JP2006212484A - Pure water production method and apparatus - Google Patents

Pure water production method and apparatus Download PDF

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JP2006212484A
JP2006212484A JP2005025379A JP2005025379A JP2006212484A JP 2006212484 A JP2006212484 A JP 2006212484A JP 2005025379 A JP2005025379 A JP 2005025379A JP 2005025379 A JP2005025379 A JP 2005025379A JP 2006212484 A JP2006212484 A JP 2006212484A
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activated carbon
pure water
water
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water production
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JP4848641B2 (en
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Masahiro Furukawa
征弘 古川
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Kurita Water Industries Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a pure water production method and apparatus which enable a sufficient increase in treated water quality even immediately after the pure water production after exchanging activated carbon. <P>SOLUTION: After activated carbon in an activated carbon column 14 is replaced, acclimation operation is carried out in the activated carbon column 14. When pure water production operation is carried out in an activated carbon column 24, valves 13, 16, 19a, and valves 23, 26, 28, 41 are opened, and other valves are closed. By operating both pumps 11, 21, water is supplied to the activated carbon column 24 and a WA column 38 to obtain pure water from piping 40. The outflow water of the activated carbon column 14 passes through piping 17, 19, 9 in this order to be circulated to a raw water tank 2. The circulating water supply is carried out until sufficient biomembranes adhere to new activated carbon in the activated carbon column 14, and then pure water production is carried out also in a system of the activated carbon column 14 and the WA column 32. As a result, high quality pure water can be obtained from piping 33 immediately after the restart of the pure water production operation in this system. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、半導体製造工程等に用いられる純水の製造方法及び装置に関するものであり、特に、原水を生物活性炭で処理した後、必要に応じてさらにイオン交換樹脂、膜分離装置、電気脱イオン装置等によって処理するようにした純水製造方法及び装置に関する。   The present invention relates to a method and apparatus for producing pure water used in semiconductor manufacturing processes and the like, and in particular, after treating raw water with biological activated carbon, if necessary, an ion exchange resin, a membrane separation apparatus, and electrodeionization. The present invention relates to a method and an apparatus for producing pure water which are processed by an apparatus or the like.

従来、半導体洗浄用水として用いられている超純水は、前処理システム、一次純水系システム及びサブシステム等から構成される超純水製造装置で原水(工業用水、市水、井水等)を処理することにより製造される。   Conventionally, ultrapure water used as semiconductor cleaning water is raw water (industrial water, city water, well water, etc.) in an ultrapure water production system consisting of a pretreatment system, primary pure water system and subsystems. Manufactured by processing.

前処理システムは、凝集、加圧浮上(沈殿)、濾過(膜濾過)装置などよりなる。この前処理システムでは、原水中の懸濁物質やコロイド物質が除去される。また、この前処理システムでは高分子系有機物、疎水性有機物などの除去も可能である。   The pretreatment system includes agglomeration, pressurized flotation (precipitation), filtration (membrane filtration) apparatus and the like. In this pretreatment system, suspended substances and colloidal substances in raw water are removed. In addition, this pretreatment system can remove high molecular organic substances, hydrophobic organic substances, and the like.

一次純水システムは、逆浸透膜分離装置、脱気装置及びイオン交換装置(混床式又は4床5塔式など)等を備える。この一次純水系システムでは、原水中のイオンや有機成分が除去される。なお、逆浸透膜分離装置では、塩類を除去すると共に、イオン性、コロイド性のTOCを除去する。イオン交換装置では、塩類を除去すると共にイオン交換樹脂によって吸着又はイオン交換されるフッ素イオン等のイオン性汚濁物の除去を行う。脱気装置では無機系炭素(IC)、溶存酸素の除去を行う。   The primary pure water system includes a reverse osmosis membrane separation device, a deaeration device, an ion exchange device (such as a mixed bed type or a 4-bed type 5 tower type) and the like. In this primary pure water system, ions and organic components in the raw water are removed. The reverse osmosis membrane separation apparatus removes salts and ionic and colloidal TOC. The ion exchange apparatus removes salts and removes ionic contaminants such as fluorine ions adsorbed or ion exchanged by an ion exchange resin. In the deaerator, inorganic carbon (IC) and dissolved oxygen are removed.

