is large enough to insert the outer peripheral portion of the thin plate F firmly at the lower end surface of the quadrangular frame-like side wall portion 9 </ b> A of the second container 9. is necessary. Further, the thin plate F may be flexible, or may be non-flexible or inflexible.

  After the thin plate F is disposed so as to cover the opening 2 of the container 1, a driving mechanism (not shown) pushes down the second container 9, and the lower end surface of the side wall 9 </ b> A of the second container 9 and the ceiling wall 1 </ b> A of the container 1. The outer periphery of the thin plate F is inserted with a predetermined pressure, and the first container 1 and the second container 9 are sealed. At the same time, the first container 1 and the second container 9 are Separate and seal. Next, an electrically insulating gas supply mechanism (not shown) is activated and a dry electrically insulating gas such as nitrogen gas dried from the gas supply port 3 ′ is allowed to flow for a predetermined period of time, and the inside of the welding chamber W in the container 1. Is replaced with dry electrical insulating gas from air. The atmospheric pressure in the welding chamber W at this time is set to Z1. At this time, the drive mechanism 6 raises the sheet-shaped package assembly P to a level that is substantially the same as or slightly higher than the upper surface of the ceiling wall 1A of the container 1.

  On the other hand, the first container 1 and the second container 9 are separated and sealed by the thin plate F, and at the same time, the same gas as the electrically insulating gas supplied to the air or the welding chamber W through the gas supply port 10 is the first. Into the second container 9. The supply of air or electrically insulating gas is performed for a predetermined time by a timer (not shown) or the like, and the atmospheric pressure in the second container 9 is set to an atmospheric pressure Z2 higher than the atmospheric pressure Z1 in the first welding chamber W. Become. With a pressure equal to the difference between these atmospheric pressures (Z2−Z1), the thin plate F is pressed uniformly onto the entire surface of the mesh surface Sm of the mesh partition portion Ms of the sheet package assembly P from above the drawing. When the secrecy of the second container 9 with respect to the atmosphere is not sufficient, it is preferable to continuously supply the air or the electrically insulating gas from the gas supply port 10 in such an amount that a certain range of applied pressure can be obtained. . The heat ray source 8 irradiates the thin plate F with heat rays from the outside of the second container 9 through the transparent ceiling wall 9B in a state where the thin plate F is uniformly pressed against the sheet-like package assembly P by the pressure difference. In this embodiment, the heat source 8 is preferably a light source such as a laser beam device or a xenon lamp device.

  After the thin plate F is welded to the entire mesh surface Sm of the mesh partition part Ms of the sheet-like package assembly P sequentially or all at once by the heat of the heat rays, the second container 9 is shown in the figure. It is raised or moved to the original position by a drive mechanism that does not. Thereafter, the sheet-like package assembly P to which the thin plate F is welded is taken out from the first container 1 by a transport mechanism (not shown). And the unnecessary thin-plate F part which protrudes from the outer peripheral part of the sheet-like package assembly P is cut and removed. Finally, the sheet-like package assembly P to which the thin plates F are welded is separated by the separation line Ln by the above-described separation device (not shown) to form individual electronic component packages. In the second embodiment, since the thin plate F is pressed against the sheet-like package assembly P by atmospheric pressure, the thin plate F can be uniformly pressed onto the entire surface of the mesh-like surface Sm of the mesh-like partition portion Ms of the sheet-like package assembly P. In addition to high production efficiency, uniform welding is possible. This embodiment is particularly suitable when encapsulating an electrically insulating gas in an electronic component package.

