JP2006228382A - Conveying device of substrate with coated film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form a coated liquid layer having satisfactory properties of a surface on which there is no liquid dripping and there is no occurrence of stripes and having uniform thickness by conveying a flat substrate while preventing liquid dripping of coated liquid coated on the flat substrate. <P>SOLUTION: The conveying device of a substrate with a coated film of the present invention transfers a flat substrate D from a coating applicator to a drying means while maintaining its horizontal state by restraining the under surface of the outer peripheral part of the substrate D, and by conveying the substrate D while holding it in the horizontal state, and by placing it on the tray 81 arranged in the drying means with a holding mechanism 105. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a transport device for a substrate with a coating film, and more particularly to a transport device for a substrate with a coating film in which a coating liquid supplied from a coating liquid supply unit is coated on a flat substrate in a thick film shape.

  Various proposals have heretofore been made in order to stably apply a liquid paint to an application surface of a member to be applied. For example, in the substrate coating apparatus disclosed in Patent Document 1 below, the substrate is sandwiched between a microrod bar whose lower part is immersed in a coating solution tank and a nip roller disposed opposite to the microrod bar. Thus, a coating liquid is applied to the lower surface of the substrate, and a push-up member that supports the front edge of the substrate from below and restricts the deflection of the front edge of the substrate is provided on the substrate entrance side of the microrod bar. As a result, the coating thickness in the vicinity of the center of the front edge of the substrate is prevented from becoming thicker than both sides, and coating is performed with a uniform coating thickness. In addition, the vicinity of the center of the rear edge of the substrate is prevented from coming into contact with the cough on the outlet side of the coating solution tank, and coating is performed with a uniform coating thickness.

  Moreover, in the roll coater disclosed by patent document 2, the conveyance base and coating roll which convey the thin plate which should be apply | coated are provided, and a liquid agent is made to the surface of a thin plate by moving and passing a conveyance base below an application roll. With respect to the line that passes through the center of the thin plate in the moving direction of the carrier at the middle of the gap in the plane direction The elastic material is arranged symmetrically and the peripheral portion of the gripping plate is regulated by the gap regulating means so that the gap can be adjusted. As a result, when the gripping plate presses and passes the coating roll, the reaction force (elastic force) of the elastic material is controlled so as to relax within the range of the gap and relieve the impact at the time of contact intrusion. The accompanying coating unevenness is prevented.

Japanese Patent Laid-Open No. 9-10646 JP-A-10-128221

  A printable coating liquid layer (ink receiving layer) having a relatively thick film thickness of about 100 μm formed on a flat substrate such as an optical disk is coated with a coating liquid on the optical disk with a blade in a coating apparatus. The optical disk on which the layer is formed is transported to a drying process and dried by a drying apparatus.

  Since the coating liquid layer applied on the optical disk before drying is liquid and has a relatively thick film thickness, when the optical disk is tilted before drying, the applied coating liquid flows downward. The sagging of the coating liquid occurs, making it difficult to form an ink receiving layer with a uniform film thickness. This has a problem that the image quality is adversely affected in the subsequent printing process, and good printing cannot be performed, resulting in a reduction in product value.

  In the conventional substrate coating apparatus shown in Patent Document 1 and Patent Document 2, the substrate is nipped and the coating liquid is applied from the lower side with a microrod bar, or the coating liquid is applied to the object to be coated with a coating roll. However, when the thickness of the liquid film is increased, streaks substantially parallel to the coating direction are often generated, and it is difficult to ensure a good coating surface. In addition, the substrate coating apparatus disclosed in these patent documents is intended to apply a coating liquid to an optical disc or the like with a uniform thickness. Is not considered.

