JP2006224061A - Blade application apparatus and blade application method - Google Patents

Blade application apparatus and blade application method Download PDF

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JP2006224061A
JP2006224061A JP2005044177A JP2005044177A JP2006224061A JP 2006224061 A JP2006224061 A JP 2006224061A JP 2005044177 A JP2005044177 A JP 2005044177A JP 2005044177 A JP2005044177 A JP 2005044177A JP 2006224061 A JP2006224061 A JP 2006224061A
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coating
blade
groove
coating liquid
opening
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Shinsuke Takahashi
伸輔 高橋
Takayoshi Ose
隆義 大瀬
Hiroshi Ozaki
寛 尾崎
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Fujifilm Holdings Corp
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Fuji Photo Film Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a blade application apparatus and a blade application method for preventing mixing of air into an application liquid and for efficiently applying application liquid. <P>SOLUTION: The blade application apparatus is provided with: a mask member having an opening for exposing an upper surface of a planar substrate when arranged on the planar substrate; and a long sized application member arranged in the upper surface side of the mask member and for applying the supplied application liquid onto the exposed planar substrate from the opening by moving in parallel to the upper surface, and the mask member is provided with a groove part for storing the excess application liquid. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、平面基板上に塗布液を塗布するブレード塗布装置及びブレード塗布方法に関する。   The present invention relates to a blade coating apparatus and a blade coating method for coating a coating liquid on a flat substrate.

従来、平面基板上に塗布液を塗布する塗布方式としては、ロールコート,グラビアコート,エクストルージョンコートが知られている。   Conventionally, roll coating, gravure coating, and extrusion coating are known as coating methods for coating a coating solution on a flat substrate.

また、平面基板上に塗布液を塗布する塗布方式としては、下記特許文献1に示すようなブレード塗布方式が知られている。   Further, as a coating method for coating a coating solution on a flat substrate, a blade coating method as shown in Patent Document 1 below is known.

図5に示す従来のブレード塗布装置では、平面基板4を、マスク2の下面に重ね合わせて配置し、該マスク2に形成された開口7から平面基板4を上面側に露呈させて支持する。そして、マスク2上に塗布液を供給し、長尺形状のブレード5をマスク2の上面で矢印方向に移動させることで塗布液を掻き延ばし、開口4から露出した平面基板の被塗布面に塗布液を堆積させることで平面基板4上に塗布液からなる塗布層を形成する。平面基板4が、例えば光ディスク等の円盤状のディスク基板の場合には、基板の中央に中心開口が形成されており、塗布工程時には中心開口及びその周縁部に塗布液が付着しないように、予めセンタキャップ3が取り付けられる。塗布後には、平面基板4をマスク2から離し、塗布層を有する平面基板4を得る。   In the conventional blade coating apparatus shown in FIG. 5, the flat substrate 4 is disposed so as to overlap the lower surface of the mask 2, and the flat substrate 4 is exposed from the opening 7 formed in the mask 2 and supported. Then, the coating liquid is supplied onto the mask 2, and the long blade 5 is moved in the direction of the arrow on the upper surface of the mask 2, so that the coating liquid is scratched and applied to the coated surface of the flat substrate exposed from the opening 4. By depositing the liquid, a coating layer made of the coating liquid is formed on the flat substrate 4. In the case where the flat substrate 4 is a disk-shaped disk substrate such as an optical disk, for example, a central opening is formed at the center of the substrate, so that the coating liquid does not adhere to the central opening and its peripheral edge during the coating process. A center cap 3 is attached. After coating, the flat substrate 4 is separated from the mask 2 to obtain the flat substrate 4 having a coating layer.

例えば、このような塗布方式は、ディスク状の基板を有する磁気記録媒体の製造工程で、基板上に印刷面をブレード塗布によって形成する手段として適用されていた。   For example, such a coating method has been applied as a means for forming a printing surface on a substrate by blade coating in a manufacturing process of a magnetic recording medium having a disk-shaped substrate.