  Next, a modification of the third embodiment will be briefly described. In the second embodiment, if the lower surface of the thin plate F is fixed at a position where the lower surface of the thin plate F is in contact with the mesh surface Sm of the mesh partition portion Ms when the mounting table 4 is in a vacuum state, the thin plate is caused by the pressure difference inside and outside the container 1. Since F is curved downward and its lower surface and the mesh surface Sm of the mesh partition part Ms abut with a substantially uniform force, basically the elastic member 5 and the drive mechanism 6 do not exist. It has been stated that the bonding method of aspect 1 can be realized. In this case, if the degree of vacuum in the cavity portion Ca of the sheet-like package assembly P is sufficiently increased in the welding chamber W of the container 1, the fixing position of the mounting table 4 must be strictly selected. Since the applied pressure is insufficient when slightly deviating from the position, the insufficient pressure may be compensated by the gas pressure in the container 9. That is, in the modified example of the third embodiment, the container 1 is evacuated, the gas is sealed in the container 9 so that a desired atmospheric pressure is obtained, and the pressure of the gas is also applied to form the thin plate F in the mesh shape of the mesh partition portion Ms. The force pressed against the surface Sm is optimally controlled. In this case, the pressing force of the thin plate F against the mesh surface Sm of the mesh partition portion Ms that is insufficient with the pressurizing force only with the vacuum force can be sufficiently compensated.

[Embodiment 4]
A fourth embodiment of the present invention in which a thin plate F is welded to a sheet-like package assembly P as shown in FIGS. 3 and 4 will be described with reference to FIGS. FIG. 7 is a diagram for explaining alignment and temporary attachment between the sheet-like package assembly P and the thin plate F. FIG. FIG. 8 is a schematic diagram for explaining the steps until welding, and FIG. 9 is a diagram for explaining the outline of an apparatus for welding the thin plate F to the sheet-like package assembly P. In this embodiment, a rectangular thin plate F cut in advance so as to substantially match the size of the main surface Pa of the sheet-like package assembly P is used. The welding process will be described with reference to these drawings.

  First, in the atmosphere, a transfer mechanism (not shown) sucks only one thin plate F and places it on the mesh surface Sm of the mesh partition part Ms of the sheet package assembly P. Thereafter, the four alignment members K1 and K2 of the alignment mechanism (the alignment members positioned in the front and back directions in the drawing are not shown) move forward to correct the displacement of the thin plate F, and the thin plate F Is aligned with the sheet-like package assembly P. Here, when the thin plate F is aligned with the sheet-like package assembly P, a separation line (not shown) that matches the separation line Ln formed in the mesh-like partition portion M of the sheet-like package assembly P is formed. Conveniently formed. The separation line formed in the lattice shape is, for example, a separation groove or a scribe line made mechanically brittle.

  In the aligned state, two or more pin-like temporary attachment electrodes Q1 and Q2 descend and press the thin plate F with a predetermined force. A power supply 11 and a switch 12 are connected in series between the temporary electrodes Q1 and Q2. The switch 12 is closed in a state where the temporary attachment electrodes Q1 and Q2 pressurize the thin plate F, and the power supply 11 supplies the temporary partitioning electrodes Q1 and Q2, the thin plate F, or the mesh partition Ms of the sheet-like package assembly P. A current flows through a thin plate (not shown) formed on the mesh surface Sm, and a portion of the thin plate F pressed by the temporary attachment electrodes Q1 and Q2 and the sheet-like package assembly P are welded. Attach.

  The thin plate F and the sheet-like package assembly P that have been tacked in two places or several places in this way are carried into the small front chamber 14 by a transport mechanism (not shown). The small front chamber 14 is opened to the atmosphere by opening the first opening / closing door 15 and sealed from the atmosphere by closing the first opening / closing door 15. The small front chamber 14 is preferably connected to a vacuum mechanism (not shown) through an intake port (not shown) as described above. The small front chamber 14 is formed to be as small as possible so that a vacuum can be achieved in a short time. Next to the small front room 14, a baking room 16 is provided. When the small front chamber 14 is in a vacuum state similar to that of the baking chamber 16 in a short time, that is, when a set time has elapsed after the first opening / closing door 15 is closed, a baking furnace having a normal structure that forms the baking chamber 16. The second opening / closing door 17 (not shown) is opened, and the thin plate F and the sheet-like package assembly P are conveyed to the baking chamber 16.

