201127555 六、發明說明： 【發明所屬之技術領域】 本發明是關於可循環使用以線鋸進行矽晶 斷加工時所供應之硏磨粉漿的線鋸之硏磨粉漿 【先前技術】 習知以來對矽晶圓等進行切削加工的裝置 線鋸是構成爲將碳化矽（矽石）類切削材 徑=18.5〜21.5微米程度，比重p=3.2程度） 性的油）等切削液體混合後的硏磨粉漿供應在 鋼線，藉此對矽晶圓等進行切削加工。 第1圖是表示上述先前線鋸所使用的硏磨 徑的方塊圖，圖中圖號1是利用未圖示鋼線進 切削加工的線鋸，該線鋸1是從粉漿供應裝置 粉漿3。 粉漿供應裝置2具備有粉漿供應槽4，該 4，可生成有經由人工作業計量將新磨粒5和 6以所需比率供應由攪拌裝置7進行攪拌後成 的硏磨粉漿3，該粉漿供應槽4內的硏磨粉漿 供應用泵浦8的供給管9引導至上述線鋸1的 備有供應閥1 〇的向下供給管1 1供應至上述線 ，利用回送管12連接上述供給管9之供應閥： 置和上述粉漿供應槽4之間，藉此防止上述供 圓切削或切 循環裝置。 是使用線鋸 即磨粒（粒 和油（水溶 高速移動的 粉漿供應路 行矽晶圓等 2供應硏磨 粉漿供應槽 新切削液體 爲均勻濃度 3是由具備 上部，由具 鋸1，此外 0的跟前位 應閥1 0關[ -5- 201127555 閉時循環硏磨粉漿3所造成的磨粒5沉澱在供給管9內。 另外，供應至上述線鋸1經切削加工使用過之含有切 屑的硏磨粉漿3’是經由具備有排出用泵浦13的排出管14 供應至廢棄物處理裝置15。廢棄物處理裝置15，導入有 上述使用過的硏磨粉漿3’，將該硏磨粉漿3’分離成由磨 粒和切屑等形成的固體廢棄物1 6和由切削液體形成的液 體廢棄物1 7，分別爲廢棄物處理。 如上述，先前的線鋸，因是將使用過的硏磨粉漿3 ’ 丟棄不再使用，所以經常需要高價的新磨粒5和新切削液 體6，因此就會有運轉成本增加的問題。 再加上，如上述，將使用過的硏磨粉漿3’全部導入 廢棄物處理裝置15視爲廢棄物進行處理，除了需要處理 費用以外還需要廢棄處理時的費用，又加上也會有環保面 的問題。 另一方面，已知有從線鋸所使用過的硏磨粉漿分離出 回收磨粒和回收切削液體進行回收，將該回收磨粒和回收 切削液體混合在新磨粒和新切削液體再度做爲硏磨粉漿供 應至線鋸，藉此能夠大幅降低運轉成本的同時能夠大幅削 減廢棄物量的線鋸之硏磨粉漿循環裝置（參照專利文獻1 )° 專利文獻1中，該線鋸之硏磨粉漿循環裝置，具備有 :可導入來自於線鋸之使用過的硏磨粉漿將該使用過的硏 磨粉漿分離成含有切屑及破碎磨粒的微粒混合液體和可再 使用的回收磨粒之第1分離手段；可導入有經由第1分離 -6 - 201127555 手段所分離的微粒混合液體將該微粒混合液體分離成回收 切削液體和固體廢棄物之第2分離手段24;及可導入有 經過第1分離手段分離的回收磨粒和經過第2分離手段分 離的回收切削液體之同時導入新磨粒和新切削液體進行混 合生成硏磨粉漿的粉漿混合裝置，構成將粉漿混合裝置生 成的硏磨粉漿供應至粉漿供應裝置。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開平11-〇33913號公報 【發明內容】 [發明欲解決之課題] 但是，使用過的硏磨粉漿是形成在黏性比較高的切削 液體中混入有磨粒和微細的切削屑的狀態。因此，第1分 離手段的回收磨粒分離，和第2分離手段的固體廢棄物分 離是能夠較穩定進行，但來自於第2分離手段的回收切削 液體中混入的微細切削屑等微細固體會慢慢累積導致濃度 變高，因此回收切削液體就無法直接做爲再利用。 因此，專利文獻1是將回收切削液體在濾器進行循環 藉此分離微細固體，對微細固體濃度降低後的回收切削液 體進行再利用。但是，濾器會在短期間造成堵塞因此就需 要頻繁更換，該更換作業是由人工進行因此就會有作業非 常繁瑣的問題。 本發明是爲了解決上述先前裝置所具備之問題所硏創[S ] 201127555 的發明，目的是提供一種無需人工作業就能夠使硏磨粉粒 和切削液體穩定循環使用的線鋸之硏磨粉漿循環裝置。 [用以解決課題之手段] 本發明相關的線鋸之硏磨粉漿循環裝置，其特徵爲， 具備有：可使從粉漿供應裝置供應至線鋸且使用過的硏磨 粉漿導入分離成回收磨粒和含有切屑及破碎磨粒的微粒混 合液體之第1分離手段；可使經由該第1分離手段所分離 的含有切屑及破碎磨粒的微粒混合液體導入分離成固體廢 棄物和預備切削液體之第2分離手段；可承接經由該第2 分離手段分離後儲存在預備切削液體儲存槽的預備切削液 體將該預備切削液體所含有的微細固體分離後獲得回收切 削液體的振動過濾機；及可導入上述第1分離手段所回收 的回收磨粒和上述振動過濾機所回收的回收切削液體之同 時，導入新磨粒和新切削液體製造出硏磨砂漿供應至上述 粉漿供應裝置的粉漿混合裝置。 上述線鋸之硏磨粉漿循環裝置中，是以具備有：可對 粉漿混合裝置的硏磨粉漿濃度進行檢測的粉漿濃度檢測器 ;及根據該粉漿濃度檢測器的濃度檢測値控制新磨粒供應 及新切削液體供應的控制器爲佳。 此外，上述線鋸之硏磨粉漿循環裝置中，以具備有可 導入第1分離手段所分離之回收磨粒和振動過濾機所分離 的回收切削液體對粗粒進行去除的粗粒去除裝置爲佳。 另外，上述線鋸之硏磨粉漿循環裝置中，上述振動過 -8 _ 201127555 濾機，具有： 以使得從預備切削液體儲存槽經由供應用泵浦供應的 預備切削液體振動的濾器承接使形成在濾器上的浮游粒子 層分離成可通過該浮游粒子層的回收切削液體和微細粒子 已濃縮的溢流液之振動過濾機； 配備在上述溢流液之流出流路的轉換閥； 透過調整閥連接於該轉換閥藉此連通至上述預備切削 液體儲存槽的調整流路； 連接於上述轉換閥藉此連通至上述預備切削液體儲存 槽的開放流路； 可對濾器的過濾性能進行檢測的過濾性能檢測手段； 及 當該過濾性能檢測手段所檢測出的過濾性能降低成設 定値以下時，就對轉換閥進行轉換使上述溢流液開放至開 放流路的轉換控制器。 此外，上述線鋸之硏磨粉漿循環裝置中，以具有可在 溢流液開放至開放流路時阻斷回收切削液體從振動過濾機 流出的阻斷閥爲佳。 另外，上述線鋸之硏磨粉漿循環裝置中，以過濾性能 檢測手段爲可檢測出回收切削液體流出流量的流量計爲佳 0 此外，上述線鋸之硏磨粉漿循環裝置中，以過濾性能 檢測手段爲可在被過濾液由定量泵浦供應至濾器時對被過 濾液的供應壓力進行檢測的壓力計爲佳。 -9 - 201127555 另外，上述線鋸之硏磨粉漿循環裝置申請專利範圍第 8項記載的發明，以在預備切削液體儲存槽具有預備切削 液體加熱用的加熱器爲佳。 [發明效果] 根據本發明的線鋸之硏磨粉漿循環裝置，將該第2分 離手段去除固體廢棄物後儲存在預備切削液體儲存槽的預 備切削液體經過振動過濾機分離預備切削液體所含的微細 固體，因此有不需人工能夠穩定獲得不含微細固體之回收 切削液體的效果。即，振動過濾機是以調整溢流液的流出 對作用在濾器的壓力進行調節藉此使浮游粒子層形成在濾 器上執行穩定的過濾，當濾器上的浮游粒子層的層厚變厚 造成過濾性能降低時，就開放溢流液的流出沖洗浮游粒子 層，藉此自動恢復過濾性能，因此就有長期間不需人工能 夠執行穩定過濾的效果。 【實施方式】 [發明之最佳實施形態] 以下，與圖示例同時說明本發明的實施形態。 第2圖爲表示本發明線鋸之硏磨粉漿循環裝置的一實 施例方塊圖，使用在與第1圖相同的線鋸1之使用過的硏 磨粉漿3’是經由具備有排出用泵浦13的排出管14供應 至使用過之粉漿的儲存槽18。該使用過之粉漿的儲存槽 18具備有攪拌裝置19藉此防止使用過的硏磨粉漿3,的磨BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a honing slurry for a wire saw which can be recycled using a wire saw for honing slurry supplied by a wire saw [Prior Art] The wire saw for the cutting of the enamel wafer or the like is a mixture of cutting fluids such as an oil having a diameter of a cemented carbide (the vermiculite) of 1.85 to 21.5 μm and a specific gravity of p = 3.2). The honing powder is supplied to the steel wire to cut the silicon wafer and the like. Fig. 1 is a block diagram showing the honing diameter used in the above-mentioned prior wire saw, in which the figure 1 is a wire saw which is cut by a steel wire which is not shown, which is a slurry from a slurry supply device. 3. The slurry supply device 2 is provided with a slurry supply tank 4, and the honing slurry 3 obtained by stirring the new abrasive grains 5 and 6 by a stirring device 7 at a desired ratio by manual operation can be produced. The supply pipe 9 of the pulverized pulp supply pump 8 in the slurry supply tank 4 is guided to the lower supply pipe 1 1 of the wire saw 1 provided with the supply valve 1 供应 to the above-mentioned line, and the return pipe 12 is used. A supply valve that connects the supply pipe 9 is disposed between the slurry supply tank 4, thereby preventing the above-described circular cutting or cutting cycle device. Is the use of wire saws that are abrasive particles (granules and oil (water-soluble high-speed moving slurry supply road line 矽 wafers, etc. 2 supply honing slurry supply tank new cutting liquid for uniform concentration 3 is provided by the upper part, by the saw 1 In addition, the front position of 0 should be closed to the valve 10 [ -5- 201127555 The abrasive grains 5 caused by the closed time honing slurry 3 are deposited in the supply pipe 9. In addition, the wire saw 1 supplied to the wire saw 1 is used for cutting. The squeegee slurry 3' containing the chips is supplied to the waste disposal device 15 via the discharge pipe 14 having the discharge pump 13. The waste treatment device 15 introduces the used honing slurry 3'. The honing slip 3' is separated into a solid waste 16 formed of abrasive grains and chips, and a liquid waste 17 formed of a cutting liquid, respectively, for waste disposal. As described above, the previous wire saw is The used honing paste 3' is discarded and is no longer used, so high-priced new abrasive grains 5 and new cutting liquids 6 are often required, so there is a problem of increased running costs. Plus, as mentioned above, will be used The honing paste 3' is all imported into waste treatment Set 15 is treated as waste, in addition to the cost of disposal, it also requires the cost of