JP2006160422A - Micro parts feeder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro parts feeder capable of adjusting an excitation direction of a shaker and improving the transfer capability of the micro parts. <P>SOLUTION: In this micro parts feeder, oscillation is generated by a piezoelectric oscillation portion 302, and the oscillation is applied to a first transfer member 320 and a second transfer member 330. Besides, the micro parts are transferred by oscillation applied to the first transfer member 320 and the second transfer member 330. A side surface angle adjusting dial is provided at a surface in which an oscillation prevention blade spring 380 is attached. When the side surface angle adjusting dial is rotated, one side surface on an oscillation prevention deck 301 and one side surface of the piezoelectric oscillation portion 302 are rotated. When the side surface angle adjusting dial is rotated in a reverse direction, the one side surface on the oscillation prevention deck 301 and the surface of the piezoelectric oscillation portion 302 are rotated in a reverse direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a micropart supply device capable of transferring flat microparts by vibration.

2. Description of the Related Art Conventionally, a parts feeder is well known as one of parts supply apparatuses that align parts and supply parts by applying vibration to the parts. This parts feeder can adjust the posture of the part by applying vibration to the part and supply it to the next process.
Japanese Patent Laid-Open No. 2003-285921

  However, in recent years, an object whose posture is adjusted and conveyed by a parts feeder has been miniaturized and miniaturized (hereinafter referred to as a micropart). On the other hand, there is a demand for improvement in the ability to carry microparts.

  As a result, it is necessary to increase the excitation force of the vibration exciter in order to improve the conveyance capability of minute parts. However, since the microparts are light in weight, there is a problem that the transport direction is deviated when a slight vibration direction shift occurs. In addition, when the carrying capacity is increased, the vibration direction differs for each individual vibrator, and even if the position of the vibrator is adjusted uniformly, in the mass production process, the vibration direction of the vibrator and the conveyance direction of the minute parts There was a problem that a shift occurred.

  In particular, the component supply device described in Patent Document 1 has two routes, a route for conveying the component and a route for returning the component, so that there is a problem that the displacement is likely to occur due to the arrangement relationship between the vibrator and the two routes. there were.

  An object of the present invention is to provide a minute component conveying apparatus that can adjust the exciting direction of a vibration exciter and can improve the transfer capability of minute components.

Means and effects for solving the problems

(1)
A microcomponent supply device according to the present invention is a microcomponent supply device that applies vibration to a microcomponent and transfers the microcomponent in a straight line, and is provided with an exciter that applies vibration to the microcomponent, and from the vibrator A conveyance path for conveying minute parts by the generated vibration, a support base for supporting the vibration exciter, and a vibration isolating plate member for fixing the fixed surface of the support base and the fixed surface of the vibration exciter The support base and the vibrator have an angle adjustment device that can change the angle of the fixed surface.

  In the micropart supply device according to the present invention, vibration is oscillated by the vibrator, and the vibration is applied to the conveyance path. Then, the micro parts are transferred by the vibration applied to the conveyance path. Further, the vibration exciter is fixed on the support base by a vibration isolation plate member.

  In this case, the support base and the vibration exciter have an angle adjusting device on the fixed surface to which the vibration isolating plate member is attached, so that the direction of the fixed surface can be adjusted. The deviation from the direction can be corrected. As a result, it is possible to give vibrations suitable for the transfer direction of the minute parts to the minute parts. Therefore, even when the transfer capability of the vibrator is improved, vibration suitable for the transfer direction of the minute parts can be given to the transfer path, so that the transfer capability of the minute parts of the minute component supply device can be improved. .

(2)
The angle adjusting device may further include an angle indicating device, and may change the direction of the fixed surface in accordance with an instruction from the angle indicating device.

  In this case, the vibration direction of the vibration exciter can be changed by changing the direction of the fixed surface by adjusting the angle indicating device. Can be corrected. Furthermore, by adjusting the angle of the fixed surface for attaching the vibration isolator member, not the portion directly related to vibration transmission (vibration transmission direction side) but the portion indirectly related to vibration transmission ( Since the vibration direction can be adjusted by holding the fixed end side of the vibration and adjusting the angle), a subtle deviation in the vibration direction can be easily adjusted.

