JP2006200926A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
JP2006200926A
JP2006200926A JP2005010343A JP2005010343A JP2006200926A JP 2006200926 A JP2006200926 A JP 2006200926A JP 2005010343 A JP2005010343 A JP 2005010343A JP 2005010343 A JP2005010343 A JP 2005010343A JP 2006200926 A JP2006200926 A JP 2006200926A
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film
protective film
pressure sensor
pad
sensor element
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JP4506478B2 (en
Inventor
Manabu Tomisaka
学 富坂
Akinosuke Tera
亮之介 寺
Yoshifumi Watanabe
善文 渡辺
Hiroaki Tanaka
宏明 田中
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Denso Corp
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Denso Corp
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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Wire Bonding (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure sensor of a structure capable of preventing a pad for bonding from being corroded. <P>SOLUTION: A second protective film 25 is deposited in the surface of an Al film 23 and a first protective film 24 into a state coated with the second protective film 25. The second protective film 25 is constituted of a film having a high coating property and of an inorganic material such as a silicon nitride film and a silicon oxide film of a structure having no film defects. By such a structure, it is possible to prevent a corrosive medium from intruding into the Al film 23 and the first protective film 24 covered with the second protective film 25. It is thereby possible to prevent the corrosive medium form intruding to the side of the pad and prevent the pad from being corroded. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、半導体で構成されたセンシング部を構成するセンサ素子およびこのセンサ素子に備えられたパッドと電気的な接続が行われるボンディング部分の腐食を防止できる構造の圧力センサに関するものである。   The present invention relates to a pressure sensor having a structure capable of preventing corrosion of a bonding element that is electrically connected to a sensor element that constitutes a sensing unit made of a semiconductor and a pad provided in the sensor element.

従来より、半導体で構成されたセンサ素子およびこのセンサ素子に備えられたパッドと電気的な接続が行われるボンディング部分をメタルダイヤフラムで覆い、このメタルダイヤフラム内にオイルを充填した構造が提案されている（例えば、特許文献１参照）。   Conventionally, there has been proposed a structure in which a sensor element composed of a semiconductor and a bonding portion that is electrically connected to a pad provided in the sensor element are covered with a metal diaphragm and oil is filled in the metal diaphragm. (For example, refer to Patent Document 1).

このような構造の圧力センサでは、圧力センサに備えられた圧力導入孔を通じて圧力媒体となる流体が導入されると、その流体の圧力がメタルダイアフラムおよびオイルを介して、センサ素子に印加されることになる。このため、センサ素子に備えられたダイヤフラムが歪み、ダイヤフラム内に形成されたゲージ抵抗が圧縮応力もしくは引張応力によって変形し、これにより、センサ素子から流体の圧力に応じた検出信号が出力されるようになっている。   In a pressure sensor having such a structure, when a fluid as a pressure medium is introduced through a pressure introduction hole provided in the pressure sensor, the pressure of the fluid is applied to the sensor element via a metal diaphragm and oil. become. For this reason, the diaphragm provided in the sensor element is distorted, and the gauge resistance formed in the diaphragm is deformed by a compressive stress or a tensile stress, so that a detection signal corresponding to the fluid pressure is output from the sensor element. It has become.

このような構成の圧力センサの場合、メタルダイヤフラムが必要とされることから部品点数の増加になっており、また、メタルダイヤフラムによるオイルの密封構造が必要となることから、圧力センサの構造の複雑化を招くという問題がある。
特開平７−２４３９２６号公報 In the case of a pressure sensor having such a configuration, the number of parts is increased because a metal diaphragm is required, and the structure of the pressure sensor is complicated because an oil sealing structure using a metal diaphragm is required. There is a problem of inviting.
JP 7-243926 A

このため、メタルダイヤフラムを無くす構造とすることも考えられるが、そのような構造とした場合、半導体で構成されたセンサ素子が腐食性の液体に曝されるような状況、例えばディーゼル車の排気清浄フィルタであるＤＰＦの差圧計測やエンジンルーム内の雰囲気中での圧力測定を行うようなものに圧力センサが適用された場合、ボンディング用のパッドの材質がＡｌであるために腐食が発生するという問題が発生する。   For this reason, it is conceivable to eliminate the metal diaphragm. However, in such a structure, the sensor element made of semiconductor is exposed to a corrosive liquid, for example, exhaust cleaning of a diesel vehicle. When a pressure sensor is applied to a filter that measures the differential pressure of the DPF that is a filter or measures the pressure in the atmosphere in the engine room, corrosion occurs because the bonding pad material is Al. A problem occurs.