  The baking chamber 16 has a low melting point layer such as a brazing filler metal layer formed on the high melting point layer of the thin plate F, or the brazing filler metal layer formed in the sheet-like package assembly P in some cases to the extent that it does not melt, or to the part Ep. The thin plate F and the sheet-shaped package assembly P are baked (baked) at a temperature that does not adversely affect the gas, and gas or the like is emitted from the thin plate F, the sheet-shaped package assembly, or the part Ep by this baking. By removing, it is for obtaining a high quality electronic component package. The thin plate F and the sheet-shaped package assembly P carried into the small front chamber 14 are sequentially transferred to the baking chamber 16. The thin plate F and the sheet-like package assembly P transferred to the baking chamber 16 are conveyed leftward in the drawing at a predetermined speed by a conveyance mechanism (not shown), baked for a predetermined time, and then opened to a third opening / closing door. 18 is transferred to the welding chamber W of the container 1. Here, there is a gap between the thin plate F and the sheet-like package assembly P except for the temporarily attached portion. The gas is removed and the cavity portion Ca is in a vacuum state.

  As shown in FIG. 9, the thin plate F and the sheet-like package assembly P transferred to the welding chamber W are mounted on the mounting table 4 by a transfer mechanism (not shown). The welding chamber W is in a vacuum state equivalent to or higher than that of the baking chamber 16. When the thin plate F and the sheet-like package assembly P are transferred into the welding chamber W, the third opening / closing door 18 is closed to seal the welding chamber W. The welding chamber W is sucked from the suction port 3 as described above, and the inside of the welding chamber W is kept in a constant vacuum state. As described above, there is a gap between the thin plate F and the sheet-like package assembly P except for the temporarily attached portion, so that each cavity portion Ca of the sheet-like package assembly P is As in the welding chamber W, a vacuum state is established. Next, a flat and highly transparent glass plate 13 that acts as a weight by a transfer mechanism (not shown) is placed on the thin plate F, and the thin plate F is brought into close contact with the mesh surface Sm of the mesh partition portion Ms of the sheet package assembly P. Let

  In this state, the heat ray source 8 is operated, and the heat ray is irradiated as described above to weld the thin plate F to the mesh surface Sm of the mesh partition portion Ms of the sheet package assembly P. In this embodiment, a laser beam device is used as the heat ray source 8, and the laser beam device includes a main body portion 8A including a power supply unit that generates laser light, a light guide 8B that guides the laser light, and a predetermined amount of laser light. An angle refracting mirror 8C, a converging lens 8D for converging the refracted laser beam to form a laser beam, and the like, and as described above, the mesh surface of the mesh partition part Ms of the sheet-like package assembly P is used. The thin plate F corresponding to Sm is sequentially irradiated and welded. Since this welding step is the same as the method described in the first and second embodiments, it will not be described in further detail. Then, the fourth open / close door 19 is opened, and the welded thin plate F and the sheet-like package assembly P are transferred to the small rear chamber 20. Thereafter, the fourth open / close door 19 is closed, and the container 1 and the small rear chamber 20 are sealed. When the fourth open / close door 19 is opened, the small rear chamber 20 is preferably in a vacuum state as in the welding chamber W.

  When the fourth open / close door 19 is closed, the fifth open / close door 21 is opened, and the welded thin plate F and the sheet-like package assembly P are taken out into the atmosphere. Thereafter, as described above in the atmosphere, the thin plate F and the sheet-like package assembly P are separated from each other by the separation device 22 represented by a dividing mechanism that combines Daishin Saw, diamond cutter, laser beam, or roller. Separate into component packages. In this embodiment, the thin plate F also has a V-shaped groove (not shown) that substantially matches the mesh surface Sm of the mesh partition portion Ms of the sheet package assembly P or a weakened separation line of the thin plate material. Therefore, it is easier to separate. And also in this embodiment, since the temperature of the sheet-like package assembly P and the thin plate F rises in the baking process, welding can be performed reliably. The alignment between the thin plate F and the sheet-like package assembly P may be performed with higher accuracy by an alignment mechanism (not shown) by image processing.