  FIG. 8 shows a general disk transfer mechanism. This disk transfer mechanism 1 is locked using the central hole 2 of the disk D. The disk transfer mechanism 1 has a chuck part 4 at the tip of the arm 3 and opens the chuck claw so that the inner peripheral part of the disk D is opened. Locked. As a procedure for locking the disk D by the chuck portion 4, as shown in FIG. 9A, first, the closed chuck portion 4 is inserted into the center hole 2 of the disk D. Next, as shown in FIG. 9B, the chuck mechanism 4 is opened, and a part of the outer peripheral portion of the chuck claws 4 a and 4 b is brought into contact with the inner peripheral surface of the central hole 2 of the disk D. As a result, as shown in FIG. 9C, the disk D is supported by the chuck portion 4, and the disk D can be transferred by driving the arm 3 and pulling up the chuck portion 4.

  In the disk transfer mechanism having the above structure, it is difficult to move the disk D while maintaining the horizontal state, and even if a slight gap is formed between the disk D and the disk D during chucking, May tilt significantly from horizontal.

  The present invention has been made in view of the above situation, and provides a substrate transfer device that can transfer a flat substrate coated with a coating liquid from a coating apparatus to a drying apparatus while maintaining a horizontal state, It is an object of the present invention to enable formation of a coating liquid layer having a good surface property without causing dripping or streaking on the coating surface.

The above object of the present invention can be achieved by the following configuration.
(1) A coating liquid supplied from a coating liquid supply unit of a coating apparatus is applied on a flat substrate to form a coating film on the flat substrate, and then the flat substrate is placed on a tray and the coating film is dried. A substrate transfer device having a coating film to be transferred to a drying device, wherein the planar substrate is taken out of the coating device while keeping the flat substrate in a horizontal state with an angle with respect to a horizontal plane of ± 5 ° or less. An apparatus for transporting a substrate with a coating film, comprising: transfer means for transferring to a disposed tray. .

  In the transport apparatus for a substrate with a coating film configured as described above, the flat substrate on which the coating liquid is formed by applying the coating liquid is applied in a state where the angle with respect to the horizontal plane is maintained in a horizontal state of ± 5 ° or less. It is placed on a tray from the apparatus and conveyed to a drying apparatus. As a result, the occurrence of dripping of the coating film is prevented and the film is dried, so that an ink receiving layer having a uniform film thickness can be formed, thereby enabling good printing on the flat substrate.

  (2) The tray has an opening to lock the lower surface of the outer peripheral portion of the flat substrate, and the transfer means locks the lower surface of the outer peripheral portion of the flat substrate on which the coating film is formed. And a holding mechanism for holding the flat substrate in a horizontal state and transporting it from the coating device to the drying device, and being able to protrude and retract from the opening of the tray and disposed below the tray, and upward from the opening. A lifter configured to receive the flat substrate held by the holding mechanism during the protruding upward from the holding mechanism, and to place the flat substrate on the tray during the downward pulling from the opening. The transport apparatus for a substrate with a coating film according to the above (1).

  In the transport apparatus for a substrate with a coating film configured in this way, the lower surface of the outer peripheral portion of the flat substrate is transported while being held in a horizontal state by a holding mechanism, and the lower surface of the outer peripheral portion of the flat substrate is disposed in the drying device. By placing the flat substrate on the tray provided, the flat substrate can be transferred from the coating device to the drying device, and the flat substrate can be transferred while maintaining the horizontal state with a simple mechanism. Thereby, the film thickness of the coating film can be made uniform.

  According to the apparatus for transporting a substrate with a coating film of the present invention, the planar substrate is transported from the coating apparatus to the drying apparatus tray and dried while being maintained in a horizontal state of an angle of ± 5 ° or less with respect to the horizontal plane. It is possible to form an ink receiving layer having a good surface property without causing dripping of the coating film or streaks on the coating surface and having a uniform film thickness.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of a transport apparatus for a substrate with a coating film according to the invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view showing a schematic appearance of a transfer apparatus provided with a coating film transfer apparatus according to the present invention, and FIG. 2 is a schematic configuration diagram of the coating apparatus shown in FIG.

  As shown in FIG. 1, the transport device 30 is configured to transfer a coating station PS, a drying station DS, and an optical disk D, which is a flat substrate disposed between the coating station PS and the drying station DS, from the coating station PS to the drying station. And a transfer device 100 that transfers to a conveyor (not shown) that is transported toward the DS.

