JP2006231122A - Blade application apparatus and blade application method - Google Patents

Blade application apparatus and blade application method Download PDF

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JP2006231122A
JP2006231122A JP2005045866A JP2005045866A JP2006231122A JP 2006231122 A JP2006231122 A JP 2006231122A JP 2005045866 A JP2005045866 A JP 2005045866A JP 2005045866 A JP2005045866 A JP 2005045866A JP 2006231122 A JP2006231122 A JP 2006231122A
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coating
coating liquid
liquid
blade
mask member
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Shinsuke Takahashi
伸輔 高橋
Takayoshi Ose
隆義 大瀬
Hiroshi Ozaki
寛 尾崎
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Fujifilm Holdings Corp
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Fuji Photo Film Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a blade application apparatus and a blade application method which prevent the mixing of air into a coating liquid, suppress the waste of the coating liquid to be applied and consequently achieve efficient application. <P>SOLUTION: The blade application apparatus is provided with: a coating liquid supply part for supplying the coating liquid; a mask member having an opening formed to expose the upper surface of a flat substrate when the mask member is arranged on the flat substrate; and a long sized applying member arranged in the upper surface side of the mask member and for applying the coating liquid supplied by being driven in parallel to the exposed flat substrate from the opening. A groove part for storing the excess coating liquid and a recovery liquid sending part for recovering the coating liquid stored in the groove part and sending the recovered coating liquid to the coating liquid supply part are provided on the mask member. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、平面基板上に塗布液を塗布するブレード塗布装置及びブレード塗布方法に関する。   The present invention relates to a blade coating apparatus and a blade coating method for coating a coating liquid on a flat substrate.

従来、平面基板上に塗布液を塗布する塗布方式としては、ロールコート,グラビアコート,エクストルージョンコートが知られている。   Conventionally, roll coating, gravure coating, and extrusion coating are known as coating methods for coating a coating solution on a flat substrate.

また、平面基板上に塗布液を塗布する塗布方式としては、下記特許文献1に示すようなブレード塗布方式が知られている。   Further, as a coating method for coating a coating solution on a flat substrate, a blade coating method as shown in Patent Document 1 below is known.

図5に示す従来のブレード塗布装置では、平面基板4を、マスク2の下面に重ね合わせて配置し、該マスク2に形成された開口7から平面基板4を上面側に露呈させて支持する。そして、マスク2上に塗布液を供給し、長尺形状のブレード5をマスク2の上面で矢印方向に移動させることで塗布液を掻き延ばし、開口4から露出した平面基板の被塗布面に塗布液を堆積させることで平面基板4上に塗布液からなる塗布層を形成する。平面基板4が、例えば光ディスク等の円盤状のディスク基板の場合には、基板の中央に中心開口が形成されており、塗布工程時には中心開口及びその周縁部に塗布液が付着しないように、予めセンタキャップ3が取り付けられる。塗布後には、平面基板4をマスク2から離し、塗布層を有する平面基板4を得る。   In the conventional blade coating apparatus shown in FIG. 5, the flat substrate 4 is disposed so as to overlap the lower surface of the mask 2, and the flat substrate 4 is exposed from the opening 7 formed in the mask 2 and supported. Then, the coating liquid is supplied onto the mask 2, and the long blade 5 is moved in the direction of the arrow on the upper surface of the mask 2, so that the coating liquid is scratched and applied to the coated surface of the flat substrate exposed from the opening 4. By depositing the liquid, a coating layer made of the coating liquid is formed on the flat substrate 4. In the case where the flat substrate 4 is a disk-shaped disk substrate such as an optical disk, for example, a central opening is formed at the center of the substrate, so that the coating liquid does not adhere to the central opening and its peripheral edge during the coating process. A center cap 3 is attached. After coating, the flat substrate 4 is separated from the mask 2 to obtain the flat substrate 4 having a coating layer.

例えば、このような塗布方式は、ディスク状の基板を有する磁気記録媒体の製造工程で、基板上に印刷面をブレード塗布によって形成する手段として適用されていた。   For example, such a coating method has been applied as a means for forming a printing surface on a substrate by blade coating in a manufacturing process of a magnetic recording medium having a disk-shaped substrate.