[Embodiment 5]
Embodiment 5 of the manufacturing method of the electronic component package according to the present invention will be described with reference to FIG. The fifth embodiment is particularly effective when the heat ray source 8 is a light source such as a laser device or a xenon lamp. When the thin plate F has a color or mirror surface that easily reflects light, most of the heat rays from the heat ray source 8, particularly the light rays, are reflected. As shown in FIG. 10A, the thin plate F prevents this. It has a heat ray reflection suppressing layer B. As shown in FIGS. 3 and 4, heat ray reflection is performed on the upper surface of the thin plate F whose lower surface is located at a position corresponding to the mesh surface Sm of the mesh partition portion Ms forming the cavity portion Ca of the sheet package assembly P. A suppression layer B is formed. The heat ray reflection suppressing layer B is made of a coating film formed by forming a black paint containing carbon black or the like by silk screen printing or an oxide film. In the fifth embodiment, the mesh-like surface Sm of the mesh-like partition portion Ms that forms the cavity portion Ca of the sheet-like package assembly P is a lattice-like surface area surrounding an area corresponding to the cavity portion Ca. Therefore, for example, when the heat ray source 8 irradiates strong flash light on the entire surface of the thin plate F on the sheet-like package assembly P such as a xenon lamp, the light beam irradiated on the thin plate F surface area corresponding to the cavity portion Ca is The light that is almost reflected and irradiated to the surface area F of the thin plate F corresponding to the mesh surface Sm of the mesh partition part Ms that forms the cavity portion Ca of the sheet-like package assembly P is almost absorbed, and the heat causes the thin plate F to be absorbed. It is welded to the mesh surface Sm. Therefore, even if the thin plate F easily reflects heat rays, particularly light rays, it can be efficiently welded.

  Next, FIG. 10B shows a case where the thin plate F is not shown in the case where the thin plate F is made of a material that is difficult to reflect heat rays, particularly light rays having a wavelength in the infrared wavelength region, that is, a material that easily absorbs infrared rays. An embodiment in which the thin plate F can be welded to the mesh surface Sm of the mesh partition portion Ms forming the cavity portion Ca of the sheet package assembly P without adversely affecting the electronic components and the like housed therein is shown. In this embodiment, since the thin plate F is made of a metal material that easily absorbs heat rays, a transparent glass serving as a weight for bringing the thin plate F into close contact with the mesh-like surface Sm of the mesh-like partition portion Ms of the sheet-like package assembly P. A heat ray reflective layer D is provided in a surface area corresponding to the cavity portion Ca of the plate 13. The heat ray reflective layer D contains a metal oxide pigment such as titanium oxide, chromium oxide, cobalt oxide, barium oxide, etc. that reflects infrared rays that have a great influence on heat, particularly in the case of light rays, and does not contain carbon black. Although it is preferable, it is made of a metal plated film excellent in reflection characteristics such as a film coated or printed with a coating of about 0.1% by weight or less, a gold plated film, or a copper plated film.

  The glass plate 13 on which the heat ray reflective layer D is formed is placed on the thin plate F temporarily attached to the mesh surface Sm of the mesh partition portion Ms of the sheet package assembly P, and then the sheet package. Aligned to the assembly P. Therefore, in order to facilitate alignment, the glass plate 13 preferably has substantially the same area as the main surface Pa of the sheet-like package assembly P shown in FIG. After aligning the glass plate 13 with the sheet-like package assembly P, the entire surface of the thin plate F corresponding to the main surface Pa of the sheet-like package assembly P is irradiated from a heat ray source 8 such as a xenon lamp. The heat rays applied to the surface area corresponding to the cavity portion Ca are reflected by the heat ray reflecting layer D, the heat rays applied to the thin plate F portion corresponding to the lattice-like mesh surface Sm are absorbed, and the thin plate F is absorbed in the lattice shape. It is welded to the mesh surface Sm. Therefore, in the embodiment of FIG. 10B, it is possible to minimize the adverse thermal effects on the electronic components and the like housed in the cavity portion Ca.

  In the embodiment of FIG. 10A, the heat ray reflective layer D shown in FIG. 10B may be formed on the upper surface of the thin plate F on which the heat ray reflection suppressing layer B is not formed. Further, in the case where the thin plate F easily absorbs heat rays, only the heat ray reflective layer D may be provided directly on the surface area of the thin plate F corresponding to the cavity portion Ca. 10B, the glass plate 13 on which the heat ray reflective layer D is formed is placed on the thin plate F on which the heat ray reflection suppressing layer B is formed, as shown in FIG. 10A. May be. In addition, the heat ray reflective layer D formed on the glass plate 13 does not necessarily need to be the upper surface of the glass plate 13, and may of course be on the lower surface or an intermediate surface where two or more glasses are laminated. Further, this embodiment 5 can be applied to the thin plate F and the sheet-like package assembly P as described in the first to fourth embodiments by using an alignment mechanism by image processing.