特開平5−220966号公報Japanese Patent Laid-Open No. 5-220966

図6は、従来の塗布方式における塗布工程を示す断面図である。図6(a)に示すように、ブレード102で塗布液103を掻き延ばしつつ、マスク101の開口101a上を移動させると、塗布液103がディスクD上における開口101aから露呈する領域に塗布されるとともに、開口101aに充填されず、溢れた塗布液103がブレード102によってマスク101の端へ押し流される。その後、図6(b)に示すように、ブレード102をマスク101上で往復させるために折り返す際に、該ブレード102を持ち上げつつ、溢れた塗布液103上を跨いで反対側に移動させる。このとき、ブレード102の下端部に塗布液103が付着するため、ブレード102が塗布液103上を移動すると、付着した塗布液103がブレード102に引き延ばされて、薄膜状となりつつ塗布液103上に覆い被されるように付着される(図6(c)参照)。このとき、図6(d)に示すように、ブレード102に付着した薄膜状の塗布液とマスク101上に堆積した塗布液103との間に空気が混入し、塗布液103に気泡103aが生じることがある。気泡103aが、ディスクDの塗布層に混入されると、塗布表面に凹凸が生じる等、良好に塗布を行うことができなくなる原因となる点で改善の余地があった。なお、ブレード102の移動する高さ、距離を調製することで改善される可能性もあるが、液量の影響を受けやすく不安定であった。   FIG. 6 is a cross-sectional view showing a coating process in a conventional coating method. As shown in FIG. 6A, when the coating liquid 103 is scraped off by the blade 102 and moved on the opening 101a of the mask 101, the coating liquid 103 is applied to the area exposed on the disk D from the opening 101a. At the same time, the coating liquid 103 overflowing without being filled in the opening 101 a is pushed to the edge of the mask 101 by the blade 102. Thereafter, as shown in FIG. 6B, when the blade 102 is folded back and forth on the mask 101, the blade 102 is lifted and moved to the opposite side across the overflowed coating solution 103. At this time, since the coating liquid 103 adheres to the lower end portion of the blade 102, when the blade 102 moves on the coating liquid 103, the adhered coating liquid 103 is stretched to the blade 102, and becomes a thin film. It is attached so as to cover it (see FIG. 6C). At this time, as shown in FIG. 6D, air is mixed between the thin film-like coating liquid adhering to the blade 102 and the coating liquid 103 deposited on the mask 101, and bubbles 103 a are generated in the coating liquid 103. Sometimes. When the bubbles 103a are mixed in the coating layer of the disk D, there is room for improvement in that the coating surface cannot be satisfactorily applied, such as unevenness on the coating surface. It may be improved by adjusting the moving height and distance of the blade 102, but it is easily affected by the amount of liquid and unstable.

本発明は、上記事情に鑑みてなされたもので、その目的は、塗布液に空気が混入することを防止できるとともに、塗布液を効率良く使用することができるブレード塗布装置及びブレード塗布方法を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a blade coating apparatus and a blade coating method capable of preventing air from being mixed into the coating liquid and efficiently using the coating liquid. There is to do.

本発明の上記目的は、平面基板に塗布液を塗布して塗布層を形成するブレード塗布装置であって、前記平面基板に配置させた状態で、該平面基板の上面を露呈させる開口が形成されたマスク部材と、前記マスク部材の上面側に配置され、前記上面に対して平行に駆動されることで、供給された前記塗布液を、前記開口から露呈した前記平面基板に塗布する長尺状の塗布部材とを備え、前記マスク部材に余剰の塗布液を貯留する溝部が設けられていることを特徴とするブレード塗布装置によって達成される。   The above object of the present invention is a blade coating apparatus for forming a coating layer by applying a coating solution to a flat substrate, wherein an opening for exposing the upper surface of the flat substrate is formed in a state of being disposed on the flat substrate. The mask member is disposed on the upper surface side of the mask member, and is driven in parallel to the upper surface to apply the supplied coating liquid to the flat substrate exposed from the opening. This is achieved by a blade coating device characterized in that a groove for storing excess coating liquid is provided in the mask member.

また、本発明の上記目的は、平面基板にマスク部材を配置し、前記マスク部材の開口から前記平面基板を露呈させた状態で、前記マスク部材の上面側に設けられた塗布部材を、前記上面に対して平行に駆動させ、供給された塗布液を、前記開口から露呈した前記平面基板に塗布して塗布層を形成するブレード塗布方法であって、前記開口に充填されなかった余剰の塗布液を溝部に貯留させることを特徴とするブレード塗布方法によって達成される。   Further, the object of the present invention is to dispose the coating member provided on the upper surface side of the mask member in a state where the mask member is disposed on the planar substrate and the planar substrate is exposed from the opening of the mask member. A blade coating method in which the supplied coating liquid is applied to the flat substrate exposed from the opening to form a coating layer, and the excess coating liquid not filled in the opening It is achieved by a blade coating method characterized by storing the water in the groove.

本発明によれば、塗布を行う際に、開口に充填されずにマスク部材上に残存する余剰の塗布液を溝部に落とし込んで貯留させることができる。こうすれば、塗布部材をマスク部材上で駆動させるときに、余剰の塗布液が溝部に収容されるようになるため、塗布部材に付着して塗布部材の移動に伴い引き延ばされることによって空気が混入してしまうことを防止することができる。従って、平面基板に形成される塗布層の表面に凹凸が生じるなどの欠陥が生じることを防止でき、良好な塗布を行うことができる。   According to the present invention, when coating is performed, it is possible to drop and store excess coating liquid remaining on the mask member without filling the opening. In this way, when the coating member is driven on the mask member, excess coating liquid is accommodated in the groove, so that the air is attached to the coating member and stretched along with the movement of the coating member. It can prevent mixing. Therefore, it is possible to prevent the occurrence of defects such as unevenness on the surface of the coating layer formed on the flat substrate, and good coating can be performed.