特開平5−220966号公報Japanese Patent Laid-Open No. 5-220966

図6は、従来の塗布方式における塗布工程を示す断面図である。図6(a)に示すように、ブレード102で塗布液103を掻き延ばしつつ、マスク101の開口101a上を移動させると、塗布液103がディスクD上における開口101aから露呈する領域に塗布されるとともに、開口101aに充填されず、溢れた塗布液103がブレード102によってマスク101の端へ押し流される。その後、図6(b)に示すように、ブレード102をマスク101上で往復させるために折り返す際に、該ブレード102を持ち上げつつ、溢れた塗布液103上を跨いで反対側に移動させる。このとき、ブレード102の下端部に塗布液103が付着するため、ブレード102が塗布液103上を移動すると、付着した塗布液103がブレード102に引き延ばされて、薄膜状となりつつ塗布液103上に覆い被されるように付着される(図6(c)参照)。このとき、図6(d)に示すように、ブレード102に付着した薄膜状の塗布液とマスク101上に堆積した塗布液103との間に空気が混入し、塗布液103に気泡103aが生じることがある。気泡103aが、ディスクDの塗布層に混入されると、塗布表面に凹凸が生じる等、良好に塗布を行うことができなくなる原因となる点で改善の余地があった。   FIG. 6 is a cross-sectional view showing a coating process in a conventional coating method. As shown in FIG. 6A, when the coating liquid 103 is scraped off by the blade 102 and moved on the opening 101a of the mask 101, the coating liquid 103 is applied to the area exposed on the disk D from the opening 101a. At the same time, the coating liquid 103 overflowing without being filled in the opening 101 a is pushed to the edge of the mask 101 by the blade 102. Thereafter, as shown in FIG. 6B, when the blade 102 is folded back and forth on the mask 101, the blade 102 is lifted and moved to the opposite side across the overflowed coating solution 103. At this time, since the coating liquid 103 adheres to the lower end portion of the blade 102, when the blade 102 moves on the coating liquid 103, the adhered coating liquid 103 is stretched to the blade 102, and becomes a thin film. It is attached so as to cover it (see FIG. 6C). At this time, as shown in FIG. 6D, air is mixed between the thin film-like coating liquid adhering to the blade 102 and the coating liquid 103 deposited on the mask 101, and bubbles 103 a are generated in the coating liquid 103. Sometimes. When the bubbles 103a are mixed in the coating layer of the disk D, there is room for improvement in that the coating surface cannot be satisfactorily applied, such as unevenness on the coating surface.

また、上記の塗布方式では、余剰の塗布液103が、ブレード102の駆動領域の外側へ一部掻き出されてしまうことが避けられず、その後の塗布に供されなくなる塗布液が生じてしまい、塗布液の使用する量の効率を向上させることが制限されてしまう原因となっている点で改善の余地があった。   Further, in the above coating method, it is inevitable that the excess coating liquid 103 is partially scraped to the outside of the drive region of the blade 102, resulting in a coating liquid that is not used for subsequent coating, There was room for improvement in that the efficiency of the amount of coating solution used was limited.

本発明は、上記事情に鑑みてなされたもので、その目的は、塗布液に空気が混入することを防止できるとともに、塗布液を効率良く使用することができるブレード塗布装置及びブレード塗布方法を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a blade coating apparatus and a blade coating method capable of preventing air from being mixed into the coating liquid and efficiently using the coating liquid. There is to do.

本発明の上記目的は、平面基板に塗布液を塗布して塗布層を形成するブレード塗布装置であって、前記塗布液を供給する塗布液供給部と、前記平面基板に配置させた状態で、該平面基板の上面を露呈させる開口が形成されたマスク部材と、前記マスク部材の上面側に配置され、前記上面に対して平行に駆動されることで、供給された前記塗布液を、前記開口から露呈した前記平面基板に塗布する長尺状の塗布部材とを備え、前記マスク部材に余剰の塗布液を貯留する溝部と、前記溝部に貯留した塗布液を回収して前記塗布液供給部に送る回収液送出部とが設けられていることを特徴とするブレード塗布装置によって達成される。   The above object of the present invention is a blade coating apparatus for forming a coating layer by applying a coating solution to a flat substrate, in a state where the coating solution is supplied to the coating substrate and the flat substrate, A mask member having an opening for exposing the upper surface of the planar substrate, and the mask member disposed on the upper surface side of the mask member and driven in parallel to the upper surface, the supplied coating liquid is supplied to the opening. An elongated coating member that is applied to the planar substrate exposed from the groove, a groove portion that stores excess coating liquid in the mask member, and a coating solution that is stored in the groove portion is collected to the coating liquid supply portion. This is achieved by a blade coating device characterized in that a recovery liquid delivery section is provided.

また、本発明の上記目的は、平面基板にマスク部材を配置し、前記マスク部材の開口から前記平面基板を露呈させた状態で、前記マスク部材の上面側に設けられた塗布部材を、前記上面に対して平行に駆動させ、塗布液供給部から供給された塗布液を、前記開口から露呈した前記平面基板に塗布して塗布層を形成するブレード塗布方法であって、前記開口に充填されなかった余剰の塗布液を溝部に貯留させる工程と、前記溝部に貯留した塗布液を回収液送出部によって回収して前記塗布液供給部に送る工程を有することを特徴とするブレード塗布方法によって達成される。   Further, the object of the present invention is to dispose the coating member provided on the upper surface side of the mask member in a state where the mask member is disposed on the planar substrate and the planar substrate is exposed from the opening of the mask member. A blade coating method in which the coating liquid supplied from the coating liquid supply unit is applied to the flat substrate exposed from the opening to form a coating layer, and the opening is not filled. And a step of storing the excess coating liquid in the groove, and a step of recovering the coating liquid stored in the groove by a recovery liquid delivery section and sending it to the coating liquid supply section. The

