JP2006130574A - High-pressure liquid injection type cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-pressure liquid injection type cutting device capable of reducing a maintenance load of an abrasive sorting means executed by an operator. <P>SOLUTION: The high-pressure liquid injection type cutting device is provided with an abrasive mixed liquid storage tank 22, a high-pressure liquid supply means 15, which sends out an abrasive mixed liquid with high pressure by supplying a high-pressure liquid to the abrasive mixed liquid storage tank 22, a spraying nozzle 30 for spraying the high-pressure abrasive mixed liquid to a workpiece 5, a catch tank 50 for receiving the sprayed high-pressure abrasive mixed liquid, an abrasive recovery means 60 for transferring a reusable abrasive having particle sizes in a prescribed range to the abrasive mixed liquid storage tank 22 after collecting it from the abrasive mixed liquid transferred from the catch tank 50, and a centrifugal type abrasive sorting means 70 which sorts out the abrasive with centrifugal force by making the abrasive mixed liquid transferred from the abrasive recovery means to rotationally flow, leads a dischargeable abrasive having a smaller particle size to a drainage path, and recovers an undischargeable abrasive having a larger particle size. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a high-pressure liquid jet cutting device that cuts a workpiece by jetting a high-pressure liquid containing an abrasive, and more particularly to a high-pressure liquid jet cutting device that can reuse an abrasive.

  The water jet is a jet of high-pressure water formed by applying energy to water by an ultra-high pressure pump or the like, and has a flow velocity of 2 to 3 times the speed of sound, for example. In recent years, methods and apparatuses for cutting various workpieces (workpieces) using this water jet have been developed. In particular, in order to improve cutting efficiency, attention has been focused on abrasive jets in which high-pressure water is mixed with a solid abrasive. This abrasive material is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, etc., and is a granular material having a particle size of, for example, several tens to several hundreds μm. These abrasive materials are processed together with high-pressure water. Collides with an object at high speed, destroys a part of the workpiece and cuts it.

  Such water jet cutting has the advantage that it can be cut without affecting the workpiece, and the occurrence of burrs on the cut surface can be reduced by the abrasive. Furthermore, in addition to being able to cut without problems even if the cutting line is a curve, there is an advantage that it is suitable for cutting composite materials and difficult-to-work materials. For this reason, in recent years, in order to dice a semiconductor substrate, particularly a packaged substrate, a cutting process using a water jet instead of a conventional cutting blade has been studied.

  In a water jet cutting apparatus using an abrasive jet, an abrasive used for cutting is generally collected and reused. This is because not all abrasive material sprayed with high-pressure water from the spray nozzle contributes to processing and is consumed in a single cut of the workpiece. This is because a large amount of abrasive is discarded, and the production efficiency is extremely lowered.

  Various problems occur when the abrasive is reused. For example, if recycled high-pressure water contains cutting waste from the workpiece, it not only reduces cutting efficiency, but also causes cutting waste to adhere to the workpiece during cutting or cause equipment failure. It also becomes. For this reason, in order to reuse the abrasive, the cutting waste contained in the drainage must be removed. As an example of this, Patent Document 1 describes an apparatus that removes cutting waste contained in waste water with a filter.

  In addition, if the recycled abrasive material is also consumed, it cannot contribute to cutting, so the worn abrasive material must be collected and removed. As an example of recovering the abrasive, Patent Document 2 describes an apparatus for circulating the water in the catch tank and recovering the used abrasive with a filter. However, the apparatus disclosed in Patent Document 2 has a problem in that it requires manual labor to recover and reuse the abrasive, and the abrasive cannot be automatically reused.

  Furthermore, as an example of circulating and reusing the abrasive, Patent Document 3 discloses that the abrasive mixed waste liquid is transferred from the catch tank to the precipitation tank, and the cutting tank and heavy abrasive with high specific gravity are settled and separated by the precipitation tank. An apparatus for recovering the abrasive is described. However, even with this method, in order to collect and reuse the abrasive, it is assumed that it is necessary to collect the abrasive once by hand, regenerate it, and reload it into the device.

Japanese Patent Laid-Open No. 1243549 Japanese Patent Laid-Open No. 11-123661 JP 2001-260030 A

  As described above, in the conventional water jet cutting apparatus, the recovered abrasive is manually reloaded into the apparatus, and the abrasive cannot be automatically reused in the apparatus. Therefore, a water jet cutting apparatus that can be reused by automatically circulating an abrasive in the apparatus has been studied.

  For example, in the water jet cutting apparatus which the inventors of the present application are considering, as shown in FIG. 5, the abrasive mixture liquid in the abrasive mixture storage tank 122a or 122b is fed by the high pressure water supplied from the high pressure pump 115. Is fed at a high pressure, and this high-pressure abrasive mixture (abrasive jet) is jetted from the jet nozzle 130 onto the workpiece 105 to perform cutting. Furthermore, after receiving the abrasive mixture liquid injected from the injection nozzle 130 by the catch tank 150, the abrasive particle collecting means 160 has a reusable particle size (for example, 30 to 100 μm) from the abrasive mixture liquid. In this configuration, the abrasive is collected and replenished to one of the two abrasive mixture supply tanks 122a and 122b that is not used for cutting. With this configuration, the abrasive can be automatically circulated and reused in the apparatus. In the water jet cutting device of FIG. 5, the abrasive that was not recovered by the abrasive recovery means 160 was discharged untreated along with the drainage.

  However, since the water jet cutting device of the type that automatically circulates the abrasive as shown in FIG. 5 is a new one, there are techniques for recovering the abrasive to be reused, how to discharge the abrasive, etc. There was a problem.

  Specifically, first, the abrasive recovery means 160 could not completely recover all of the reusable abrasive particles. For this reason, in the drainage, not only the abrasive having a particle size that is unsuitable for reuse due to wear (for example, less than 30 μm) but also the reusable particle size that should be collected by the abrasive collecting means 160 if originally intended. (For example, 30 to 100 μm) abrasives were also mixed, and the amount was estimated to be about 8% of the reusable abrasives. As described above, the water jet apparatus of FIG. 5 has a problem that the recovery efficiency of the reusable abrasive is low.

  Further, with respect to the abrasives and the like discharged from the water jet cutting device of FIG. 5 together with the waste water, large abrasives and cutting debris having a predetermined particle size (for example, 10 μm) are not discharged from the drain path (drainage grooves, etc.) outside the device. There is also a problem that the drainage path is clogged.

  In order to solve these two problems, the inventors of the present application consider providing an abrasive separating means 170 for separating the abrasive mixed water discharged from the abrasive collecting means 160 as shown in FIG. did. This abrasive material separating means 170 separates and collects a reusable abrasive material (for example, 30 μm or more) from the abrasive material mixture liquid containing the abrasive material that has not been recovered by the abrasive material recovery means 160, and further discharges it. A polishing material having a predetermined particle diameter or larger (for example, 10 μm or larger) that cannot be discharged because it causes clogging of the liquid path is separated and removed by an unnecessary material removing filter 177 and drained.

  However, the abrasive material separating means 170 in FIG. 6 uses an unnecessary material removing filter 177 to separate and remove the abrasive material that cannot be discharged. For this reason, it is inconvenient because the operator needs to periodically replace the unnecessary object removal filter 177. Accordingly, there has been a demand for maintenance material-free abrasive separation means.