上記ブレード塗布装置は、前記溝部が、前記塗布部材を往復駆動させた状態における、該塗布部材の折り返し位置に設けられていることが好ましい。こうすれば、マスク部材の開口に対して塗布部材を往復駆動させて塗布を行う際に、塗布部材の折返し位置において、溝部に塗布液を落とし込むことで貯留させることができる。このため、余剰な塗布液が塗布部材に付着した状態で、該塗布部材の移動に追従して引き延ばされてしまうことを防止でき、塗布液に空気が混入することを防止できる。   In the blade coating device, it is preferable that the groove is provided at a folding position of the coating member in a state where the coating member is driven to reciprocate. If it carries out like this, when apply | coating a reciprocating drive of an application | coating member with respect to opening of a mask member, it can be made to store by dropping an application liquid in a groove part in the return position of an application | coating member. For this reason, it is possible to prevent the excessive coating liquid from being stretched following the movement of the coating member in a state where the coating liquid adheres to the coating member, and to prevent air from being mixed into the coating liquid.

上記ブレード塗布装置は、塗布部材が、溝部の内部に挿入され、かつ、該溝部に貯留した塗布液を掻き出すように駆動されることが好ましい。こうすれば、塗布工程において、余剰の塗布液を溝部に一時的に貯留させて空気の混入等の欠陥の発生を防止することができ、また、溝部に貯留された塗布液を塗布部材によって掻き出して塗布に供することで、塗布液を無駄なく使用することができる。   In the blade coating device, it is preferable that the coating member is inserted into the groove portion and driven so as to scrape the coating liquid stored in the groove portion. In this way, in the coating process, excess coating solution can be temporarily stored in the groove portion to prevent the occurrence of defects such as air mixing, and the coating solution stored in the groove portion is scraped out by the coating member. By applying to the coating, the coating solution can be used without waste.

本発明のブレード塗布装置において、塗布液が、塗布時に前記溝部から供給される構成とすれば、マスク部材上に塗布液を滴下するノズルを設ける必要がない。   In the blade coating apparatus of the present invention, if the coating solution is supplied from the groove during coating, there is no need to provide a nozzle for dropping the coating solution on the mask member.

本発明のブレード塗布方法は、塗布部材をマスク部材上で往復駆動させ、往復駆動の折り返し位置で、溝部に余剰の塗布液を貯留させることが好ましい。こうすれば、塗布部材を往復駆動させる工程で、塗布部材の折返し位置において、溝部に塗布液を落とし込むことで貯留させることができるため、余剰な塗布液が塗布部材に付着した状態で該塗布部材によって引き延ばされて塗布液に空気が混入することを防止できる。   In the blade coating method of the present invention, it is preferable that the coating member is reciprocally driven on the mask member, and excess coating liquid is stored in the groove portion at the turn-back position of the reciprocating drive. In this way, in the step of reciprocating the coating member, the coating member can be stored by dropping the coating solution into the groove at the turn-back position of the coating member, so that the coating member remains attached to the coating member. It is possible to prevent the air from being mixed into the coating liquid by being stretched by the above.

本発明のブレード塗布方法は、塗布部材を溝部の内部に挿入して該溝部に貯留した塗布液を掻き出すことが好ましい。こうすれば、塗付時に、余剰の塗布液を溝部に一時的に貯留させて空気の混入等の欠陥の発生を防止することができ、また、溝部に貯留された塗布液を塗布部材によって掻き出して塗布に供することで、塗布液を無駄なく使用することができる。   In the blade coating method of the present invention, it is preferable to insert the coating member into the groove and scrape out the coating solution stored in the groove. In this way, at the time of application, excess coating liquid can be temporarily stored in the groove portion to prevent the occurrence of defects such as air mixing, and the coating liquid stored in the groove portion is scraped out by the coating member. By applying to the coating, the coating solution can be used without waste.

本発明のブレード塗布方法は、塗布液を溝部から供給することが好ましい。こうすれば、マスク部材上に塗布液を供給する必要がなく、従来のようにマスク部材上に供給された塗布液が塗布部材と接触することで、駆動する塗布部材とマスク部材上で接触して該塗布部材に付着してしまうことがない。   In the blade coating method of the present invention, the coating liquid is preferably supplied from the groove. In this way, it is not necessary to supply the coating liquid onto the mask member, and the coating liquid supplied onto the mask member comes into contact with the coating member as in the prior art, so that the driving coating member contacts with the mask member. Thus, it does not adhere to the application member.

さらに、上記本発明を適用してディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成すれば、印刷面を凹凸などの欠陥がない良好な面にすることができるとともに、印刷面を構成するために使用される塗布液の無駄を省くことができる。   Furthermore, by applying the present invention and applying the coating liquid to a disc-shaped recording medium to form at least one of the printed surfaces, the printed surface can be made a good surface free from irregularities and the like. The waste of the coating solution used for constituting the printing surface can be eliminated.

本発明によれば、塗布液に空気が混入することを防止できるとともに、塗布液を効率良く使用することができるブレード塗布装置及びブレード塗布方法を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, while being able to prevent that air mixes in a coating liquid, the blade coating device and blade coating method which can use a coating liquid efficiently can be provided.