本発明によれば、塗布を行う際に、開口に充填されずにマスク部材上に残存する余剰の塗布液を溝部に落とし込んで貯留させることができる。こうすれば、塗布部材をマスク部材上で駆動させるときに、余剰の塗布液が溝部に収容されるようになるため、塗布部材に付着して塗布部材の移動に伴い引き延ばされることによって空気が混入してしまうことを防止することができる。このため、平面基板に形成される塗布層の表面に凹凸が生じるなどの欠陥が生じることを防止でき、良好な塗布を行うことができる。また、溝部に貯留した塗布液を回収して塗布液供給部に送るため、塗布部材の駆動領域の外に塗布液が掻き出されてしまうことを回避でき、塗布液を有効に利用することができる。   According to the present invention, when coating is performed, it is possible to drop and store excess coating liquid remaining on the mask member without filling the opening. In this way, when the coating member is driven on the mask member, excess coating liquid is accommodated in the groove, so that the air is attached to the coating member and stretched along with the movement of the coating member. It can prevent mixing. For this reason, it is possible to prevent the occurrence of defects such as irregularities on the surface of the coating layer formed on the flat substrate, and good coating can be performed. Further, since the coating liquid stored in the groove is collected and sent to the coating liquid supply section, it is possible to avoid the coating liquid being scraped out of the drive region of the coating member, and to effectively use the coating liquid. it can.

上記ブレード塗布装置は、前記溝部が、前記塗布部材を往復駆動させた状態における、該塗布部材の折り返し位置に設けられていることが好ましい。こうすれば、マスク部材の開口に対して塗布部材を往復駆動させて塗布を行う際に、塗布部材の折返し位置において、溝部に塗布液を落とし込むことで貯留させることができる。このため、余剰な塗布液が塗布部材に付着した状態で、該塗布部材の移動に追従して引き延ばされてしまうことを防止でき、塗布液に空気が混入することを防止できる。   In the blade coating device, it is preferable that the groove is provided at a folding position of the coating member in a state where the coating member is driven to reciprocate. If it carries out like this, when apply | coating a reciprocating drive of an application | coating member with respect to opening of a mask member, it can be made to store by dropping an application liquid in a groove part in the return position of an application | coating member. For this reason, it is possible to prevent the excessive coating liquid from being stretched following the movement of the coating member in a state where the coating liquid adheres to the coating member, and to prevent air from being mixed into the coating liquid.

上記ブレード塗布装置は、回収液送出部がポンプ部を有することが好ましい。こうすれば、溝部から回収した塗布液をポンプ部によって塗布液供給部に循環させることができ、塗布時における塗布液の流れを円滑にすることができる。こうして、塗布液の無駄を省くことができるとともに、効率良く塗布液の回収と再供給を行うことができる。   In the blade coating apparatus, it is preferable that the recovered liquid delivery unit has a pump unit. If it carries out like this, the coating liquid collect | recovered from the groove part can be circulated to a coating liquid supply part by a pump part, and the flow of the coating liquid at the time of application | coating can be made smooth. Thus, waste of the coating liquid can be eliminated, and the coating liquid can be efficiently recovered and re-supplied.

本発明のブレード塗布方法は、塗布部材をマスク部材上で往復駆動させ、往復駆動の折り返し位置で、溝部に余剰の塗布液を貯留させることが好ましい。こうすれば、塗布部材を往復駆動させる工程で、塗布部材の折返し位置において、溝部に塗布液を落とし込むことで貯留させることができるため、余剰な塗布液が塗布部材に付着した状態で該塗布部材によって引き延ばされて塗布液に空気が混入することを防止できる。   In the blade coating method of the present invention, it is preferable that the coating member is reciprocally driven on the mask member, and excess coating liquid is stored in the groove portion at the turn-back position of the reciprocating drive. In this way, in the step of reciprocating the coating member, the coating member can be stored by dropping the coating solution into the groove at the turn-back position of the coating member, so that the coating member remains attached to the coating member. It is possible to prevent the air from being mixed into the coating liquid by being stretched by the above.

本発明のブレード塗布方法は、塗布液を溝部から供給することが好ましい。こうすれば、マスク部材上に塗布液を供給する必要がなく、従来のようにマスク部材上に供給された塗布液が塗布部材と接触することで、駆動する塗布部材とマスク部材上で接触して該塗布部材に付着してしまうことがない。   In the blade coating method of the present invention, the coating liquid is preferably supplied from the groove. In this way, it is not necessary to supply the coating liquid onto the mask member, and the coating liquid supplied onto the mask member comes into contact with the coating member as in the prior art, so that the driving coating member contacts with the mask member. Thus, it does not adhere to the application member.

さらに、上記本発明を適用してディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成すれば、印刷面を凹凸などの欠陥がない良好な面にすることができるとともに、印刷面を構成するために使用される塗布液の無駄を省くことができ、効率良く印刷面を形成することができる。   Furthermore, by applying the present invention and applying the coating liquid to a disc-shaped recording medium to form at least one of the printed surfaces, the printed surface can be made a good surface free from irregularities and the like. The waste of the coating liquid used for constituting the printing surface can be eliminated, and the printing surface can be formed efficiently.

本発明によれば、塗布液に空気が混入することを防止できるとともに、塗布液を効率良く使用することができるブレード塗布装置及びブレード塗布方法を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, while being able to prevent that air mixes in a coating liquid, the blade coating device and blade coating method which can use a coating liquid efficiently can be provided.

