JP2006181608A - Machine and method for micro-processing cylindrical inner face - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-processing machine which can reduce the processing cost of the cylindrical inner face of the hole of a workpiece. <P>SOLUTION: The invented micro-processing machine comprises a workpiece holding section, shaping tools 121 and 122, a shaping tool holding section, a pressing tool 150 and a pressing tool holding section. The workpiece holding section is intended to hold a workpiece 10 with a hole having a cylindrical inner face 22. The shaping tools 121 and 122 have nearly the same curvature as the hole of the workpiece 10 and have an outer surface 124 on which projections 126 are placed. The shaping tool holding section is intended to position and hold the shaping tools 121 and 122 inside the hole. The pressing tool 150 presses the inner surface 128 which is on the opposite side of the outer surface 124 of the shaping tools 121 and 122 so that asperities corresponding to the projections 126 are formed on the cylindrical inner face 22 of the hole of the workpiece 10 due to the projections 126 on the outer surface 124 of the shaping tools 121 and 122. The pressing tool holding section is intended to hold the pressing tool 150 so as to be movable in the axial direction of the hole. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a micromachining apparatus and a micromachining method for a cylindrical inner surface.

In order to prevent seizure of the cylinder and the piston and reduce friction, a fine uneven portion is formed by applying a masking material to the cylindrical inner surface of the cylinder hole inner surface and then blasting the entire surface (for example, (See Patent Document 1).
JP 2002-307310 A

  However, there are a process for attaching and peeling the masking material, a process for cleaning the masking material after peeling, and many processing steps are required. Therefore, there is a problem that the total processing time, the equipment cost, and the equipment occupied floor area increase, and the processing cost increases.

  The present invention has been made to solve the above-described problems associated with the prior art, and an object thereof is to provide a micromachining apparatus and a micromachining method that can reduce the machining cost of the cylindrical inner surface of a hole. Another object of the present invention is to provide a workpiece in which the cylindrical inner surface of the hole is finely processed and has a good processing cost.

In order to achieve the above object, the invention described in claim 1
A workpiece holding portion for holding a workpiece having a hole in a cylindrical inner surface;
A mold tool having an outer surface having substantially the same curvature as the hole portion of the workpiece and on which a protrusion is disposed;
A mold tool holding unit for positioning and holding the mold tool inside the hole,
The inner surface located on the opposite side of the outer surface of the mold tool is pressed, and the projections on the outer surface of the mold tool are provided with uneven portions corresponding to the projections on the cylindrical inner surface of the hole of the workpiece. A pressing tool for forming, and
A micromachining apparatus comprising a pressing tool holding portion for holding the pressing tool so as to be movable in the axial direction of the hole portion.

In order to achieve the above object, the invention according to claim 24 provides
A micromachining method for machining a cylindrical inner surface of a hole by the micromachining device according to any one of claims 1 to 23,
The workpiece holding portion holds the workpiece having the hole on the cylindrical inner surface,
A mold tool having an outer surface having substantially the same curvature as the hole portion of the workpiece and having a protrusion disposed thereon is held inside the hole portion by a mold tool holding portion,
While the pressing tool is moved in the axial direction of the hole by the pressing tool holding portion, the inner surface located on the opposite side of the outer surface of the mold tool is pressed by the pressing tool, and the outer surface of the mold tool is pressed. According to another aspect of the present invention, there is provided a micromachining method, wherein a projection and depression are formed on the cylindrical inner surface of the hole of the workpiece by the projection.

The invention according to claim 29 for achieving the above object is as follows.
A workpiece obtained by processing a cylindrical inner surface of a hole by the fine processing method according to any one of claims 24 to 28.

  The present invention configured as described above has the following effects.

  According to the first aspect of the present invention, the inner surface located on the opposite side of the outer surface of the mold tool is pressed by the pressing tool while the pressing tool is moved in the axial direction of the hole by the pressing tool holding portion. Thus, it is possible to form an uneven portion corresponding to the front protrusion on the cylindrical inner surface of the hole of the workpiece by the protrusion on the outer surface of the mold tool. Therefore, a process for sticking and peeling the masking material and a process for cleaning after the masking material is peeled off are unnecessary, and the number of processing steps can be reduced. That is, it is possible to provide a fine processing apparatus that can reduce the processing cost of the cylindrical inner surface of the hole.

  According to the invention of claim 24, the inner surface located on the opposite side of the outer surface of the mold tool is pressed by the pressing tool while the pressing tool is moved in the axial direction of the hole by the pressing tool holding portion. As a result, the projections on the outer surface of the mold tool form an uneven portion corresponding to the front projection on the cylindrical inner surface of the hole of the workpiece. Therefore, the process for sticking and peeling of the masking material and the process for cleaning after peeling of the masking material are unnecessary, and the processing steps are reduced. That is, it is possible to provide a fine processing method that can reduce the processing cost of the cylindrical inner surface of the hole.

  According to the twenty-ninth aspect of the present invention, a fine processing method that can reduce the processing cost is applied to the fine processing of the cylindrical inner surface of the cylinder hole. That is, it is possible to provide a workpiece in which the cylindrical inner surface of the hole is finely processed and has a favorable processing cost.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a side view for explaining a workpiece according to Embodiment 1, and FIG. 2 is a plan view of the workpiece shown in FIG.