以下、本発明の実施形態を図面に基づいて詳しく説明する。
以下、本発明にかかるブレード塗布装置及びブレード塗布方法の一実施形態を、図面に基づいて説明する。図1は、本実施形態のブレード塗布装置の構成を説明する図である。 図2(a)から(c)は、塗布工程を説明する断面図である。図3(a)から(d)は、塗布工程において、本発明に係る手順を説明する断面図である。図4(a)から(c)は、塗布工程において、本発明に係る別の手順を説明する断面図である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Hereinafter, an embodiment of a blade coating apparatus and a blade coating method according to the present invention will be described with reference to the drawings. FIG. 1 is a diagram illustrating a configuration of a blade coating apparatus according to the present embodiment. FIGS. 2A to 2C are cross-sectional views illustrating the coating process. FIGS. 3A to 3D are cross-sectional views illustrating the procedure according to the present invention in the coating process. 4 (a) to 4 (c) are cross-sectional views illustrating another procedure according to the present invention in the coating process.

ブレード塗布装置10は、被塗布部材である平面基板の表面に塗布液を塗布して塗布層を形成するものであって、本実施形態では平面基板の一例としてディスク状記録媒体(以下、ディスクともいう。)Dを被塗布部材とする。   The blade coating apparatus 10 forms a coating layer by coating a coating liquid on the surface of a planar substrate that is a member to be coated. In this embodiment, a disk-shaped recording medium (hereinafter also referred to as a disk) is used as an example of a planar substrate. And D is a member to be coated.

ブレード塗布装置10は、薄い板状の部材であるマスク部材11を備えており、マスク部材11には、上面視において円形の開口11aが形成されている。   The blade coating device 10 includes a mask member 11 that is a thin plate-like member, and the mask member 11 is formed with a circular opening 11a in a top view.

また、ブレード塗布装置10には、ディスクDを上部の支持台に載せて支持させ、マスク部材11に対して相対移動可能な基板支持部14が備えられている。基板支持部14は、上方に位置するときに、支持したディスクDをマスク部材11の開口11aの下方に押し付けられ、かつ、その状態でディスクDを保持する。こうして、ディスクDにマスク部材11が配置される。   Further, the blade coating device 10 is provided with a substrate support portion 14 that can support the disk D by placing it on an upper support base and can move relative to the mask member 11. When the substrate support unit 14 is positioned above, the supported disk D is pressed below the opening 11a of the mask member 11 and holds the disk D in this state. Thus, the mask member 11 is disposed on the disk D.

本実施形態において、開口11aは直径が120mm程度の円形状に形成される。なお、開口11aの形状は、ディスクD上に形成される塗布層の形状に合わせた形状とすることができ、マスク部材11の開口形状を適宜変更することによって、塗布層の形状は自由に設定できる。   In the present embodiment, the opening 11a is formed in a circular shape having a diameter of about 120 mm. Note that the shape of the opening 11a can be made to match the shape of the coating layer formed on the disk D, and the shape of the coating layer can be freely set by appropriately changing the opening shape of the mask member 11. it can.

また、基板支持部14が下方位置に移動することで、図しないロボットアーム等によって、基板支持部14のディスクDを取り出して搬送系の下流側へ搬出すること、及び、基板支持部14に塗布液を塗布していない別のディスクDを載せることができる。本実施形態では、基板支持部14をマスク部材11に対して相対移動させる構成としたが、マスク部材11を基板支持部14に対して相対移動させる構成としてもよい。   Further, when the substrate support unit 14 is moved to a lower position, the disk D of the substrate support unit 14 is taken out by a robot arm or the like (not shown) and carried to the downstream side of the transport system, and the substrate support unit 14 is coated. Another disk D to which no liquid is applied can be placed. In the present embodiment, the substrate support portion 14 is moved relative to the mask member 11, but the mask member 11 may be moved relative to the substrate support portion 14.

マスク部材11の上面(図1において上方の面)側であって、該上面に対して僅かに離間した位置に、長尺状の塗布部材(ブレード)12が設けられている。塗布部材12は、図1中矢印で示すように、上面の面方向に対して平行に駆動する構成である。具体的に、塗布部材12は、図1で示すx−y平面に対して平行に駆動する構成である。また、後述するように、塗布部材12は、z方向に対しても適宜駆動可能に構成されている。   A long coating member (blade) 12 is provided on the upper surface (upper surface in FIG. 1) side of the mask member 11 at a position slightly separated from the upper surface. The application member 12 is configured to be driven in parallel to the surface direction of the upper surface, as indicated by an arrow in FIG. Specifically, the application member 12 is configured to be driven in parallel to the xy plane shown in FIG. Further, as will be described later, the application member 12 is configured to be appropriately driven in the z direction.

塗布部材51の材質としては、SUS316のクロムの含有量以上のクロムの含有量とすることが好ましく、こうすることで、耐磨耗性、耐腐食性、耐熱性、離型性をより一層向上させることができる。   The material of the coating member 51 is preferably a chromium content that is equal to or greater than the chromium content of SUS316, and this further improves the wear resistance, corrosion resistance, heat resistance, and releasability. Can be made.

次に、ディスクに塗布層を形成する手順を説明する。図2(a)に示すように、マスク部材11に対して離間させた状態の基板支持部14上にディスクDを平置きに載せる。このとき、ディスクDにおける被塗布側面を上面に向けた状態で基板支持部14に配置する。   Next, the procedure for forming the coating layer on the disk will be described. As shown in FIG. 2A, the disk D is placed flat on the substrate support portion 14 in a state of being separated from the mask member 11. At this time, it arrange | positions in the board | substrate support part 14 in the state which turned the to-be-coated side in the disk D to the upper surface.

