JP2006237009A - Arc energy control circuit for plasma power supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an arc energy control circuit for plasma power supply device which realizes shortening of delay time by carrying out a rapid arc detection and suppressing instantaneous rise width of the arc energy. <P>SOLUTION: The arc energy control circuit comprises an inverter 10 which converts a DC voltage rectified by a bridge diode BD and smoothed by a capacitor C into a high frequency AC voltage, an AC reactor Lr, a transformer 20 which transforms the high frequency AC voltage into a prescribed voltage, and a rectifying part 30. The rectifying part 30 is composed of a rectifier 31 which rectifies the AC voltage into DC voltage and a C-L filter 32 combining a capacitor C1 and a reactor L. The capacitor C1 is connected in parallel to the rectifier 31 and the reactor L is connected in series to the rectifier 31. The reactor L is separated into a main winding 101 and an auxiliary winding 102, and the auxiliary winding 102 is connected with a parallel resistor Rc and an arc detection part 200 which measures both end voltage of the parallel resistor Rc and judges as arc when the measured voltage is a reference value or more. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an arc energy control circuit for a plasma power supply device, and more specifically, when an arc that is an abnormal phenomenon of a load occurs during a plasma process at a load end, an output end reactor that is a differential element with respect to the arc state. An arc for a plasma power supply apparatus that quickly detects the occurrence of an arc by using a voltage, and can effectively discharge and discharge the instantaneously increased arc energy to a CL filter that is an output end of a rectifying unit. The present invention relates to an energy control circuit.

  The plasma power supply device has a very wide range of applications as a power supply device for generating and holding plasma called the fourth state of matter. For example, in the semiconductor process etc., it is used for various processes such as CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), coating, sputtering, metal nitriding, carbonized crystal growth, diamond synthesis and the like.

  In such a plasma power supply device, an arc phenomenon that is an abnormal state such as a short circuit frequently occurs due to the characteristics at the load. At this time, in the power supply device, it is necessary to quickly detect the arc state and cut off the output. This is because if arc energy due to an excessive arc current flows into the load end, it acts as a factor that degrades the characteristics and quality of the applied load.

  As shown in FIG. 1, the conventional plasma power supply device includes an inverter 10 that converts a DC voltage rectified by a bridge diode BD and smoothed by a capacitor C into a high-frequency AC voltage when AC power is applied from the outside. An AC reactor Lr that is connected to the output terminal of the inverter 10 and maintains the drooping characteristic, a transformer 20 that transforms a high-frequency AC voltage from the inverter 10 into a necessary voltage according to a specific winding ratio, and a rectifier 30. The rectification unit 30 accumulates the rectifier 31 that rectifies the AC voltage transformed by the transformer 20 into a DC voltage, and the voltage output from the rectifier 31 in the capacitor C1 connected in parallel to the rectifier 31. And a CL filter 32 that outputs the voltage from the reactor L connected in series to the load end. Such a plasma power supply device is particularly used as a device for supplying power to a process for surface treatment of a product.

  An important performance of the plasma power supply is to minimize the arc energy when an arc occurs during the surface treatment. This is because, as described above, excessive arc energy reduces the uniformity of the surface treatment and degrades the quality.

  Under such circumstances, methods for rapidly detecting the arc state have been studied. As a general conventional arc detection method, the voltage of the capacitor C1 is measured by the CL filter 32 of FIG. When the voltage of the capacitor C1 is smaller than a specific value, a method of determining an arc and the output voltage and current at the rear end of the reactor L are measured, and the voltage is below a specific value or the current is above a specific value In this case, a method of determining an arc is used.

  However, in the conventional arc detection method as described above, since a time delay occurs due to the time delay of each element and the gradient of the reactor voltage due to arc generation, rapid arc detection is difficult and excessive arc detection is difficult. The inflow of energy to the load end could not be cut off quickly, and there was a problem that the characteristics and quality of the applied load were degraded.