  Therefore, the present invention has been made in view of the above problems, and in order to circulate and reuse the abrasive in the apparatus, it is possible to improve the recovery efficiency of the abrasive having a reusable particle size, A new and improved system that can remove clogging of the drainage path by removing abrasives with a particle size larger than the specified particle size from the drainage, and can reduce the maintenance load on the abrasive sorting means by the operator. Another object of the present invention is to provide a high-pressure liquid jet cutting device.

  In order to solve the above problems, according to a first aspect of the present invention, an abrasive mixed liquid storage tank that stores an abrasive mixed liquid in which an abrasive and a liquid are mixed; and an abrasive mixed liquid storage tank; High-pressure liquid supply means for supplying the high-pressure liquid to supply a high-pressure liquid to the abrasive-mixture stored in the abrasive-mixture storage tank; and a high-pressure abrasive-mixture sent from the abrasive-mixture storage tank An injection nozzle that injects the liquid onto the workpiece; a catch tank that receives the high-pressure abrasive mixture liquid injected from the injection nozzle; and a predetermined range that can be reused from the abrasive mixture liquid transferred from the catch tank And a polishing material recovery means for transferring a polishing material mixture containing the recovered polishing material to an polishing material mixture storage tank. . This high-pressure liquid injection type cutting device transfers from the abrasive material recovery means the abrasive material mixture liquid containing the abrasive material that has not been recovered by the abrasive material recovery means, and rotates and flows the abrasive material mixture liquid so that the abrasive material material is recovered. The abrasive contained in the mixed solution is separated into an abrasive having a predetermined particle diameter that cannot be discharged and an abrasive having a predetermined particle diameter that cannot be discharged by centrifugal force. And a centrifuge-type abrasive material separating means for collecting the abrasive material mixture liquid to the drainage path and collecting an abrasive material having a predetermined particle diameter or larger that cannot be discharged.

  Note that “abrasive material having a predetermined range of particle size that can be reused” is an abrasive material having an appropriate range of particle size (for example, 30 to 100 μm) that contributes to the cutting of the workpiece. Also, the term “abrasive material having a particle size less than a predetermined particle size that can be discharged” means a particle size (for example, less than 10 μm) that does not cause trouble such as clogging the drainage path even if it is included in the drainage and discharged. It is an abrasive material. On the other hand, the term “abrasive having a predetermined particle size or more that cannot be discharged” means a particle size (for example, 10 μm or more) large enough to cause a problem such as clogging the drainage path if it is included in the drainage and discharged. It is an abrasive material. Thus, the particle size of the abrasive that can be discharged is smaller than the particle size of the reusable abrasive. The “drainage path” is a path for discharging the drainage (drainage, etc.) of the abrasive mixture water used for cutting in the high-pressure liquid jetting type cutting device. It is.

  With the above-described configuration, the abrasive mixture liquid containing only the abrasive of a size that does not accumulate in the drainage path can be drained as a drainage by the centrifugal abrasive separation means, and can be recovered by the abrasive recovery means. In addition to preventing the disposal of available abrasives, the operator (user) does not need to periodically maintain the abrasive separation means, reducing the burden on the operator and cutting high-pressure liquid injection. The device can be easily handled.

  Further, the above-mentioned centrifugal separation type abrasive material separating means may transfer the abrasive material having a predetermined particle diameter or larger, which is collected by centrifugation and cannot be discharged, to the catch tank for reuse.

  Further, the abrasive recovery means includes an abrasive recovery filter that passes an abrasive having a particle size in a predetermined range that can be reused among abrasives contained in the abrasive mixture liquid transferred from the catch tank; An abrasive storage container for storing the abrasive that has passed through the recovery filter; and by supplying liquid to the abrasive storage container, a liquid flow that passes through the abrasive recovery filter from the abrasive storage container side to the opposite side is generated. And an abrasive material recovery filter cleaning means for removing the abrasive material clogged in the abrasive material recovery filter.

  With such a configuration, the clogging of the abrasive recovery filter can be preferably eliminated by the abrasive recovery filter cleaning means. For this reason, since the abrasive recovery means can suitably recover the reusable abrasive, the amount of reusable abrasive flowing from the abrasive recovery means into the centrifugal separation means is reduced. Thus, the recovery load of the abrasive sorting means can be suppressed. In addition, the life of the abrasive recovery filter can be extended. For this reason, the frequency of maintenance in which the operator replaces the abrasive recovery filter is reduced, the burden on the operator is further reduced, and the high-pressure liquid injection cutting device can be easily handled.

  As described above, according to the present invention, in a high-pressure liquid jet cutting apparatus that circulates and reuses abrasives, abrasives having a reusable particle size can be provided by providing centrifugal separation type abrasives separating means. In addition, it is possible to improve the recovery efficiency of the wastewater, remove abrasives with a particle size that cannot be discharged from the drainage liquid, prevent clogging of the drainage path, and eliminate the need for the operator to regularly maintain the abrasive separation means. The burden on the operator can be reduced.

  Also, by cleaning the abrasive recovery filter of the abrasive recovery means, the amount of abrasive flowing from the abrasive recovery means into the centrifugal abrasive separation means can be reduced. The burden can be reduced.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
The high pressure liquid injection cutting device according to the first embodiment of the present invention will be described below. The high-pressure liquid jet cutting device according to the present embodiment is, for example, a water jet cutting device that cuts a workpiece with a jet of high-pressure water (abrasive jet) mixed with an abrasive as described below. Although configured, the present invention is not limited to such an example.

  First, based on FIG. 1, the whole structure of the water jet cutting device 1 concerning this embodiment is demonstrated. In addition, FIG. 1 is explanatory drawing which shows the whole structure of the water jet cutting device 1 concerning this embodiment.

  As shown in FIG. 1, the water jet cutting device 1 according to the present embodiment jets high pressure water containing an abrasive to the workpiece 5, thereby cutting the workpiece 5 into a relatively free cutting line. The cutting device is capable of cutting with high accuracy (that is, water jet processing). The workpiece 5 to be cut by the water jet cutting apparatus 1 is, for example, various semiconductor substrates such as a silicon wafer and a packaged semiconductor substrate (for example, a CSP substrate), but is not limited thereto.

  The water jet cutting apparatus 1 includes, for example, a high pressure liquid supply means 10 including a high pressure pump 15 and the like, an abrasive mixing means 20 including abrasive mixture storage tanks 22a and 22b, an injection nozzle 30, and a holding unit. Low pressure liquid supply means comprising a table 40, a table moving means (not shown), a catch tank 50, an abrasive recovery means 60, a centrifugal abrasive separation means 70, a low pressure pump 85, and the like. 80 is mainly provided.

  This water jet cutting device 1 uses a polishing material mixing means 20, a catch tank 50, a polishing material recovery means 60, a centrifugal separation type polishing material sorting means 70, and the like to provide a polishing material having a particle size suitable for cutting processing. It can be circulated within and automatically reused.

  Specifically, as shown in FIG. 1, in the water jet cutting apparatus 1, the abrasive that is reused is basically (1) the abrasive mixture storage tank 22 → (2) the injection nozzle 30 → (3) Catch tank 50 → (4) Abrasive recovery means 60 → (5a) Circulate through the path of abrasive mixture storage tank 22. Further, the reusable abrasive material that has not been collected by the abrasive material collecting means 60 is (4) abrasive material collecting means 60 → (5b) centrifugal separation type abrasive material separating means 70 → (6) catch tank 50 → (7) It circulates through a route called abrasive recovery means 60.

