JP4485888B2 - High-pressure liquid jet cutting device - Google Patents

Description

  The present invention relates to a high-pressure liquid jet cutting device that cuts a workpiece by jetting a high-pressure liquid containing an abrasive, and more particularly to a high-pressure liquid jet cutting device that can reuse an abrasive.

  The water jet is a jet of high-pressure water formed by applying energy to water by an ultra-high pressure pump or the like, and has a flow velocity of 2 to 3 times the speed of sound, for example. In recent years, methods and apparatuses for cutting various workpieces (workpieces) using this water jet have been developed. In particular, in order to improve cutting efficiency, attention has been focused on abrasive jets in which high-pressure water is mixed with a solid abrasive. This abrasive material is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, etc., and is a granular material having a particle size of, for example, several tens to several hundreds μm. These abrasive materials are processed together with high-pressure water. Collides with an object at high speed, destroys a part of the workpiece and cuts it.

  Such water jet cutting has the advantage that it can be cut without affecting the workpiece, and the occurrence of burrs on the cut surface can be reduced by the abrasive. Furthermore, in addition to being able to cut without problems even if the cutting line is a curve, there is an advantage that it is suitable for cutting composite materials and difficult-to-work materials. For this reason, in recent years, in order to dice a semiconductor substrate, particularly a packaged substrate, a cutting process using a water jet instead of a conventional cutting blade has been studied.

  In a water jet cutting apparatus using an abrasive jet, an abrasive used for cutting is generally collected and reused. This is because not all abrasive material sprayed with high-pressure water from the spray nozzle contributes to processing and is consumed in a single cut of the workpiece. This is because a large amount of abrasive is discarded, and the production efficiency is extremely lowered.

  Various problems occur when the abrasive is reused. For example, if recycled high-pressure water contains cutting waste from the workpiece, it not only reduces cutting efficiency but also causes cutting waste to adhere to the workpiece during cutting or cause equipment failure. It also becomes. For this reason, in order to reuse the abrasive, the cutting waste contained in the drainage must be removed. As an example of this, Patent Document 1 describes an apparatus that removes cutting waste contained in waste water with a filter.

  In addition, if the recycled abrasive material is also consumed, it cannot contribute to cutting, so the worn abrasive material must be collected and removed. As an example of recovering the abrasive, Patent Document 2 describes an apparatus for circulating the water in the catch tank and recovering the used abrasive with a filter. However, the apparatus disclosed in Patent Document 2 has a problem in that it requires manual labor to recover and reuse the abrasive, and the abrasive cannot be automatically reused.

  Furthermore, as an example in which abrasives can be circulated, in Patent Document 3, abrasive mixed waste liquid is transferred from a catch tank to a sedimentation tank, and by using a sedimentation tank, heavy cutting waste and abrasives are settled and separated. An apparatus for collecting material is described. However, even with this method, in order to collect and reuse the abrasive, it is assumed that it is necessary to collect the abrasive once by hand, regenerate it, and reload it into the device.

JP-A-11-33549 Japanese Patent Laid-Open No. 11-123661 JP 2001-260030 A

  As described above, in the conventional water jet cutting apparatus, the recovered abrasive is manually reloaded into the apparatus, and the abrasive cannot be automatically reused in the apparatus. Therefore, a water jet cutting apparatus that can be reused by automatically circulating an abrasive in the apparatus has been studied.

  For example, in the water jet cutting apparatus which the inventors of the present application are considering, as shown in FIG. 6, the abrasive mixture liquid in the abrasive mixture storage tank 122a or 122b is fed by the high pressure water supplied from the high pressure pump 115. Is fed at a high pressure, and this high-pressure abrasive mixture (abrasive jet) is jetted from the jet nozzle 130 onto the workpiece 105 to perform cutting. Further, after the abrasive liquid mixture ejected from the injection nozzle 130 is received by the catch tank 150, the abrasive material collecting means 160 removes the abrasive liquid mixture from the abrasive liquid mixture without being consumed (for example, a reusable particle size). 30 to 100 μm) is collected and returned to the one of the two abrasive mixture supply tanks 122a and 122b that is not used for cutting. With this configuration, the abrasive can be automatically circulated and reused in the apparatus. In the water jet cutting device of FIG. 6, the abrasive that was not recovered by the abrasive recovery means 160 was discharged untreated along with the waste water.

  However, since the water jet cutting device of the type that automatically circulates the abrasive as shown in FIG. 6 is a new device, there are technologies for recovering the abrasive to be reused, how to discharge the abrasive, etc. There was a problem.

  Specifically, first, the abrasive recovery means 160 could not completely recover all of the reusable abrasive particles. For this reason, in the drainage, not only the abrasive having a particle size that is unsuitable for reuse due to wear (for example, less than 30 μm) but also the reusable particle size that should be collected by the abrasive collecting means 160 if originally intended. (For example, 30 to 100 μm) abrasives were also mixed, and the amount was estimated to be about 8% of the reusable abrasives. As described above, the water jet apparatus of FIG. 6 has a problem that the reusable abrasive cannot be efficiently recovered.

  In addition, with regard to the abrasive discharged from the water jet cutting device of FIG. 6 together with the drainage, abrasives having a large particle size (for example, 10 μm or more), cutting waste, etc. are drained out of the device (drainage grooves, etc.). There is a problem that the drainage path is clogged up.

  Therefore, the present invention has been made in view of the above problems, and when the abrasive is circulated and automatically reused, the recovery efficiency of the abrasive having a reusable particle size can be improved, It is an object of the present invention to provide a new and improved high-pressure liquid jet cutting apparatus capable of removing abrasives having large particle sizes, cutting wastes, and the like from the drainage liquid and preventing clogging of the drainage path.

In order to solve the above problems, according to a first aspect of the present invention, an abrasive mixed liquid storage tank that stores an abrasive mixed liquid in which an abrasive and a liquid are mixed; and an abrasive mixed liquid storage tank; High-pressure liquid supply means for supplying the high-pressure liquid to the high-pressure liquid supply means for sending out the high-pressure liquid mixture stored in the polishing liquid mixture storage tank; An injection nozzle that injects the liquid onto the workpiece; a catch tank that receives the high-pressure abrasive mixture liquid injected from the injection nozzle; and a predetermined range that can be reused from the abrasive mixture liquid transferred from the catch tank And a polishing material recovery means for transferring a polishing material mixture containing the recovered polishing material to an polishing material mixture storage tank. . In this high-pressure liquid injection type cutting device, an abrasive mixed liquid containing abrasives not recovered by the abrasive recovering means is transferred from the abrasive recovering means, and a reusable particle size of the abrasive mixed liquid is transferred from the abrasive mixed liquid. Abrasive material separating means for separating and transferring the abrasive material to the catch tank, and for separating and removing abrasive material having a particle size that cannot be discharged. The abrasive material separating means is cut by a high-pressure liquid jet cutting device. An abrasive material replenishing port capable of replenishing the abrasive material from the outside is provided inside .

  Note that “abrasive material having a predetermined range of particle size that can be reused” is an abrasive material having an appropriate range of particle size (for example, 30 to 100 μm) that contributes to the cutting of the workpiece. In addition, “abrasive with a particle size that cannot be discharged” means a particle size that is large enough to cause a problem such as clogging the drainage path if it is included in the drainage and discharged (for example, 10 μm or more). This is an abrasive having

With this configuration, in the high-pressure liquid jet cutting apparatus that automatically circulates and reuses the abrasive, the reusable abrasive that could not be recovered by the abrasive recovery means can be recovered by the abrasive sorting means. For this reason, the recovery efficiency of reusable abrasives can be improved, so that the production cost can be reduced and the production efficiency can be improved. Further, since the drainage after removing the abrasive discharge impossible size, it is possible to prevent the abrasive clogged drain paths are deposited on drain paths. Furthermore, unlike the case where the abrasive is replenished to the catch tank, the operator can replenish the new abrasive safely without stopping the cutting process due to the configuration provided with the abrasive replenishment port.