(3)
The angle adjusting mechanism may further include an angle indicating device and a plurality of pins, and may change the protruding amounts of the plurality of pins protruding from the fixed surface in accordance with an instruction from the angle indicating device.

  In this case, the amount of protrusion of the plurality of pins protruding from the fixed surface can be changed by adjusting the angle indicating device, so that the vibration direction of the vibrator can be easily changed. It is possible to correct the deviation between the vibration direction and the transfer direction of the minute parts. Furthermore, the angle between the fixed surface and the vibration isolating plate member can be adjusted by projecting the plurality of pins from the fixed surface for attaching the vibration isolating plate member. In this case, the direction of vibration is not determined by the part directly related to vibration transmission (vibration transmission direction side) but by the part indirectly related to vibration transmission (holding the fixed end side of the vibration and adjusting the angle). Since it can be adjusted, fine adjustment of the deviation can be easily performed.

(4)
The angle adjusting device may further include a plate-like member having a predetermined angle, and the plate-like member may be provided between the fixed surface and the vibration-proof plate member.

  In this case, by providing a plate-like member having a predetermined angle between the fixed surface and the vibration-proof plate-like member, the vibration direction of the vibrator can be easily changed. And the deviation of the transfer direction of the minute parts can be corrected.

Hereinafter, first to third embodiments according to the present invention will be described.
(First embodiment)
FIG. 1 is a schematic perspective view showing an example of a micropart supply device 100 according to the first embodiment of the present invention. FIG. 1A shows the top surface of the microcomponent supply device 100, and FIG. 1B shows the side surface of the microcomponent supply device 100.

  As shown in FIGS. 1A and 1B, the microcomponent supply apparatus 100 includes a parts feeder 200, a linear feeder 300, and a stage 900. Further, as shown in FIG. 1B, the parts feeder 200 includes a bowl-shaped transport unit 210 and a piezoelectric vibration unit 220.

  In micropart supply device 100 in the present embodiment, parts feeder 200 and linear feeder 300 are provided on stage 900. A small component carrying-in unit 311 of the linear feeder 300 is connected to the small component discharge unit 211 of the parts feeder 200. Further, the receiving path 217 of the parts feeder 200 is connected to the micro-component reflux path 317 of the linear feeder 300.

  The vibration oscillated by the piezoelectric vibration unit 220 of the parts feeder 200 is given to the bowl-shaped transport unit 210 placed on the piezoelectric vibration unit 220. In the bowl-shaped transport unit 210, a spiral minute component transport path is provided along the inner periphery of the bowl-shaped transport unit 210 (not shown). The micro component 800 is supplied to the center bottom of the bowl-shaped transport unit 210, the micro component 800 is transported on the spiral transport path by vibration from the piezoelectric vibration unit 220, and the micro component of the linear feeder 300 is transported from the micro component discharge unit 211. It is given to the carry-in part 311.

  In addition, as will be described later, the linear feeder 300 is provided with a piezoelectric vibration unit 302, and vibrations oscillated by the piezoelectric vibration unit 302 are applied to each conveyance path of the linear feeder 300. Thereby, the micro component supply apparatus 100 can supply the micro component 800 to the next process of the micro component supply apparatus 100.

  Further, when there is a minute part 800 that has not been arranged in a predetermined posture in the conveyance path of the linear feeder 300, or when trouble occurs in the next process and the minute part 800 is not conveyed to the next process side, the return member Thus, the micro component 800 is returned from the micro component recirculation path 317 to the center bottom of the bowl-shaped transport unit 210 via the receiving path 217 of the parts feeder 200.

  Next, FIG. 2 is a schematic perspective view showing an example of the shape of the micro component 800 conveyed in the present embodiment.

  As shown in FIG. 2, the micro component 800 is a rectangular parallelepiped having a length L, a height H, and a width B. The relationship between the length L, the height H, and the width B has a relationship of H <B <L. As described above, the micro component 800 is a flat micro component.

  Further, the microcomponent supply apparatus 100 often has electrodes formed on one surface of the microcomponent 800. Generally, the microcomponent 800 has a length L of about 3.2 to 8 mm. The width B is about 2.5 to 5.0 mm, and the height H is about 0.8 to 1.7 mm.