  The workpiece is a cylinder 20 disposed in the cylinder block 10 of the engine, and the processing site is a cylinder hole inner surface (cylindrical inner surface of the hole) 22. On the inner surface 22 of the cylinder hole, fine uneven portions are formed. Since the concavo-convex portion functions as a lubricating oil reservoir, it is possible to prevent seizure between the cylinder and the piston and to reduce the friction loss of the cylinder.

  The workpiece and the processing site are not limited to the cylinder of the engine and the inner surface of the cylinder hole, and can be applied to other members in which a hole having a cylindrical inner surface is arranged. Reference numeral 30 denotes a hole disposed on the outer periphery of the cylinder hole inner surface 22 and is used for mounting the cylinder head.

  3 is a side view for explaining the microfabrication apparatus according to the first embodiment, FIG. 4 is a perspective view for explaining the mold tool shown in FIG. 3, and FIG. 5 is a projection of the mold tool. FIG. 6 is a cross-sectional view for explaining the mold tool holding portion shown in FIG. 3, FIG. 7 is a cross-sectional view for explaining the pressing tool and the pressing tool holding portion, and FIG. FIG. 9 is a cross-sectional view for explaining the displacement of the roller of the pressing tool, and FIG. 10 is a cross-sectional view for explaining the rotation of the mold tool.

  The micromachining apparatus 100 includes a workpiece holding unit 110, a mold tool 120, a mold tool holding unit 140, a pressing tool 150, a pressing tool holding unit 170, and a pedestal unit 180.

  The workpiece holding unit 110 is used to hold the cylinder block 10 on which the cylinder 20 having the cylinder hole inner surface 22 is disposed, and is installed to be movable in the depth direction in the drawing.

  The mold tool 120 is a cylindrical hollow body having a flange portion 123, which is formed of a material having a hardness higher than that of the material constituting the cylinder hole inner surface 22. Used to form. The mold tool 120 is divided into two parts and is composed of a plurality of divided mold tools 121 and 122. The diameter of the mold tool 120 is freely adjustable, and a cylindrical mold tool is easily manufactured at low cost. The number of divisions of the mold tool 120 is not limited to two.

  The outer surface 124 of the mold tool 120 has substantially the same curvature as the cylinder hole inner surface 22, and the protrusion 126 is disposed. The protrusion 126 is a microstructure that is slightly smaller than the inner diameter of the cylinder 20 and is made of a material having a hardness greater than that of the material constituting the cylinder hole inner surface 22, for example, diamond or cemented carbide. The interval W and the height H of the protrusion 126 are determined in accordance with the target machining shape (see FIG. 5). Reference numeral 128 denotes an inner surface of the mold tool 120.

  The mold tool holding unit 140 includes a drive unit 144, a control unit (not shown) for numerically controlling the drive unit 144, and a support column 142 on which the drive unit 144 is supported. The drive unit 144 has a holding mechanism 146 for detachably holding the mold tool 120. The drive unit 144 is inserted into the cylinder 20 and moved in the axial direction (vertical direction) Z of the cylinder 20. And is used to rotate around the central axis S of the cylinder 20 (see FIGS. 8 and 10).

  The holding mechanism 146 includes an actuator 147, a guide rail 148, and a guide portion 149 (see FIG. 6). The guide portion 149 is attached to the mold tool 120 and is movable inward along the guide rail 148. The actuator 147 makes it easy to remove the mold tool 120 by pressing the side end surface of the flange portion 123 of the mold tool 120 via the guide portion 149 and contracting the mold tool 120 in the inner direction.

  The pressing tool 150 presses the inner surface 128 located on the opposite side of the outer surface 124 of the mold tool 120, and the projections 126 on the outer surface of the mold tool 120 cause unevenness corresponding to the projections 126 on the cylinder hole inner surface 22. Used to form part.

  The pressing tool 150 is provided with a roller (disk-shaped member) 152 for pressing the inner surface 128 of the mold tool 120 (divided mold tool 121, 122) and a shaft portion for rotatably supporting the roller 152. It has the arm part 154 which has a holding | maintenance part, and the drive mechanism part 156 which has an actuator which drives the arm part 154 (refer FIG. 7). The roller 152 can reduce friction with the mold tool 120 and reduce damage to the inner surface 128 of the mold tool 120 during processing.

  The arm portions 154 that hold the rollers 152 are arranged in pairs (roller pairs) at positions that are axially symmetrical to the pressing tool 150, and four sets are provided at equal intervals in the circumferential direction (see FIG. 8). That is, eight rollers 152 and arm portions 154 are installed. The drive mechanism unit 156 is a fluid type or an electric type, and can control the displacement of the roller 152. There are no particular restrictions on the number of roller pairs set and the location of the roller pairs.

The displacement of the roller 152 is such that the distance D ₁ between the roller pairs defined by the outer shape of the roller 152 is twice the value of the thickness D ₃ of the mold tool 120 including the protrusion 126 from the diameter D _{2 of the} cylinder 20. The roller 152 is moved toward the inner surface 22 of the cylinder hole (see FIG. 9), being controlled so as to be larger than the reduced residual D ₄ (= D ₂ −2 × D ₃ ).

  The pressing tool holding unit 170 includes a driving unit 174 for driving the pressing tool 150 and a support column 172 on which the driving unit 174 is supported. The drive unit 174 is movable in the axial direction Z of the cylinder 20 and is used to move the pressing tool 150 along the cylinder hole inner surface 22. A mechanism for holding the pressing tool 150 in a rotatable manner and allowing it to move in a plane perpendicular to the central axis S of the cylinder 20 can be added to the drive unit 174.