  Further, the abrasive material separating means stores the abrasive material mixture containing the abrasive material transferred from the abrasive material collecting device and not recovered by the abrasive material collecting device, and is reusable contained in the abrasive material mixture solution. An abrasive recovery tank for precipitating the abrasive having a particle size; and a first abrasive mixture liquid containing an abrasive having a reusable particle size that has settled at the bottom of the abrasive recovery tank is transferred to the catch tank. A transporting means; filtering an abrasive mixture overflowing from the abrasive recovery tank and removing an abrasive having a particle size that cannot be discharged; and an abrasive mixture passing through the unnecessary material removing filter And discharging means for discharging to the outside.

  With this configuration, abrasive collection tanks can separate and reuse reusable abrasives and abrasives and cutting debris that cannot be reused due to sedimentation using a difference in specific gravity. A suitable abrasive can be suitably recovered and reused. Furthermore, among the abrasives and cutting scraps that are consumed and cannot be reused, those having a size that accumulates in the drainage path can be suitably removed and drained by the unnecessary matter removal filter. For this reason, it is possible to prevent the drainage path from being clogged.

  Further, the abrasive recovery means includes an abrasive recovery filter that passes an abrasive having a particle size in a predetermined range that can be reused among abrasives contained in the abrasive mixture liquid transferred from the catch tank; An abrasive material storage container for storing the abrasive material that has passed through the recovery filter; and a second transfer means for transferring an abrasive material mixture liquid containing the abrasive material stored in the abrasive material storage container to the abrasive material solution storage tank; By supplying liquid to the abrasive storage container, a liquid flow that passes through the abrasive recovery filter from the abrasive storage container side to the opposite side is generated, and the abrasives clogged in the abrasive recovery filter are removed. And an abrasive material recovery filter cleaning means.

  With such a configuration, the clogging of the abrasive recovery filter can be preferably eliminated by the abrasive recovery filter cleaning means. As a result, the abrasive material recovery means can suitably recover the reusable abrasive material, so that the amount of reusable abrasive material flowing from the abrasive material recovery means to the abrasive material separation means can be reduced and polished. The recovery load of the material sorting means can be suppressed. In addition, the life of the abrasive recovery filter can be extended.

  A first transfer means for transferring the abrasive mixture from the abrasive separation means to the catch tank; a second transfer means for transferring the abrasive mixture from the abrasive recovery means to the abrasive mixture storage tank; Alternatively, the third transfer means for transferring the abrasive mixture from the catch tank to the abrasive recovery means may include a positive pressure pump as a transfer power source. This configuration eliminates the problem of air mixing into the abrasive mixture circulating in the high-pressure liquid injection type cutting device, as in the case of using a negative pressure pump, and prevents degradation in cutting quality. can do.

  As described above, according to the high-pressure liquid injection type cutting apparatus of the present invention, when the abrasive is circulated and automatically reused, the recovery efficiency of the abrasive having a reusable particle size can be improved. Further, the drainage path can be prevented from being clogged by suitably removing abrasives, cutting waste, and the like having such a size as to clog the drainage path from the discharged abrasive mixture liquid.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
The high pressure liquid injection cutting device according to the first embodiment of the present invention will be described below. The high-pressure liquid jet cutting device according to the present embodiment is, for example, a water jet cutting device that cuts a workpiece with a jet of high-pressure water (abrasive jet) mixed with an abrasive as described below. Although configured, the present invention is not limited to such an example.

  First, based on FIG. 1, the whole structure of the water jet cutting device 1 concerning this embodiment is demonstrated roughly. FIG. 1 is a schematic diagram showing the overall configuration of the water jet cutting device 1 according to the present embodiment.

  As shown in FIG. 1, the water jet cutting device 1 according to the present embodiment jets high pressure water containing an abrasive to the workpiece 5, thereby cutting the workpiece 5 into a relatively free cutting line. The cutting device is capable of cutting with high accuracy (that is, water jet processing). The workpiece 5 to be cut by the water jet cutting apparatus 1 is, for example, various semiconductor substrates such as a silicon wafer and a packaged semiconductor substrate (for example, a CSP substrate), but is not limited thereto.

  Such a water jet cutting device 1 includes, for example, a high-pressure liquid supply means 10, an abrasive mixing means 20, an injection nozzle 30, a holding table 40, a table moving device 42, a catch tank 50, and an abrasive recovery means 60. And an abrasive sorting means 70 and a low-pressure liquid supply means 80.

The high-pressure liquid supply means 10 is composed of, for example, a high-pressure pump and a motor, which will be described later, and pressurizes water supplied from the outside, for example, 600 to 700 bar (1 bar = about 1.02 kgf / cm ² ). The high pressure water can be generated and supplied. The water supplied from the outside is, for example, tap water, but is not limited to this example, and may be pure water or the like. The high-pressure water generated by the high-pressure liquid supply means 10 is supplied to the abrasive material mixing means 20 via the high-pressure pipe 11 that is a pipe for carrying the high-pressure fluid.

  The abrasive mixing means 20 is composed of an abrasive mixed liquid storage tank, which will be described later, and stores abrasive mixed water in which abrasive (abrasive grains) and water are mixed. The abrasive mixing means 20 mixes the abrasive at a predetermined ratio with the high-pressure water supplied from the high-pressure liquid supply means 10, and sends out the high-pressure water mixed with the abrasive. This abrasive is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, diamond, etc., and is a granular material having a particle size of, for example, about several tens to several hundreds μm, and has a function of increasing the cutting efficiency of high-pressure water. Have In this embodiment, for example, alumina oxide having a particle size of 40 to 100 μm is used as the abrasive. High-pressure water mixed with such abrasives (hereinafter also referred to as “high-pressure abrasive mixture water”) is supplied to the injection nozzle 30 via the high-pressure pipe 21.

  The injection nozzle 30 is configured as an example of a high-pressure liquid injection unit that injects high-pressure liquid, and includes, for example, a nozzle pipe 31 and an orifice 32. The spray nozzle 30 is supplied with high-pressure abrasive mixed water from the abrasive mixing means 20 via the high-pressure pipe 21. For example, the injection nozzle 30 injects the high-pressure abrasive mixed water from above to the workpiece 5 held on the holding table 40 at high speed.

  The spray nozzle 30 is stably fixed to the apparatus main body by, for example, a nozzle fixing member (not shown). The injection nozzle 30 is configured to be movable up and down in the Z-axis direction (vertical direction) by, for example, an elevating mechanism (not shown). Thus, the distance between the tip of the injection nozzle 30 and the workpiece 5 can be adjusted according to the type, thickness, surface irregularity, and the like of the workpiece 5.

  Further, as shown in a partially enlarged view in FIG. 1, an orifice 32 for reducing the ejection diameter of the high-pressure water is attached to the tip of the nozzle tube 31 of the injection nozzle 30. The orifice 32 includes, for example, an orifice body 322 having a predetermined fine diameter jet outlet 321 formed at the tip thereof, and an orifice cover provided so as to cover the orifice body 322 and screwed to the tip portion of the nozzle tube 31. 323. The orifice body 322 is fixed to the tip of the injection nozzle 30 by screwing the orifice cover 323.