基板支持部14とマスク部材11とを相対移動させることで、図2(b)に示すように、マスク部材11の開口11aの下方にディスクDを押し付けた状態で保持する。このとき、ディスクDの外周端が開口11aの下部に当接し、開口11aから、ディスクDの上面が上方に露呈した状態となる。開口11aから露呈されたディスクDにおける領域が被塗布領域となる。   By relatively moving the substrate support portion 14 and the mask member 11, the disk D is held in a state of being pressed below the opening 11 a of the mask member 11 as shown in FIG. At this time, the outer peripheral end of the disk D contacts the lower part of the opening 11a, and the upper surface of the disk D is exposed upward from the opening 11a. The area on the disc D exposed from the opening 11a is the application area.

図2(b)に示すように、ディスクDにマスク部材11を配置させた状態で、ディスクDの中心開口に、塗布液の付着を防止するセンタキャップ13が装着される。センタキャップ13は、図示しないセンタキャップ着脱アームの吸引部によって吸引保持され、開口11aの上方からディスクDの中心開口に装着される。   As shown in FIG. 2B, a center cap 13 for preventing the coating liquid from being attached is attached to the center opening of the disk D in a state where the mask member 11 is disposed on the disk D. The center cap 13 is sucked and held by a suction portion of a center cap attaching / detaching arm (not shown), and is attached to the center opening of the disk D from above the opening 11a.

図2(c)に示すように、マスク部材11の上方に僅かな隙間で、かつ、面方向に対して平行(図中矢印で示す方向)に塗布部材12を駆動し、予め供給された塗布液16を、該塗布部材12の側面で掻き延ばす。こうすると、塗布液16がマスク部材11上に薄く延ばされるとともに開口11aに充填され、該開口11aから露呈するディスクDの上面の被塗布領域に塗布される。塗布工程後に乾燥させることで、ディスクDに塗布された塗布液16が硬化し、塗布層が形成される。   As shown in FIG. 2 (c), the coating member 12 is driven in a slight gap above the mask member 11 and parallel to the surface direction (the direction indicated by the arrow in the figure), and the coating supplied in advance. The liquid 16 is spread on the side surface of the application member 12. As a result, the coating liquid 16 is thinly spread on the mask member 11 and filled in the opening 11a, and is applied to the coated area on the upper surface of the disk D exposed from the opening 11a. By drying after the coating process, the coating liquid 16 applied to the disk D is cured and a coating layer is formed.

本実施形態において、塗布部材12の駆動は、マスク部材11の開口11aの上方を直線方向に往復する駆動としたが、これに限定されない。   In the present embodiment, the application member 12 is driven to reciprocate in the linear direction above the opening 11a of the mask member 11, but is not limited thereto.

図1に示すように、マスク部材11には、塗布部材12の駆動方法に対して開口11aを挟んで両側に溝部15がそれぞれ形成されている。溝部15は、マスク部材11における余剰の塗布液を貯留できるようにマスク部材11の上面から下方にくぼんだ形状である。また、溝部15は、塗布部材12の長手方向に対して平行に形成され、塗布部材12の下端部の少なくとも一部を、その内側に挿入可能に構成されている。本実施形態では、各溝部15が、往復駆動する塗布部材12の駆動領域の両端側の折り返し位置に設けられている。   As shown in FIG. 1, the mask member 11 has grooves 15 formed on both sides of the opening 11 a with respect to the driving method of the application member 12. The groove portion 15 has a shape that is recessed downward from the upper surface of the mask member 11 so that an excessive coating liquid in the mask member 11 can be stored. Moreover, the groove part 15 is formed in parallel with the longitudinal direction of the application member 12, and it is comprised so that at least one part of the lower end part of the application member 12 can be inserted in the inner side. In this embodiment, each groove part 15 is provided in the folding | turning position of the both ends side of the drive area | region of the application member 12 to reciprocately drive.

溝部15は、塗布部材12の駆動領域の両端側における折り返し位置の一方に形成されていればよい。また、溝部15は、塗布部材12の駆動領域のいずれかに形成されていればよく、本発明の効果を奏することができる範囲で、その数や形状は適宜変更可能である。   The groove part 15 should just be formed in one of the folding | turning positions in the both ends of the drive area | region of the application member 12. FIG. Moreover, the groove part 15 should just be formed in either of the drive area | regions of the application | coating member 12, and the number and shape can be suitably changed in the range which can show | play the effect of this invention.

本実施形態において、塗布液13は、各溝部15から供給される構成とすることができる。図示しないが、溝部15の内側に連通する供給管を配設し、供給管を塗布液供給部22に接続させ、塗布時に塗布液を供給管によって溝部15へ送出する構成とすることができる。また、ブレード塗布装置10は、塗布液13が図示しない供給ノズルから射出されて、マスク部材11の上面に供給される構成としてもよい。   In the present embodiment, the coating solution 13 can be supplied from each groove 15. Although not shown, a supply pipe that communicates with the inside of the groove 15 may be provided, the supply pipe may be connected to the coating liquid supply section 22, and the coating liquid may be sent to the groove 15 through the supply pipe during coating. The blade coating device 10 may be configured such that the coating liquid 13 is ejected from a supply nozzle (not shown) and supplied to the upper surface of the mask member 11.

