JP2006252838A - Organic electroluminescent device, manufacturing method of organic electroluminescent device, and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL device enabled to flatten the surface of function parts as well as uniformly dry the function parts, a manufacturing method of the organic EL device, and an electronic apparatus. <P>SOLUTION: Since a liquid retention part 37 is so set as to be at an almost constant distance from the function parts 30, a distance between the function parts 30 and solvents 50 retained by the liquid retention part 37 is made uniform. Further, since the liquid retention part 37 is so set as to have a holding width t2 for holding a solvent 50, the solvent 50 held by the liquid retention part 37 never makes an irregular pattern. Therefore, partial pressures of solvent molecules at a part along the function part 30 can be made uniform, so that the function part 30 can be uniformly dried. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an organic EL device, a method for manufacturing the organic EL device, and an electronic apparatus.

  The organic EL device has a configuration in which, for example, a partition is provided on a substrate, and a functional unit including a light emitting unit is provided in a portion partitioned by the partition. As one of the methods for forming this functional part, a droplet discharge method is known. The droplet discharge method is a method in which a liquid material in which an organic light emitting material or the like is dissolved in a solvent is discharged to a portion partitioned by a partition wall, and the solvent is evaporated to form a functional part.

  For example, when a plurality of functional units are arranged on a substrate, such as an active matrix organic EL device, the functional units arranged in the peripheral part of the substrate are more solvent molecules than the functional units arranged in the central part. Partial pressure may be reduced. If the partial pressure of the solvent molecules is small, the evaporation rate of the solvent evaporating from the functional part increases, and the solvent evaporates rapidly, so that the surface of the formed functional part does not become flat. If the surface of the functional part is not flat, in the organic EL device, the display characteristics of that part will be low.

On the other hand, a technique for flattening the surface of the functional part by suppressing the evaporation rate of the solvent evaporated from the functional part in the peripheral part is disclosed (for example, refer to Patent Document 1). According to the description in Patent Document 1, a region outside the region where the functional part is formed is set as a dummy region that does not contribute to display among the regions on the substrate, and the liquid material is formed in the dummy region when the functional unit is formed. A solvent is dropped to increase the partial pressure of solvent molecules in the peripheral portion. By increasing the partial pressure of the solvent molecules, the solvent is prevented from rapidly evaporating.
JP 2002-222695 A

  However, there is no portion partitioned by the partition in the dummy region, and the solvent is dropped directly on the flat surface. For this reason, the dripped solvent adheres and the magnitude | size of a solvent becomes non-uniform | heterogenous. In addition, the solvent dropped on a flat surface that is not partitioned by the barrier ribs is easily formed in an irregular pattern, and the distance from the functional unit becomes non-uniform in a plan view. As a result, the partial pressure of the solvent molecules becomes non-uniform in the dummy area, and the functional part cannot be uniformly dried.

  In view of the circumstances as described above, an object of the present invention is to provide an organic EL device capable of flattening the surface of the functional unit and uniformly drying the functional unit, a method for manufacturing the organic EL device, and an electronic apparatus. There is to do.

In order to achieve the above object, an organic EL device according to the present invention includes a substrate, a partition provided on the substrate, and a functional unit including a light emitting unit that is provided so as to be partitioned by the partition and emits light. And provided along the function part so that the distance from the function part is substantially constant in a plan view, and is formed so as to be able to hold a liquid, and the part that holds the liquid is the function part. And a liquid holding part having substantially the same width in the direction along the direction.
Here, the “plan view” means viewing from a direction perpendicular to the plane, and here, for example, viewing from a direction perpendicular to the substrate surface.

  In the present invention, since the liquid holding portion capable of holding the liquid is provided along the functional portion, the functional portion is formed by discharging the liquid material to a portion partitioned by the partition wall by, for example, a droplet discharge method. In doing so, the partial pressure of the solvent molecules can be increased in the portion along the functional portion by holding the liquid material solvent or the like in the liquid holding portion. Thereby, it can suppress that a solvent evaporates rapidly from a function part, and can make the surface of a function part flat.

  On the other hand, since the liquid holding unit is provided so that the distance from the functional unit is substantially constant, the distance between the functional unit and the solvent held in the liquid holding unit is uniform. Further, since the liquid holding part is provided so that the part holding the liquid has a substantially equal width in the direction along the functional part, the solvent held in the liquid holding part has an irregular pattern. There is nothing. Thereby, since the partial pressure of the solvent molecule can be made uniform in the portion along the functional part, the functional part can be dried uniformly.

In addition, it is preferable that a plurality of the function units are provided, and the liquid holding unit is provided in a region between the plurality of function units.
The distribution of the partial pressure becomes higher at the portion where the solvent of the discharged liquid material evaporates. The liquid material is not discharged into the area between the functional parts, and the partial pressure is lowered accordingly. Although the partial pressure in the area between the functional parts is higher than the partial pressure in the area outside the area where the functional parts are formed, it affects the drying of the liquid material and causes uneven drying. There is a risk. In the present invention, since the liquid holding part is also provided between the functional parts, it is possible to prevent such influence when the liquid material is dried.