  The flow rate of the high-pressure water jet (i.e., water jet) J jetted from the jet nozzle 30 is about 2 to 3 times the speed of sound, for example. Further, the distance between the tip of the injection nozzle 30 and the surface of the workpiece 5 is, for example, 50 μm to 1 mm, and is adjusted so that both are as close as possible. Thus, by bringing the injection nozzle 30 and the workpiece 5 close to each other, it is possible to suppress the diffusion of the injected high-pressure water jet J as much as possible, and to prevent the cutting width of the workpiece 5 from becoming wide. Further, the diameter of the injection nozzle 30 (the diameter of the discharge outlet 321) is, for example, about 250 μm. In this case, the cutting width of the workpiece 5 is, for example, about 300 μm.

  In this way, the water jet J, which is a high-pressure water jet mixed with the abrasive, is jetted onto the workpiece 5 by the jet nozzle 30, thereby cutting the workpiece 5 with the energy of the high-pressure water. be able to. At this time, since the abrasive material collides with the workpiece 5 together with the high-pressure water and destroys and cuts a part of the workpiece 5, the cutting efficiency can be improved. Thus, the water jet J according to the present embodiment is configured as an abrasive jet.

  The holding table 40 is configured as an example of a workpiece holding unit that holds a workpiece. The holding table 40 is a plate-like member formed of, for example, a hard metal such as stainless steel, and holds and fixes the workpiece 5 that is a workpiece. The holding table 40 is formed with a table window 401 serving as an opening for allowing the water jet J to pass through at a portion to which the workpiece 5 is fixed. The table window 401 has, for example, a shape (for example, a substantially rectangular shape) corresponding to the workpiece 5, and the size thereof is slightly smaller than the outer shape of the workpiece 5. The workpiece 5 is arranged on the upper portion of the table window 401, and the workpiece 5 is fixed to the holding table 40 by fixing the outer periphery of the workpiece 5 with a cover or a locking claw (not shown). 5 is fixed. Further, since the water jet J ejected by the ejection nozzle 30 passes through the portion of the table window 401, the holding table 40 itself is not cut by the water jet J.

  For example, a plate-like support member (jig) that supports the workpiece 5 from below may be attached to the table window 401 of the holding table 40. By providing this support member, it is possible to prevent the workpiece 5 from being deformed by the pressure of the high-pressure water at the time of cutting and improve the processing accuracy.

  In the present embodiment, the workpiece 5 is held and fixed by the holding table 40 having the table window 401. However, the present invention is not limited to this example. For example, various mounting tables, jigs, holding tools, etc. The workpiece 5 may be held and fixed by the workpiece holding means configured as follows.

  The table moving device 42 includes, for example, a drive mechanism such as an electric motor and a gear, and moves the holding table 40 in the horizontal direction (X-axis and Y-axis directions). By moving the holding table 40 in the X-axis and Y-axis directions by such a table moving device 42, the workpiece 5 held by the holding table 40 is moved in the X-axis and Y-axis directions with respect to the injection nozzle 30. It can be moved relative. Thereby, the injection position (cutting part) of the water jet J with respect to the workpiece 5 can be changed, and the workpiece 5 can be cut | disconnected continuously. The feed speed of the workpiece 5 at the time of cutting varies depending on the thickness and material of the workpiece 5 to be cut, but is, for example, 20 mm / second. The configuration of the table moving device 42 is not limited to the above example, and various design changes can be made as long as the workpiece 5 can be moved in the horizontal direction.

  The catch tank 50 is, for example, a vertically long water tank whose upper surface is open. For example, the catch tank 50 is provided below the holding table 40 and directly below the injection nozzle 30. The catch tank 50 stores therein water containing abrasives up to a predetermined height, and supply and discharge of water to the catch tank 50 are controlled in order to keep the water surface constant. .

  The catch tank 50 functions as a water receiving tank for the water jet J. That is, the catch tank 50 can receive the weakened power of the water jet J penetrating through the workpiece 5 as described above using the stored water as a buffer material. At the bottom of the catch tank 50, the abrasive contained in the abrasive mixture water received as described above settles and accumulates. Further, a pipe 51 is connected to, for example, the side bottom of the catch tank 50, and the abrasive and water in the catch tank 50 are discharged through this pipe 51 and transferred to the abrasive collecting means 60. .

  The abrasive recovery means 60 recovers the abrasive having a predetermined range of particle size (for example, 30 to 100 μm) from the abrasive mixed water transferred from the catch tank 50 via the pipe 51 (primary recovery). ) And transfer to an abrasive mixing device. The abrasive material recovery means 60 includes an abrasive material recovery filter (not shown; details will be described later) that allow the reusable particle size abrasive material to pass therethrough, and polishing that passes through the abrasive material recovery filter. The material is collected and stored, and the abrasive mixed water containing the recovered abrasive is transferred to the abrasive mixing means 20 via the pipe 61. Further, the abrasive mixed water containing the abrasive not recovered through the abrasive recovery filter is discharged from the abrasive recovery means 60 to the abrasive separation means 70 via the pipe 62.

  The abrasive material separation means 70 transfers the abrasive material mixture containing the abrasive material that has not been recovered from the abrasive material recovery means 60 via the pipe 62. The abrasive material separating means 70 separates and collects (secondary recovery) abrasives having a reusable particle size (for example, 30 to 100 μm) from the transferred abrasive mixture, and contains the recovered abrasives. The mixed water is transferred to the catch tank 50 via the pipe 71. As a result, the abrasive having a reusable particle size that has not been recovered by the abrasive recovery means 60 can be recovered, and the recovery efficiency of the abrasive can be improved.

  In addition, the abrasive material separating means 70 is an abrasive material having a relatively large particle size (for example, 10 μm or more) that cannot be discharged from the mixed abrasive solution after collecting the abrasive material having a reusable particle size as described above. Sort and remove cutting waste. Furthermore, the abrasive material separating means 70 discharges the abrasive material mixed liquid from which the abrasive material has been collected and removed as described above to the outside of the apparatus through the drain pipe 72 as waste water. As a result, it is possible to prevent the drainage from containing relatively large abrasive particles and cutting waste that cannot be discharged, so that a drainage channel (not shown) such as a drainage groove communicating with the drainage pipe 72 is provided. It can prevent clogging. The drainage may contain an abrasive having a relatively small particle size (for example, less than 10 μm). However, since the abrasive has a small particle size, the drainage path is not clogged.

  The low-pressure liquid supply means 80 is composed of, for example, a low-pressure pump and a motor, which will be described later, and generates low-pressure water from water supplied from the outside and supplies it to each part. The water supplied from the outside is, for example, tap water, but is not limited to this example, and may be pure water or the like. The low-pressure water generated by the low-pressure liquid supply means 80 is supplied to the catch tank 50, the abrasive material recovery means 60, and the abrasive material separation means 70 via pipes 81, 82, 83, and 84, respectively. Thus, the pipes 81, 83, 84 for discharging the low-pressure water supplied from the low-pressure liquid supply means 80 are auxiliary means (water flow) when transferring the abrasive mixture liquid between the parts of the cutting device 1 via the pipes. The pipe 82 functions as an abrasive recovery filter cleaning means, which will be described in detail later.

  The water jet cutting device 1 configured as described above is configured to move the holding table 40 relative to the injection nozzle 30 in the X-axis and Y-axis directions while injecting the water jet J from the injection nozzle 30. The workpiece 5 can be cut by causing the water jet J containing an abrasive to act along the planned cutting line of the workpiece 5.