  Next, FIG. 3 is a side view showing details of the linear feeder 300.

  The linear feeder 300 includes a vibration isolation table 301, a piezoelectric vibration unit 302, a vibration transmission unit 303, a first transport member 320, a second transport member 330, a connection member 340, and a third transport member 350. Further, the vibration isolator 301 is provided with a side surface angle adjustment dial 500, and the piezoelectric vibration unit 302 is provided with a side surface angle adjustment dial 400. Details of the side surface angle adjustment dials 400 and 500 will be described later.

  As shown in FIG. 3, the piezoelectric vibration unit 302 is held on the top of the vibration isolation table 301 by a plurality of vibration isolation leaf springs 380. Details of this will be described later. On the upper part of the piezoelectric vibration unit 302, a vibration transmission unit 303 is held by a plurality of leaf springs 390. A first transport member 320 is fixed to the upper portion of the vibration transmission unit 303, a second transport member 330 is connected to one end side of the first transport member 320, and a connection member is connected to a side surface of the first transport member 320. 340 is added. The first transport member 320 is provided with a third transport member 350 via a plurality of leaf springs 360.

  With the above configuration, the vibration oscillated by the piezoelectric vibration unit 302 is transmitted to the first transport member 320 and the second transport member 330 by the leaf spring 390 and further transmitted to the third transport member 350 by the leaf spring 360.

  Next, FIG. 4 is a perspective view for explaining details of a fixed state of the vibration isolation table 301 and the piezoelectric vibration unit 302.

  As shown in FIG. 4, a piezoelectric vibration unit 302 is provided on the vibration isolation table 301. Bolt fixing holes BH1 and bolt fixing holes BH2 are provided on one side of the vibration isolator 301, and similar bolt fixing holes (not shown) are provided on the other side of the vibration isolator 301.

  In addition, a bolt fixing hole BH3 and a bolt fixing hole BH4 are provided in the lower part of one side surface of the piezoelectric vibration unit 302, and a bolt fixing hole (not shown) is similarly formed in the lower part of the other side surface of the piezoelectric vibration unit 302. Is provided.

  Further, a bolt fixing hole BH5 and a bolt fixing hole BH6 are provided in the upper part of one side surface of the piezoelectric vibration unit 302, and a bolt fixing hole (not shown) is similarly formed in the upper part of the other side surface of the piezoelectric vibration unit 302. Is provided.

  A bolt fixing hole BH7 and a bolt fixing hole BH8 are provided in the lower part of one side surface of the vibration transmitting unit 303, and a bolt fixing hole (not shown) is similarly provided in the lower part of the other side surface of the vibration transmitting unit 303. .

  In addition, the four vibration-proof leaf springs 380 are provided with four holes, and the two leaf springs 390 are also provided with four holes.

  As a specific example of fixing the piezoelectric vibration unit 302 to the vibration isolation table 301, two bolt fixing holes BH 1 and BH 2 provided on one side surface of the vibration isolation table 301 are provided via holes of the vibration isolation leaf spring 380. Bolts B are respectively screwed together. In addition, two bolts B are screwed into bolt fixing holes BH3 and BH4 provided at the lower portion of one side surface of the piezoelectric vibration portion 302 through holes of the vibration-proof plate springs 380, respectively.

  Similarly, two bolts B are respectively screwed into the bolt fixing holes provided on the other side surface of the vibration isolation table 301 through the holes of the vibration isolation leaf springs 380 (not shown). Two bolts B are screwed into bolt fixing holes provided on the other side surface of the piezoelectric vibration portion 302 through holes of the vibration-proof leaf spring 380 (not shown).

  On the other hand, the two bolts B are screwed into the bolt fixing holes BH5 and BH6 provided at the upper part of one side surface of the piezoelectric vibrating portion 302 through the holes of the leaf springs 390, respectively. Two bolts B are screwed into bolt fixing holes BH7 and BH8 provided on one side surface of the vibration transmitting portion 303 through holes of the leaf springs 390, respectively.