  In addition to the arc detection described above, many methods for quickly interrupting the transmission of arc energy generated by the power supply device when an arc occurs have been studied. After the arc is detected, the switching of the inverter 10 is performed. Even when the switch is turned off, there is a problem that the energy stored in the CL filter 32 of the rectifying unit 30 is directly transmitted to the load end as arc energy.

  In order to solve such a problem, in the plasma power supply device having the large capacitor C1 and the reactor L, there is a method of preventing energy transfer by using a switching semiconductor element on the output side. Since excessive current and voltage are generated on the output side when the load changes, the use of the switching semiconductor element has a problem in that the reliability of other systems is reduced.

  When an arc is generated from the load end during the use of the conventional plasma power supply device as described above, the operation of the transition section to the reactor L of the energy accumulated in the capacitor C1 in the CL filter 32 is seen. In the reactor L, when the voltage accumulated in the capacitor C1 is applied, the current instantaneously increases, and when the increased current is large, the load device is adversely affected.

At this time, a part of the energy stored in the capacitor C1 is transferred to the load end, but is almost transferred to the reactor L.
Further, when looking at the operation of the transition section of the energy accumulated in the reactor L to the load end (for example, a plasma generation unit) (not shown), the increased current gradually becomes a reverse bias due to a small impedance at the load end. To decrease.

At this time, energy transferred to the load terminals, said a C-L ^CV 2/2 and ^LI 2/2 is the capacitor C and the energy stored in the reactor L of the filter 32.
As described above, when an arc is generated from the load end, the energy accumulated in the CL filter 32 is directly transmitted to the load end even if the output of the inverter 10 is ideally cut off. Therefore, the problem that excessive arc energy is generated has not been solved.

  The present invention has been made in view of the above problems, and in detecting an arc that is an abnormal phenomenon of a load, a voltage of a parallel resistor whose voltage is increased by a differential value of a current induced from an auxiliary winding of a reactor. By measuring and quickly detecting the occurrence of arc, the problem of time delay due to arc detection is solved, and through the discharge circuit installed at the reactor output end, the CL filter that is the output end of the rectifier is instantaneously applied. It is an object of the present invention to provide an arc energy control circuit for a plasma power supply device that effectively discharges arc energy that has been raised.

  Further, when configuring a plasma power supply for supplying power for generating plasma, a part of the energy instantaneously rising to the output terminal CL filter of the rectifying unit when an arc is generated at the load end is separately provided. By using a discharge semiconductor without using a switching semiconductor element, the energy transmitted to the load end is reduced, the instantaneous rise of energy is suppressed, the delay time is shortened, and the system is stabilized. Another object of the present invention is to provide an arc energy control circuit for a plasma power supply device.

  In order to achieve the above object, an arc energy control circuit for a plasma power supply apparatus according to the present invention includes an inverter that converts a DC voltage rectified by a bridge diode and smoothed by a capacitor into a high-frequency AC voltage, and an output terminal of the inverter. An AC reactor connected to the transformer, a transformer that transforms the high-frequency AC voltage into a required voltage according to a specific winding ratio, and a rectifier connected to an output end of the transformer, the rectifier Is composed of a rectifier that rectifies the AC voltage output transformed by the transformer into a DC voltage, and a CL filter that is a combination of a capacitor and a reactor connected to the rectifier, and the capacitor of the CL filter is The C-L filter reactor is connected in series to the rectifier. In this arc energy control circuit, the reactor of the CL filter is separated into a main winding and an auxiliary winding, and a voltage across the resistor connected to the auxiliary winding is applied to the auxiliary winding side. When the measured voltage is equal to or higher than the reference value, the gist is that an arc detection unit for determining an arc is connected.