Moreover, it is preferable that the said liquid holding part is provided in the said partition.
By providing the liquid holding part on the partition wall, the partition wall and the liquid holding part can be formed integrally.

Moreover, it is preferable that the said liquid holding | maintenance part is a groove | channel provided in the said partition.
In the step of forming the partition wall, a resist is usually formed once, and a portion of the resist from which the liquid material is discharged is patterned and removed. According to the present invention, in the patterning step, there is an advantage that the portion for discharging the liquid material and the groove portion can be patterned at a time.

Moreover, it is preferable that the said liquid holding | maintenance part is a part in which the said liquid holding | maintenance part was formed between a pair of bank provided in the said partition.
When drying the liquid material discharged by the droplet discharge method, it is necessary to evaporate all the solvent held in the liquid holding portion. In the present invention, since the solvent is held not between the grooves formed in the partition walls but between the pair of banks provided in the partition walls, for example, it is easier to evaporate than when held in the groove portions.

Moreover, it is preferable that the said liquid holding | maintenance part is a lyophilic area | region formed in the said partition.
In the case of performing the droplet discharge method, before discharging the liquid material, a lyophilic process is performed on a portion of the partition wall where the functional portion is formed so that the liquid material is easily attached. In addition, a liquid repellent treatment is applied to a portion where the liquid material is not attached, such as the surface of the partition wall, so that the liquid material is not easily blended. According to the present invention, since the liquid holding part can be formed simultaneously with the lyophilic treatment, it is not necessary to provide a groove or a bank in the partition wall, and the liquid holding part can be formed easily.

  A method for manufacturing an organic EL device according to another aspect of the present invention includes a step of forming a partition wall defining a functional unit including a light emitting unit that emits light on a substrate, and a distance from the functional unit in a plan view. Forming a liquid holding portion along the functional portion so that the liquid holding portion has a substantially equal width with respect to a direction along the functional portion, and is partitioned by the partition wall. A step of discharging a liquid material containing the material constituting the functional unit to a portion, a step of holding the liquid contained in the liquid material in the liquid holding unit, and removing the liquid contained in the liquid material. And a step of forming the functional part.

  In the present invention, by holding the liquid contained in the liquid material in the liquid holding portion, the partial pressure of the solvent molecules can be increased in the portion along the functional portion, and the solvent is rapidly evaporated from the functional portion. Can be suppressed. Thereby, when removing the liquid material of the part partitioned by the partition, the surface of a function part can be made flat.

  On the other hand, since the liquid holding part is provided so that the distance from the functional part is substantially constant, the distance between the functional part and the liquid held in the liquid holding part becomes uniform. Further, since the liquid holding portion is provided so that the holding width for holding the liquid is uniform, the liquid held in the liquid holding portion does not have an irregular pattern. Thereby, the partial pressure of the solvent molecules can be made uniform in the portion along the functional part, and the surface of the functional part does not become non-uniform when the liquid is removed from the liquid material.

  In addition, “a step of discharging a liquid material containing a material constituting the functional unit to a portion partitioned by the partition wall” and “a step of holding the liquid contained in the liquid material in the liquid holding unit” Are both performed before “the step of removing the liquid contained in the liquid material to form the functional part”, either of which may be performed first, and simultaneously if possible. You can go.

An electronic apparatus according to another aspect of the present invention includes the above-described organic EL device or an organic EL device manufactured by the method for manufacturing the organic EL device.
In the present invention, since the organic EL device capable of flattening the surface of the functional part and drying the functional part uniformly is mounted, an electronic device having no display unevenness and high display characteristics can be obtained.

  For example, when an organic EL device used in a line head module that exposes a photosensitive drum, for example, an organic EL device in which functional portions are arranged in two rows is formed by a droplet discharge method, the end and the central portion of the functional portion The solvent partial pressure is different. If the functional part is not dried uniformly, the exposure of the photosensitive drum will be non-uniform. In particular, in the case of an organic EL device having only two rows of functional portions, the light emission characteristics are significantly lowered when the functional portions are not uniformly dried.

  According to the present invention, when the liquid material is ejected in the step of forming the functional unit of such an organic EL device, the solvent for forming the functional unit can be held in the liquid holding unit. The functional part can be dried uniformly. For this reason, it is possible to prevent the light emission characteristics of the organic EL device from being deteriorated, and the photosensitive drum can be uniformly exposed.

A first embodiment of the present invention will be described with reference to the drawings.
Embodiments of the present invention will be described with reference to the drawings. In the following drawings, the scale is appropriately changed to make each member a recognizable size.

FIG. 1 is a perspective view schematically showing the overall configuration of the organic EL device 1.
The organic EL device 1 includes a substrate 10 on which a wiring, an insulating layer, and the like are formed on a substrate 2, an organic EL element unit 3 formed on the substrate 10, and a driving unit 4 attached to an end 2a of the substrate 10. And the sealing portion 5 that covers the organic EL element portion 3 and the substrate 10, and the organic EL element portion 3 emits light in response to an electric signal supplied from the driving portion 4, so that an image, a moving image, etc. Can be displayed.