  The coating station PS includes a disk coating device 10 that is an example of a coating device, and is used for coating a liquid film using a disk-shaped recording medium that is an example of a planar substrate, for example, an optical disk D as a member to be coated. The drying station DS is for drying the coating film coated on the optical disk D by the disk coating apparatus 10, and transports the tray 81 on which the optical disk D transported from the coating station PS is horizontally placed and the tray 81. It has a conveyor.

First, the configuration of the disc coating apparatus 10 will be described.
As shown in FIG. 2, the applicator 11 of the disc applicator 10 is provided with a circular suction table 13 on which the optical disc D can be sucked and placed. A plurality of suction holes 15 are opened on the upper surface of the suction table 13, and a vacuum pump 19 is connected to each suction hole 15 via a suction path 17. The suction table 13 can hold the optical disk D on the upper surface through the suction holes 15 by operating the vacuum pump 19.

  Further, the suction table 13 is supported by the lifting shaft 21 so that the center of the lower surface is movable in the vertical direction. The vertical movement of the elevating shaft 21 is performed by driving an air cylinder 23 which is an example of a mask peeling means.

  A mask plate (mask) 25 is provided above the suction table 13, and the mask plate 25 has an opening 27 for exposing the application surface 57 of the optical disk D. The optical disk D placed on the suction table 13 is covered with the opening peripheral edge 25 a of the mask plate 25 when the elevating shaft 21 is raised by driving the air cylinder 23 and reaches the upper limit position.

  The coating unit 11 is provided with a mask cap attaching / detaching means 29 above the center of the optical disc D. The mask cap attaching / detaching means 29 includes a cap suction nozzle 31, a vacuum pump 33, and an elevating means 35. The mask cap attaching / detaching means 29 sucks and holds the mask cap 37 at the lower end of the cap suction nozzle 31 by driving the vacuum pump 33. When the elevating means 35 is driven in this state, the cap suction nozzle 31 is lowered, and the mask cap 37 is inserted into the hole in the center of the optical disc D. The mask cap (center cap) is not limited to this, and may be detached by other mechanical means. For example, there is a method in which the mask cap 37 is pushed up from below and lifted from the mask plate 25, and the mask cap 37 is scooped from the side.

A coating liquid supply means 41 is provided above the mask plate 25 outside the opening 27. The coating liquid supply means 41 includes a coating liquid supply nozzle 43, a coating liquid supply device 45, and a nozzle lifting / lowering device 47. The coating solution supply means 41 supplies the coating solution 49 supplied from the coating solution supply device 45 dropwise onto the mask plate 25 from the coating solution supply nozzle 43. At this time, the coating liquid supply nozzle 43 is moved to the height near the mask plate 25 by the nozzle lifting / lowering device 47 only when the coating liquid 49 is dropped and supplied, and normally rises to a position where it does not interfere with the coating process and is in a standby state. It is said.
Here, as the coating liquid 49, for example, one having a liquid viscosity of 150 cP to 800 cP can be used, and in particular, the coating liquid 49 of 200 cP to 600 cP is preferably used. In addition, the liquid viscosity of said coating liquid is a value at the time of measuring with a B-type viscosity meter (bismetron) at 25 degreeC.

  A blade 51 is arranged in a standby state further outside the coating liquid 49 supplied onto the mask plate 25 by the coating liquid supply means 41. The blade 51 is horizontally driven by the moving means 53 while maintaining a predetermined gap on the mask plate 25, and the coating surface 57 of the optical disk D exposed by the opening 27 of the mask plate 25 while pushing the coating liquid 49 on the front side surface 55. It moves so that the coating liquid 49 may be apply | coated.

