JP2006278521A - Tray and its suction structure - Google Patents

Tray and its suction structure Download PDF

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JP2006278521A
JP2006278521A JP2005092599A JP2005092599A JP2006278521A JP 2006278521 A JP2006278521 A JP 2006278521A JP 2005092599 A JP2005092599 A JP 2005092599A JP 2005092599 A JP2005092599 A JP 2005092599A JP 2006278521 A JP2006278521 A JP 2006278521A
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tray
suction
holding surface
groove
raised portion
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JP4506533B2 (en
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Masaharu Sasaki
正治 佐々木
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Yamaha Corp
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Yamaha Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tray which can smoothly be carried in transportation or the like by being further stably held by a suction device, and its suction structure. <P>SOLUTION: The tray comprises a planar tray body 11, a plurality of protrusions 12 formed on the surface of the tray body 11 at predetermined intervals along the longitudinal direction and the lateral direction and forming a pocket 12A which can accommodate a chip, and grooves 13 formed between adjacent protrusions 12. The tray is provided to be suction-held through the suction device 20. The suction device 20 has a holding surface on which a suction portion 25 is formed. A body 16 continuous to adjacent protrusions 12 is provided at a part of the groove 13 and in a suction state, a space S in the groove 13 surrounded by the continuous body 16 and the protrusions 12 continuous thereto is formed such that it can be closed by the holding surface. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、トレイ及びその吸着構造に係り、更に詳しくは、吸着装置による吸着保持の安定化を図ることができるトレイ及びその吸着構造に関する。   The present invention relates to a tray and an adsorption structure thereof, and more particularly, to a tray and an adsorption structure thereof capable of stabilizing adsorption holding by an adsorption device.

従来より、複数枚のチップを搬送するためのトレイが利用されており、このトレイとしては、図7〜図9に示されるタイプのものがある。同図において、トレイ50は、板状をなすトレイ本体51に形成されて内部にチップCをそれぞれ収容する複数のポケット52を備えている。各ポケット52は、トレイ本体51の上面より突出する隆起部53の内部に形成され、隣接する隆起部53相互間には溝55が形成されている。図8に示されるように、溝55内には、平面視方形状をなす壁体56が立設され、当該壁体56の高さは、隆起部53の高さより高く設定されている(図9参照)。ここで、前記トレイ50を搬送する場合には、図9に示されるような吸着装置58が用いられ、この吸着装置58の保持面59(図9中下面)を前記壁体56の上端面に当接し、保持面59に形成された穴状の吸引部60から空気を吸引して壁体56の内部を負圧化することによりトレイ50が吸着保持されることとなる。   Conventionally, a tray for carrying a plurality of chips has been used, and there are types of trays shown in FIGS. 7 to 9. In the figure, a tray 50 is formed in a plate-like tray main body 51 and includes a plurality of pockets 52 for accommodating chips C therein. Each pocket 52 is formed inside a raised portion 53 protruding from the upper surface of the tray main body 51, and a groove 55 is formed between the adjacent raised portions 53. As shown in FIG. 8, a wall body 56 having a planar view shape is erected in the groove 55, and the height of the wall body 56 is set to be higher than the height of the raised portion 53 (FIG. 8). 9). Here, when transporting the tray 50, a suction device 58 as shown in FIG. 9 is used, and the holding surface 59 (lower surface in FIG. 9) of this suction device 58 is used as the upper end surface of the wall body 56. The tray 50 is sucked and held by abutting and sucking air from the hole-shaped suction part 60 formed on the holding surface 59 to make the inside of the wall 56 negative pressure.