disposal, plus the problem of environmental protection. On the other hand, honing powder used from wire saws is known. The slurry separates the recovered abrasive grains and recovers the cutting liquid for recovery, and the recycled abrasive particles and the recycled cutting liquid are mixed in the new abrasive grains and the new cutting liquid, and then the honing slurry is supplied to the wire saw, thereby greatly reducing the running cost. A honing slurry circulation device for a wire saw capable of drastically reducing the amount of waste (see Patent Document 1). Patent Document 1 discloses a honing slurry circulation device for a wire saw, which can be introduced from a wire saw. The used honing slip is used to separate the used honing slip into a first mixing means for separating the finely divided liquid containing the chips and the broken abrasive grains and the reusable recovered abrasive grains; 6 - 201127555 The fine particle mixed liquid separated by the means separates the fine particle mixed liquid into a second separating means 24 for recovering the cutting liquid and the solid waste; and can be introduced and separated by the first separating means The slurry mixing device which combines the abrasive grains and the recovered cutting liquid separated by the second separation means while introducing the new abrasive grains and the new cutting liquid to form a honing slurry, constitutes a supply of the honing slurry generated by the slurry mixing device [Patent Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. In the state in which abrasive grains and fine chips are mixed in the cutting liquid having a relatively high viscosity, the separation of the abrasive grains by the first separation means and the separation of the solid waste by the second separation means can be performed stably. However, the fine solids such as fine chips mixed in the recovered cutting liquid from the second separation means are gradually accumulated to cause a high concentration, so that the recovered cutting liquid cannot be directly reused. Therefore, in Patent Document 1, the recovered cutting liquid is circulated through the filter to separate the fine solid, and the recovered cutting liquid having a reduced fine solid concentration is reused. However, the filter causes clogging in a short period of time and therefore requires frequent replacement, and the replacement operation is performed manually, so that there is a problem that the operation is very complicated. The present invention has been made to solve the problems of the prior devices described above [S] 201127555, and aims to provide a honing slurry for a wire saw capable of stably circulating honing powder and cutting liquid without manual work. Circulation device. [Means for Solving the Problem] The honing slurry circulating device of the wire saw according to the present invention is characterized in that: the honing slurry which can be supplied from the slurry supply device to the wire saw and used is introduced and separated The first separation means for recovering the abrasive grains and the fine particle mixed liquid containing the chips and the crushed abrasive grains; and the fine particle mixed liquid containing the chips and the crushed abrasive grains separated by the first separation means can be introduced into the solid waste and prepared a second separation means for cutting the liquid; and a vibration filter for recovering the cutting liquid by separating the fine solid contained in the preliminary cutting liquid by the preliminary cutting liquid separated by the second separation means and stored in the preliminary cutting liquid storage tank; And introducing the recovered abrasive grains recovered by the first separation means and the recovered cutting liquid recovered by the vibration filter, introducing fresh abrasive grains and a new cutting liquid to produce a powder of the honing mortar supplied to the slurry supply device Pulp mixing device. The honing slurry circulating device of the wire saw is provided with a slurry concentration detector capable of detecting the concentration of the honing slurry of the slurry mixing device; and detecting the concentration according to the concentration of the slurry concentration detector A controller that controls the supply of new abrasive particles and the supply of new cutting fluids is preferred. Further, in the honing slurry circulation device of the wire saw, the coarse particle removing device that removes the coarse particles by the recovered cutting liquid separated by the recovered abrasive particles and the vibration filter that can be introduced by the first separating means is good. Further, in the honing slurry circulation device of the wire saw, the vibration-exciting -8 _ 201127555 filter has: a filter for vibrating a preliminary cutting liquid supplied from a preliminary cutting liquid storage tank via a supply pump to form a layer of floating particles on the filter is separated into a vibrating filter through which the recovered cutting liquid and the fine particles have been concentrated; a switching valve provided in the outflow path of the overflow liquid; a through-regulating valve Connecting to the switching valve to communicate with the adjustment flow path of the preliminary cutting liquid storage tank; connecting to the switching valve to communicate with the open flow path of the preliminary cutting liquid storage tank; filtering for detecting the filter performance of the filter The performance detecting means; and when the filtering performance detected by the filtering performance detecting means is reduced to less than the set value, the switching valve is switched to open the overflowing liquid to the switching controller of the open flow path. Further, in the above-mentioned wire saw pulverizing pulp circulation