JP2006248093A5 - - Google Patents
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- Publication number
- JP2006248093A5 JP2006248093A5 JP2005069552A JP2005069552A JP2006248093A5 JP 2006248093 A5 JP2006248093 A5 JP 2006248093A5 JP 2005069552 A JP2005069552 A JP 2005069552A JP 2005069552 A JP2005069552 A JP 2005069552A JP 2006248093 A5 JP2006248093 A5 JP 2006248093A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- metal film
- patterning method
- film
- metal particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052751 metal Inorganic materials 0.000 claims 9
- 239000002184 metal Substances 0.000 claims 9
- 238000000059 patterning Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 7
- 239000002923 metal particle Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 5
- 239000007788 liquid Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 239000010953 base metal Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 2
- 229910000510 noble metal Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005069552A JP2006248093A (ja) | 2005-03-11 | 2005-03-11 | パターニング方法及び液体噴射ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005069552A JP2006248093A (ja) | 2005-03-11 | 2005-03-11 | パターニング方法及び液体噴射ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006248093A JP2006248093A (ja) | 2006-09-21 |
| JP2006248093A5 true JP2006248093A5 (https=) | 2008-04-17 |
Family
ID=37089070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005069552A Withdrawn JP2006248093A (ja) | 2005-03-11 | 2005-03-11 | パターニング方法及び液体噴射ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006248093A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6008636B2 (ja) * | 2012-07-25 | 2016-10-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
-
2005
- 2005-03-11 JP JP2005069552A patent/JP2006248093A/ja not_active Withdrawn
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