しかしながら、このような構成にあっては、壁体56が複数の隆起部53を囲うように連続的に形成されるので、壁体56の重量が増大してトレイ50全体も高重量化し、トレイ50の吸着保持姿勢が不安定になり易くなる。しかも、隆起部53とは離れた位置に壁体56が形成されるので、その内部における空気の吸引空間が大きくなり、ひいては、トレイ50に付与される吸着力が低下してトレイ50を安定的に保持することが困難になるという不都合を生じる。この結果、搬送中にトレイ50の位置ずれが生じ易くなって当該トレイ50の位置を修正或いは調整する作業が必要となったり、トレイ50の不用意なる落下によりチップCを損傷させる可能性が高くなるという不都合を招来する。   However, in such a configuration, since the wall body 56 is continuously formed so as to surround the plurality of raised portions 53, the weight of the wall body 56 is increased, and the entire tray 50 is also increased in weight. The suction holding posture of 50 tends to become unstable. In addition, since the wall 56 is formed at a position away from the raised portion 53, the air suction space in the interior of the wall body 56 is increased, and as a result, the suction force applied to the tray 50 is reduced and the tray 50 is stabilized. Inconvenience that it is difficult to hold the slab. As a result, the position of the tray 50 is likely to be displaced during conveyance, and it is necessary to correct or adjust the position of the tray 50, or the chip C may be damaged due to inadvertent dropping of the tray 50. Inconvenience.

[発明の目的]
本発明は、このような不都合に着目して案出されたものであり、その目的は、吸着装置により安定して保持され、搬送等をスムースに行うことができるトレイ及びその吸着構造を提供することにある。
[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to provide a tray that can be stably held by a suction device and that can be smoothly transported, and a suction structure thereof. There is.

前記目的を達成するため、本発明は、所定の吸着装置の保持面に形成された吸引部により空気を吸引したときに、当該保持面側に吸着保持可能に設けられたトレイであって、
前記保持面に沿って配置可能なトレイ本体と、このトレイ本体の面から突出する形状を備えてチップを収容可能なポケットを内側に形成する複数の隆起部と、隣接する隆起部相互間に形成された溝とを備え、
前記溝の一部に、隣り合う隆起部に連なる連結体を設け、前記吸着状態で、連結体及び当該連結体に連なる隆起部により囲まれる溝内の空間が、前記保持面により閉塞可能に設けられる、という構成が採用されている。
In order to achieve the above object, the present invention is a tray provided so as to be capable of being suction-held on the holding surface side when air is sucked by a suction portion formed on the holding surface of a predetermined suction device,
A tray body that can be arranged along the holding surface, a plurality of ridges that have a shape protruding from the surface of the tray body and that can accommodate chips, and are formed between adjacent ridges. With a groove,
Provided in a part of the groove is a connecting body connected to an adjacent raised portion, and in the suction state, a space in the groove surrounded by the connecting body and the raised portion connected to the connecting body is provided so as to be closed by the holding surface. The configuration is adopted.

本発明において、前記連結体は、溝の底部から立設されて隆起部と略同一高さとなる片状体により形成されることが好ましい。   In the present invention, it is preferable that the connection body is formed of a piece-like body that is erected from the bottom of the groove and has substantially the same height as the raised portion.

また、前記連結体及び当該連結体に連なる隆起部は、平面視でトレイ本体の中央領域に設けられる、という構成も好ましくは採用される。   In addition, a configuration in which the connecting body and the raised portion connected to the connecting body are provided in a central region of the tray main body in a plan view is preferably employed.

更に、本発明のトレイの吸着構造は、所定の吸着装置を介してトレイを吸着保持するトレイの吸着構造において、
前記吸着装置は、吸引部が形成された保持面を含み、この吸引部から空気を吸引することで保持面側にトレイを吸着保持可能に設けられ、
前記トレイは、保持面に沿って位置可能なトレイ本体と、このトレイ本体の面から突出する形状を備えてチップを収容可能なポケットを内側に形成する複数の隆起部と、隣接する隆起部相互間に形成された溝とを備え、
前記溝の一部に、隣り合う隆起部に連なる連結体を設け、前記吸着状態で、連結体及び当該連結体に連なる隆起部により囲まれる溝内の空間が、前記保持面により閉塞される、という構成が採用される。
Furthermore, the tray suction structure of the present invention is a tray suction structure that holds and holds the tray via a predetermined suction device.
The suction device includes a holding surface on which a suction portion is formed, and is provided so as to suck and hold the tray on the holding surface side by sucking air from the suction portion,
The tray includes a tray main body that can be positioned along the holding surface, a plurality of ridges that have a shape protruding from the surface of the tray main body, and that form a pocket that can receive chips, and adjacent ridges. And a groove formed therebetween,
A part of the groove is provided with a connecting body connected to an adjacent raised portion, and in the adsorption state, a space in the groove surrounded by the connecting body and the raised portion connected to the connecting body is closed by the holding surface. The configuration is adopted.