  In each of the above embodiments, one sheet-like package assembly P is welded to the thin plate F in the container 1, but a plurality of sheet-like package assemblies such as two or four on the mounting table 4 are shown. P is placed and welding is performed as described above using the thin plate F that can cover all the sheet-like package assemblies P, and then the thin plate F is cut to separate sheet-like package assemblies P. And a thin plate F. Alternatively, a plurality of pieces, such as two or four attached to the sheet-like package assembly P and temporarily attached to the sheet-like package assembly P, may be placed on the placing table 4 and may be welded simultaneously or sequentially.

  In the third embodiment, the first container 1 and the second container 9 shown in FIG. 6 are filled with an electrically insulating gas such as nitrogen gas, and the electrically insulating gas is sealed in the electronic component package. Although an example has been described, the inside of the first container 1 and the second container 9 are evacuated, and compressed gas, preferably air or compressed air is supplied into the second container 9 before irradiation with heat rays, The thin plate F can be pressed uniformly against the mesh surface Sm of the sheet-like package assembly P with an appropriate force to enable high-quality welding.

  Further, in FIG. 6, the thin plate F may be of a size that covers the opening 2 and separates the container 1 and the container 2, for example, the thin plate F has a width smaller than the width of the opening 2, Or the square sheet | seat cut | disconnected previously may be sufficient. By using such a thin plate F, when the container 1 and the container 9 are not separated, the sealed space formed by the container 1 and the container 9 is evacuated or filled with an electrically insulating gas, and is welded. A transparent glass plate may be placed on the thin plate F as a weight.

  Further, in the case of the first to third embodiments, or a plurality of sheet-like package assemblies P such as two or four on the mounting table 4, and a thin plate F that can cover all these sheet-like package assemblies P In the case of welding using a sheet, a push-up member (not shown) that pushes up the thin plate F from below until just before the heat ray is irradiated so that the thin plate F does not adhere to a part of the sheet-like package assembly P. May be provided. This push-up member (not shown) helps the inside of the cavity portion Ca of the sheet-like package assembly P to be sufficiently replaced with a vacuum or an electrically insulating gas.

In the above embodiment, laser heating, electron beam heating, lamp heating, and (far) infrared heater heating have been exemplified as heat ray irradiation examples. However, for example, by induction heating or radiant heat passing through a normal heating furnace for a certain period of time. Welding can also be performed by heating, a method of seam welding by passing an electric current between a pair of roller electrodes, and the like. In the above embodiment, the thin plate F has been described as a flexible metal thin plate that is easily bent. However, the thin plate F is not necessarily a metal thin plate, and is not necessarily a metal thin plate, such as a ceramic thin plate or a glass thin plate that is difficult to be bent. A thin plate F made of an inflexible thin plate made of an inorganic material or the like and a brazing material layer can be used in the same manner as described above. A thin plate made of an inorganic material having a thin plate formed by forming a brazing filler metal layer such as silver brazing, gold tin, or lead-free solder (for example, AgSnCu series) can be treated in the same manner as described above. Moreover, the same effect is acquired.