The outer surface 124 of the mold tool 120 on which the protrusion 126 is disposed has substantially the same curvature as the inner surface 22 of the cylinder hole, and the central axis of the pressing tool holding unit 170 and the mold tool 120 is the central axis of the cylinder 20. Since it is possible to match S, the fine irregularities formed on the cylinder hole inner surface 22 have a uniform depth in the circumferential direction of the cylinder 20. The depth of the concavo-convex portion is calculated by the formula (2 × D ₃ + D ₁ −D ₂ ) / 2).

  The pedestal part 180 is fixedly installed substantially horizontally, and has one end where the mold tool holding part 140 is arranged, the other end where the mold tool holding part 140 is arranged, and a central part where the workpiece holding part 110 is arranged. Have.

  As described above, the micromachining device 100 moves the pressing tool 150 in the axial direction Z of the cylinder 20 (the axial direction of the hole) Z by the pressing tool holding unit 170, while the pressing tool 150 moves the outside of the mold tool 120. By pressing the inner surface 128 located on the opposite side of the surface 124, the protrusion 126 on the outer surface 124 of the mold tool 120 causes the protrusion to the cylinder hole inner surface (cylindrical inner surface of the hole portion of the workpiece) 22. Corresponding uneven portions can be formed. Therefore, a process for sticking and peeling the masking material and a process for cleaning after the masking material is peeled off are unnecessary, and the number of processing steps can be reduced.

  Next, the microfabrication method according to Embodiment 1 will be described.

  The cylinder block 10 is placed on the workpiece holding unit 110. The workpiece holding unit 110 moves so that the central axis S of the cylinder 20 of the cylinder block 10 is located directly below the pressing tool 150, and the central axis of the pressing tool 150 and the central axis S of the cylinder 20 coincide with each other. (See FIG. 3).

  The mold tool 120 is driven by the drive unit 144 of the mold tool holding unit 140, is inserted and held inside the cylinder 20 of the cylinder block 10, and is positioned on the cylinder hole inner surface 22 which is a processing site.

  The pressing tool 150 is moved downward in the axial direction Z of the cylinder 20 by the driving unit 174 of the pressing tool holding unit 170 and is disposed at an upper position where it can be inserted inside the mold tool 120 (see FIG. 7).

The drive mechanism 156 of the pressing tool 150 controls the displacement of the roller 152 so that the roller 152 moves toward the inner surface 128 of the mold tool 120, and in order to obtain the desired depth of the uneven portion, distance D ₁ of the between is set appropriately. The pressing tool 150 is further moved downward by the drive unit 174 of the pressing tool holding unit 170 and inserted inside the mold tool 120.

The roller 152 of the pressing tool 150 presses the inner surface 128 of the mold tool 120. The outer surface 124 of the mold tool 120 located on the opposite side of the inner surface 128 is provided with the protrusion 126 and is in contact with the inner surface 22 of the cylinder hole. Uneven portions are formed (see FIG. 8). The depth of the concave-convex portion, as described above, a value corresponding to the distance D ₁ of the inter-roller pair. The roller 152 located in the gap portion of the mold tool 120 (the space between the divided mold tools 121 and 122) does not contact the inner surface 22 of the cylinder hole and does not form an uneven portion.

  When the pressing tool 150 reaches the lower end portion of the mold tool 120, an uneven portion along the axial direction Z of the cylinder 20 is formed on the inner surface 22 of the cylinder hole. The outer surface 124 of the mold tool 120 on which the protrusion 126 is disposed has substantially the same curvature as the inner surface 22 of the cylinder hole, and the central axis of the pressing tool holding unit 170 and the mold tool 120 is the central axis of the cylinder 20. Since it corresponds to S, the concavo-convex portion has a uniform depth in the circumferential direction of the cylinder 20.

  When the displacement of the roller 152 is controlled such that the roller 152 is separated from the inner surface 128 of the mold tool 120 by the driving mechanism unit 156 of the pressing tool 150, the pressing tool 150 is driven by the driving unit 174 of the pressing tool holding unit 170. Thus, it is driven upward and returns to the upper position where it can be inserted inside the mold tool 120 (see FIG. 7).

  The drive unit 144 of the mold tool holding unit 140 rotates the mold tool 120 about the central axis S of the cylinder 20 (see FIG. 10). The rotation angle is 90 degrees. Thereafter, the control of the displacement of the roller 152, the movement and return of the cylinder 20 in the axial direction Z toward the lower side of the pressing tool 150, and the rotation of the mold tool 120 are repeated repeatedly to form minute irregularities over the entire inner surface 22 of the cylinder hole. Forming part.

  The rotation angle of the mold tool 12 is not limited to 90 degrees, and may be 45 degrees, may be changed in the middle, or the cumulative rotation angle may be 360 degrees or more. The mold tool 120 is composed of a plurality of divided mold tools 121 and 122. Since the rotation of the mold tool 120 is numerically controlled, the mold tool 120 is highly accurate and has a seam in the circumferential direction of the inner surface 22 of the cylinder hole. Fine processing without any effect.

