JP2006159362A - Facing device of lap surface plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten a surface time of a lap surface plate. <P>SOLUTION: A rough cutting diamond cutting tool 41 and a finish cutting diamond cutting tool 40 are parallely arranged on a same plane including a lap surface plate axial core 4a on the surface of this lap surface plate 3 with a clearance hole 3a at a center journalled by a spindle 4, and fixed to an upward and downward movable cutting tool holder 31. The rough cutting diamond cutting tool 41 and the finish cutting diamond cutting tool 40 are simultaneously retreated toward a radial direction of the outer periphery of the lap surface plate from the clearance hole 3a of the lap surface plate, and a rough cutting processing and a finish cutting processing of the lap surface plate 3 are performed, so as to make the surface of the lap surface plate even (surfacing). <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a facing device for correcting and processing a surface of a single-sided lapping surface plate used for lapping a surface of a substrate such as a magnetic head substrate, a ceramic substrate, a glass substrate, a sapphire substrate, or an optical lens.

  A lapping apparatus for lapping one side of a substrate using a lapping plate having a relief hole in the center is known. It is also commercially available from Okamoto Machine Tool Co., Ltd. under the trade name SPL15L. Normally, this lapping machine wears the lapping platen when lapping 40 to 60 substrates. Therefore, the worn surface of the lapping platen that is rotatably mounted is cut with a diamond tool to make the surface height uniform. A facing device is provided. For example, as shown in FIG. 7, a DC servo ball screw feed that can be moved by an air guide from the axial center portion of a lapping surface plate 101 'having a clearance hole that is air-bearing toward the outer circumferential direction of the lapping surface plate. A facing device is proposed that is equipped with a controllable display device 113 that can digitally display time, rotation speed, cutting numerical values measured by the cutting amount detector 115, and the like. (For example, refer to Patent Document 1).

Further, as a centering method of the diamond tool of the facing device, when centering, the small diameter portion of the stepped plate member composed of the small diameter portion and the large diameter portion is fitted into the central relief hole of the lap surface plate, Rotate the lapping plate and process the diameter AΦ with a small amount of cut on the upper surface of the large-diameter portion with a diamond tool, then measure the same diameter AΦ and based on the measured value, the lapping plate axis and this lapping plate There is also a method of measuring the position of the diamond cutting tool with respect to the disk axis and correcting the movement of the diamond tool to the lapping surface plate axis position (see, for example, Patent Document 2).
Japanese Patent Laid-Open No. 59-142058 (see page 2, FIG. 1 and FIG. 2) Japanese Unexamined Patent Publication No. 2000-317834 (see page 2, FIG. 1 and FIG. 2)

  In the conventional lapping surface facing device, the lapping device has one diamond cutting tool, and the rough cutting diamond cutting tool edge is aligned with the lapping surface plate axis in advance, and then the central clearance hole portion is provided. Move the rough cutting diamond bite toward the outer periphery in the radial direction of the lap surface plate rotating from the upper position to cut 3 to 10 μm, and return the rough cutting diamond bite blade edge to the position above the central relief hole again, After moving the rough cutting diamond bite toward the outer circumference in the radial direction of the lapping surface plate and cutting 3 to 10 μm several times, the rough cutting diamond bite was replaced with a finished cutting diamond bite, and the lapping surface plate was changed. Adjust the height of the finish cutting diamond cutting tool edge with respect to the Move the finished cutting diamond tool toward the outer periphery in the radial direction of the surface plate and make a 3 to 5 μm cut. Return the finished cutting diamond tool tip to the position above the central relief hole, and the radial direction of the lapping plate. The surface of the lapping platen is made uniform (facing) by moving the finish cutting diamond bite toward the outer circumference of the plate and repeating the cutting of 3 to 7 μm several times.

  The present invention eliminates the step of replacing the rough cutting tool and the finishing cutting tool of the diamond tool, and also provides a lap surface plate with a feed mechanism for moving the tool, the number of times of movement on the surface of the lap surface plate being ½ or less. -To provide a singing device.

  According to the first aspect of the present invention, there is provided a facing device for uniformizing the surface of a lapping surface plate having a relief hole in the center supported by a spindle shaft by using a rough cutting diamond tool and a finishing cutting diamond tool simultaneously. The rough cutting diamond cutting tool and the finishing cutting diamond cutting tool have a tool holder whose height position can be adjusted. Parallel to the outer peripheral side, parallel to the distance that the finish cutting diamond cutting tool edge and the rough cutting diamond cutting tool edge fit within the clearance hole diameter of the lapping surface plate, and the finishing cutting diamond cutting edge The surface connecting the cutting edge of the diamond cutting tool and the axis of the lapping surface is on the same plane. The holder which is held by a holder and can hold the rough cutting diamond tool and the finished cutting diamond tool is adjustable in height position. The tool can be reciprocated from above the relief hole of the lap surface plate toward the outer periphery of the lap surface plate. It is intended to provide a lap surface plate facing device characterized by being fixed to an arm supporting sliding body of a feed mechanism.