device, it is preferable to have a blocking valve which can block the recovery of the cutting fluid from the vibration filter when the overflow liquid is opened to the open flow path. Further, in the honing slurry circulating device of the wire saw, it is preferable that the flow rate detecting means is a flow meter capable of detecting the flow rate of the recovered cutting liquid. Further, in the honing slurry circulating device of the wire saw, the filtering is performed. The performance detecting means is preferably a pressure gauge capable of detecting the supply pressure of the filtered liquid when the filtered liquid is supplied from the quantitative pump to the filter. -9 - 201127555 In addition, the invention described in claim 8 of the honing slurry circulation device of the wire saw preferably has a heater for pre-cutting liquid heating in the preliminary cutting liquid storage tank. [Effect of the Invention] According to the honing slurry circulation device of the wire saw of the present invention, the second cutting means removes the solid waste, and the preliminary cutting liquid stored in the preliminary cutting liquid storage tank is separated by the vibration filter to prepare the cutting liquid. The fine solids have the effect of not requiring artificially stable recovery of the cutting fluid containing no fine solids. That is, the vibrating filter adjusts the pressure acting on the filter by adjusting the outflow of the overflow liquid to thereby form a layer of the floating particles on the filter to perform stable filtration, and the layer thickness of the floating particle layer on the filter is thickened to cause filtration. When the performance is lowered, the overflowing liquid is discharged to flush the floating particle layer, thereby automatically recovering the filtration performance, so that there is no need to artificially perform stable filtration for a long period of time. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Fig. 2 is a block diagram showing an embodiment of a honing slurry circulation device for a wire saw according to the present invention, wherein the honing slurry 3' used in the wire saw 1 similar to that of Fig. 1 is used for discharge. The discharge pipe 14 of the pump 13 is supplied to the storage tank 18 of the used slurry. The used storage tank 18 of the used slurry is provided with a stirring device 19 to prevent the used honing slurry 3 from being ground.
；"S -10- 201127555 粒沉澱。 第2圖中20爲第1分離手段，該第1分離手段20， 透過具備有泵浦21的導入管22導入上述使用過之粉漿的 儲存槽18內的使用過的硏磨粉漿3’，於此將上述使用過 的硏磨粉漿3’分離成回收磨粒5a和含有切屑及破碎磨粒 的微粒混合液體23。 上述使用過的硏磨粉漿3’，其狀態是形成爲切削液 體中混合有：比重P爲3.2程度並且具有與新磨粒5大致 同等之18.5〜21.5微米程度大粒徑的回收磨粒5a;數微 米程度大的切屑；及破碎成數微米程度大的破碎磨粒。 上述第1分離手段20，例如可使用傾析器型離心分 離機，利用離心效果賦予上述硏磨粉漿3’ 300〜1 000G ( 通常爲400〜500G)，藉此就能夠有效分離成上述回收磨 粒5a和其他含有切屑及破碎磨粒的微粒混合液體23。此 外，上述第1分離手段20，除了可使用上述傾析器型離 心分離機以外’也可使用旋液分離器等。 第2圖中24爲第2分離手段，該第2分離手段24， 導入有經由上述第1分離手段20所分離的含有切屑及破 碎磨粒的微粒混合液體23，於此分離成固體廢棄物25和 預備切削液體6 ’。 上述的硏磨粉漿3及使用過的硏磨粉漿3’，一般具 有1 0 0〜1 7 0厘泊所謂比較高的黏度，因此從如此黏度高 的微粒混合液體23分離出數微米的切屑及破碎磨粒並不 容易，但若使用賦予離心力就能夠對上述微粒混合液體[S ] -11 - 201127555 23施加3000G程度的傾析器型離心分離機即第2分離手 段24進行分離，能夠有效分離出由切屑和破碎磨粒形成 的固定廢棄物25，和預備切削液體6’。此外，上述第2 分離手段24，除了可使用上述傾析器型離心分離機以外 ，也可使用分離板型離心分離機等。 再加上，第2圖中，又具備有可對來自於上述第2分 離手段24的預備切削液體6’進行引導的預備切削液體儲 存槽26。使用上述第2分離手段24是難以完全分離成微 細固體，因此，將上述預備切削液體儲存槽26的預備切 削液體6’從底部取由供應用泵浦27供應至振動過濾機28 ，經由振動過濾機28分離成微細固體已去除的回收切削 液體6a和微細固體濃度提高的溢流液29，並使溢流液29 返回至上述預備切削液體儲存槽26。此外，因預備切削 液體儲存槽26的預備切削液體6’其微細固體濃度會慢慢 變高，所以取出該預備切削液體6 ’的一部份，經由蒸餾 分離裝置3 0分離成微細固體和切削液體。如此一來，就 能夠回收使用過的硏磨粉漿3 ’所含有之切削液體的大致 全量加以再利用，要廢棄的只有微少量的微細固體。 第2圖中31爲粗粒去除裝置，該粗粒去除裝置31， 導入有上述第1分離手段20所分離的回收磨粒5a的另一 方面，由流出流路32導入上述振動過濾機28所分離的回 收切削液體6a，將微粒聚集成長後形成比回收磨粒5a還 大粒徑之含有粗粒的回收磨粒5 a由乾淨的回收切削液體 6a洗淨，藉此分離粗粒33，取出由回收磨粒5a和回收切 "S) -12- 201127555 削液體6a形成的混合粉漿34。上述粗粒去除裝置3 1 ’使 用濕式篩分裝置（振動篩裝置），藉此就能夠有效分離回 收磨粒5 a所含有的粗粒3 3。 第2圖中35爲可導入有來自上述粗粒去除裝置31之 混合粉漿34的粉漿混合裝置，該粉漿混合裝置35，具備 有··可將供應於磨粒儲存槽3 6的新磨粒5透過馬達3 7所 驅動的螺旋加料器等供應機3 8進行供應的磨粒供應裝置 39;及透過具備有供應閥40的供給管41進行新切削液體 6供應的切削液體供應裝置42，構成爲導入上述混合粉漿 3 4和新磨粒5和新切削液體6，利用攪拌裝置4 3進行攪 拌製造出指定濃度的硏磨粉漿3。 上述粉漿混合裝置35所製造的硏磨粉漿3是透過具 備有泵浦44的供給管45供應至粉漿供應裝置2的粉漿供 應槽4。 上述供給管45的出口具備有閥46，並且在上述供給 管45的泵浦44和閥46之間連接具備閥47之回送管48 的一端，該回送管48的另一端是連接在上述粉漿混合裝 置35，利用上述供給管45使供應至上述粉漿供應裝置2 的硏磨粉漿3的一部份返回上述粉漿混合裝置35。 上述回送管48，設有可對上述硏磨粉漿3的磨粒濃 度進行檢測的粉漿濃度檢測器49，具備有根據該粉漿濃 度檢測器49的濃度檢測値50對上述磨粒供應裝置39的 馬達3 7或切削液體供應裝置42的供應閥40進行控制的 控制器5 1。 [ S ] -13" 201127555 第3圖是表示第2圖所具備之振動過濾機28的槪略 流程圖，振動過濾機28是在筒狀的容器52內收容有複數 的圓板狀濾器53，上述容器52是由驅動馬達54驅動成 往復旋轉使上述濾器53振動。濾器53的直徑方向中心， 形成有濾液流出流路55的另一方面，在濾液流出流路55 通過的直徑方向一側設有由供應用泵浦27使預備切削液 體儲存槽26的預備切削液體6’透過供應流路56導入的 被過濾導入流路57，此外，在濾液流出流路55通過的直 徑方向另一側設有溢流液流路.58。 第4圖爲表示上述振動過濾機28的濾器53的過濾構 造，隔著間隔53a的2片濾器53形成爲1個單元59，該 單元5 9隔著所需的間隔60具有複數層疊的構成。接著， 從上述被過瀘液導入流路57導入的預備切削液體6’是通 過間隔60導向單元59的上下外側面，利用交叉流動使回 收切削液體6a如虛線所示通過各濾器53受到過濾，接著 回收切削液體6 a是從間隔5 3 a流出至濾液流出流路5 5。 此時，因濾器5 3是振動著，所以在濾器5 3的外面，如第 5圖所示就會形成有與濾器5 3外面隔著間隔浮遊的浮游 粒子層6 1，因此，上述預備切削液體6 ’是利用浮游粒子 層6 1形成爲過濾。回收切削液體6a經分離後的液體是成 爲粒子已濃縮的溢流液29從第3圖的流出流路62流出。 於上述振動過濾機28持續進行過濾時，浮游的浮游 粒子層6 1的層厚會慢慢變厚，因此就會有過濾性能降低 的問題。再加上，在振動過濾機2 8的運轉停止時上述浮 ：S) -14- 201127555 游粒子層61會緊貼在濾器53上，導致運轉再度開始時會 有無法獲得良好過濾的問題。 因此，如第3圖所示，在流出有上述溢流液29的流 出流路62設置轉換閥63 (三向轉換閥），再加上，該轉 換閥63，連接有：透過調整閥64使上述溢流液29返回 至預備切削液體儲存槽26的調整流路65 ;及可使溢流液 29直接開放至上述預備切削液體儲存槽26的開放流路66 〇 又加上，爲了檢測出振動過濾機2 8的濾器5 3的過濾 性能，在回收切削液體6 a的流出流路3 2設有流量計6 7 構成的過濾性能檢測手段68。過濾性能檢測手段68，在 上述供應用泵浦27爲定量泵浦時，也可構成爲在供應流 路56設置壓力計69對供應至濾器53的預備切削液體6’ 的供應壓力進行檢測。 接著，設有轉換控制器70，當上述過濾性能檢測手 段68所檢測出的過濾性能降低成設定値以下時，該轉換 控制器70就對轉換閥63的轉換進行控制使上述溢流液 29經由開放流路66開放至預備切削液體儲存槽26。 再加上，第3圖中，在回收切削液體6 a的流出流路 32，設有阻斷閥71，構成爲在上述將溢流液29經由開放 流路66開放至預備切削液體儲存槽26時，阻斷回收切削 液體6 a的流出。 此外，預備切削液體儲存槽26設有預備切削液體6 ’ 加熱用^加熱器72。加熱器72是根據設置在預備切削液[S ] -15- 201127555 體儲存槽26對預備切削液體6’溫度進行檢測. 的檢測溫度，由控制器74控制加熱。如第6 中不同種類預備切削液體6’之溫度和黏度的 預備切削液體6’是根據種類具有黏度從高黏 黏度不同的反彎點X，因此要根據預備切削液 利用上述加熱器72進行預備切削液體6’的加 削液體6 ’的溫度維持在反彎點X以上的溫度 液體6’加熱用的加熱器72可採用電熱器、溫 式，預備切削液體6 ’的加熱位置也可任意選定 另外，上述轉換控制器70，又構成爲也 濾機28的過濾停止前轉換上述轉換閥63使禮 放至開放流路66。即，當停止指令75輸入至 70時，轉換控制器70會在執行轉換閥63的 液29開放至開放流路66之後，就發出振動站 轉停止的指令。 