本発明によれば、連結体及びこれに連なる隆起部により、保持面により閉塞されつつ、吸引部により空気が吸引されて吸着力を受ける吸引領域が形成される。つまり、前記吸引領域が隆起部を利用して形成される分、連結体の形成領域が従来構造の壁体よりも縮小でき、これにより、トレイ全体の軽量化を通じて吸着保持を安定して行うことが可能となる。また、隣り合う隆起部間に連結体を設ければよいので、前記吸引領域の形成位置の自由度を高め、適度な吸着力が発揮するようなサイズ若しくは形状に吸引領域を容易に設定することが可能となる。これにより、トレイの搬送中における位置ずれを抑制して当該搬送を迅速且つスムースに行えるようになる。   According to the present invention, a suction region that receives suction force by sucking air by the suction portion while being blocked by the holding surface is formed by the connecting body and the protruding portion connected thereto. That is, since the suction area is formed by using the raised portion, the formation area of the connection body can be reduced as compared with the wall body of the conventional structure, thereby stably holding the suction and holding through the weight reduction of the entire tray. Is possible. In addition, since it is only necessary to provide a connecting body between adjacent raised portions, the degree of freedom of the formation position of the suction region is increased, and the suction region is easily set to a size or shape that exhibits an appropriate suction force. Is possible. Thereby, the positional deviation during the conveyance of the tray is suppressed, and the conveyance can be performed quickly and smoothly.

また、各連結体が隆起部と略同一高さとなる片状体からなるので、これによっても、連結体ができるだけ軽くなるように形成することが可能となる。   Moreover, since each connection body consists of a piece-like body which becomes substantially the same height as the raised portion, it is possible to form the connection body as lightly as possible.

更に、トレイ本体の中央領域に各連結体及び当該連結体に連なる隆起部を設けたから、当該中央領域一箇所だけを吸着した場合であっても、吸着装置の保持面にトレイを安定して保持させることができる。   Furthermore, since each connecting body and a raised portion connected to the connecting body are provided in the central area of the tray body, the tray can be stably held on the holding surface of the suction device even when only one central area is sucked. Can be made.

以下、本発明の好ましい実施の形態について図面を参照しながら説明する。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

図1には、実施形態に係るトレイの平面図が示され、図2には、その部分拡大図が示されている。これらの図において、トレイ10は、樹脂材料を用いた一体成形品により構成され、複数枚のチップC(図3参照)を同時に収納可能に設けられている。トレイ10は、平面視略長方形状をなす板状のトレイ本体11と、このトレイ本体11の面から突出する形状を有するとともに、図1中縦方向及び横方向に沿って所定間隔毎に複数設けられた隆起部12と、隣接する隆起部12相互間に略格子状に形成された溝13とを備えて構成されている。   FIG. 1 shows a plan view of a tray according to the embodiment, and FIG. 2 shows a partially enlarged view thereof. In these drawings, the tray 10 is constituted by an integrally molded product using a resin material, and is provided so that a plurality of chips C (see FIG. 3) can be stored simultaneously. The tray 10 has a plate-like tray main body 11 having a substantially rectangular shape in plan view, and a shape protruding from the surface of the tray main body 11, and a plurality of trays 10 are provided at predetermined intervals along the vertical and horizontal directions in FIG. And the grooves 13 formed in a substantially lattice shape between the adjacent raised portions 12.