  When the micromachining of the inner surface 22 of the cylinder hole is finished, the pressing tool 150 is moved upward by the drive unit 174 of the pressing tool holding unit 170 and is separated from the mold tool 120. When the mold tool 120 contracts inward by pressing the side end surface of the flange portion 123 of the mold tool 120 via the guide portion 149 by the actuator 147 of the holding mechanism 146 of the mold tool holding unit 140, 120 is removed.

  As described above, while the pressing tool 150 is moved in the axial direction Z of the cylinder 20 (the axial direction of the hole) by the pressing tool holding portion 170, the pressing tool 150 moves the opposite side of the outer surface 124 of the mold tool 120. By pressing the inner surface 128 positioned, the protrusion 126 of the outer surface 124 of the mold tool 120 forms an uneven portion corresponding to the protrusion on the inner surface of the cylinder hole (cylindrical inner surface of the hole of the workpiece) 22. Is done. Therefore, the process for sticking and peeling of the masking material and the process for cleaning after peeling of the masking material are unnecessary, and the processing steps are reduced.

  FIGS. 11 to 13 are cross-sectional views for explaining modified examples 1 to 3 according to the first embodiment, and show the shape of the concavo-convex portion.

Distance D ₁ of the inter-roller pair, when the fine processing is not limited to be kept constant, it is also possible to change the inside of the cylinder 20 during descent, this case, along the axial direction of the cylinder 20 The depth of the uneven part changes.

  The portion of the cylinder hole inner surface 22 corresponding to the vicinity of the top dead center and the bottom dead center of the piston tends to have a thin oil film thickness of the lubricating oil. Therefore, for example, the depth of the concavo-convex portion in the portion of the cylinder hole inner surface 22 is greater than the depth of the concavo-convex portion in the portion of the cylinder hole inner surface 22 corresponding to the central portion located between the vicinity of the top dead center and the vicinity of the bottom dead center. In the case of increasing the lubricating oil retention capability, seizure can be prevented even under severe sliding conditions (see FIG. 11).

The distance D ₁ between the roller pairs can be changed after the mold tool 12 is rotated, thereby changing the depth of the concavo-convex portion in the circumferential direction of the cylinder 20.

  The skirt portion of the piston contacts the cylinder hole inner surface 22. Therefore, for example, when the depth of the uneven portion in the portion of the cylinder hole inner surface 22 that contacts the skirt portion is larger than the depth of the uneven portion in the portion of the cylinder hole inner surface 22 that is not in contact with the skirt portion, the skirt portion and the cylinder It is possible to reduce direct contact with the hole inner surface 22 (see FIG. 12).

  When the cylinder head is mounted, if the cylinder hole inner surface 22 is deformed, uneven wear is caused. Therefore, for example, a mold tool in which the height of the protrusion is changed in the circumferential direction is applied, and the depth of the concavo-convex portion on the cylinder hole inner surface 22 is changed from the portion where the cylinder and the cylinder head are fastened to the cylinder hole inner surface 22. When it is made proportional to the shortest distance, it is possible to reduce the influence of uneven wear (see FIG. 13).

  FIGS. 14 and 15 are perspective views for explaining the fourth modification and the fifth modification according to the first embodiment, showing the protrusions of the mold tool, and FIG. 16 explaining the sixth modification. FIG. 2 is a perspective view for showing a mold tool.

  The mold tool is not limited to having the protrusions 126 of the same shape, and if necessary, by changing the shape of the protrusions 126 locally or providing an area where the protrusions 126 are not arranged. It is possible to obtain uneven portions having various shapes (see FIG. 14).

  It is also possible to obtain uneven portions having various shapes by changing the shape of the uneven portion for each divided tool, and in this case, the manufacturing cost of the mold tool is suppressed (see FIGS. 5 and 15). ). It is also possible to divide the outer surface 124 of the mold tool into a plurality of regions, and to provide protrusions having different shapes for the respective sections.

  By arranging the slit 130 in the mold tool 120, the diameter can be freely expanded without being divided. In this case, the shape of the concavo-convex portion can be obtained in a lump over the entire inner surface of the cylinder hole without rotating the mold tool 120 (see FIG. 16). The slits 130 are formed by alternately extending from the upper and lower end surfaces of the mold tool 120, and the width thereof is preferably smaller than the interval W between the protrusions 126.

  FIG. 17 is a perspective view for explaining Modification Example 7 according to Embodiment 1, and shows a pressing tool.

  The pressing tool 160 includes a ball (spherical member) 162, an arm portion 164 having a holding portion for holding the ball 162 rotatably, and a drive mechanism portion 166 having an actuator that drives the arm portion 164. As with the roller 152, the ball 162 can reduce friction with the mold tool 120. Therefore, like the pressing tool 150, the pressing tool 160 can reduce damage to the inner surface 128 of the mold tool 120 during processing.

  As described above, in the first embodiment, it is possible to provide a micromachining apparatus and a micromachining method that can reduce the machining cost of the cylindrical inner surface of the hole. In addition, a micromachining method that can reduce the machining cost is applied to the micromachining of the cylindrical inner surface of the hole. That is, it is possible to provide a workpiece in which the cylindrical inner surface of the hole is finely processed and has a favorable processing cost.

  18 is a cross-sectional view for explaining the microfabrication apparatus according to the second embodiment, and FIG. 19 is a cross-sectional view taken along line XIX-XIX in FIG. In addition, about the member which has the function similar to Embodiment 1, the same code | symbol is used and in order to avoid duplication, the description is abbreviate | omitted.