本発明は上記点に鑑みて、ボンディング用のパッドが腐食されることを防止できる構造の圧力センサを提供することを目的とする。   An object of the present invention is to provide a pressure sensor having a structure capable of preventing a bonding pad from being corroded.

上記目的を達成するため、請求項１に記載の発明では、圧力センサにおいて、金属膜（２３）におけるパッドとなる領域、第１保護膜（２４）のうちパッドの周囲に位置する部分、および、ボンディングワイヤ（１３）における金属膜（２３）と電気的に接続される部位を覆うように、無機材料からなる第２保護膜（２５）を備えることを特徴としている。   In order to achieve the above object, in the invention according to claim 1, in the pressure sensor, a region to be a pad in the metal film (23), a portion of the first protective film (24) located around the pad, and A second protective film (25) made of an inorganic material is provided so as to cover a portion of the bonding wire (13) that is electrically connected to the metal film (23).

このように、無機材料からなる第２保護膜（２５）にて、圧力センサにおいて、金属膜（２３）におけるパッドとなる領域、第１保護膜（２５）のうちパッドの周囲に位置する部分、および、ボンディングワイヤ（１３）における金属膜（２３）と電気的に接続される部位を覆っている。このような第２保護膜（２５）は、例えば被覆性が高く、膜欠陥が無い構造とできるため、第２保護膜（２５）によって覆われた金属膜（２３）および第１保護膜（２４）には腐食媒体が浸入しないようにすることができる。これにより、腐食媒体がパッド側に浸入することを防止でき、パッドが腐食されることを防止することが可能となる。   In this way, in the second protective film (25) made of an inorganic material, in the pressure sensor, a region to be a pad in the metal film (23), a portion of the first protective film (25) located around the pad, And the part electrically connected with the metal film (23) in the bonding wire (13) is covered. Such a second protective film (25) has, for example, a high coverage and a structure free from film defects. Therefore, the metal film (23) and the first protective film (24) covered with the second protective film (25) can be used. ) Can be prevented from entering the corrosive medium. As a result, the corrosive medium can be prevented from entering the pad side, and the pad can be prevented from being corroded.

このような第２保護膜（２５）の厚さは、例えば請求項５に示されるように、１ｎｍ以上かつ１００ｎｍ以下とすれば良いことを実験により確認している。   It has been confirmed by experiments that the thickness of the second protective film (25) may be 1 nm or more and 100 nm or less, for example, as shown in claim 5.

また、請求項２に示されるように、第１保護膜（２４）としては、窒化珪素膜または酸化珪素膜に窒化珪素膜を積層した膜を用いることができ、また、第２保護膜（２５）としては、化学気相成長法により形成された窒化珪素膜と酸化珪素膜のいずれかを含む膜を用いることができる。   According to a second aspect of the present invention, as the first protective film (24), a silicon nitride film or a film in which a silicon nitride film is laminated on a silicon oxide film can be used, and a second protective film (25) is used. ) May be a film including either a silicon nitride film or a silicon oxide film formed by a chemical vapor deposition method.

さらに、請求項３に示されるように、第２保護膜（２５）としては、原子層成長法により形成された酸化アルミ膜と窒化アルミ膜のいずれかを含む膜とすることもできる。この場合、請求項４に示されるように、酸化アルミ膜と窒化アルミ膜とが交互に形成された積層膜によって第２保護膜（２５）を形成することもできる。   Furthermore, as shown in claim 3, the second protective film (25) may be a film including any one of an aluminum oxide film and an aluminum nitride film formed by an atomic layer growth method. In this case, as shown in claim 4, the second protective film (25) can be formed by a laminated film in which an aluminum oxide film and an aluminum nitride film are alternately formed.

なお、上記各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。   In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

（第１実施形態）
以下、本発明の一実施形態が適用された圧力センサについて説明する。図１に、本実施形態における圧力センサＳ１の断面図を示し、この図に基づいて説明する。なお、この圧力センサＳ１は、例えば、ディーゼル車の排気清浄フィルタであるＤＰＦの差圧計測等に適用される。 (First embodiment)
Hereinafter, a pressure sensor to which an embodiment of the present invention is applied will be described. FIG. 1 shows a cross-sectional view of the pressure sensor S1 in the present embodiment, which will be described based on this drawing. The pressure sensor S1 is applied to, for example, differential pressure measurement of a DPF that is an exhaust purification filter of a diesel vehicle.

