JP2006196740A - Method and device for manufacturing of electrode foil for electrolytic capacitor - Google Patents

Method and device for manufacturing of electrode foil for electrolytic capacitor Download PDF

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JP2006196740A
JP2006196740A JP2005007393A JP2005007393A JP2006196740A JP 2006196740 A JP2006196740 A JP 2006196740A JP 2005007393 A JP2005007393 A JP 2005007393A JP 2005007393 A JP2005007393 A JP 2005007393A JP 2006196740 A JP2006196740 A JP 2006196740A
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electrode foil
power supply
roller
spark
electrolytic capacitor
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JP4470741B2 (en
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Kiyotaka Morimoto
清隆 森本
Daisuke Suzuki
大介 鈴木
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that spark is generated due to increase of a contact resistance between a feed roller and an electrode foil as an operation time increases when the electrode foil for an electrolytic capacitor is manufactured, thus deteriorating quality and operativity, to provide a manufacturing device of the electrode foil for an electrolytic capacitor which is excellent in quality and a cost, and to provide a manufacturing method using it. <P>SOLUTION: In the manufacturing method of an electrode foil for an electrolytic capacitor for etching an electrode foil 1 by applying a DC current between a feed roller 4 and a pair of cathode plates 7, spark generated in the roller 4 is detected by a metallic roller 9 for spark detection by disposing the metallic roller 9 for spark detection in an upstream side of the roller 4, and a judgement part is provided for carrying out comparison judgement 10 to a preset spark waveform. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は各種電子機器に使用される電解コンデンサの電極箔を製造する際に利用される電解コンデンサ用電極箔の製造装置及びこれを用いた製造方法に関するものである。   The present invention relates to an apparatus for producing an electrode foil for an electrolytic capacitor used when producing an electrode foil of an electrolytic capacitor used in various electronic devices, and a production method using the same.

図4はこの種の従来の電解コンデンサ用電極箔の製造装置における電源給電の処理槽の構成を示す概念図であり、図4において、40は電極箔、41はエッチング液42が充填された処理槽、43と44と45は前記電極箔40を処理槽41内に送り込んで処理槽41内を連続走行させるための給電ローラと槽内ローラと出口ローラ、46は前記処理槽41内に送り込まれた電極箔40がその間を通過するように対向してエッチング液42中に浸漬して配設された陰極板、47はこの陰極板46を負極に、前記給電ローラ43を正極に夫々接続した電源である。   FIG. 4 is a conceptual diagram showing the configuration of a power supply treatment tank in this type of conventional electrolytic capacitor electrode foil manufacturing apparatus. In FIG. 4, 40 is an electrode foil, and 41 is a treatment filled with an etching solution 42. The tanks 43, 44 and 45 are fed into the treatment tank 41 by feeding the electrode foil 40 into the treatment tank 41 and continuously running in the treatment tank 41. The tank and outlet rollers 46 are fed into the treatment tank 41. A cathode plate 47 is disposed so as to be opposed to the electrode foil 40 so as to pass between them, and 47 is a power source in which the cathode plate 46 is connected to the negative electrode and the power supply roller 43 is connected to the positive electrode. It is.

このように構成された従来の電源給電の処理槽を備えた電解コンデンサ用電極箔の製造装置は、エッチング液42が充填された処理槽41内にアルミニウム製の電極箔40を送り込み、この状態で電源47を介して電極箔40と陰極板46間に所定の電圧を印加しながら電極箔40を所定の速度で連続走行させることにより、エッチングを行うように構成されたものであった。   The electrolytic capacitor electrode foil manufacturing apparatus provided with the conventional power supply processing tank configured as described above sends the aluminum electrode foil 40 into the processing tank 41 filled with the etching solution 42 and in this state. Etching is performed by continuously running the electrode foil 40 at a predetermined speed while applying a predetermined voltage between the electrode foil 40 and the cathode plate 46 via the power source 47.

なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献1が知られている。
特開2002−8949号公報
As prior art document information related to the invention of this application, for example, Patent Document 1 is known.
JP 2002-8949 A

しかしながら前記従来の電源給電の処理槽を備えた電解コンデンサ用電極箔の製造装置では、電源給電の処理槽41の主要部分に作業時間の増加と共に経時変化による劣化が現われるようになり、特に、電極箔40を処理槽41内に送り込むと共に電極箔40に正の電圧を印加する給電ローラ43の外周面には前記経時変化による劣化が現われ易くなり、給電ローラ43と電極箔40間の接触抵抗が作業時間の増加と共に増加し、この接触抵抗が一定の値を超えると電気的にスパークが発生して電極箔40を損傷させてしまうため、スパーク発生の都度、装置の稼動を停止して給電ローラ43の外周面をクリーニングする等のメンテナンスを必要とし、この結果、装置の稼働率や生産性が低下するという課題を有していた。   However, in the electrolytic capacitor electrode foil manufacturing apparatus having the conventional power supply processing tank, the main part of the power supply processing tank 41 is deteriorated due to aging as the working time increases. As the foil 40 is fed into the treatment tank 41 and a positive voltage is applied to the electrode foil 40, deterioration due to the change with time is likely to appear on the outer peripheral surface, and the contact resistance between the power supply roller 43 and the electrode foil 40 is reduced. When the contact resistance exceeds a certain value, it increases with an increase in working time, and an electric spark is generated and the electrode foil 40 is damaged. Maintenance such as cleaning of the outer peripheral surface of 43 is required, and as a result, there is a problem that the operating rate and productivity of the apparatus are lowered.

また、このような従来の電源給電の処理槽を備えた電解コンデンサ用電極箔の製造装置によって製造された電解コンデンサ用の電極箔40はスパークによる損傷部が部分的に発生している可能性があるために品質面でも不安定であり、かつ、その損傷部を取り除くための検査と除去作業を必要とし、これが結果的にコストアップに繋がるという大きな課題を有したものであった。   In addition, there is a possibility that a damaged portion due to sparks is partially generated in the electrode foil 40 for an electrolytic capacitor manufactured by the apparatus for manufacturing an electrode foil for an electrolytic capacitor having such a conventional power supply processing tank. Therefore, it is unstable in terms of quality, and requires inspection and removal work for removing the damaged portion, which has a big problem that it leads to cost increase as a result.

本発明はこのような従来の課題を解決し、電極箔の製造工程におけるスパーク発生を未然に防止することにより、品質、コスト面に優れた電極箔を安定して製造することができる電解コンデンサ用電極箔の製造装置及びこれを用いた製造方法を提供することを目的とするものである。   The present invention solves such a conventional problem and prevents the occurrence of sparks in the manufacturing process of the electrode foil, whereby an electrode foil excellent in quality and cost can be stably manufactured. An object of the present invention is to provide an electrode foil manufacturing apparatus and a manufacturing method using the same.

前記課題を解決するために本発明は、特に、搬入部の給電ローラの上流側にスパーク検出用金属ローラを配設し、前記給電ローラで発生するスパークをスパーク検出用金属ローラで検出して予め設定されたスパーク波形との比較判定を行う判定部を備えた電解コンデンサ用電極箔の製造装置とするものである。   In order to solve the above-mentioned problems, the present invention particularly provides a spark detection metal roller on the upstream side of the power feed roller in the carry-in portion, and detects sparks generated by the power feed roller with the spark detection metal roller in advance. It is an apparatus for manufacturing an electrode foil for electrolytic capacitors that includes a determination unit that performs a comparison determination with a set spark waveform.

また、本発明は、特に、給電ローラの上流側にスパーク検出用金属ローラを設け、かつ電極箔を水により濡らして給電ローラを走行させ、この給電ローラで発生するスパークをスパーク検出用金属ローラで検出するようにした電解コンデンサ用電極箔の製造方法とするものである。   In addition, the present invention particularly provides a spark detection metal roller upstream of the power supply roller, wets the electrode foil with water and causes the power supply roller to travel, and sparks generated by the power supply roller are detected by the spark detection metal roller. The method of manufacturing an electrode foil for an electrolytic capacitor that is to be detected.

これにより、電解コンデンサ用電極箔の製造におけるスパーク発生を未然に防止することができる。   Thereby, it is possible to prevent the occurrence of sparks in the production of the electrolytic capacitor electrode foil.

以上のように本発明は、搬入部の給電ローラの上流側に検出用金属ローラを配設し、給電ローラで発生するスパークを検出用金属ローラで検出して予め設定されたスパーク波形との比較判定を行う判定部を備えた製造装置とすることにより、給電ローラで発生するスパークを確実に電極箔に傷つけることなくスパーク検出用金属ローラで検出することができる。   As described above, according to the present invention, the detection metal roller is disposed on the upstream side of the feeding roller in the carry-in portion, and the spark generated by the feeding roller is detected by the detection metal roller and compared with a preset spark waveform. By using the manufacturing apparatus including the determination unit that performs the determination, the spark generated by the power supply roller can be reliably detected by the spark detection metal roller without damaging the electrode foil.