  The micromachining apparatus according to the second embodiment is generally different from the micromachining apparatus according to the first embodiment with respect to the configuration of the mold tool and the pressing tool.

  The mold tool 220 has slits 230 that are alternately extended from the upper and lower end faces, can be increased in diameter, and is disposed so as to cover the entire inner surface 22 of the cylinder hole.

  The pressing tool 250 includes an outer portion 251, a restraining member 260, and an inner insert 262. The outer part 251 is arranged on the inner side of the mold tool 220 and is composed of six divided pressing members 252 having an arcuate cross section. The six divided pressing members 252 have a cylindrical shape as a whole, are arranged so as to be able to expand the diameter so that the entire inner surface of the mold tool 220 can be pressed, and have a groove portion 253 in which the restraining member 260 is arranged. The restraining member 260 is a ring made of an elastic body, and resiliently restrains the divided pressing member 252 toward the central direction. The inner diameter of the outer portion 251 changes along the axial direction, and the outer portion 251 has two tapered tapered inner surfaces 254 and 255.

  The inner insert 262 has tapered outer surfaces 264 and 265, and the outer peripheral shape thereof corresponds to the tapered inner surfaces 254 and 255 of the outer portion 251. The inner insert 262 is connected to a pressing tool holding portion (not shown) and is held so as to be movable in the axial direction of the cylinder 20.

  When the inner insert 262 is driven by the pressing tool holding portion and is inserted inside the divided pressing member 252 (outer portion 251), the tapered outer surfaces 264 and 265 become the tapered inner surfaces 254 and 255 of the divided pressing member 252. , The split pressing member 252 is moved in the radial direction, and the outer portion 251 is expanded.

  Since the mold tool 220 is arranged outside the divided pressing member 252, the divided pressing member 252 presses the entire inner surface 228 of the mold tool 220. On the outer surface 224 of the mold tool 220 located on the opposite side of the inner surface 228, the protrusion 226 is disposed and is in contact with the cylinder hole inner surface 22, so that the entire surface of the cylinder hole inner surface 22 corresponds to the protrusion 226. Fine irregularities are formed in a lump.

  20 is a graph for explaining the relationship between the machining depth and the pressing load, FIG. 21 is a cross-sectional view for explaining the pushing process of the protrusion, and FIG. 22 is for explaining the completion of the pushing of the protrusion. It is sectional drawing.

  When the outer surface 224 of the mold tool 220 is pressed against the inner surface 22 of the cylinder hole, fine uneven portions corresponding to the protrusions 226 disposed on the outer surface 224 are formed. The processing depth M by the protrusion 226 is related to the pressing load P.

  While the protrusion 226 is being pushed into the cylinder hole inner surface 22 (see FIG. 21), the machining depth M increases as the pressing load P increases. And if the root part of the protrusion part 226 contacts the cylinder hole inner surface 22, and the processing depth M corresponds with the height H of the protrusion part 226 (refer FIG. 22), a surface pressure will fall rapidly. Therefore, when the pressing load P is increased after the pushing of the protrusion 226 is completed, the increase in the processing depth M is very small.

Therefore, detecting that the pressing load P has reached the value P ₁ when the machining depth M coincides with the height H of the protrusion 226 and controlling the pressing tool holding unit that drives the inner insert 262. Thus, the depth of the concavo-convex portion formed on the cylinder hole inner surface 22 can be controlled to be constant. Load P ₁ pressing, for example, using load sensors and displacement sensors, or determined by previously measured before microfabrication, it can be determined during micromachining.

  FIG. 23 is a cross-sectional view for explaining the first modification according to the second embodiment, showing the vicinity of the protrusion of the mold tool, and FIG. 24 for explaining the relationship between the machining depth and the pressing load. FIG. 25 is a cross-sectional view for explaining the process of pushing the protrusion, FIG. 26 is a cross-sectional view for explaining the completion of the push of the protrusion, and FIG. 27 is a view after the push of the protrusion is completed. FIG.

  The mold tool 220 has an elastic structure 235 that is disposed around the protrusion 226 of the outer surface 224. The elastic structure 235 is a sheet-like elastic body, and the height H of the protrusion 226 is based on the surface of the elastic structure 235. Therefore, while the protrusion 226 is being pushed into the cylinder hole inner surface 22 (see FIG. 25), the machining depth M increases as the pressing load P increases.

  When the elastic structure 235 disposed at the base of the protrusion 226 contacts the cylinder hole inner surface 22 and the processing depth M coincides with the height H of the protrusion 226, the surface pressure rapidly decreases (FIG. 26). reference). When the pressing load P is increased after the pressing of the protrusion 226 is completed, the processing depth M is kept substantially constant by the elastic structure 235 being compressed. When the elastic structure 235 reaches the compression limit and does not exhibit elasticity (see FIG. 27), the processing depth M slightly increases as the pressing load P increases.

Accordingly, the value P ₁ at the time of machining depth M coincides with the height H of the protrusions 226, between the value P ₂ when the elastic structure 235 not exhibit elasticity, when the pressing load P is located The depth of the concavo-convex portion formed on the cylinder hole inner surface 22 is constant. Therefore, the control of the pressing load P is easy. The elastic structure 235 is also preferable in that it has an effect of reducing damage to the cylinder hole inner surface 22.