ブレード塗布装置10は、塗布部材12の駆動を制御するブレード駆動部23と、ブレード駆動部23を制御可能な制御部21とを備えていてもよい。また、塗布液供給部22を制御部21とを接続し、該制御部によって、塗布部材12の駆動と塗布液16の供給を連動させてもよい。   The blade coating apparatus 10 may include a blade driving unit 23 that controls driving of the coating member 12 and a control unit 21 that can control the blade driving unit 23. Alternatively, the coating liquid supply unit 22 may be connected to the control unit 21, and the driving of the coating member 12 and the supply of the coating liquid 16 may be linked by the control unit.

ブレード塗布装置10は、塗布時において、開口11aに充填されなかった余剰の塗布液16を溝部15に貯留させることができる。   The blade coating device 10 can store the excess coating liquid 16 that has not been filled in the opening 11a in the groove 15 during coating.

次に、図3を参照して、溝部に塗布液を貯留させる手順を説明する。
図3(a)に示すように、塗布液16は、一部が、塗布部材12によってマスク部材11の開口11aに充填されるとともに、残りが、開口11aに充填されず、余剰の塗布液16aとなる。
Next, with reference to FIG. 3, the procedure for storing the coating liquid in the groove will be described.
As shown in FIG. 3A, a part of the coating liquid 16 is filled in the opening 11a of the mask member 11 by the coating member 12, and the remainder is not filled in the opening 11a, so that the excess coating liquid 16a is filled. It becomes.

図3(b)に示すように、塗布部材12によって塗布部材11の上面側へ更に掻き延ばし、塗布部材12を溝部15の上方近傍まで駆動させることで、余剰の塗布液16が溝部15に落とし込まれる。図3(c)に示すように、塗布部材12が溝部15上に位置した状態で、塗布部材12に付着した塗布液16が自重によって溝部15に垂れ落ちる。   As shown in FIG. 3 (b), the coating member 12 is further scraped to the upper surface side of the coating member 11, and the coating member 12 is driven to the vicinity of the upper portion of the groove portion 15, so that the excess coating liquid 16 drops into the groove portion 15. Is included. As shown in FIG. 3C, in a state where the application member 12 is positioned on the groove portion 15, the coating liquid 16 attached to the application member 12 hangs down on the groove portion 15 due to its own weight.

図3(d)に示すように、溝部15の上方を駆動して通過すると、余剰の塗布液16が溝部15に貯留し、塗布部材12に引き延ばされることなく分離される。   As shown in FIG. 3 (d), when the upper portion of the groove portion 15 is driven and passed, the excess coating liquid 16 is stored in the groove portion 15 and separated without being stretched by the application member 12.

溝部15の寸法としては、溝の幅Wを10mmから50mmの範囲とすることができ、溝の深さdを5mmから25mmの範囲とすることができる。   As the dimensions of the groove portion 15, the width W of the groove can be in the range of 10 mm to 50 mm, and the depth d of the groove can be in the range of 5 mm to 25 mm.

本実施形態のブレード塗布装置10において、溝部15の内部に貯留した余剰の塗布液16aが、その後の塗布工程で使用する塗布液として供される構成とすることができる。 なお、溝部15の内部に貯留した余剰の塗布液16aが、図示しない回収管などでマスク部材11から排出されてもよく、また、環流管を介して塗布液供給部に送られてもよい。   In the blade coating apparatus 10 of the present embodiment, the excess coating liquid 16a stored in the groove portion 15 can be used as a coating liquid used in the subsequent coating process. In addition, the excess coating liquid 16a stored inside the groove part 15 may be discharged | emitted from the mask member 11 with the collection pipe | tube etc. which are not shown in figure, and may be sent to a coating liquid supply part via a reflux pipe.

次に、図4を参照して、溝部に貯留した塗布液を掻き出す手順を説明する。
図4(a)に示すように、塗布部材12の下端部を溝部15の内側に挿し込ませ、貯留した塗布液16bに当接させる(図4(b))。その後、塗布部材12を上方に駆動させるとともに、マスク部材11の上面に対して平行に駆動させることで、溝部15の内側に貯留した塗布液16bがマスク部材11の上面に掻き出される。このとき、塗布部材12は、図1で示すx−y平面に対して平行な駆動とともに、溝部15の形状に基づいてz方向に駆動する。塗布部材12の駆動の軌跡は、xyzの座標で表される3次元位置情報を含むプログラムで規定され、予め制御部21に記憶させておくことができる。
Next, with reference to FIG. 4, the procedure for scraping off the coating solution stored in the groove will be described.
As shown in FIG. 4A, the lower end portion of the application member 12 is inserted inside the groove portion 15 and brought into contact with the stored application liquid 16b (FIG. 4B). Thereafter, the coating member 12 is driven upward and is driven parallel to the upper surface of the mask member 11, whereby the coating liquid 16 b stored inside the groove portion 15 is scraped to the upper surface of the mask member 11. At this time, the application member 12 is driven in the z direction based on the shape of the groove 15 along with the drive parallel to the xy plane shown in FIG. The driving locus of the application member 12 is defined by a program including three-dimensional position information represented by xyz coordinates, and can be stored in the control unit 21 in advance.