前記トレイ10は、図3に示されるように、吸着装置20により吸着保持可能に設けられている。この吸着装置20は、トレイ本体11の上面に沿って位置可能な保持面21を下面に備えた板状若しくはシート状をなすクッション材22と、このクッション材22を上側から支持する支持部材24とを備え、図示しない駆動装置を介して所定方向に移動可能に設けられている。保持面21は、図2中縦2列及び横3列に並ぶ各ポケット12の上部領域を閉塞可能な大きさの平面視方形状に設けられている。保持面21の面内中央部には、丸穴からなる吸引部25が形成されている一方、支持部材24の上部には、前記吸引部25に連通する吸気管26が設けられている。吸気管26は、図示しないポンプに接続されており、このポンプを作動させることにより、吸気管26を介して吸引部25から空気が吸引されるようになっている。   As shown in FIG. 3, the tray 10 is provided so as to be sucked and held by a suction device 20. The suction device 20 includes a cushion material 22 having a plate shape or a sheet shape having a holding surface 21 that can be positioned along the upper surface of the tray body 11 on the lower surface, and a support member 24 that supports the cushion material 22 from above. And provided so as to be movable in a predetermined direction via a driving device (not shown). The holding surface 21 is provided in a planar view shape having a size capable of closing the upper regions of the pockets 12 arranged in two vertical rows and three horizontal rows in FIG. A suction part 25 made of a round hole is formed in the central portion of the holding surface 21, and an intake pipe 26 communicating with the suction part 25 is provided on the support member 24. The intake pipe 26 is connected to a pump (not shown), and air is sucked from the suction portion 25 through the intake pipe 26 by operating this pump.

前記各隆起部12は、略方形の平面形状に設けられるとともに、図3中上面側を凹状に窪ませることでポケット12Aをそれぞれ形成している。各ポケット12Aは、内部に前記チップCをそれぞれ収容可能に設けられており、当該チップCとしては、特に限定されるものでないが、BGA型若しくはCSP型等の面実装型が例示できる。各ポケット12Aの下方には、トレイ本体11の下面より突出する膨出部14がそれぞれ設けられ、各膨出部14は、ポケット12Aより若干小さい平面サイズに形成されている。従って、複数のトレイ10を重ねたときに、上段のトレイ10の膨出部14が、下段のトレイ10のポケット12Aに嵌り合うようになっている。ここで、図1及び図2に示されるように、平面視でトレイ本体11の中央領域に位置する隆起部12の間には、溝13の底部から立設する連結体16が設けられている。   Each of the raised portions 12 is provided in a substantially square planar shape, and a pocket 12A is formed by recessing the upper surface side in FIG. 3 in a concave shape. Each of the pockets 12A is provided so as to be able to accommodate the chip C therein, and the chip C is not particularly limited, but can be a surface mount type such as a BGA type or a CSP type. Below each pocket 12A, a bulging portion 14 protruding from the lower surface of the tray main body 11 is provided, and each bulging portion 14 is formed in a slightly smaller planar size than the pocket 12A. Therefore, when the plurality of trays 10 are stacked, the bulging portion 14 of the upper tray 10 fits into the pocket 12 </ b> A of the lower tray 10. Here, as shown in FIG. 1 and FIG. 2, a connecting body 16 is provided between the raised portions 12 located in the central region of the tray main body 11 in a plan view and is erected from the bottom of the groove 13. .