また、電極箔を水で濡らして給電ローラを走行させることにより、給電ローラで発生する微小のスパークでも、水の導電性を利用してスパーク波形を確実にスパーク検出用金属ローラで検出することができる。   In addition, by letting the electrode foil wet with water and running the feed roller, the spark waveform can be reliably detected by the spark detection metal roller using the electrical conductivity of water, even for minute sparks generated by the feed roller. it can.

また、前記電解コンデンサ用電極箔の製造装置を用いて電極箔を製造することにより、給電ローラと電極箔間に発生するスパークを確実に測定することができることから、予め設定されたスパーク波形と比較判定し、設定よりも大きいときは電極箔の走行を停止することができるので、スパークによる損傷部が部分的に発生した電極箔を取り除くことができ、品質及び生産性に優れ、安価の電極箔を提供することができるという効果が得られるものである。   In addition, since the electrode foil is manufactured using the electrolytic capacitor electrode foil manufacturing apparatus, the spark generated between the power supply roller and the electrode foil can be reliably measured, so that it is compared with a preset spark waveform. If it is larger than the set value, it is possible to stop the travel of the electrode foil, so that it is possible to remove the electrode foil in which the damaged part due to the spark is partially generated, and it is excellent in quality and productivity, and is inexpensive The effect that can be provided is obtained.

本発明の電解コンデンサ用電極箔の製造装置は、少なくとも一対の陰極板を配設しエッチング液が充填された処理槽と、この処理槽内に電極箔を送り込む搬入部と、前記処理槽内を電極箔が走行して送り出すように設けた複数の走行ローラと、前記搬入部に設けられた給電ローラを正極に、前記処理槽内に配設された一対の陰極板を負極に夫々接続した電源とからなる電源給電の処理槽を少なくとも備えた前記電極箔のエッチングを行う電解コンデンサ用電極箔の製造装置において、前記搬入部の給電ローラの上流側にスパーク検出用金属ローラを配設し、前記給電ローラで発生するスパークをスパーク検出用金属ローラで検出して予め設定されたスパーク波形との比較判定を行う判定部を備えた電解コンデンサ用電極箔の製造装置を特徴としている。これにより、給電ローラで発生するスパークを未然に防止することができるため、電極箔を傷つけることがない。   An apparatus for producing an electrode foil for an electrolytic capacitor according to the present invention includes a treatment tank in which at least a pair of cathode plates are arranged and filled with an etching solution, a carry-in portion for feeding the electrode foil into the treatment tank, and the inside of the treatment tank. A power source in which a plurality of traveling rollers provided so that the electrode foil travels and feeds out, a power supply roller provided in the carry-in portion are connected to the positive electrode, and a pair of cathode plates disposed in the processing tank are connected to the negative electrode In the electrolytic capacitor electrode foil manufacturing apparatus for etching the electrode foil comprising at least a power supply processing tank comprising: a spark detection metal roller upstream of the power supply roller of the carry-in portion; It features an apparatus for producing an electrolytic capacitor electrode foil having a determination unit that detects a spark generated by a power supply roller with a metal roller for spark detection and performs a comparison determination with a preset spark waveform. To have. As a result, sparks generated by the power supply roller can be prevented in advance, and the electrode foil is not damaged.

また、給電ローラを走行する部分に電極箔を水で濡らす噴霧部を設けているので、スパークの検出精度高めることができる。   Moreover, since the spray part which wets an electrode foil with water is provided in the part which drive | works a feed roller, the detection accuracy of a spark can be improved.