其次，對上述實施例的動作進行說明。 如第2圖所示，粉漿供應裝置2的粉漿供 硏磨粉漿3是利用供應用泵浦8經由供給管9 管1 1供應至線鋸1，與未圖示的鋼線一起進 的切削加工。 使用在線鋸1之使用過的硏磨粉漿3’是 泵浦13經由排出管14供應至使用過之粉漿I ，該使用過之粉漿的儲存槽18內的使用過的 ，利用泵浦21經由導入管22導入至第1分離 之溫度計7 3 圖、第7圖 關係所示， 度變化成低 體6’的種類 熱使預備切 。預備切削 水等各種方 〇 會在振動過 条流液29開 轉換控制器 轉換使溢流 I濾機28運 應槽4內的 及向下供給 行矽晶圓等 利用排出用 的儲存槽18 硏磨粉漿3’ 手段20。 -16- 201127555 導入於第1分離手段20之使用過的硏磨粉漿3’是由 傾析器型離心分離機等產生的離心效果施加300〜1 000G 進行分離，藉此有效分離成回收磨粒5a和含有切屑及破 碎磨粒的微粒混合液體2 3。 經由上述第1分離手段20分離之含有切屑及破碎磨 粒的微粒混合液體23，被導入在能夠利用傾析器型離心 分離機等的離心力施加3〇〇〇G程度的第2分離手段24， 然後分離成脫水後的固體廢棄物25和預備切削液體6’。 經由上述第2分離手段24形成脫水後的固體廢棄物25是 硏磨粉漿3中全固體量的2〜3%程度，因此在上述第1分 離手段20分離成可再利用的回收磨粒5a的再生率就可達 到9 7〜9 8 %。 在第2分離手段24去除固體廢棄物25後儲存在預備 切削液體儲存槽26的預備切削液體6’是被導入至振動過 濾機去除微細固體後取出回收切削液體6a。 即，於第3圖所示利用驅動馬達54使振動過濾機28 的濾器53往復旋轉振動的狀態下，利用供應用泵浦27將 預備切削液體儲存槽26的預備切削液體6’導入被過濾液 導入流路57，此時，對轉換閥63進行轉換並且將調整閥 64調整成指定開度的狀態使溢流液29的流出流路62和 調整流路65連通。如此一來，就會讓預備切削液體6’在 所需壓力下導向單元59的上下濾器53的外面，成爲濾器 5 3上形成有浮游粒子層6 1的狀態，預備切削液體6 ’的回 收切削液體6a是通過浮游粒子層6 1及濾器53受到過濾[ -17- 201127555 然後從濾液流出流路55流出。交叉流動在濾器53外面的 液體是成爲粒子已濃縮的溢流液29從溢流液流路58流出 至流出流路62。 此時，爲了過濾雜質濃度大的預備切削液體6’，明 確的作法是由驅動馬達54驅動濾器53使濾器53以40〜 70Hz前後的振動數並且以1/2英吋〜1英吋（約13〜 25mm)前後的振幅振動，如此一來就能夠執行良好的過 濾。在由上述振動過濾機28過濾混有10%重量前後之雜 質（微細固體）的預備切削液體6’時，若是以50 Hz的振 動數並且以3/4英吋（約19mm)的振幅使濾器53振動時 ，就能夠在濾器5 3外面形成有良好的浮游粒子層6 1，能 夠執行良好的過濾。 但是，即使是在上述良好的狀態下進行過濾，但持續 進行過濾時，浮游的浮游粒子層61的層厚會慢慢變厚接 近濾器53，導致濾器53的過濾性能降低。 若濾器5 3的過濾性能降低，則從流出流路3 2流出的 回收切削液體6a的流量會慢慢減少，但因爲回收切削液 體6a的流量是由流量計67構成的過濾性能檢測手段68 檢測，其檢測値會輸入至轉換控制器70，所以當過濾性 能檢測手段68的過濾性能檢測値降低成設定値以下時， 轉換控制器70就會對轉換閥63執行轉換使上述溢流液 29經由開放流路66開放至預備切削液體儲存槽26。 如此一來，厚厚成長在濾器53上的浮游粒子層61就 會受到瞬間沖洗。此時，藉由關閉設置在回收切削液體;"S -10- 201127555 Grain precipitation. In Fig. 2, reference numeral 20 denotes a first separating means, and the first separating means 20 passes through the used honing slurry 3' introduced into the storage tank 18 of the used slurry through the introduction pipe 22 having the pump 21. Here, the used honing slip 3' is separated into a recovered abrasive grain 5a and a fine particle mixed liquid 23 containing chips and crushed abrasive grains. The honing slurry 3' used in the above state is formed by mixing the abrasive grains 5a having a large particle diameter of about 18.5 to 21.5 μm which is mixed with a specific gravity P of 3.2 in the cutting liquid and having substantially the same level as the new abrasive grains 5. ; chips having a large number of micrometers; and broken abrasive grains that are broken up to a few micrometers. The first separation means 20 can be efficiently separated into the above-mentioned recovery by using a decanter type centrifugal separator, for example, by applying a centrifugal effect to the honing slip 3' 300 to 1 000 G (usually 400 to 500 G). The abrasive particles 5a and other microparticles containing the chips and the broken abrasive particles are mixed with the liquid 23. Further, in addition to the above-described decanter type centrifugal separator, the first separation means 20 may be a hydrocyclone or the like. In Fig. 2, 24 is a second separation means, and the second separation means 24 is introduced with the fine particle mixed liquid 23 containing the chips and the crushed abrasive grains separated by the first separation means 20, and is separated into solid wastes 25 therefrom. And prepare the cutting liquid 6 '. The above-mentioned honing paste 3 and the used honing powder 3' generally have a so-called relatively high viscosity of 100 to 170 psi, so that a few micrometers are separated from the finely mixed fine liquid 23 It is not easy to separate the chips and the crushed abrasive particles, but it is possible to separate the second fine separation means 24, which is a decanter type centrifugal separator which is about 3000G, by applying the centrifugal force to the fine particle mixed liquid [S ] -11 - 201127555 23 The fixed waste 25 formed by the chips and the broken abrasive grains, and the preliminary cutting liquid 6' are effectively separated. Further, in addition to the above-described decanter type centrifugal separator, the second separation means 24 may be a separator type centrifugal separator or the like. Further, in Fig. 2, a preliminary cutting liquid storage tank 26 for guiding the preliminary cutting liquid 6' from the second separating means 24 is provided. Since the second separation means 24 is difficult to completely separate into fine solids, the preliminary cutting liquid 6' of the preliminary cutting liquid storage tank 26 is supplied from the bottom to the vibration filter 28 by the supply pump 27, and is subjected to vibration filtration. The machine 28 separates the recovered cutting liquid 6a from which the fine solids have been removed and the overflow liquid 29 having an increased fine solid concentration, and returns the overflow liquid 29 to the preliminary cutting liquid storage tank 26. Further, since the fine solid concentration of the preliminary cutting liquid 6' of the preliminary cutting liquid storage tank 26 is gradually increased, a part of the preliminary cutting liquid 6' is taken out, and is separated into fine solids and cut by the distillation separation device 30. liquid. In this way, it is possible to recycle substantially the entire amount of the cutting liquid contained in the used honing slurry 3', and only a small amount of fine solid is discarded. In the second drawing, 31 is a coarse particle removing device, and the coarse particle removing device 31 is introduced into the vibration filter 28 by the outflow channel 32, while the recovered abrasive grains 5a separated by the first separating means 20 are introduced. The separated cutting liquid 6a is collected, and the collected abrasive grains 5 a which are larger in particle size than the recovered abrasive grains 5a are washed by the clean recovered cutting liquid 6a, thereby separating the coarse particles 33 and taken out. The mixed slurry 34 formed by