  Thus, in the abrasive material circulation structure of the water jet cutting device 1 according to the present embodiment, instead of the abrasive material separating unit 170 using the filter 177 shown in FIG. The feature is the installation point. Below, each part which comprises this water jet cutting device 1 is explained in full detail.

The high-pressure liquid supply means 10 includes, for example, a high-pressure pump 15 and a motor described later. The high-pressure pump 15 pressurizes water supplied from the outside to generate and supply high-pressure water of 600 to 700 bar (1 bar = about 1.02 kgf / cm ² ), for example. The water supplied from the outside is, for example, tap water, but is not limited to this example, and may be pure water or the like. The high-pressure water generated by the high-pressure pump 15 passes through the high-pressure liquid supply pipes 11 a and 11 b (sometimes collectively referred to as “high-pressure liquid supply pipe 11”), and the abrasive mixture liquid of the abrasive mixture means 20. It is supplied to the storage tanks 22a and 22b.

  The low-pressure liquid supply unit 80 includes, for example, a low-pressure pump 85 and a motor, and generates low-pressure water from water supplied from the outside and supplies it to each part. The water supplied from the outside is, for example, tap water, but is not limited to this example, and may be pure water or the like. The low-pressure water generated by the low-pressure liquid supply means 80 is supplied to the catch tank 50 and the abrasive recovery means 60 via the pipes 81, 82, and 83, respectively. Thus, the pipes 81 and 83 for discharging the low-pressure water supplied from the low-pressure liquid supply means 80 are auxiliary means (water flow) for transferring the abrasive mixture liquid between the parts of the water jet cutting device 1 via the pipes. Generating means). The pipe 82 functions as an abrasive recovery filter cleaning means described later.

  Next, the abrasive mixing means 20 will be described. The abrasive material mixing means 20 stores the abrasive material mixed water in which the abrasive material (abrasive grains) and water are mixed, and the abrasive material is supplied to the high pressure water supplied from the high pressure liquid supply means 10 at a predetermined ratio. The high-pressure water mixed with the abrasive is sent to the injection nozzle 30. This abrasive is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, diamond, etc., and is a granular material having a particle size of, for example, about several tens to several hundreds μm, and has a function of increasing the cutting efficiency of high-pressure water. Have In this embodiment, for example, alumina oxide having a particle size of 40 to 100 μm is used as the abrasive.

  The abrasive mixing means 20 includes, for example, two abrasive mixed liquid storage tanks 22a and 22b (sometimes collectively referred to as “abrasive mixed liquid storage tank 22”), a merging portion 23, and a high-pressure water supply unit. It is composed of various pipes such as pressure pipes 11a and 11b, abrasive mixed water delivery pipes 24a and 24b, and valves for opening and closing the pipes.

  The abrasive mixed liquid storage tank 22 is composed of a high pressure resistant container sealed from the outside, and stores water mixed with the abrasive (abrasive mixed water). The abrasive mixture storage tank 22 is supplied with high-pressure water from the high-pressure pump 15 via the high-pressure pipe 11, and collects the abrasive material collected from the abrasive-collecting means 60 via the pipe 61. The abrasive mixed water containing is supplied.

  The junction 23 is connected to the two abrasive mixture storage tanks 22 a and 22 b via the abrasive mixture delivery pipes 24 a and 24 b, respectively, and is connected to the injection nozzle 30 via the high pressure pipe 21. The junction 23 supplies the abrasive mixture water sent from the two abrasive mixture storage tanks 22 a and 22 b to the injection nozzle 30 via the high-pressure pipe 21.

  The high-pressure liquid supply pipes 11a and 11b are high-pressure pipes for connecting the high-pressure pump 15 and the abrasive mixture storage tanks 22a and 22b to supply high-pressure water to the abrasive mixture storage tanks 22a and 22b. . The high pressure liquid supply pipes 11a and 11b are arranged on the bottoms of the abrasive mixed liquid storage tanks 22a and 22b at the end on the outflow side. With this configuration, high-pressure water from the high-pressure pump 15 is supplied to the bottoms of the abrasive mixture storage tanks 22a and 22b via the high-pressure liquid supply pipes 11a and 11b. As a result, the abrasive mixture storage tank 22a , 22b, the abrasive mixture water at the bottom is stirred, and the accumulated abrasive is suspended in the water.

  The abrasive mixed liquid delivery pipes 24a and 24b communicate the abrasive mixed liquid storage tanks 22a and 22b with the merging portion 23, and inject the abrasive mixed water stored in the abrasive mixed liquid storage tanks 22a and 22b. 30 is a high-pressure pipe for supplying to 30. The abrasive mixed solution delivery pipes 24a and 24b are arranged such that the ends on the inlet side thereof are adjacent to the outlets of the high pressure liquid supply pipes 11a and 11b at the bottoms of the abrasive mixed solution storage tanks 22a and 22b. ing.

  With this configuration, the abrasive mixture in the abrasive mixture storage tanks 22a and 22b is generated by the pressure of the high-pressure water supplied into the abrasive mixture storage tanks 22a and 22b via the high pressure liquid supply pipes 11a and 11b. Water flows into the abrasive material mixture delivery pipes 24 a and 24 b and is delivered to the injection nozzle 30. At this time, the outlets of the high pressure liquid supply pipes 11a and 11b and the inlets of the abrasive mixed liquid delivery pipes 24a and 24b are disposed adjacent to the bottoms of the abrasive mixed liquid storage tanks 22a and 22b. Therefore, the abrasive mixed liquid in a state where the abrasive is mixed at a uniform mixing density is continuously sent out.

  The pipe 61 and the pipes 61 a and 61 b branched from the pipe 61 are pipes that connect the abrasive mixture storage tanks 22 a and 22 b and the abrasive collection means 60. In the middle of the pipe 61, there is provided a positive pressure pump 69 which is a power source for transferring the abrasive mixed water containing the abrasive collected by the abrasive collecting means 60, and in the middle of the pipes 61a and 61b. Each is provided with a valve. Further, the pipe 612 and the pipes 612 a and 612 b branched from the pipe 612 are pipes that connect the respective abrasive mixed liquid storage tanks 22 a and 22 b and the abrasive collecting means 60. Valves are provided in the middle of the pipes 612a and 612b.

  As a result, when these valves are opened, the abrasive mixture liquid containing the recovered abrasive is supplied from the abrasive recovery means 60 by the power of the positive pressure pump 69 through the pipe 61, 61a or 61b. The abrasive can be replenished by being transferred to the abrasive mixture storage tank 22a or 22b to which high-pressure water from the pump 15 is not supplied. Furthermore, the water in the abrasive mixed liquid storage tank 22a or 22b can be returned to the abrasive collecting means 60 via the pipes 612a or 612b and 612.

  With the abrasive mixing means 20 having the above-described configuration, the abrasive mixed water stored in one of the abrasive mixed liquid storage tanks 22 is extruded at a high pressure by the pressure of the high-pressure water supplied from the high-pressure pump 15. Then, it can be sent to the injection nozzle 30 via the abrasive mixture liquid delivery pipes 24a and 24b and the high-pressure pipe 21 and used for cutting. At this time, the other abrasive mixed liquid storage tank 22 is supplemented with the abrasive recovered by the abrasive recovery means 60 and can store the abrasive.