前記連結体16は、トレイ本体11の面内中央部11A上に吸着装置20の吸引部25を配置して吸着状態としたときに、平面視で前記保持面21の領域内に収まる各隆起部13に連なって設けられている。これを更に詳述すると、上下方向に延びる4つの縦壁部17と、左右方向に延びる2つの横壁部18とを備え、縦壁部17は、平面視で吸引部25に重なって位置する2つの隆起部12,12のコーナー部と、当該隆起部12,12の図2中上下方向に隣り合う4つの隆起部12のコーナー部とを相互に連結するようにそれぞれ設けられている。また、横壁部18は、前記縦壁部17が形成された6つの隆起部12のうち、図2中上下両側の左右に相互に隣り合う隆起部12のコーナー部同士を連結するようにそれぞれ形成されている。図3及び図4にも示されるように、各縦壁部17及び横壁部18は、隆起部12の高さと略同一高さを有する片状体からなり、隆起部12の上端面と、各縦壁部17及び横壁部18の上端面とが略面一となって前記保持面21に当接するようになっている。   The connecting body 16 has each raised portion that fits in the region of the holding surface 21 in a plan view when the suction portion 25 of the suction device 20 is placed on the in-plane center portion 11A of the tray main body 11 to be in the suction state. 13 is provided. More specifically, it includes four vertical wall portions 17 extending in the vertical direction and two horizontal wall portions 18 extending in the left-right direction, and the vertical wall portion 17 is positioned so as to overlap the suction portion 25 in plan view. The corner portions of the two raised portions 12 and 12 and the corner portions of the four raised portions 12 adjacent to each other in the vertical direction in FIG. 2 of the raised portions 12 and 12 are provided to each other. Also, the horizontal wall portion 18 is formed so as to connect the corner portions of the ridge portions 12 adjacent to each other on the left and right sides of FIG. 2 among the six ridge portions 12 in which the vertical wall portion 17 is formed. Has been. As shown in FIGS. 3 and 4, each of the vertical wall portion 17 and the horizontal wall portion 18 is a piece having a height substantially the same as the height of the raised portion 12, and the upper end surface of the raised portion 12, The upper end surfaces of the vertical wall portion 17 and the horizontal wall portion 18 are substantially flush with each other and come into contact with the holding surface 21.

以上の構成において、吸着装置20を介してトレイ10を吸着保持する場合、先ず、吸着装置20を移動し、平面視でトレイ本体11の面内中央部11Aと吸引部25とが一致するように保持面21をトレイ本体11の上面側に配置する。このとき、図2中網点で示した空間S、すなわち、連結体16を構成する各縦壁部17及び横壁部18と、これに連なる隆起部12とにより囲まれる溝13内の空間Sが保持面21により閉塞されて略密閉された状態となり、また、保持面21により覆われるポケット12Aも閉塞される。その後、前記ポンプ(図示省略)を作動させて吸引部25より空気を吸引する。これにより、吸引部25に重なる二つのポケット12A,12A内(図2中網掛け線で表すポケット12A,12A)の他、前述の網点で図示した空間Sの内部の空気が吸引部25により吸引されて負圧化され、トレイ10が保持面21側に吸着保持される。   In the above configuration, when the tray 10 is sucked and held via the suction device 20, first, the suction device 20 is moved so that the in-plane center portion 11A of the tray body 11 and the suction portion 25 coincide with each other in plan view. The holding surface 21 is disposed on the upper surface side of the tray body 11. At this time, the space S indicated by the halftone dots in FIG. 2, that is, the space S in the groove 13 surrounded by the vertical wall portions 17 and the horizontal wall portions 18 constituting the connecting body 16 and the raised portions 12 connected thereto, is formed. It is closed by the holding surface 21 so as to be substantially sealed, and the pocket 12A covered by the holding surface 21 is also closed. Thereafter, the pump (not shown) is operated to suck air from the suction part 25. As a result, in the two pockets 12A and 12A that overlap the suction part 25 (pockets 12A and 12A represented by hatched lines in FIG. 2), the air inside the space S shown by the halftone dots described above is caused by the suction part 25. The suction is reduced to a negative pressure, and the tray 10 is sucked and held on the holding surface 21 side.

従って、このような実施形態によれば、各縦壁部17及び横壁部18だけでなく隆起部12の形成面を利用して前記空間Sを形成することができる。つまり、空間Sを形成するために縦壁部17及び横壁部18を形成する領域をできるだけ少なくすることができ、トレイ10全体の軽量化が達成され、ひいては、吸着装置20によるトレイ10の保持姿勢を安定的に維持することが可能となる。しかも、縦壁部17及び横壁部18の高さを隆起部12と同一としたので、これによっても、トレイ10の軽量化に寄与することが可能となる。   Therefore, according to such an embodiment, the space S can be formed using not only the vertical wall portions 17 and the horizontal wall portions 18 but also the formation surfaces of the raised portions 12. That is, the area in which the vertical wall portion 17 and the horizontal wall portion 18 are formed in order to form the space S can be reduced as much as possible, the weight of the entire tray 10 can be reduced, and consequently the holding posture of the tray 10 by the suction device 20 can be achieved. Can be stably maintained. In addition, since the height of the vertical wall portion 17 and the horizontal wall portion 18 is the same as that of the raised portion 12, this can also contribute to the weight reduction of the tray 10.