the recovered abrasive grains 5a and the recovered cut "S) -12- 201127555 cutting liquid 6a. The above-described coarse particle removing device 3 1 ' uses a wet screening device (vibrating sieve device), whereby the coarse particles 3 3 contained in the abrasive grains 5 a can be efficiently separated and recovered. In Fig. 2, reference numeral 35 denotes a slurry mixing device into which the mixed slurry 34 from the coarse particle removing device 31 can be introduced, and the slurry mixing device 35 is provided with a new supply to the abrasive storage tank 36. The abrasive grain supply device 39 supplied by the supply device 38 such as a screw feeder driven by the motor 37; and the cutting liquid supply device 42 supplied with the new cutting liquid 6 through the supply pipe 41 provided with the supply valve 40 The mixed slurry 34, the new abrasive grains 5, and the new cutting liquid 6 are introduced, and the pulverized slurry 3 having a predetermined concentration is produced by stirring with a stirring device 43. The honing slurry 3 produced by the above-described slurry mixing device 35 is supplied to the slurry supply tank 4 of the slurry supply device 2 through a supply pipe 45 provided with a pump 44. The outlet of the supply pipe 45 is provided with a valve 46, and one end of a return pipe 48 having a valve 47 is connected between the pump 44 of the supply pipe 45 and the valve 46, and the other end of the return pipe 48 is connected to the slurry. The mixing device 35 returns a portion of the honing slurry 3 supplied to the slurry supply device 2 to the slurry mixing device 35 by the supply pipe 45. The return pipe 48 is provided with a slurry concentration detector 49 capable of detecting the concentration of the abrasive grains of the honing slurry 3, and is provided with the concentration detecting unit 50 according to the concentration of the slurry concentration detector 49. The motor 37 of 39 or the controller 51 that controls the supply valve 40 of the liquid supply device 42 controls. [S] -13" 201127555 Fig. 3 is a schematic flow chart showing the vibration filter 28 provided in Fig. 2, in which the vibration filter 28 accommodates a plurality of disk-shaped filters 53 in the cylindrical container 52. The container 52 is driven to rotate in a reciprocating manner by the drive motor 54 to vibrate the filter 53. On the other hand, in the center in the radial direction of the filter 53, a filtrate outflow passage 55 is formed, and a preparatory cutting liquid for preparing the preliminary liquid storage tank 26 by the supply pump 27 is provided on the radial direction side through which the filtrate outflow passage 55 passes. 6' is a filtered introduction flow path 57 introduced through the supply flow path 56, and an overflow liquid flow path 58 is provided on the other side in the radial direction through which the filtrate outflow flow path 55 passes. Fig. 4 is a view showing the filter structure of the filter 53 of the vibration filter 28, and the two filters 53 interposed therebetween are formed as a single unit 59. The unit 59 has a plurality of stacked layers at a desired interval 60. Then, the preliminary cutting liquid 6' introduced from the sputum introduction flow path 57 is passed through the upper and lower outer surfaces of the guide unit 59 at intervals 60, and the collected cutting liquid 6a is filtered by the respective filters 53 as indicated by a broken line by the intersecting flow. The recovered cutting liquid 6a is then discharged from the interval 5 3 a to the filtrate outflow path 5 5 . At this time, since the filter 53 is vibrated, the floating particle layer 161 floating on the outer surface of the filter 53 is formed on the outer surface of the filter 53 as shown in Fig. 5. Therefore, the preparatory cutting is performed. The liquid 6' is formed by filtration using the floating particle layer 61. The separated liquid of the recovered cutting liquid 6a is discharged from the effluent flow path 62 of Fig. 3 as the overflow liquid 29 in which the particles have been concentrated. When the vibration filter 28 is continuously filtered, the layer thickness of the floating floating particle layer 61 is gradually increased, so that the filtration performance is lowered. Further, when the operation of the vibration filter 28 is stopped, the above-mentioned float: S) -14 - 201127555, the particle layer 61 is in close contact with the filter 53, and there is a problem that good filtration cannot be obtained when the operation starts again. Therefore, as shown in Fig. 3, a switching valve 63 (three-way switching valve) is provided in the outflow channel 62 from which the overflow liquid 29 flows out, and the switching valve 63 is connected to the transmission regulating valve 64. The overflow liquid 29 is returned to the adjustment flow path 65 of the preliminary cutting liquid storage tank 26; and the open flow path 66 for allowing the overflow liquid 29 to directly open to the preliminary cutting liquid storage tank 26 is added, in order to detect the vibration. The filtration performance of the filter 53 of the filter 28 is provided with a filtration performance detecting means 68 composed of a flow meter 67 in the effluent flow path 3 2 for recovering the cutting liquid 6a. The filtration performance detecting means 68 may be configured to detect the supply pressure of the preliminary cutting liquid 6' supplied to the filter 53 by the pressure gauge 69 provided in the supply flow path 56 when the supply pump 27 is metered. Next, a switching controller 70 is provided to control the switching of the switching valve 63 so that the overflow liquid 29 passes through when the filtering performance detected by the filtering performance detecting means 68 is reduced to the setting value or less. The open flow path 66 is opened