  As described above, the water jet cutting apparatus according to the present embodiment employs a cutting method in which the injection nozzle 30 is fixed and the workpiece 5 is moved by the holding table 40 during the cutting process. By adopting such a cutting method, since the position of the injection nozzle 30 is fixed, there is an advantage that the catch tank 50 can be downsized, the installation area can be reduced, and the configuration of the moving mechanism can be simplified. However, the present invention is not limited to this example, and the holding table 40 may be fixed and the injection nozzle 30 may be moved for cutting.

  Further, the water jet cutting device 1 uses the abrasive material mixing means 30, the catch tank 50, the abrasive material recovery device 60, the abrasive material sorting means 70, and the like to supply an abrasive material having an appropriate particle size for cutting processing. It can be recycled and automatically reused. As a result, it is possible to improve the productivity by reusing the abrasive without manpower, thereby improving the utilization efficiency.

  Next, the circulation structure for automatically reusing the abrasive in the water jet cutting device 1 according to the present embodiment will be described in detail with reference to FIG. In addition, FIG. 2 is explanatory drawing which shows the circulation structure for automatically recycle | reusing an abrasive | polishing material in the water jet cutting device 1 concerning this embodiment.

  As shown in FIG. 2, in the water jet cutting device 1 according to the present embodiment, the abrasive that is reused is basically (1) the abrasive mixture storage tank 22 → (2) the injection nozzle 30 → (3) Catch tank 50 → (4) Abrasive recovery means 60 → (5a) Circulate through the path of abrasive mixture storage tank 22. Further, the reusable abrasive material that has not been collected by the abrasive material collecting means 60 is (4) abrasive material collecting means 60 → (5b) abrasive material separating means 70 → (6) catch tank 50 → (7) abrasive material. It circulates through a route called material recovery means 60. As described above, the abrasive material circulation structure of the water jet cutting device 1 according to the present embodiment is characterized in that the abrasive material separating means 70 is newly installed as compared with the water jet cutting device shown in FIG. . Below, each part which comprises the circulation path for this abrasive | polishing material reuse is explained in full detail.

  First, the high pressure pump 15 will be described. The high-pressure pump 15 is a configuration example of the above-described high-pressure liquid supply means 10, and generates high-pressure water from external water supply, and the high-pressure water may be collectively referred to as high-pressure pipes 11 a and 11 b (“high-pressure pipe 11”). ) To the abrasive mixture liquid storage tanks 22a and 22b (sometimes collectively referred to as “abrasive mixture liquid storage tank 22”).

  Next, the abrasive mixing means 20 will be described. The abrasive material mixing means 20 includes, for example, two abrasive material mixture storage tanks 22a and 22b, a tank switching device 23, and high pressure pipes 24a and 24b.

  The abrasive mixed liquid storage tank 22 is composed of a high pressure resistant container sealed from the outside, and stores water mixed with the abrasive (abrasive mixed water). The abrasive mixture storage tank 22 is supplied with high-pressure water from the high-pressure pump 15 via the high-pressure pipe 11, and collects the abrasive material collected from the abrasive-collecting means 60 via the pipe 61. The abrasive mixed water containing is supplied.

  The tank switching device 23 is composed of, for example, a switching valve, and is connected to the two abrasive mixture storage tanks 22a and 22b via high-pressure pipes 24a and 24b, and connected to the injection nozzle 30 via the high-pressure pipe 21. Has been. The tank switching device 23 switches the pipe connection so that either one of the two abrasive mixed liquid storage tanks 22 a and 22 b communicates with the injection nozzle 30. The abrasive mixture storage tank 22a or 22b that is not in communication with the injection nozzle 30 is communicated with the abrasive recovery means 60 by opening the valve 611a or 611b.

  With the abrasive mixing means 20 having such a configuration, the abrasive and water stored in one of the abrasive mixed liquid storage tanks 22 are extruded at a high pressure by the pressure of the high-pressure water supplied from the high-pressure pump 15, and the high-pressure pipe The high-pressure abrasive mixed water can be sent to the injection nozzle 30 via the 24 and the high-pressure pipe 21. In the other abrasive mixture storage tank 22, the abrasive and water collected by the abrasive collection means 60 can be mixed and stored. When the abrasive in one abrasive mixture storage tank 22 decreases below a predetermined level, the abrasive mixture storage tank 22 is switched by the tank switching device 23, and the injection nozzle is changed in the same manner as described above. The supply of the abrasive mixed water to 30 and the storage of the abrasive from the abrasive recovery means 60 are performed simultaneously. Thereby, the high-pressure abrasive mixed water can be stably and continuously supplied to the spray nozzle 30. Note that three or more abrasive mixed liquid storage tanks 22 may be provided and used by switching them.

  Next, the catch tank 50 will be described. As described above, the catch tank 50 receives the jet of high-pressure abrasive mixed water (water jet J), which is injected from the injection nozzle 30 and cut through the workpiece 5, as a buffer material. The abrasive deposited on the bottom of the catch tank 50 is transferred to the abrasive recovery means 60 by the third transfer means. The third transfer means includes a pipe 51 communicating the bottom of the catch tank 50 and the abrasive recovery means 60, and a third pipe provided in the middle of the pipe 51 and serving as a power source for transferring the abrasive mixed water. And a positive pressure pump 59. A pipe 81 communicating with the low-pressure pump 85 is disposed at the bottom of the catch tank 50 as a water flow generating means to be described later so that its discharge port is adjacent to the suction port of the pipe 51.

  Next, the abrasive material recovery means 60 will be described with reference to FIGS. The abrasive recovery means 60 is an apparatus for recovering and reusing the abrasive from the abrasive mixed water transferred from the catch tank 50. As shown in FIGS. 2 and 3, the abrasive material recovery means 60 generally includes an abrasive material recovery container 64, an abrasive material storage container 66, a bottom portion of the abrasive material recovery container 64, and an abrasive material storage container 66. It is comprised from the connection part 65 which connects the upper part of.

  The abrasive material recovery container 64 is a sealed container for recovering a reusable abrasive material, and an abrasive material recovery filter 67 is provided substantially horizontally in the interior thereof. The abrasive material recovery filter 67 is made of, for example, a stainless steel wire net having a plurality of fine holes, and allows an abrasive material having a predetermined particle size (for example, 100 μm or less) to pass therethrough. In addition, on the upper part of the abrasive recovery container 64, for example, a vibration motor 63 is installed as vibration generating means for vibrating the abrasive recovery container 64 to improve clogging of the abrasive recovery filter 67.

  The upper space of this abrasive material recovery container 64 (the space above the abrasive material recovery filter 67) constitutes a flow path for recovering the abrasive material, and communicates with the catch tank 30 at one end. A pipe 51 is connected, and a pipe 62 communicating with the abrasive material separating means 70 is connected to the other end. For this reason, the abrasive mixture liquid transferred from the catch tank 50 flows into the upper space of the abrasive collection container 64 from the pipe 51 and passes over the abrasive collection filter 67 at a predetermined flow rate (for example, 8 liters / minute). It flows and is discharged from the pipe 62.