図１に示されるように、第１のケースとしてのコネクタケース１０は、ＰＰＳ（ポリフェニレンサルファイド）やＰＢＴ（ポリブチレンテレフタレート）等の樹脂を型成形することにより作られ、本実施形態では略円柱状をなしている。この樹脂ケースとしてのコネクタケース１０の一端部（図１中、下方側の端部）には、凹部１１が形成されている。   As shown in FIG. 1, a connector case 10 as a first case is made by molding a resin such as PPS (polyphenylene sulfide) or PBT (polybutylene terephthalate). In this embodiment, the connector case 10 has a substantially cylindrical shape. I am doing. A concave portion 11 is formed at one end (the lower end in FIG. 1) of the connector case 10 as the resin case.

この凹部１１の底面には、圧力検出用のセンサ素子２０が配設されている。   A sensor element 20 for pressure detection is disposed on the bottom surface of the recess 11.

センサ素子２０は、その表面に受圧面としてのダイアフラムを有し、このダイアフラムの表面に形成されたゲージ抵抗により、ダイアフラムが受けた圧力を電気信号に変換し、この電気信号をセンサ信号として出力する半導体ダイアフラム式のものである。   The sensor element 20 has a diaphragm as a pressure receiving surface on the surface thereof, and converts the pressure received by the diaphragm into an electrical signal by a gauge resistance formed on the surface of the diaphragm, and outputs the electrical signal as a sensor signal. It is a semiconductor diaphragm type.

そして、センサ素子２０は、ガラス等よりなる台座２０ａに陽極接合等により一体化されており、この台座２０ａを凹部１１の底面に接着することで、センサ素子２０はコネクタケース１０に搭載されている。   The sensor element 20 is integrated with a pedestal 20a made of glass or the like by anodic bonding or the like, and the sensor element 20 is mounted on the connector case 10 by bonding the pedestal 20a to the bottom surface of the recess 11. .

また、コネクタケース１０には、センサ素子２０と外部の回路等とを電気的に接続するための複数個の金属製棒状のターミナル１２が貫通している。   In addition, a plurality of metal rod-shaped terminals 12 for electrically connecting the sensor element 20 and an external circuit or the like pass through the connector case 10.

本実施形態では、ターミナル１２は黄銅（真鍮）にメッキ処理（例えばＮｉメッキ）を施した材料よりなり、インサートモールドによりコネクタケース１０と一体に成形されることによってコネクタケース１０内にて保持されている。   In the present embodiment, the terminal 12 is made of a material obtained by plating brass (brass) (for example, Ni plating), and is held in the connector case 10 by being integrally formed with the connector case 10 by insert molding. Yes.

各ターミナル１２の一端側（図１中、下方端側）の端部は、センサ素子２０の搭載領域の周囲において凹部１１の底面から突出して配置されている。一方、各ターミナル１２の他端側（図１中、上方端側）の端部は、コネクタケース１０の他端側の開口部１５内に露出している。   The end of each terminal 12 on one end side (the lower end side in FIG. 1) is disposed so as to protrude from the bottom surface of the recess 11 around the mounting area of the sensor element 20. On the other hand, the end of each terminal 12 on the other end side (the upper end side in FIG. 1) is exposed in the opening 15 on the other end side of the connector case 10.

この凹部１１内に突出する各ターミナル１２の一端部とセンサ素子２０とは、金やアルミニウム等のボンディングワイヤ１３により結線され電気的に接続されている。なお、ここで説明したセンサ素子２０とボンディングワイヤ１３との電気的な接続構造が本発明の特徴となる部分であり、この接続構造の詳細については後で説明を行うことにする。   One end of each terminal 12 protruding into the recess 11 and the sensor element 20 are connected and electrically connected by a bonding wire 13 such as gold or aluminum. The electrical connection structure between the sensor element 20 and the bonding wire 13 described here is a feature of the present invention, and details of this connection structure will be described later.

また、凹部１１内にはシリコン系樹脂等からなるシール剤１４が設けられており、このシール剤１４によって、凹部１１に突出するターミナル１２の根元部とコネクタケース１０との隙間が封止されている。   Further, a sealing agent 14 made of silicon resin or the like is provided in the recess 11, and the seal agent 14 seals a gap between the base portion of the terminal 12 protruding into the recess 11 and the connector case 10. Yes.