サブシステムは、低圧紫外線酸化装置、イオン交換純水装置及び限外濾過膜分離装置等を備える。このサブシステムでは、水の純度をより一層高め超純水にする。なお、低圧紫外線酸化装置では、低圧紫外線ランプより出される185nmの紫外線によりTOCを有機酸、さらにはCOまで分解する。分解により生成したイオン及びCOは後段のイオン交換樹脂で除去される。限外濾過膜分離装置では、微粒子が除去され、イオン交換樹脂の流出粒子も除去される。 The subsystem includes a low-pressure ultraviolet oxidizer, an ion-exchange pure water device, an ultrafiltration membrane separator, and the like. In this subsystem, the purity of water is further increased to ultrapure water. In the low-pressure ultraviolet oxidizer, TOC is decomposed into organic acids and further to CO 2 by 185 nm ultraviolet rays emitted from a low-pressure ultraviolet lamp. Ions and CO 2 produced by the decomposition are removed by an ion exchange resin in the subsequent stage. In the ultrafiltration membrane separation device, the fine particles are removed, and the outflow particles of the ion exchange resin are also removed.

本出願人は、水中の有機物(TOC)成分を効率的に除去することができる超純水製造方法及び装置として、原水を除濁処理した後、膜脱気し、その後生物活性炭処理し、さらにRO(逆浸透膜)処理、イオン交換処理又は電気脱イオン処理する方法及び装置を特開2002−355683号にて提案している。また、特開2002−336886号及び特開2003−340481号では、一次純水システムに脱炭酸塔、生物活性炭塔、第1のRO装置、イオン交換装置、脱気装置、及び第2のRO装置をこの順に設置することを提案している。   The present applicant, as an ultrapure water production method and apparatus that can efficiently remove organic matter (TOC) components in water, after turbidity treatment of raw water, membrane deaeration, and then biological activated carbon treatment, Japanese Patent Laid-Open No. 2002-355683 proposes a method and apparatus for RO (reverse osmosis membrane) treatment, ion exchange treatment or electrodeionization treatment. In JP 2002-336886 A and JP 2003-340481, a primary deionized water system includes a decarbonation tower, a biological activated carbon tower, a first RO device, an ion exchange device, a degassing device, and a second RO device. Are proposed to be installed in this order.

この生物活性炭の有機物除去機構は、(i)活性炭による有機物吸着効果;(ii)生物膜による有機物分解効果;(iii)活性炭内の微生物が活性炭に吸着した有機物を分解して細孔容積を回復させる生物再生効果の3つの機構よりなる。   The organic matter removal mechanism of this biological activated carbon is: (i) Organic matter adsorption effect by activated carbon; (ii) Organic matter decomposition effect by biological membrane; (iii) Microorganisms in activated carbon decompose organic matter adsorbed on activated carbon to restore pore volume It consists of three mechanisms of biological regeneration effect.

この生物活性炭塔は、活性炭自体の吸着能が飽和に達するまでの時間が著しく長い。しかしながら、長時間通水を継続すると、活性炭が磨耗したり、あるいは水中の過酸化水素による酸化等により粒径が小さくなってくる。   In this biological activated carbon tower, the time until the adsorption ability of the activated carbon itself reaches saturation is remarkably long. However, if water is passed for a long time, the activated carbon wears out or the particle size becomes smaller due to oxidation with hydrogen peroxide in water.

そこで、2年間等の定期的あるいは非定期的に、生物活性炭装置の活性炭を新品と交換する必要がある。しかしながら、活性炭を新品と交換すると、新品の活性炭には生物膜が付着していないので、交換後、しばらくは処理水質が不十分になる。
特開2002−355683号 特開2002−336886号 特開2003−340481号
Therefore, it is necessary to replace the activated carbon of the biological activated carbon device with a new one regularly or irregularly such as for two years. However, when the activated carbon is replaced with a new one, the biofilm does not adhere to the new activated carbon, so that the treated water quality becomes insufficient for a while after the replacement.
JP 2002-355683 A JP 2002-336886 A JP 2003-340481

本発明は、活性炭交換して純水製造運転を再開した直後であっても処理水質が十分に高いものとなる純水製造方法及び装置を提供することを目的とする。   An object of the present invention is to provide a pure water production method and apparatus in which the quality of treated water is sufficiently high even immediately after the replacement of activated carbon and restarting the pure water production operation.

請求項1の純水製造方法は、TOC成分を含有した原水を活性炭床に通水して吸着処理する純水製造工程と、該活性炭床の活性炭を交換する活性炭交換工程とを有する純水製造方法において、該活性炭交換工程の後、活性炭に生物を繁殖させる馴養工程を行い、その後、前記純水製造工程に移行することを特徴とするものである。   The pure water production method according to claim 1 comprises a pure water production process in which raw water containing a TOC component is passed through an activated carbon bed for adsorption treatment, and an activated carbon exchange process for exchanging the activated carbon in the activated carbon bed. In the method, after the activated carbon exchanging step, an acclimatization step for breeding organisms on the activated carbon is performed, and then the process proceeds to the pure water production step.