  With this configuration, only the abrasive having a particle size within a predetermined reusable range (for example, 30 to 100 μm) contained in the abrasive mixed water transferred from the catch tank 50 passes through the abrasive recovery filter 67, It falls down and is collected. Specifically, due to the flow rate of the abrasive mixture water flowing in the upper part of the abrasive collection container 64, an excessively small abrasive (particle size of, for example, less than 30 μm) can flow into the water stream without passing through the abrasive collection filter 67. It gets on and is discharged from the pipe 62. Further, an excessively large abrasive (particle size greater than 100 μm, for example) cannot be passed through the abrasive recovery filter 67 and is discharged from the pipe 62. For this reason, only the abrasive having a size within a predetermined range suitable for cutting (for example, 30 to 100 μm) is recovered through the abrasive recovery filter 67. On the other hand, the abrasive mixed water containing the abrasive having a size outside the predetermined range is transferred to the abrasive sorting means 70 via the pipe 62. This is because an excessively small abrasive cannot contribute to polishing even if it is reused, and an excessively large abrasive should cause the injection nozzle 30 to be clogged and should not be reused.

  The lower space of the abrasive material collection container 64 (the space below the abrasive material collection filter 67) has, for example, a funnel shape that collects the abrasive material collected through the abrasive material collection filter 67. ing. The recovered abrasive passes through the tubular connecting portion 65 from this lower space and falls into the abrasive storage container 66.

  The abrasive material storage container 66 is a sealed container that stores the abrasive mixed water containing the abrasive material recovered from the abrasive material recovery filter 67 as described above. The abrasive mixed water containing the abrasive deposited on the bottom of the abrasive storage container 66 is polished by the second transfer means of the two abrasive mixture supply tanks 22 that are not used for cutting. It is transferred to the material mixture supply tank 22. The second transfer means includes a pipe 61 that communicates the bottom of the abrasive material storage container 66 and the abrasive material mixture supply tank 22, and is provided in the middle of the pipe 61. And the second positive pressure pump 69.

  In addition, a measurement sensor, for example, an ultrasonic sensor 68 for measuring the accumulation amount (retention amount) of the abrasive in the abrasive material storage container 66 is attached to the upper part of the abrasive material storage container 66. When it is determined from the measurement result by the ultrasonic sensor 68 that the abrasive material is sufficiently accumulated in the abrasive material storage container 66, the abrasive material mixed water is supplied from the abrasive material storage container 66 to the abrasive material mixture storage tank 22. Be transported. As a result, an excessive amount of abrasive material is accumulated in the abrasive material storage container 66 and, conversely, a transfer operation is prevented even though the abrasive material is not sufficiently accumulated. it can.

  A pipe 83 communicating with a low-pressure pump 85 described later is connected to the upper part of the abrasive material storage container 66. The low-pressure pump 85 and the pipe 83 constitute an abrasive recovery filter cleaning means, which will be described in detail later. In addition, a pipe 82 communicating with the low-pressure pump 85 is disposed at the bottom of the abrasive material storage container 66 as a water flow generating means, which will be described later, so that its discharge port is adjacent to the suction port of the pipe 61. Further, a pipe 612 is connected to the upper part of the abrasive material storage container 66 so as to communicate with the abrasive material mixed liquid storage tank 22 and return the abrasive material mixed water in the abrasive material mixed liquid storage tank 22 to the abrasive material storage container 66. Has been.

  As described above, the abrasive material collecting means 60 collects only the abrasive material having a predetermined particle size suitable for cutting (for example, a range of 30 to 100 μm) by the abrasive material collecting filter 67 and collects the abrasive material storage container. Then, the recovered abrasive is transferred to the abrasive mixture supply tank 22 and reused.

  Next, a mechanism for preventing clogging of the abrasive recovery filter 67 in the abrasive recovery means 60 will be described with reference to FIG.

  The abrasive material recovery filter 67 is not impossible to replace, but is difficult to replace and expensive, and therefore cannot be replaced frequently. For this reason, it is required to eliminate clogging of the abrasive recovery filter 67 due to the abrasive. As described above, the entire abrasive recovery means 60 is vibrated by the vibration generating means composed of the vibration motor 63 so that the abrasive on the abrasive recovery filter 67 is screened. It is possible to prevent clogging of the abrasive material to a certain extent.

  However, even if this vibration generating means is used, there is a problem that the abrasive is gradually clogged in the abrasive recovery filter 67 if it is continuously used for a long period of time. In order to solve such a problem, the abrasive recovery means 60 according to the present embodiment is provided with an abrasive recovery filter cleaning means. As described above, the abrasive material recovery filter cleaning means introduces the low pressure water from the low pressure pump 85 for supplying the low pressure water, and discharges it into the abrasive material storage container 66 of the abrasive material recovery means 60. And a pipe 83.

  As shown in FIG. 4, this abrasive material recovery filter cleaning means flows low-pressure water into the upper part of the abrasive material storage container 66 of the abrasive material recovery means 60, thereby reducing the level of the stored water in the abrasive material recovery means 60. For example, the level is raised from the level located in the upper part of the abrasive material storage container 66 (level shown in FIG. 2) to the level above the abrasive material recovery filter 67 in the abrasive material recovery container 64 (level shown in FIG. 4). As a result, the abrasive material recovery filter cleaning means causes the water flow 671 to pass through the abrasive material recovery filter 67 from the abrasive material storage container 67 side (lower side) to the opposite side (upper side) of the abrasive material recovery filter 67. generate. As a result, the clogging of the abrasive material collecting filter 67 can be eliminated by pushing away the abrasive material adhering to the upper surface side of the abrasive material collecting filter 67 by the water flow 671.

  A valve 831 is provided in the pipe 83 constituting such an abrasive recovery filter cleaning means. By opening / closing this valve 831, the supply of low-pressure water to the abrasive material storage container 67 can be controlled, and the cleaning operation of the abrasive material recovery filter 67 can be started / stopped.

  Further, it may be controlled to automatically start the cleaning operation by the abrasive material recovery filter cleaning means based on the change in the abrasive material accumulation amount in the abrasive material storage container 66. Specifically, for example, by using the ultrasonic sensor 68 described above, the amount of accumulated abrasive material in the abrasive material storage container 66 is continuously measured, and the rate of increase of this abrasive material accumulated amount is monitored. As a result of this monitoring, when the rate of increase in the amount of accumulated abrasive material drops below a predetermined reference rate of increase, it is determined that the abrasive material recovery filter 67 is clogged severely and the abrasive material recovery filter cleaning means is activated (ie, , The valve 831 is opened and water is supplied into the abrasive material storage container 66 from the pipe 83), and the cleaning operation of the abrasive material recovery filter 67 is started. With this control, the cleaning operation by the abrasive recovery filter cleaning means can be automatically executed according to the clogged state of the abrasive recovery filter 67. Of course, the operator may manually control the operation of the abrasive material recovery filter cleaning means.

  It should be noted that the cleaning operation of the abrasive material recovery filter 67 as described above can be performed at any time regardless of whether the water jet apparatus 1 is cutting or stopping the cutting process. The cleaning operation of the abrasive recovery filter 67 is also performed when the water jet cutting device 1 is started.

  Further, regarding the supply position of the low-pressure water to the abrasive recovery means 60 (that is, the connection location of the pipe 83), according to the results of experiments by the inventors of the present application, the pipe 83 is provided above the abrasive storage container 66. It was found that the best cleaning effect was obtained when connected. However, the present invention is not limited to this example, and the connection portion of the pipe 83 may be an arbitrary portion of the abrasive material recovery means 60 as long as it is below the abrasive material recovery filter 67.

  Next, the abrasive sorting means 70 will be described with reference to FIGS. The abrasive material separating means 70 collects the abrasive material having a reusable particle size that could not be collected by the abrasive material collecting means 60, and the abrasive material or cutting waste that clogs the drainage path in the drainage. It is an apparatus for removing so that it may not be included.