そして、ハウジング１０の一面１０ａ側において、センサ素子２０やボンディングワイヤ１３およびターミナル１２の根元部等を覆うようにゲル保護層１５が備えられている。   A gel protective layer 15 is provided on the one surface 10 a side of the housing 10 so as to cover the sensor element 20, the bonding wire 13, the root portion of the terminal 12, and the like.

一方、図１において、コネクタケース１０の他端部（図１中、上方側の端部）側は開口部１６となっており、この開口部１６は、ターミナル１２の他端側を例えばワイヤハーネス等の外部配線部材（図示せず）を介して上記外部回路（車両のＥＣＵ等）に電気的に接続するためのコネクタ部となっている。   On the other hand, in FIG. 1, the other end portion (upper end portion in FIG. 1) side of the connector case 10 is an opening portion 16, and this opening portion 16 connects the other end side of the terminal 12 to, for example, a wire harness. This is a connector portion for electrically connecting to the external circuit (such as an ECU of the vehicle) via an external wiring member (not shown).

つまり、開口部１６内に露出する各ターミナル１２の他端側は、このコネクタ部によって外部と電気的に接続が可能となっている。こうして、センサ素子２０と外部との間の信号の伝達は、ボンディングワイヤ１３およびターミナル１２を介して行われるようになっている。   That is, the other end side of each terminal 12 exposed in the opening 16 can be electrically connected to the outside by this connector portion. Thus, signal transmission between the sensor element 20 and the outside is performed via the bonding wire 13 and the terminal 12.

また、図１に示されるように、コネクタケース１０の一端部には、第２のケースとしてのハウジング３０が組み付けられている。具体的には、ハウジング３０には収容凹部３０ａが形成されており、この収容凹部３０ａ内にコネクタケース１０の一端側が挿入されることで、コネクタケース１０にハウジング３０が組みつけられた構成となっている。   As shown in FIG. 1, a housing 30 as a second case is assembled to one end of the connector case 10. Specifically, the housing 30 is provided with a housing recess 30a, and the housing 30 is assembled to the connector case 10 by inserting one end of the connector case 10 into the housing recess 30a. ing.

これにより、第１のケースとしてのコネクタケース１０と第２のケースとしてのハウジング３０とが一体に組み付けられてなるケーシング１００が構成されており、このケーシング１００内にセンサ素子２０が設けられた形となっている。   Thus, a casing 100 is formed in which the connector case 10 as the first case and the housing 30 as the second case are assembled together, and the sensor element 20 is provided in the casing 100. It has become.

このハウジング３０は、例えばアルミニウム（Ａｌ）を主成分とする金属材料よりなるものであり、測定対象物からの測定圧力が導入される圧力導入孔３１と、圧力センサＳ１を測定対象物に固定するためのネジ部３２とを有する。上述したように、測定対象物としては、例えばディーゼル車の排気清浄フィルタであるＤＰＦであり、測定圧力は、そのＤＰＦの差圧などである。   The housing 30 is made of, for example, a metal material mainly composed of aluminum (Al), and fixes the pressure introduction hole 31 into which the measurement pressure from the measurement object is introduced and the pressure sensor S1 to the measurement object. And a screw part 32. As described above, the measurement object is, for example, a DPF that is an exhaust purification filter of a diesel vehicle, and the measurement pressure is a differential pressure of the DPF.

さらに、ハウジング３０における収容凹部３０ａには、コネクタケース１０の先端面１０ａと対向する一面３０ｂが備えられている。この一面３０ｂにコネクタケース１０が接触することで、コネクタケース１０の位置決めが為されるようになっている。   Further, the housing recess 30 a of the housing 30 is provided with a surface 30 b that faces the front end surface 10 a of the connector case 10. The connector case 10 is positioned by the contact of the connector case 10 with the one surface 30b.

また、コネクタケース１０の先端面１０ａには、圧力導入孔３１の外縁を囲むように、環状の溝（Ｏリング溝）１７が形成され、この溝１７内には、Ｏリング１８が配設されており、コネクタケース１０の先端面１０ａとハウジング３０の一面３０ｂとの界面から導入された測定対象物となる流体が洩れないようにされている。   Further, an annular groove (O-ring groove) 17 is formed on the distal end surface 10 a of the connector case 10 so as to surround the outer edge of the pressure introducing hole 31, and an O-ring 18 is disposed in the groove 17. Thus, the fluid as the measurement object introduced from the interface between the front end surface 10a of the connector case 10 and the one surface 30b of the housing 30 is prevented from leaking.