請求項2の純水製造方法は、請求項1において、前記馴養工程にあっては、TOC成分含有水を活性炭床に循環通水することを特徴とするものである。   The pure water production method of claim 2 is characterized in that, in the acclimatization step, the TOC component-containing water is circulated through the activated carbon bed in claim 1.

請求項3の純水製造方法は、TOC成分を含有した原水を生物活性炭床に通水して吸着処理する純水製造工程と、該生物活性炭床の活性炭を交換する活性炭交換工程とを有する純水製造方法において、該活性炭交換工程にあっては、活性炭に生物を繁殖させた馴養済みの活性炭と交換することを特徴とするものである。   The pure water production method according to claim 3 is a pure water production process in which raw water containing a TOC component is passed through a biological activated carbon bed for adsorption treatment, and an activated carbon exchange process for exchanging the activated carbon in the biological activated carbon bed. In the water production method, the activated carbon exchange step is characterized in that the activated carbon is replaced with a conditioned activated carbon obtained by breeding organisms.

請求項4の純水製造方法は、請求項1ないし3のいずれか1項において、吸着工程の後に高次処理手段にて処理する工程を設けることを特徴とするものである。   According to a fourth aspect of the present invention, there is provided a method for producing pure water according to any one of the first to third aspects, further comprising a step of processing by a high-order processing means after the adsorption step.

請求項5の純水製造方法は、請求項4において、前記高次処理手段は、イオン交換樹脂塔、膜分離装置及び電気脱イオン装置の少なくとも1種であることを特徴とするものである。   The pure water production method according to claim 5 is characterized in that, in claim 4, the high-order treatment means is at least one of an ion exchange resin tower, a membrane separation device, and an electrodeionization device.

請求項6の純水製造方法は、請求項1ないし5のいずれか1項において、複数の活性炭床を並列に設置しておき、一部の活性炭床で活性炭の交換又は馴養を行っているときに他の活性炭床に通水して純水の製造を継続することを特徴とするものである。   A pure water production method according to claim 6 is the method according to any one of claims 1 to 5, wherein a plurality of activated carbon beds are installed in parallel, and the activated carbon is exchanged or habituated in some activated carbon beds. In addition, the production of pure water is continued by passing water through another activated carbon bed.

請求項7の純水製造装置は、原水が通水される活性炭床を有する純水製造装置において、該活性炭床の流出水を処理水として取り出す流路選択と、該活性炭床よりも上流側に返送する流路選択とを切り替える流路選択手段を備えたことを特徴とするものである。   The pure water production apparatus according to claim 7 is a pure water production apparatus having an activated carbon bed through which raw water is passed, and a flow path selection for taking out effluent water of the activated carbon bed as treated water, and upstream of the activated carbon bed. It is characterized by comprising a flow path selection means for switching the flow path selection to be returned.

請求項8の純水製造装置は、請求項7において、処理水として取り出された水をさらに高次処理する高次処理手段を備えたことを特徴とするものである。   The pure water production apparatus according to an eighth aspect is characterized in that, in the seventh aspect, a high-order treatment means for performing a higher-order treatment on the water extracted as the treated water is provided.

請求項9の純水製造装置は、請求項7又は8において、前記活性炭床が並列に複数個設けられており、各活性炭床に互いに独立に通水可能であることを特徴とするものである。   The pure water production apparatus according to claim 9 is characterized in that, in claim 7 or 8, a plurality of the activated carbon beds are provided in parallel, and water can be passed through each activated carbon bed independently of each other. .

請求項1の純水製造方法にあっては、活性炭を新品の活性炭に交換した場合であっても、活性炭交換後に馴養工程を行って活性炭に生物を繁殖させ、生物膜を十分に形成した後、純水製造を行う。従って、純水製造運転を再開した直後であっても、処理水質が十分に高いものとなる。   In the method for producing pure water according to claim 1, even when the activated carbon is replaced with a new activated carbon, after the activated carbon is replaced, the acclimatization process is performed to propagate the organism on the activated carbon and sufficiently form the biofilm. To produce pure water. Therefore, even immediately after resuming the pure water production operation, the quality of the treated water is sufficiently high.

この馴養工程を行うには、請求項2の通り、活性炭床にTOC成分含有水を循環通水するのが簡便で好適である。   In order to perform this acclimatization process, as described in claim 2, it is convenient and preferable to circulate TOC component-containing water through the activated carbon bed.