本発明を実施するための最良の構成、方法などは、以上の記載で開示されているが、本発明は、これに限定されるものではない。
すなわち、本発明は、特定の実施の形態に関して特に図示し、且つ、説明されているが、本発明の技術的思想及び目的の範囲から逸脱することなく、以上に述べた実施形態に対し、形状、位置若しくは方向、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。
従って、上記に開示した形状などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状などの限定の一部若しくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。
Although the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, the present invention is not limited to this.
That is, the present invention has been particularly shown and described with respect to particular embodiments, but is not limited to the embodiments described above without departing from the scope and spirit of the present invention. Various modifications may be made by those skilled in the art in terms of position, orientation, and other detailed configurations.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description in the name of the member excluding a part or all of the limitation is included in the present invention.

例えば、前記吸引部25は、図示構成例に限られず、複数箇所に散点的に小穴を設けたり、吸気を行う領域をポーラス体で形成したりしてもよい。   For example, the suction unit 25 is not limited to the illustrated configuration example, and small holes may be provided at a plurality of points in a scattered manner, or a region for performing intake may be formed with a porous body.

また、連結体16を縦壁部17及び横壁部18等の形成位置は、種々の設計変更が可能であり、例えば、図5及び図6に示される構成に代替することが可能である。図5において、縦壁部17及び横壁部18は、各隆起部12の同図中上下方向中央部若しくは左右方向中央部に連なって設けられている。また、図6のように、斜め方向に隣り合う隆起部12,12の間に連なる傾斜壁部19を設け、保持面21により閉塞される空間S(同図中網点で示す)を形成してもよい。要する、本発明は、溝13の一部に連結体16を設け、当該連結体16とこれに連なる隆起部12により、前述の空間Sと同様の作用を奏する空間を形成することにより足りる。   Further, the design positions of the connecting body 16 such as the vertical wall portion 17 and the horizontal wall portion 18 can be changed in various ways. For example, the configuration shown in FIGS. 5 and 6 can be substituted. In FIG. 5, the vertical wall portion 17 and the horizontal wall portion 18 are provided so as to be connected to the center portion in the up-down direction or the center portion in the left-right direction in the figure of each raised portion 12. Further, as shown in FIG. 6, an inclined wall portion 19 is provided between the raised portions 12, 12 adjacent to each other in the oblique direction, and a space S (shown by a halftone dot in the figure) closed by the holding surface 21 is formed. May be. In short, the present invention suffices by providing a connecting body 16 in a part of the groove 13 and forming a space having the same effect as the above-described space S by the connecting body 16 and the raised portion 12 connected thereto.

実施形態に係る収納容器の概略平面図。The schematic plan view of the storage container which concerns on embodiment. 図1のA部拡大図。The A section enlarged view of FIG. 図2のB−B線に沿う断面図。Sectional drawing which follows the BB line of FIG. 図2のC−C線に沿う断面図。Sectional drawing which follows the CC line | wire of FIG. 変形例に係る図2と同様の拡大図。The enlarged view similar to FIG. 2 which concerns on a modification. 他の変形例に係る図2と同様の拡大図。The enlarged view similar to FIG. 2 which concerns on another modification. 従来例に係る収納容器の図1と同様の平面図。The top view similar to FIG. 1 of the storage container which concerns on a prior art example. 図7のD部拡大図。The D section enlarged view of FIG. 図8のE−E線に沿う断面図。Sectional drawing which follows the EE line | wire of FIG.