  According to the arc energy control circuit for a plasma power supply apparatus of the present invention as described above, when an arc that is an abnormal phenomenon of a load occurs during a plasma process at the load end, the output end reactor that is a differential element with respect to the arc state. Using the voltage, it is possible to quickly detect the occurrence of an arc and to effectively discharge and discharge the instantaneously increased arc energy to the CL filter that is the output end of the rectifying unit. Is effective in quickly blocking the inflow to the load end and suppressing the deterioration of the characteristics and quality of the applied load.

  Further, through effective discharge of arc energy by the discharge circuit section, the instantaneous rise of arc energy is suitably suppressed, and the delay time is shortened, thereby further stabilizing the system.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
<First Embodiment>
FIG. 2 is a circuit configuration diagram showing an arc energy control circuit for a plasma power supply device according to the first embodiment of the present invention. The arc energy control circuit for a plasma power supply device according to the present embodiment includes an inverter 10, an AC reactor Lr, a transformer 20, and a rectifier 30 including a rectifier 31 and a CL filter 32. In this arc energy control circuit, the reactor L of the CL filter 32 is divided into a main winding 101 and an auxiliary winding 102, and the auxiliary winding 102 is induced from the auxiliary winding 102. A resistor Rc for consuming energy is connected in parallel to the auxiliary winding 102, and the voltage at both ends of the resistor Rc is measured. When the measured voltage is equal to or higher than a reference value, it is determined that the arc. An arc detector 200 is connected. The resistor Rc functions as a parallel resistor for the auxiliary winding 102.

  The inverter 10 converts the DC voltage rectified by the bridge diode BD and smoothed by the capacitor C into a high-frequency AC voltage and outputs the high-frequency AC voltage to the transformer 20. An AC power supply is supplied to the bridge diode BD from an external voltage source.

  The transformer 20 transforms the high-frequency AC voltage supplied from the inverter 10 into a necessary voltage according to a specific winding ratio, and outputs the voltage to the rectifier 30. Here, an AC reactor Lr for maintaining drooping characteristics is connected in series between the inverter 10 and the transformer 20.

  The rectifier 31 in the rectifier 30 serves to rectify the AC voltage transformed by the transformer 20 into a DC voltage, and the C-L filter 32 uses the same voltage output from the rectifier 31 as the same voltage. The capacitor C1 connected in parallel to the rectifier 31 and the reactor L connected in series to the rectifier 31 are stored. The rectifying unit 30 outputs power for generating plasma to a load end (for example, a plasma generating unit) (not shown) via the CL filter 32. The load end to which power (energy) is supplied via the CL filter 32, that is, the plasma generation unit, performs the corresponding process using the generated plasma.

  As shown in FIG. 2, the reactor L of the CL filter 32 rapidly transfers the energy accumulated in the CL filter 32 to the load end at a time when an arc occurs at the load end. In order to prevent this and to detect the arc quickly, the main winding 101 and the auxiliary winding 102 are divided. The auxiliary winding 102 is connected to a parallel resistor Rc that is connected to the auxiliary winding 102 and consumes energy induced from the auxiliary winding 102.

  At this time, the voltage VL applied to the reactor L is expressed by the following equation.

前記アーク検知部２００は、前記並列抵抗Ｒｃの両端電圧を測定し、その測定された電圧が基準値以上である場合、アークと判断する。

The arc detector 200 measures the voltage across the parallel resistor Rc, and determines that the arc is an arc when the measured voltage is equal to or greater than a reference value.

The operation process of the arc detection circuit in the arc energy control circuit for the plasma power supply apparatus according to the present embodiment having the above-described configuration will be described below with reference to FIGS.
First, during the operation of the plasma generating power supply device according to the present embodiment, when an arc (short state) occurs at the load end, it is accumulated in the capacitor C at both ends of the reactor L of the CL filter 32. When a voltage is applied, the current suddenly increases, and the voltage applied to the main winding 101 of the reactor L increases rapidly.