請求項3の純水製造方法にあっては、活性炭を馴養済みの活性炭と交換するため、純水製造運転再開直後にあっても処理水質は十分に高いものとなる。   In the method for producing pure water according to claim 3, since the activated carbon is exchanged with acclimatized activated carbon, the quality of the treated water is sufficiently high even immediately after resuming the pure water production operation.

請求項4の純水製造方法にあっては、活性炭床からの処理水をさらに高次処理手段で高次処理するので、より優れた水質の水が得られる。   In the pure water production method according to the fourth aspect, since the treated water from the activated carbon bed is further subjected to higher-order treatment by a higher-order treatment means, water with better water quality can be obtained.

上記の高次処理手段としては、請求項5の通り、イオン交換樹脂塔、膜分離装置及び電気脱イオン装置の少なくとも1種が好適である。   As the high-order processing means, as described in claim 5, at least one of an ion exchange resin tower, a membrane separator, and an electrodeionization apparatus is suitable.

請求項6の純水製造方法にあっては、一部の活性炭床で活性炭の交換又は馴養を行っているときでも他の活性炭床で純水の製造を行うので、純水需要箇所に対し、純水を継続して供給することができる。   In the pure water production method of claim 6, since pure water is produced in other activated carbon beds even when the activated carbon is exchanged or habituated in some activated carbon beds, Pure water can be continuously supplied.

請求項7の純水製造装置によると、上記請求項1又は2の純水製造方法を容易に実施することができる。   According to the pure water production apparatus of claim 7, the pure water production method of claim 1 or 2 can be easily carried out.

請求項8の純水製造装置によると、さらに高次処理した水が得られる。   According to the pure water producing apparatus of the eighth aspect, water subjected to higher-order treatment can be obtained.

請求項9の純水製造装置によると、上記請求項7又は8のように純水を需要箇所に継続して供給することができる。   According to the pure water producing apparatus of the ninth aspect, pure water can be continuously supplied to the demand point as in the seventh or eighth aspect.

以下、図面を参照して実施の形態について説明する。第1図は実施の形態に係る純水製造装置の系統図、第2図〜第6図はその通水状況の説明図である。   Hereinafter, embodiments will be described with reference to the drawings. FIG. 1 is a system diagram of a pure water production apparatus according to an embodiment, and FIGS. 2 to 6 are explanatory views of the water flow state.

第1図の通り、原水は原水導入用の配管1を介して原水槽2に導入される。この原水槽2内の原水は、配管3と、該配管3から分岐した分岐配管3a、ポンプ11、配管12、弁13を介して活性炭塔(AC塔)14に通水可能とされ、このAC塔14の処理水が配管15、弁16、配管17、弁18を通り、さらに配管31を介して弱アニオン交換塔(WA塔)32へ供給されるか、又は配管35、弁36、配管37を介してWA塔38へ供給可能とされている。   As shown in FIG. 1, raw water is introduced into a raw water tank 2 through a pipe 1 for introducing raw water. The raw water in the raw water tank 2 can be passed through an activated carbon tower (AC tower) 14 via a pipe 3, a branch pipe 3 a branched from the pipe 3, a pump 11, a pipe 12, and a valve 13. The treated water in the tower 14 passes through the pipe 15, the valve 16, the pipe 17, and the valve 18 and is further supplied to the weak anion exchange tower (WA tower) 32 through the pipe 31, or the pipe 35, the valve 36, and the pipe 37. It is possible to supply to the WA tower 38 via

また、配管3からの原水は、分岐配管3b、ポンプ21、配管22、弁23、活性炭塔(AC塔)24、配管25、弁26、配管27、弁28を通り、さらに配管39,37を介してWA塔38へ供給されるか、又は配管39、弁36、配管35,31を介してWA塔32へ供給可能とされている。   The raw water from the pipe 3 passes through the branch pipe 3b, the pump 21, the pipe 22, the valve 23, the activated carbon tower (AC tower) 24, the pipe 25, the valve 26, the pipe 27, and the valve 28, and further through the pipes 39 and 37. It can be supplied to the WA tower 38 via the pipe 39, the valve 36, and the pipes 35, 31.

活性炭塔14,24内に活性炭床が設けられている。この活性炭床は、流動床であってもよく、固定床であってもよい。   An activated carbon bed is provided in the activated carbon towers 14 and 24. This activated carbon bed may be a fluidized bed or a fixed bed.