また、本発明の電解コンデンサ用電極箔の製造方法は、少なくとも一対の陰極板を配設しエッチング液が充填された処理槽と、この処理槽内に電極箔を送り込む搬入部と、前記処理槽内を電極箔が走行して送り出すように設けた複数の走行ローラと、前記搬入部に設けられた給電ローラを正極に、前記処理槽内に配設された一対の陰極板を負極に夫々接続した電源からなる電源給電の処理槽を少なくとも備えた前記給電ローラと一対の陰極板間に直流電圧を印加して電極箔のエッチングを行う電解コンデンサ用電極箔の製造方法において、前記給電ローラの上流側にスパーク検出用金属ローラを設け、かつ電極箔を水で濡らして給電ローラを走行させ、この給電ローラで発生するスパークをスパーク検出用金属ローラで検出するようにした電解コンデンサ用電極箔の製造方法を特徴としている。これにより、給電ローラと電極箔間に発生するスパークを確実に測定することができることから、予め設定されたスパーク波形と比較判定し、設定よりも大きいときは電極箔の相行を停止することができるので、スパークによる損傷部が部分的に発生した電極箔を事前に取り除くことができる。   The method for producing an electrode foil for an electrolytic capacitor according to the present invention includes a treatment tank in which at least a pair of cathode plates are arranged and filled with an etching solution, a carry-in portion for feeding the electrode foil into the treatment tank, and the treatment tank. A plurality of traveling rollers provided so that the electrode foil travels inside and feeds out, and a power supply roller provided in the carry-in portion is connected to the positive electrode, and a pair of cathode plates disposed in the processing tank are connected to the negative electrode, respectively. In the method for manufacturing an electrode foil for an electrolytic capacitor in which a DC voltage is applied between the power supply roller having at least a power supply processing tank composed of a power source and a pair of cathode plates to etch the electrode foil, the upstream of the power supply roller A spark detection metal roller is provided on the side, the electrode foil is wetted with water and the feed roller is run, and the spark generated by the feed roller is detected by the spark detection metal roller. It is characterized in the manufacturing method of the electrode foil for capacitor. As a result, the spark generated between the power supply roller and the electrode foil can be reliably measured, so it is compared with a preset spark waveform, and when it is larger than the setting, the phase of the electrode foil can be stopped. Therefore, the electrode foil in which the damaged portion due to the spark is partially generated can be removed in advance.

また、検出したスパークが、予め設定した電圧及び時間と比較判定し、それを超えたときに電極箔の走行を停止するようにしたものである。この場合もスパークによる損傷部が部分的に発生した電極箔を事前に取り除くことができる。   In addition, the detected spark is compared with a preset voltage and time, and when the spark exceeds the detected voltage and time, the travel of the electrode foil is stopped. Also in this case, the electrode foil in which the damaged portion due to the spark is partially generated can be removed in advance.

以下、実施例を用いて、本発明の特に請求項1〜4に記載の発明について説明する。   Examples of the present invention will be described below with reference to examples.

図1は本発明の実施例による電解コンデンサ用電極箔の製造装置における電源給電の処理槽の構成を示した概念図である。同図において、1は電極箔、2はエッチング液3が充填された処理槽、4〜6は前記電極箔1を処理槽2内に送り込んで連続走行させるための給電ローラ、槽内ローラ、出口ローラである。7は前記処理槽2内に送り込まれた電極箔1がその間を通過するようにエッチング液3中に浸漬され対向して配設された陰極板、8はこの陰極板7を負極に、前記給電ローラ4を正極に夫々接続した電源、9は前記給電ローラ4の上流側に配設されたスパーク検出用金属ローラである。   FIG. 1 is a conceptual diagram showing the configuration of a power supply treatment tank in an electrolytic capacitor electrode foil manufacturing apparatus according to an embodiment of the present invention. In the figure, 1 is an electrode foil, 2 is a treatment tank filled with an etching solution 3, and 4 to 6 are power supply rollers for feeding the electrode foil 1 into the treatment tank 2 for continuous running, rollers in the tank, and outlets. Laura. Reference numeral 7 denotes a cathode plate which is immersed in the etching solution 3 so as to pass through the electrode foil 1 fed into the treatment tank 2 so as to pass between them, and 8 denotes the power supply with the cathode plate 7 as a negative electrode. A power source 9 is connected to each of the positive and negative rollers 4, and 9 is a spark detection metal roller disposed on the upstream side of the power supply roller 4.

10は判定部であり、この判定部10は前記給電ローラ4と電極箔1間で発生するスパークを前記スパーク検出用金属ローラ9で検出して予め設定された所定のスパーク波形との比較判定を行ってその結果を表示すると共に、この内容を記録部11に記録するように構成されている。   Reference numeral 10 denotes a determination unit. The determination unit 10 detects a spark generated between the power supply roller 4 and the electrode foil 1 with the spark detection metal roller 9 and performs a comparison determination with a predetermined spark waveform set in advance. The result is displayed and the result is displayed, and the contents are recorded in the recording unit 11.

このように構成された本発明の実施例による電解コンデンサ用電極箔の製造装置における電源給電の処理槽の動作について説明すると、まずアルミニウム箔からなる電極箔1は図1の左側から搬入され、スパーク検出ローラ9を介し、一般に走行ローラと呼ばれる給電ローラ4を介して処理槽2内に充填されたエッチング液3に浸漬され、このエッチング液3内に配設された槽内ローラ5を介して処理槽2の外部まで連続走行され、処理槽2の外部に設けられた出口ローラ6を介して次工程(図1の右方向)へと送られる。   The operation of the power supply treatment tank in the electrolytic capacitor electrode foil manufacturing apparatus according to the embodiment of the present invention will be described. First, the electrode foil 1 made of aluminum foil is carried from the left side of FIG. It is immersed in the etching solution 3 filled in the processing tank 2 through the detection roller 9 and the power supply roller 4, which is generally called a running roller, and processed through the tank roller 5 disposed in the etching solution 3. It continuously travels to the outside of the tank 2 and is sent to the next step (right direction in FIG. 1) via an exit roller 6 provided outside the processing tank 2.