  The blade 51 is made of a metal material such as a stainless steel material that is elongated in the direction perpendicular to the paper surface of FIG. 2, and the cross-sectional shape perpendicular to the longitudinal direction of the blade 51 is formed in a substantially trapezoidal shape. In addition, a gap (gap) G is formed between the lower surface of the blade 51 and the mask plate 25, and the coating liquid 49 is pressed as the flow is guided by the front side surface 55 of the blade 51. Pushed into G. Then, the coating liquid 49 is filled in the opening 27 of the mask plate 25 by passing through the lower surface (pressing surface 59) of the blade 51 facing the coating surface 57. As a result, the coating liquid 49 is applied to the coating surface 57 flatly.

  The operations of the vacuum pump 19, the air cylinder 23, the vacuum pump 33, the lifting / lowering means 35, the coating liquid supply device 45, the nozzle lifting / lowering device 47, and the moving means 53 are controlled by the control unit 63.

  Further, the opening 27 of the mask plate 25 has an opening exceeding at least 50 mm continuous along the longitudinal direction of the blade 51, so that the effect of uniform coating by the blade coating becomes remarkable. In the present embodiment, the opening 27 is formed in a circular shape having a diameter of about 120 mm.

  In the disk coating apparatus 10 according to the present embodiment, the coating liquid layer is coated at a thickness of at least 100 μm at the time of coating. In the case of such a coating having a thickness of 100 μm or more, the surface property of the coating liquid layer is less likely to follow the surface of the coating surface 57 than in the case of thin film coating, and the shape of the blade 51 has a great influence. Will be affected. That is, the surface of the coating liquid layer is determined by the pressure of the coating liquid 49 by the blade 51, the wettability of the coating liquid 49 by the shape of the blade 51, and the like. In addition, it is preferable to suppress the film thickness of a coating liquid layer to 1000 micrometers or less in order to adjust surface property.

  When this disc coating apparatus 10 is used as a disc coating apparatus for forming at least one recording layer of a disc-shaped recording medium (optical disc), for example, a printing layer (ink receiving layer) for performing printing using an inkjet printer. Can be formed. According to this disk coating apparatus, it is possible to form a printing layer having a necessary and sufficient thickness so that good color reproducibility can be ensured when printing on the printing layer. Actually, when the coating liquid layer has a thickness of about 150 μm at the time of coating, a coating film of about 30 μm is formed when the coating is reduced after drying, and the ink receiving layer of about 30 μm enables good color reproducibility. .

  As shown in FIG. 1, the drying station DS includes a tray 81 on which the optical disk D transported from the coating station PS by the transfer device 100 is placed. The tray 81 is in a horizontal state where the angle with respect to the horizontal plane is ± 5 ° or less, more preferably ± 2 ° or less, and an opening 83 having a diameter slightly smaller than the outer diameter of the optical disc D is formed. When the optical disk D is placed on the tray 81, the lower surface of the outer periphery of the optical disk D is locked to hold the optical disk D in a horizontal state. A lifter 90 is disposed below the tray 81. The lifter 90 includes a mounting table 85 whose bottom center is supported by an elevating shaft 89 so as to be movable in the vertical direction, and an air cylinder 87 that moves the elevating shaft 89 up and down.

  The outer diameter of the mounting table 85 is set smaller than the inner diameter of the opening 83 of the tray 81, and the mounting table 85 can be moved up and down from the opening 83 by driving the air cylinder 87. That is, when the mounting table 85 reaches the upper limit position, the mounting table 85 is positioned above the opening 83 of the tray 81, and when the mounting table 85 reaches the lower limit position, the mounting table 85 is positioned below the tray 81. Further, the tray 81 on which the optical disk D is placed is transported to a drying device (not shown) by a conveyor device or the like while being maintained in a horizontal state, and the coating film applied to the optical disk D is dried. The operation of the air cylinder 87 is controlled by the control unit 63.