活性炭塔14内の活性炭を馴養するために、活性炭塔14からの流出水が配管17、配管19、弁19a、集合配管9を介して原水槽2へ循環可能とされている。同様に、活性炭塔24内の活性炭を馴養するために、活性炭塔24の流出水が配管27、配管29、弁29a、集合配管9を介して原水槽2へ循環可能とされている。   In order to acclimatize the activated carbon in the activated carbon tower 14, the effluent water from the activated carbon tower 14 can be circulated to the raw water tank 2 through the pipe 17, the pipe 19, the valve 19 a and the collective pipe 9. Similarly, in order to acclimatize the activated carbon in the activated carbon tower 24, the effluent water of the activated carbon tower 24 can be circulated to the raw water tank 2 through the pipe 27, the pipe 29, the valve 29 a, and the collective pipe 9.

WA塔32,38の再生時に再生排水を排出するために配管15から配管51が分岐し、弁52、配管53を介して排出用配管54に接続されている。また、配管25から配管55が分岐し、弁56、配管57を介して該配管54に接続されている。   A pipe 51 is branched from the pipe 15 to discharge the regenerated waste water when the WA towers 32 and 38 are regenerated, and is connected to a discharge pipe 54 via a valve 52 and a pipe 53. A pipe 55 branches from the pipe 25 and is connected to the pipe 54 via a valve 56 and a pipe 57.

図示はしないが、この活性炭塔及びWA塔との組み合わせよりなる系統を3系統以上設けてもよい。1つの系統に活性炭塔を直列に2以上設けてもよい。   Although not shown, three or more systems comprising a combination of the activated carbon tower and the WA tower may be provided. Two or more activated carbon towers may be provided in series in one system.

次に、第2図を参照して、活性炭塔14にて純水製造運転を行う場合の通水方法を説明する。この場合、弁13,16,18,34を開、他の弁を閉とし、ポンプ11を起動する。これにより、原水は、配管3,3a,12、活性炭塔14、配管15,17,31、WA塔32、配管33の順に流れ、処理水(純水)となる。なお、第2図では、WA塔32に通水しているが、弁34を閉、弁36,41を開とし、活性炭塔14の流出水をWA塔38に通水することもできる。   Next, with reference to FIG. 2, the water flow method in the case of performing a pure water production operation in the activated carbon tower 14 will be described. In this case, the valves 13, 16, 18, and 34 are opened, the other valves are closed, and the pump 11 is started. Thereby, raw | natural water flows in order of piping 3, 3a, 12, activated carbon tower 14, piping 15, 17, 31, WA tower 32, and piping 33, and becomes treated water (pure water). In FIG. 2, water is passed through the WA tower 32, but the valve 34 is closed and the valves 36 and 41 are opened, so that the outflow water from the activated carbon tower 14 can be passed through the WA tower 38.

活性炭塔24にて純水製造運転を行う場合には、第3図の通り、弁23,26,28,41を開、他の弁を閉とし、ポンプ21を起動する。これにより、原水は、配管3,3b,22、活性炭塔24、配管25,27,39,37、WA塔38、配管40の順に流れて純水となる。なお、第3図ではWA塔38に通水しているが、弁36,34を開、弁41を閉とし、活性炭塔24の流出水をWA塔32に通水することもできる。   When the pure water production operation is performed in the activated carbon tower 24, as shown in FIG. 3, the valves 23, 26, 28 and 41 are opened, the other valves are closed, and the pump 21 is started. Thereby, raw | natural water flows in order of piping 3, 3b, 22, activated carbon tower 24, piping 25, 27, 39, 37, WA tower 38, and piping 40, and turns into pure water. In FIG. 3, water is passed through the WA tower 38, but the valves 36 and 34 are opened, the valve 41 is closed, and the effluent water from the activated carbon tower 24 can be passed through the WA tower 32.

なお、図示はしないが、第2図と第3図の通水を併せて行うことにより、活性炭塔14及びWA塔32の系統と、活性炭塔24及びWA塔38の系統との双方において純水製造を行うことも可能である。   Although not shown in the figure, pure water is supplied to both the system of the activated carbon tower 14 and the WA tower 32 and the system of the activated carbon tower 24 and the WA tower 38 by performing the water flow shown in FIGS. Manufacturing is also possible.

第4図を参照して、活性炭塔14内の活性炭を交換した後、該活性炭塔14で馴養運転を行い、活性炭塔24で純水製造運転を行う場合の通水状況について説明する。   With reference to FIG. 4, after replacing | exchanging the activated carbon in the activated carbon tower 14, the acclimatization operation is performed in the activated carbon tower 14, and the water flow condition in the case of performing the pure water production operation in the activated carbon tower 24 will be described.