  Then, when the amount of abrasive material stored in one abrasive material mixture storage tank 22 used for the cutting process decreases below a predetermined level, the abrasive material mixture water is sent out for the cutting process. By switching between the liquid storage tank 22 and the abrasive mixed liquid storage tank 22 replenished with the abrasive, the supply of the abrasive mixed water to the spray nozzle 30 and the polishing from the abrasive recovery means 60 are performed in the same manner as described above. The replenishment of materials is performed in parallel. Thereby, the high-pressure abrasive mixed water can be stably and continuously supplied to the spray nozzle 30. Note that three or more abrasive mixture liquid storage tanks 22 may be provided and used by switching them.

  The injection nozzle 30 is configured as an example of a high-pressure liquid injection unit that injects high-pressure liquid, and includes, for example, a nozzle pipe 31 and an orifice 32. The spray nozzle 30 is supplied with high-pressure abrasive mixed water from the abrasive mixing means 20 via the high-pressure pipe 21. For example, the injection nozzle 30 injects the high-pressure abrasive mixed water from above to the workpiece 5 held on the holding table 40 at high speed.

  The spray nozzle 30 is stably fixed to the water jet cutting device main body by, for example, a nozzle fixing member (not shown). The injection nozzle 30 is configured to be movable up and down in the Z-axis direction (vertical direction) by, for example, an elevating mechanism (not shown). Thus, the distance between the tip of the injection nozzle 30 and the workpiece 5 can be adjusted according to the type, thickness, surface irregularity, and the like of the workpiece 5.

  The flow rate of the high-pressure water jet (i.e., water jet) J jetted from the jet nozzle 30 is about 2 to 3 times the speed of sound, for example. Further, the distance between the tip of the injection nozzle 30 and the surface of the workpiece 5 is, for example, 50 μm to 1 mm, and is adjusted so that both are as close as possible. Thus, by bringing the injection nozzle 30 and the workpiece 5 close to each other, it is possible to suppress the diffusion of the injected high-pressure water jet J as much as possible, and to prevent the cutting width of the workpiece 5 from becoming wide. Further, the diameter of the injection nozzle 30 (the diameter of the discharge outlet 321) is, for example, about 250 μm. In this case, the cutting width of the workpiece 5 is, for example, about 300 μm.

  In this way, the workpiece 5 can be cut by the energy of the high-pressure water by jetting the water jet J, which is a jet of abrasive mixed water, onto the workpiece 5 by the jet nozzle 30. . At this time, since the abrasive material collides with the workpiece 5 together with the high-pressure water and destroys and cuts a part of the workpiece 5, the cutting efficiency can be improved. Thus, the water jet J according to the present embodiment is configured as an abrasive jet.

  The holding table 40 is configured as an example of a workpiece holding unit that holds the workpiece 5. The holding table 40 is a plate-like member formed of, for example, a hard metal such as stainless steel, and holds and fixes the workpiece 5 that is a workpiece. The holding table 40 is formed with a table window 401 serving as an opening for allowing the water jet J to pass through at a portion to which the workpiece 5 is fixed. The table window 401 has, for example, a shape (for example, a substantially rectangular shape) corresponding to the workpiece 5, and the size thereof is slightly smaller than the outer shape of the workpiece 5. The workpiece 5 is arranged on the upper portion of the table window 401, and the workpiece 5 is fixed to the holding table 40 by fixing the outer periphery of the workpiece 5 with a cover or a locking claw (not shown). 5 is fixed. Further, since the water jet J ejected by the ejection nozzle 30 passes through the portion of the table window 401, the holding table 40 itself is not cut by the water jet J.

  The table moving means (not shown) includes, for example, a drive mechanism such as an electric motor or a gear, and moves the holding table 40 in the horizontal direction (X-axis and Y-axis directions). By moving the holding table 40 in the X-axis and Y-axis directions by such table moving means 42, the workpiece 5 held by the holding table 40 is moved in the X-axis and Y-axis directions with respect to the injection nozzle 30. It can be moved relative. Thereby, the injection position (cutting part) of the water jet J with respect to the workpiece 5 can be changed, and the workpiece 5 can be cut | disconnected by a continuous line. The feed speed of the workpiece 5 at the time of cutting varies depending on the thickness and material of the workpiece 5 to be cut, but is, for example, 20 mm / second.

  The water jet cutting device 1 having such a configuration is configured to move the holding table 40 relative to the injection nozzle 30 in the X-axis and Y-axis directions while jetting the water jet J from the injection nozzle 30. The workpiece 5 can be cut by causing a water jet J containing an abrasive to act along the planned cutting line of the workpiece 5.

  Next, the catch tank 50 will be described. The catch tank 50 is, for example, a vertically long water tank whose upper surface is open. For example, the catch tank 50 is provided below the holding table 40 and directly below the injection nozzle 30. The catch tank 50 stores therein water containing abrasives up to a predetermined height, and supply and discharge of water to the catch tank 50 are controlled in order to keep the water surface constant. .

  The catch tank 50 functions as a water receiving tank for the water jet J. That is, the catch tank 50 can receive the weakened power of the water jet J penetrating through the workpiece 5 as described above using the stored water as a buffer material. At the bottom of the catch tank 50, the abrasive contained in the abrasive mixture water received as described above settles and accumulates.

  The abrasive mixed water containing the abrasive deposited on the bottom of the catch tank 50 is transferred to the abrasive recovery means 60 by the first transfer means. The first transfer means includes a pipe 51 that connects the bottom of the catch tank 50 and the abrasive recovery means 60, and a first power source that is provided in the middle of the pipe 51 and serves as a transfer power source for the abrasive mixed water. And a positive pressure pump 59. A pipe 81 communicating with the low-pressure pump 85 is provided at the bottom of the catch tank 50 as water flow generating means for assisting transfer through the pipe 51 so that the discharge port is adjacent to the suction port of the pipe 51. It is arranged.

  Next, the abrasive material recovery means 60 will be described with reference to FIGS. The abrasive recovery means 60 recovers (primary recovery) and reuses an abrasive having a particle size within a predetermined range suitable for reuse, for example, 30 to 100 μm, from the abrasive mixed water transferred from the catch tank 50. It is a device for.

  As shown in FIGS. 1 and 2, the abrasive material recovery means 60 is roughly composed of an abrasive material recovery container 64, an abrasive material storage container 66, a bottom portion of the abrasive material recovery container 64, and an abrasive material storage container 66. It is comprised from the connection part 65 which connects the upper part of.

  The abrasive recovery container 64 is a hermetically sealed container for recovering a reusable abrasive, and an abrasive recovery filter 67 is provided substantially horizontally inside. The abrasive material recovery filter 67 is made of, for example, a stainless steel wire net having a plurality of fine holes, and allows an abrasive material having a predetermined particle size (for example, 100 μm or less) to pass therethrough. In addition, on the upper part of the abrasive recovery container 64, for example, a vibration motor 63 is installed as a vibration generating means for improving the clogging of the abrasive recovery filter 67 by vibrating the abrasive recovery container 64.

  The upper space of this abrasive material recovery container 64 (the space above the abrasive material recovery filter 67) constitutes a flow path for recovering the abrasive material, and communicates with the catch tank 30 at one end. A pipe 51 is connected, and a pipe 62 communicating with the centrifugal separation type abrasive separating means 70 is connected to the other end. For this reason, the abrasive mixture water transferred from the catch tank 50 flows into the upper space of the abrasive collection container 64 from the pipe 51 and passes over the abrasive collection filter 67 at a predetermined flow rate (for example, 8 liters / minute). It flows and is discharged from the pipe 62.