  Next, as shown in FIG. 3, a pulse-shaped voltage signal indicating a sudden rise is induced in the auxiliary winding 102 of the reactor L, and a current induced in the auxiliary winding 102 is generated in the parallel resistance Rc. Applied as it is. Accordingly, the voltage applied to the parallel resistor Rc changes. At this time, the pulse-shaped voltage signal induced in the auxiliary winding 102 of the reactor L is a current differential value of the reactor voltage VL.

  Therefore, the arc detector 200 measures the voltage across the parallel resistor Rc, and if it detects that the measured voltage is greater than or equal to a preset reference value, it determines that this is an arc.

Further, a part of the surge current applied to the reactor L is induced from the auxiliary winding 102 of the reactor L and then applied to the parallel resistor Rc as it is, so that energy of V ² / R ² is obtained. Is consumed by resistance, so that a rapid increase in current in the reactor L is suppressed.

  Therefore, according to the arc energy control circuit according to the present embodiment, when the arc is generated, the current differential value of the reactor voltage induced in the auxiliary winding 102 is directly applied to the parallel resistor Rc, and the parallel resistor Rc indicating a voltage change is applied. When the voltage at both ends is measured and is equal to or greater than the reference value, it is determined as an arc, thereby reducing the delay time due to arc detection. As a result, a control operation for reducing the arc energy transmitted to the load end can be quickly performed.

<Second Embodiment>
FIG. 4 is a circuit configuration diagram showing an arc energy control circuit for a plasma power supply apparatus according to the second embodiment of the present invention. This arc energy control circuit for a plasma power supply apparatus includes an inverter 10, an AC reactor Lr, a transformer 20, and a rectifier 30 including a rectifier 30 and a CL filter 32, and the reactor of the CL filter 32. L is divided into a main winding 101 and an auxiliary winding 102.

  The arc energy control circuit includes a first switch SW1 that is turned off (short-circuited) to the output side of the main winding 101 when an arc is generated, and is connected in parallel to the first switch SW1 and in parallel with each other. A discharge circuit unit 100 including a connected resistor R1 and a capacitor C2 is provided.

  Further, the arc energy control circuit measures the parallel resistance Rc connected to the auxiliary winding 102 and the voltage across the parallel resistance Rc, and determines that the arc is when the measured voltage is equal to or higher than a reference value. And an arc detection unit 200 for performing the operation.

  In such an arc energy control circuit for a plasma power supply apparatus according to the present embodiment, the configuration of the inverter 10, the AC reactor Lr, the transformer 20, the rectifier 31 including the rectifier 31 and the CL filter 32, and Since the operation is the same as that of the first embodiment of the present invention described above, description thereof is omitted.

Hereinafter, the operation process of the arc energy control circuit for a plasma power supply apparatus according to the present embodiment having the above-described configuration will be described with reference to FIGS.
First, when an arc is generated from the load end during operation of the plasma generating power supply device, the current accumulated in the capacitor C1 is applied to both ends of the reactor L of the CL filter 32, and the main winding of the reactor L is applied. The voltage applied to line 101 increases rapidly.

  As a result, a voltage signal in the form of a pulse as shown in FIG. 3 is induced in the auxiliary winding 102 of the reactor L, and the current induced in the auxiliary winding 102 is directly applied to the parallel resistor Rc. The voltage applied to the parallel resistor Rc increases. At this time, the pulse-shaped voltage signal induced in the auxiliary winding 102 is a signal detected by a differential value of the current of the reactor L voltage with respect to the arc state.

  Thereafter, the arc detector 200 measures the voltage across the parallel resistor Rc, and determines that this is an arc when it detects that the measured voltage is greater than or equal to a preset reference value. Such an arc detection signal is controlled by a control unit (not shown), and by quickly turning off the operation of the inverter 10, the power supplied to the plasma power supply device is quickly shut off after the occurrence of the arc. The

  Even if the inverter 10 is turned off, the current-voltage stored in the CL filter 32 is applied as it is to the load end as arc energy. However, as shown in FIG. Since (R1, C2) is connected in parallel with the first switch SW1, when the first switch SW1 is opened, a part of the arc energy transmitted to the load end is discharged through the RC discharge circuit. Is done. As a result, the arc current at the load end can be attenuated more quickly.