  As described above, in the configuration of the water jet cutting device shown in FIG. 6, the abrasive mixed water containing the abrasive that has not been collected by the abrasive collecting means 160 has been treated as drainage. However, as described above, not all of the reusable abrasives can pass through the abrasive recovery filter, so about 8% of the abrasives that should be recovered cannot be recovered. This has been a factor in increasing production costs.

  Further, when the abrasive mixed water containing an abrasive having a predetermined size (for example, 10 μm) or more is drained as it is into a drainage channel such as a drainage channel, the drainage channel is clogged. In particular, an excessively large abrasive (for example, larger than 100 μm) is considered to be a major factor. In addition, it was found that the cutting waste contained in the abrasive mixture water also clogs the drainage path.

  For this reason, in the water jet cutting device 1 according to the present embodiment, the abrasive mixed water containing the abrasive not recovered by the abrasive recovery means 60 is appropriately treated from the viewpoint of both the recovery efficiency and the drainage surface. Accordingly, an abrasive material separating means 70 is newly provided.

  As shown in FIGS. 2 and 5, the abrasive material separating means 70 is roughly composed of an abrasive material recovery tank 74 and a drainage tank 76. The abrasive recovery tank 74 and the drainage tank 76 are configured, for example, by dividing one water tank into two parts by a partition wall 741 provided substantially vertically at the center.

  First, the abrasive material recovery tank 74 of the abrasive material separating means 70 will be described. The abrasive recovery tank 74 functions as a precipitation tank for precipitating and recovering an abrasive having a reusable particle size. Specifically, the abrasive mixed water is transferred to the abrasive recovery tank 74 from the abrasive recovery means 60 via the pipe 62. For this reason, among the abrasive mixture water transferred to the abrasive recovery means 60, the abrasive having a higher specific gravity than the water settles and deposits (ie, precipitates) at the bottom of the abrasive recovery tank 74. The abrasive that precipitates in this way is an abrasive having a reusable particle size (for example, 30 to 100 μm) that should be recovered by passing through the abrasive recovery filter 67. On the other hand, most of the abrasive having a relatively small particle size (for example, less than 30 μm) floats in the stored water in the abrasive recovery tank 74.

  As described above, the abrasive mixed water containing the abrasive precipitated at the bottom of the abrasive recovery tank 74 is transferred to the catch tank 50 by the first transfer means. The first transfer means includes a pipe 71 that communicates the bottom of the abrasive recovery tank 74 and the catch tank 50, and a first supply means that is provided in the middle of the pipe 71 and serves as a transfer power source for the abrasive mixed water. And a positive pressure pump 79. A pipe 84 communicating with the low-pressure pump 85 is disposed at the bottom of the abrasive recovery tank 74 as a water flow generating means to be described later so that its discharge port is adjacent to the suction port of the pipe 71. .

  As described above, the reusable abrasive collected in the abrasive recovery tank 74 and transferred to the catch tank 50 is deposited on the bottom of the catch tank 50 and then transferred again to the abrasive recovery means 60 to be recovered. It becomes. As described above, the abrasive recovery tank 74 of the abrasive material separating means 70 precipitates and collects the reusable abrasive material that has not been recovered by the abrasive material recovery means 60, thereby improving the efficiency of abrasive recovery. Improves production costs.

  In addition, an abrasive replenishing port 75 for initially charging or replenishing a new abrasive from the outside is provided at an upper portion of the abrasive recovery tank 74. Further, on one side of the abrasive material replenishing port 75, an inclined plate 751 for guiding the abrasive material into the abrasive material collecting tank 74 is installed so that the abrasive material can be easily introduced from the abrasive material replenishing port 75. . For this reason, the operator can easily replenish the abrasive from the abrasive replenishment port 75 and circulate it in the apparatus until it is consumed.

  In the water jet apparatus shown in FIG. 6, the operator replenishes the catch tank 150 with a new abrasive. However, since the catch tank 150 is a portion that receives the water jet J ejected from the ejection nozzle 130, for example, when a new abrasive is replenished during the cutting process, there is a risk that the operator may be damaged by the water jet J. Therefore, in order to replenish the abrasives safely, the device must be stopped once, but it takes a long time to restart the water jet cutting device, which significantly reduces the production efficiency. It was.

  In order to solve such a problem, the water jet cutting device 1 according to the present embodiment employs a configuration in which the abrasive is replenished to the abrasive sorting means 70 as described above. With this configuration, it is possible to replenish new abrasives safely during the cutting process without restarting the water jet cutting device 1. Further, since the process until the newly replenished abrasive reaches the abrasive mixed liquid storage tank 22 can be lengthened, there is also an advantage that the abrasive can be more evenly mixed.

  Next, the drainage tank 76 of the abrasive material separating means 70 will be described. The drainage tank 76 is a tank that temporarily stores the abrasive mixture water overflowing from the upper part of the abrasive collection tank 74 in order to discharge it to the outside of the apparatus. The drainage tank 76 is provided with an unnecessary material removal filter 77. The unnecessary material removing filter 77 is, for example, a paper or cloth filter, and removes unnecessary materials having a predetermined particle diameter (for example, 10 μm) or more from the liquid passing therethrough.

  As described above, the abrasive mixed water overflowing from the upper part of the abrasive recovery tank 74 flows into the drainage tank 76 through the through hole 742 formed in the partition wall 741. This abrasive mixed water contains cutting scraps having a specific gravity lower than that of water and abrasives having a minute particle size (for example, less than 30 μm) suspended in water. When the abrasive mixed water passes through the unnecessary material removal filter 77, cutting waste and abrasives having a predetermined particle diameter (for example, 10 μm) or more that may clog the drainage path are removed. The unnecessary material removal filter 77 is periodically replaced according to, for example, the accumulation state of unnecessary materials.

  Further, the drainage tank 76 and the water distribution pipe 72 are also configured as discharge means for discharging the used abrasive mixture liquid to the outside as drainage. Specifically, the drainage tank 76 receives the abrasive mixed water (that is, the waste water) that has passed through the unnecessary material removal filter 77 as described above. The drainage that has reached the drainage tank 76 in this manner is temporarily stored in the drainage tank 76 and then discharged from a drain pipe 72 provided at the bottom of the drainage tank 76 to be discharged outside the apparatus. It is discarded through the route. At this time, cutting waste and abrasives having a predetermined particle diameter or larger that may clog the drainage path are removed in advance by the unnecessary material removal filter 77, so that the wastewater from the drainage tank 76 is drained. The route is not clogged. Note that when the unnecessary material removal filter 77 of the above example is used, for example, a fine abrasive having a particle size of 10 μm or less is included in the waste water without being removed. Since it does not accumulate in the drainage channel, no problem occurs even if it is discharged.

  Next, based on FIG. 2, the mechanism for transferring the abrasive mixed water between the above devices will be described in detail.

  As described above, the bottom of the catch tank 50, the bottom of the abrasive material storage container 66 of the abrasive material recovery means 60, and the bottom of the abrasive material recovery tank 74 of the abrasive material separation means 70 are deposited on the bottom of each device. In order to assist the transfer of the abrasive material being transferred through the pipes 51, 61, 71, water flow generating means are respectively provided. This water flow generating means is constituted by pipes 81, 82, 84 for discharging low-pressure water supplied from the low-pressure pump 85 to the vicinity of the suction ports of the pipes 51, 61, 71 in each apparatus. Such water flow generating means discharges the low-pressure water in this way, and the water flow that guides the abrasive mixed water containing the abrasive deposited at the bottom of each apparatus into the pipes 51, 61, 71. Is generated. The water flow generating operation by each water flow generating means is controlled by opening and closing valves 811, 821, 841 provided in the pipes 81, 82, 84.