  With this configuration, only the abrasive having a particle size within a predetermined reusable range (for example, 30 to 100 μm) contained in the abrasive mixed water transferred from the catch tank 50 passes through the abrasive recovery filter 67, It falls down and is collected. Specifically, due to the flow rate of the abrasive mixture water flowing in the upper part of the abrasive collection container 64, an excessively small abrasive (particle size is less than 30 μm, for example) rides on the water flow without passing through the abrasive collection filter 67. And is discharged from the pipe 62. Further, an excessively large abrasive (particle size greater than 100 μm, for example) cannot be passed through the abrasive recovery filter 67 and is discharged from the pipe 62. For this reason, only the abrasive having a size within a predetermined range suitable for cutting (for example, 30 to 100 μm) is recovered through the abrasive recovery filter 67. On the other hand, the abrasive mixed water containing the abrasive having a size outside the predetermined range is transferred to the abrasive separation means 70 of the centrifugal separation type via the pipe 62.

  The lower space of the abrasive material collection container 64 (the space below the abrasive material collection filter 67) has, for example, a funnel shape that collects the abrasive material collected through the abrasive material collection filter 67. ing. The recovered abrasive passes through the tubular connecting portion 65 from this lower space and falls into the abrasive storage container 66.

  The abrasive material storage container 66 is a sealed container that stores the abrasive mixed water containing the abrasive material recovered from the abrasive material recovery filter 67 as described above. The abrasive mixed water containing the abrasive deposited on the bottom of the abrasive storage container 66 is polished by the second transfer means of the two abrasive mixture supply tanks 22 that are not used for cutting. It is transferred to the material mixture supply tank 22. The second transfer means includes a pipe 61 that communicates the bottom of the abrasive material storage container 66 and the abrasive material mixture supply tank 22, and is provided in the middle of the pipe 61. And the second positive pressure pump 69.

  In addition, a measurement sensor, for example, an ultrasonic sensor 68 for measuring the accumulation amount (retention amount) of the abrasive in the abrasive material storage container 66 is attached to the upper part of the abrasive material storage container 66. When it is determined from the measurement result by the ultrasonic sensor 68 that the abrasive material is sufficiently accumulated in the abrasive material storage container 66, the abrasive material mixed water is supplied from the abrasive material storage container 66 to the abrasive material mixture storage tank 22. Be transported. As a result, an excessive amount of abrasive material is accumulated in the abrasive material storage container 66 and, conversely, a transfer operation is prevented even though the abrasive material is not sufficiently accumulated. it can.

  A pipe 83 communicating with a low-pressure pump 85 described later is connected to the upper part of the abrasive material storage container 66. The low-pressure pump 85 and the pipe 83 constitute an abrasive recovery filter cleaning means, which will be described in detail later. Further, a pipe 82 communicating with the low-pressure pump 85 as a water flow generating means for assisting transfer through the pipe 61 is provided at the bottom of the abrasive material storage container 66, and its discharge port is adjacent to the suction port of the pipe 61. It is arranged to do. Further, a pipe 612 is connected to the upper part of the abrasive material storage container 66 so as to communicate with the abrasive material mixed liquid storage tank 22 and return the abrasive material mixed water in the abrasive material mixed liquid storage tank 22 to the abrasive material storage container 66. Has been.

  As described above, the abrasive material collecting means 60 collects only the abrasive material having a predetermined particle size suitable for cutting (for example, a range of 30 to 100 μm) by the abrasive material collecting filter 67 and collects the abrasive material storage container. 66. After that, the recovered abrasive is transferred to the abrasive mixture supply tank 22 and replenished. Further, the abrasive mixed water containing the abrasive not recovered through the abrasive recovery filter 67 is discharged from the abrasive recovery means 60 through the pipe 62 to the abrasive separation means 70 of the centrifugal separation type.

  Next, the centrifugal separation type abrasive material sorting means 70 (hereinafter sometimes simply referred to as “abrasive material sorting means 70”), which is a feature of the present embodiment, will be described.

  As described above, in the configuration of the water jet cutting apparatus shown in FIG. 5 first examined by the present inventors, the abrasive mixed water containing the abrasive not recovered by the abrasive recovery means 160 is excessively excessive. Small abrasives could not contribute to polishing even when reused, while excessively large abrasives were treated as drainage because they would cause the injection nozzle 130 to become clogged. However, as described above, since not all of the reusable abrasive particles can pass through the abrasive recovery filter 167, about 8% of the abrasive material to be recovered can be recovered. This has been a factor in increasing production costs.

  Further, when the abrasive mixed water containing an abrasive having a predetermined particle diameter (for example, 10 μm) or more is drained as it is into the drainage path such as a drainage groove, the drainage path is clogged. In addition, large cutting scraps larger than the predetermined particle size contained in the abrasive mixture water have also become a factor that clogs the drainage path.

  In order to solve such a problem, the inventors of the present application, as shown in FIG. 6, remove the abrasive mixed water containing the abrasive not recovered by the abrasive recovery means 160 on both the recovery efficiency side and the drainage side. In order to treat appropriately from a viewpoint, a water jet cutting device additionally provided with an abrasive separating means 170 was examined.

  However, the abrasive material separating means 170 in FIG. 6 uses “abrasive material having a particle size (for example, 10 to 30 μm) whose particle size is too small to be reused, but which is deposited in the drainage path when discarded as it is”. In this configuration, separation and removal are performed by an unnecessary object removal filter 177. For this reason, maintenance is required in which the unnecessary material removal filter 177 is periodically replaced. This maintenance work places a burden on the operator (user) and makes the water jet cutting device difficult to handle. Therefore, there has been a demand for a maintenance-free water jet cutting device that does not require such a filter replacement operation.

  For this reason, the inventors of the present application have come up with an effort to adopt the centrifugal-type abrasive material separating means 70 that does not require the use of the unnecessary material removing filter 177, and the maintenance-free abrasive material separating means. Developed.

  In order to make the abrasive sorting means maintenance-free, it is possible to reuse all the abrasive mixed water used in the cutting process and circulate it in the apparatus. However, this method also circulates an abrasive with an excessively small particle size that cannot contribute to the cutting process. Therefore, as the cutting process is repeated, the abrasive material with an excessively small particle size contained in the abrasive mixed water is circulated. The ratio will increase, and the cutting process will eventually not be performed properly.

  Therefore, it is necessary to discharge the abrasive having an excessively small particle diameter to the outside of the apparatus without circulating it in the apparatus. On the other hand, when discharging the abrasive, it is necessary to discharge only the abrasive and cutting waste having a particle diameter less than a predetermined particle size to prevent clogging of the drainage path.

  From such a point of view, in the water jet cutting apparatus 1 according to the present embodiment as shown in FIG. 1, abrasive mixed water containing only an abrasive having a predetermined particle diameter that can be discharged and cutting scraps (for example, less than 10 μm) is used. On the other hand, in the apparatus configuration shown in FIG. 6, it was filtered without being collected. “The particle size is too small to be reused, but if discarded as it is, the particle size will be deposited in the drainage path. About the abrasive | polishing material and the cutting waste (for example, 10-30 micrometers), the system of circulating in the apparatus was employ | adopted. According to this method, the abrasive material separating means 70 can be made maintenance-free by using the centrifugal abrasive material separating means 70.