前記処理槽2内には、この処理槽2内に充填されたエッチング液3内を連続走行する電極箔1がその間を通過するように一対の陰極板7が対向して2組設けられており、この陰極板7を負極に、前記給電ローラ4を正極として電源8から所定の電圧を印加した状態で陰極板7間に電極箔1を搬入して連続走行させることにより、エッチング液3を介して電極箔1のエッチングを行うようにしたものである。   Two pairs of cathode plates 7 are provided in the processing tank 2 so as to face each other so that the electrode foil 1 continuously running in the etching solution 3 filled in the processing tank 2 passes between them. The electrode foil 1 is carried between the cathode plates 7 in a state where a predetermined voltage is applied from the power source 8 with the cathode plate 7 as a negative electrode and the power supply roller 4 as a positive electrode, thereby continuously running through the etching solution 3. Thus, the electrode foil 1 is etched.

また、前記スパーク検出用金属ローラ9により、前記給電ローラ4と電極箔1間で発生するスパークを検出し、この結果を判定部10により予め設定された設定のスパーク波形との比較判定を行ってその結果を表示すると共に、この内容を記録部11に記録するようにしており、ここで前記スパーク波形が所定の波形よりも大きい場合には電極箔1の走行を停止し、給電ローラ4の外表面をクリーニング等のメンテナンスを行って給電ローラ4と電極箔1間の接触抵抗を元の状態に戻すようにするものである。   Further, the spark detection metal roller 9 detects a spark generated between the power supply roller 4 and the electrode foil 1, and the determination unit 10 compares the result with a preset spark waveform. The result is displayed and the contents are recorded in the recording unit 11. When the spark waveform is larger than a predetermined waveform, the electrode foil 1 is stopped and the power supply roller 4 is removed. The surface is subjected to maintenance such as cleaning, and the contact resistance between the power supply roller 4 and the electrode foil 1 is returned to the original state.

前記スパーク検出用金属ローラ9を設ける目的をさらに詳しく説明すると、給電ローラ4は電極箔1を連続走行させているために電極箔1の表面の微少な汚れ等が給電ローラ4の外表面に付着する。この給電ローラ4の外表面の汚れは作業時間の増加と共に増加し、結果として給電ローラ4と電極箔1間の接触抵抗が増加してスパークが発生することになる。従って、給電ローラ4には電源8から所定の電圧が連続して印加されているが、この給電ローラ4と電極箔1間の接触抵抗の増加に伴い、給電ローラ4を介して電極箔1に印加される電圧も変動してくるようになるため、この電圧変動を給電ローラ4の上流側に設けたスパーク検出用金属ローラ9を用いてモニターするとともに、給電ローラ4で発生するスパークも検出できるように構成したものである。   The purpose of providing the spark detection metal roller 9 will be described in more detail. Since the power supply roller 4 continuously runs the electrode foil 1, fine dirt on the surface of the electrode foil 1 adheres to the outer surface of the power supply roller 4. To do. The contamination on the outer surface of the power supply roller 4 increases as the working time increases, and as a result, the contact resistance between the power supply roller 4 and the electrode foil 1 increases and sparks are generated. Accordingly, a predetermined voltage is continuously applied from the power source 8 to the power supply roller 4, but the contact resistance between the power supply roller 4 and the electrode foil 1 is increased to the electrode foil 1 through the power supply roller 4. Since the applied voltage also fluctuates, this voltage fluctuation can be monitored using the spark detection metal roller 9 provided on the upstream side of the power supply roller 4, and the spark generated by the power supply roller 4 can also be detected. It is comprised as follows.

また、給電ローラ4の上部に噴霧部を設け、水を噴霧して電極箔1を濡らし、この濡れた電極箔1が給電ローラ4を走行することにより、給電ローラ4と電極箔1間で発生した微小のスパークでも、水の導電性を利用してスパーク波形を確実にスパーク検出用金属ローラ9で検出することができる。   Further, a spray portion is provided on the upper portion of the power supply roller 4 to wet the electrode foil 1 by spraying water, and the wet electrode foil 1 travels on the power supply roller 4, thereby generating between the power supply roller 4 and the electrode foil 1. Even with a small spark, the spark waveform can be reliably detected by the spark detection metal roller 9 by utilizing the conductivity of water.