この場合、弁13,16,19aと弁23,26,28,41が開とされ、他の弁は閉とされている。双方のポンプ11,21が作動されることにより、第3図と同様に活性炭塔24及びWA塔38に通水されて純水が配管40から得られる。一方、活性炭塔14の流出水は、配管17,19,9の順に流れて原水槽2に循環される。活性炭塔14内の新品の活性炭に十分に生物膜が付着するまでこの循環通水を行い、その後、活性炭塔14及びWA塔32の系統でも純水製造運転を行う。これにより、この系統での純水製造運転の再開直後から、配管33から高水質の純水が得られる。   In this case, the valves 13, 16, 19a and the valves 23, 26, 28, 41 are opened, and the other valves are closed. When both the pumps 11 and 21 are operated, water is passed through the activated carbon tower 24 and the WA tower 38 as in FIG. On the other hand, the effluent water of the activated carbon tower 14 flows in the order of the pipes 17, 19, 9 and is circulated to the raw water tank 2. This circulating water flow is performed until the biofilm is sufficiently adhered to the new activated carbon in the activated carbon tower 14, and then the pure water production operation is also performed in the system of the activated carbon tower 14 and the WA tower 32. As a result, high-quality pure water can be obtained from the pipe 33 immediately after resumption of the pure water production operation in this system.

なお、第4図では、活性炭塔24の流出水をWA塔38に通水しているが、WA塔32に通水してもよい。   In FIG. 4, the outflow water from the activated carbon tower 24 is passed through the WA tower 38, but it may be passed through the WA tower 32.

第5図を参照して、活性炭塔24の活性炭交換後に活性炭塔24で馴養運転を行い、活性炭塔24及びWA塔32で純水製造運転を行う場合について説明する。   With reference to FIG. 5, the case where the acclimatization operation is performed in the activated carbon tower 24 after the activated carbon tower 24 is replaced and the pure water production operation is performed in the activated carbon tower 24 and the WA tower 32 will be described.

この場合は、弁13,16,18,34と弁23,26,29aを開とし、他の弁を閉とする。ポンプ11,21を作動させると、原水槽2内の原水が活性炭塔14及びWA塔32を流れて配管33から純水が得られる。一方、活性炭塔24の流出水は、配管27,29,9を介して原水槽2に循環される。この循環通水は、活性炭塔24内の新品の活性炭に生物膜が十分に付着するまで、継続する。その後、活性炭塔24及びWA塔38による純水製造運転を再開する。この再開直後にあっても、配管41からは高水質の純水が得られる。   In this case, the valves 13, 16, 18, and 34 and the valves 23, 26, and 29a are opened, and the other valves are closed. When the pumps 11 and 21 are operated, the raw water in the raw water tank 2 flows through the activated carbon tower 14 and the WA tower 32 and pure water is obtained from the pipe 33. On the other hand, the effluent water of the activated carbon tower 24 is circulated to the raw water tank 2 through the pipes 27, 29 and 9. This circulating water flow is continued until the biofilm sufficiently adheres to the new activated carbon in the activated carbon tower 24. Thereafter, the pure water production operation by the activated carbon tower 24 and the WA tower 38 is resumed. Even immediately after the restart, high-quality pure water is obtained from the pipe 41.

上記実施の形態では、活性炭塔14,24の後段にWA塔32,38を配置しているが、その他のイオン交換樹脂塔や、膜分離装置、電気脱イオン装置等の高次処理手段を用いてもよく、これらの2以上を組み合わせて配設してもよい。   In the above-described embodiment, the WA towers 32 and 38 are disposed after the activated carbon towers 14 and 24, but other ion exchange resin towers, membrane separation devices, electrodeionization devices and the like are used. Or two or more of these may be combined.

本発明では、第6図のように、WA塔32等の高次処理手段を省略し、活性炭塔14,24を並列設置してもよい。第6図では、配管31、WA塔32、配管33、弁34が省略され、また、配管37、WA塔38、配管40、弁41が省略されている。その他の構成は第1図と同一である。この場合、活性炭塔14,24の一方又は双方で原水の生物活性炭処理を行うことができる。また、一方の活性炭塔で生物活性炭処理を行い、その間他方の活性炭塔で新品活性炭の馴養のために原水循環通水を行うことができる。   In the present invention, as shown in FIG. 6, higher-order processing means such as the WA tower 32 may be omitted, and the activated carbon towers 14 and 24 may be installed in parallel. In FIG. 6, the piping 31, the WA tower 32, the piping 33, and the valve 34 are omitted, and the piping 37, the WA tower 38, the piping 40, and the valve 41 are omitted. Other configurations are the same as those in FIG. In this case, biological activated carbon treatment of raw water can be performed in one or both of the activated carbon towers 14 and 24. In addition, biological activated carbon treatment can be performed in one activated carbon tower, while raw water circulation can be performed in the other activated carbon tower for acclimatization of new activated carbon.