  According to the cutting experiments conducted so far by the inventors of the present application, “the particle size is too small to be reused, but if discarded as it is, the abrasive particles and cutting waste (for example, 10 Even if it is circulating in the apparatus, there is an experimental result that there is no practical problem with the cutting process. The reason for this is that the abrasive and the cutting waste become a particle size (for example, less than 10 μm) that can be worn and discharged in the pipe while circulating in the apparatus. Presumably because it is discharged.

  Below, based on FIG.1 and FIG.3, the structure of the centrifugation-type abrasive | polishing material classification means 70 concerning this embodiment is demonstrated in detail.

  The abrasive separation means 70 of the centrifugal separation system transfers the abrasive mixture water containing the abrasive not recovered by the abrasive recovery means 60 from the abrasive recovery means 60 via the pipe 62. The abrasive sorting means 70 rotates the abrasive mixed water transferred from the abrasive collecting means 60 in this way, and the abrasive and cutting waste contained in the abrasive mixed water by the centrifugal force generated by the rotational flow. To separate. As a result, the abrasive material separating means 70 removes the abrasive material and cutting waste having a particle size smaller than a predetermined particle size (for example, less than 10 μm) that can be discharged into the drainage path (not shown), the drain pipe 72, the drainage tank 90, the drainage. Abrading material and cutting waste having a predetermined particle diameter or larger (for example, 10 μm or larger) that cannot be discharged into the drainage path are discharged (secondary recovery) through the pipe 92 and discharged to the drainage path. Then, it is transferred to the catch tank 50 for reuse.

  More specifically, as shown in FIGS. 1 and 3, the centrifugal type abrasive material separating means 70 separates the abrasive material by, for example, centrifugal force, and polishes that can be discharged into the drainage path and those that cannot be discharged. The centrifugal separator 73 is separated into the material, the inflow pipe 62 (the pipe 62) for allowing the abrasive mixed water from the abrasive recovery means 60 to flow into the centrifugal separator 73, and the centrifugal separator 73. A drain pipe 72 for discharging the abrasive mixed water containing the abrasive that can be discharged; an outflow pipe 71 for discharging the abrasive mixed water containing the abrasive that cannot be discharged separated by the centrifugal separator 73; Is provided.

  The centrifugal separation unit 73 is configured by, for example, a centrifugal separator having a substantially truncated cone shape that is reduced in diameter downward. The material of the centrifugal separator 73 is, for example, a metal such as stainless steel or an elastic material such as rubber.

  An upper inflow port 75 to which the end of the inflow pipe 62 communicating with the abrasive material recovery means 60 is connected is formed at the upper part of the centrifugal separation unit 73. In addition, a lower outlet 78 is formed at the lower part of the centrifugal separator 73 to which an outflow pipe 71 communicating with the catch tank 50 is connected. Further, a drain pipe 72 communicating with the drainage tank 90 is disposed at the central portion in the radial direction of the centrifugal separator 73 so as to extend in the vertical direction. The upper outlet 76 at the lower end of the drain pipe 72 is disposed, for example, at the center in the vertical direction in the centrifugal separator 73.

  Further, the drain pipe 72 and the negative pressure pump 79 provided in the middle of the drain pipe 72 constitute a third transfer means. The negative pressure pump 79 is a drain pump that generates a suction force for draining the abrasive mixed water in the centrifugal separator 73. The third transfer means sucks the abrasive mixed water containing the abrasive having a particle diameter less than a predetermined particle size that can be discharged in the centrifugal separator 73 and transfers it to the drain tank 90.

  The centrifugal separation type abrasive material separating means 70 configured as described above separates the abrasive material with an arbitrary predetermined particle size as a boundary, and collects or discharges the abrasive material to the outside for reuse.

  First, the abrasive mixed water containing the abrasive and cutting waste not collected by the abrasive collecting means 60 is transferred from the abrasive collecting means 60 to the centrifugal separator 73 through the inflow pipe 62, and is supplied to the upper inlet. 75 is press-fitted into the centrifugal separator 73. The thus-inserted abrasive mixed water is rotationally flowed in a cyclone shape inside the centrifugal separator 73, and centrifugal force having a magnitude corresponding to the particle size acts on the abrasive in the abrasive mixed water by this rotational flow. To do. By this centrifugal force, the abrasive in the abrasive fluid that is rotating and flowing is an abrasive having a predetermined particle size or more (for example, 10 μm or more) that cannot be discharged, and less than a predetermined particle size (for example, less than 10 μm) that can be discharged into the drainage path. Sorted into abrasives.

  Among these, the abrasive having a predetermined particle diameter or more that cannot be discharged is centrifuged from the water flow and settled, and transferred from the lower outlet 78 to the catch tank 50 through the outlet pipe 71. In addition, when there is cutting waste having a predetermined particle size or larger (for example, 10 μm or more) that cannot be discharged in the abrasive mixed water, the cutting waste is transferred to the catch tank 50 in the same manner.

  On the other hand, the latter abrasive material having a predetermined particle diameter that can be discharged (abrasive material that has not been centrifuged) and abrasive mixed water containing cutting waste are discharged from the upper outlet 76 through the drain pipe 72 and discharged. Guided to the path. This abrasive mixture water contains abrasives and cutting debris that are less than a predetermined particle size that can be discharged (for example, less than 10 μm). There is nothing.

  Further, a liquid storage tank 90 for storing the abrasive mixed water is provided at the tip of the drain pipe 72. The abrasive mixed water (drainage) that has flowed through the drain pipe 72 has a high flow rate, so if it is discharged to the drain groove at the same flow rate, it may bounce off the drain groove and contaminate the surroundings. There is. Therefore, the liquid storage tank 90 is provided so that the abrasive mixed water from the drain pipe 72 is once stored and then discharged to a drain path such as a drain groove through the drain pipe 92. Thereby, since the flow rate of the abrasive mixed water discharged to the drainage groove or the like can be reduced, it is possible to prevent the surroundings of the drainage groove or the like from being contaminated. If the flow rate of the abrasive mixed water to be drained is not so fast, it can be drained as it is from the drain pipe 72 to the drain groove, so that the liquid storage tank 90 and the like need not be provided.

  It should be noted that the flow rate when the abrasive mixed water is rotationally flowed inside the centrifugal separator 73 can be controlled by the suction force of the negative pressure pump 79 provided in the middle of the drain pipe 72. By controlling this flow rate, the particle size of the abrasive to be centrifuged and the cutting waste can be adjusted. In the above embodiment, for example, abrasives having a particle size of 10 μm or more and cutting waste are transferred from the outflow pipe 71 to the catch tank 50, and for example, abrasives having a particle diameter of less than 10 μm are transferred from the drain pipe 72 to the drainage path. The flow rate (that is, the suction force of the negative pressure pump 79) is controlled so as to be discarded. However, the particle size of the abrasive to be centrifuged and the cutting waste is not limited to this example, and can be arbitrarily set. Depending on the particle size of the abrasive to be centrifuged, the suction force of the negative pressure pump 79 and The shape of the centrifuge 73 can be arbitrarily adjusted.