符号の説明Explanation of symbols

10・・・トレイ、11・・・トレイ本体、12・・・隆起部、12A・・・ポケット、13・・・溝、16・・・連結体、20・・・吸着装置、21・・・保持面、25・・・吸引部、C・・・チップ   DESCRIPTION OF SYMBOLS 10 ... Tray, 11 ... Tray main body, 12 ... Raised part, 12A ... Pocket, 13 ... Groove, 16 ... Connection body, 20 ... Adsorption device, 21 ... Holding surface, 25 ... suction part, C ... tip

Claims (4)

所定の吸着装置の保持面に形成された吸引部により空気を吸引したときに、当該保持面側に吸着保持可能に設けられたトレイであって、
前記保持面に沿って配置可能なトレイ本体と、このトレイ本体の面から突出する形状を備えてチップを収容可能なポケットを内側に形成する複数の隆起部と、隣接する隆起部相互間に形成された溝とを備え、
前記溝の一部に、隣り合う隆起部に連なる連結体を設け、前記吸着状態で、連結体及び当該連結体に連なる隆起部により囲まれる溝内の空間が、前記保持面により閉塞可能に設けられていることを特徴とするトレイ。
When air is sucked by a suction portion formed on a holding surface of a predetermined suction device, the tray is provided on the holding surface side so as to be sucked and held,
A tray body that can be arranged along the holding surface, a plurality of ridges that have a shape protruding from the surface of the tray body and that can accommodate chips, and are formed between adjacent ridges. With a groove,
Provided in a part of the groove is a connecting body connected to an adjacent raised portion, and in the suction state, a space in the groove surrounded by the connecting body and the raised portion connected to the connecting body is provided so as to be closed by the holding surface. A tray characterized by being made.
前記連結体は、溝の底部から立設されて隆起部と略同一高さとなる片状体により形成されていることを特徴とする請求項1記載のトレイ。   The tray according to claim 1, wherein the coupling body is formed of a piece-like body that stands from the bottom of the groove and has substantially the same height as the raised portion. 前記連結体及び当該連結体に連なる隆起部は、平面視でトレイ本体の中央領域に設けられていることを特徴とする請求項1記載のトレイ。   The tray according to claim 1, wherein the connecting body and the raised portion connected to the connecting body are provided in a central region of the tray body in a plan view. 所定の吸着装置を介してトレイを吸着保持するトレイの吸着構造において、
前記吸着装置は、吸引部が形成された保持面を含み、この吸引部から空気を吸引することで保持面側にトレイを吸着保持可能に設けられ、
前記トレイは、保持面に沿って位置可能なトレイ本体と、このトレイ本体の面から突出する形状を備えてチップを収容可能なポケットを内側に形成する複数の隆起部と、隣接する隆起部相互間に形成された溝とを備え、
前記溝の一部に、隣り合う隆起部に連なる連結体を設け、前記吸着状態で、連結体及び当該連結体に連なる隆起部により囲まれる溝内の空間が、前記保持面により閉塞されることを特徴とするトレイの吸着構造。
In the tray suction structure that holds the tray by suction through a predetermined suction device,
The suction device includes a holding surface on which a suction portion is formed, and is provided so as to suck and hold the tray on the holding surface side by sucking air from the suction portion,
The tray includes a tray main body that can be positioned along the holding surface, a plurality of ridges that have a shape protruding from the surface of the tray main body, and that form a pocket that can receive chips, and adjacent ridges. And a groove formed therebetween,
A connection body connected to an adjacent raised portion is provided in a part of the groove, and in the suction state, a space in the groove surrounded by the connection body and the raised portion connected to the connection body is blocked by the holding surface. Tray adsorption structure characterized by
JP2005092599A 2005-03-28 2005-03-28 Tray and its adsorption structure Expired - Fee Related JP4506533B2 (en)

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JP3350532B1 (en) 2001-09-28 2002-11-25 コニシ株式会社 Aqueous solid adhesive and bonding method using the aqueous solid adhesive

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002001686A (en) * 2001-06-25 2002-01-08 Seiko Epson Corp Semiconductor storage container carrying device and method, and suction pad used for it
JP2002002871A (en) * 2000-04-20 2002-01-09 Hitachi Ltd Method for manufacturing semiconductor device and tray used therein

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002002871A (en) * 2000-04-20 2002-01-09 Hitachi Ltd Method for manufacturing semiconductor device and tray used therein
JP2002001686A (en) * 2001-06-25 2002-01-08 Seiko Epson Corp Semiconductor storage container carrying device and method, and suction pad used for it

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