  In the present embodiment, the organic EL device 1 is an active matrix type in which a thin film transistor (TFT) is formed, and is a bottom emission type in which light generated by the organic EL element unit 3 is transmitted through the substrate 10 and extracted. Will be described as an example.

FIG. 2 is a plan view of the organic EL device 1. In this figure, the organic EL element part 3 and the sealing part 5 are omitted.
As shown in the figure, the base body 10 is partitioned into a pixel portion 7 (region within a one-dot chain line) and a peripheral portion 8 (region outside the one-dot chain line). It is further partitioned into P (region in the two-dot chain line) and dummy region Q (region between the one-dot chain line and the two-dot chain line). The actual display area P of the pixel unit 7 has a pixel area K through which light from the light emitting area 14 passes.

FIG. 3 is a diagram schematically showing an AA cross section of the organic EL device 1. FIG. 4 is a diagram schematically showing a BB cross section of the organic EL device 1.
As shown in FIGS. 3 and 4, the substrate 2 that is a constituent element of the base 10 is a transparent substrate made of, for example, glass, quartz, resin (plastic, plastic film), or the like. The organic EL device 1 according to this embodiment is of a bottom emission type, and the substrate 2 needs to be transparent in order to extract light. On the surface 2b of the substrate 2, a transparent base protective layer 11 such as SiO ₂ is formed as a base.

  In the actual display region P of the pixel unit 7, the silicon film 12, the first insulating layer (gate insulating layer) 13, the gate electrode 15 a, the second insulating layer 16, the source electrode 17 a, the drain electrode 18, A third insulating layer 19 is formed. Further, in the dummy region Q of the pixel portion 7, a scanning drive circuit 20, a data drive circuit 21, an inspection circuit 22, and the like are formed on the base protective layer 11, and a power supply line ( (Not shown) is formed.

  The silicon film 12 is a driving transistor having a channel region, a source region, and a drain region. In the silicon film 12, a region overlapping the gate electrode 15a with the gate insulating layer 13 interposed therebetween is a channel region 12a. A low concentration source region 12b and a high concentration source region 12s are formed on the source side of the channel region 12a, and a low concentration drain region 12c and a high concentration drain region 12d are formed on the drain side of the channel region 12a. Thus, the silicon film 12 has an LDD (Light Doped Drain) structure.

In the high concentration source region 12 s and the high concentration drain region 12 d, contact holes 23 and 24 are formed that are opened through the gate insulating layer 13 and the second insulating layer 16. On the other hand, a contact hole 25 is formed through the third insulating layer 19 so as to be connected to the drain electrode 18 on the high concentration drain region 12d side.
The gate insulating layer 13 is a transparent layer formed of, for example, SiO ₂ or SiN, and insulates the silicon film 12 and the gate electrode 15a.

  The gate electrode 15 a is formed of, for example, aluminum or copper and is connected to the scanning line 15. The source electrode 17a is formed of aluminum, copper, or the like, like the gate electrode 15a, and is connected to the data line 17. The source electrode 17a is connected to the high concentration source region 12s through the contact hole 23. The drain electrode 18 is connected to the high concentration drain region 12d.

The second insulating layer 16 is a transparent layer mainly made of SiO ₂ and insulates the gate electrode 15a, the source electrode 17a, and the drain electrode 18 respectively.
The third insulating layer 19 is mainly composed of, for example, an acrylic resin component, and insulates the source electrode 17 a from the drain electrode 18 and the contact hole 25. Note that a material other than the acrylic insulating film, for example, SiN, SiO _2, or the like can be used.

  The scanning drive circuit 20 provided in the dummy area Q includes a memory such as a shift register and a circuit such as a level shifter that converts a signal level, and is connected to the scanning line 15. The data drive circuit 21 includes circuits such as a video line and an analog shifter in addition to the shift register and the level shifter, and is connected to the data line 17. The scan drive circuit 20 and the data drive circuit 21 are connected to the drive unit 4 via drive control signal lines 28 a and 28 b, and output electrical signals to the scan line 15 and the data line 17 under the control of the drive unit 4. It is like that. The inspection circuit 22 is a circuit for inspecting the operating state of the organic EL device 1, and includes, for example, inspection information output means (not shown) for outputting the inspection result to the outside, and a display device during manufacture or at the time of shipment. The quality and defect inspection can be performed. The scanning drive circuit 20, the data drive circuit 21, and the inspection circuit 22 are connected to a power supply via drive power supply lines 29a and 29b.

  On the peripheral edge 8, a connection wiring 27 connected to the organic EL element 3 is formed. The connection wiring 27 is connected to the drive unit 4, and an electric signal from the drive unit 4 can be supplied to the organic EL element 3 through the connection wiring 27.