そして、図１に示されるように、ハウジング３０のうち収容凹部３０ａ側の端部がコネクタケース１０の一端部にかしめられることで、かしめ部３６が形成され、それによって、ハウジング３０とコネクタケース１０とが固定され一体化されている。   As shown in FIG. 1, the end portion on the housing recess 30 a side of the housing 30 is caulked to one end portion of the connector case 10 to form a caulking portion 36, thereby forming the housing 30 and the connector case 10. Are fixed and integrated.

こうしてコネクタケース１０とハウジング３０とが組み合わされることで構成された圧力センサＳ１では、圧力導入孔３１を通じて測定対象物となる流体が導入されると、その流体の圧力は、ゲル保護層１５を介して、センサ素子２０、ボンディングワイヤ１３、ターミナル１２に印加されることになる。   In the pressure sensor S <b> 1 configured by combining the connector case 10 and the housing 30 in this manner, when a fluid to be measured is introduced through the pressure introduction hole 31, the pressure of the fluid passes through the gel protective layer 15. Thus, it is applied to the sensor element 20, the bonding wire 13, and the terminal 12.

次に、上記のように構成された圧力センサＳ１におけるセンサ素子２０とボンディングワイヤ１３との電気的な接続構造について説明する。図２は、センサ素子２０とボンディングワイヤ１３との電気的な接続部分の断面構造を示した図である。   Next, an electrical connection structure between the sensor element 20 and the bonding wire 13 in the pressure sensor S1 configured as described above will be described. FIG. 2 is a diagram showing a cross-sectional structure of an electrical connection portion between the sensor element 20 and the bonding wire 13.

図２に示されるように、センサ素子２０が作り込まれた半導体チップ２１の表面にはＳｉＮ等で構成された絶縁膜２２が形成されている。この絶縁膜２２の表面にはＡｌ膜２３が形成されている。このＡｌ膜２３は、本発明における金属膜に相当するもので、絶縁膜２２に形成された図示しないコンタクトホールを通じてセンサ素子２０の所望部位と電気的に接続された構造となっている。   As shown in FIG. 2, an insulating film 22 made of SiN or the like is formed on the surface of the semiconductor chip 21 in which the sensor element 20 is formed. An Al film 23 is formed on the surface of the insulating film 22. This Al film 23 corresponds to the metal film in the present invention, and has a structure in which it is electrically connected to a desired portion of the sensor element 20 through a contact hole (not shown) formed in the insulating film 22.

また、Ａｌ膜２３の表面にボンディングワイヤ１３が接合され、Ａｌ膜２３を介して、ボンディングワイヤ１３が半導体チップ２１に形成されたセンサ素子２０と電気的に接合された構造となっている。   Further, the bonding wire 13 is bonded to the surface of the Al film 23, and the bonding wire 13 is electrically bonded to the sensor element 20 formed on the semiconductor chip 21 via the Al film 23.

そして、半導体チップ２１の上面において露出した部分、つまりＡｌ膜２３および第１保護膜２４の表面に第２保護膜２５が成膜され、この部分が第２保護膜２５によって覆われた状態となっている。この第２保護膜２５は、例えば窒化珪素膜や酸化珪素膜などの無機材料の膜で構成され、被覆性が高く、膜欠陥が無い構造となっている。   Then, the second protective film 25 is formed on the exposed portion of the upper surface of the semiconductor chip 21, that is, on the surfaces of the Al film 23 and the first protective film 24, and this portion is covered with the second protective film 25. ing. The second protective film 25 is formed of an inorganic material film such as a silicon nitride film or a silicon oxide film, and has a structure with high coverage and no film defects.

この第２保護膜２５の厚みは、例えばＡｌ膜２３および第１保護膜２４の表面を膜欠陥無く覆える程度以上、かつ、クラックが生じ難い程度以下に設計されるのが好ましい。実験結果に基づけば、第２保護膜２５を１ｎｍ〜１００ｎｍの厚さとすれば、上記条件を満たす。   The thickness of the second protective film 25 is preferably designed to be, for example, not less than the extent that the surfaces of the Al film 23 and the first protective film 24 can be covered without film defects and not so likely to cause cracks. Based on the experimental results, the above condition is satisfied if the second protective film 25 has a thickness of 1 nm to 100 nm.