  FIGS. 28 and 29 are cross-sectional views for explaining the second modification and the third modification according to the second embodiment, and show the vicinity of the protrusion of the mold tool.

  The elastic structure 235 is not limited to a configuration in which the elastic structure 235 is disposed so as to surround the protrusion 226. For example, it may be arranged between the outer surface 224 of the mold tool 220 and the base of the protrusion 226 (see FIG. 28). In this case, the elastic structure 235 matches the cross-sectional shape of the protrusion 226. It is a block-like elastic body having a cross-sectional shape. In addition, the outer surface 224 of the mold tool 220 has a two-layer structure, and an elastic structure 235 made of an elastic mechanism including an elastic body such as a spring can be disposed inside (see FIG. 29).

  As described above, according to the second embodiment, it is possible to collectively form fine uneven portions corresponding to the protrusions 226 on the entire inner surface 22 of the cylinder hole. Therefore, the processing speed can be improved.

  30 is a cross-sectional view for explaining the microfabrication apparatus according to the third embodiment, and FIG. 31 is a cross-sectional view for explaining the expansion of the bag shown in FIG. 30. The same as in the first embodiment Similar symbols are used for members having functions, and the description thereof is omitted to avoid duplication.

  The microfabrication apparatus according to the third embodiment is generally the same as the micromachining apparatus according to the first and second embodiments in that it has a deformation suppressing mechanism for suppressing deformation of the inner surface of the cylinder hole during micromachining. Different.

  The deformation suppression mechanism includes a bag body 392, a bag body holding part 384, a pressure generator 396, a piping system 398, and a control part 397.

  The bag body 392 is inserted into the cooling groove 35 disposed on the outer peripheral portion of the cylinder hole inner surface 22 of the cylinder block 10 on which the workpiece holding unit 310 is placed. The bag body 392 is made of an elastic material such as rubber or a polymer material, and can be swelled by introducing a pressurized fluid into the interior and applying pressure.

  The bag body holding portion 384 is attached to the column portion 372 of the pressing tool holding portion, is movable in the axial direction of the cylinder 20, and is used for positioning the bag body 392 inside the groove portion 35 of the cylinder block 10. .

  The pressure generating device 396 is installed in the pedestal portion 380 and is used to generate pressure (pressurized fluid) for inflating the bag body 392. The pressure generator 396 is, for example, a compressor that generates compressed air or a pump that generates compressed water.

  The piping system 398 is used to connect the bag body 392 and the pressure generating device 396 and transmit the pressurized fluid.

  The control unit 397 is used to control the operation of the bag body holding unit 384 and the pressure generating device 396, and generates a pressurized fluid in conjunction with fine processing by a pressing tool.

  At the time of fine machining of the cylinder hole inner surface 22 by the mold tool and the pressing tool, the bag body holding portion 384 is driven, the bag body 392 is positioned inside the groove portion 35 of the cylinder block 10, and the pressure generating device 396 is operated. The bag body 392 bulges when a pressurized fluid is introduced into the bag 392 from the pressure generator 396 via the piping system 398.

  Since the groove portion 35 is disposed on the outer peripheral portion of the cylinder hole inner surface 22, the bag body 392 bulging inside the groove portion 35 applies a pressure toward the center direction of the cylinder 20 to the cylinder hole inner surface 22. It is added from the outside to suppress deformation of the inner surface of the cylinder hole that occurs during microfabrication. Therefore, it is possible to perform fine processing with higher accuracy than in the first and second embodiments. The pressure applied to the bag body 392 is preferably determined based on the pressing force applied to the cylinder hole inner surface 22 by the pressing tool. The pressing force can be calculated from, for example, the pressing pressure and pressing area of the pressing tool.

  FIG. 32 is a cross-sectional view for explaining the first modification according to the third embodiment.

  The deformation suppressing mechanism according to Modification 1 includes a sealing unit 393 for sealing the inside of the groove 35 instead of the bag body 392. Therefore, by introducing a pressurized fluid into the groove 35 sealed by the sealing means 393, it is possible to generate a pressure for suppressing deformation of the inner surface of the cylinder hole at the time of fine processing.

  Therefore, application is easy also in the groove part 35 which has a semi-closed structure where insertion of the bag body 392 is difficult.

  As described above, the third embodiment can perform highly accurate processing by suppressing deformation of the cylindrical inner surface during fine processing.

  The present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the claims.