Hereinafter, the operation of the discharge circuit unit 100 will be described in detail with reference to FIGS. 4 and 5.
First, when the arc is generated, the first switch SW1 that is in operation is turned off, and at the same time, the current i _S1 flowing through the first switch SW1 is charged in the capacitor C2. At this time, as shown in FIG. 5, the current i _S1 flowing through the first switch SW1 rapidly increases due to the current transmitted from the capacitor C1 due to the generation of the arc, and the rapidly increased current i _S1 depends on the capacitance of the capacitor C2. The battery is charged and discharged for a certain time. The current charged in the capacitor C2 is discharged and discharged through the resistor R1. At this time, the arc energy P consumed through the discharge circuit unit 100 due to the generation of the arc is discharged and consumed by P = i _S1 ² × R1.

  The on / off operation of the first switch SW1 may be configured by a switching element that is turned off when an overcurrent or a low voltage occurs, or control using arc detection of the arc detection unit 200. It may be configured to be switched through a signal.

<Third Embodiment>
FIG. 6 is a circuit configuration diagram showing an arc energy control circuit for a plasma power supply device according to the third embodiment of the present invention. This arc energy control circuit for a plasma power supply apparatus includes an inverter 10, an AC reactor Lr, a transformer 20, and a rectifier 30 including a rectifier 30 and a CL filter 32, and the reactor of the CL filter 32. L is divided into a main winding 101 and an auxiliary winding 102.

  The arc energy control circuit is connected in parallel to the first switch SW2 that is turned off (short-circuited) to the output side of the main winding 101 when an arc is generated, and is connected in series to each other. Capacitors C3 and C4, resistors R2 and R3 connected in parallel to the first switch SW2 and connected in series with each other, and one end thereof connected to a node between the capacitors C3 and C4 and a node between the resistors R2 and R3 And a second switch SW3 having the other end connected to the negative load end (−) of the plasma power supply device and turned on after a predetermined time has elapsed since the occurrence of the arc. 300 is provided.

  Further, the arc energy control circuit measures the parallel resistance Rc connected to the auxiliary winding 102 and the voltage across the parallel resistance Rc, and determines that the arc is when the measured voltage is equal to or higher than a reference value. And an arc detection unit 200 for performing the operation.

  In such an arc energy control circuit for a plasma power supply apparatus according to this embodiment, the inverter 10, the AC reactor Lr, the transformer 20, the rectifier 31 including the rectifier 31 and the CL filter 32, and the auxiliary winding The configuration and operation process of the parallel resistor Rc connected to the line 102 and the arc detection unit 200 are the same as those in the second embodiment of the present invention described above, and will be omitted. The operation of the discharge circuit unit 300 of the present embodiment is as follows.

  FIG. 7 is a waveform diagram showing a transition state of arc energy when an arc is generated in the arc energy control circuit for the plasma power supply device of FIG. -Current characteristics are shown.

Hereinafter, the operation of the discharge circuit unit 300 will be described in detail with reference to FIGS. 6 and 7.
First, when an arc occurs, the first switch SW2 is opened, and the arc current flowing through the first switch SW2 bypasses the RC discharge circuit to charge the capacitors C3 and C4, and the resistors R2, Discharged at R3.

The capacitors C3 and C4 are configured by C3 <C4, and the resistors R2 and R3 are configured by R2 <R3.
The arc current i _S2 flowing in R-C discharge circuit, while indicating curve as shown in FIG 7, the arcing, shows the surge by a current transmitted from the capacitor C1, soaring current i _S2, the capacitor The battery is charged for a certain time according to the capacity of C3 and C4.

  At this time, the voltages V1 and V2 respectively charged in the capacitors C3 and C4 have different charging and discharging curves as shown in FIG. 7, but the voltage V1 of the capacitor C3 depends on the time constant values of the capacitors C3 and C4. Is charged and discharged quickly, and a part is consumed first through the resistors R2 and R3.