続いて、本実施形態における圧力センサＳ１の製造方法について説明する。ただし、圧力センサＳ１の基本的な製造方法に関しては従来と同様であるため、ここでは、本発明の特徴部分となるセンサ素子２０とボンディングワイヤ１３との電気的な接続部分における製造方法に関して説明することとする。   Then, the manufacturing method of pressure sensor S1 in this embodiment is demonstrated. However, since the basic manufacturing method of the pressure sensor S1 is the same as the conventional one, here, a manufacturing method in an electrical connection portion between the sensor element 20 and the bonding wire 13 which is a characteristic portion of the present invention will be described. I will do it.

図３は、図２に示したセンサ素子２０とボンディングワイヤ１３との電気的な接続部分の製造工程を示したものである。   FIG. 3 shows a manufacturing process of an electrical connection portion between the sensor element 20 and the bonding wire 13 shown in FIG.

まず、従来から周知となっている手法によって半導体チップ２１に対してゲージ抵抗などのセンサ素子２０を作り込み、その後、電気化学エッチング等の手法によりダイアフラムを形成する。そして、図３（ａ）に示されるように、熱酸化等によって絶縁膜２２を形成したのち、図３（ｂ）に示されるように、金属膜となるＡｌ膜２３をデポジション等によって形成したのち、パターニングして所望位置に残す。   First, a sensor element 20 such as a gauge resistor is formed on the semiconductor chip 21 by a conventionally known method, and then a diaphragm is formed by a method such as electrochemical etching. Then, as shown in FIG. 3A, after the insulating film 22 is formed by thermal oxidation or the like, an Al film 23 to be a metal film is formed by deposition or the like as shown in FIG. 3B. After that, it is patterned and left at a desired position.

続いて、図３（ｃ）に示されるように、Ａｌ膜２３および絶縁膜２２の表面に窒化珪素膜もしくは酸化珪素膜上に窒化珪素膜を積層した膜等で構成された第１保護膜２４を成膜する。そして、フォトエッチング等を行うことで、第１保護膜２４のうちＡｌ膜２３のパッドとなる領域の上部に形成された部分を除去する。これにより、Ａｌ膜２３のパッドとなる領域が露出した状態となる。   Subsequently, as shown in FIG. 3C, a first protective film 24 composed of a silicon nitride film or a silicon nitride film laminated on the surface of the Al film 23 and the insulating film 22 or the like. Is deposited. And the part formed in the upper part of the area | region used as the pad of Al film 23 among the 1st protective films 24 is removed by performing photoetching etc. FIG. As a result, a region to be a pad of the Al film 23 is exposed.

次に、図３（ｄ）に示されるように、超音波ボンディングなどによってボンディングワイヤ１３をＡｌ膜２３の表面に接合したのち、化学気相堆積法（ＣＶＤ法）によって例えば窒化珪素膜や酸化珪素膜などの無機材料の膜で構成された第２保護膜２５を形成する。これにより、図２に示した電気的な接続構造が完成する。   Next, as shown in FIG. 3D, after bonding wires 13 are bonded to the surface of the Al film 23 by ultrasonic bonding or the like, for example, a silicon nitride film or silicon oxide is formed by a chemical vapor deposition method (CVD method). A second protective film 25 made of an inorganic material film such as a film is formed. Thereby, the electrical connection structure shown in FIG. 2 is completed.

以上説明した本実施形態の圧力センサＳ１では、Ａｌ膜２３および第１保護膜２４の表面に第２保護膜２５を成膜し、これらを第２保護膜２５によって覆った状態としている。そして、第２保護膜２５を例えば被覆性が高く、膜欠陥が無い構造の窒化珪素膜や酸化珪素膜などの無機材料の膜で構成している。   In the pressure sensor S <b> 1 of the present embodiment described above, the second protective film 25 is formed on the surfaces of the Al film 23 and the first protective film 24, and these are covered with the second protective film 25. The second protective film 25 is made of, for example, an inorganic material film such as a silicon nitride film or a silicon oxide film having a structure with high coverage and no film defects.

このため、第２保護膜２５によって覆われたＡｌ膜２３および第１保護膜２４には腐食媒体が浸入しないようにすることができる。これにより、腐食媒体がパッド側に浸入することを防止でき、パッドが腐食されることを防止することが可能となる。   Therefore, the corrosive medium can be prevented from entering the Al film 23 and the first protective film 24 covered with the second protective film 25. As a result, the corrosive medium can be prevented from entering the pad side, and the pad can be prevented from being corroded.