It is a figure for demonstrating Embodiment 1 which concerns on manufacture of the electronic component package of this invention. It is a figure for demonstrating Embodiment 1 which concerns on manufacture of the electronic component package of this invention. It is a figure for demonstrating an example of the sheet-like package aggregate | assembly used for this invention. It is a figure for demonstrating an example of the sheet-like package aggregate | assembly and thin plate which are used for this invention. It is a figure for demonstrating Embodiment 2 which concerns on manufacture of the electronic component package of this invention. It is a figure for demonstrating Embodiment 3 which concerns on manufacture of the electronic component package of this invention. It is a figure for demonstrating Embodiment 4 which concerns on manufacture of the electronic component package of this invention, Comprising: Positioning and temporary attachment with a sheet-like package assembly and a thin plate are shown. It is a figure for demonstrating Embodiment 4 which concerns on manufacture of the electronic component package of this invention, Comprising: It is a figure explaining from a baking process to a welding process. It is a figure for demonstrating Embodiment 4 which concerns on manufacture of the electronic component package of this invention. It is a figure for demonstrating Embodiment 5 which concerns on manufacture of the electronic component package of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... 1st container 2 ... Opening part of 1st container 3 ... Suction port 3 of 1st container
3 '... gas supply port 4 ... mounting table 5 ... elastic member 6 ... drive mechanism 7 ... pressing member 8 ... heat ray source 9 ... second container 10 ... Gas supply port of second container 9 11 ... Power supply for temporary attachment 12 ... Switch 13 ... Glass plate 14 ... Small front chamber 15, 17, 18, 19, 21 ... Opening / closing door 16 ... Baking room 20 ... Small rear room P ... Sheet package assembly Ms ... Mesh partition part of sheet package assembly P Sm ... Sheet package assembly P mesh Surface Ca ... Cavity part of sheet-like package assembly P F ... Heat source K1, K2 ... Alignment member Q1, Q2 ... Temporary electrode W ... Welding chamber H ... Baking Heater Ln ... separation line Gd ... leakage groove

Claims (18)