  Further, two bolts are respectively screwed into the bolt fixing holes provided on the upper part of the other side surface of the piezoelectric vibrating portion 302 through the holes of the leaf springs 390. Two bolts are respectively screwed into the bolt fixing holes provided on the other side surface of the vibration transmitting portion 303 through the holes of the leaf springs 390.

  As described above, the piezoelectric vibration unit 302 is fixed on the vibration isolation table 301 via the vibration isolation plate spring 380, and the vibration transmission unit 303 is fixed on the piezoelectric vibration unit 302 via the plate spring 390. Established. Thereby, the vibration oscillated by the piezoelectric vibration unit 302 is applied to the first conveyance member 320 and the second conveyance member 330 via the vibration transmission unit 303.

  In this case, the vibration in the direction of the arrow X1 oscillated by the piezoelectric vibration unit 302 is the arrow X2 when the excitation capability of the piezoelectric vibration unit 302 is improved or due to the overall balance of the micropart supply device 100. Or the direction of the arrow X3. Hereinafter, a method for adjusting the vibration direction deviation (adjusting the directions of the arrows X2 and X3 to the direction of the arrow X1) will be described in detail.

  FIG. 5 is a schematic perspective view showing an example of a side surface before adjusting the vibration direction of the piezoelectric vibration unit 302, and FIG. 6 is a schematic view showing an example of the side surface after adjusting the vibration direction of the piezoelectric vibration unit 302. FIG.

  As shown in FIG. 5, one side surface of the piezoelectric vibration unit 302 includes a surface 410 and a surface 420. Further, a side surface angle adjustment dial 400 is provided on the front surface of the piezoelectric vibration unit 302, and a side surface angle adjustment dial 500 is provided on the front surface of the vibration isolation table 301.

  As shown in FIG. 5, the surface 410 and the surface 420 on one side before adjusting the vibration direction of the piezoelectric vibration unit 302 are a single plane. Next, as shown in FIG. 6, when the side surface angle adjustment dial 400 is rotated in the direction of arrow R1, the surface 410 on one side surface of the piezoelectric vibrating section 302 is in the direction of arrow R2 (direction around the vertical axis). Rotate. That is, the surface 410 has a different inclination from the surface 420. In addition, when the side surface angle adjustment dial 400 is rotated in the direction opposite to the arrow R1, the surface 410 on one side surface of the piezoelectric vibration unit 302 rotates in the direction opposite to the arrow R2 (direction around the vertical axis). The rotation angle of the surface 410 is preferably in the range of about 0.00 degrees to ± 5.00 degrees.

  Similarly, as shown in FIG. 6, when the side surface angle adjustment dial 500 is rotated in the direction of arrow R1, the surface 510 on one side surface of the vibration isolator 301 rotates in the direction of arrow R2 (the direction around the vertical axis). To do. Further, when the side surface angle adjustment dial 500 is rotated in the direction opposite to the arrow R1, the surface 510 on one side surface of the vibration isolator 301 rotates in the direction opposite to the arrow R2 (direction around the vertical axis). Note that the rotation angle of the surface 510 is preferably in the range of about 0.00 degrees to ± 5.00 degrees.

  The direction of the vibration direction arrow X2 or X3 that is vibrated in the piezoelectric vibrating portion 302 by fixing the vibration-proof plate spring 380 to the surface 410 and the surface 510 rotated in the direction of the arrow R2 is indicated by the arrow X1. The vibration directions of the first transport member 320, the second transport member 330, and the third transport member 350 can be optimally adjusted.

  With the above configuration, the direction of the surface 410 of the piezoelectric vibration unit 302 and the surface 510 of the vibration isolation table 301 can be adjusted by the side surface angle adjustment dials 400 and 500. The deviation from the 800 transfer direction can be corrected. As a result, vibration suitable for the direction of transfer of the micro component 800 can be applied to the first transport member 320 and the second transport member 330, and the vibration can be applied to the micro component 800. Therefore, even if the excitation capability of the piezoelectric vibration unit 302 increases, the transfer capability of the microcomponent 800 of the microcomponent supply device 100 can be improved without causing a shift.

  In the present embodiment, the angle of the surface 410 is adjusted by the side surface angle adjustment dial 400. However, the present invention is not limited to this. The angle of the surface may be adjusted.