（第２実施形態）
上記第１実施形態では、第２保護膜２５を化学気相堆積法による窒化珪素膜と酸化ケイ素膜のいずれかを含む膜としているが、原子層成長法（ＡＬＤ法）による酸化アルミ膜、酸化チタン膜のいずれかを含む膜としても良い。この場合、酸化アルミ膜と酸化チタン膜とが交互に積層された膜で第２保護膜２５を形成することもできる。 (Second Embodiment)
In the first embodiment, the second protective film 25 is a film containing either a silicon nitride film or a silicon oxide film formed by chemical vapor deposition, but an aluminum oxide film or an oxide formed by an atomic layer growth method (ALD method). A film including any of titanium films may be used. In this case, the second protective film 25 can be formed of a film in which an aluminum oxide film and a titanium oxide film are alternately stacked.

（他の実施形態）
上記実施形態では、金属膜をＡｌ膜２３の一層とし、このＡｌ膜２３の表面に直接ボンディングワイヤ１３を形成する電気的な接続構造を採用する場合について説明した。しかしながら、このような構造は単なる一例を示したものであり、他の構造としても構わない。 (Other embodiments)
In the above-described embodiment, a case has been described in which an electrical connection structure is used in which the metal film is a single layer of the Al film 23 and the bonding wire 13 is directly formed on the surface of the Al film 23. However, such a structure is merely an example, and other structures may be used.

例えば、Ａｌ膜２３の表面にＡｕ膜を形成したり、Ａｌ膜、Ｔｉ膜およびＮｉ膜を配置してＡｕ膜を配置するような構成とし、金属膜が多種類の金属の積層膜で構成されたものとしても構わない。また、単にＴｉ膜のみがＡｌ膜２３とＡｕ膜との間に挟み込まれたような構造であっても構わない。   For example, an Au film is formed on the surface of the Al film 23, or an Al film, a Ti film, and a Ni film are arranged to arrange the Au film, and the metal film is composed of a multi-layered metal film. It does not matter if it is Further, the structure may be such that only the Ti film is sandwiched between the Al film 23 and the Au film.

本発明の第１実施形態における圧力センサの断面構成を示す図である。It is a figure which shows the cross-sectional structure of the pressure sensor in 1st Embodiment of this invention. 図１に示す圧力センサにおけるセンサ素子とボンディングワイヤとの接合部分における電気的な接続構造の断面図である。It is sectional drawing of the electrical connection structure in the junction part of the sensor element and bonding wire in the pressure sensor shown in FIG. 図１に示す圧力センサにおけるセンサ素子とボンディングワイヤとの接合部分における電気的な接続構造の製造工程を示した図である。It is the figure which showed the manufacturing process of the electrical connection structure in the junction part of the sensor element and bonding wire in the pressure sensor shown in FIG.

符号の説明Explanation of symbols

Ｓ１…圧力センサ、１０…コネクタケース、１３…ボンディングワイヤ、２０…センサ素子、２１…半導体チップ（半導体基板）、２２…絶縁膜、２３…Ａｌ膜、２４…第１保護膜、２５…第２保護膜、３０…ハウジング。   S1 ... Pressure sensor, 10 ... Connector case, 13 ... Bonding wire, 20 ... Sensor element, 21 ... Semiconductor chip (semiconductor substrate), 22 ... Insulating film, 23 ... Al film, 24 ... First protective film, 25 ... Second Protective film, 30 ... housing.

Claims (5)