このことにより、給電ローラ4と電極箔1間に発生するスパークを未然に防止して品質、コスト面に優れたコンデンサ用電極箔を安定して製造することができるようになるものであり、簡単な構成で大きな効果が得られるという貢献度の大なるものである。   As a result, the spark generated between the power supply roller 4 and the electrode foil 1 can be prevented in advance, and a capacitor electrode foil excellent in quality and cost can be stably manufactured. It is a great contribution that a great effect can be obtained with a simple structure.

次に、前記電源給電の処理槽を備えた直流エッチング箔の製造装置及び製造方法について具体的に説明をする。   Next, a manufacturing apparatus and a manufacturing method of a DC etching foil provided with the processing tank for power supply will be described in detail.

図2は電解コンデンサ用電極箔における直流エッチング箔の製造工程図であり、基本的にアルミニウム箔21を前処理した後、ピットを生成させる前段エッチングと、このピットを電解コンデンサの使用電圧に適した径まで拡大する後段エッチングと、脱Cl処理からなる。   FIG. 2 is a production process diagram of a direct current etching foil in an electrode foil for an electrolytic capacitor. Basically, after pretreatment of the aluminum foil 21, pre-etching for generating pits, and the pits are suitable for the working voltage of the electrolytic capacitor. It consists of post-etching that expands to a diameter and de-Cl treatment.

前記前段エッチングの給電ローラ22の上流側にスパーク検出用金属ローラ23を配設し、給電ローラ22とアルミニウム箔21間で発生するスパークを検出するとともに、給電ローラ22とアルミニウム箔21間の電圧変動もモニターする。また、給電ローラ22の上部には噴霧部24が設けられ、水を噴霧してアルミニウム箔21を濡らし、この濡れたアルミニウム箔21が給電ローラ22を走行するようになっている。   A spark detection metal roller 23 is disposed on the upstream side of the power supply roller 22 in the preceding stage etching to detect a spark generated between the power supply roller 22 and the aluminum foil 21 and to change the voltage between the power supply roller 22 and the aluminum foil 21. Also monitor. Further, a spray portion 24 is provided on the upper portion of the power supply roller 22, and water is sprayed to wet the aluminum foil 21, and the wet aluminum foil 21 travels on the power supply roller 22.

前記前段エッチングは、アルミニウム箔21の表面から垂直方向にピットを形成させる。ここでのピット形成は、アルミニウム箔21の表面に数多くのトンネル状のピットを均一に生成させて、そのピットを均一に成長させるかが重要となり、この前段エッチングで使用されるエッチング液は、塩酸に蓚酸、硫酸、リン酸からなる酸またはこれらの塩の少なくとも1つを添加した塩酸水溶液を用いることができる。   In the pre-etching, pits are formed in the vertical direction from the surface of the aluminum foil 21. In forming the pits here, it is important to uniformly generate a number of tunnel-like pits on the surface of the aluminum foil 21 and to grow the pits uniformly. The etching solution used in this first stage etching is hydrochloric acid. An aqueous hydrochloric acid solution to which at least one of acids consisting of oxalic acid, sulfuric acid and phosphoric acid or salts thereof is added can be used.

次に、前段エッチングの後に水洗を行い、後段エッチングを行う。この後段エッチングは前段エッチングでできたピットをアルミニウム箔21の表面溶解を抑えてピットの径拡大を行うもので、エッチング液は硫酸、硝酸のいずれかに蓚酸、クロム酸、酢酸、リン酸、クエン酸、硼酸の少なくとも1つ以上を添加したエッチング液が好ましい。このエッチング液中で直流エッチングすることにより、アルミニウム箔21中の不純物や粒界の影響による表面溶解を抑えて各ピットの径拡大と均一化を図ることができる。最後に、脱Cl処理して直流エッチング箔を得ることができる。   Next, after the pre-etching, washing is performed and post-etching is performed. This post-stage etching is to increase the diameter of the pits by suppressing the surface dissolution of the aluminum foil 21 from the pits formed by the pre-stage etching. An etching solution to which at least one of acid and boric acid is added is preferable. By direct-current etching in this etching solution, surface dissolution due to the influence of impurities and grain boundaries in the aluminum foil 21 can be suppressed, and the diameter of each pit can be enlarged and made uniform. Finally, de-Cl treatment can be performed to obtain a direct current etching foil.