to the preliminary cutting liquid storage tank 26. Further, in the third diagram, the effluent flow path 32 for recovering the cutting liquid 6a is provided with a shutoff valve 71, and the overflow liquid 29 is opened to the preliminary cutting liquid storage tank 26 via the open flow path 66. At the time, the outflow of the recovered cutting liquid 6 a is blocked. Further, the preliminary cutting liquid storage tank 26 is provided with a preliminary cutting liquid 6' heating heater 72. The heater 72 is controlled by the controller 74 in accordance with the detected temperature at which the temperature of the preliminary cutting liquid 6' is detected in the preparatory cutting fluid [S ] -15 - 201127555 body storage tank 26 . The pre-cutting liquid 6' of the temperature and viscosity of the different types of preparatory cutting liquids 6' in the sixth type is an inflection point X having a viscosity different from the high viscosity depending on the type, and therefore is prepared by the above-described heater 72 according to the preliminary cutting fluid. The temperature of the cutting liquid 6' of the cutting liquid 6' is maintained at a temperature equal to or higher than the inflection point X. The heater 72 for heating can be heated by an electric heater or a warm type, and the heating position of the preparatory cutting liquid 6' can also be arbitrarily selected. Further, the above-described conversion controller 70 is configured to convert the switching valve 63 to the open flow path 66 before the filtration of the filter 28 is stopped. That is, when the stop command 75 is input to 70, the switching controller 70 issues an instruction to stop the vibration station after the liquid 29 executing the switching valve 63 is opened to the open flow path 66. Next, the operation of the above embodiment will be described. As shown in Fig. 2, the slurry supply pulverized slurry 3 of the slip supply device 2 is supplied to the jigsaw 1 through the supply pipe 9 through the supply pump 9, and is fed together with a steel wire (not shown). Cutting process. The used honing paste 3' using the wire saw 1 is a pump 13 supplied to the used slurry I via the discharge pipe 14, used in the storage tank 18 of the used slurry, using the pump 21 is introduced into the first separation thermometer 7 through the introduction pipe 22, and the relationship between the figure and the seventh figure is changed to the type of the low body 6'. Various conditions such as preparatory cutting water are converted by the vibration over-flow liquid 29 switching controller so that the overflow I filter 28 can be transported into the tank 4 and supplied downwardly to the storage tank or the like for use in the storage tank 18 for discharge. Milling slurry 3' means 20. -16- 201127555 The used honing slip 3' introduced into the first separating means 20 is separated by 300~1 000G by a centrifugal effect produced by a decanter type centrifugal separator or the like, thereby effectively separating into a recovery mill. The granule 5a and the granules containing the chips and the broken abrasive particles are mixed with the liquid 2 3 . The fine particle mixed liquid 23 containing the chips and the crushed abrasive particles separated by the first separating means 20 is introduced into the second separating means 24 which can be applied to a degree of 3 〇〇〇 G by a centrifugal force such as a decanter type centrifugal separator. It is then separated into a dehydrated solid waste 25 and a preliminary cutting liquid 6'. The solid waste 25 which has been dehydrated by the second separation means 24 is about 2 to 3% of the total solid amount in the honing slip 3, and is separated into recyclable recovered abrasive grains 5a by the first separation means 20 The regeneration rate can reach 9 7 to 9 8 %. The preliminary cutting liquid 6' stored in the preliminary cutting liquid storage tank 26 after the solid waste 25 is removed by the second separating means 24 is introduced into the vibration filter to remove the fine solid, and the recovered cutting liquid 6a is taken out. In other words, in the state where the filter 53 of the vibration filter 28 is reciprocally oscillated by the drive motor 54 as shown in Fig. 3, the preparatory cutting liquid 6' of the preliminary cutting liquid storage tank 26 is introduced into the filtered liquid by the supply pump 27. At this time, the flow path 57 is introduced, and at this time, the switching valve 63 is switched and the adjustment valve 64 is adjusted to a predetermined opening degree, and the outflow flow path 62 of the overflow liquid 29 and the adjustment flow path 65 are communicated. As a result, the preliminary cutting liquid 6' is guided to the outside of the upper and lower filters 53 of the unit 59 under the required pressure, and the floating particle layer 6 1 is formed on the filter 53, and the cutting of the cutting liquid 6' is prepared. The liquid 6a is filtered by the floating particle layer 161 and the filter 53 [ -17- 201127555 and then flows out of the filtrate outflow path 55. The liquid flowing across the outside of the filter 53 is such that the overflow liquid 29 from which the particles have been concentrated flows out from the overflow liquid flow path 58 to the outflow flow path 62. At this time, in order to filter the preliminary cutting liquid 6' having a large impurity concentration, it is clarified that the filter 53 is driven by the drive motor 54 so that the filter 53 has a vibration number before and after 40 to 70 Hz and is 1/2 inch to 1 inch (about 13 to 25 mm) amplitude vibration before and after, so that good filtering can be performed. When the preliminary cutting liquid 6' in which 10% by weight of impurities (fine solids) are mixed and mixed by the above-described vibration filter 28, the filter is made with a