  That is, you may further provide the structure which adjusts the angle of the part (fixed surface of the leaf | plate spring 390) directly related to vibration transmission. In this case, if the deviation of the vibration direction is large, the angle of the part directly related to vibration transmission is adjusted, and if fine adjustment of the vibration transmission direction is performed, the part of the part indirectly related to vibration transmission is adjusted. By adjusting the angle, the direction of vibration transmission can be adjusted more easily.

  Further, the side surface angle adjustment dials 400 and 500 are provided, but the present invention is not limited to this, and the configuration may be such that the angles of all the surfaces are adjusted by one side surface angle adjustment dial.

(Second Embodiment)
The anti-vibration table 301b and the piezoelectric vibration unit 302b in the second embodiment are different from the configurations of the anti-vibration table 301 and the piezoelectric vibration unit 302 in the first embodiment in the following points.

  7 and 8 are perspective views showing one side surface of the vibration isolator 301b and the piezoelectric vibration unit 302b according to the second embodiment.

  As shown in FIG. 7, the piezoelectric vibration unit 302 b in the second embodiment has a square pin protrusion adjustment dial 401 instead of the side surface angle adjustment dial 400, and instead of the surface 410 of the piezoelectric vibration unit 302. And has a surface 450. Further, the surface 450 is provided with square pins 451 to 457. The vibration isolation table 301 b has a square pin protrusion adjustment dial 501 instead of the side surface angle adjustment dial 500, and a surface 550 instead of the surface 510 of the vibration isolation table 301. Further, the surface 550 is provided with square pins 551 to 557.

  By rotating the square pin protrusion adjustment dials 401 and 501 shown in FIG. 8 in the direction of the arrow R1, the square pins 451 to 457 protrude from the surface 450, and the square pins 551 to 557 protrude from the surface 550. .

  In this case, the projection amounts of the square pin 451 and the square pin 454, the square pin 452, the square pin 455 and the square pin 457, and the square pin 453 and the square pin 456 are different, and as shown in FIG. The projection amount of the square pin 454 is the largest, the projection amount of the square pin 452, the square pin 455, and the square pin 457 is the second largest, and the projection amount of the square pin 453 and the square pin 456 is the smallest.

  On the other hand, the projection amounts of the square pin 551 and the square pin 554, the square pin 552, the square pin 555 and the square pin 557, and the square pin 553 and the square pin 556 are different from each other, and as shown in FIG. The projection amount of the square pin 554 is the largest, the projection amount of the square pin 552, the square pin 555, and the square pin 557 is the next largest, and the projection amount of the square pin 553 and the square pin 556 is the smallest.

  Although not shown, when the square pin protrusion adjustment dials 401 and 501 are rotated in the direction opposite to the arrow R, the square pins 451 to 457 protrude from the surface 450, and the square pins 551 to 557 are projected. Protrudes from the surface 550.

  In this case, the projection amounts of the square pin 451 and the square pin 454, the square pin 452, the square pin 455 and the square pin 457, and the square pin 453 and the square pin 456 are different from each other. The projection amount of the square pin 452, the square pin 455 and the square pin 457 is the next smallest, and the projection amount of the square pin 453 and the square pin 456 is the largest.

  On the other hand, the projection amounts of the square pin 551 and the square pin 554, the square pin 552, the square pin 555 and the square pin 557, and the square pin 553 and the square pin 556 are different, and the projection amounts of the square pin 551 and the square pin 554 are different. The projection amount of the square pin 552, the square pin 555 and the square pin 557 is the next smallest, and the projection amount of the square pin 553 and the square pin 556 is the largest.

  Therefore, the mounting angle of the vibration-proof plate spring 380 can be adjusted by the square pins 451 to 457 and the square pins 551 to 557. Note that the angle pins 451 to 457 protruding from the surfaces 450 and 550 and the anti-vibration leaf springs 380 attached by the angle pins 551 to 557 are the angle pins 451 to 457 and the angle pins 551 to 551. Compared with the case where the square pin 557 does not protrude, it is preferably within 0.00 to ± 5.00 degrees.