  As described above, the centrifugal-type abrasive separating means 70 centrifuges and collects an abrasive having a predetermined particle diameter or more that cannot be discharged from the abrasive mixed water transferred from the abrasive collecting means 60, and collects the catch tank. 50. The non-dischargeable abrasive transferred to the catch tank 50 is transferred from the catch tank 50 to the abrasive recovery means 60, and the reusable abrasive among the non-dischargeable abrasive is recovered by the abrasive recovery means 60. And reused. In this manner, a recyclable abrasive having a particle size not recovered by the abrasive recovery means 60 (for example, 30 to 100 μm) can be recovered by the centrifugal abrasive polishing means 70, so that the abrasive is recovered. Efficiency can be improved.

  In addition, in the above-mentioned patent document 1, there is a description that the cutting ability is lowered in the abrasive mixed water mixed with the cutting waste. However, according to the experiments by the inventors of the present application, the cutting waste has the effect of improving the cutting performance in the same manner as the abrasive, and therefore it has been found that there is no problem even if it is circulated and reused with the abrasive in the apparatus. It has been.

  Further, the abrasive mixed water sent to the catch tank 50 has a particle size of abrasive and cutting waste (for example, a particle size that is too small to be reused but that accumulates in the drainage path if discarded as it is). 10-30 μm) ”is included, but as described above, since the abrasive and the like are naturally worn and discharged during circulation in the apparatus, there is no major problem in the cutting process. .

  Further, as described above, the centrifugal separation type abrasive material separating means 70 discharges the abrasive mixed water after the centrifugal separation of the large particle size abrasive material and the cutting waste that cannot be discharged into the drainage path. For this reason, it is possible to prevent clogging of the drainage path due to accumulation of abrasives and cutting scraps having a large particle diameter, and drainage can be suitably performed without affecting the environment around the water jet cutting device 1.

  Further, the centrifugal separation type abrasive separating means 70 does not require maintenance such as replacing the unnecessary material removing filter 177 as in the case of the abrasive separating means 170 shown in FIG. As described above, since the centrifugal separation type abrasive sorting means 70 is configured to be maintenance-free, the burden on the operator can be reduced and the convenience of the water jet cutting apparatus 1 can be improved.

  In this manner, the centrifugal separation type abrasive separating means 70 separates the abrasive using centrifugal force, discharges a small particle size abrasive that can be discharged together with drainage, and other large particles that cannot be discharged. In this configuration, the abrasive having a diameter is collected and transferred to the catch tank 50. As a result, it is possible to prevent the drainage path from becoming clogged because it is possible to prevent the abrasive from containing large-diameter particles and cutting waste that cannot be discharged from being contained in the drainage. The drainage may contain a small particle size abrasive (for example, less than 10 μm) that can be discharged, but such an abrasive does not clog the drainage path because of the small particle size. .

  Next, a mechanism for preventing clogging of the abrasive recovery filter 67 in the abrasive recovery means 60 will be described with reference to FIG.

  The abrasive material recovery filter 67 is not impossible to replace, but is difficult to replace and expensive, and therefore cannot be replaced frequently. For this reason, it is required to eliminate clogging of the abrasive recovery filter 67 due to the abrasive. As described above, the entire abrasive recovery means 60 is vibrated by the vibration generating means composed of the vibration motor 63 so that the abrasive on the abrasive recovery filter 67 is screened. It is possible to prevent clogging of the abrasive material to a certain extent.

  However, even if this vibration generating means is used, there is a problem that the abrasive is gradually clogged in the abrasive recovery filter 67 if it is continuously used for a long period of time. In order to solve such a problem, the abrasive recovery means 60 according to the present embodiment is provided with an abrasive recovery filter cleaning means. As described above, the abrasive material recovery filter cleaning means introduces the low pressure water from the low pressure pump 85 for supplying the low pressure water, and discharges it into the abrasive material storage container 66 of the abrasive material recovery means 60. And a pipe 83.

  As shown in FIG. 4, this abrasive material recovery filter cleaning means flows low-pressure water into the upper part of the abrasive material storage container 66 of the abrasive material recovery means 60, thereby reducing the level of the stored water in the abrasive material recovery means 60. For example, the level is raised from the level located in the upper part of the abrasive material storage container 66 (level shown in FIG. 1) to the level above the abrasive material recovery filter 67 in the abrasive material recovery container 64 (level shown in FIG. 4). As a result, the abrasive material recovery filter cleaning means causes the water flow 671 to pass through the abrasive material recovery filter 67 from the abrasive material storage container 67 side (lower side) to the opposite side (upper side) of the abrasive material recovery filter 67. generate. As a result, the clogging of the abrasive material collecting filter 67 can be eliminated by pushing away the abrasive material adhering to the upper surface side of the abrasive material collecting filter 67 by the water flow 671.

  A valve 831 is provided in the pipe 83 constituting such an abrasive recovery filter cleaning means. By opening / closing this valve 831, the supply of low-pressure water to the abrasive material storage container 67 can be controlled, and the cleaning operation of the abrasive material recovery filter 67 can be started / stopped.

  Further, it may be controlled to automatically start the cleaning operation by the abrasive material recovery filter cleaning means based on the change in the abrasive material accumulation amount in the abrasive material storage container 66. Specifically, for example, by using the ultrasonic sensor 68 described above, the amount of accumulated abrasive material in the abrasive material storage container 66 is continuously measured, and the rate of increase of this abrasive material accumulated amount is monitored. As a result of this monitoring, when the rate of increase in the amount of accumulated abrasive material drops below a predetermined reference rate of increase, it is determined that the abrasive material recovery filter 67 is clogged severely and the abrasive material recovery filter cleaning means is activated (ie, , The valve 831 is opened and water is supplied into the abrasive material storage container 66 from the pipe 83), and the cleaning operation of the abrasive material recovery filter 67 is started. With this control, the cleaning operation by the abrasive recovery filter cleaning means can be automatically executed according to the clogged state of the abrasive recovery filter 67. Of course, the operator may manually control the operation of the abrasive material recovery filter cleaning means.

  It should be noted that the cleaning operation of the abrasive material recovery filter 67 as described above can be performed at any time regardless of whether the water jet apparatus 1 is cutting or stopping the cutting process. The cleaning operation of the abrasive recovery filter 67 is also performed when the water jet cutting device 1 is started.

  Further, regarding the supply position of the low-pressure water to the abrasive recovery means 60 (that is, the connection location of the pipe 83), according to the results of experiments by the inventors of the present application, the pipe 83 is provided above the abrasive storage container 66. It was found that the best cleaning effect was obtained when connected. However, the present invention is not limited to this example, and the connection portion of the pipe 83 may be an arbitrary portion of the abrasive material recovery means 60 as long as it is below the abrasive material recovery filter 67.

  The configuration and operation of the water jet cutting device 1 according to the present embodiment have been described in detail above. According to the water jet cutting apparatus 1, the abrasive can be automatically circulated in the apparatus, and the abrasive can be reused efficiently and without affecting the environment.

  That is, not only the recyclable abrasive material is recovered by the abrasive material recovery means 60 but also the reusable abrasive material that cannot be recovered by the abrasive material recovery means 60 by the centrifugal abrasive material separating means 70. It can be recovered and reused, so that it is possible to increase the efficiency of recovery of the abrasive material, eliminate waste of the abrasive material, and improve productivity.