vibration number of 50 Hz and an amplitude of 3/4 inch (about 19 mm). When the vibration is 53, a good floating particle layer 161 can be formed on the outside of the filter 53, and good filtration can be performed. However, even if the filtration is carried out in the above-described favorable state, the layer thickness of the floating floating particle layer 61 gradually increases to the vicinity of the filter 53 when the filtration is continued, and the filtration performance of the filter 53 is lowered. When the filtration performance of the filter 53 is lowered, the flow rate of the recovered cutting liquid 6a flowing out from the outflow channel 3 2 is gradually decreased, but the flow rate of the recovered cutting liquid 6a is detected by the filtration performance detecting means 68 constituted by the flow meter 67. The detection enthalpy is input to the conversion controller 70, so when the filtration performance detection 过滤 of the filtration performance detecting means 68 is lowered to the setting 値 or lower, the switching controller 70 performs switching to the switching valve 63 to pass the overflow liquid 29 via The open flow path 66 is opened to the preliminary cutting liquid storage tank 26. As a result, the floating particle layer 61 which is thickly grown on the filter 53 is instantaneously washed. At this time, by shutting down the set cutting liquid
-18- 201127555 6a之流出流路32的阻斷閥71，就能夠使預備切削液體6’ 全部成爲溢流液29，因此能夠提高沖洗浮游粒子層61的 作用。 由於浮游粒子層61沖洗後的濾器53的面是恢復成乾 淨的狀態，因此轉換控制器70就會再度對轉換閥63執行 轉換使上述溢流液29流至具備有調整閥64的調整流路 65。藉此使濾器53上形成有良好狀態的浮游粒子層61能 夠執行良好的過濾。 上述中，利用設置在預備切削液體儲存槽26的加熱 器72，使預備切削液體6’的黏度加熱成第6圖、第7圖 所示從高黏度變化成低黏度之反彎點X以上的溫度。如 此一來，能夠降低預備切削液體6 ’的黏度提高過濾效率 的同時，穩定的黏度能夠使浮游粒子層61的形成穩定。 此外，對轉換控制器70輸入停止指令75時，轉換控 制器70會在執行轉換閥63的轉換使溢流液29開放至開 放流路66之後，就發出振動過濾機28運轉停止的指令， 所以當振動過濾機28運轉停止時濾器53上的浮游粒子層 6 1會受到沖洗，因此就能夠解決停止時浮游粒子層61緊 貼在濾器5 3造成運轉再度開始時無法獲得良好過濾的問 題。 S ] 如以上所述，對溢流液29的流出進行調整藉此調節 作用在濾器53的壓力使濾器53上形成有穩定的浮游粒子 層6 1而能夠執行穩定的過濾，當濾器5 3上的浮游粒子層 6 1的層厚變厚過濾性能降低時，開放溢流液2 9的流出藉[ -19- 201127555 此沖洗浮游粒子層6 1，所以能夠在過濾性能降低時自動 恢復濾器53的過濾性能，如此一來能夠使長期間的過濾 穩定。 因此，將上述第1分離手段20分離的回收磨粒5a導 入至濕式篩分裝置等構成的粗粒去除裝置31的同時，由 上述振動過濾機28使從預備切削液體6’分離的回收切削 液體6a導入至上述粗粒去除裝置3 1，以回收切削液體6a 對上述回收磨粒5 a進行洗淨的同時分離去除微粒聚集後 成長的粗粒3 3，將回收磨粒5 a和回收切削液體6 a形成 的混合粉漿34供應至粉漿混合裝置3 5。 粉漿混合裝置3 5，供應有來自於上述粗粒去除裝置 31的混合粉漿34之同時，由磨粒供應裝置39的供應機 3 8供應新磨粒5，此外由切削液體供應裝置42的供應閥 40供應新切削液體6，藉此就能夠製造指定濃度的硏磨粉 漿3。 在上述粉漿混合裝置35製造的硏磨粉漿3是由配備 在泵浦44所進行循環之回送管48的粉漿濃度檢測器49 檢測磨粒的濃度，根據該粉漿濃度檢測器49所檢測出的 濃度檢測値50，利用控制器51執行磨粒供應裝置39之 供應機3 8的馬達3 7的驅動，或者是執行切削液體供應裝 置42之供應閥40的調整，藉此執行新磨粒5或新切削液 體6的供應，自動調整硏磨粉漿3成指定濃度。 在上述粉漿混合裝置35調整成指定濃度的調整硏磨 粉漿3是由具備有泵浦44的供給管45供應至粉漿供應裝 -20- 201127555 置2的粉漿供應槽4，與上述相同地供應至線鋸1。 如以上所述，在第1分離手段20是將使用過的硏磨 粉漿3 ’分離成回收磨粒5 a和微粒混合液體2 3，此外，經 由第1分離手段20分離的微粒混合液體23是由第2分離 手段24分離成固體廢棄物25和預備切削液體6’，再加 上，預備切削液體6’是被導入至振動過濾機28將回收切 削液體6a回收，上述回收磨粒5a和回收切削液體6a是 被導入至粉漿混合裝置35再度被利用爲硏磨粉漿3，因 此就能夠削減高價之新磨粒5和新切削液6的使用量，能 夠大幅降低運轉成本。再加上，經由第2分離手段24分 離的固體廢棄物25及在粗粒去除裝置31分離的粗粒33 的量是非常少量，因此減少廢棄物的量除了有利於環保之 外，還能夠降低廢棄物的處理費用。 另外，本發明的線鋸之硏磨粉漿循環裝置，並不限於 上述的實施例，在不脫離本發明主旨範圍內理所當然是可 加以各種變更。 [產業上之可利用性] 從線鋸使用過的硏磨粉漿回收磨粒能夠再利用的同時 ，不需人工作業就能夠穩定去除混入在該使用過之硏磨粉 漿中的微細固體藉此使切削液體能夠做爲再利用，能夠實 現運轉成本的低廉化和廢棄物的減量化。 【圖式簡單說明】 -21 - 201127555 第1圖爲表示先前線鋸所使用的硏磨粉漿供應路徑的 方塊圖。 第2圖爲表示本發明線鋸之硏磨粉漿循環裝置的一實 施例方塊圖。 第3圖爲表示第2圖裝置所具備的振動過濾機槪略的 流程圖。 第4圖爲表示振動過濾機的濾器過濾構造的剖面圖。 第5圖爲表示浮游粒子層形成在濾器上的狀態說明圖 〇 第6圖爲表示被過濾液的溫度和黏度之關係與反彎點 的線圖。 第7圖爲表示與第6圖不同之被過濾液的溫度和黏度 之關係與反彎點的線圖。 【主要元件符號說明】 1 :線鋸 2 :粉漿供應裝置 3 :硏磨粉漿 3’：使用過的硏磨粉漿 5 :磨粒 5a :回收磨粒 6 :切削液體 6’ ：預備切削液體 6a :回收切削液體 ：S) -22- 201127555 20 :第1分離手段 23 :微粒混合液體 24 :第2分離手段 2 5 :固體廢棄物 26 :預備切削液體儲存槽 27 :供應用泵浦 28 :振動過濾機 2 9 :溢流液 3 1 :粗粒去除裝置 3 2 :流出流路 3 3 :粗粒 3 5 :粉漿混合裝置 49 :粉漿濃度檢測器 5 〇 :濃度檢測値 5 1 :控制器 5 3 :濾器 6 1 :浮游粒子層 6 2 :流出流路 6 3 :轉換閥 6 4 :調整閥 6 5 :調整流路 6 6 :開放流路 67 :流量計（過濾性能檢測手段） 6 8 :過濾性能檢測手段 -23- 201127555 69 :壓力計（過濾性能檢測手段） 7 0 :轉換控制器 7 1 :阻斷閥 72 :加熱器 ：S) -24--18- 201127555 The shut-off valve 71 of the outflow channel 32 of 6a allows all of the preliminary cutting liquid 6' to be the overflow liquid 29, so that the action of flushing the floating particle layer 61 can be improved. Since the surface of the filter 53 after the floating particle layer 61 is flushed is restored to a clean state, the switching controller 70 again performs switching to the switching valve 63 to flow the overflow liquid 29 to the regulating flow path provided with the regulating valve 64. 65. Thereby, the floating particle layer 61 formed in a good state on the filter 53 can perform good filtration. In the above, the viscosity of the preliminary cutting liquid 6' is heated by the heater 72 provided in the preliminary cutting liquid storage tank 26 to be changed from the high viscosity to the low viscosity of the reverse bending point X shown in Fig. 6 and Fig. 7 . temperature. As a result, the viscosity of the preliminary cutting liquid 6' can be lowered to improve the filtration efficiency, and the stable viscosity can stabilize the formation of the floating particle layer 61. Further, when the stop command 75 is input to the conversion controller 70, the conversion controller 70 issues a command to stop the operation of the vibration filter 28 after the switching of the switching valve 63 is performed to open the overflow liquid 29 to the open flow path 66. When the vibration filter 28 is stopped, the floating particle layer 61 on the filter 53 is washed, so that it is possible to solve the problem that the floating particle layer 61 is in close contact with the filter 53 at the time of stopping, and the filtration cannot be obtained at the start of the operation. S ] As described above, the outflow of the overflow liquid 29 is adjusted to thereby adjust the pressure acting on the filter 53 to form a stable floating particle layer 61 on the filter 53, and stable filtration can be performed when the filter 5 3 is When the layer thickness of the floating particle layer 6 1 is reduced, the filtration performance is lowered, and the flow of