  Further, as shown in FIG. 7, the voltage V2 charged in the capacitor C4 is charged less than the voltage V1 charged in the capacitor C3 and discharged later, and is discharged and consumed through the resistors R2 and R3.

At this time, the arc energy P consumed through the discharge circuit unit 300 due to the generation of the arc is consumed by P = i _S2 ² × (R2 + R3).
Next, as shown in FIG. 7, when the stored voltage V2 of the capacitor C4 through the resistors R2 and R3 is discharged, the second switch SW3 is driven and turned on at an arbitrary time after a predetermined time has elapsed. As a result, the voltage V2 during which the capacitor C4 is being discharged is applied as a reverse voltage to the negative load terminal (−). As a result, the arc energy is completely cleared.

  The on / off operation of the first switch SW2 may be constituted by a switching element that is turned off when an overcurrent or a low voltage is generated, or a control signal using arc detection of the arc detector 200. May be configured to be switched through.

Further, the second switch SW3 is switched and controlled to operate after a lapse of a fixed time set by a control signal using arc detection of the arc detector 200.
<Fourth embodiment>
FIG. 8 is a circuit configuration diagram showing an arc energy control circuit for a plasma power supply device according to the fourth embodiment of the present invention. This arc energy control circuit for a plasma power supply device includes an inverter 10, an AC reactor Lr, a transformer 20, and a rectification unit 30 including a CL filter 32 formed by a combination of a rectifier 31 and a capacitor C1 and a reactor L. The reactor L of the C-L filter 32 is divided into a main winding 101 and an auxiliary winding 102.

  The arc energy control circuit includes a parallel resistor Rc connected to the auxiliary winding 102, a reactor Ld103, a resistor Rd104, and a unidirectional diode connected in parallel to the parallel resistor Rc. 105, and a discharge circuit unit 400 including the same.

  The inverter 10 converts the DC voltage rectified by the bridge diode BD and smoothed by the capacitor C into a high-frequency AC voltage and outputs the high-frequency AC voltage to the transformer 20. The voltage is transformed to a necessary voltage according to the winding ratio and output to the rectifier 30. Here, an AC reactor Lr for maintaining drooping characteristics is connected in series between the inverter 10 and the transformer 20.

  The rectifier 31 in the rectifier 30 serves to rectify the AC voltage transformed by the transformer 20 into a DC voltage, and the C-L filter 32 uses the same voltage output from the rectifier 31 as the same voltage. The capacitor C1 connected in parallel to the rectifier 31 and the reactor L connected in series to the rectifier 31 are stored. The rectifier 30 outputs electric power for generating plasma to the load end via the CL filter 32. Then, at the load end to which electric power (energy) is supplied via the CL filter 32, that is, at the plasma generation unit, the corresponding process is performed using the generated plasma.

  At this time, when the arc occurs at the load end, the discharge circuit unit 400 instantaneously increases the energy accumulated in the CL filter 32, and the instantaneously increased energy suddenly reaches the load end. In order to prevent the energy from being transmitted, the energy to be transmitted is induced in the reactor L of the CL filter 32 using the electromagnetic induction of the auxiliary winding 102, and then a part of the energy is consumed by the discharge.

  Here, in the discharge circuit unit 400, the reactor L of the C-L filter 32 is divided into a main winding 101 and an auxiliary winding 102 for electromagnetic induction, and is connected to the auxiliary winding 102. The parallel resistance Rc thus consumed consumes energy induced from the auxiliary winding 102.

  In the discharge circuit unit 400, the reactor Ld103, the resistor Rd104, and the unidirectional diode 105 may be replaced with a semiconductor switching element (not shown) and a resistor (not shown).

FIG. 9 is a waveform diagram showing a transition state of arc energy when an arc is generated at the load end according to the present invention shown in FIG.
The arc energy at this time is expressed by the following equation.