ここで、前記判定部のスパーク波形を図3に示すように電圧を0.4V、時間を0.5msに設定して直流エッチング箔の製造することにより、給電ローラ22とアルミニウム箔21間でのスパークが前記設定より大きく検出されたときはアルミニウム箔の走行を停止するようにした。   Here, as shown in FIG. 3, the spark waveform of the determination unit is set to a voltage of 0.4 V and a time of 0.5 ms to manufacture a DC etching foil. When the spark was detected to be larger than the above setting, the traveling of the aluminum foil was stopped.

このようにして、得られた直流エッチング箔は、その後所定の化成電圧を印加して化成処理することにより、静電容量の高い電極箔を得ることができる。   In this way, the obtained direct-current etching foil is then subjected to a chemical conversion treatment by applying a predetermined chemical conversion voltage, whereby an electrode foil having a high capacitance can be obtained.

また、スパークによる損傷部が部分的に発生した直流エッチング箔を事前に取り除くことができ、品質及び生産性に優れ、安価の直流エッチング箔を得ることができる。   Moreover, the direct current etching foil in which the damaged part due to the spark is partially generated can be removed in advance, and an inexpensive direct current etching foil having excellent quality and productivity can be obtained.

なお、前記直流エッチング箔の製造工程では前段エッチングの給電ローラの上流側にスパーク検出用金属ローラを配設したが、後段エッチングの給電ローラの上流側にもスパーク検出用金属ローラを配設することもでき、前段エッチングと同様の効果を得ることができる。   In the DC etching foil manufacturing process, the spark detection metal roller is disposed upstream of the power supply roller for the pre-stage etching, but the spark detection metal roller is also disposed upstream of the power supply roller for the post-stage etching. It is possible to obtain the same effect as the previous etching.

また、直流エッチング箔を化成するときでも、その化成装置に電源給電の処理槽を備えた装置で化成(陽極酸化)することにより、前記前段エッチングと同様の効果を得ることができる。特に直流エッチング箔の化成は前処理としてボイル処理して水酸化皮膜を形成した後に化成を行うため、その水酸化皮膜が脱落し給電ローラでスパークが発生しやすいので、その効果は大なるものがある。   Further, even when the direct current etching foil is formed, the same effect as that of the previous etching can be obtained by forming (anodic oxidation) using a device having a power supply treatment tank in the forming device. In particular, the formation of a direct current etching foil is performed after a boil treatment is performed as a pretreatment to form a hydroxide film, so that the hydroxide film falls off and sparks are likely to occur in the feed roller. is there.

本発明による電解コンデンサ用電極箔の製造装置およびこれを用いた製造方法は、給電ローラと電極箔間に発生するスパークを未然に防止して品質、コスト面に優れたコンデンサ用電極箔を安定して製造することができるようになるというものであり、高性能、高品質が要望される小型大容量の電解コンデンサ等に特に有用なものである。   An apparatus for producing an electrode foil for an electrolytic capacitor and a production method using the same according to the present invention prevent a spark generated between a power supply roller and an electrode foil, and stabilize a capacitor electrode foil excellent in quality and cost. It is particularly useful for small-sized and large-capacity electrolytic capacitors that require high performance and high quality.

本発明の一実施の形態による電解コンデンサ用電極箔の製造装置における電源給電の処理槽の構成を示した概念図The conceptual diagram which showed the structure of the processing tank of the power supply in the manufacturing apparatus of the electrode foil for electrolytic capacitors by one embodiment of this invention 同電解コンデンサ用電極箔における直流エッチング箔の製造工程図Manufacturing process diagram of DC etching foil in electrode foil for electrolytic capacitor 判定部のスパーク波形図Spark waveform diagram of judgment unit 従来の電解コンデンサ用電極箔の製造装置における電源給電の処理槽の構成を示した概念図The conceptual diagram which showed the structure of the processing tank of the power supply in the conventional manufacturing apparatus of the electrode foil for electrolytic capacitors

符号の説明Explanation of symbols

1 電極箔
2 処理槽
3 エッチング液
4 給電ローラ
5 槽内ローラ
6 出口ローラ
7 陰極板
8 電源
9 スパーク検出用金属ローラ
10 判定部
11 記録部
DESCRIPTION OF SYMBOLS 1 Electrode foil 2 Processing tank 3 Etching liquid 4 Feed roller 5 In-tank roller 6 Outlet roller 7 Cathode plate 8 Power supply 9 Spark detection metal roller 10 Judgment part 11 Recording part

Claims (4)