請求項3の発明にあっては、活性炭塔の活性炭を交換する場合、別の活性炭塔で馴養運転して生物膜を付着させた馴養済みの活性炭を用いる。この場合、活性炭塔を複数並列に設けておくと、一部の活性炭塔で活性炭の交換を行っている間、他の活性炭塔で生物活性炭処理を継続することができる。   In the invention of claim 3, when the activated carbon of the activated carbon tower is replaced, conditioned activated carbon in which a biofilm is attached by habituation operation in another activated carbon tower is used. In this case, if a plurality of activated carbon towers are provided in parallel, the biological activated carbon treatment can be continued in another activated carbon tower while the activated carbon is exchanged in some activated carbon towers.

以下、本発明の実施例及び比較例について説明する。   Examples of the present invention and comparative examples will be described below.

実施例1、比較例1
第6図に示す2系列の活性炭床を有する純水製造装置において、原水槽2の原水として、超純水にポリオキシアルキレンアルキルエーテルを含むノニオン性界面活性剤(和光純薬工業社製「NCW−1002」)をTOCとして2000μg/L添加したものを用いた。
Example 1 and Comparative Example 1
In the pure water producing apparatus having two series of activated carbon beds shown in FIG. 6, as the raw water of the raw water tank 2, a nonionic surfactant containing polyoxyalkylene alkyl ether in ultrapure water (“NCW” manufactured by Wako Pure Chemical Industries, Ltd.) −1002 ”) added as a TOC at 2000 μg / L.

先ず第1系列に活性炭塔14での滞留時間が15分となるように上記原水を供給した。   First, the raw water was supplied to the first series so that the residence time in the activated carbon tower 14 was 15 minutes.

通水開始から8週間経過すると、活性炭塔の処理水のTOC濃度が10μg/Lに安定した。一方、3ヶ月後に上記とは別の系列に新品活性炭を充填し、滞留時間が15分となるように原水を供給後、処理水については全量原水槽に返送した。この状態を8週間継続したところ、処理水のTOCが10μg/Lとなったので、処理水を原水槽に返送することなく、第1系列の処理水とあわせて系外に取り出した。   After 8 weeks from the start of water flow, the TOC concentration of the treated water in the activated carbon tower was stabilized at 10 μg / L. On the other hand, after 3 months, new activated carbon was filled in a series different from the above, and the raw water was supplied so that the residence time was 15 minutes, and then all the treated water was returned to the raw water tank. When this state was continued for 8 weeks, the TOC of the treated water became 10 μg / L, so that the treated water was taken out of the system together with the first series of treated water without returning it to the raw water tank.

第1系列運転後6ヶ月たったところで、第1系列の通水を中断した。そして活性炭床の活性炭を全量新品の活性炭と入れ替えた。そして先述と同様に活性炭床の処理水を全量原水槽に戻す運転により8週間馴養運転した。この間第2系列は通常運転されており、第7図の通り、処理水のTOCは10μg/Lで変りなかった。   The first series of water was interrupted six months after the first series operation. And all the activated carbon of the activated carbon bed was replaced with new activated carbon. And it was acclimatized for 8 weeks by the operation | movement which returns all the treated water of an activated carbon bed to a raw | natural water tank similarly to the above-mentioned. During this time, the second series was normally operated, and the TOC of the treated water did not change at 10 μg / L as shown in FIG.

一方、第2系列の処理水を分析したところ、馴養運転開始後6週間にわたっては、第7図の通り、TOCが10μg/Lを超える値となった。従ってこの馴養処理水を系外に放出すると水質の悪化となる。   On the other hand, when the second series of treated water was analyzed, the TOC exceeded 10 μg / L as shown in FIG. 7 for 6 weeks after the start of the habituation operation. Therefore, when this conditioned water is discharged out of the system, the water quality deteriorates.