  Note that each water flow generating means according to the present embodiment is composed of, for example, pipes 81, 82, 84 branched from the same low-pressure pump 85 from the viewpoint of device cost. However, the present invention is not limited to this, and each pipe may be constituted by a pipe led from an independent low-pressure pump or the like.

  Here, the reason why such a water flow generating means is provided will be described. When the water jet cutting apparatus 1 is started, the abrasives produced by drying the abrasive mixture liquid that flowed in the past are deposited in the pipes 51, 61, 71. For this reason, the accumulated abrasive must be washed away so that the abrasive mixture is smoothly circulated in the pipes 51, 61, 71. However, it is difficult to discharge the abrasive deposited and adhered to the inside of the pipes 51, 61, 71 only by the outputs of the positive pressure pumps 59, 69, 79. Therefore, when the water jet cutting device 1 is started, water is forced into the pipes 51, 61, 71 by the water flow generating means, and the fixed abrasive is pushed and discharged by the water flow.

  The operation at the time of starting of such a water jet cutting device 1 will be specifically described. At the time of startup, the valve 811 of the water flow generation means (pipe 81) corresponding to the catch tank 50 is opened, and water flows into the pipe 51 that connects the catch tank 50 and the abrasive material recovery means 60 by this water flow generation means. At the same time, the valve 831 of the abrasive recovery filter cleaning means (pipe 83) in the abrasive storage container 66 of the abrasive recovery means 60 is opened, and a water flow passing from the lower side to the upper side of the abrasive recovery filter 67 is generated. Then, the abrasive recovery filter 67 is cleaned. The water that has passed through the polishing recovery filter 67 merges with the water that has been transferred from the catch tank 50 via the pipe 51, and is used for recovering the abrasive of the abrasive sorting means 70 from the abrasive recovery means 60 via the pipe 62. It flows into the tank 74.

  In such a state, the third positive pressure pump 59 is started, and the pipes 51 and 62 constituting the circulation path of the catch tank 50 → the abrasive material collecting means 60 → the abrasive material separating means 70 are used, The abrasive liquid mixture is transferred.

  By starting up as described above, first, water is caused to flow into the pipes 51 and 62 by the water flow generating means, the abrasive in the pipes 51 and 62 is removed by this water flow, and then the third positive pressure pump 59 is supplied. Thus, the abrasive mixture liquid can be transferred through the pipes 51 and 62.

  Further, when the water jet cutting device 1 is started, the valve 821 of the water flow generating means (pipe 82) corresponding to the abrasive recovery means 60 is opened and the water flow generating means (pipe 84) corresponding to the abrasive sorting means 70 is opened. Valve 841 is also opened. Thus, in the same manner as described above, the pipe 61 for communicating the abrasive recovery means 60 and the abrasive mixed liquid storage tank 22 with each water flow generating means, and the pipe for communicating the abrasive separating means 60 and the catch tank 50 with each water flow generating means. 71, water is poured into the pipes 71, 71 to remove the abrasives adhering in the pipes 61, 71, and then the first and second positive pressure pumps 79, 69 are operated, respectively. The abrasive liquid mixture is transferred through the pipes 71 and 62, respectively.

  Here, the timing for starting each of the positive pressure pumps 59, 69, 79 will be described. As described above, when water flows to the layouts 51, 61, 71 by the water flow generating means, the positive pressure pumps 59, 69, 79 are driven by the water flow. Therefore, the driven operation of the positive pressure pumps 59, 69, 79 is measured by a pulse signal or the like, and based on the measurement result, the flow velocity in each of the layouts 51, 61, 71 becomes a flow velocity higher than a predetermined reference flow velocity. The positive pressure pumps 59, 69, 79 are controlled to be started at the determined timing.

  Next, the positive pressure pumps 79, 69, 59, which are power sources for transferring the abrasive mixed water, will be described. As described above, the first, second, and third transfer means for transferring the abrasive mixed water between the above apparatuses are the pipes 71, 61, 51 and the positive pressure pump 79, which is a transfer power source, respectively. 69, 59.

  Thus, in the water jet cutting device 1 according to the present embodiment, the positive pressure pumps 79, 69, and 59 are used as the power source for transferring the abrasive mixed water, not the negative pressure pumps that are generally used. Yes. In a device to which the abrasive mixed water is transferred (for example, a sealed container such as the abrasive mixed liquid storage tank 22 and the abrasive collecting means 60), the sealed state of the device may be loosened for some reason. Although it is technically possible to maintain the sealed state permanently, it is not cost effective, so in the water jet cutting device 1 according to this embodiment, the transfer destination device has a certain level of sealed state. Designed to anticipate the slack of.

  In the water jet cutting device 1 having such a device design, when a negative pressure pump is used as a transfer power source, the transfer power is obtained by sucking the air in the transfer destination device. Air enters the transfer destination apparatus from the outside through the loosened portion. On the other hand, when a positive pressure pump is used as the transfer power source, the liquid is sent to the transfer destination device side by the transfer power. It will leak to the outside from the place where the seal is loose.

  For example, in the abrasive mixed liquid storage tank 22, when a positive pressure pump is used, the abrasive mixed liquid leaks to the outside. Water leakage measures such as providing members are required. Therefore, normally, it is considered preferable to use a negative pressure pump that eliminates the need for such water leakage treatment.

  However, when a negative pressure pump is used, air enters the abrasive mixture storage tank 22 as described above, and as a result, air is mixed into the abrasive mixture. Thus, it was found that when the abrasive mixed liquid mixed with air is sprayed from the spray nozzle 30, the quality of the cut surface of the workpiece 5 is significantly deteriorated. The cutting quality is an important factor that affects the performance of the water jet apparatus 1 itself, and should be given priority over other factors. Therefore, in the water jet cutting device 1 according to the present embodiment, the positive pressure pumps 79, 69, and 59 are used as a power source for transferring between the devices even if additional costs are required due to the water leakage treatment as described above. This prevents the cutting quality from being degraded.

  The configuration and operation of the water jet cutting device 1 according to the present embodiment have been described in detail above. According to the water jet cutting apparatus 1, the abrasive can be automatically circulated in the apparatus, and the abrasive can be reused efficiently and without affecting the environment.

  That is, by the abrasive material separating means 70, the reusable abrasive material that could not be recovered by the abrasive material separating means 70 can be recovered and reused, so that the recovery efficiency of the abrasive material can be improved and the production cost can be improved. .

  Further, the abrasive material separating means 70 separates the reusable abrasive material and the worn and non-reusable abrasive material and cutting waste, and further accumulates the consumed abrasive material and cutting waste in the drainage path. A thing having a size that can be removed can be drained after being collected and removed by an unnecessary material removal filter 77. For this reason, it is possible to prevent the drainage path from being clogged due to accumulation of the abrasive and cutting waste.

  Further, by providing the abrasive material replenishing port 75 in the abrasive material separating means 70, when the new abrasive material is replenished during the cutting process, the operator can replenish the abrasive material safely, and the abrasive material can be mixed more smoothly. It can be carried out.