A first step of storing components in each of the component storing cavities of the sheet-like package assembly before being divided into individual electronic component packages, and performing a predetermined electrical connection;
A second step of bringing one surface of the thin plate into contact with the mesh surface of the mesh partition portion forming the cavity portion of the sheet package assembly;
A third step of welding the thin plate to the mesh surface by irradiating the other surface of the thin plate with heat rays in a vacuum or in a dry electrically insulating gas;
A fourth step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion;
An electronic component package manufacturing method comprising: A first step of storing components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and performing a predetermined electrical connection;
A second step of accommodating the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly;
A third step of disposing a thin plate so as to cover the opening;
A fourth step of sealing the opening by pressing and holding the thin plate against the wall of the container having the opening;
A fifth step of sucking and evacuating the gas in the container and pressing the inner surface of the thin plate against the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly;
A sixth step of welding the thin plate to the mesh surface by irradiating the outer surface of the thin plate with heat rays in a state where the inner surface of the thin plate is pressed against the mesh surface of the mesh partition in the vacuum; ,
A seventh step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion;
An electronic component package manufacturing method comprising: In claim 2,
The fifth step is performed by the difference between the pressure inside the container sealed with the thin plate and the pressure outside the container, or the sheet-like package assembly is placed in the direction of the thin plate in the vacuum of the container. The electronic component is also applied with a force that mechanically presses the mesh-like surface of the mesh-like partition portion forming the cavity portion of the sheet-like package assembly against the inner surface of the thin plate. Package manufacturing method. A first step of storing components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and performing a predetermined electrical connection;
A second step of accommodating the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly;
A third step of disposing a thin plate so as to cover the opening;
A fourth step of sealing the opening by pressing and holding the thin plate against the wall of the container having the opening;
A fifth step of sucking and vacuuming the gas in the container;
A sixth step of moving the sheet-like package assembly and pressing the mesh-like surface of the mesh-like partition portion forming the cavity portion of the sheet-like package assembly against the inner surface of the thin plate; and
A seventh step of welding the thin plate to the mesh surface by irradiating the outer surface of the thin plate with heat rays in a state where the inner surface of the thin plate is in close contact with the mesh surface of the mesh partition in the vacuum. When,
An eighth step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion;
An electronic component package manufacturing method comprising: A first step of storing components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and performing a predetermined electrical connection;
A second step of accommodating the sheet-like package assembly in accordance with the opening in a container having an opening having a width equal to or larger than the area of the main surface of the sheet-like package assembly;
A third step of disposing a thin plate so as to cover the opening;
A fourth step of sealing the opening by pressing and holding the thin plate against the wall of the container surrounding the opening;
A fifth step of filling the container with a dry electrically insulating gas such as nitrogen gas or inert gas;
By pressing the outer surface of the thin plate or by moving the sheet-like package assembly in the direction of the thin plate, the mesh-like surface of the mesh-like partition portion that forms the cavity portion of the sheet-like package assembly is A sixth step of bringing the inner surface of the thin plate into close contact with the mesh-like surface of the mesh-like partition portion of the sheet-like package assembly by mechanically pressing the inner surface of the thin plate;
In the dry electrical insulating gas, with the inner surface of the thin plate and the mesh-like surface of the mesh partition part pressed against each other, the outer surface of the thin plate is irradiated with heat rays to weld the thin plate to the mesh-like surface. A seventh step;
An eighth step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion;
An electronic component package manufacturing method comprising: A first step of storing components in each of the cavity portions of the sheet-like package assembly before being divided into individual electronic component packages, and performing a predetermined electrical connection;
A second step of aligning the thin plate and the sheet-shaped package assembly in the atmosphere;
A third step of temporarily attaching the thin plate to the sheet-like package assembly;
A fourth step of storing the temporarily attached thin plate and the sheet-like package assembly in a container having a heat ray irradiation window portion according to the heat ray irradiation window portion;
A fifth step of sealing the container and evacuating the container, or filling the container with a dry electrically insulating gas;
A sixth step of pressing the inner surface of the thin plate and the mesh surface of the mesh partition part of the sheet-like package assembly;
With the inner surface of the thin plate and the mesh surface of the mesh partition part pressed against each other, the outer surface of the thin plate is irradiated with heat rays through the heat ray irradiation window to weld the thin plate to the mesh surface. A seventh step of:
An eighth step of obtaining the individual electronic component package by separating the sheet-like package assembly and the thin plate welded thereto by the mesh-like partition portion;
An electronic component package manufacturing method comprising: In any one of Claims 1 thru | or 6,
A heat ray reflection suppressing layer for suppressing reflection of heat rays is formed on the outer surface of the thin plate so as to be equal to the mesh surface of the mesh partition portion of the sheet package assembly, and the sheet package assembly After aligning the heat ray reflection suppressing layer of the thin plate with the mesh surface of the mesh partition portion of the body, or on the entire surface of the mesh surface of the mesh partition portion of the sheet package assembly A method of manufacturing an electronic component package, comprising forming a heat ray reflection suppressing layer and then irradiating the thin plate with heat rays. In any one of Claims 1 thru | or 7,
A heat ray reflecting layer that reflects heat rays is formed on the outer surface of the thin plate corresponding to the cavity portion excluding a surface corresponding to the mesh surface of the mesh partition portion of the sheet package assembly, and the sheet shape A method of manufacturing an electronic component package, comprising: aligning the heat ray reflective layer of the thin plate on the mesh surface of the mesh partition portion of the package assembly, and then irradiating the thin plate with heat rays. In any one of Claims 1 thru | or 8,