  On the other hand, in the organic EL element 3, the anode 31, the hole injection layer 32, the light emitting unit 33 (hereinafter, the hole injection layer 32 and the light emitting unit 33 are collectively referred to as “functional unit 30”). ), A common electrode (cathode) 34, a pixel opening film 35, and an organic bank layer 36. These are laminated on the substrate 10 described above.

  The anode 31 is a transparent electrode that injects holes into the hole injection layer 32, and is made of, for example, ITO (Indium Tin Oxide) or the like. The anode 31 is connected to the drain electrode 18 through the contact hole 25 and is formed in a convex shape so as to press the hole injection layer 32.

  The light emitting unit 33 is a layer that emits light by combining holes from the hole injection layer 32 and electrons from the cathode 34, and is formed of, for example, a low molecular material or a polymer material. The light emitting section 33 includes three types, a layer that emits red light (33R), a layer that emits green light (33G), and a layer that emits blue light (33B). Such light from the light emitting portion 33 is transmitted through the hole injection layer 32, the anode 31, and the substrate 10, whereby an image, a moving image, or the like is displayed in the actual display region P of the substrate 2.

  The cathode 34 is a layer that injects electrons into the light emitting unit 33 in accordance with an electric signal from the driving unit 4, and is formed of a metal such as calcium, for example. The cathode 34 has an area larger than the total area of the actual display region P and the dummy region Q, and is formed so as to cover each region. The cathode 34 is formed on the substrate 10 so as to cover the outside of the organic EL element 3. Has been. The cathode 34 is connected to the connection wiring 27, and is connected to the drive unit 4 via the connection wiring 27. In order to prevent corrosion of the cathode 34 during manufacturing, a protective layer such as aluminum may be formed on the upper layer of the cathode 34.

The pixel opening film 35 is an insulating film made of, for example, SiO ₂ . The pixel opening film 35 enables movement of holes from the anode 31 in the opening 35a surrounded by the wall surface 35b, and prevents movement of holes in a portion where the opening 35a is not provided. ing.

  The organic bank layer 36 is a partition wall when the hole injection layer 32 and the light emitting portion 33 are formed by a droplet discharge method such as an ink jet method. In addition, the insulating layer prevents electrons from moving between the adjacent hole injection layer 32 and the light emitting portion 33. The organic bank layer 36 is made of a heat-resistant and soluble material such as acrylic or polyimide, and blocks the hole injection layer 32 and the light emitting portion 33. In the organic bank layer 36, a region showing lyophilicity and a region showing liquid repellency are formed.

  The thickness of the organic bank layer 36 is preferably in the range of 1.0 μm to 3.0 μm, particularly preferably about 2 μm. If the thickness of the organic bank layer 36 is less than 1.0 μm, the liquid material may overflow when the liquid material of the light emitting layer 33 is discharged. If the thickness exceeds 3.0 μm or more, the step between the organic bank layer 36 and the light emitting portion 33 becomes large, and step coverage with the cathode 34 may not be ensured. The organic bank layer 36 is provided with a liquid holding portion 37.

  The liquid holding portion 37 is formed in a groove shape in the surface layer portion of the organic bank layer 36, and has an opening on the upper surface 36c of the organic bank layer 36, and extends in the X direction as shown in FIG. It is provided to exist.

  Under such a configuration of the groove, the liquid holding part 37 can hold the liquid. The depth T1 of the liquid holding part 37 is preferably in the range of 1.0 μm to 5.0 μm.

FIG. 5 is an enlarged plan view showing a part of the display unit of the organic EL device 1.
As shown in the figure, the light emitting units 33 constituting each functional unit 30 are arranged so as to have a uniform interval t1 with the liquid holding unit 37, and the t1 is in the range of 10 μm to 50 μm. .
Further, the width (length in the Y direction) t2 of the liquid holding portion 37 is in the range of 1.0 μm to 5.0 μm, and is formed to be uniform along the X direction.

Next, a process for manufacturing the organic EL device 1 configured as described above will be described.
FIG. 6 is a flowchart showing a manufacturing process of the organic EL device 1. The process of forming the base 10 and the region of the pixel portion 7 of the organic EL element 3 will be mainly described, and the description of the process of forming the peripheral edge 8 will be omitted.

  In forming the hole injection layer 32 and the light emitting portion 33 in the present embodiment, a droplet discharge method is used in which the material of the hole injection layer 32 and the material of the light emitting portion 33 are dissolved in a solvent and dropped into a predetermined place. Is going. Since the material of the hole injection layer 32 and the light emitting unit 33 is an organic material, for example, an organic solvent common to the hole injection layer 32 and the light emitting unit 33 is used.

A process of forming the substrate 10 by forming TFT elements, insulating films, etc. on the substrate 2 will be described (ST1).
A base protective layer 11 is formed on the substrate 2 by a known method. A silicon film 12 is formed on the base protective layer 11 and laser annealed to form polysilicon. After the polysiliconized silicon film 12 is covered with the gate insulating layer 13, the gate electrode 15a is formed, and the gate insulating layer 13 is formed thereon again. The source-side contact hole 23 is formed by patterning.