FIG. 3 is a side view for explaining the workpiece according to the first embodiment. It is a top view of the workpiece shown by FIG. It is a side view for demonstrating the fine processing apparatus which concerns on Embodiment 1. FIG. It is a perspective view for demonstrating the type | mold tool shown by FIG. It is a perspective view for demonstrating the projection part of a type | mold tool. It is sectional drawing for demonstrating the type | mold tool holding part shown by FIG. It is sectional drawing for demonstrating a pressing tool and a pressing tool holding | maintenance part. It is sectional drawing for demonstrating arrangement | positioning of a pressing tool. It is sectional drawing for demonstrating the displacement amount of the roller of a press tool. It is sectional drawing for demonstrating rotation of a type | mold tool. It is sectional drawing for demonstrating the modification 1 which concerns on Embodiment 1, and has shown the shape of the uneven | corrugated | grooved part. It is sectional drawing for demonstrating the modification 2 which concerns on Embodiment 1, and has shown the shape of the uneven | corrugated | grooved part. It is sectional drawing for demonstrating the modification 3 which concerns on Embodiment 1, and has shown the shape of the uneven | corrugated | grooved part. It is a perspective view for demonstrating the modification 4 which concerns on Embodiment 1, and has shown the projection part of the type | mold tool. It is a perspective view for demonstrating the modification 5 which concerns on Embodiment 1, and has shown the projection part of the type | mold tool. It is a perspective view for demonstrating the modification 6 which concerns on Embodiment 1, and has shown the type | mold tool. It is a perspective view for demonstrating the modification 7 which concerns on Embodiment 1, and has shown the pressing tool. FIG. 6 is a cross-sectional view for explaining a microfabrication apparatus according to a second embodiment. It is sectional drawing regarding the line XIX-XIX of FIG. It is a graph for demonstrating the relationship between a process depth and pressing load. It is sectional drawing for demonstrating the pushing in process of a projection part. It is sectional drawing for demonstrating completion of pushing of a projection part. It is sectional drawing for demonstrating the modification 1 which concerns on Embodiment 2, and has shown the projection part vicinity of the type | mold tool. It is a graph for demonstrating the relationship between a process depth and pressing load. It is sectional drawing for demonstrating the pushing in process of a projection part. It is sectional drawing for demonstrating completion of pushing of a projection part. It is sectional drawing for demonstrating after pushing-in of a projection part is completed. It is sectional drawing for demonstrating the modification 2 which concerns on Embodiment 2, and has shown the projection part vicinity of the type | mold tool. It is sectional drawing for demonstrating the modification 3 which concerns on Embodiment 2, and has shown the projection part vicinity of the type | mold tool. FIG. 6 is a side view for explaining a microfabrication apparatus according to a third embodiment. It is sectional drawing for demonstrating expansion | swelling of the bag body shown by FIG. FIG. 9 is a cross-sectional view for explaining a first modification according to the third embodiment.

Explanation of symbols

10. ・ Cylinder block,
20. ・ Cylinder,
22. ・ Inner cylinder bore,
30. ・ Cylinder head mounting hole,
35 .. Groove part,
100 ... Fine processing equipment,
110 .. Workpiece holding part,
120 .. Mold tool,
121, 122 .. Split-type tool,
123-Flange part,
124..Outer surface,
126 .. Projection,
128 .. Inner surface,
130 .. slit,
140 .. Mold tool holding part,
142..
144 .. Drive unit,
146 .. Holding mechanism,
147 .. Actuator,
148 .. Guide rail 149.. Guide part 150..
152. Roller,
154 .. Arm part,
156 .. Drive mechanism section,
160..Pressing tool,
162 ・ ・ Ball
164 .. Arm part,
166 .. Drive mechanism section,
170..Pressing tool holder,
172..
174 .. Drive unit,
180 .. pedestal part,
220 .. Mold tool,
224 .. Outer surface,
226 .. Projection,
228 .. Inner surface,
230 .. slit,
235 .. Elastic structure,
250 ... Pressing tool,
251 .. Outer part,
252 .. split pressing member,
253 .. Groove part,
254, 255 .. Tapered inner surface,
260 .. Restraint member,
262 .. Inner insert,
264, 265.. Tapered outer surface,
310 .. Workpiece holding part,
372..
380 ... the pedestal,
384 .. Bag body holding part,
392..Bag body,
393 .. Sealing means,
396 .. Pressure generator,
397 .. Control part,
398 ... Piping system
D ₁ .... separation distance,
D ₂ ... Diameter,
D _3. Thickness,
D ₄ .
H, height,
M ・ ・ Processing depth,
P, P ₁ , .P ₂ ..Pressing load,
S ・ ・ The central axis,
W ... interval,
Z ... Axial direction.

Claims (29)