  As shown in FIG. 1, the transfer device 100 includes a holding mechanism 105 having a pair of gripping arms 101 and 103. The respective base portions 101a and 103a of the pair of gripping arms 101 and 103 are rotatably fitted to the support shaft 95, respectively. Further, the gripping portions 101b and 103b, which are the tips of the pair of gripping arms 101 and 103, form a substantially U-shaped bifurcated holding portion when the pair of gripping arms 101 and 103 are closed. The grip portions 101b and 103b have large diameter portions 101c and 103c having the same radius as the outer diameter of the optical disc D in the upper half, and small diameter portions 101d concentric with the large diameter portions 101c and 103c in the lower half. 103d. The large diameter portions 101c and 103c are in contact with a part of the outer peripheral portion of the optical disc D, and the outer peripheral portion of the optical disc D is formed by the step portions 101e and 103e formed by the small diameter portions 101d and 103d and the large diameter portions 101c and 103c. The lower surface is locked.

  An opening / closing drive unit 107 fixed to the support shaft 95 is connected to the bases 101a and 103a of the gripping arms 101 and 103, and the pair of gripping arms 101 and 103 are respectively connected in the directions of arrows E and G, or The pair of gripping arms 101 and 103 are opened or closed by rotating in the directions of arrows F and H. The support shaft 95 is connected to the rotation drive unit 93, and the rotation drive unit 93 is driven to swing the support shaft 95, that is, the opening / closing drive unit 107. The entire pair of gripping arms 101 and 103 (holding mechanism 105) is swung in the direction of arrow K or L. When the holding mechanism 105 is rotated in the arrow K direction, the pair of gripping arms 101 and 103 are positioned above the tray 81 and directly above the mounting table 85, and when the holding mechanism 105 is rotated in the arrow L direction, the pair of gripping arms 101 is positioned. , 103 are positioned at an intermediate position between the mask plate 25 and the lowered suction stand 13 and directly above the suction stand 13. The operation of the opening / closing drive unit 107 and the rotation drive unit 93 is controlled by the control unit 63.

The operation of the transport device 30 configured as described above will be described in detail below.
3 (a) to 3 (d) and FIGS. 4 (e) to (h) are schematic explanatory views showing respective steps in which a coating film is formed on an optical disk and conveyed to a drying apparatus, and FIGS. 5 (a) to (c). ) Is a perspective view showing each step of applying the coating liquid onto the optical disc by the disc coating apparatus, and FIG. 6 is a plan view of the optical disc completed by drying the coating film applied on the surface to form an ink receiving layer. .

  First, the application of the coating liquid 49 to the optical disk D by the disk coating apparatus 10 will be described. As shown in FIGS. 1 and 2, when the suction stand 13 is at the lower limit position, the opening / closing drive unit 107 is driven to rotate the pair of gripping arms 101 and 103 in the directions of arrows E and G, and to rotate them. The drive unit 93 is driven to rotate the pair of gripping arms 101 and 103 in the direction of the arrow L, so that the pair of open gripping arms 101 and 103 are positioned below the mask plate 25 and above the suction table 13. Let Next, as shown in FIG. 3A and FIG. 5A, after the optical disk D is placed on the suction table 13 and sucked and fixed, the air cylinder 23 is operated to raise the optical disk D, thereby The mask plate 25 is overlaid on the optical disc D. At this time, since the pair of gripping arms 101 and 103 are open, the rise of the optical disc D is not hindered.

  Then, as shown in FIG. 5B, while supplying the coating liquid 49 onto the mask plate 25, the blade 51 is relatively moved above the mask plate 25 in the direction of the arrow X, whereby the coating liquid 49 is removed from the mask plate 25. It is applied to the application surface 57 of the optical disk D exposed from the opening 27 of the optical disk D. Next, as shown in FIGS. 3B and 5C, the air cylinder 23 is operated to lower the suction table 13 (in the direction of arrow B), thereby separating the optical disk D from the mask plate 25.

  When the optical disk D is lowered to the same height as the pair of gripping arms 101 and 103, the lowering operation of the air cylinder 23 is temporarily stopped, and the opening / closing drive unit 107 is driven to move the pair of gripping arms 101 and 103 in the directions of arrows F and H, respectively. The optical disk D is surrounded by the large-diameter portions 101c and 103c, and the lower surface of the outer peripheral portion of the optical disk D is locked to the step portions 101e and 103e to hold the optical disk D in a horizontal state (see FIG. 3 (c)). And as shown in FIG.3 (d), the air cylinder 23 is act | operated again and the adsorption stand 13 is further lowered | hung (arrow B direction).