実施の形態に係る純水製造装置の系統図である。It is a systematic diagram of the pure water manufacturing apparatus which concerns on embodiment. 図1の純水製造装置への通水状況の説明図である。It is explanatory drawing of the water flow condition to the pure water manufacturing apparatus of FIG. 図1の純水製造装置への通水状況の説明図である。It is explanatory drawing of the water flow condition to the pure water manufacturing apparatus of FIG. 図1の純水製造装置への通水状況の説明図である。It is explanatory drawing of the water flow condition to the pure water manufacturing apparatus of FIG. 図1の純水製造装置への通水状況の説明図である。It is explanatory drawing of the water flow condition to the pure water manufacturing apparatus of FIG. 図1の純水製造装置への通水状況の説明図である。It is explanatory drawing of the water flow condition to the pure water manufacturing apparatus of FIG. 実施例及び比較例の結果を示すグラフである。It is a graph which shows the result of an Example and a comparative example.

符号の説明Explanation of symbols

2 原水槽
14,24 活性炭塔
32,38 弱アニオン交換塔
2 Raw water tank 14, 24 Activated carbon tower 32, 38 Weak anion exchange tower

Claims (9)

TOC成分を含有した原水を活性炭床に通水して処理する吸着工程と、
該活性炭床の活性炭を交換する活性炭交換工程と
を有する純水製造方法において、
該活性炭交換工程の後、活性炭に生物を繁殖させる馴養工程を行い、その後、前記吸着工程に移行することを特徴とする純水製造方法。
An adsorption process in which raw water containing a TOC component is passed through an activated carbon bed for treatment;
In a pure water production method having an activated carbon exchange step of exchanging activated carbon of the activated carbon bed,
A pure water production method, wherein after the activated carbon exchanging step, an acclimatization step for propagating organisms on the activated carbon is performed, and then the adsorption step is performed.
請求項1において、前記馴養工程にあっては、TOC成分含有水を活性炭床に循環通水することを特徴とする純水製造方法。   2. The pure water production method according to claim 1, wherein in the acclimatization step, TOC component-containing water is circulated through the activated carbon bed. TOC成分を含有した原水を生物活性炭床に通水して処理する吸着工程と、
該生物活性炭床の活性炭を交換する活性炭交換工程と
を有する純水製造方法において、
該活性炭交換工程にあっては、活性炭に生物を繁殖させた馴養済みの活性炭と交換することを特徴とする純水製造方法。
An adsorption process in which raw water containing a TOC component is passed through a biological activated carbon bed for treatment;
In a pure water production method comprising an activated carbon exchange step of exchanging activated carbon of the biological activated carbon bed,
In the activated carbon exchange step, a method for producing pure water, characterized in that the activated carbon is replaced with a conditioned activated carbon obtained by breeding organisms on the activated carbon.
請求項1ないし3のいずれか1項において、吸着工程の後に高次処理手段にて処理する工程を設けることを特徴とする純水製造方法。   The pure water manufacturing method according to any one of claims 1 to 3, further comprising a step of processing by a high-order processing means after the adsorption step. 請求項4において、前記高次処理手段は、イオン交換樹脂塔、膜分離装置及び電気脱イオン装置の少なくとも1種であることを特徴とする純水製造方法。   5. The pure water production method according to claim 4, wherein the high-order treatment means is at least one of an ion exchange resin tower, a membrane separation device, and an electrodeionization device. 請求項1ないし5のいずれか1項において、複数の活性炭床を並列に設置しておき、一部の活性炭床で活性炭の交換又は馴養を行っているときに他の活性炭床に通水して純水の製造を継続することを特徴とする純水製造方法。   In any 1 item | term of Claim 1 thru | or 5, when several activated carbon beds are installed in parallel and activated carbon is exchanged or acclimatized in some activated carbon beds, water is passed through other activated carbon beds. A method for producing pure water, characterized by continuing production of pure water. 原水が通水される活性炭床を有する純水製造装置において、
該活性炭床の流出水を処理水として取り出す流路選択と、該活性炭床よりも上流側に返送する流路選択とを切り替える流路選択手段を備えたことを特徴とする純水製造装置。
In a pure water production apparatus having an activated carbon bed through which raw water is passed,
An apparatus for producing pure water, comprising: a channel selection means for switching between a channel selection for taking out effluent water of the activated carbon bed as treated water and a channel selection for returning to the upstream side of the activated carbon bed.
請求項7において、処理水として取り出された水をさらに高次処理する高次処理手段を備えたことを特徴とする純水製造装置。   8. The apparatus for producing pure water according to claim 7, further comprising high-order treatment means for performing higher-order treatment on the water taken out as treated water. 請求項7又は8において、前記活性炭床が並列に複数個設けられており、各活性炭床に互いに独立に通水可能であることを特徴とする純水製造装置。   9. The pure water production apparatus according to claim 7, wherein a plurality of the activated carbon beds are provided in parallel, and water can be passed through each activated carbon bed independently of each other.
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