By using a laser beam or an electron beam as the heat ray, and sequentially irradiating the outer surface of the thin plate corresponding to the mesh surface of the mesh partition portion of the sheet-like package assembly with the laser beam or electron beam, A method of manufacturing an electronic component package, wherein the welding is sequentially performed. In any one of Claims 1 thru | or 8,
Irradiating the heat ray to the entire outer surface or a predetermined area of the thin plate, and welding the thin plate to the mesh-like surface of the mesh-like partition portion of the sheet-like package assembly at once or a plurality of times. A method of manufacturing an electronic component package characterized by the above. In any one of Claims 1 thru | or 10,
A perforation, a groove, or a mechanically fragile scribe line is formed in advance along the mesh-like partition portion of the sheet-like package assembly, and the thin plate is welded to the sheet-like package assembly. A method of manufacturing an electronic component package, characterized in that individual electronic component packages are obtained by cutting or separating the sheet-like package assembly along these perforations, grooves, or scribe lines. An electronic component package manufacturing apparatus comprising separation means for separating a thin plate on a sheet-shaped package assembly before being divided into individual electronic component packages and separating the thin plate into individual electronic component packages,
An area larger than the area of the main surface of the sheet-shaped package assembly in which the components are housed in the respective cavity portions of the sheet-shaped package assembly before being divided into individual electronic component packages and predetermined electrical connection is made. A container having an opening of
A mounting table provided in the container and on which the sheet-like package assembly is mounted;
A pressing member that presses and holds a thin plate arranged to cover the opening against the wall of the container and seals the opening;
A vacuum mechanism for evacuating the container;
A heat ray source for irradiating the outer surface of the thin plate with heat rays;
The mesh-shaped surface of the mesh-shaped partition part forming the cavity of the sheet-shaped package assembly is pressed against the inner surface of the thin plate, and in this state, the outer surface of the thin plate is irradiated with heat rays to An apparatus for manufacturing an electronic component package, characterized by being welded to a mesh surface. In claim 12,
The force for pressing the mesh-like surface of the mesh-like partition part forming the cavity part of the sheet-like package assembly against the inner surface of the thin plate is the pressure inside the container of the thin plate and the pressure outside the container. An apparatus for manufacturing an electronic component package, characterized in that the pressure corresponds to a pressure difference between the two. An electronic component package manufacturing apparatus comprising separation means for separating a thin plate on a sheet-shaped package assembly before being divided into individual electronic component packages and separating the thin plate into individual electronic component packages,
An area larger than the area of the main surface of the sheet-shaped package assembly in which the components are housed in the respective cavity portions of the sheet-shaped package assembly before being divided into individual electronic component packages and predetermined electrical connection is made. A container having an opening of
A mounting table provided in the container and on which the sheet-like package assembly is mounted;
Sealing means for pressing the thin plate so as to seal the opening together with the thin plate disposed so as to cover the opening;
An electrically insulating gas supply mechanism for supplying a dry electrically insulating gas into the container;
A gas supply mechanism for supplying gas to the sealing means so that the pressure is higher than the pressure in the container;
A heat ray source for irradiating the outer surface of the thin plate with heat rays through the sealing means;
And pressing the thin plate against the mesh-like surface of the mesh-like partition part forming the cavity part of the sheet-like package assembly by the pressure of the difference between the pressure inside the container and the pressure inside the sealing means, An apparatus for manufacturing an electronic component package, wherein the thin plate is irradiated with heat rays in a state to weld the thin plate to the mesh surface. In claim 13 or claim 14,
The mounting table is movable, and a driving member that moves the mounting table in both directions in a direction perpendicular to the opening is provided, whereby the sheet-like package assembly is placed in the container in the thin plate. The mesh-like shape forming the cavity portion of the sheet-like package assembly by applying a mechanical pressing force in addition to the difference between the pressure of the thin plate in the container and the pressure of the sealing means An apparatus for manufacturing an electronic component package, wherein the mesh-like surface of a partition portion is pressed against the thin plate. An electronic component package manufacturing apparatus comprising separation means for separating a thin plate on a sheet-shaped package assembly before being divided into individual electronic component packages and separating the thin plate into individual electronic component packages,
A container that can be selectively shielded from the atmosphere and includes a window for heat ray irradiation;
A movable mounting table provided in the container, on which the sheet-shaped package assembly in which a predetermined electrical connection is made by storing components in each of the cavity portions of the sheet-shaped package assembly,
A driving member and / or a glass plate capable of moving the mounting table in both directions in a direction perpendicular to the opening; and
A vacuum mechanism that evacuates the container, or an electrically insulating gas supply mechanism that fills the container by supplying a dry electrically insulating gas;
A heat ray source for irradiating the outer surface of the thin plate with heat rays through a transparent container wall of the window for heat ray irradiation of the container;
And the drive unit moves the mounting table to press the mesh surface of the mesh partition portion forming the cavity portion of the sheet-like package assembly against the thin plate, and / or the glass plate is the thin plate The thin plate is placed on the mesh-like surface of the mesh-like partition that forms the cavity portion of the sheet-like package assembly, and the thin plate is irradiated with heat rays in this state to cause the thin plate to be placed on the mesh. An apparatus for manufacturing an electronic component package, characterized in that it is welded to a surface. In claim 16,
Alignment means for aligning the thin plate with the mesh surface of the mesh partition that forms the cavity of the sheet package assembly;
Temporary attaching means for temporarily attaching the thin plate to the mesh-like surface of the mesh-like partition part forming the cavity part of the sheet-like package assembly;
Conveying means for conveying the temporarily attached sheet-like package assembly and the thin plate into the container;
An apparatus for manufacturing an electronic component package, comprising: In claim 16 or claim 17,
An electronic component package comprising a baking chamber for baking the sheet-like package assembly temporarily attached and the thin plate, and performing a welding step between the sheet-like package assembly and the thin plate after baking is completed. Manufacturing equipment.

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