  Here, as shown in FIG. 1, the rotation driving unit 93 is driven in the direction opposite to the above-described direction to rotate the pair of gripping arms 101 and 103 (holding mechanism 105) in the arrow K direction, thereby holding the holding mechanism. The optical disk D held in a horizontal state by 105 is transported and positioned above the tray 81 (FIG. 4E). At this time, the holding mechanism 105 rotates and conveys the optical disc D in the direction of the arrow K while maintaining the horizontal state at an angle of ± 5 ° or less, more preferably ± 2 ° or less with respect to the horizontal plane. Further, no dripping of the undried coating liquid 49 occurs.

  Then, the air cylinder 87 is driven to raise the mounting table 85 (in the direction of arrow I), and protrude upward from the opening 83 of the tray 81 to bring the mounting table 85 into contact with the lower surface of the optical disc D (FIG. 4 (f )).

  Here, the opening / closing drive unit 107 is driven to rotate and open the pair of gripping arms 101 and 103 in the directions of arrows E and G, respectively, and the optical disk D is transferred from the holding mechanism 105 to the mounting table 85 (FIG. 4G). )). Subsequently, when the air cylinder 87 is driven to move the mounting table 85 in the direction of arrow J and descend below the tray 81, the optical disk D that is horizontally locked on the mounting table 85 is moved to the mounting table 85. In the middle of the lowering, it is transferred onto the tray 81 (FIG. 4 (h)). The optical disk D placed on the tray 81 in this way is transported to a drying device and dried together with the tray 81 while maintaining a horizontal state by a conveyor device (not shown).

All the steps described above are performed while the optical disc D is maintained in a horizontal state at an angle of ± 5 ° or less, preferably ± 2 ° or less with respect to the horizontal plane, so that the coating liquid 49 in an undried state is tilted downward. The ink receiving layer 79 having a uniform film thickness is formed without flowing or dripping.
Here, it has been experimentally clarified that when the optical disc D is inclined at an angle exceeding ± 5 ° from the horizontal plane, the surface properties of the coating liquid are disturbed and the film thickness is nonuniform.

  Further, the optical disc D is maintained in a horizontal state, for example, for about 2 minutes before drying, so that streaks that are substantially parallel to the coating direction generated during blade coating are eliminated by the leveling effect. In addition, an ink receiving layer having a uniform film thickness can be formed. Further, if the optical disk D is dried while being cooled in the drying apparatus, the viscosity of the coating liquid 49 rapidly increases due to cooling, so that the effect of preventing liquid dripping that occurs before drying is great.

  In this way, as shown in FIG. 6, the non-coating portion 71 to which the coating liquid 49 is not applied is formed on the outer peripheral edge of the optical disc D because it is covered with the mask plate 25. The optical disk D having the ink receiving layer 79 in which the non-coating portion 69 is formed due to the mask cap 37 being inserted is manufactured. In addition, the shape of the application part can be freely changed by appropriately changing the opening shape of the mask plate 25.

In addition, the conveyance apparatus of the board | substrate with a coating film which concerns on this invention is not limited to each embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably. For example, in the present embodiment, the coating film is formed for the optical disk, but the object is not limited to this, and can be applied to various objects as long as it forms a thick film. Play.
In the above description, the holding mechanism 105 has been described as having a pair of gripping arms 101 and 103 that can be freely opened and closed, but the tip is linearly moved from the side of the optical disc using a fixed bifurcated arm. The lower surface of the optical disk may be locked and held.

Next, an example of a transfer device for a substrate with a coating film will be described.
Here, the angle of the optical disk D with respect to the horizontal plane is defined as shown in FIGS. 7 (a), (b), and (c). That is, the L and K directions in FIG. 1 are the θ direction, and the radial direction of the disk D is the r direction. In the r direction, the tilt angle where the outside of the circular arc trajectory becomes higher is positive (plus), and in the θ direction, the tilt angle where the front side of the disk D in the traveling direction becomes higher is positive (plus).

