JP2006130425A5 - - Google Patents
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- Publication number
- JP2006130425A5 JP2006130425A5 JP2004323117A JP2004323117A JP2006130425A5 JP 2006130425 A5 JP2006130425 A5 JP 2006130425A5 JP 2004323117 A JP2004323117 A JP 2004323117A JP 2004323117 A JP2004323117 A JP 2004323117A JP 2006130425 A5 JP2006130425 A5 JP 2006130425A5
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- producing
- less
- oxide film
- film according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004323117A JP4359674B2 (ja) | 2004-11-08 | 2004-11-08 | 光触媒酸化チタン膜の高速成膜方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004323117A JP4359674B2 (ja) | 2004-11-08 | 2004-11-08 | 光触媒酸化チタン膜の高速成膜方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006130425A JP2006130425A (ja) | 2006-05-25 |
| JP2006130425A5 true JP2006130425A5 (enrdf_load_stackoverflow) | 2006-12-14 |
| JP4359674B2 JP4359674B2 (ja) | 2009-11-04 |
Family
ID=36724430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004323117A Expired - Fee Related JP4359674B2 (ja) | 2004-11-08 | 2004-11-08 | 光触媒酸化チタン膜の高速成膜方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4359674B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101935819B (zh) * | 2010-09-28 | 2012-08-22 | 四川农业大学 | 在钛或钛合金材料表面原位生长二氧化钛薄膜的制备方法 |
| JP6163064B2 (ja) * | 2013-09-18 | 2017-07-12 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6106676A (en) * | 1998-04-16 | 2000-08-22 | The Boc Group, Inc. | Method and apparatus for reactive sputtering employing two control loops |
| JP2002348665A (ja) * | 2001-05-24 | 2002-12-04 | Toto Ltd | 結晶性酸化チタン薄膜の高速成膜方法 |
| JP3809347B2 (ja) * | 2001-06-25 | 2006-08-16 | 富山県 | 光触媒層の成膜方法 |
| JP2003093896A (ja) * | 2001-07-19 | 2003-04-02 | Toto Ltd | 光触媒性酸化チタン膜の成膜方法 |
| JP2003049265A (ja) * | 2001-08-08 | 2003-02-21 | Toto Ltd | 光触媒性酸化チタン膜の成膜方法 |
| JP2003117404A (ja) * | 2001-10-19 | 2003-04-22 | Bridgestone Corp | 光触媒の製造方法及び光触媒 |
| JP2006134603A (ja) * | 2004-11-02 | 2006-05-25 | Bridgestone Corp | 触媒構造体及びそれを用いた固体高分子型燃料電池用膜電極接合体 |
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2004
- 2004-11-08 JP JP2004323117A patent/JP4359674B2/ja not_active Expired - Fee Related