塗布部材12をマスク部材11の上面に対して平行に駆動させることで、掻き出された塗布液16bが、該塗布部材12の側面に押されて開口11a側に掻き延ばされる。塗布部材12を更に駆動させることで、塗布液16bが開口11aに充填され、ディスクDの被塗布領域に塗布される。   By driving the coating member 12 in parallel with the upper surface of the mask member 11, the scraped coating liquid 16b is pushed by the side surface of the coating member 12 and is spread to the opening 11a side. By further driving the application member 12, the application liquid 16 b is filled in the opening 11 a and applied to the application area of the disk D.

本発明によれば、塗布を行う際に、開口11aに充填されずにマスク部材11上に残存した余剰の塗布液16を溝部15に落とし込んで貯留させることができる。こうすれば、塗布部材12をマスク部材11上で駆動させるときに、余剰の塗布液16aが溝部15に収容されるようになるため、塗布部材12に付着し、該塗布部材12の移動に伴い引き延ばされることによって空気が混入してしまうことを防止することができる。従って、空気が混入していない余剰の塗布液16をその後の塗布に使用するため、ディスクDに形成される塗布層の表面に凹凸が生じるなどの欠陥が生じることを防止でき、良好な塗布を行うことができる。   According to the present invention, when coating is performed, the excess coating liquid 16 that remains on the mask member 11 without being filled in the opening 11a can be dropped into the groove 15 and stored. In this way, when the coating member 12 is driven on the mask member 11, the excess coating liquid 16 a is accommodated in the groove portion 15, so that it adheres to the coating member 12 and moves along with the movement of the coating member 12. It is possible to prevent air from being mixed in by being stretched. Therefore, since the surplus coating liquid 16 in which air is not mixed is used for the subsequent coating, it is possible to prevent the occurrence of defects such as irregularities on the surface of the coating layer formed on the disk D, and good coating can be performed. It can be carried out.

本実施形態のように、溝部15が、塗布部材12を往復駆動させた状態における、該塗布部材12の折り返し位置に設けられている構成とすれば、マスク部材11の開口11aに対して塗布部材12を往復駆動させて塗布を行う際に、塗布部材12の折返し位置において、溝部15に塗布液16を落とし込むことで貯留させることができる。このため、余剰な塗布液16aが塗布部材12に付着した状態で、該塗布部材12の移動に追従して引き延ばされてしまうことを防止でき、塗布液に空気が混入してしまうことを防止できる。   If the groove portion 15 is provided at the folding position of the coating member 12 in a state in which the coating member 12 is driven to reciprocate as in the present embodiment, the coating member with respect to the opening 11a of the mask member 11 is used. When coating is performed by reciprocally driving 12, the coating liquid 16 can be stored by dropping into the groove 15 at the turn-back position of the coating member 12. For this reason, it is possible to prevent the excess coating liquid 16a from being stretched following the movement of the coating member 12 in a state where the coating liquid 16a adheres to the coating member 12, and air can be mixed into the coating liquid. Can be prevented.

また、上記実施形態のように、塗布部材12が、溝部15の内部に挿入され、かつ、該溝部15に貯留した塗布液16bを掻き出すように駆動されることが好ましい。こうすれば、塗布工程において、余剰の塗布液16aを溝部15に一時的に貯留させて空気の混入等の欠陥の発生を防止することができ(図3参照)、また、溝部15に貯留された塗布液16bを塗布部材12によって掻き出して塗布に供することで(図4参照)、塗布液16を無駄なく使用することができる。   Further, as in the above-described embodiment, it is preferable that the application member 12 is inserted into the groove portion 15 and driven so as to scrape the application liquid 16b stored in the groove portion 15. In this way, in the coating process, it is possible to temporarily store the excess coating liquid 16a in the groove 15 to prevent the occurrence of defects such as air mixing (see FIG. 3). The coating solution 16b is scraped by the coating member 12 and used for coating (see FIG. 4), so that the coating solution 16 can be used without waste.

上記本発明を適用してディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成すれば、凹凸などの欠陥がない良好な面状態となるように塗布を行うことができ、印刷面を構成するために使用される塗布液の無駄を省くことができる。   By applying the present invention to the disk-shaped recording medium and applying the coating liquid to form at least one layer of the printed surface, the coating can be performed so that a good surface state without defects such as irregularities can be obtained. The waste of the coating solution used for constituting the printing surface can be eliminated.

ブレード塗布装置の構成を説明する図である。It is a figure explaining the structure of a blade coating device. 塗布工程を説明する断面図である。It is sectional drawing explaining an application | coating process. 塗布工程において、本発明に係る手順を説明する断面図である。It is sectional drawing explaining the procedure which concerns on this invention in an application | coating process. 塗布工程において、本発明に係る別の手順を説明する断面図である。It is sectional drawing explaining another procedure which concerns on this invention in an application | coating process. 従来のブレード塗布装置を示す図である。It is a figure which shows the conventional blade coating device. 従来の塗布方式における塗布工程を示す断面図である。It is sectional drawing which shows the application | coating process in the conventional application | coating system.