  Further, the centrifugal separation type abrasive separating means 70 separates abrasive particles and cutting debris that can be discharged from abrasive particles and cutting debris that cannot be discharged, and can be discharged. The abrasive mixed water containing only the abrasive and cutting waste can be drained. For this reason, it is possible to prevent clogging of the drainage path due to accumulation of abrasives and cutting wastes having a large particle diameter. In addition, since it is possible to discharge at any time among abrasives with a small particle size that do not contribute to polishing, it is possible to prevent the abrasive material circulated in the equipment from becoming too small and to cut with abrasive jets. Can be maintained.

  In addition, since the centrifugal separation type abrasive separating means 70 does not require periodic maintenance such as filter replacement, the burden on the operator is reduced and the water jet cutting device 1 is easy to handle.

  Further, by providing the abrasive material recovery means 60 with the abrasive material recovery filter cleaning means, clogging of the abrasive material recovery filter 67 can be eliminated. Therefore, the amount of reusable abrasive flowing into the centrifugal separation type abrasive separating means 70 increases with time, and the problem of increasing the load on the centrifugal separation type abrasive separating means 70 can be solved. In addition, the life of the abrasive recovery filter 67 can be extended. Accordingly, since the frequency of maintenance that the operator replaces the abrasive recovery filter 67 can be reduced, the burden on the operator can be further reduced and the water jet cutting device 1 can be easily handled.

  The preferred embodiments and examples of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be obvious to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, the workpiece 5 may be a semiconductor substrate such as various semiconductor wafers, a CSP substrate, a GPS substrate, a package substrate such as a BGA substrate, or the like. Further, the workpiece may be a sapphire substrate, a glass material, a ceramic material, a metal material, a synthetic resin material such as plastic, or an electronic material substrate for forming a magnetic head, a laser diode head, or the like. . Further, the shape of the workpiece 5 may be an arbitrary shape such as a substantially rectangular plate shape or a substantially disk shape.

  Moreover, although the said embodiment demonstrated the example which employ | adopted the water jet cutting device 1 as a high pressure liquid injection type cutting device, this invention is not limited to this example. The high-pressure liquid injection type cutting device can be variously modified as long as it has high-pressure liquid injection means for injecting high-pressure liquid and can cut and process a workpiece by high-pressure liquid injection. For example, the liquid to be jetted and stored is not limited to the above water example, and may be any liquid such as alcohol or oil, or a liquid in which various chemical substances are dissolved in various solvents. There may be.

  Further, by providing a plurality of sets of high-pressure liquid injection means (injection nozzles 30 and the like) and catch tanks 50 in one high-pressure liquid injection type cutting device, a plurality of locations in a single workpiece 5 or a plurality of You may comprise so that the to-be-processed object 5 of this can be cut simultaneously. This configuration can be applied, for example, when cutting a package substrate in which a plurality of package portions are formed on one metal frame.

  Moreover, in the said embodiment, the cutting system which fixes the injection nozzle 30 and moves the workpiece 5 with the holding table 40 at the time of a cutting process is employ | adopted. By adopting such a cutting method, since the position of the injection nozzle 30 is fixed, there is an advantage that the catch tank 50 can be downsized, the installation area can be reduced, and the configuration of the moving mechanism can be simplified. However, the present invention is not limited to this example, and the holding table 40 may be fixed and the injection nozzle 30 may be moved for cutting.

  In the above embodiment, the non-dischargeable abrasive collected by the centrifugal abrasive sorting means 80 is transferred to the catch tank 50 through the pipe 71 and reused. However, the present invention is not limited to this example. , It may be transferred to the abrasive recovery means 60 or the abrasive mixture storage tank 22 and reused.

  Further, the abrasive material recovery means 60 does not necessarily have to be composed of two mutually closed airtight containers of the abrasive material recovery container 64 and the abrasive material storage container 66 as in the above-described embodiment. You may be comprised with an airtight container.

  The present invention is applicable to a high-pressure liquid injection type cutting device that cuts a workpiece by injection of a high-pressure liquid mixed with an abrasive.

It is explanatory drawing which shows the whole structure of the water jet cutting device concerning the 1st Embodiment of this invention. It is a perspective view which shows the external appearance structure (a) and internal structure (b) of the abrasive | polishing material collection | recovery means concerning the embodiment. It is a perspective view which shows the structure of the abrasive classification means of the centrifugation system concerning the embodiment. FIG. 5 is a cross-sectional view showing a state where the abrasive recovery filter cleaning means is operated in the abrasive recovery means according to the same embodiment. It is explanatory drawing which shows the circulation structure for reusing an abrasive | polishing material in the water jet cutting device which the present inventors examined first. It is explanatory drawing which shows the circulation structure for automatically recycle | reusing an abrasive | polishing material in the water jet cutting device which this inventor examined next.

Explanation of symbols

1: Water jet cutting device 5: Work piece 10: High pressure liquid supply means 15: High pressure pump 20: Abrasive material mixing means 22: Abrasive material mixed liquid storage tank 30: Injection nozzle 40: Holding table 42: Table moving device 50: Catch tank 60: Abrasive recovery means 62: Inflow pipe 64: Abrasive recovery container 66: Abrasive storage container 67: Abrasive recovery filter 68: Ultrasonic sensor 70: Centrifugation-type abrasive separation means 71: Outflow pipe 72 : Drain pipe 80: Low pressure liquid supply means 85: Low pressure pump J: Water jet

Claims (2)

An abrasive mixed liquid storage tank for storing an abrasive mixed liquid in which an abrasive and a liquid are mixed;
High-pressure liquid supply means for feeding the abrasive mixture liquid stored in the abrasive mixture storage tank at high pressure by supplying high-pressure liquid to the abrasive mixture storage tank;
An injection nozzle that injects a high-pressure abrasive mixture sent from the abrasive mixture storage tank to the workpiece;
A catch tank for receiving a high-pressure abrasive mixed liquid sprayed from the spray nozzle;
Abrasive material having a predetermined range of particle size that can be reused is recovered from the abrasive mixture liquid transferred from the catch tank, and the abrasive mixture liquid containing the recovered abrasive material is stored in the abrasive mixture storage tank. Abrasive material recovery means to be transferred;
In the high-pressure liquid-jet cutting device with:
The abrasive material mixture containing the abrasive material not recovered by the abrasive material recovery device is transferred from the abrasive material recovery device, and the abrasive material mixture solution is caused to rotate and flow, whereby the abrasive material contained in the abrasive material mixture solution is transferred. A mixture of abrasives containing a polishing material having a particle diameter smaller than a predetermined particle size that can be discharged and an abrasive material having a particle diameter larger than the predetermined particle size that cannot be discharged by centrifugal force. A centrifugal separation type abrasive material separating means for collecting the abrasive material having a predetermined particle diameter or more which cannot be discharged;
A high-pressure liquid injection type cutting device comprising: The abrasive recovery means includes
An abrasive recovery filter that allows passage of abrasive particles having a particle size in a predetermined range that can be reused among abrasives contained in the abrasive mixture liquid transferred from the catch tank;
An abrasive storage container for storing the abrasive that has passed through the abrasive recovery filter;
By supplying a liquid to the abrasive storage container, a liquid flow is generated so as to pass through the abrasive recovery filter from the abrasive storage container side to the opposite side, and the abrasive recovery filter is clogged. An abrasive recovery filter cleaning means for removing the material;
The high-pressure liquid-jet cutting device according to claim 1, comprising:

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