以下、上記した構成を有するプラズマ電源装置用アークエネルギー制御回路におけるアーク低減回路の動作について、添付図面を参照して説明する。

The operation of the arc reduction circuit in the arc energy control circuit for a plasma power supply apparatus having the above-described configuration will be described below with reference to the accompanying drawings.

  First, when an arc is generated from the load end during the use of the plasma power supply device, the operation of the transition section of the energy accumulated in the capacitor C1 in the CL filter 32 to the reactor L will be described. The voltage accumulated in the capacitor C1 is applied to both ends of L, so that the current increases rapidly and the voltage of the capacitor C1 decreases.

In this case, unlike the conventional power supply device, the voltage across the reactor L is partially induced from the auxiliary winding 102 of the discharge circuit unit 400 and then applied as it is to the parallel resistor Rc. , V ² / R ² energy is consumed by resistance. As a result, the magnitude of the current increase in the reactor L is reduced as compared with the conventional case, as shown in FIG.

  In addition, when the operation of the transition period to the load end of the energy stored in the reactor L is seen, the increased current is electromagnetically induced through the auxiliary winding 102 whose impedance is reduced and stored in the reactor L. The generated energy is partially discharged through the auxiliary winding 102, the reactor Ld103, the resistor Rd104, and the diode 105, whereby the arc energy transmitted to the load end is reduced.

  With such a configuration of the discharge circuit unit 400, when an arc is generated, energy transmitted to the load end is reduced, and as shown in FIG. 5, the instantaneous rise of arc energy is greatly suppressed, and the delay time is reduced. This can be further shortened compared to the conventional case.

  In addition, the present invention is to reduce the impedance of the output of the auxiliary winding 102 so that the stored energy is free-wheeling to the auxiliary winding 102 instead of the load end, The diode 105 is used to provide unidirectionality and operate only at the time of discharging, and a small resistance for discharging is used.

In addition, since the current controllability of the system is reduced when the resistance is configured only, the current controllability of the system can be prevented from being lowered by connecting the reactors Ld in series.
<Fifth embodiment>
FIG. 10 is a circuit configuration diagram showing an arc energy control circuit for a plasma power supply device according to the fifth embodiment of the present invention. The arc energy control circuit includes an inverter 10, a transformer 20, a rectifier 31, and a rectification unit 30 including a CL filter 32 including a capacitor C and a reactor L. The reactor L is configured by being divided into a main winding 101 and an auxiliary winding 102.

  The arc energy control circuit includes a parallel resistor Rc connected to the auxiliary winding 102, a reactor Ld103, a resistor Rd104, and a unidirectional diode connected in parallel to the parallel resistor Rc and connected in series to each other. 105, and a discharge circuit unit 500 including the same.

  The arc energy control circuit further includes an arc detector 200 that measures the voltage across the parallel resistor Rc and determines that an arc is detected when the measured voltage is greater than or equal to a reference value.

  Each configuration and operation of arc detection and arc energy reduction in the arc energy control circuit for a plasma power supply device of the present invention as shown in FIG. 10 is the same as the configuration connection and operation in the fourth embodiment of the present invention shown in FIG. Since it is the same as the operation principle, its detailed description is omitted.

  The present invention has been described in more detail with reference to various embodiments. However, the present invention is not limited to these embodiments, and various modifications can be made without departing from the technical idea of the present invention. Can be modified.