以下、本発明の実施形態を図面に基づいて詳しく説明する。
以下、本発明にかかるブレード塗布装置及びブレード塗布方法の一実施形態を、図面に基づいて説明する。図1は、本実施形態のブレード塗布装置の構成を説明する図である。図2(a)から(c)は、塗布工程を説明する断面図である。図3(a)から(d)は、塗布工程において、本発明に係る手順を説明する断面図である。図4(a)から(c)は、塗布工程において、本発明に係る別の手順を説明する断面図である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Hereinafter, an embodiment of a blade coating apparatus and a blade coating method according to the present invention will be described with reference to the drawings. FIG. 1 is a diagram illustrating a configuration of a blade coating apparatus according to the present embodiment. FIGS. 2A to 2C are cross-sectional views illustrating the coating process. FIGS. 3A to 3D are cross-sectional views illustrating the procedure according to the present invention in the coating process. 4 (a) to 4 (c) are cross-sectional views illustrating another procedure according to the present invention in the coating process.

ブレード塗布装置10は、被塗布部材である平面基板の表面に塗布液を塗布して塗布層を形成するものであって、本実施形態では平面基板の一例としてディスク状記録媒体(以下、ディスクともいう。)Dを被塗布部材とする。   The blade coating apparatus 10 forms a coating layer by coating a coating liquid on the surface of a planar substrate that is a member to be coated. In this embodiment, a disk-shaped recording medium (hereinafter also referred to as a disk) is used as an example of a planar substrate. And D is a member to be coated.

ブレード塗布装置10は、薄い板状の部材であるマスク部材11を備えており、マスク部材11には、上面視において円形の開口11aが形成されている。   The blade coating device 10 includes a mask member 11 that is a thin plate-like member, and the mask member 11 is formed with a circular opening 11a in a top view.

また、ブレード塗布装置10には、ディスクDを上部の支持台に載せて支持させ、マスク部材11に対して相対移動可能な基板支持部14が備えられている。基板支持部14は、上方に位置するときに、支持したディスクDをマスク部材11の開口11aの下方に押し付け、かつ、その状態でディスクDを保持する。こうして、ディスクDにマスク部材11が配置される。   Further, the blade coating device 10 is provided with a substrate support portion 14 that can support the disk D by placing it on an upper support base and can move relative to the mask member 11. When the substrate support portion 14 is positioned above, the substrate D is pressed against the lower side of the opening 11a of the mask member 11 and holds the disc D in this state. Thus, the mask member 11 is disposed on the disk D.

本実施形態において、開口11aは直径が120mm程度の円形状に形成される。なお、開口11aの形状は、ディスクD上に形成される塗布層の形状に合わせた形状とすることができ、マスク部材11の開口形状を適宜変更することによって、塗布層の形状は自由に設定できる。   In the present embodiment, the opening 11a is formed in a circular shape having a diameter of about 120 mm. Note that the shape of the opening 11a can be made to match the shape of the coating layer formed on the disk D, and the shape of the coating layer can be freely set by appropriately changing the opening shape of the mask member 11. it can.

また、基板支持部14が下方位置に移動することで、図示しないロボットアーム等によって、基板支持部14のディスクDを取り出して搬送系の下流側へ搬出すること、及び、基板支持部14に塗布液を塗布していない別のディスクDを載せることができる。本実施形態では、基板支持部14をマスク部材11に対して相対移動させる構成としたが、マスク部材11を基板支持部14に対して相対移動させる構成としてもよい。   Further, when the substrate support unit 14 is moved to a lower position, the disk D of the substrate support unit 14 is taken out by a robot arm or the like (not shown) and carried to the downstream side of the transport system, and the substrate support unit 14 is coated. Another disk D to which no liquid is applied can be placed. In the present embodiment, the substrate support portion 14 is moved relative to the mask member 11, but the mask member 11 may be moved relative to the substrate support portion 14.

マスク部材11の上面(図1において上方の面)側であって、該上面に対して僅かに離間した位置に、長尺状の塗布部材(ブレード)12が設けられている。塗布部材12は、図1中矢印で示すように、上面の面方向に対して平行に駆動する構成である。具体的に、塗布部材12は、図1で示すx−y平面に対して平行に駆動する構成である。また、塗布部材12は、z方向に対しても適宜駆動可能に構成されていてもよい。   A long coating member (blade) 12 is provided on the upper surface (upper surface in FIG. 1) side of the mask member 11 at a position slightly separated from the upper surface. The application member 12 is configured to be driven in parallel to the surface direction of the upper surface, as indicated by an arrow in FIG. Specifically, the application member 12 is configured to be driven in parallel to the xy plane shown in FIG. In addition, the application member 12 may be configured to be appropriately drivable in the z direction.

塗布部材51の材質としては、SUS316のクロムの含有量以上のクロムの含有量とすることが好ましく、こうすることで、耐磨耗性、耐腐食性、耐熱性、離型性をより一層向上させることができる。   The material of the coating member 51 is preferably a chromium content that is equal to or greater than the chromium content of SUS316, and this further improves the wear resistance, corrosion resistance, heat resistance, and releasability. Can be made.

次に、ディスクに塗布層を形成する手順を説明する。図2(a)に示すように、マスク部材11に対して離間させた状態の基板支持部14上にディスクDを平置きに載せる。このとき、ディスクDにおける被塗布側面を上面に向けた状態で基板支持部14に配置する。   Next, the procedure for forming the coating layer on the disk will be described. As shown in FIG. 2A, the disk D is placed flat on the substrate support portion 14 in a state of being separated from the mask member 11. At this time, it arrange | positions in the board | substrate support part 14 in the state which turned the to-be-coated side in the disk D to the upper surface.