A workpiece holding portion for holding a workpiece having a hole in a cylindrical inner surface;
A mold tool having an outer surface having substantially the same curvature as the hole portion of the workpiece and on which a protrusion is disposed;
A mold tool holding unit for positioning and holding the mold tool inside the hole,
The inner surface located on the opposite side of the outer surface of the mold tool is pressed, and the projections on the outer surface of the mold tool are provided with uneven portions corresponding to the projections on the cylindrical inner surface of the hole of the workpiece. A pressing tool for forming, and
A micromachining apparatus comprising a pressing tool holding portion for holding the pressing tool so as to be movable in the axial direction of the hole portion.   The micromachining device for a cylindrical inner surface according to claim 1, wherein the mold tool is cylindrical.   The micromachining apparatus according to claim 2, wherein the mold tool is divided into a plurality of divided mold tools, and the diameter of the mold tool is freely adjustable.   The micromachining apparatus according to claim 3, wherein the mold tool holding unit holds the mold tool rotatably with respect to a plane perpendicular to the axial direction.   5. The micromachining apparatus according to claim 4, wherein the rotation of the mold tool is numerically controlled.   The micromachining apparatus according to claim 2, wherein the mold tool has a slit for making the diameter freely expandable.   The fine processing apparatus according to claim 6, wherein the slit has a width smaller than an interval between the protrusions.   The micromachining apparatus according to any one of claims 1 to 7, wherein the mold tool has protrusions having different shapes.   The micromachining apparatus according to claim 8, wherein the mold tool is divided into a plurality of regions, and each has a protrusion having a different shape.   The micromachining apparatus according to any one of claims 1 to 9, wherein the mold tool includes an elastic structure disposed so as to surround a protrusion on the outer surface.   The micromachining apparatus according to claim 1, wherein the mold tool includes an elastic structure disposed between a base portion of the protrusion and the outer surface.   10. The outer surface of the mold tool has a two-layer structure, and the mold tool has an elastic structure disposed inside the outer surface. The microfabrication apparatus according to item.   The said pressing tool has a disk-shaped member for pressing the inner surface of the said mold tool, and the axial part for supporting the said disk-shaped member rotatably, The Claims 1-12 characterized by the above-mentioned. The fine processing apparatus of any one of Claims.   The said pressing tool has a spherical member for pressing the inner surface of the said mold tool, and a holding part for holding the said spherical member rotatably, The one of Claims 1-12 characterized by the above-mentioned. The microfabrication apparatus according to item 1.   The pressing tool includes a cylindrical outer portion disposed so as to cover the entire inner surface of the mold tool, and an inner insertion body that is inserted inside the outer portion and presses the inner surface of the outer portion. The microfabrication apparatus according to claim 1, comprising:   16. The micromachining apparatus according to claim 15, wherein an outer portion of the pressing tool is divided and includes a plurality of divided pressing members, and the pressing tool is capable of expanding the diameter.   The micromachining apparatus according to claim 16, wherein the pressing tool has a restraining member for resiliently restraining the divided pressing member toward a center direction.   It has a deformation suppressing mechanism for suppressing deformation of the cylindrical inner surface of the hole when forming a concave and convex portion corresponding to the protrusion on the cylindrical inner surface of the hole of the workpiece. The microfabrication apparatus according to any one of claims 1 to 17.   The deformation suppressing mechanism includes a pressurizing unit for applying pressure toward the center of the hole from the outside to the cylindrical inner surface of the hole, and a cylindrical inner surface of the hole of the workpiece. The fine processing apparatus according to claim 18, further comprising: a control unit that operates the pressurizing unit in conjunction with each other when forming the uneven portion corresponding to the protrusion.   18. The micromachining apparatus according to claim 1, wherein the workpiece is a cylinder of an engine, and a cylindrical inner surface of the hole is a cylinder hole inner surface. A deformation suppressing mechanism for suppressing deformation of the cylinder hole inner surface when forming an uneven portion corresponding to the protrusion on the inner surface of the cylinder hole;
The deformation suppressing mechanism includes a pressurizing unit for applying a pressure toward the center of the cylinder from the outside to the cylinder hole inner surface, and an uneven portion corresponding to the protrusion on the cylinder hole inner surface. 21. The microfabrication apparatus according to claim 20, further comprising a control unit for operating the pressurizing unit in conjunction with the pressurizing unit. The cylinder block of the engine has a cooling groove disposed on the outer periphery of the inner surface of the cylinder hole.
The said pressurizing means has a bag body arrange | positioned inside the said groove part, The said bag body expand | swells by introduce | transducing a pressurized fluid, The pressure is generated, It is characterized by the above-mentioned. Fine processing equipment. The cylinder block of the engine has a cooling groove disposed on the outer periphery of the inner surface of the cylinder hole.
The microfabrication according to claim 21, wherein the pressurizing unit includes a sealing unit for sealing the inside of the groove part, and the groove part generates pressure by introducing a pressurized fluid. apparatus. A micromachining method for machining a cylindrical inner surface of a hole by the micromachining device according to any one of claims 1 to 23,
The workpiece holding portion holds the workpiece having the hole on the cylindrical inner surface,
A mold tool having an outer surface having substantially the same curvature as the hole portion of the workpiece and having a protrusion disposed thereon is held inside the hole portion by a mold tool holding portion,
While the pressing tool is moved in the axial direction of the hole by the pressing tool holding portion, the inner surface located on the opposite side of the outer surface of the mold tool is pressed by the pressing tool, and the outer surface of the mold tool is pressed. An uneven portion corresponding to the protrusion is formed on the cylindrical inner surface of the hole of the workpiece by the protrusion.   25. The micromachining method according to claim 24, wherein the depth of the concavo-convex portion formed on the cylindrical inner surface is substantially matched with the height of the projection of the mold tool. The workpiece is an engine cylinder, and the cylindrical inner surface of the hole is a cylinder hole inner surface,
Cylinder hole corresponding to the central portion located between the top dead center and the bottom dead center with respect to the depth of the concave and convex portions at the inner surface of the cylinder hole corresponding to the vicinity of the top dead center and the bottom dead center of the piston 25. The microfabrication method according to claim 24, wherein the depth of the concavo-convex portion at the inner surface portion is increased. The workpiece is an engine cylinder, and the cylindrical inner surface of the hole is a cylinder hole inner surface,
25. The depth of the concavo-convex portion at the portion of the inner surface of the cylinder hole where the skirt portion of the piston contacts is greater than the depth of the concavo-convex portion at the portion of the inner surface of the cylinder hole that is not in contact with the skirt portion. Fine processing method. The workpiece is an engine cylinder, and the cylindrical inner surface of the hole is a cylinder hole inner surface,
25. The microfabrication method according to claim 24, wherein the depth of the concavo-convex portion on the inner surface of the cylinder hole is proportional to the shortest distance from a portion where the cylinder and the cylinder head are fastened to the inner surface of the cylinder hole.   A workpiece obtained by processing the cylindrical inner surface of the hole by the fine processing method according to any one of claims 24 to 28.