  The invention according to claim 2 is characterized in that the finishing cutting diamond cutting edge of the surfacing device is gripped at a position lower than 2 to 10 μm toward the lapping surface than the rough cutting diamond cutting edge. The facing device according to claim 1 is provided.

  Adjust the height of the finish cutting diamond cutting tool edge and the rough cutting diamond cutting tool to the arm of the feed mechanism that can reciprocate the finishing cutting diamond tool and the rough cutting diamond cutting tool. Since the surface of the lap surface plate that is rotating by moving together in the radial direction connecting the shaft core and the outer surface of the lap surface plate can be uniformly faced, the feed mechanism that moves the tool moves on the surface of the lap surface plate. The number of times became 1/2 or less, and the process of replacing the rough cutting tool and the finishing cutting tool was eliminated.

Hereinafter, the lapping surface surfacing device having a hole in the center of the present invention will be described in more detail with reference to the drawings.
FIG. 1 is a plan view of a lapping apparatus provided with a facing device, FIG. 2 is a side view with a part thereof cut away, FIG. 3 is a front view of the facing device, and FIG. 4 is a top sectional view of the facing device. 5 is a side view with a part of the facing device cut away, and FIG. 6 is an enlarged side view showing the height positional relationship between the finish cutting diamond cutting tool edge and the rough cutting diamond cutting tool edge.

  1, 2, and 3, the lap apparatus 1 includes a facing device 20, 2 is a base, 3 is a lap surface plate having a relief hole 3 a in the center, and 4 is a hollow spindle shaft. The platen is supported via donut-shaped support plates 7a and 7b having a hole in the center. A plurality of annular cooling water passages 7c are provided on the upper surface of the lower donut-like support plate 7b, and these annular cooling water passages communicate with each other through radial cooling water passages. A servo motor 5 transmits its rotational driving force via a pulley 5b, a belt 6, and a spindle 4b of the spindle shaft 4 provided on the motor shaft 5a. Rotate.

  Reference numeral 8 denotes a correction ring (conditioner) which is housed in an arcuate guide 9 having a drive roller 9a and a subordinate roller 9b, and is driven by a drive roller 9a which is rotated by a drive motor 10. The lap platen 3 is rotated in the direction indicated by the arrow. A polishing liquid supply pump 11 supplies the polishing liquid to the polishing liquid supply pipe 12, and the polishing liquid falls on the lapping platen 3.

  As shown in FIGS. 1, 2, and 5, the cutting tool feed mechanism 21 of the facing device 20 has a cutting tool edge 40 b, 41 b in the front-rear direction on the base 2 on the rear side of the lapping machine 1, and It is provided so as to be capable of reciprocating in the radial direction of the lapping platen passing through the axis 4a of the lapping platen. The feed mechanism 21 adopts a structure in which an arm support sliding body 23 can reciprocate in the front-rear direction on a guide guide 22 provided on the base 2. This feed mechanism 21 is driven by a pulley 25a fixed to a motor shaft 24a, a transmission belt 25b, and a pulley 26a fixed to a ball screw 26. The screw 27 is screwed to the ball screw 26 and receives the rotational driving force of the ball screw 26 to move the arm support sliding body 23 forward or backward. . 28a and 29a are stop pins, and 28b and 29b are dial gauges. On the sliding surface of the arm support sliding body 23 on the guide guide 22, a lubricating oil pocket 22a is provided.

  A vertical guide plate 30 is fixed to the tip of the arm support sliding body 23, and a tool holder 31 that can move the sliding surface in the vertical direction by an air cylinder 32 is provided. A finish cutting diamond cutting tool 40 and a rough cutting diamond cutting tool 41 having diamond cutting edges 40b and 41b at the lower ends of the junks 40a and 41a are fixed to the cutting tool holder 31 by tightening the junk with bolts 42. In FIG. 5, 32a is a stop pin.

  When the rough cutting diamond cutting tool 41 and the finishing cutting diamond cutting tool 40 are fixed to a tool holder 31 whose height position can be adjusted, the finishing cutting diamond cutting tool 40 is placed on the center side of the relief hole 3a of the lapping surface plate, and the rough cutting diamond cutting tool 41 is placed. Are parallel to each other so that they are positioned toward the outer peripheral side of the lapping surface plate 3, and within a distance that the finished cutting diamond cutting tool edge 40b and the rough cutting diamond cutting tool edge 40b fit within the clearance hole 3a diameter of the lapping surface plate. In addition, the tool holder 31 is held so that the surface connecting the finish cutting diamond cutting edge 40b, the rough cutting diamond cutting edge 41b, and the axis 4a of the lapping surface plate is on the same plane. The finish cutting diamond cutting edge 40b is preferably held at a position lower than (2) [mu] m by 2-5 [mu] m toward the surface of the lapping plate 3 than the rough cutting diamond cutting edge 41b.

  The angle of the diamond cutting edge depends on the type of lapping plate, but is preferably 60 degrees or 90 degrees. Further, the combination of the cutting edges of the rough cutting diamond cutting tool 41 and the finishing cutting diamond cutting tool 40 may be both cutting edges having the same angle or may be different from each other.