基板支持部14とマスク部材11とを相対移動させることで、図2(b)に示すように、マスク部材11の開口11aの下方にディスクDを押し付けた状態で保持する。このとき、ディスクDの外周端が開口11aの下部に当接し、開口11aから、ディスクDの上面が上方に露呈した状態となる。開口11aから露呈されたディスクDにおける領域が被塗布領域となる。   By relatively moving the substrate support portion 14 and the mask member 11, the disk D is held in a state of being pressed below the opening 11 a of the mask member 11 as shown in FIG. At this time, the outer peripheral end of the disk D contacts the lower part of the opening 11a, and the upper surface of the disk D is exposed upward from the opening 11a. The area on the disc D exposed from the opening 11a is the application area.

図2(b)に示すように、ディスクDにマスク部材11を配置させた状態で、ディスクDの中心開口に、塗布液の付着を防止するセンタキャップ13が装着される。センタキャップ13は、図示しないセンタキャップ着脱アームの吸引部によって吸引保持され、開口11aの上方からディスクDの中心開口に装着される。   As shown in FIG. 2B, a center cap 13 for preventing the coating liquid from being attached is attached to the center opening of the disk D in a state where the mask member 11 is disposed on the disk D. The center cap 13 is sucked and held by a suction portion of a center cap attaching / detaching arm (not shown), and is attached to the center opening of the disk D from above the opening 11a.

図2(c)に示すように、マスク部材11の上方に僅かな隙間で、かつ、面方向に対して平行(図中矢印で示す方向)に塗布部材12を駆動し、予め供給された塗布液16を、該塗布部材12の側面で掻き延ばす。こうすると、塗布液16がマスク部材11上に薄く延ばされるとともに開口11aに充填され、該開口11aから露呈するディスクDの上面の被塗布領域に塗布される。塗布工程後に乾燥させることで、ディスクDに塗布された塗布液16が硬化し、塗布層が形成される。   As shown in FIG. 2 (c), the coating member 12 is driven in a slight gap above the mask member 11 and parallel to the surface direction (the direction indicated by the arrow in the figure), and the coating supplied in advance. The liquid 16 is spread on the side surface of the application member 12. As a result, the coating liquid 16 is thinly spread on the mask member 11 and filled in the opening 11a, and is applied to the coated area on the upper surface of the disk D exposed from the opening 11a. By drying after the coating process, the coating liquid 16 applied to the disk D is cured and a coating layer is formed.

本実施形態において、塗布部材12の駆動は、マスク部材11の開口11aの上方を直線方向に往復する駆動としたが、これに限定されない。   In the present embodiment, the application member 12 is driven to reciprocate in the linear direction above the opening 11a of the mask member 11, but is not limited thereto.

図1に示すように、マスク部材11には、塗布部材12の駆動方法に対して開口11aを挟んで両側に溝部15がそれぞれ形成されている。溝部15は、マスク部材11における余剰の塗布液を貯留できるようにマスク部材11の上面から下方に窪んだ形状である。また、溝部15は、塗布部材12の長手方向に対して平行に形成され、塗布部材12の下端部の少なくとも一部を、その内側に挿入可能に構成されている。本実施形態では、各溝部15が、往復駆動する塗布部材12の駆動領域の両端側の折り返し位置に設けられている。   As shown in FIG. 1, the mask member 11 has grooves 15 formed on both sides of the opening 11 a with respect to the driving method of the application member 12. The groove portion 15 has a shape that is recessed downward from the upper surface of the mask member 11 so that an excessive coating liquid in the mask member 11 can be stored. Moreover, the groove part 15 is formed in parallel with the longitudinal direction of the application member 12, and it is comprised so that at least one part of the lower end part of the application member 12 can be inserted in the inner side. In this embodiment, each groove part 15 is provided in the folding | turning position of the both ends side of the drive area | region of the application member 12 to reciprocately drive.

溝部15は、塗布部材12の駆動領域の両端側における折り返し位置の一方に形成されていればよい。また、溝部15は、塗布部材12の駆動領域のいずれかに形成されていればよく、本発明の効果を奏することができる範囲で、その数や形状は適宜変更可能である。   The groove part 15 should just be formed in one of the folding | turning positions in the both ends of the drive area | region of the application member 12. FIG. Moreover, the groove part 15 should just be formed in either of the drive area | regions of the application | coating member 12, and the number and shape can be suitably changed in the range which can show | play the effect of this invention.

本実施形態において、塗布液13は、塗布液供給部22から、マスク部材11の上面に供給される。塗布液13が供給される位置は、塗布部材12の駆動領域内であって、本実施形態においては、塗布部材12の両方の折り返し位置と開口11aとのそれぞれの間である。   In the present embodiment, the coating liquid 13 is supplied from the coating liquid supply unit 22 to the upper surface of the mask member 11. The position where the coating liquid 13 is supplied is within the drive region of the coating member 12, and in this embodiment, is between each of the folding positions of the coating member 12 and the opening 11 a.