In Examples 1 to 3, the transport speed in the θ direction is 100 mm / sec, the angle (tilt angle r) between the disk surface and the horizontal plane with respect to the radial direction perpendicular to the θ direction of the disk D, and the transport direction of the disk D In this case, the angle (tilt angle θ) formed by the disk surface and the horizontal surface with respect to the angle is set in the range of 0 ° to 5 °. At this time, all of them could be transported satisfactorily without dripping.
In Comparative Examples 1 and 2, the conveyance speed in the θ direction was set to 100 mm / sec, and the tilt angle r and the tilt angle θ exceeded the range of ± 5 °.

In Examples 4 and 5, the conveyance speed in the θ direction is 250 mm / sec, and the tilt angle r and the tilt angle θ are in the range of 0 ° to −5 °. At this time, all of them could be transported satisfactorily without dripping.
In Comparative Example 3, the conveyance speed in the θ direction was 250 mm / sec, and the tilt angle r and the tilt angle θ exceeded the range of 0 ° to −5 °. Further, Comparative Example 4 is a case where the transport speed in the θ direction is 400 mm / sec, and the tilt angle r and tilt angle θ exceed the range of 0 ° to ± 5 °. The bias was generated.

  As described above, when the tilt angle r and the tilt angle θ are in the range of 0 ° to ± 5 °, satisfactory conveyance without causing problems such as liquid dripping can be performed.

It is a perspective view showing the schematic external appearance of the conveying apparatus by which the board | substrate transfer apparatus concerning this invention was arrange | positioned. It is a schematic block diagram of the coating device shown in FIG. (A)-(d) is a schematic explanatory drawing which shows each process by which a coating film is formed in an optical disk and conveyed to a drying apparatus. (E)-(h) is a schematic explanatory drawing which shows each process by which a coating film is formed in an optical disk and conveyed to a drying apparatus. (A)-(c) is a perspective view which shows each process in which a coating liquid is apply | coated to an optical disk with a disk application | coating apparatus. FIG. 3 is a plan view of an optical disc on which an ink receiving layer is formed by drying a coating film applied to the surface. It is explanatory drawing (a), (b), (c) for defining the angle with respect to the horizontal surface of an optical disk. It is a conceptual diagram which shows the conventional general disc transfer mechanism. It is explanatory drawing (a), (b), (c) which shows the latching procedure of the disk by the chuck | zipper part of FIG.

Explanation of symbols

10 Disc coating device (coating device)
30 Conveying device 41 Coating liquid supply part 49 Coating liquid (coating film)
81 Tray 83 Opening 90 Lifter 100 Transfer device (transfer means)
105 Holding mechanism D Optical disk (planar substrate)

Claims (2)

To a drying apparatus that applies a coating liquid supplied from a coating liquid supply unit of a coating apparatus onto a flat substrate to form a coating film on the flat substrate, and then places the flat substrate on a tray to dry the coating film A transport device for a substrate with a coating film to be transported,
Transfer means for taking out the flat substrate from the coating apparatus and transferring it to a tray disposed in the drying apparatus while maintaining the flat substrate in a horizontal state with an angle with respect to a horizontal plane of ± 5 ° or less. The board | substrate conveying apparatus with a coating film characterized by these. The tray has an opening to lock the lower surface of the outer periphery of the planar substrate,
The transfer means is
A holding mechanism that holds the flat substrate in a horizontal state by locking the lower surface of the outer periphery of the flat substrate on which the coating film is formed, and transports the flat substrate from the coating device to the drying device;
The flat substrate held by the holding mechanism is received from the holding mechanism while being raised and lowered from the opening of the tray and is arranged below the tray and is projected upward from the opening. The substrate transfer apparatus with a coating film according to claim 1, further comprising: a lifter for placing the planar substrate on the tray in the middle of being lowered into the tray.

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