the open overflow liquid 2 9 is borrowed [ -19- 201127555 This rinses the floating particle layer 161, so that the filter 53 can be automatically restored when the filtration performance is lowered. The filtration performance is such that filtration over a long period of time can be stabilized. Therefore, the recovered abrasive grains 5a separated by the first separation means 20 are introduced into the coarse particle removal device 31 constituted by a wet screening device or the like, and the recovery filter is separated from the preliminary cutting liquid 6' by the vibration filter 28. The liquid 6a is introduced into the coarse particle removing device 3 1 to recover the cutting liquid 6a, and the coarse particles 3 3 which are grown after the fine particles are collected are removed while the recovered abrasive grains 5a are washed, and the abrasive grains 5 a are recovered and the cutting is recovered. The mixed slip 34 formed of the liquid 6 a is supplied to the slurry mixing device 35. The slurry mixing device 35 is supplied with the mixed slurry 34 from the above-described coarse particle removing device 31, and the new abrasive particles 5 are supplied from the supply device 38 of the abrasive grain supply device 39, and further, by the cutting liquid supply device 42 The supply valve 40 supplies a new cutting liquid 6, whereby a specified concentration of the honing slip 3 can be produced. The honing slip 3 produced by the above-described slip mixing device 35 detects the concentration of the abrasive particles by the slip concentration detector 49 provided in the return pipe 48 which is circulated by the pump 44, according to the slurry concentration detector 49. The detected concentration detecting enthalpy 50, the driving of the motor 37 of the supply unit 38 of the abrasive grain supply device 39 is performed by the controller 51, or the adjustment of the supply valve 40 of the cutting liquid supply device 42 is performed, thereby performing the new grinding. The supply of pellet 5 or new cutting fluid 6 automatically adjusts the honing slip 3 to the specified concentration. The tempering slurry 3 adjusted to the specified concentration in the slurry mixing device 35 is supplied from the supply pipe 45 provided with the pump 44 to the slurry supply tank 4 of the slurry supply device -20-201127555, and the above The same is supplied to the wire saw 1. As described above, in the first separating means 20, the used honing slip 3' is separated into the recovered abrasive grains 5a and the fine particle mixed liquid 2, and the fine particle mixed liquid 23 separated by the first separating means 20 The solid separation waste 25 and the preliminary cutting liquid 6' are separated by the second separation means 24, and the preliminary cutting liquid 6' is introduced into the vibration filter 28 to recover the recovered cutting liquid 6a, and the recovered abrasive grains 5a and Since the recovered cutting liquid 6a is introduced into the slurry mixing device 35 and used again as the honing slurry 3, the amount of the expensive new abrasive grains 5 and the new cutting fluid 6 can be reduced, and the running cost can be greatly reduced. Further, since the amount of the solid waste 25 separated by the second separation means 24 and the coarse particles 33 separated by the coarse particle removal device 31 is extremely small, the amount of waste can be reduced in addition to environmental protection. Waste disposal costs. Further, the honing slurry circulation device of the wire saw of the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention. [Industrial Applicability] The abrasive grains recovered from the wire saw can be reused, and the fine solids mixed in the used honing slurry can be stably removed without manual work. This enables the cutting liquid to be reused, and it is possible to reduce the running cost and reduce the waste. [Simple description of the drawing] -21 - 201127555 Fig. 1 is a block diagram showing the supply path of the honing slurry used in the previous wire saw. Fig. 2 is a block diagram showing an embodiment of a honing slurry circulating device of the wire saw of the present invention. Fig. 3 is a flow chart showing a schematic diagram of a vibration filter provided in the apparatus of Fig. 2. Fig. 4 is a cross-sectional view showing a filter filtration structure of the vibration filter. Fig. 5 is a view showing a state in which the floating particle layer is formed on the filter. Fig. 6 is a line diagram showing the relationship between the temperature and the viscosity of the liquid to be filtered and the inflection point. Fig. 7 is a line diagram showing the relationship between the temperature and viscosity of the liquid to be filtered and the inflection point which are different from Fig. 6. [Explanation of main component symbols] 1 : Wire saw 2 : Slurry supply device 3 : Honing slurry 3': Used honing paste 5 : Abrasive grain 5a : Recycling abrasive grain 6 : Cutting liquid 6 ' : Pre-cutting Liquid 6a: Recycled cutting liquid: S) -22- 201127555 20 : 1st separation means 23: Particulate mixed liquid 24 : 2nd separation means 2 5 : Solid waste 26 : Pre-cutting liquid storage tank 27 : Supply pump 28 :Vibration filter 2 9 :Overflow liquid 3 1 : coarse particle removal device 3 2 : Outflow flow path 3 3 : coarse particle 3 5 : slurry mixing device 49 : slurry concentration detector 5 〇: concentration detection 値 5 1 : Controller 5 3 : Filter 6 1 : Floating particle layer 6 2 : Outflow flow path 6 3 : Switching valve 6 4 : Adjustment valve 6 5 : Adjustment flow path 6 6 : Open flow path 67 : Flow meter (filter performance detecting means 6 8 : Filter performance detection means -23- 201127555 69 : Pressure gauge (filtering performance detection means) 7 0 : Conversion controller 7 1 : Blocking valve 72: Heater: S) -24-