なお、塗布液13が各溝部15から供給される構成とすることもできる。図示しないが、溝部15の内側に連通する供給管を配設し、供給管を塗布液供給部22に接続させ、塗布時に塗布液を供給管によって溝部15へ送出する構成とすることができる。   Note that the coating solution 13 may be supplied from each groove 15. Although not shown, a supply pipe that communicates with the inside of the groove 15 may be provided, the supply pipe may be connected to the coating liquid supply section 22, and the coating liquid may be sent to the groove 15 through the supply pipe during coating.

ブレード塗布装置10は、塗布部材12の駆動を制御するブレード駆動部23と、ブレード駆動部23を制御可能な制御部21とを備えていてもよい。また、塗布液供給部22を制御部21とを接続し、該制御部21によって塗布部材12の駆動と塗布液16の供給を連動させてもよい。   The blade coating apparatus 10 may include a blade driving unit 23 that controls driving of the coating member 12 and a control unit 21 that can control the blade driving unit 23. Further, the coating liquid supply unit 22 may be connected to the control unit 21, and the driving of the coating member 12 and the supply of the coating liquid 16 may be linked by the control unit 21.

ブレード塗布装置10は、塗布時において、開口11aに充填されなかった余剰の塗布液16を溝部15に貯留させることができる。   The blade coating device 10 can store the excess coating liquid 16 that has not been filled in the opening 11a in the groove 15 during coating.

次に、図3を参照して、溝部に塗布液を貯留させる手順を説明する。
図3(a)に示すように、塗布液16は、一部が、塗布部材12によってマスク部材11の開口11aに充填されるとともに、残りが、開口11aに充填されず、余剰の塗布液16aとなる。
Next, with reference to FIG. 3, the procedure for storing the coating liquid in the groove will be described.
As shown in FIG. 3A, a part of the coating liquid 16 is filled in the opening 11a of the mask member 11 by the coating member 12, and the remainder is not filled in the opening 11a, so that the excess coating liquid 16a is filled. It becomes.

図3(b)に示すように、塗布部材12によって塗布部材11の上面側へ更に掻き延ばし、塗布部材12を溝部15の上方近傍まで駆動させることで、余剰の塗布液16が溝部15に落とし込まれる。図3(c)に示すように、塗布部材12が溝部15上に位置した状態で、塗布部材12に付着した塗布液16が自重によって溝部15に垂れ落ちる。   As shown in FIG. 3 (b), the coating member 12 is further scraped to the upper surface side of the coating member 11, and the coating member 12 is driven to the vicinity of the upper portion of the groove portion 15, so that the excess coating liquid 16 drops into the groove portion 15. Is included. As shown in FIG. 3C, in a state where the application member 12 is positioned on the groove portion 15, the coating liquid 16 attached to the application member 12 hangs down on the groove portion 15 due to its own weight.

図3(d)に示すように、溝部15の上方を駆動して通過すると、余剰の塗布液16が溝部15に貯留し、塗布部材12に引き延ばされることなく分離される。   As shown in FIG. 3 (d), when the upper portion of the groove portion 15 is driven and passed, the excess coating liquid 16 is stored in the groove portion 15 and separated without being stretched by the application member 12.

溝部15の寸法としては、溝の幅Wを10mmから50mmの範囲とすることができ、溝の深さdを5mmから25mmの範囲とすることができる。   As the dimensions of the groove portion 15, the width W of the groove can be in the range of 10 mm to 50 mm, and the depth d of the groove can be in the range of 5 mm to 25 mm.

本実施形態のブレード塗布装置10は、溝部15の内部に貯留した余剰の塗布液16aが、その後の塗布工程で使用する塗布液として供される構成である。溝部15の内部に貯留した余剰の塗布液16aが、図示しない回収管などでマスク部材11から排出されてもよく、また、環流管を介して塗布液供給部22に送られてもよい。本実施形態で塗布液16aを循環する環流システムとしては、環流管にストレーナ、フィルタ、脱泡装置を設けた構成とすることができる。脱泡装置としては、膜脱気(多孔質膜)、遠心脱気(サイクロン)などがある。   The blade coating apparatus 10 according to the present embodiment has a configuration in which excess coating liquid 16a stored in the groove 15 is used as a coating liquid used in the subsequent coating process. Excess coating liquid 16a stored in the groove 15 may be discharged from the mask member 11 through a collection pipe (not shown) or may be sent to the coating liquid supply section 22 via a reflux pipe. In the present embodiment, the circulating system for circulating the coating liquid 16a may be configured such that a strainer, a filter, and a defoaming device are provided in the circulating pipe. Examples of the defoaming device include membrane deaeration (porous membrane), centrifugal deaeration (cyclone), and the like.

次に、図4を参照して、溝部に貯留した塗布液を回収し送出する手順を説明する。
図4(a)に示すように、溝部15に貯留した塗布液16bを回収液送出部24で回収する。そして、図4(b)に示すように、回収液送出部24から回収した塗布液を塗布液供給部22のノズル部17へ送る。そして、塗布時には、ノズル部17からマスク部材11の上面に塗布液16cが供給され、図4(c)に示すように、塗布部材12によって塗布液16cが掻き延ばされて開口11aに充填され、ディスクDの被塗布領域に塗布液16cが塗布される。
Next, with reference to FIG. 4, a procedure for collecting and delivering the coating solution stored in the groove will be described.
As shown in FIG. 4 (a), the coating liquid 16 b stored in the groove 15 is collected by the collection liquid delivery unit 24. Then, as shown in FIG. 4B, the coating liquid collected from the collected liquid sending unit 24 is sent to the nozzle unit 17 of the coating liquid supply unit 22. Then, at the time of application, the coating liquid 16c is supplied from the nozzle portion 17 to the upper surface of the mask member 11, and as shown in FIG. 4C, the coating liquid 16c is scratched by the application member 12 to fill the opening 11a. The coating liquid 16c is applied to the coated area of the disk D.