  An excitation direction that is vibrated in the piezoelectric vibration unit 302 by fixing a vibration-proof plate spring 380 to the surfaces 450 and 550 and the protruding square pins 451 to 457 and square pins 551 to 557, The direction of the arrow X2 or X3 can be adjusted to the direction of the arrow X1, and the vibration directions of the first transport member 320, the second transport member 330, and the third transport member 350 can be optimally adjusted.

  As described above, the direction of the vibration isolating leaf spring 380 attached to the surface 450 and the surface 550 of the piezoelectric vibration portion 302 can be adjusted by the square pin protrusion amount adjustment dials 401 and 501, so that the piezoelectric vibration The deviation between the vibration direction of the portion 302 and the transfer direction of the micro component 800 can be corrected. As a result, vibration suitable for the direction of transfer of the micro component 800 can be applied to the first transport member 320 and the second transport member 330, and the vibration can be applied to the micro component 800. Therefore, the transfer capability of the micro component 800 of the micro component supply apparatus 100 can be improved.

  In the present embodiment, the square pin 451 to the square pin 457 are projected from the surface 450 by the square pin projection amount adjustment dial 401, but the present invention is not limited to this. The angle of the upper surface of the side surface of the piezoelectric vibration unit 302 may be adjusted.

  That is, you may further provide the structure which adjusts the angle of the part (fixed surface of the leaf | plate spring 390) directly related to vibration transmission. In this case, if the deviation of the vibration direction is large, the angle of the part directly related to vibration transmission is adjusted, and if fine adjustment of the vibration transmission direction is performed, the part of the part indirectly related to vibration transmission is adjusted. By adjusting the angle, the direction of vibration transmission can be adjusted more easily.

  In this embodiment, the square pins 451 to 457 and the square pins 551 to 557 are used. However, the shape or number of the pins is not limited to this, and other shapes are used. Any other number may be used. For example, five cylindrical pins may be provided, or three cylindrical pins and four square pins may be provided.

(Third embodiment)
The anti-vibration table 301c and the piezoelectric vibration unit 302c in the third embodiment are the same as the anti-vibration table 301c and the piezoelectric vibration unit 302 in the first embodiment, and the anti-vibration table 301b and the piezoelectric in the second embodiment. The following points are different from the configuration of the type vibrating section 302b.

  FIG. 9 and FIG. 10 are perspective views showing one side surface of the vibration isolation table 301b and the piezoelectric vibration unit 302c according to the third embodiment.

  As shown in FIG. 9 and FIG. 10, the vibration isolation table 301 c and the piezoelectric vibration unit 302 c in the third embodiment are the surface 510 of the vibration isolation table 301 and the corner pins 551 to 557 of the vibration isolation table 301. Instead, a triangular prism member 570 is provided, and a triangular prism member 470 is provided instead of the surface pins 410 of the piezoelectric vibration unit 302 and the square pins 451 to 457 of the piezoelectric vibration unit 302b.

  As shown in FIG. 10, the triangular prism member 470 and the triangular prism member 570 are attached to the surface 410 and the surface 510 shown in FIG. In this case, the triangular prism member 470 is preferably attached in a state where the vibration-proof leaf spring 380 is rotated within a range of 0.00 degrees to ± 5.00 degrees with respect to the surface 410. It is preferable that the vibration-proof leaf spring 380 is attached to the surface 510 in a state of being rotated within a range of 0.00 degrees to ± 5.00 degrees. Note that both the triangular prism member 470 and the triangular prism member 570 have the same angle.

  With the above configuration, by providing the triangular prism member 470 and the triangular prism 570 between the surface 410 and the surface 510 and the vibration-proof plate spring 380, the vibration direction of the piezoelectric vibration unit 302 can be easily adjusted. The deviation between the vibration direction of the piezoelectric vibration unit 302 and the transfer direction of the micro component 800 can be corrected.

  In this embodiment, the triangular prism member 470 is provided on the surface 410. However, the present invention is not limited to this, and the triangular prism member 470 may be provided on the upper surface of the side surface of the piezoelectric vibration unit 302.