少なくとも一対の陰極板を配設しエッチング液が充填された処理槽と、この処理槽内に電極箔を送り込む搬入部と、前記処理槽内を電極箔が走行して送り出すように設けた複数の走行ローラと、前記搬入部に設けられた給電ローラを正極に、前記処理槽内に配設された一対の陰極板を負極に夫々接続した電源とからなる電源給電の処理槽を少なくとも備えた前記電極箔のエッチングを行う電解コンデンサ用電極箔の製造装置において、前記搬入部の給電ローラの上流側にスパーク検出用金属ローラを配設し、前記給電ローラで発生するスパークをスパーク検出用金属ローラで検出して予め設定されたスパーク波形との比較判定を行う判定部を備えた電解コンデンサ用電極箔の製造装置。 A treatment tank provided with at least a pair of cathode plates and filled with an etching solution, a carry-in portion for feeding electrode foil into the treatment tank, and a plurality of electrodes provided so that the electrode foil travels inside the treatment tank The power supply power processing tank comprising at least a power supply comprising a traveling roller and a power supply roller connected to the negative electrode and a power supply roller provided in the carry-in portion connected to the negative electrode. In an apparatus for producing an electrode foil for an electrolytic capacitor that etches an electrode foil, a spark detection metal roller is disposed upstream of a power supply roller in the carry-in portion, and a spark generated by the power supply roller is detected by a spark detection metal roller. An apparatus for manufacturing an electrode foil for an electrolytic capacitor, comprising a determination unit that detects and performs comparison determination with a preset spark waveform. 前記給電ローラを走行する部分に電極箔を水で濡らす噴霧部を設けてスパークの検出精度高めるようにした請求項1に記載の電解コンデンサ用電極箔の製造装置。 The apparatus for producing an electrode foil for an electrolytic capacitor according to claim 1, wherein a spray portion for wetting the electrode foil with water is provided in a portion that runs on the power supply roller to increase the detection accuracy of the spark. 少なくとも一対の陰極板を配設しエッチング液が充填された処理槽と、この処理槽内に電極箔を送り込む搬入部と、前記処理槽内を電極箔が走行して送り出すように設けた複数の走行ローラと、前記搬入部に設けられた給電ローラを正極に、前記処理槽内に配設された一対の陰極板を負極に夫々接続した電源からなる電源給電の処理槽を少なくとも備えた前記給電ローラと一対の陰極板間に直流電圧を印加して電極箔のエッチングを行う電解コンデンサ用電極箔の製造方法において、前記給電ローラの上流側にスパーク検出用金属ローラを設け、かつ電極箔を水で濡らして給電ローラを走行させ、この給電ローラで発生するスパークをスパーク検出用金属ローラで検出するようにした電解コンデンサ用電極箔の製造方法。 A treatment tank provided with at least a pair of cathode plates and filled with an etching solution, a carry-in portion for feeding electrode foil into the treatment tank, and a plurality of electrodes provided so that the electrode foil travels inside the treatment tank The power supply including at least a power supply processing tank comprising a traveling roller and a power supply in which a power supply roller provided in the carry-in portion is connected to a positive electrode and a pair of cathode plates disposed in the processing tank are connected to a negative electrode. In the method of manufacturing an electrode foil for an electrolytic capacitor in which a DC voltage is applied between a roller and a pair of cathode plates to etch the electrode foil, a spark detection metal roller is provided upstream of the power supply roller, and the electrode foil is A method of manufacturing an electrode foil for an electrolytic capacitor in which a power supply roller is wetted with water and the spark generated by the power supply roller is detected by a spark detection metal roller. 前記検出したスパークが、予め設定した電圧及び時間と比較判定し、それを超えたときに電極箔の走行を停止するようにした請求項3に記載の電解コンデンサ用電極箔の製造方法。 The method for manufacturing an electrode foil for an electrolytic capacitor according to claim 3, wherein the detected spark is compared with a preset voltage and time, and when the detected spark exceeds the detected voltage, the electrode foil travel is stopped.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102878961A (en) * 2012-09-08 2013-01-16 乳源瑶族自治县东阳光化成箔有限公司 Method for detecting surface topography of aluminum electrode foil of electrolytic capacitor
CN113192754A (en) * 2021-04-23 2021-07-30 新疆众和股份有限公司 Control method of aluminum formed foil voltage withstanding value for aluminum electrolytic capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102878961A (en) * 2012-09-08 2013-01-16 乳源瑶族自治县东阳光化成箔有限公司 Method for detecting surface topography of aluminum electrode foil of electrolytic capacitor
CN113192754A (en) * 2021-04-23 2021-07-30 新疆众和股份有限公司 Control method of aluminum formed foil voltage withstanding value for aluminum electrolytic capacitor

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