回収液送出部24は、溝部15に貯留した塗布液を吸引して回収でき、また、回収した塗布液を所定の圧力で塗布液供給部22に送出するポンプ部を備えていることが好ましい。   The recovered liquid delivery unit 24 is preferably provided with a pump unit that can suck and collect the coating liquid stored in the groove 15 and send the collected coating liquid to the coating liquid supply unit 22 at a predetermined pressure.

本実施形態のブレード塗布装置10は、塗布を行う際に、開口11aに充填されずにマスク部材11上に残存した余剰の塗布液16を溝部15に落とし込んで貯留させることができる。こうすれば、塗布部材12をマスク部材11上で駆動させるときに、余剰の塗布液16aが溝部15に収容されるようになるため、塗布部材12に付着し、該塗布部材12の移動に伴い引き延ばされることによって空気が混入してしまうことを防止することができる。このため、空気が混入していない余剰の塗布液16をその後の塗布に使用するため、ディスクDに形成される塗布層の表面に凹凸が生じるなどの欠陥が生じることを防止でき、良好な塗布を行うことができる。   The blade coating apparatus 10 of the present embodiment can drop and store the excess coating liquid 16 remaining on the mask member 11 without filling the opening 11a when coating. In this way, when the coating member 12 is driven on the mask member 11, the excess coating liquid 16 a is accommodated in the groove portion 15, so that it adheres to the coating member 12 and moves along with the movement of the coating member 12. It is possible to prevent air from being mixed in by being stretched. For this reason, since the surplus coating liquid 16 in which air is not mixed is used for the subsequent coating, it is possible to prevent the occurrence of defects such as irregularities on the surface of the coating layer formed on the disk D, and good coating. It can be performed.

また、本実施形態のブレード塗布装置10は、溝部15に貯留した塗布液16を回収液送出部24で回収して塗布液供給部22に送るため、塗布部材12の駆動領域の外に塗布液が掻き出されてしまうことを回避でき、塗布液16を有効に利用することができる。   Further, in the blade coating device 10 of the present embodiment, the coating liquid 16 stored in the groove 15 is collected by the collected liquid sending section 24 and sent to the coating liquid supply section 22, so that the coating liquid is outside the drive region of the coating member 12. Can be avoided and the coating liquid 16 can be used effectively.

本実施形態のように、溝部15が、塗布部材12を往復駆動させた状態における、該塗布部材12の折り返し位置に設けられている構成とすれば、マスク部材11の開口11aに対して塗布部材12を往復駆動させて塗布を行う際に、塗布部材12の折返し位置において、溝部15に塗布液16を落とし込むことで貯留させることができる。このため、余剰な塗布液16aが塗布部材12に付着した状態で、該塗布部材12の移動に接触して引き延ばされてしまうことを防止でき、塗布液16に空気が混入してしまうことを防止できる。   If the groove portion 15 is provided at the folding position of the coating member 12 in a state in which the coating member 12 is driven to reciprocate as in the present embodiment, the coating member with respect to the opening 11a of the mask member 11 is used. When coating is performed by reciprocally driving 12, the coating liquid 16 can be stored by dropping into the groove 15 at the turn-back position of the coating member 12. For this reason, it is possible to prevent the excess coating liquid 16a from adhering to the movement of the coating member 12 in a state where the coating liquid 16a is attached to the coating member 12, and the air is mixed into the coating liquid 16. Can be prevented.

回収液送出部24がポンプ部を有する構成とすれば、溝部15から回収した塗布液16をポンプ部によって塗布液供給部22に循環させることができ、塗布時における塗布液の流れを円滑にすることができる。こうして、塗布液の無駄を省くことができるとともに、効率良く塗布液の回収と再供給を行うことができる。   If the recovered liquid delivery part 24 has a pump part, the application liquid 16 recovered from the groove part 15 can be circulated to the application liquid supply part 22 by the pump part, and the flow of the application liquid during application is made smooth. be able to. Thus, waste of the coating liquid can be eliminated, and the coating liquid can be efficiently recovered and re-supplied.

上記本発明を適用してディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成すれば、凹凸などの欠陥がない良好な面状態となるように塗布を行うことができ、印刷面を構成するために使用される塗布液の無駄を省くことができる。   By applying the present invention to the disk-shaped recording medium and applying the coating liquid to form at least one layer of the printed surface, the coating can be performed so that a good surface state without defects such as irregularities can be obtained. The waste of the coating solution used for constituting the printing surface can be eliminated.