Next, the second insulating layer 16 is formed, and the contact hole 24 and the source electrode 17a connected to the contact hole 24 are formed by patterning. On the second insulating layer 16, the source electrode 17a and the drain electrode 18 are formed by patterning. A third insulating layer 19 is formed on the source electrode 17a and the drain electrode 18, and a contact hole 25 on the drain side is formed by patterning.
Thus, the base 10 is formed.

Next, the process of forming the organic EL element 3 will be described (ST2 to ST9).
A transparent conductive film is formed so as to cover almost the entire surface of the substrate 10, and this conductive film is patterned so that the anode 31 is formed in a predetermined region (ST2). At the same time, a dummy pattern (not shown) of the dummy region Q is also formed. In the pixel region K, the contact hole 25 and the anode 31 are connected, and the anode and the drain electrode 18 are made conductive.

  Next, the pixel opening film 35 is formed on the third insulating layer 19 (ST3). The pixel opening film 35 is formed, for example, so as to overlap the anode 31 so that the opening 35a surrounded by the wall surface 35b is formed.

  Next, as shown in FIG. 7, the organic bank layer 36 is formed on the pixel opening film 35 (ST4). A resist in which a material made of a resin such as acrylic resin or polyimide is dissolved in a solvent is applied by various coating methods such as spin coating and dip coating to form a resist layer 38 (FIG. 7A), and photolithography technology The openings 35a and the liquid holding part 37 are formed in a predetermined pattern by patterning with the above (FIG. 7B).

Next, plasma treatment is performed by heating the entire surface to a predetermined temperature, for example, about 70 to 80 ° C. (ST5). By the O ₂ plasma treatment using oxygen as a reaction gas in the air atmosphere, the wall surface 36c of the organic bank layer 36, the liquid holding portion 37, the upper surface 31a of the anode 31 and the upper surface 35c of the pixel opening film 35 (see FIG. 3) are each parent. Make it liquid. Also, the upper surface 36e and the wall surface 36c of the organic bank layer 36 are made liquid repellent by CF ₄ plasma treatment using tetrafluoromethane as a reaction gas in the air atmosphere. Then, each part is cooled to room temperature.

  Next, as shown in FIG. 8, the organic solvent 50 is discharged into the liquid holding portion 37 by a droplet discharge method such as an inkjet method (ST6). The organic solvent 50 is a solvent that dissolves the material of the hole injection layer 32. The inner surface of the liquid holding unit 37 is lyophilic because it has been plasma-treated in ST5, and the organic solvent 50 is held so as to spread on the inner surface of the liquid holding unit 37.

  Next, the hole injection layer 32 is formed by, for example, a droplet discharge method or a spin coating method (ST7). The discharged droplets spread on the anode 31 that has been subjected to the lyophilic process and fill the opening 35a. On the other hand, droplets are repelled and do not adhere to the upper surface of the organic bank layer 36 that has been subjected to the liquid repellent treatment. In addition, after this process, in order to prevent oxidation, it is preferable to perform in inert gas atmosphere, such as nitrogen atmosphere and argon atmosphere.

  Next, when the droplets are ejected, the droplets and the solvent 50 are dried together. For example, when the pressure is reduced from normal pressure to 100 Pa over several minutes to 10 minutes at room temperature, the solvent 50 evaporates and the liquid holding part 37 is emptied, and the solvent in the droplets evaporates and the hole injection layer 32 is formed. In addition, about time until it reduces to 100 Pa from normal pressure, bumping will occur easily when too short, and when it is too long, the uniformity of a film thickness will fall. For this reason, what is necessary is just to set to the time when a bumping does not occur and a film thickness becomes uniform. After the hole injection layer 32 is formed, the pressure may be further reduced to remove the evaporated solvent.

  After the hole injection layer 32 is formed, the organic solvent 51 is discharged into the liquid holding part 37 by a droplet discharge method such as an inkjet method (ST8). The organic solvent 51 is a solvent that dissolves the material of the hole injection layer 32. The inner surface of the liquid holding unit 37 is lyophilic because it has been plasma-treated in ST5, and the organic solvent 50 is held so as to spread on the inner surface of the liquid holding unit 37.

  Next, as shown in FIG. 9, droplets 60 are ejected onto the hole injection layer 32 by, for example, a droplet ejection method such as an inkjet method or a spin coating method (ST9). When the droplet 60 is ejected, the solvent 50 and the droplet 60 are collectively dried as shown in FIG. For example, when the pressure is reduced from normal pressure to 100 Pa over several minutes to 10 minutes at room temperature, the solvent 50 evaporates and the liquid holding unit 37 is emptied, and as shown in FIG. Evaporates to form the light emitting portion 33.

  As with the formation of the hole injection layer 32, bumping is likely to occur if the time required for reducing the pressure from normal pressure to 100 Pa is too short, and if it is too long, the uniformity of the film thickness decreases. For this reason, what is necessary is just to set to the time when a bumping does not occur and a film thickness becomes uniform. After the light emitting part 33 is formed, the pressure may be further reduced to remove the evaporated solvent.