センサ素子（２０）が形成された半導体基板（２１）と、
前記半導体基板（２１）の表面に形成され、前記センサ素子（２０）の所望場所に繋がるコンタクトホールが形成されてなる絶縁膜（２２）と、
前記絶縁膜（２２）の上の所定領域に形成され、前記コンタクトホールを通じて前記センサ素子（２０）と電気的に接続される金属膜（２３）と、
前記金属膜（２３）におけるパッドとなる領域が露出するように、前記金属膜（２３）および前記絶縁膜（２２）の上に形成された第１保護膜（２４）と、
前記金属膜（２３）におけるパッドとなる領域と電気的に接続されたボンディングワイヤ（１３）とを有し、
前記半導体基板（２１）に形成された前記センサ素子（２０）により、圧力導入孔（３１）から導入された圧力測定対象の圧力に応じた検出信号を発生させるように構成される圧力センサにおいて、
前記金属膜（２３）におけるパッドとなる領域、前記第１保護膜（２４）のうち前記パッドの周囲に位置する部分、および、前記ボンディングワイヤ（１３）における前記金属膜（２３）と電気的に接続される部位を覆うように、無機材料からなる第２保護膜（２５）が備えられていることを特徴とする圧力センサ。 A semiconductor substrate (21) on which a sensor element (20) is formed;
An insulating film (22) formed on the surface of the semiconductor substrate (21) and having a contact hole connected to a desired location of the sensor element (20);
A metal film (23) formed in a predetermined region on the insulating film (22) and electrically connected to the sensor element (20) through the contact hole;
A first protective film (24) formed on the metal film (23) and the insulating film (22) such that a region to be a pad in the metal film (23) is exposed;
A bonding wire (13) electrically connected to a region to be a pad in the metal film (23);
In the pressure sensor configured to generate a detection signal according to the pressure of the pressure measurement target introduced from the pressure introduction hole (31) by the sensor element (20) formed in the semiconductor substrate (21),
A region to be a pad in the metal film (23), a portion of the first protective film (24) located around the pad, and the metal film (23) in the bonding wire (13) A pressure sensor comprising a second protective film (25) made of an inorganic material so as to cover a connected portion. 前記第１保護膜（２４）は、窒化珪素膜または酸化珪素膜に窒化珪素膜を積層した膜であり、
前記第２保護膜（２５）は、化学気相成長法により形成された窒化珪素膜と酸化珪素膜のいずれかを含む膜であることを特徴とする請求項１に記載の圧力センサ。 The first protective film (24) is a silicon nitride film or a silicon oxide film laminated with a silicon nitride film,
The pressure sensor according to claim 1, wherein the second protective film (25) is a film including any one of a silicon nitride film and a silicon oxide film formed by a chemical vapor deposition method. 前記第１保護膜（２４）は、窒化珪素膜または酸化珪素膜に窒化珪素膜を積層した膜であり、
前記第２保護膜（２５）は、原子層成長法により形成された酸化アルミ膜と窒化アルミ膜のいずれかを含む膜であることを特徴とする請求項１に記載の圧力センサ。 The first protective film (24) is a silicon nitride film or a silicon oxide film laminated with a silicon nitride film,
The pressure sensor according to claim 1, wherein the second protective film (25) is a film including any one of an aluminum oxide film and an aluminum nitride film formed by an atomic layer growth method. 前記第２保護膜（２５）は、酸化アルミ膜と窒化アルミ膜とが交互に形成された積層膜であることを特徴とする請求項３に記載の圧力センサ。 The pressure sensor according to claim 3, wherein the second protective film (25) is a laminated film in which an aluminum oxide film and an aluminum nitride film are alternately formed. 前記第２保護膜（２５）の厚さは、１ｎｍ以上かつ１００ｎｍ以下であることを特徴とする請求項１ないし４のいずれか１つに記載の圧力センサ。
The pressure sensor according to any one of claims 1 to 4, wherein the thickness of the second protective film (25) is 1 nm or more and 100 nm or less.
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JP2010509573A (en) * 2006-11-13 2010-03-25 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Vacuum diaphragm measuring cell and method for manufacturing such a measuring cell
US8108157B2 (en) 2008-02-18 2012-01-31 The University Of Akron Electrospun fibrous nanocomposites as permeable, flexible strain sensors
JP2016540192A (en) * 2013-10-03 2016-12-22 キストラー ホールディング アクチエンゲゼルシャフト MEMS chip, measuring element and pressure sensor for measuring pressure
JP2019152625A (en) * 2018-03-06 2019-09-12 株式会社デンソー Electronic device

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JP2010509573A (en) * 2006-11-13 2010-03-25 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Vacuum diaphragm measuring cell and method for manufacturing such a measuring cell
US8108157B2 (en) 2008-02-18 2012-01-31 The University Of Akron Electrospun fibrous nanocomposites as permeable, flexible strain sensors
JP2010025843A (en) * 2008-07-23 2010-02-04 Denso Corp Pressure sensor
JP2016540192A (en) * 2013-10-03 2016-12-22 キストラー ホールディング アクチエンゲゼルシャフト MEMS chip, measuring element and pressure sensor for measuring pressure
JP2019152625A (en) * 2018-03-06 2019-09-12 株式会社デンソー Electronic device

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