ブレード塗布装置の構成を説明する図である。It is a figure explaining the structure of a blade coating device. 塗布工程を説明する断面図である。It is sectional drawing explaining an application | coating process. 塗布工程において、本発明に係る手順を説明する断面図である。It is sectional drawing explaining the procedure which concerns on this invention in an application | coating process. 塗布工程において、本発明に係る別の手順を説明する断面図である。It is sectional drawing explaining another procedure which concerns on this invention in an application | coating process. 従来のブレード塗布装置を示す図である。It is a figure which shows the conventional blade coating device. 従来の塗布方式における塗布工程を示す断面図である。It is sectional drawing which shows the application | coating process in the conventional application | coating system.

符号の説明Explanation of symbols

10 塗布装置
11 マスク部材
12 塗布部材
15 溝部
16 塗布液
22 塗布液供給部
24 回収液送出部
D ディスク(平面基板)
DESCRIPTION OF SYMBOLS 10 Coating apparatus 11 Mask member 12 Coating member 15 Groove part 16 Coating liquid 22 Coating liquid supply part 24 Collected liquid sending part D Disk (planar substrate)

Claims (7)

平面基板に塗布液を塗布して塗布層を形成するブレード塗布装置であって、
前記塗布液を供給する塗布液供給部と、
前記平面基板に配置させた状態で、該平面基板の上面を露呈させる開口が形成されたマスク部材と、
前記マスク部材の上面側に配置され、前記上面に対して平行に駆動されることで、供給された前記塗布液を、前記開口から露呈した前記平面基板に塗布する長尺状の塗布部材とを備え、
前記マスク部材に余剰の塗布液を貯留する溝部と、前記溝部に貯留した塗布液を回収して前記塗布液供給部に送る回収液送出部とが設けられていることを特徴とするブレード塗布装置。
A blade coating apparatus for forming a coating layer by coating a coating solution on a flat substrate,
A coating solution supply section for supplying the coating solution;
A mask member in which an opening for exposing the upper surface of the planar substrate is formed in a state of being disposed on the planar substrate;
An elongated coating member that is disposed on the upper surface side of the mask member and is driven in parallel with the upper surface to apply the supplied coating liquid to the planar substrate exposed from the opening; Prepared,
A blade coating apparatus comprising: a groove portion for storing an excess coating liquid in the mask member; and a recovery liquid sending section for collecting the coating liquid stored in the groove portion and sending the recovered coating liquid to the coating liquid supply unit. .
前記溝部が、前記塗布部材を往復駆動させた状態における、該塗布部材の折り返し位置に設けられていることを特徴とする請求項1に記載のブレード塗布装置。   2. The blade coating apparatus according to claim 1, wherein the groove is provided at a folding position of the coating member in a state in which the coating member is driven to reciprocate. 前記回収液送出部がポンプ部を有することを特徴とする請求項1又は2に記載のブレード塗布装置。   The blade coating apparatus according to claim 1, wherein the recovered liquid delivery unit includes a pump unit. ディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成する請求項1から3のいずれか1つに記載のブレード塗布装置。   The blade coating apparatus according to any one of claims 1 to 3, wherein the coating liquid is applied to a disk-shaped recording medium to form at least one layer of a printing surface. 平面基板にマスク部材を配置し、前記マスク部材の開口から前記平面基板を露呈させた状態で、前記マスク部材の上面側に設けられた塗布部材を、前記上面に対して平行に駆動させ、塗布液供給部から供給された塗布液を、前記開口から露呈した前記平面基板に塗布して塗布層を形成するブレード塗布方法であって、
前記開口に充填されなかった余剰の塗布液を溝部に貯留させる工程と、前記溝部に貯留した塗布液を回収液送出部によって回収して前記塗布液供給部に送る工程を有することを特徴とするブレード塗布方法。
A mask member is arranged on a flat substrate, and the coating member provided on the upper surface side of the mask member is driven in parallel with the upper surface in a state where the flat substrate is exposed from the opening of the mask member, and coating is performed. A blade coating method for forming a coating layer by applying a coating solution supplied from a liquid supply unit to the flat substrate exposed from the opening,
A step of storing an excess coating liquid not filled in the opening in the groove, and a step of collecting the coating liquid stored in the groove by a recovery liquid delivery unit and sending the recovered coating liquid to the coating liquid supply unit. Blade application method.
前記塗布部材を前記マスク部材上で往復駆動させ、往復駆動の折り返し位置で、前記溝部に前記余剰の塗布液を貯留させることを特徴とする請求項5に記載のブレード塗布方法。   6. The blade coating method according to claim 5, wherein the coating member is reciprocally driven on the mask member, and the excess coating liquid is stored in the groove at a turn-back position of the reciprocating drive. ディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成する請求項5又は6に記載のブレード塗布方法。   The blade coating method according to claim 5 or 6, wherein the coating liquid is applied to a disk-shaped recording medium to form at least one layer of a printing surface.
JP2005045866A 2005-02-22 2005-02-22 Blade application apparatus and blade application method Pending JP2006231122A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013126637A (en) * 2011-12-19 2013-06-27 Sumitomo Chemical Co Ltd Sealing device, and method for manufacturing honeycomb structure
CN113613906A (en) * 2019-03-26 2021-11-05 西门子股份公司 Method and printing device for stencil printing of layers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013126637A (en) * 2011-12-19 2013-06-27 Sumitomo Chemical Co Ltd Sealing device, and method for manufacturing honeycomb structure
CN113613906A (en) * 2019-03-26 2021-11-05 西门子股份公司 Method and printing device for stencil printing of layers

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