After the light emitting portion 33 is formed, a cathode 34 is formed by depositing calcium by physical vapor deposition such as vapor deposition (ST10). The cathode 34 covers the light emitting part 33, the upper surface 36e of the organic bank layer 36, and a part of the wall surface 36c of the organic bank layer 36, and is formed so as to be connected to the connection wiring 27 described above. In addition, when forming a cathode protective layer on the cathode 34, aluminum etc. are formed into a film on the cathode 34 by physical vapor deposition methods, such as a vapor deposition method. In this way, the organic EL element 3 is formed.
After the base body 10 and the organic EL element 3 are formed, almost the entire base body 10 and the organic EL element 3 are can-sealed by the sealing portion 5 to complete the organic EL device 1 (ST11).

  According to the present embodiment, since the liquid holding part 37 capable of holding the liquid is provided along the functional part 30, a liquid droplet is applied to a portion partitioned by the organic bank layer 36 by, for example, a liquid droplet discharge method. In the step of forming the functional part 30 by discharging 60, the partial pressure of the solvent molecules can be increased in the part along the functional part 30 by holding the solvent 50 in the liquid holding part 37. . Thereby, it can suppress that a solvent evaporates rapidly from the function part 30, and the surface of the function part 30 can be made flat.

  On the other hand, since the liquid holding unit 37 is provided so that the distance from the functional unit 30 is substantially constant, the distance between the functional unit 30 and the solvent 50 held in the liquid holding unit 37 is uniform. In addition, since the liquid holding unit 37 is provided so that the holding width t2 for holding the solvent 50 is uniform, the solvent 50 held in the liquid holding unit 37 does not have an irregular pattern. Thereby, the partial pressure of a solvent molecule can be made uniform in the part along the function part 30, and the function part 30 can be dried uniformly.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. As in the first embodiment, in the following drawings, the scale is appropriately changed to make each member a recognizable size. Moreover, about the component same as 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted. In the present embodiment, since the configuration of the liquid holding unit is different from that of the first embodiment, this point will be mainly described.

FIG. 12 is a cross-sectional view showing a configuration of a part (organic EL element) of the organic EL device 101 according to this embodiment.
The organic EL element 103 includes an anode 131, a hole injection layer 132, a light emitting unit 133, a common electrode (cathode) 134, a pixel opening film 135, an organic bank layer 136, and a liquid holding unit 137. ing.

Since the anode 131, the hole injection layer 132, the light emitting unit 133, the cathode 134, and the pixel opening film 135 have the same configuration as in the first embodiment, the description thereof is omitted.
The organic bank layer 136 is a partition wall when the hole injection layer 132 and the light emitting portion 133 are formed by a droplet discharge method such as an ink jet method. The insulating layer prevents electrons from moving between the adjacent hole injection layer 132 and the light emitting portion 133.

  Unlike the first embodiment, the liquid holding portion 137 includes a bank portion 137 a and a bank portion 137 b provided in parallel on the upper surface 136 c of the organic bank layer 136. The liquid can be held in a portion 137c sandwiched between the parallel bank portion 137a and the bank portion 137b. The depth T2 of the liquid holding part 137 is preferably in the range of 1.0 μm to 5.0 μm.

FIG. 13 is an enlarged plan view showing the organic bank layer 136 of the organic EL device 1.
As shown in the figure, each light emitting part 133 (light emitting part 133R, light emitting part 133G, and light emitting part 133B) is arranged so as to have a uniform interval t3 with the liquid holding part 137, and t3 is 10 μm to The range is 50 μm. The width (length in the Y direction) t4 of the liquid holding portion 137 is in the range of 10 μm to 50 μm, and is formed to be uniform along the X direction.

  When the liquid material discharged by the droplet discharge method is dried, it is necessary to evaporate all the solvent held in the liquid holding unit 137. In the present embodiment, since the solvent is held on the upper surface 136c of the organic bank layer 136, it is easier to evaporate than in the case where the solvent is held in the groove, for example.

(Third embodiment)
Next, a third embodiment of the present invention will be described. As in the above embodiments, in the following drawings, the scale is appropriately changed to make each member a recognizable size. Moreover, about the component same as 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted. In the present embodiment, since the configuration of the liquid holding unit is different from that of the first embodiment, this point will be mainly described.

FIG. 14 is a cross-sectional view showing a configuration of a part (organic EL element) of the organic EL device 201 according to the present embodiment.
The organic EL element 203 includes an anode 231, a hole injection layer 232, a light emitting unit 233, a common electrode (cathode) 234, a pixel opening film 235, an organic bank layer 236, and a liquid holding unit 237. ing.