  On the upper part of the tool holder 31, a height measuring instrument “Digimatic Micrometer Head MHN2-25M type” (trade name) 50, 51 made by Mitutoyo Co., Ltd., which measures the finished state of the lapping plate 3. Is provided. Digimatic micrometer head 50 includes thimble 50a, stop pins 50b and 50c, spindle 50d, and compression springs 50e and 50f. A guide groove is formed on the inner peripheral surface of the thimble 50a in parallel with the moving direction of the spindle 50d, and an engaging pin is slidably engaged with the guide groove of the thimble 50a. The height measuring devices 50 and 51 can set the upper surface position of the lap surface plate 3 as a reference point 0 and can digitally display the planar height of the faced lap surface plate.

  The facing device 20 shown in FIGS. 1, 2, and 6 and the facing device 20 shown in FIGS. 4 and 5 include the rough cutting diamond bit 41, the finish cutting diamond bit 40, and a height measuring instrument 50. , 51 are shown in different positions.

  The rotation speed of the lap surface plate 3 can be changed by 0.1 to 200 rpm when the diameter of the lap surface plate 3 is 350 to 600 mm, and the feed speed of the bite feed mechanism 21 is preferably 10 to 20 mm / min.

  In order to face the surface of the lap surface plate 3 having a diameter of 350 mm using the lapping apparatus 1, the finish cutting diamond bit 40 and the rough cutting diamond held by the bite holder 31 in the escape hole 3 a of the lap surface plate 3 are used. The cutting edges 40b and 41b of the cutting tool 41 are accommodated, and the cutting edges 40b and 41b and the plane including the axis 4a of the lapping surface plate are set on the same plane, and the finish cutting diamond cutting tool cutting edge 40b is a rough cutting diamond. It is fixed at a position 2 to 5 μm lower than the cutting edge 41b. This position is set as a facing start position (first step).

  While supplying the polishing liquid onto the lap platen 3 while rotating the lap platen 3 at, for example, 100 rpm, the cutting tool 21 is moved backward in the radial direction of the lap platen at a speed of 15 mm / min to start cutting. When the finish cutting diamond cutting tool edge 40b is out of the outer periphery of the lapping surface plate 3, the tool holder 31 is raised by 10 μm by the air cylinder 32. When the bite feed mechanism 21 is retracted, the facing state of the lap surface plate is measured by the height measuring devices 50 and 51 and is digitally displayed (second step).

  Next, the cutting tool feeding mechanism 21 is moved backward at a speed of, for example, 50 to 200 mm / min in the direction of the axis 4a of the lapping surface plate. When the cutting tool reaches above the facing start position, the cutting tool holder 31 is moved by the air cylinder 32. The tool is lowered by 10 μm, and the cutting tools 40 and 41 are returned to the facing start position (third step).

  Thereafter, the second process and the third process are repeated several times (3 to 6 times), and when the desired grading state of the wrap surface plate 3 is 0.001 mm and the measured value is displayed, the measured value is displayed. -Stop the singing operation.

  The lapping surface surfacing device 1 of the present invention can simultaneously perform rough facing and finishing facing of the lapping surface plate 3, so that the time required for facing is less than half.

It is a top view of the lapping apparatus provided with the facing apparatus. It is the side view which notched a part of lap | wrap apparatus. It is a front view of a facing apparatus. It is a top sectional view of a facing device. It is the side view which notched a part of facing device. It is a side view which shows the height positional relationship of a finish cutting diamond cutting tool edge and a rough cutting diamond cutting tool edge. It is a perspective view of the facing apparatus of a lap surface plate. (Known)

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lap device 2 Base 3 Lap surface plate which has a hole in the center 3a Escape hole 4 Hollow spindle shaft 8 Correction ring 20 Facing device 21 Bit feed mechanism 23 Arm support sliding body 30 Vertical direction guide plate 31 Bit Holder
40 Finished cutting diamond tool 40b Cutting edge 41 Coarse cutting diamond tool 41b Cutting edge 50 Height measuring instrument 51 Height measuring instrument

Claims (2)

  A facing device for equalizing a surface of a lapping plate having a clearance hole supported by a spindle shaft by using a rough cutting diamond bit and a finish cutting diamond bit simultaneously. The diamond cutting tool and the finish cutting diamond cutting tool are located on the center of the hole of the lapping platen and the rough cutting diamond cutting tool is positioned toward the outer periphery of the lapping platen. In parallel, and within the distance that the finish cutting diamond cutting tool edge and the rough cutting diamond cutting tool edge fit within the clearance hole diameter of the lapping surface plate, and the finishing cutting diamond cutting tool and the rough cutting diamond cutting tool edge The surface connecting the axis of the lap surface plate is gripped at the same plane. The height-adjustable holder for holding the rough cutting diamond cutting tool and the finishing cutting diamond cutting tool is an arm of a cutting tool feeding mechanism capable of reciprocating from the upper part of the hole of the lapping plate toward the outer periphery of the lapping plate. A lap surface plate facing device characterized by being fixed to a support sliding body.   The finish cutting diamond cutting tool edge of the surfacing apparatus is gripped at a position lower than 2 to 10 μm toward the lapping surface than the rough cutting diamond cutting tool edge. The facing device described.

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