JP2006253039A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006253039A5 JP2006253039A5 JP2005070053A JP2005070053A JP2006253039A5 JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5 JP 2005070053 A JP2005070053 A JP 2005070053A JP 2005070053 A JP2005070053 A JP 2005070053A JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5
- Authority
- JP
- Japan
- Prior art keywords
- flexible body
- contact
- contact portion
- substrate
- micromachine switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 7
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005070053A JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005070053A JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006253039A JP2006253039A (ja) | 2006-09-21 |
JP2006253039A5 true JP2006253039A5 (zh) | 2008-04-24 |
JP4643316B2 JP4643316B2 (ja) | 2011-03-02 |
Family
ID=37093281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005070053A Expired - Fee Related JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4643316B2 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4919819B2 (ja) * | 2007-01-24 | 2012-04-18 | 富士通株式会社 | マイクロマシンデバイスの駆動制御方法および装置 |
CN101606213A (zh) * | 2007-11-14 | 2009-12-16 | 松下电器产业株式会社 | 机电元件及使用该机电元件的电气设备 |
KR101092926B1 (ko) * | 2009-05-21 | 2011-12-12 | 한국과학기술원 | 공진형 회전이동 구동기 및 이를 갖는 공진형 회전이동 구동 어레이 |
US7928333B2 (en) * | 2009-08-14 | 2011-04-19 | General Electric Company | Switch structures |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI109155B (fi) * | 2000-04-13 | 2002-05-31 | Nokia Corp | Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi |
JP2004134370A (ja) * | 2002-07-26 | 2004-04-30 | Matsushita Electric Ind Co Ltd | スイッチ |
-
2005
- 2005-03-11 JP JP2005070053A patent/JP4643316B2/ja not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1619710A3 (en) | Vibration type MEMS switch and fabricating method thereof | |
JP2012185153A5 (zh) | ||
US10971986B2 (en) | Broadband vibrational energy harvesting device combining multiple nonlinearity | |
JP2009050146A5 (zh) | ||
JP2014533009A5 (zh) | ||
WO2011052973A3 (ko) | 진동의 자기-증폭 기능을 갖는 구조로 된 압전진동장치 및 이를 진동수단으로 채용한 전기/전자기기 | |
WO2010148312A3 (en) | Increased frequency power generation using low-frequency ambient vibrations | |
EP2490002A3 (en) | Piezoelectric vibration type force sensor and robot apparatus | |
JP2005234238A5 (zh) | ||
CN103124389A (zh) | 具有相互交叉的第一组梳齿和第二组梳齿的声换能器 | |
JP2010112888A5 (zh) | ||
JP2008099549A (ja) | 圧電モータ | |
RU2011137568A (ru) | Линейный колебательный привод | |
CN106887973A (zh) | 一种基于磁力作用的平行复合梁压电‑电磁俘能装置 | |
CN111464070A (zh) | 一种直线超声电机定子及其电激励方法 | |
JP2006253039A5 (zh) | ||
JP2006314179A5 (zh) | ||
JP2006149180A (ja) | 平板型圧電超音波モーター | |
CN107592089A (zh) | 一种具有通孔结构的低热弹性阻尼悬臂微梁谐振器 | |
KR20130037286A (ko) | 압전소자가 장착된 바이브레이터 | |
JP5218761B2 (ja) | 検出素子、それを備えた検出装置、検出素子に用いられる振動子、および検出装置における検出対象物の検知方法 | |
JP2019030092A5 (zh) | ||
JP2004048932A5 (zh) | ||
CN107564505A (zh) | 一种压电振动发声模块 | |
JP2006253039A (ja) | マイクロマシンスイッチ及びその駆動方法 |