  That is, you may further provide the structure which adjusts the angle of the part (fixed surface of the leaf | plate spring 390) directly related to vibration transmission. In this case, if the deviation of the vibration direction is large, the angle of the part directly related to vibration transmission is adjusted, and if fine adjustment of the vibration transmission direction is performed, the part of the part indirectly related to vibration transmission is adjusted. By adjusting the angle, the direction of vibration transmission can be adjusted more easily.

  In the first to third embodiments, the micro component 800 corresponds to the micro component, the micro component supply device 100 corresponds to the micro component supply device, the piezoelectric vibration unit 302 corresponds to the vibrator, The first transport member 320, the second transport member 330, and the third transport member 350 correspond to the transport path, the stage 900 corresponds to the support base, the surfaces 410, 450, 510, and 550 correspond to the fixed surfaces, The vibration leaf spring 380 corresponds to a vibration-proof plate member, and the side surface angle adjustment dials 400 and 500 and the surfaces 410 and 510, the square pin protrusion amount adjustment dials 401 and 501, the surface 450 and the surface 550, and the square pins 451 to 457. The square pin 551 to the square pin 557, the triangular prism member 470, and the triangular prism 570 correspond to the angle adjusting device, and the side surface angle adjusting dials 400 and 500 and the square pin protruding amount adjusting dial 401 are provided. 501 corresponds to the angle indicating device, the angular pin 451～ angle pins 457 and corner pin 551～ angle pin 557 corresponds to the pin, a triangular prism members 470 and triangular prism 570 corresponds to the plate-like member having a predetermined angle.

  Although the present invention has been described in the first to third preferred embodiments described above, the present invention is not limited thereto. It will be understood that various other embodiments may be made without departing from the spirit and scope of the invention. Furthermore, in this embodiment, although the effect | action and effect by the structure of this invention are described, these effect | actions and effects are examples and do not limit this invention.

1 is a schematic perspective view showing an example of a micropart supply device according to a first embodiment of the present invention. Schematic perspective view showing an example of the shape of a micropart conveyed in the present embodiment Side view showing details of linear feeder The perspective view for demonstrating the detail of the fixed state of a vibration isolator and a piezoelectric vibration part Schematic perspective view showing an example of a side surface before adjusting the vibration direction of the vibration isolator and the piezoelectric vibration unit Schematic perspective view showing an example of a side surface after adjusting the vibration direction of the vibration isolation table and the electric vibration unit The perspective view which shows one side of the vibration isolator and piezoelectric vibration part which concerns on 2nd Embodiment The perspective view which shows one side of the vibration isolator and piezoelectric vibration part which concerns on 2nd Embodiment The perspective view which shows one side of the vibration isolator and piezoelectric vibration part which concern on 3rd Embodiment The perspective view which shows one side of the vibration isolator and piezoelectric vibration part which concern on 3rd Embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Minute component supply apparatus 302 Piezoelectric vibration part 320 1st conveyance member 330 2nd conveyance member 380 Anti-vibration leaf | plate spring 400 Side surface angle adjustment dial 401,501 Square pin protrusion amount adjustment dial 410,450,510,550 Surface 451- 457,551-557 Square pin 470 Triangular prism member 570 Triangular prism member 800 Micro component 900 Stage

Claims (4)

A micro-component supply device that vibrates a micro-component and transfers the micro-component linearly,
A vibration exciter for applying vibration to the micro component;
A transport path for transporting the microparts by vibration applied from the vibrator;
A support base for supporting the vibrator;
A vibration isolating plate member for fixing the fixed surface of the support base and the fixed surface of the vibrator,
The support part and the vibrator have an angle adjusting device capable of changing an angle of the fixed surface. The angle adjusting device further includes an angle indicating device,
2. The micropart supply device according to claim 1, wherein the direction of the fixed surface can be changed in accordance with an instruction from the angle indicating device. The angle adjusting device further includes an angle indicating device and a plurality of pins,
The micropart supply device according to claim 1, wherein the protruding amount of the plurality of pins protruding from the fixed surface can be changed in accordance with an instruction from the angle indicating device. The angle adjusting device further includes a plate-like member having a predetermined angle,
2. The micropart supply device according to claim 1, wherein the plate-like member is provided between the fixed surface and the vibration-proof plate member.

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