Since the anode 231, the hole injection layer 232, the light emitting unit 233, the cathode 234, and the pixel opening film 235 have the same configuration as that of the first embodiment, description thereof is omitted.
The organic bank layer 236 is a partition wall when the hole injection layer 232 and the light emitting portion 233 are formed by a droplet discharge method such as an ink jet method. Further, the insulating layer prevents electrons from moving between the adjacent hole injection layer 232 and the light emitting portion 233.

  Unlike the first embodiment, the liquid holding unit 237 has a part of the upper surface 236c of the organic bank layer 236 that is lyophilic, and a part other than the lyophilic part is lyophobic. When forming the hole injection layer 232 and the light emitting portion 233, the solvent of the hole injection layer 232 and the light emitting portion 233 can be held in the lyophilic portion.

FIG. 15 is an enlarged plan view showing the organic bank layer 236 of the organic EL device 201.
As shown in the figure, the light emitting units 233 are arranged so as to have a uniform interval t5 with the liquid holding unit 237, and t5 is in the range of 10 μm to 50 μm. The width (length in the Y direction) t6 of the liquid holding part 237 is in the range of 1.0 μm to 5.0 μm, and is formed to be uniform along the X direction.

  In the case of performing the droplet discharge method, before discharging the liquid material, a portion of the organic bank layer 236 where the light emitting portion 233 is formed is subjected to a lyophilic process so that the liquid material is easily attached. In addition, a liquid repellent treatment is performed on a portion where the liquid material is not attached, such as the upper surface 236c of the organic bank layer 236, so that the liquid material is not easily mixed.

  According to the present invention, since the liquid can be held in the highly lyophilic region (that is, the liquid holding unit 237) formed on the upper surface 236c of the organic bank layer 236, the lyophilic treatment is performed at the same time. The liquid holding part 237 can be formed. Thereby, there is no need to provide grooves or banks in the organic bank layer 236, and the liquid holding portion 237 can be easily formed.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described. As in the above embodiments, in the following drawings, the scale is appropriately changed to make each member a recognizable size. In this embodiment, an example in which an organic EL device is mounted on a line head module will be described.

FIG. 16 is a diagram showing a usage pattern of the line head module 301.
As shown in the figure, the line head module 301 irradiates the photosensitive drum 302 with light to be exposed to expose the photosensitive drum 302. The head case 303, the line head 304, The lens array 305 is mainly used.

  The head case 303 is a support member that supports the outer periphery of the line head 304 and the lens array 305, and is formed of a rigid material such as aluminum. The lens array 305 is a cylindrical lens element having the same configuration as, for example, a SELFOC (registered trademark) lens array (trade name of Nippon Sheet Glass Co., Ltd.), and forms an image by magnifying light at an equal magnification. is there.

  The line head 304 is a light source for irradiating the photosensitive drum 302 with light, and as shown in FIG. 17, a drive element group 314 including an organic EL device 310 and a plurality of drive elements 314a for driving the organic EL device 310. And a control circuit 315 for controlling the drive by the drive element group 314.

  As shown in FIG. 18, the organic EL device 310 includes a rectangular element substrate 312, an organic EL element array 313 in which a plurality of organic EL elements 313 a are arrayed on the element substrate 312, and an array of the light emitting element arrays 313. It has a liquid holding part 337 provided along the direction. Each light-emitting element 313a includes an anode, a hole injection layer, a light-emitting portion (the hole injection layer and the light-emitting portion may be collectively referred to as “functional portion 333”), and a cathode. For example, two rows are arranged in a staggered pattern on the top.

  The liquid holding part 337 is a belt-like groove extending in the X direction, and is formed on, for example, a partition wall (organic bank layer or the like) provided on the element substrate 312. The liquid can be held in the groove of the liquid holding portion 337. A distance t7 between the liquid holding unit 337 and the functional unit 333 arranged in the row 313b is substantially equal to a planar distance t8 between the liquid holding unit 337 and the functional unit 333 arranged in the row 313c. The distances t7 and t8 are in the range of 10 μm to 50 μm, for example.

  The width (length in the Y direction) t9 of the liquid holding part 237 is formed to be in the range of 1.0 μm to 5.0 μm. The liquid holding unit 337 may be provided between the organic element rows arranged in the row 313b and the organic element rows arranged in the row 313c.

  For example, when the functional unit 333 of the organic EL device 310 in which the organic EL elements 313a are arranged in two rows is formed by a droplet discharge method as in the organic EL device used for the line head module, the end portion and the center of the functional unit 333 are formed. The partial pressure of the solvent is different from the part. If the functional unit 333 is not uniformly dried, the exposure of the photosensitive drum 302 becomes non-uniform. In particular, when the organic EL device 310 has only two rows of organic EL elements 313a, the display characteristics are significantly deteriorated when the drying of the functional unit 333 is uneven.

  According to this embodiment, in the step of forming the organic EL element 313a of the organic EL device 310, the liquid holding unit 337 holds the solvent for forming the functional unit 333 when the liquid material is discharged. Therefore, the functional unit 333 can be uniformly dried. For this reason, the display characteristics of the organic EL device 310 can be prevented from being deteriorated, and the photosensitive drum 302 can be uniformly exposed.