符号の説明Explanation of symbols

10 塗布装置
11 マスク部材
12 塗布部材
15 溝部
16 塗布液
D ディスク(平面基板)
DESCRIPTION OF SYMBOLS 10 Coating apparatus 11 Mask member 12 Coating member 15 Groove part 16 Coating liquid D Disk (planar substrate)

Claims (10)

平面基板に塗布液を塗布して塗布層を形成するブレード塗布装置であって、
前記平面基板に配置させた状態で、該平面基板の上面を露呈させる開口が形成されたマスク部材と、
前記マスク部材の上面側に配置され、前記上面に対して平行に駆動されることで、供給された前記塗布液を、前記開口から露呈した前記平面基板に塗布する長尺状の塗布部材とを備え、
前記マスク部材に余剰の塗布液を貯留する溝部が設けられていることを特徴とするブレード塗布装置。
A blade coating apparatus for forming a coating layer by coating a coating solution on a flat substrate,
A mask member in which an opening for exposing the upper surface of the planar substrate is formed in a state of being disposed on the planar substrate;
An elongated coating member that is disposed on the upper surface side of the mask member and is driven in parallel with the upper surface to apply the supplied coating liquid to the planar substrate exposed from the opening; Prepared,
A blade coating apparatus, wherein the mask member is provided with a groove for storing an excess coating liquid.
前記溝部が、前記塗布部材を往復駆動させた状態における、該塗布部材の折り返し位置に設けられていることを特徴とする請求項1に記載のブレード塗布装置。   2. The blade coating apparatus according to claim 1, wherein the groove is provided at a folding position of the coating member in a state in which the coating member is driven to reciprocate. 前記塗布部材が、前記溝部の内部に挿入され、かつ、該溝部に貯留した前記塗布液を掻き出すように駆動されることを特徴とする請求項1又は2に記載のブレード塗布装置。   3. The blade coating apparatus according to claim 1, wherein the coating member is inserted into the groove and is driven to scrape the coating liquid stored in the groove. 4. 前記塗布液が、塗布時に前記溝部から供給されることを特徴とする請求項1から3のいずれか1つに記載のブレード塗布装置。   The blade coating apparatus according to any one of claims 1 to 3, wherein the coating liquid is supplied from the groove during coating. ディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成する請求項1から4のいずれか1つに記載のブレード塗布装置。   The blade coating apparatus according to any one of claims 1 to 4, wherein the coating liquid is applied to a disk-shaped recording medium to form at least one layer of a printing surface. 平面基板にマスク部材を配置し、前記マスク部材の開口から前記平面基板を露呈させた状態で、前記マスク部材の上面側に設けられた塗布部材を、前記上面に対して平行に駆動させ、供給された塗布液を、前記開口から露呈した前記平面基板に塗布して塗布層を形成するブレード塗布方法であって、
前記開口に充填されなかった余剰の塗布液を溝部に貯留させることを特徴とするブレード塗布方法。
A mask member is arranged on the flat substrate, and the coating member provided on the upper surface side of the mask member is driven in parallel with the upper surface in a state where the flat substrate is exposed from the opening of the mask member, and then supplied. A blade coating method for forming a coating layer by coating the applied coating liquid on the flat substrate exposed from the opening,
A blade coating method, wherein an excess coating liquid not filled in the opening is stored in a groove.
前記塗布部材を前記マスク部材上で往復駆動させ、往復駆動の折り返し位置で、前記溝部に前記余剰の塗布液を貯留させることを特徴とする請求項6に記載のブレード塗布方法。   The blade coating method according to claim 6, wherein the coating member is reciprocated on the mask member, and the surplus coating liquid is stored in the groove at a turn-back position of the reciprocating drive. 前記塗布部材を前記溝部の内部に挿入して該溝部に貯留した前記塗布液を掻き出すことを特徴とする請求項6又は7に記載のブレード塗布方法。   The blade coating method according to claim 6 or 7, wherein the coating member is inserted into the groove and the coating liquid stored in the groove is scraped out. 前記塗布液を前記溝部から供給することを特徴とする請求項6から8のいずれか1つに記載のブレード塗布方法。   The blade coating method according to any one of claims 6 to 8, wherein the coating liquid is supplied from the groove. ディスク状記録媒体に前記塗布液を塗布して印刷面のうち少なくとも一層を形成する請求項6から9のいずれか1つに記載のブレード塗布方法。   The blade coating method according to any one of claims 6 to 9, wherein the coating liquid is applied to a disk-shaped recording medium to form at least one layer of a printing surface.
JP2005044177A 2005-02-21 2005-02-21 Blade application apparatus and blade application method Pending JP2006224061A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015020085A (en) * 2013-07-16 2015-02-02 キヤノン株式会社 Paste coating device and paste coating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015020085A (en) * 2013-07-16 2015-02-02 キヤノン株式会社 Paste coating device and paste coating method

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