  Further, by providing the abrasive material recovery means 60 with the abrasive material recovery filter cleaning means, clogging of the abrasive material recovery filter 67 can be eliminated. For this reason, the amount that the reusable abrasive flows into the abrasive material separating means 70 increases with time and the load of the abrasive material separating means 70 is increased. Long life can be achieved.

  Further, by using positive pressure pumps 59, 69, and 79 instead of a negative pressure pump as a means for transferring the abrasive mixture, the abrasive mixture is circulated in the apparatus, in particular, the abrasive mixture is stored. Since air can be prevented from being mixed into the abrasive mixture in the tank 22, it is possible to prevent deterioration in cutting quality.

  The preferred embodiments and examples of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be obvious to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, the workpiece 5 may be a semiconductor substrate such as various semiconductor wafers, a CSP substrate, a GPS substrate, a package substrate such as a BGA substrate, or the like. Further, the workpiece may be a sapphire substrate, a glass material, a ceramic material, a metal material, a synthetic resin material such as plastic, or an electronic material substrate for forming a magnetic head, a laser diode head, or the like. . Further, the shape of the workpiece 5 may be an arbitrary shape such as a substantially rectangular plate shape or a substantially disk shape.

  Moreover, although the said embodiment demonstrated the example which employ | adopted the water jet cutting device 1 as a high pressure liquid injection type cutting device, this invention is not limited to this example. The high-pressure liquid injection type cutting device can be variously modified as long as it has high-pressure liquid injection means for injecting high-pressure liquid and can cut and process a workpiece by high-pressure liquid injection. For example, the liquid to be jetted and stored is not limited to the above water example, and may be any liquid such as alcohol or oil, or a liquid in which various chemical substances are dissolved in various solvents. There may be.

  Further, by providing a plurality of sets of high-pressure liquid injection means (injection nozzles 30 and the like) and catch tanks 50 in one high-pressure liquid injection type cutting device, a plurality of locations in a single workpiece 5 or a plurality of You may comprise so that the to-be-processed object 5 of this can be cut simultaneously. This configuration can be applied, for example, when cutting a package substrate in which a plurality of package portions are formed on one metal frame.

  In the above embodiment, the abrasive recovered by the abrasive material separating means 60 is transferred to the catch tank 50 via the pipe 71 and reused. However, the present invention is not limited to this example, and the abrasive material recovering means 60 is used. Alternatively, it may be transferred to the abrasive mixture storage tank 22 and reused.

  Further, the abrasive material recovery means 60 does not necessarily have to be composed of two mutually closed airtight containers of the abrasive material recovery container 64 and the abrasive material storage container 66 as in the above-described embodiment. You may be comprised with an airtight container.

  The present invention is applicable to a high-pressure liquid injection type cutting device that cuts a workpiece by injection of a high-pressure liquid mixed with an abrasive.

It is the schematic which shows the whole structure of the water jet cutting device concerning the 1st Embodiment of this invention. It is explanatory drawing which shows the circulation structure for automatically recycle | reusing an abrasive | polishing material in the water jet cutting device concerning the embodiment. It is a perspective view which shows the external appearance structure (a) and internal structure (b) of the abrasive | polishing material collection | recovery means concerning the embodiment. FIG. 5 is a cross-sectional view showing a state where the abrasive recovery filter cleaning means is operated in the abrasive recovery means according to the same embodiment. It is a perspective view which shows the internal structure of the abrasive material classification means concerning the embodiment. It is explanatory drawing which shows the circulation structure for automatically recycle | reusing an abrasive | polishing material in the conventional water jet cutting device.

Explanation of symbols

1: Water jet cutting device 5: Work piece 10: High pressure liquid supply means 15: High pressure pump 20: Abrasive material mixing means 22: Abrasive material mixed liquid storage tank 30: Injection nozzle 40: Holding table 42: Table moving device 50: Catch tank 51: Piping 59: Third positive pressure pump 60: Abrasive recovery means 61: Piping 64: Abrasive recovery container 66: Abrasive storage container 67: Abrasive recovery filter 68: Ultrasonic sensor 69: Second Positive pressure pump 70: Abrasive material separating means 71: Piping 72: Drain pipe 74: Abrasive material collection tank 75: Abrasive material replenishment port 76: Drainage tank 77: Unnecessary substance removal filter 79: First positive pressure pump 80 : Low pressure liquid supply means 85: Low pressure pump J: Water jet

Claims (4)

An abrasive mixed liquid storage tank for storing an abrasive mixed liquid in which an abrasive and a liquid are mixed;
High-pressure liquid supply means for feeding the abrasive mixture liquid stored in the abrasive mixture storage tank at high pressure by supplying high-pressure liquid to the abrasive mixture storage tank;
An injection nozzle that injects a high-pressure abrasive mixture sent from the abrasive mixture storage tank to the workpiece;
A catch tank for receiving a high-pressure abrasive mixed liquid sprayed from the spray nozzle;
Abrasive material having a predetermined range of particle size that can be reused is recovered from the abrasive mixture liquid transferred from the catch tank, and the abrasive mixture liquid containing the recovered abrasive material is stored in the abrasive mixture storage tank. Abrasive material recovery means to be transferred;
In the high-pressure liquid-jet cutting device with:
From the abrasive recovery means, an abrasive mixed liquid containing the abrasive that has not been recovered by the abrasive recovery means is transferred, and abrasives having a reusable particle size are separated from the abrasive mixed liquid, and the catch is collected. Abrasive material separation means that separates and removes abrasive material of particle size that cannot be discharged while being transferred to the tank ;
Bei to give a,
The high-pressure liquid jet cutting apparatus according to claim 1, wherein the abrasive material separating means is provided with an abrasive replenishing port through which the abrasive can be replenished from outside during the cutting process by the high-pressure liquid jet cutting apparatus. The abrasive material separating means is:
An abrasive liquid mixture containing an abrasive material transferred from the abrasive material recovery means and not recovered by the abrasive material recovery means is stored, and an abrasive material of the reusable particle size contained in the abrasive material mixture liquid is stored. An abrasive collection tank to be precipitated;
First transfer means for transferring the abrasive mixture liquid containing the reusable particle size abrasive deposited at the bottom of the abrasive recovery tank to the catch tank;
An unnecessary material removal filter that filters the abrasive mixture liquid overflowing from the abrasive recovery tank and removes the abrasive having a particle size that cannot be discharged;
A discharge means for discharging the abrasive mixture liquid that has passed through the unwanted matter removal filter;
The high-pressure liquid-jet cutting device according to claim 1, comprising: The abrasive recovery means includes
An abrasive recovery filter that allows passage of the recyclable abrasive having a particle size in the abrasive mixture transferred from the catch tank;
An abrasive storage container for storing the abrasive that has passed through the abrasive recovery filter;
A second transfer means for transferring an abrasive mixed liquid containing the abrasive stored in the abrasive storing container to the abrasive mixed liquid storage tank;
By supplying a liquid to the abrasive storage container, a liquid flow is generated so as to pass through the abrasive recovery filter from the abrasive storage container side to the opposite side, and the abrasive recovery filter is clogged. An abrasive recovery filter cleaning means for removing the material;
The high-pressure liquid-jet cutting device according to claim 1 or 2 , characterized by comprising: A first transfer means for transferring an abrasive mixture from the abrasive separation means to the catch tank; a second transfer means for transferring an abrasive mixture from the abrasive collection means to the abrasive mixture storage tank; And / or the third transfer means for transferring the abrasive mixture from the catch tank to the abrasive recovery means comprises a positive pressure pump as a transfer power source . The high-pressure liquid jet cutting device according to any one of the above.

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