It is a circuit block diagram which shows the conventional arc energy control circuit for plasma power supply devices. It is a circuit block diagram which shows the arc energy control circuit for plasma power supply devices which concerns on the 1st Embodiment of this invention. It is a figure which shows the pulse signal induced | guided | derived to the reactor auxiliary | assistant winding used for the arc detection in the arc energy control circuit for plasma power supply devices of FIG. It is a circuit block diagram which shows the arc energy control circuit for plasma power supply devices which concerns on the 2nd Embodiment of this invention. It is a wave form diagram which shows the transition state of arc energy at the time of arc generation of the arc energy control circuit for plasma power supply devices of FIG. It is a circuit block diagram which shows the arc energy control circuit for plasma power supply devices which concerns on the 3rd Embodiment of this invention. It is a wave form diagram which shows the transition state of arc energy at the time of the arc generation | occurrence | production of the arc energy control circuit for plasma power supply devices of FIG. It is a circuit block diagram which shows the arc energy control circuit for plasma power supply devices which concerns on the 4th Embodiment of this invention. It is a wave form diagram which shows the transition state of arc energy at the time of the arc generation | occurrence | production at the load end of this invention by FIG. It is a circuit block diagram which shows the arc energy control circuit for plasma power supply devices which concerns on the 5th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Inverter 20 Transformer Lr AC inverter 30 Rectifier 31 Rectifier 32 CL filter 100,300,400,500 Discharge circuit unit 101 Main winding 102 Auxiliary winding 103 Reactor Ld
104 Resistance Rd
105 Diode Rc Parallel resistance 200 Arc detector SW1, SW2 First switch SW3 Second switch

Claims (9)

An inverter that converts a DC voltage rectified by a bridge diode and smoothed by a capacitor into a high-frequency AC voltage, an AC reactor connected to an output terminal of the inverter, and the high-frequency AC voltage according to a specific winding ratio A rectifier comprising a transformer for transforming to a necessary voltage and a rectifier connected to an output end of the transformer, wherein the rectifier rectifies the AC voltage output transformed by the transformer into a DC voltage. And a CL filter based on a combination of a capacitor and a reactor connected to the rectifier, wherein the capacitor of the CL filter is connected in parallel to the rectifier, and the reactor of the CL filter is connected in series to the rectifier In the arc energy control circuit for the plasma power supply device,
The reactor L of the CL filter is separated into a main winding and an auxiliary winding,
The auxiliary winding is connected to an arc detector for measuring a voltage across the resistor connected to the auxiliary winding and determining an arc when the measured voltage is equal to or higher than a reference value.
An arc energy control circuit for a plasma power supply device.   The discharge circuit unit further includes: a first switch connected in series to the output terminal of the main winding; and a resistor and a capacitor connected in parallel to the first switch and connected in parallel to each other. The arc energy control circuit for a plasma power supply device according to claim 1.   A first switch connected in series to the output end of the main winding; two capacitors connected in parallel to the first switch and connected in series to each other; and connected in parallel to the first switch; Two resistors connected in series with each other, one end of which is connected to the node between the two resistors and the node between the two capacitors, and the other end is connected to the negative load end of the plasma power supply device. The arc energy control circuit for a plasma power supply device according to claim 1, further comprising a discharge circuit unit including two switches.   4. The arc energy control circuit for a plasma power supply device according to claim 3, wherein the second switch is turned on after a predetermined time elapses from the occurrence of an arc.   The arc energy control circuit for a plasma power supply device according to any one of claims 2 to 4, wherein the first switch is turned off when the voltage is low or overcurrent.   5. The arc for a plasma power supply apparatus according to claim 2, wherein the first switch is turned off on the condition that it is determined that an arc has occurred in the arc detector. 6. Energy control circuit.   The discharge circuit unit may further include a resistor connected to the auxiliary winding, a reactor connected in parallel to the resistor and connected in series to each other, a resistor, and a unidirectional diode. The arc energy control circuit for a plasma power supply device according to 1.   The arc energy control circuit for a plasma power supply device according to claim 7, wherein the reactor, the resistor, and the unidirectional diode connected in series are replaced with a semiconductor switching element and a resistor.   The arc detector according to claim 7, further comprising an arc detection unit that measures a voltage across the resistor connected to the auxiliary winding and determines that an arc is detected when the measured voltage is equal to or higher than a reference value. An arc energy control circuit for the plasma power supply device described.

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