(mobile phone)
Next, an electronic apparatus according to the present invention will be described using a mobile phone as an example.
FIG. 19 is a perspective view showing the overall configuration of the mobile phone 400.
The cellular phone 400 includes a housing 401, an operation unit 402 provided with a plurality of operation buttons, and a display unit 403 that displays images, moving images, characters, and the like. On the display unit 403, the organic EL devices 1, 101, and 201 according to the present invention are mounted.
As described above, since the organic EL device capable of flattening the surface of the functional part and drying the functional part uniformly is mounted, an electronic device with no display unevenness can be obtained.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
FIG. 20 is a diagram illustrating a partial configuration of the organic EL device 1, and corresponds to FIG.
As shown in the figure, when the shape of the functional unit 30 is a circle, an ellipse, or the like, the liquid holding unit 37 can be formed, for example, in a shape along the outer circumference of the circle or ellipse.

Even when the shape of the functional unit 30 is a circle or an ellipse, the liquid holding unit 37 may be formed as a band-shaped groove along the row of the functional units 30.
Of course, the liquid holding portion 37 may be formed as an intermittent groove instead of a belt-like groove.

  In the above embodiment, the organic EL devices 1, 101, and 201 have been described by taking the bottom emission type organic EL device as an example. However, for example, the present invention can be applied to the top emission type. .

1 is a perspective view showing a configuration of an organic EL device according to a first embodiment of the present invention. It is a top view which shows the structure of the organic electroluminescent apparatus concerning this embodiment. It is sectional drawing (the 1) which shows the structure of the organic electroluminescent apparatus which concerns on this embodiment. It is sectional drawing (the 2) which shows the structure of the organic electroluminescent apparatus which concerns on this embodiment. It is a top view which shows the structure of a part of organic electroluminescent apparatus concerning this embodiment. It is a flowchart which shows the manufacturing method of the organic electroluminescent apparatus concerning this embodiment. It is sectional drawing (the 1) which shows the manufacturing process of an organic electroluminescent apparatus. It is sectional drawing (the 2) which shows the manufacturing process of an organic electroluminescent apparatus. It is sectional drawing (the 3) which shows the manufacturing process of an organic electroluminescent apparatus. It is sectional drawing (the 4) which shows the manufacturing process of an organic electroluminescent apparatus. It is sectional drawing (the 5) which shows the manufacture process of an organic electroluminescent apparatus. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning 2nd Embodiment of this invention. It is a top view which shows the structure of a part of organic electroluminescent apparatus concerning this embodiment. It is sectional drawing which shows the structure of the organic electroluminescent apparatus which concerns on 3rd Embodiment of this invention. It is a top view which shows the structure of a part of organic electroluminescent apparatus concerning this embodiment. It is a figure which shows the structure of the line head module which concerns on 4th Embodiment of this invention. It is a top view which shows the structure of the line head module which concerns on this embodiment. It is a top view which shows the structure of the principal part of the line head module which concerns on this embodiment. It is a top view which shows the structure of the electronic device (cellular phone) which concerns on this invention. It is a top view which shows another structure of the organic electroluminescent apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 101, 201, 310 ... Organic EL apparatus 37 ... Liquid holding part 50 ... Solvent 60 ... Droplet 37, 137, 237, 337 ... Liquid holding part 301 ... Line head module 400 ... Cell-phone

Claims (8)

A substrate,
A partition provided on the substrate;
A functional unit that is provided so as to be partitioned by the partition wall and includes a light emitting unit that emits light;
A direction provided along the function unit so that the distance from the function unit is substantially constant in a plan view, and is formed so as to be able to hold a liquid, and the portion holding the liquid is in a direction along the function unit An organic EL device comprising: a liquid holding portion having a width substantially equal to A plurality of the functional units are provided,
The organic EL device according to claim 1, wherein the liquid holding unit is provided in a region between the plurality of functional units.   The organic EL device according to claim 1, wherein the liquid holding unit is provided in the partition wall.   The organic EL device according to claim 3, wherein the liquid holding part is a groove provided in the partition wall.   The organic EL device according to claim 3, wherein the liquid holding part is a part formed between a pair of banks provided in the partition wall.   The organic EL device according to claim 3, wherein the liquid holding unit is a lyophilic region formed in the partition wall. Forming a partition on the substrate for partitioning a functional unit including a light emitting unit that emits light;
A liquid holding portion that is along the functional portion so that the distance from the functional portion is substantially constant in a plan view, and the portion that holds the liquid has a substantially equal width in the direction along the functional portion. Forming a step;
A step of discharging a liquid material containing a material constituting the functional part to a portion partitioned by the partition; and
Holding the liquid contained in the liquid material in the liquid holding unit;
And removing the liquid contained in the liquid material to form the functional part. An organic EL device manufacturing method comprising: An electronic apparatus comprising the organic EL device according to any one of claims 1 to 6 or the organic EL device manufactured by the method for manufacturing an organic EL device according to claim 7.

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